Electron beam window, cooling system and beam current testing equipment

Abstract

The invention discloses an electron beam window, a cooling system and beam test equipment, and relates to the technical field of beam test equipment, the electron beam window comprises a beam window, the beam window comprises a cooling side and a receiving side, a cooling pipe is laid on the cooling side, the cooling side is provided with an accommodating groove, the cooling pipe is embedded in the accommodating groove, cooling liquid circulates in the cooling pipe, heat of the beam window can be taken away, and the receiving side is provided with the receiving side. Temperature rise of equipment is avoided, and the structural strength of the beam window can be maintained. The flowing direction of the cooling liquid is perpendicular to the direction in which the electron beams are emitted to the receiving side, the cooling liquid can make contact with the high-temperature part in the beam window, and the cooling effect can be improved. The receiving side is used for reflecting the electron beam and is provided with an inwards-sunken spherical surface, the electron beam falls on the spherical surface, radiation recoil generated by the electron beam in the axis direction of the beam window is avoided, and therefore radiation is prevented from being transmitted to the outside to affect personal safety. The cooling system comprises a pump body, a controller and a temperature sensor and is used for detecting and controlling the working temperature of the beam window.

Description

Technical Field

[0001] The invention relates to the technical field of accelerators, and in particular to an electron beam window, a cooling system and beam testing equipment. Background Art

[0002] Electron beam window equipment is widely used in the field of accelerators, especially in synchrotron radiation and free electron laser devices. Electron beam windows are mainly used to isolate and protect the ultra-high vacuum environment of accelerators. In electron beam test equipment, electron beam spot size test and electron beam power test are required. After the test, the electron beam is shot into the beam window for collection. Since the electron beam hitting the electron beam window will cause the temperature of the equipment to rise, in an ultra-high vacuum environment, the temperature rise of the equipment will cause gas particles to precipitate from the components, resulting in a continuous increase in the environmental pressure inside the equipment. As a result, too many gas particles will interfere with the electron beam test and cause inaccurate data. In addition, the beam energy and repetition frequency are constantly increasing, which poses certain challenges to the design of electron beam windows. Traditional thin-walled beam windows will have structural failure problems after long-term operation. The size of the beam spot needs to be strictly controlled to avoid the risk of failure of the structural strength, which is difficult to control. Summary of the invention

[0003] The present invention aims to solve at least one of the technical problems existing in the prior art. To this end, the present invention provides an electron beam window, a cooling system and a beam current testing device, which can control the temperature rise, ensure the test accuracy and improve the beam window structure strength.

[0004] An electron beam window according to an embodiment of a first aspect of the present invention comprises: The beam window includes a cooling side and a receiving side. The cooling side is provided with a cooling pipe. The cooling side is provided with a receiving groove. The cooling pipe is embedded in the receiving groove. Cooling liquid flows in the cooling pipe. The flow direction of the cooling liquid is perpendicular to the direction in which the electron beam is emitted toward the receiving side. The receiving side is used to reflect the electron beam. The receiving side is provided with an inwardly concave spherical surface, and the electron beam falls on the spherical surface.

[0005] An electron beam window according to an embodiment of the first aspect of the present invention has at least the following beneficial effects: This embodiment is provided with a beam window, which includes a cooling side and a receiving side. The cooling side is provided with a cooling pipe, and the cooling side is provided with a receiving groove. The cooling pipe is embedded in the receiving groove. Cooling liquid flows in the cooling pipe, which can take away the heat of the beam window, avoid the temperature rise of the equipment, and help maintain the structural strength of the beam window. The flow direction of the coolant is perpendicular to the direction of the electron beam toward the receiving side. The coolant can contact the parts with higher temperatures in the beam window, which is conducive to improving the cooling effect. The receiving side is used to reflect the electron beam. The receiving side is provided with an inwardly concave spherical surface. The electron beam falls on the spherical surface, which prevents the electron beam from generating radiation recoil along the axial direction of the beam window, thereby preventing the radiation from being transmitted to the outside and affecting personal safety.

[0006] According to an embodiment of the first aspect of the present invention, along the axis of the beam window, the maximum depth of the spherical surface is less than half of the thickness of the beam window, and the minimum thickness of the beam window is located on the axis of the beam window.

[0007] According to an embodiment of the first aspect of the present invention, a beam window is provided with a mounting assembly, the mounting assembly includes two detachably mounted connecting flanges, the connecting flanges include a connecting side and a sealing side, a sealing ring is arranged between the two connecting flanges, both sides of the sealing ring are pressed against the sealing sides of the two connecting flanges to achieve detachable sealing between the two connecting flanges, the beam window is fixedly connected to the connecting side of any one of the connecting flanges, and the receiving side of the beam window faces the connecting side.

[0008] According to an embodiment of the first aspect of the present invention, the connecting flange includes a first flange and a second flange, and the beam window is fixed to the first flange by welding.

[0009] According to an embodiment of the first aspect of the present invention, a concave connection groove is provided on the connection side, the beam window is embedded in the connection groove, and the depth of the connection groove is not less than half of the thickness of the beam window.

[0010] According to an embodiment of the first aspect of the present invention, a plurality of surrounding welding grooves are provided on the outer peripheral wall of the beam window, and the plurality of welding grooves are all located in the connecting groove.

[0011] According to an embodiment of the first aspect of the present invention, the cooling pipe is provided with a plurality of loop portions, the ends of two adjacent loop portions are connected, and the loop portion includes at least a curved section and a straight section, and the straight section is connected to one end of the curved section.

[0012] According to an embodiment of the first aspect of the present invention, the maximum depth of the accommodating groove is not less than half of the outer diameter of the cooling pipe.

[0013] According to an embodiment of a second aspect of the present invention, there is provided a cooling system, which is applied to the aforementioned electron beam window, comprising: The pump body is provided with a hot pipe and a cold pipe, the cold pipe is connected to the water inlet end of the cooling pipe, and the hot pipe is connected to the water discharge end of the cooling pipe. Temperature sensors are provided on the cold pipe and the hot pipe, and a flow meter is also provided on the cold pipe; The controller is electrically connected to the pump body, the temperature sensor and the flow meter. The pump body injects coolant into the cooling pipe through the cold pipe and discharges the coolant through the heat pipe to take away the heat of the beam window. The controller can control the liquid supply rate of the pump body according to the value of the temperature sensor on the heat pipe.

[0014] A cooling system according to an embodiment of the second aspect of the present invention has at least the following beneficial effects: This embodiment includes a pump body and a controller. The pump body is provided with a hot pipe and a cold pipe. The cold pipe is connected to the water inlet end of the cooling pipe, and the hot pipe is connected to the drain end of the cooling pipe. Temperature sensors are provided on the cold pipe and the hot pipe. The cold pipe is also provided with a flow meter. The controller is electrically connected to the pump body, the temperature sensor and the flow meter. The pump body injects coolant into the cooling pipe through the cold pipe, and discharges the coolant through the hot pipe to take away the heat of the beam window. The controller can control the liquid supply rate of the pump body according to the value of the temperature sensor on the heat pipe, thereby realizing real-time flow control to meet the requirement of maintaining a stable working temperature of the beam window under different working conditions, which is conducive to ensuring the stability of equipment operation.

[0015] According to an embodiment of a third aspect of the present invention, there is provided a beam testing device, comprising the above-mentioned electron beam window, including: A waste beam barrel, in which the beam window is located, is used to absorb the radiation generated after the electron beam enters the beam window.

[0016] A beam testing device according to an embodiment of the third aspect of the present invention has at least the following beneficial effects: Compared with the prior art, the beam test equipment includes an electron beam window, and a cooling pipe is provided on the cooling side of the electron beam window. The cooling pipe is filled with coolant, which can take away the heat on the electron beam window, avoid the vacuum degree drop caused by the temperature rise of the equipment, and ensure the stability of the electron beam test process. It also includes a waste beam barrel, in which the beam window is located, and the waste beam barrel is used to absorb the radiation generated after the electron beam enters the beam window to prevent the radiation from leaking to the outside and ensure the safety of personnel.

[0017] Additional aspects and advantages of the present invention will be given in part in the following description and in part will be obvious from the following description, or will be learned through practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] The present invention will be further described below with reference to the accompanying drawings and embodiments, wherein: Figure 1 An isometric view of an electron beam window in an embodiment of the first aspect of the present invention; Figure 2 is a cross-sectional view of an electron beam window in an embodiment of the first aspect of the present invention; Figure 3 for Figure 2 A magnified view of center A; Figure 4 for Figure 2 Magnified view of middle B; Figure 5 An exploded view of an electron beam window in an embodiment of the first aspect of the present invention; Figure 6 A schematic diagram of a cooling system in an embodiment of the second aspect of the present invention; Figure 7 It is a schematic diagram of a beam testing device in an embodiment of the third aspect of the present invention.

[0019] Reference numerals: beam window 100; cooling tube 101; receiving groove 102; welding groove 103; loop portion 104; curved section 105; straight section 106; spherical surface 107; cooling side 108; receiving side 109; Mounting assembly 110; first flange 111; second flange 112; connection side 113; sealing side 114; sealing ring 115; connection groove 116; sealing groove 117; flange 118; connection pipe 119; Cooling system 120; pump body 121; heat pipe 122; cold pipe 123; temperature sensor 124; flow meter 125; Tester 130; waste beam bucket 131. DETAILED DESCRIPTION

[0020] Embodiments of the present invention are described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0021] In the description of the present invention, it should be understood that descriptions involving orientations, such as up, down, front, back, left, right, etc., and orientations or positional relationships indicated are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0022] In the description of the present invention, "several" means one or more, "more" means more than two, "greater than", "less than", "exceed" etc. are understood as not including the number itself, and "above", "below", "within" etc. are understood as including the number itself. If there is a description of "first" or "second", it is only used for the purpose of distinguishing the technical features, and cannot be understood as indicating or implying the relative importance or implicitly indicating the number of the indicated technical features or implicitly indicating the order of the indicated technical features.

[0023] In the description of the present invention, unless otherwise clearly defined, terms such as setting, installing, connecting, etc. should be understood in a broad sense, and technicians in the relevant technical field can reasonably determine the specific meanings of the above terms in the present invention in combination with the specific content of the technical solution.

[0024] In the related technology, electron beam window equipment is widely used in the field of accelerators, especially in synchrotron radiation and free electron laser devices. Electron beam windows are mainly used to isolate and protect the ultra-high vacuum environment of accelerators. In electron beam test equipment, it is necessary to perform electron beam spot size test and electron beam power test. After the test, the electron beam is hit into the beam window for collection. Since the electron beam hits the electron beam window, it will cause the temperature of the equipment to rise. In an ultra-high vacuum environment, the temperature rise of the equipment will cause gas particles to precipitate from the parts, resulting in a continuous increase in the environmental pressure inside the equipment. As a result, too many gas particles will interfere with the electron beam test and cause inaccurate data. In addition, the beam energy and repetition frequency are constantly increasing, which poses certain challenges to the design of electron beam windows. Traditional thin-walled beam windows will have structural failure problems after long-term operation. The size of the beam spot needs to be strictly controlled to avoid the risk of failure of the structural strength, which is difficult to control.

[0025] To solve the above problems, refer to Figure 1 and Figure 2 In the first aspect of the present invention, an electron beam window of an embodiment includes a beam window 100. It is understood that the beam window 100 includes a cooling side 108 and a receiving side 109. The cooling side 108 is provided with a cooling pipe 101. A cooling liquid flows in the cooling pipe 101. The heat of the beam window 100 can be taken away by the cooling liquid to avoid the device generating a temperature rise and causing the pressure of the internal cavity to increase, which affects the detection process of the electron beam, and can avoid the beam window 100 from decreasing in structural strength due to excessive temperature. It is understood that the cooling pipe 101 is arranged on the cooling side 108 opposite to the receiving side 109, which can effectively avoid the cooling pipe 101 from being directly impacted by the electron beam, thereby avoiding the cooling pipe 101 from having a high temperature wall and decreasing in strength, thereby avoiding the risk of leakage. In addition, since the receiving side 109 is located in a high vacuum environment, and the cooling system 120 is often arranged in a non-vacuum external environment, if the cooling pipe 101 is arranged on the receiving side 109, it is also necessary to face the problem of vacuum pressure maintenance, which leads to a complex structure and high engineering difficulty.

[0026] Furthermore, the flow direction of the coolant is perpendicular to the direction of the electron beam toward the receiving side 109, that is, the extension direction of the cooling tube 101 is perpendicular to the direction of the electron beam toward the beam window 100. It can be understood that the cooling tube 101 can have multiple extension directions on the cooling side 108, or a combination of multiple extension directions, such as a serpentine tube, a spiral tube, etc. The coolant flows in a unidirectional manner in the cooling tube 101, that is, it flows from the water inlet to the water outlet of the cooling tube 101. When the coolant flows along the extension direction of the cooling tube 101, its flow direction remains perpendicular to the incident direction of the electron beam. Since the electron beam is emitted along the axial direction of the beam window 100 and impacts the side wall of the receiving side 109, the temperature of the portion of the receiving side 109 close to the axis of the beam window 100 is higher. When the cooling tube 101 is arranged on the cooling side 108 opposite to the receiving side 109 and the flow direction of the coolant is perpendicular to the direction in which the electron beam is emitted toward the receiving side 109, it can directly contact the portion of the beam window 100 with a higher temperature, thereby improving the heat dissipation effect, avoiding heat transfer to the side wall of the beam window 100 or other components in the device, and keeping the temperature of the device stable.

[0027] It can be understood that the cooling tube 101 is arranged in a serpentine shape on the cooling side 108 of the beam window 100, so that the cooling tube 101 has a plurality of loop portions 104, the ends of two adjacent loop portions 104 are connected, the loop portion 104 includes at least one curved section 105 and a straight section 106, and the straight section 106 is connected to one end of the curved section 105. Further, both ends of the curved section 105 are provided with straight sections 106, and the cooling tube 101 can be turned by the curved section 105 to achieve an M-shaped or serpentine loop arrangement. In this embodiment, at least three loop portions 104 are provided, which helps to increase the length of the cooling tube 101, thereby increasing the contact area between the cooling tube 101 and the beam window 100, and helps to improve the heat dissipation efficiency of the beam window 100. In other embodiments, the cooling tube 101 is spirally arranged on the surface of the cooling side 108 to increase the length of the cooling tube 101, thereby improving the heat dissipation efficiency of the beam window 100.

[0028] Specifically, refer to Figure 5, a receiving groove 102 is provided on the cooling side 108 of the beam window 100, and the receiving groove 102 is recessed in the beam window 100, and the cooling tube 101 is embedded in the receiving groove 102. It can be understood that the cooling tube 101 has a circular or elliptical cross-section, and therefore the cross-section of the receiving groove 102 is semicircular or elliptical, so that the inner wall of the receiving groove 102 and the outer wall of the cooling tube 101 are in conflict with each other to achieve heat exchange. In other embodiments, the cooling tube 101 has a rectangular cross-section, and the receiving groove 102 also has a rectangular cross-section. Furthermore, the maximum depth of the receiving groove 102 is not less than half of the outer diameter of the cooling tube 101, so that at least half of the area of ​​the outer peripheral wall of the cooling tube 101 is in direct contact with the receiving groove 102, thereby increasing the contact area between the beam window 100 and the cooling tube 101, improving the heat exchange efficiency, and thus optimizing the heat dissipation effect. Furthermore, the cooling tube 101 is fixed in the receiving groove 102 by welding. In this embodiment, vacuum brazing is adopted, and solder is placed on both sides of the cooling tube 101. During the welding process, the solder will melt and fill into the gap between the cooling tube 101 and the receiving groove 102 to achieve welding fixation.

[0029] It can be understood that the receiving side faces the incident direction of the electron beam, and the receiving side is used to reflect the electron beam. The receiving side is provided with a spherical surface 107 that is concave inward. When the electron beam falls on the spherical surface 107 along the axis direction of the beam window 100, it can prevent the electron beam from generating radiation recoil along the axis direction of the beam window 100, thereby preventing the radiation from being transmitted to the outside and affecting personal safety. Specifically, refer to Figure 2 , along the axis direction of the beam window 100, the maximum depth of the spherical surface 107 is less than half of the thickness of the beam window 100. It can be understood that the minimum thickness of the beam window 100 is located on the axis of the beam window 100. During operation, the electron beam will be concentrated at the center of the beam window 100 to form an electron beam spot. Since the middle of the receiving side 109 of the beam window 100 where the spherical surface 107 is set is the minimum thickness of the beam window 100, its heat is more easily taken away by the coolant. At the same time, timely cooling can avoid the reduction of the strength of the beam window 100 due to too small thickness. On the other hand, the receiving side of the beam window 100 is provided with a connecting pipe 119, and the connecting pipe 119 is connected to the upstream equipment.

[0030] Further, the beam window is provided with a mounting assembly 110, and the beam window 100 is fixedly mounted on one side of the mounting assembly 110. The mounting assembly 110 is used to connect an upstream device, and the upstream device emits an electron beam to the beam window 100. The mounting assembly 110 includes two detachably mounted connecting flanges, and the connecting flanges include a connecting side 113 and a sealing side 114. A sealing ring 115 is arranged between the two connecting flanges, and both sides of the sealing ring 115 press against the sealing sides 114 of the two connecting flanges to achieve a detachable seal between the two connecting flanges. The beam window 100 is fixedly connected to the connecting side 113 of any connecting flange, and the receiving side 109 of the beam window 100 faces the connecting side 113, so that the cooling tube 101 is installed on the other side of the beam window 100 away from the electron beam, so that the structural strength of the cooling tube 101 is not affected during operation.

[0031] It can be understood that the connecting flange includes a first flange 111 and a second flange 112, and the beam window 100 is fixed to the first flange 111 by welding. In this embodiment, the beam window 100 is fixed to the first flange 111 by brazing. Further, the connecting side 113 is provided with a concave connecting groove 116, and the beam window 100 is embedded in the connecting groove 116, and the depth of the connecting groove 116 is not less than half of the thickness of the beam window 100. It can be understood that the radial outer side wall of the beam window 100 and the side wall of the connecting groove 116 are fixed by welding, and the depth of the connecting groove 116 is not less than half of the thickness of the beam window 100, which helps to increase the contact area between the beam window 100 and the first flange 111, thereby ensuring good connection stability. In this embodiment, the thickness of the beam window 100 is not less than 20 mm, and it is made of chromium zirconium copper or aluminum alloy to ensure good structural strength of the beam window 100. Accordingly, along the axial direction of the beam window 100, the depth of the connecting groove 116 is at least 10 mm.

[0032] Reference Figure 4The outer wall of the beam window 100 is provided with a plurality of welding grooves 103 arranged around, and the plurality of welding grooves 103 are all located in the connection groove 116. It can be understood that during the welding process, the welding groove 103 can store a certain amount of solder, which can ensure that the root of the welding is completely fused, and the amount of solder can be controlled by the size of the welding groove 103 to avoid too much or too little solder, thereby ensuring the welding quality. Further, in this embodiment, at least three welding grooves 103 are provided along the thickness direction of the beam window 100 to ensure that sufficient solder can be accommodated to ensure good connection strength. Further, the cross-section of the welding groove 103 is set to be rectangular, and the depth of the welding groove 103 is not less than 1 mm and greater than the diameter of the welding wire. Further, the difference between the depth of the welding groove 103 and the diameter of the welding wire does not exceed 0.1 mm. Furthermore, the inner diameter of the connecting groove 116 is larger than the outer diameter of the beam window 100 to ensure that there is a gap between the beam window 100 and the connecting groove 116 for inserting the welding rod and accommodating the solder. In this embodiment, the difference between the inner diameter of the connecting groove 116 and the outer diameter of the beam window 100 is no more than 2 mm.

[0033] It can be understood that the connection side 113 of the second flange 112 is installed with a connection pipe 119, the connection pipe 119 is fixed to the second flange 112 by welding, and the installation assembly 110 is connected to the upstream device through the connection pipe 119. Figure 3 The sealing sides 114 of the first flange 111 and the second flange 112 are both provided with sealing grooves 117, and the sealing grooves 117 are provided with flanges 118 protruding along the axis direction of the connecting flanges, and the flanges 118 press against the side walls of the sealing rings 115. It can be understood that the sealing rings 115 are made of copper, and during installation, the first flange 111 and the second flange 112 are fixed by bolts, and at this time, the flanges 118 are inserted into the sealing rings 115, and radial sealing and axial sealing are achieved at the same time, so that the installation assembly 110 can withstand a large vacuum pressure.

[0034] Reference Figure 6 In an embodiment of the second aspect of the present invention, a cooling system 120 is provided, which is applied to the electron beam window 100 described above. The cooling system 120 includes: a pump body 121 and a controller. The pump body 121 is provided with a heat pipe 122 and a cold pipe 123. The cold pipe 123 is connected to the water inlet end of the cooling pipe 101, and the heat pipe 122 is connected to the water outlet end of the cooling pipe 101. The cold pipe 123 and the heat pipe 122 are both provided with a temperature sensor 124. The cold pipe 123 is also provided with a flow meter 125. It can be understood that the temperature sensor 124 can detect the temperature of the coolant between the heat pipe 122 and the cold pipe 123 and compare the temperature difference between the two to control the liquid flow rate, thereby maintaining the temperature of the beam window 100 in a stable state. In this embodiment, the temperature of the coolant in the cold pipe 123 is maintained between 20°C and 25°C, and the temperature of the coolant in the heat pipe 122 is controlled between 30°C and 35°C.

[0035] The controller is electrically connected to the pump body 121, the temperature sensor 124 and the flow meter 125. The pump body 121 injects coolant into the cooling pipe 101 through the cold pipe 123, and discharges the coolant through the heat pipe 122 to take away the heat of the beam window 100. The controller can obtain the value of the temperature sensor 124 on the heat pipe 122, and control the liquid supply rate of the pump body 121 according to the value. It can be understood that when the value of the temperature sensor 124 on the heat pipe 122 increases and exceeds 35°C, the temperature of the coolant in the heat pipe 122 increases, and the controller controls the pump body 121 to increase the rotation speed, thereby increasing the flow rate of the coolant, and the controller obtains the flow value of the flow meter 125, controls the rotation speed of the motor so that the flow rate of the coolant is at a preset value, thereby increasing the liquid flow supply to the cooling pipe 101 and taking away more heat to ensure that the operating temperature of the beam window 100 does not exceed the preset value; when the value of the temperature sensor 124 on the heat pipe 122 decreases to below 35°C, the controller controls the rotation speed of the pump body 121 to decrease to a normal value, so that the operating temperature of the beam window 100 remains stable, thereby maintaining the stability of the structural strength.

[0036] Reference Figure 7 In an embodiment of the second aspect of the present invention, a beam test device is provided, including an electron beam window as described above, including a tester 130 and a waste beam barrel 131, the beam window 100 is located in the waste beam barrel 131, because the side of the beam window 100 that receives the electron beam has a concave spherical surface 107, when the electron beam is directed to the spherical surface 107, the electron beam generates radiation that is not parallel to the axis direction of the beam window 100, and the leakage of the electron radiation to the outside world will affect the safety of personnel. The waste beam barrel 131 covering the beam window 100 can prevent the radiation generated by the beam window 100 after the electron impact from leaking to the outside world, thereby ensuring the safety of personnel. In other embodiments, the beam test device also includes a control system, the control system can detect the size and power of the electron beam spot, after the test is completed, the relevant parameters can be fed back to the control system, the control system is connected to the controller, and different cooling rates are adjusted according to different electron beam current powers. In this embodiment, when the electron beam deposition power is between 0-100W, the cooling water flow rate is set to 0.5m / s; when the electron beam deposition power is between 100-500W, the cooling water flow rate can be set to 1m / s; when it is between 500-1000W, the flow rate can be set to 2m / s, so as to flexibly respond to the heat dissipation requirements under different powers and improve the working stability of the equipment.

[0037] The embodiments of the present invention are described in detail above with reference to the accompanying drawings, but the present invention is not limited to the above embodiments, and various changes can be made within the knowledge scope of ordinary technicians in the relevant technical field without departing from the purpose of the present invention.

Claims

1. An electron beam window, characterized in that: include: The beam window includes a cooling side and a receiving side. The cooling side is provided with a cooling pipe, and the cooling side is provided with a receiving groove. The cooling pipe is embedded in the receiving groove. Cooling liquid flows in the cooling pipe. The flow direction of the cooling liquid is perpendicular to the direction in which the electron beam is emitted toward the receiving side. The receiving side is used to reflect the electron beam. The receiving side is provided with an inwardly concave spherical surface, and the electron beam falls on the spherical surface.

2. An electron beam window according to claim 1, characterized in that: Along the axis direction of the beam window, the maximum depth of the spherical surface is less than half of the thickness of the beam window, and the minimum thickness of the beam window is located on the axis of the beam window.

3. An electron beam window according to claim 1, characterized in that: The beam window is provided with an installation component, which includes two detachably mounted connecting flanges, the connecting flanges including a connecting side and a sealing side, a sealing ring is provided between the two connecting flanges, both sides of the sealing ring are pressed against the sealing sides of the two connecting flanges, the beam window is fixedly connected to the connecting side of any one of the connecting flanges, and the receiving side of the beam window faces the connecting side.

4. An electron beam window according to claim 3, characterized in that: The connecting flange includes a first flange and a second flange, and the beam window is fixed to the first flange by welding.

5. The electron beam window according to claim 3, characterized in that: The connecting side is provided with a concave connecting groove, the beam window is embedded in the connecting groove, and the depth of the connecting groove is not less than half of the thickness of the beam window.

6. An electron beam window according to claim 5, characterized in that: The outer peripheral wall of the beam window is provided with a plurality of surrounding welding grooves, and the plurality of welding grooves are all located in the connecting groove.

7. The electron beam window according to claim 1, characterized in that: The cooling pipe is provided with a plurality of loop parts, the ends of two adjacent loop parts are connected, the loop part comprises at least a curved section and a straight section, and the straight section is connected to one end of the curved section.

8. The electron beam window according to claim 1, characterized in that: The maximum depth of the accommodating groove is not less than half of the outer diameter of the cooling pipe.

9. A cooling system, characterized in that: An electron beam window applied to any one of claims 1 to 8, the electron beam window comprising a beam window, a cooling tube being arranged on the beam window, wherein: The pump body is provided with a hot pipe and a cold pipe, the cold pipe is connected to the water inlet end of the cooling pipe, the hot pipe is connected to the water discharge end of the cooling pipe, the cold pipe and the hot pipe are both provided with temperature sensors, and the cold pipe is also provided with a flow meter; A controller is electrically connected to the pump body, the temperature sensor and the flow meter. The pump body injects coolant into the cooling pipe through the cold pipe and discharges the coolant through the heat pipe to take away the heat of the beam window. The controller can control the liquid supply rate of the pump body according to the value of the temperature sensor on the heat pipe.

10. Beam test equipment, characterized in that, An electron beam window and cooling system as claimed in claims 1 to 9, comprising a beam window, wherein: A waste beam barrel, wherein the beam window is located in the waste beam barrel, and the waste beam barrel is used to absorb radiation generated after the electron beam is incident on the beam window.

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