AOI detection machine

Abstract

The invention relates to an AOI detection machine, and relates to the field of high-end equipment manufacturing. By integrating the feeding assembly, the visual alignment assembly, the vacuum platform assembly, the material throwing assembly, the discharging assembly and the like, and the unique picking alignment assembly and the carrying discharging assembly, efficient and accurate detection operation is achieved. And meanwhile, the TDI linear array camera and the laser displacement sensor are carried by the focusing moving assembly, so that the detection accuracy and the equipment stability are remarkably improved.

Description

Technical Field

[0001] The present application relates to high-end equipment manufacturing, and in particular to an AOI inspection machine. Background Art

[0002] AOI inspection equipment uses the polarization function of the line scan camera (differential interference electron microscope) indentation microscope to display the positive side and shadow of the slightly convex conductive particles in three dimensions, and judge the indentation results through software algorithms. It is suitable for solving IC / COF / FPC SHIFT inspection IC / COF / FPC conductive particle indentation inspection, as well as the detection of defects such as cracks, gaps, and foreign matter in the conductive area.

[0003] In the existing AOI inspection machine technology, although the automated inspection of electronic components can be achieved, there are still some key problems that need to be solved. For example, the existing AOI inspection machine is usually unable to achieve automatic precise focusing, which greatly reduces the accuracy and efficiency of the inspection. In addition, when the existing AOI inspection machine works continuously for a long time, its stability will also be greatly affected, which may lead to inaccurate inspection results.

[0004] Therefore, based on the above problems, the prior art needs to be improved. Summary of the invention

[0005] The purpose of this application is to improve the accuracy of AOI inspection machines and the stability of equipment.

[0006] The above technical objectives of the present application are achieved through the following technical solutions: an AOI inspection machine, comprising a cabinet, on which a feeding component, a visual alignment component, a vacuum platform, a throwing component and a discharging component are sequentially arranged, the cabinet is provided with a picking and alignment component, through which the workpiece on the feeding component is transferred to the vacuum platform, the cabinet is provided with a transporting and unloading component, through which the workpiece on the vacuum platform is transferred to the throwing component or the discharging component, the cabinet is provided with a focusing moving component, the focusing moving component is provided with a TDI linear array camera, and the TDI linear array camera is provided with a laser displacement sensor.

[0007] By adopting the above technical solutions, high-precision detection can be achieved by focusing on the mobile component equipped with TDI linear array cameras and laser displacement sensors to ensure accurate identification and measurement of workpiece defects. The components work together to realize the automated process of feeding, testing, throwing and discharging, reducing manual intervention and greatly improving overall work efficiency. The carefully designed components and connection relationships enable the equipment to maintain stable performance during long-term operation, reduce the occurrence of failures, and ensure the reliability of detection results.

[0008] Optionally, the feeding assembly includes a first skeleton, a first belt is provided on the first skeleton, the first belt is transmission-connected to a first driving member, and the first belt is driven by the first driving member to move relative to the first skeleton.

[0009] By adopting the above technical solution, the first driving member drives the first belt to move without manual operation, thereby improving the efficiency and accuracy of feeding. The moving speed of the first belt can be accurately adjusted by the first driving member to adapt to different production needs and process requirements. The first skeleton provides a stable support for the first belt, making the feeding process smooth and reliable, and reducing the position deviation of the workpiece caused by shaking or instability.

[0010] Optionally, a positioning bar is provided on the first frame.

[0011] By adopting the above technical solution, the positioning bar can limit the position of the workpiece placed on the first belt, ensuring that the workpiece maintains an accurate posture and position during the feeding process, thereby improving the accuracy of subsequent inspection and other operations. It prevents the workpiece from lateral or longitudinal displacement during the movement of the first belt, ensuring the stability and reliability of feeding. It makes the feeding process more standardized and orderly, which helps to improve the efficiency and quality of the entire production process.

[0012] Optionally, the visual alignment component includes a linear slide arranged on the cabinet, and a visual alignment camera is provided on the linear slide, and the height of the visual alignment camera from the cabinet is adjusted by the linear slide.

[0013] By adopting the above technical solution, the linear slide can adjust the height of the visual alignment camera so that it can adapt to workpieces of various heights and sizes, expanding the scope of application of the inspection machine. The height of the camera can be accurately adjusted according to the specific conditions of the workpiece to obtain the best shooting angle and distance, thereby improving the accuracy and precision of visual alignment. Quickly adjusting the camera height reduces the time required for alignment and speeds up the entire inspection process.

[0014] Optionally, the vacuum platform includes a mounting table, an adjusting rail is provided on the mounting table, an adjusting slider is provided on the adjusting rail, the adjusting slider can be driven by a linear motor to slide on the adjusting rail, and a receiving table is provided on the adjusting slider for receiving the workpiece; a first mounting plate is provided on the adjusting slider, a reading head is provided on the first mounting plate, and a magnetic strip is provided on the mounting table; a second mounting plate is provided on the mounting table, and a vacuum gauge is provided on the second mounting plate.

[0015] By adopting the above technical solution, the linear motor drives the adjustment slider to slide on the adjustment slide rail, which can achieve high-precision position adjustment and ensure the position accuracy of the workpiece during the detection process. The system composed of the reading head and the magnetic strip can monitor the position of the adjustment slider in real time, which is convenient for precise control and feedback, and improves the stability and repeatability of the detection. The setting of the vacuum meter can monitor the vacuum degree of the vacuum platform in real time, ensure the stability and reliability of the detection environment, and thus improve the detection quality. The receiving table can move with the adjustment slider, which can better adapt to workpieces of different shapes and sizes and improve the versatility of the equipment.

[0016] Optionally, the throwing assembly includes a second frame, the second frame is provided with a second belt, the second belt is transmission-connected to a second driving member, and the second belt is driven by the second driving member to move relative to the second frame.

[0017] By adopting the above technical solution, the second driving member drives the second belt to move, which can quickly and efficiently realize the throwing action of unqualified workpieces, thereby improving production efficiency. The second skeleton provides a stable support for the second belt, ensures the stability of the throwing action, and reduces the occurrence of faults. By controlling the second driving member, the unqualified workpiece can be accurately thrown to the specified position, which is convenient for subsequent processing.

[0018] Optionally, the discharging assembly includes a third skeleton, the third skeleton is provided with a third belt, the third belt transmission is connected to a third driving member, and the third belt is driven by the third driving member to move relative to the third skeleton.

[0019] By adopting the above technical solution, the third drive member drives the third belt to move, so that qualified workpieces can be sent out in an orderly manner, avoiding chaotic discharge. Rapid discharge is achieved, the efficiency of the entire production process is improved, and the needs of large-scale production are met. The third skeleton provides solid support for the third belt, ensures the stability of the discharge process, and reduces the probability of discharge failure. Through precise regulation of the third drive member, the speed and position of the discharge can be accurately controlled, which is convenient for connection with subsequent processes.

[0020] Optionally, the picking and alignment assembly includes a first mounting frame, a first X-axis slide rail is provided on the first mounting frame, a first X-axis slider is provided on the first X-axis slide rail, the first X-axis slide rail can slide on the first X-axis slide rail, a first receiving plate is provided on the first X-axis slider, a first Y-axis slide rail is provided on the first receiving plate, a first Y-axis slide rail is provided on the first Y-axis slider, a telescopic driving member is provided on the first receiving plate, and the first Y-axis slider is pushed to slide on the first Y-axis slide rail by the telescopic driving member; a first Z-axis driving member is provided on the first Y-axis slider, a first lifting member is provided on the first Z-axis driving member, and a first pneumatic picking member is provided on the first lifting member, and the first pneumatic picking member is driven by the first Z-axis driving member to move toward or away from the feeding assembly.

[0021] By adopting the above technical solutions, the machine has the motion capability of X, Y, and Z axes, and can realize precise position adjustment in three-dimensional space, so as to accurately pick up and align the workpiece. Through the coordinated movement and precise drive of each axis, high-precision picking and alignment operations can be realized, and the production quality can be improved. Flexible multi-axis movement can adapt to workpieces in different positions and postures on the feeding assembly, and improve the versatility of the equipment. The cooperation of the telescopic drive and each drive makes the picking and alignment actions fast and stable, and improves production efficiency. The whole process is automatically controlled by the drive, which reduces manual intervention and reduces human errors.

[0022] Optionally, the material handling and unloading assembly includes a second X-axis slider arranged on the first X-axis slide rail, the second X-axis slider is provided with a second receiving plate, the second receiving plate is provided with a second Z-axis driving member, the second Z-axis driving member is provided with a second lifting member, the second lifting member is provided with a second pneumatic picking member, and the second pneumatic picking member is driven by the second Z-axis driving member to move toward or away from the material discharging assembly.

[0023] By adopting the above technical solution, the second Z-axis driving member can accurately control the movement of the second pneumatic pickup member to ensure that the workpiece is accurately transported to the discharge assembly, thereby improving the accuracy of material removal. By setting the second X-axis slider on the first X-axis slide rail and combining it with the movement of the second Z-axis, the material removal action can be quickly completed, thereby improving production efficiency. The structural design is reasonable, and the various components work together to ensure a stable material removal process, reducing failures and errors. The material removal path and height can be flexibly adjusted according to the position of the discharge assembly and the specific conditions of the workpiece, and the adaptability is strong. The material removal is automatically controlled by the driving member, reducing the labor intensity and improving the level of automation in production.

[0024] Optionally, the focusing moving assembly includes a second mounting frame, the second mounting frame is provided with a second X-axis slide rail, the second X-axis slide rail is provided with a third X-axis slider, the third X-axis slider is provided with a third Z-axis driving member, the third Z-axis driving member is provided with a third lifting member, and the TDI line array camera is arranged on the third lifting member.

[0025] By adopting the above technical solutions, the third Z-axis drive and the third lifting member can realize the precise movement of the TDI line array camera in the Z-axis direction, thereby achieving precise focus adjustment and improving the clarity and accuracy of detection. The cooperation of the second X-axis slide rail and the third X-axis slider enables the camera to move flexibly in the X-axis direction, which is convenient for detecting workpieces in different positions and expanding the detection range. The second mounting frame provides stable support for the entire assembly, ensuring the position accuracy and stability of the camera during movement and detection, and reducing detection errors caused by vibration or shaking. The ability to quickly and accurately focus and adjust the position can improve detection efficiency and meet the needs of large-scale production. The position and focus state of the camera can be flexibly adjusted according to different detection tasks and workpiece characteristics to improve the versatility and adaptability of the equipment.

[0026] In summary, this application has at least the following beneficial effects: 1. The focus moving component is equipped with a TDI line array camera and a laser displacement sensor to achieve automatic and precise focusing, significantly improving the accuracy of detection.

[0027] 2. It is preferred to use an adjustable vacuum platform and a multi-dimensionally movable pick-up and alignment component. Due to the flexibility and stability of these components, the equipment remains stable during long-term use, thereby improving detection efficiency and accuracy. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 It is a structural diagram of an AOI inspection machine; Figure 2 is a schematic diagram of the structure of the feed assembly; Figure 3 It is a schematic diagram of the structure of the visual alignment component; Figure 4 It is a schematic diagram of the structure of the vacuum platform; Figure 5 It is a schematic diagram of the structure of the throwing assembly; Figure 6 It is a schematic diagram of the structure of the discharging component; Figure 7 It is a schematic diagram of the structure of the pick-up alignment component; Figure 8 It is a structural schematic diagram of the handling and unloading assembly; Fig. 9It is a schematic diagram of the structure of the focus moving component; Fig.10 It is a schematic diagram of the structure of the TDI linear array camera and the laser displacement sensor; Fig.11 It is a status diagram of an AOI inspection machine.

[0029] Reference numerals 1. Cabinet; 2. Feeding assembly; 21. First frame; 22. First belt; 23. First driving member; 24. Positioning stop bar; 3. Visual alignment assembly; 31. Linear slide; 32. Visual alignment camera; 4. Vacuum platform; 41. Mounting table; 42. Adjusting slide rail; 43. Adjusting slider; 44. Receiving table; 45. First mounting plate; 46. Reading head; 47. Magnetic strip; 48. Second mounting plate; 49. Vacuum gauge; 5. Throwing assembly; 51. Second frame; 52. Second belt; 53. Second driving member; 6. Discharging assembly; 61. Third frame; 62. Third belt; 63. Third driving member; 7. Picking alignment assembly; 71. First mounting frame; 72. First X-axis slide rail; 73. First X-axis slider; 74. First receiving plate; 75. First Y-axis slide rail; 76. First Y-axis slider; 77. Telescopic drive member; 78. First Z-axis drive member; 79. First lifting member; 710. First pneumatic pickup member; 8. Material handling and unloading assembly; 81. Second X-axis slider; 82. Second receiving plate; 83. Second Z-axis drive member; 84. Second lifting member; 85. Second pneumatic pickup member; 9. Focus moving assembly; 91. Second mounting bracket; 92. Second X-axis slide rail; 93. Third X-axis slider; 94. Third Z-axis drive member; 95. Third lifting member; 10. TDI linear array camera; 11. Laser displacement sensor. DETAILED DESCRIPTION

[0030] The present application is further described in detail below in conjunction with the accompanying drawings.

[0031] In this embodiment, refer to Figure 1-11 , an AOI inspection machine, the device includes a cabinet 1, on which a feed component 2, a visual alignment component 3, a vacuum platform 4, a throwing component 5 and a discharging component 6 are sequentially installed. In addition, a picking and alignment component 7 and a handling and unloading component 8 are also provided on the cabinet 1, so as to transfer the workpiece from the feed component 2 to the vacuum platform 4, and from the vacuum platform 4 to the throwing component 5 or the discharging component 6. In particular, the AOI inspection machine in this embodiment is also equipped with a focusing moving component 9, on which a TDI linear array camera 10 and a laser displacement sensor 11 are installed, so as to achieve precise focusing and accurately detect the workpiece on the vacuum platform 4.

[0032] The implementation principle of Example 1 is as follows: the workpiece enters the inspection area through the feeding component 2, and the visual alignment component 3 performs preliminary positioning of the workpiece. Subsequently, the picking and alignment component 7 places the workpiece accurately on the vacuum platform 4. The focusing moving component 9 is equipped with a TDI linear array camera 10 and a laser displacement sensor 11 to automatically and accurately focus on the workpiece to complete the inspection task. After the inspection is completed, the handling and unloading component 8 moves the workpiece from the vacuum platform 4 to the throwing component 5 or the discharging component 6 to complete the entire inspection process.

[0033] Example 2 Reference Figure 2 The difference of this embodiment lies in the specific design of the feeding assembly 2. The feeding assembly 2 includes a first frame 21 and a first belt 22. The first belt 22 is driven by a first driving member 23 to realize automatic feeding of the workpiece. In addition, a positioning bar 24 is also provided on the first frame 21 to ensure accurate positioning of the workpiece when entering the detection area.

[0034] Example 3 Reference Figure 3 Based on Example 2, this example further specifies the design of the visual alignment component 3. The visual alignment component 3 includes a linear slide 31 mounted on the cabinet 1, and a visual alignment camera 32 is mounted on the linear slide 31. By adjusting the linear slide 31, the height of the visual alignment camera 32 can be accurately adjusted to adapt to workpieces of different sizes and shapes, ensuring a clear field of view and accurate positioning during the inspection process.

[0035] Example 4 Reference Figure 4 On the basis of Example 3, this embodiment describes in detail the design and working principle of the vacuum platform 4. The vacuum platform 4 includes a mounting table 41, on which an adjustment slide rail 42 and an adjustment slider 43 are provided, and on which a receiving table 44 is provided on the adjustment slider 43 for stably receiving the workpiece. Driven by a linear motor, the adjustment slider 43 can slide on the adjustment slide rail 42, thereby achieving fine adjustment of the position of the workpiece. In addition, a first mounting plate 45 is also installed on the adjustment slider 43, on which a reading head 46 is installed, and on which a magnetic strip 47 is provided on the mounting table 41. The reading head 46 and the magnetic strip 47 constitute a magnetic scale, and the specification accuracy of the magnetic scale preferably reaches 1um. A second mounting plate 48 is provided on the mounting table 41, and a vacuum gauge 49 is provided on the second mounting plate 48 for monitoring the position and vacuum state of the workpiece to ensure the stability and accuracy of the detection process.

[0036] Example 5 Reference Figure 5 and Figure 6Based on Example 4, this embodiment embodies the design of the throwing assembly 5 and the discharging assembly 6. The throwing assembly 5 includes a second frame 51 and a second belt 52, and the second belt 52 is driven by a second driving member 53 to automatically throw out the workpieces that have been tested and failed. The discharging assembly 6 includes a third frame 61 and a third belt 62, and the third belt 62 is driven by a third driving member 63 to send the workpieces that have passed the test out of the test area. Such a design improves the automation and work efficiency of the equipment.

[0037] Example 6 Reference Figure 7 On the basis of Example 5, this embodiment further describes the detailed structure of the picking and aligning component 7. The picking and aligning component 7 includes a first mounting frame 71, on which a first X-axis slide rail 72 and a first X-axis slider 73 are mounted. Preferably, a magnetic ruler is provided on the first mounting frame 71 for accurately controlling the first X-axis slider 73 to slide on the first X-axis slide rail 72. A first receiving plate 74 is provided on the first X-axis slider 73, and a first Y-axis slide rail 75 and a first Y-axis slider 76 are further provided on the first receiving plate 74. The first Y-axis slider 76 can slide on the first Y-axis slide rail 75 by being pushed by the telescopic driving member 77. The first Y-axis slider 76 is also provided with a first Z-axis driving member 78 and a first pneumatic picking member 710, and the picking and placing operation of the workpiece is realized by driving the first Z-axis driving member 78. This multi-dimensional movement design makes the picking and aligning process more flexible and precise.

[0038] Example 7 Reference Figure 8 On the basis of Example 6, this embodiment elaborates on the structure and working principle of the handling and unloading assembly 8. The handling and unloading assembly 8 includes a second X-axis slider 81 arranged on the first X-axis slide rail 72, and a second receiving plate 82 is mounted on the second X-axis slider 81. A second Z-axis driving member 83 and a second pneumatic pickup member 85 are mounted on the second receiving plate 82. Driven by the second Z-axis driving member 83, the second pneumatic pickup member 85 can realize the precise handling and unloading operation of the workpiece. This design enables the equipment to automatically classify and process the workpiece after the detection is completed, thereby improving the overall work efficiency.

[0039] Example 8 Reference Fig. 9Based on Example 7, this embodiment specifically describes the design and function of the focus moving assembly 9. The focus moving assembly 9 includes a second mounting frame 91, on which a second X-axis slide rail 92 and a second X-axis slider 81 are mounted. The second X-axis slider 81 is driven to slide on the second Z-axis slide rail by using a 0.1nm resolution grating ruler in combination with a high-precision U-shaped coreless linear motor combination. The second X-axis slider 81 is further provided with a third Z-axis driving member 94 and a third lifting member 95, and the third Z-axis driving member 94 includes a Z-axis servo motor and a Z-axis high-precision ground lead screw. The TDI line array camera 10 is mounted on the third lifting member 95. Through the cooperation of the second X-axis slide rail 92 and the third Z-axis driving member 94, the TDI line array camera 10 can be accurately moved and focused during the detection process. This design significantly improves the detection accuracy and flexibility of the equipment.

[0040] Specifically, the equipment will automatically perform a calibration every time it is turned on to ensure that all components are in the correct position. After a period of continuous operation, the equipment will automatically enter maintenance mode to check and adjust key components, such as cleaning the lens and checking belt wear. If any problems are found, the equipment will promptly alarm and prompt the operator to deal with them.

[0041] Example 10 Based on Example 9, this example further enhances the intelligent and networked functions of the AOI inspection machine. We equip the equipment with advanced image processing and data analysis algorithms, enabling it to automatically identify and classify various defects and provide detailed inspection reports. At the same time, the equipment also supports remote monitoring and control. The operator can view the operating status and inspection results of the equipment at any time through a mobile phone or computer, realizing remote management and debugging.

[0042] In addition, we have added cloud platform connection function to the equipment, and all test data can be automatically uploaded to the cloud platform for analysis and storage. Through in-depth mining and analysis of historical data, it can help companies to timely discover potential problems in the production process and put forward improvement suggestions, thereby further improving product quality and production efficiency.

[0043] The above-described embodiments are all descriptions of specific implementations of the present invention, but the present invention is not limited to these embodiments. Without departing from the principles and spirit of the present invention, various modifications and variations of the present invention should be included in the protection scope of the present invention. Therefore, the protection scope of the present invention is defined by the attached claims and their equivalents. Any technician familiar with the technical field can modify or improve the above-mentioned embodiments without departing from the design concept and principle of the present invention, and these modifications and improvements should also be regarded as the protection scope of the present invention.

Claims

1. An AOI inspection machine, characterized in that: The invention comprises a cabinet (1), wherein the cabinet (1) is provided with a feeding component (2), a visual alignment component (3), a vacuum platform (4), a throwing component (5) and a discharging component (6) in sequence; the cabinet (1) is provided with a picking and aligning component (7), through which a workpiece on the feeding component (2) is transferred to the vacuum platform (4); the cabinet (1) is provided with a transporting and unloading component (8), through which a workpiece on the vacuum platform (4) is transferred to the throwing component (5) or the discharging component (6); the cabinet (1) is provided with a focusing moving component (9), a TDI linear array camera (10) is provided on the focusing moving component (9), and a laser displacement sensor (11) is provided on the TDI linear array camera (10).

2. The AOI inspection machine according to claim 1, characterized in that: The feeding assembly (2) comprises a first frame (21), on which a first belt (22) is provided, and the first belt (22) is transmission-connected to a first driving member (23), and the first belt (22) is driven by the first driving member (23) to move relative to the first frame (21).

3. The AOI inspection machine according to claim 2, characterized in that: A positioning stop bar (24) is provided on the first frame (21).

4. The AOI inspection machine according to claim 1, characterized in that: The visual alignment component (3) comprises a linear slide (31) arranged on the cabinet (1), and a visual alignment camera (32) is arranged on the linear slide (31). The height of the visual alignment camera (32) from the cabinet (1) is adjusted by the linear slide (31).

5. The AOI inspection machine according to claim 1, characterized in that: The vacuum platform (4) comprises a mounting platform (41), an adjusting slide rail (42) is provided on the mounting platform (41), an adjusting slider (43) is provided on the adjusting slide rail (42), the adjusting slider (43) can be driven by a linear motor to slide on the adjusting slide rail (42), and a receiving platform (44) is provided on the adjusting slider (43) for receiving a workpiece; a first mounting plate (45) is provided on the adjusting slider (43), a reading head (46) is provided on the first mounting plate (45), and a magnetic strip (47) is provided on the mounting platform (41); a second mounting plate (48) is provided on the mounting platform (41), and a vacuum gauge (49) is provided on the second mounting plate (48).

6. The AOI inspection machine according to claim 1, characterized in that: The throwing assembly (5) comprises a second frame (51), on which a second belt (52) is provided, and the second belt (52) is transmission-connected to a second driving member (53), and the second belt (52) is driven by the second driving member (53) to move relative to the second frame (51).

7. The AOI inspection machine according to claim 1, characterized in that: The discharging assembly (6) comprises a third frame (61), on which a third belt (62) is provided, and the third belt (62) is transmission-connected to a third driving member (63), and the third belt (62) is driven by the third driving member (63) to move relative to the third frame (61).

8. The AOI inspection machine according to claim 1, characterized in that: The picking and alignment component (7) comprises a first mounting frame (71), the first mounting frame (71) is provided with a first X-axis slide rail (72), the first X-axis slide rail (72) is provided with a first X-axis slider (73), the first X-axis slide rail (72) can slide on the first X-axis slide rail (72), the first X-axis slider (73) is provided with a first receiving plate (74), the first receiving plate (74) is provided with a first Y-axis slide rail (75), the first Y-axis slide rail (75) is provided with a first Y-axis slider (76), the first receiving plate (74) is provided with a first Y-axis slide rail (76), the first receiving plate (74) is provided with a first Y-axis slide rail (76), the first receiving plate (74) is provided with a first Y-axis slide rail (76), the first receiving plate (74) is provided with a first Y-axis slide rail (76), the first receiving plate (74) is provided with a first X-axis slide rail (72), the first X-axis slider (73) is provided with a first Y-axis slide rail (72), the first receiving plate (74) is provided with a first Y-axis slide rail (75), the first Y-axis slide rail (75) is provided with a first Y-axis slider (76), the first receiving plate (74) is provided with a first Y-axis slide rail (76), the first receiving plate (74) is provided with a first Y-axis slide rail (72 ... A telescopic driving member (77) is provided on the first Y-axis slider (74), and the telescopic driving member (77) is used to push the first Y-axis slider (76) to slide on the first Y-axis slide rail (75); a first Z-axis driving member (78) is provided on the first Z-axis driving member (78), and a first lifting member (79) is provided on the first Z-axis driving member (78), and a first pneumatic picking member (710) is provided on the first lifting member (79), and the first pneumatic picking member (710) is driven by the first Z-axis driving member (78) to move toward or away from the feeding assembly (2).

9. The AOI inspection machine according to claim 8, characterized in that: The material handling and unloading assembly (8) comprises a second X-axis slider (81) arranged on the first X-axis slide rail (72), the second X-axis slider (81) is provided with a second receiving plate (82), the second receiving plate (82) is provided with a second Z-axis driving member (83), the second Z-axis driving member (83) is provided with a second lifting member (84), the second lifting member (84) is provided with a second pneumatic picking member (85), and the second pneumatic picking member (85) is driven by the second Z-axis driving member (83) to move towards or away from the material discharging assembly (6).

10. The AOI inspection machine according to claim 1, characterized in that: The focus moving assembly (9) comprises a second mounting frame (91), a second X-axis slide rail (92) is provided on the second mounting frame (91), a third X-axis slider (93) is provided on the second X-axis slide rail (92), a third Z-axis driving member (94) is provided on the third X-axis slider (93), a third lifting member (95) is provided on the third Z-axis driving member (94), and the TDI line array camera (10) is arranged on the third lifting member (95).

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