Adhesive tape stripping system and adhesive tape stripping method

By using ion air technology of stage and electrostatic elimination devices in the tape stripping system, the problem of damage to semiconductor structures during tape removal is solved, and a safer tape stripping process is achieved.

CN119495557APending Publication Date: 2025-02-21YANGTZE MEMORY TECH CO LTD
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Patent Information

Application Number
CN202311055887.X
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2023-08-18
Publication Date
2025-02-21

AI Technical Summary

Technical Problem

During semiconductor structure processing, removing tape may cause damage to the semiconductor structure.

Method used

A tape stripping system is provided, including a stage and an electrostatic elimination device. The stage has a receiving groove and a surface, and the electrostatic elimination device passes through the ion air transport part and the ion air generating part. During the peeling process, the ion air flows from the side of the stage to the tape, reducing the damage to the attachment by static electricity.

Benefits of technology

It effectively reduces the risk of damage to the semiconductor structure by static electricity and prevents damage to the attachments from moving during peeling.

✦ Generated by Eureka AI based on patent content.

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Abstract

The invention provides an adhesive tape stripping system and an adhesive tape stripping method. The adhesive tape stripping system comprises: a carrying table comprising a containing groove, a first surface and a second surface, the first surface and the second surface are oppositely arranged, and the containing groove sinks inwards from the first surface to the second surface; the static electricity elimination device comprises an ionic wind transmission part and an ionic wind generation part, the ionic wind transmission part penetrates through the carrying table in the direction from the first surface to the second surface, the ionic wind transmission part and the containing groove are arranged in a spaced mode, the ionic wind generation part generates ionic wind, and the ionic wind is transmitted to the adhesive tape to be stripped through the ionic wind transmission part.
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Description

Technical Field

[0001] The present application relates to a tape stripping technology, and in particular to a tape stripping system and a tape stripping device. Background Art

[0002] During the processing of semiconductor structures, it is necessary to attach tape to the semiconductor structures to protect the semiconductor structures. When the semiconductor structures need to be further processed, the tape needs to be removed. Currently, during the process of removing the tape from the semiconductor structures, the semiconductor structures may be damaged.

[0003] Therefore, it is necessary to propose a technical solution to improve the problem that the semiconductor structure may be damaged during the tape removal process. Summary of the invention

[0004] The purpose of the present application is to provide a tape stripping system and a tape stripping device to improve the problem of semiconductor structure damage during tape removal.

[0005] In a first aspect, the present application provides a tape stripping system, comprising:

[0006] A carrier, comprising a receiving groove and a first surface and a second surface arranged opposite to each other, wherein the receiving groove is sunken from the first surface to the second surface; and

[0007] The static electricity elimination device includes an ion wind transmission part and an ion wind generating part. The ion wind transmission part penetrates the carrier in the direction from the first surface to the second surface and is spaced apart from the receiving groove. The ion wind generating part generates ion wind, and the ion wind is transmitted to the tape to be peeled off via the ion wind transmission part.

[0008] In some embodiments, the ion wind transmission portion includes: an ion wind transmission hole, which passes through the carrier in a direction from the first surface to the second surface;

[0009] The static electricity elimination device also includes: a blowing part connected to the ion wind generating part, the air outlet of the blowing part is arranged adjacent to the ion wind transmission hole, and the ion wind flows out from the air outlet and flows into the ion wind transmission hole.

[0010] In some embodiments, a tape stripping device is further included, wherein the tape stripping device comprises:

[0011] The winding section provides the winding force;

[0012] The traction part includes a first end and a second end opposite to each other. When peeling off the adhesive tape to be peeled off, the first end of the traction part is connected to the winding part, and the second end of the traction part is connected to the adhesive tape to be peeled off. The traction part pulls the adhesive tape to be peeled off under the action of the winding force.

[0013] In some embodiments, the tape stripping device further comprises:

[0014] The guide part contacts the non-sticky surface of the adhesive tape to be peeled off and moves along with the peeling of the adhesive tape to be peeled off to adjust the peeling angle of the adhesive tape to be peeled off.

[0015] In some embodiments, a plurality of the second ends are respectively connected to different positions of the adhesive tape to be peeled off.

[0016] In some embodiments, the traction portion includes a traction tape.

[0017] In some embodiments, a vacuum adsorption device is further included, wherein the vacuum adsorption device comprises:

[0018] The adsorption hole extends from the second surface to the containing groove and is communicated with the containing groove.

[0019] In some embodiments, the vacuum adsorption device further comprises:

[0020] A suction nozzle is arranged on the second surface, and an air flow channel of the suction nozzle is communicated with the adsorption hole.

[0021] In some embodiments, at least two of the receiving grooves have different sizes.

[0022] In a second aspect, the present application also provides a tape stripping method, the method comprising:

[0023] Providing an attachment having an adhesive tape to be peeled off;

[0024] Providing a carrier, the carrier comprising a containing groove and a first surface and a second surface arranged opposite to each other, the containing groove being sunken from the first surface to the second surface;

[0025] A static electricity elimination device is provided, comprising an ion wind transmission part and an ion wind generating part, wherein the ion wind transmission part penetrates the carrier in a direction from the first surface to the second surface and is spaced apart from the containing groove;

[0026] placing the attachment in the receiving groove, and placing the adhesive tape to be peeled off on a side of the attachment away from the first surface; and

[0027] The ion wind generating unit generates ion wind, and the ion wind is transmitted to the adhesive tape to be peeled off via the ion wind transmitting unit.

[0028] In some embodiments, the ion wind transmission portion includes: an ion wind transmission hole, which passes through the carrier in a direction from the first surface to the second surface;

[0029] The static elimination device further comprises: a blowing part connected to the ion wind generating part, wherein the air outlet of the blowing part is arranged adjacent to the ion wind transmission hole;

[0030] The method further includes: the ion wind flows out from the air outlet and flows into the ion wind transmission hole.

[0031] In some embodiments, the method further comprises:

[0032] Providing a tape stripping device, the tape stripping device comprising a winding portion and a pulling portion, the pulling portion comprising a first end and a second end opposite to each other;

[0033] Connecting the first end of the traction portion to the winding portion, and connecting the second end of the traction portion to the adhesive tape to be peeled; and

[0034] The winding portion provides a winding force, and the traction portion pulls the adhesive tape to be peeled off from the attachment under the action of the winding force.

[0035] In some embodiments, the tape stripping device further includes a guide portion, and the method further includes:

[0036] The guide portion contacts the non-adhesive surface of the adhesive tape to be peeled away from the attachment, and moves along with the peeling of the adhesive tape to be peeled, so as to adjust the peeling angle of the adhesive tape to be peeled.

[0037] In some embodiments, connecting the second end of the traction portion to the adhesive tape to be peeled includes:

[0038] The plurality of second ends are respectively connected to a plurality of different positions of the adhesive tape to be peeled off.

[0039] In some embodiments, the traction portion includes a traction tape;

[0040] The step of connecting the first end of the traction portion to the winding portion comprises: bonding one end of the traction tape to the winding portion;

[0041] The step of connecting the second end of the traction portion to the adhesive tape to be peeled includes: bonding the other end of the traction tape to the adhesive tape to be peeled.

[0042] In some embodiments, the carrier is further provided with an adsorption hole extending from the second surface to the receiving groove and communicating with the receiving groove;

[0043] The method further includes: vacuuming the adsorption hole to adsorb the attachment.

[0044] In some embodiments, at least two of the receiving grooves have different sizes; placing the attachment in the receiving groove comprises:

[0045] The at least two attachments of different sizes are respectively placed in the at least two receiving grooves of different sizes.

[0046] In some embodiments of the present application, the carrier includes a receiving groove and a first surface and a second surface arranged opposite to each other, and the receiving groove is sunken from the first surface to the second surface. The static electricity elimination device includes an ion wind transmission part and an ion wind generating part, the ion wind transmission part penetrates the carrier in the direction from the first surface to the second surface and is spaced apart from the receiving groove, and the ion wind generating part generates ion wind, and the ion wind is transmitted to the tape to be peeled off via the ion wind transmission part. In this way, in the process of peeling off the tape to be peeled off, the ion wind flows from the side of the tape to be peeled off close to the first surface to the tape to be peeled off, and the ion wind can better improve the instantaneous static electricity problem in the peeling process and reduce the risk of static electricity causing damage to the attachment. Moreover, in the process of peeling off the tape to be peeled off, the attachment is arranged in the receiving groove, which can also improve the damage problem of the attachment caused by movement. BRIEF DESCRIPTION OF THE DRAWINGS

[0047] Figure 1 A schematic diagram of a vacuum adsorption stage of a tape stripping system according to some embodiments of the present application;

[0048] Figure 2 It is a schematic diagram of a transfer sheet fixed on a vacuum adsorption stage in some embodiments of the present application;

[0049] Figure 3 A partial schematic diagram of a tape stripping system according to some embodiments of the present application;

[0050] Figure 4 It is a partial schematic diagram of a tape peeling system according to some other embodiments of the present application;

[0051] Figure 5 A schematic diagram of a tape stripping device in some embodiments of the present application stripping a tape to be stripped;

[0052] Figure 6 Schematic diagram of a tape stripping device stripping a tape to be stripped according to other embodiments of the present application;

[0053] Figure 7The present invention is a flowchart of a tape stripping method according to some embodiments of the present application.

[0054] Figure ID:

[0055] 11, vacuum adsorption stage; 111, adsorption hole;

[0056] 12, transfer sheet;

[0057] 13, stage; 13a, first surface; 13b, second surface; 13c, receiving groove; 13c1, first receiving groove; 13c2, second receiving groove;

[0058] 14, static elimination device; 141, ion wind transmission unit; 142, ion wind generating unit; 143, blowing unit; 144, ion wind transmission hole;

[0059] 15, adhesive tape stripping device; 151, winding part; 152, traction part; 1522, first traction part; 1521, second traction part; 1523, third traction part; 1524, traction tape; 1525, traction belt; 153, guide part;

[0060] 16, vacuum adsorption device; 161, adsorption hole; 162, suction nozzle;

[0061] 17, adhesive tape to be peeled off; 171, non-adhesive surface; 172, adhesive surface;

[0062] 18, first attachment; 181, first attachment; 182, second attachment. DETAILED DESCRIPTION

[0063] The technical solutions in the embodiments of the present application will be described clearly and completely below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative work are within the scope of protection of the present application.

[0064] Please refer to Figures 1 to 6 shown. Figure 1 Schematic diagram of a vacuum adsorption carrier of a tape stripping system in some embodiments of the present application. Figure 2 This is a schematic diagram of a transfer sheet being fixed on a vacuum adsorption stage in some embodiments of the present application. Figure 3 It is a partial schematic diagram of a tape peeling system according to some embodiments of the present application. Figure 4 Partial schematic diagram of a tape peeling system according to some other embodiments of the present application. Figure 5 This is a schematic diagram of a tape stripping device in some embodiments of the present application stripping a tape to be stripped. Figure 6Schematic diagram of a tape stripping device stripping a tape to be stripped according to other embodiments of the present application.

[0065] Tape stripping systems are used in the semiconductor field, but not limited to this. Figures 1 to 6 As shown, the tape stripping system includes a vacuum adsorption stage 11 , a transfer sheet 12 , a stage 13 , an electrostatic eliminator 14 , a tape stripping device 15 and a vacuum adsorption device 16 .

[0066] Reference Figure 1 As shown, the vacuum adsorption stage 11 includes a plurality of adsorption holes 111. The vacuum adsorption stage 11 is used to fix the transfer sheet 12. During the operation of the vacuum adsorption stage 11, the transfer sheet 12 is placed on the vacuum adsorption stage 11. The adsorption holes 111 are evacuated, and the transfer sheet 12 is fixed on the vacuum adsorption stage 11 by using vacuum adsorption force.

[0067] Reference Figure 2 As shown, the transfer sheet 12 is used to transfer the attachment 18 attached with the adhesive tape 17 to be peeled. Before the transfer sheet 12 is fixed on the vacuum adsorption stage 11, the non-sticky surface of the adhesive tape 17 to be peeled is fixed on the transfer sheet 12, and the adhesive surface 172 of the adhesive tape 17 to be peeled is located on the side of the non-sticky surface of the adhesive tape 17 to be peeled away from the transfer sheet 12. Then, the transfer sheet 12 with the adhesive tape 17 to be peeled is fixed on the vacuum adsorption stage 11, and the attachment 18 is attached to the adhesive surface of the adhesive tape 17 to be peeled. Among them, the non-sticky surface of the adhesive tape 17 to be peeled can be fixed on the transfer sheet 12 by using an adhesive layer.

[0068] In some embodiments, reference Figure 2 As shown, the transfer sheet 12 may also be in the shape of a circular ring to reduce the mass of the transfer sheet 12 and facilitate the transfer of the transfer sheet 12. Moreover, the transfer sheet 12 is in the shape of a circular ring, and the warping problem of the transfer sheet 12 is more easily improved under the action of the vacuum adsorption force. In other embodiments, the transfer sheet 12 may be in the shape of a circular sheet. The thickness of the transfer sheet 12 is greater than or equal to 1 mm and less than or equal to 2 mm. The material of the transfer sheet 12 includes but is not limited to metal or metal alloy.

[0069] In some embodiments, reference Figure 2 As shown, the plurality of attachments 18 may include at least two attachments 18 of different sizes. For example, the plurality of attachments 18 include a first attachment 181 and a second attachment 182, and the size of the first attachment 181 is smaller than the size of the second attachment 182. The attachment 18 includes a semiconductor structure, but is not limited thereto. The semiconductor structure includes but is not limited to at least one of a bare chip, a packaged chip, and a wafer.

[0070] In some embodiments, the shape of the tape 17 to be peeled can be a circle, rectangle or other regular shapes to reduce the difficulty of making the tape 17 to be peeled. The thickness of the tape 17 to be peeled is greater than or equal to 30 microns and less than or equal to 70 microns.

[0071] It should be noted that before attaching the attachment 18 to the sticky surface 172 of the adhesive tape 17 to be peeled, a protective film (not shown) is provided on the sticky surface 172 of the adhesive tape 17 to be peeled. When it is necessary to attach the attachment 18 to the sticky surface 172 of the adhesive tape 17 to be peeled, the protective film is removed and the attachment 18 is then attached to the sticky surface 172 of the adhesive tape 17 to be peeled.

[0072] Reference Figure 3 As shown, the carrier 13 includes a first surface 13a and a second surface 13b that are arranged opposite to each other. The carrier 13 also includes a receiving groove 13c, which is sunken from the first surface 13a to the second surface 13b. The depth of the receiving groove 13c is less than the thickness of the carrier 13. The attachment 18 is fixed in the receiving groove 13c to improve the problem of the attachment 18 being damaged due to movement during the process of peeling the adhesive tape 17 to be peeled off.

[0073] In some embodiments, the plurality of accommodating grooves 13c may include at least two accommodating grooves 13c that are spaced apart and have different sizes from each other. In this way, the application scope of the carrier 13 is broadened, that is, it can be applicable to attachments 18 of different sizes and types. For example, the plurality of accommodating grooves 13c include a first accommodating groove 13c1 and a second accommodating groove 13c2, and the size of the first accommodating groove 13c1 is smaller than the size of the second accommodating groove 13c2. The first accommodating groove 13c1 can be used to accommodate the first attachment 181, and the second accommodating groove 13c2 is used to accommodate the second attachment 182.

[0074] In some embodiments, the shape of the receiving groove 13c is the same as the shape of the attachment 18, and the size of the receiving groove 13c is larger than the size of the attachment 18, that is, when the attachment 18 is disposed in the receiving groove 13c, there is a gap between the attachment 18 and the groove wall of the receiving groove 13c, which can reduce the damage problem caused by direct contact between the attachment 18 and the groove wall of the receiving groove 13c.

[0075] In some embodiments, a buffer layer may also be provided on the bottom and / or the wall of the receiving groove 13c to reduce the risk of damage to the attachment 18 disposed in the receiving groove 13c.

[0076] Please continue to refer to Figure 3As shown, the vacuum adsorption device 16 includes an adsorption hole 161, which extends from the second surface 13b to the receiving groove 13c and is connected to the receiving groove 13c. In this way, the adsorption hole 161 is matched with the receiving groove 13c, and the adsorption hole 161 is evacuated, so that the attachment 18 can be better fixed in the receiving groove 13c by vacuum adsorption, ensuring that the attachment 18 is firmly fixed in the receiving groove 13c and is not easy to move, further reducing the risk of damage to the attachment 18 due to movement.

[0077] In some embodiments, one adsorption hole 161 may be connected to one receiving groove 13 c , but is not limited thereto. In some embodiments, multiple adsorption holes 161 may be connected to a vacuum device through multiple vacuum channels, and the vacuum device vacuums the multiple adsorption holes 161 .

[0078] In some embodiments, reference Figure 3 As shown, the vacuum adsorption device 16 further includes a suction nozzle 162, which is disposed on the second surface 13b, and the air flow channel of the suction nozzle 162 is connected to the adsorption hole 161. In this way, the suction nozzle 162 is matched with the adsorption hole 161 to improve the sealing performance during the vacuum adsorption process, and further improve the effect of vacuum adsorption and fixing the attachment 18.

[0079] In some embodiments, one suction hole 161 is connected to an air flow channel of a suction nozzle 162. A vacuum device is connected to the suction nozzle 162.

[0080] It should be noted that the vacuum device adopts a general design and will not be described in detail here. The vacuum suction force provided by the vacuum device is greater than or equal to 80 kPa and less than or equal to 90 kPa.

[0081] Reference Figure 3 As shown, the static elimination device 14 includes an ion wind transmission unit 141 and an ion wind generating unit 142. The ion wind transmission unit 141 penetrates the carrier 13 in the direction from the first surface 13a to the second surface 13b and is spaced apart from the receiving groove 13c. The ion wind generating unit 142 generates ion wind F, and the ion wind F is transmitted to the tape 17 to be peeled off via the ion wind transmission unit 141. In this way, in the process of peeling off the tape 17 to be peeled off, the ion wind F flows from the side of the tape 17 to be peeled off close to the first surface 13a to the tape 17 to be peeled off, and the ion wind F can better improve the instantaneous static electricity problem generated by friction during the tape peeling process, and reduce the risk of instantaneous static electricity causing damage to the attachment 18. Moreover, in the process of peeling off the tape 17 to be peeled off, the attachment 18 is arranged in the receiving groove 13c, which can also improve the damage problem of the attachment 18 caused by movement.

[0082] It should be noted that the ion wind F is an airflow including positive and negative charges. In the process of peeling the adhesive tape 17 to be peeled off, if the adhesive tape 17 to be peeled off is separated from the attachment 18 and generates instantaneous static electricity to form positive charges, the negative charge of the ion wind F neutralizes the positive charge generated by the instantaneous static electricity. If the adhesive tape 17 to be peeled off is separated from the attachment 18 and generates instantaneous static electricity to form negative charges, the positive charge of the ion wind F neutralizes the negative charge generated by the instantaneous static electricity.

[0083] It should also be noted that, in the process of peeling the adhesive tape 17 to be peeled, if the ion wind F flows from the side of the adhesive tape 17 to be peeled away from the carrier 13 to the adhesive tape 17 to be peeled, the static electricity problem in the peeling process is still difficult to be effectively improved. However, if the ion wind F flows from the side of the adhesive tape 17 to be peeled close to the first surface 13a to the adhesive tape 17 to be peeled, the static electricity problem in the peeling process can be effectively improved, and then the static electricity damage caused by static electricity to the attachment 18 can be improved.

[0084] In some embodiments, the ion wind transmission portion 141 includes an ion wind transmission hole 144 , and the ion wind transmission hole 144 penetrates the carrier 13 in a direction from the first surface 13 a to the second surface 13 b .

[0085] In some embodiments, the ion wind generating unit 142 may include an ion wind blower. The ion wind generating unit 142 is located at the lower side of the carrier. The ion wind F generated by the ion wind generating unit 142 flows toward the second surface 13b and is transmitted to the adhesive surface 172 of the adhesive tape 17 to be peeled off through the ion wind transmission hole 144.

[0086] In some embodiments, reference Figure 3 and Figure 4 As shown, the static elimination device 14 further includes a blowing part 143, which is connected to the ion wind generating part 142. The air outlet of the blowing part 143 is arranged adjacent to the ion wind transmission hole, and the ion wind F flows out of the air outlet and flows into the ion wind transmission hole 144, so that the flow of the ion wind F is more directional. In some embodiments, the shape of the blowing part 143 is an inverted cone, and the size of the air outlet of the blowing part 143 is smaller than the size of the air inlet of the blowing part 143.

[0087] In some embodiments, reference Figure 3 As shown, the blowing portion 143 is located on a side of the second surface 13 b of the carrier 13 away from the first surface 13 a , and the air outlet of the blowing portion 143 is aligned with the ion wind transmission hole 144 .

[0088] In other embodiments, referring to Figure 4As shown, the air outlet of the blowing part 143 is located in the ion wind transmission hole 144, and the ion wind F flowing out from the air outlet of the blowing part 143 directly flows into the ion wind transmission hole 144, and flows toward the sticky surface 172 of the tape 17 to be peeled off through the ion wind transmission hole 144.

[0089] Reference Figures 3 to 6 As shown, the tape stripping device 15 includes a winding portion 151 and a pulling portion 152. During the stripping process of the adhesive tape 17 to be stripped, the winding portion 151 provides a winding force. The pulling portion 152 pulls the adhesive tape 17 to be stripped under the action of the winding force to be stripped. The winding portion 151 and the pulling portion 152 of the tape stripping device 15 can recycle the adhesive tape 17 to be stripped after stripping.

[0090] The winding portion 151 is cylindrical and rotates in one direction to provide a winding force.

[0091] The traction part 152 includes a first end and a second end opposite to each other. During the process of peeling the adhesive tape 17 to be peeled off, the first end of the traction part 152 is connected to the winding part 151 , and the second end of the traction part 152 is connected to the adhesive tape 17 to be peeled off.

[0092] In some embodiments, Figure 5 As shown, a first end and a second end of a traction portion 152 are respectively connected to the winding portion 151 and the adhesive tape 17 to be peeled off.

[0093] In other embodiments, Figure 6 As shown, the first ends of the plurality of traction parts 152 are connected to the winding part 151, and the plurality of second ends of the plurality of traction parts 152 are respectively connected to different positions of the adhesive tape 17 to be peeled off, so as to apply traction to the plurality of different positions of the adhesive tape 17 to be peeled off, so as to peel off the adhesive tape 17 to be peeled off more quickly and more stably. For example, the plurality of traction parts 152 include a first traction part 1522, a second traction part 1521 and a third traction part 1523 arranged at intervals, and the second traction part 1521 is located between the first traction part 152 and the third traction part 152. In some embodiments, the width of the second traction part 1521 may be greater than the width of the first traction part 1522 and the width of the third traction part 1523, and the width of the first traction part 1522 is the same as the width of the third traction part 1523, so as to ensure that the second traction part 1521 located in the middle can stably pull the adhesive tape 17 to be peeled off.

[0094] In some embodiments, Figure 5As shown, the traction part 152 includes a traction tape 1524, but is not limited thereto. In this way, on the one hand, the traction tape 1524 can be fixedly connected to the adhesive tape 17 to be peeled and the winding part 151 by utilizing the viscosity of the traction tape 1524, and the connecting piece connecting the traction part 152 and the adhesive tape 17 to be peeled can be omitted. On the other hand, the traction tape 1524 is also easier to be rolled up and recycled.

[0095] In some embodiments, when the traction portion 152 includes a traction tape 1524, the peeling force between the second end of the traction portion 152 and the tape 17 to be peeled is greater than the peeling force between the tape 17 to be peeled and the attachment 18, so as to ensure that the traction portion 152 can pull the tape 17 to be peeled off from the attachment 18. By selecting a high-viscosity tape as the traction portion 152, it is ensured that the peeling force between the second end of the traction portion 152 and the tape 17 to be peeled is large. In some embodiments, the peeling force between the second end of the traction portion 152 and the tape 17 to be peeled is greater than or equal to 5N / cm and less than or equal to 7N / cm. In some embodiments, the peeling force between the tape 17 to be peeled and the attachment 18 is greater than or equal to 1.5N / cm and less than or equal to 2.5N / cm.

[0096] In other embodiments, referring to Figure 6 As shown, the traction part 152 may also include a traction belt 1525, which is non-sticky. In other embodiments, the first end and the second end of the traction belt 1525 are respectively connected to the winding part 151 and the adhesive tape 17 to be peeled off through a double-sided adhesive layer (not shown). In other embodiments, the first end of the traction belt 1525 is connected to the winding part 151 through a double-sided adhesive layer, and the second end of the traction belt 1525 is connected to the adhesive tape 17 to be peeled off through a clamp (not shown). The traction belt 1525 includes a plastic belt.

[0097] In some embodiments, the tape stripping device 15 further includes a guide portion 153, which contacts the non-adhesive surface 171 of the tape 17 to be stripped and moves as the tape 17 to be stripped is stripped, thereby adjusting the stripping angle of the tape 17 to be stripped. In this way, the tape 17 to be stripped can be stripped more smoothly and controllably, thereby reducing the risk of damaging the attachment 18 by stripping the tape 17 to be stripped. In some embodiments, the guide portion 153 is in the shape of a rod, such as a round rod.

[0098] It should be noted that, by adjusting the guide portion 153 , the adhesive tape 17 to be peeled off can be peeled off at a specific angle.

[0099] In some embodiments of the present application, for the above-mentioned tape peeling system, after the attachment to which the tape to be peeled is attached is placed in the receiving groove of the carrier, a vacuum adsorption device is used to fix the attachment in the receiving groove. Then, the tape to be peeled off from the attachment is peeled off by the tape peeling device, and at the same time, an electrostatic eliminator is used to output ion wind, which flows from the side of the carrier close to the tape to be peeled to the tape to be peeled, so as to improve the problem of damage to the attachment caused by static electricity generated instantly during the peeling process.

[0100] Please refer to Figure 7 As shown, it is a flow chart of the tape stripping method of some embodiments of the present application. The tape stripping method comprises the following steps:

[0101] Step S101: providing an attachment having an adhesive tape to be peeled off;

[0102] Step S102: providing a carrier, the carrier comprising a receiving groove and a first surface and a second surface arranged opposite to each other, the receiving groove being sunken from the first surface to the second surface;

[0103] Step S103: providing a static electricity elimination device, including an ion wind transmission part and an ion wind generation part, wherein the ion wind transmission part penetrates the carrier in a direction from the first surface to the second surface and is spaced apart from the receiving groove;

[0104] Step S104: placing the attachment in the receiving groove, and placing the adhesive tape to be peeled off on a side of the attachment away from the first surface; and

[0105] Step S105: the ion wind generating unit generates ion wind, and the ion wind is transmitted to the adhesive tape to be peeled off via the ion wind transmitting unit.

[0106] In some embodiments, reference Figure 1 and Figure 2 As shown, for the above step S101, providing an attachment 18 attached with the adhesive tape 17 to be peeled off includes the following steps:

[0107] Step S1011, fix the non-adhesive surface 171 of the adhesive tape 17 to be peeled on the transfer sheet 12, and make the adhesive surface 172 of the adhesive tape 17 to be peeled be located on the side of the non-adhesive surface 171 away from the transfer sheet 12;

[0108] Step S1012, placing the transfer sheet 12 provided with the adhesive tape 17 to be peeled off on the vacuum adsorption device 16, and fixing the transfer sheet 12 by vacuum adsorption; and

[0109] Step S1013 , transferring the attachment 18 to the sticky surface 172 of the adhesive tape 17 to be peeled off, to obtain the attachment 18 attached with the adhesive tape 17 to be peeled off, and the adhesive tape 17 to be peeled off is fixed on the transfer sheet 12 .

[0110] In some embodiments, reference Figure 3 and Figure 4 As shown, for the above step S102, at least two receiving grooves 13c have different sizes. In this way, the application scope of the carrier 13 is broadened, that is, the carrier 13 can be applied to attachments 18 of different sizes and types. For example, the plurality of receiving grooves 13c include a first receiving groove 13c1 and a second receiving groove 13c2, and the size of the first receiving groove 13c1 is larger than the size of the second receiving groove 13c2.

[0111] In some embodiments, please refer to Figure 3 and Figure 4 As shown, the carrier 13 is further provided with an adsorption hole 161 extending from the second surface 13b to the receiving groove 13c and communicating with the receiving groove 13c.

[0112] In some embodiments, reference Figure 3 and Figure 4 As shown, for the above step S103, the ion wind transmission part 141 includes: an ion wind transmission hole 144, and in the direction from the first surface 13a to the second surface 13b, the ion wind transmission hole 144 penetrates the carrier 13. In some embodiments, the static elimination device 14 also includes: a blowing part 143, the blowing part 143 is connected to the ion wind generating part 142, and the air outlet of the blowing part 143 is arranged adjacent to the ion wind transmission hole 144.

[0113] In some embodiments, reference Figure 3 and Figure 4 As shown, for the above step S104, placing the attachment 18 in the receiving groove 13c includes the following steps:

[0114] Step S1041, transferring the transfer sheet 12 obtained in the above step S1013 to the carrier 13;

[0115] Step S1042, placing at least two attachments 18 of different sizes in at least two receiving grooves 13c of different sizes respectively; and

[0116] Step S1043, removing the transfer sheet 12 on the adhesive tape 17 to be peeled off.

[0117] In some embodiments, before executing the step S105 , the method further includes: evacuating the adsorption hole 161 to adsorb the attachment 18 .

[0118] In some embodiments, for the above step S105, it also includes:

[0119] The ion wind F generated by the ion wind generating section 142 flows into the blowing section 143; and

[0120] The ion wind F flows out from the air outlet of the blowing portion 143 and flows into the ion wind transmission hole 144 .

[0121] In some embodiments, reference Figures 3 to 6 As shown, during the above step S105, the above method further includes the following steps:

[0122] Step S1061: providing a tape stripping device 15, wherein the tape stripping device 15 comprises a winding portion 151 and a pulling portion 152, wherein the pulling portion 152 comprises a first end and a second end opposite to each other;

[0123] Step S1062: Connecting the first end of the traction portion 152 to the winding portion 151 , and connecting the second end of the traction portion 152 to the adhesive tape 17 to be peeled off; and

[0124] Step S1063: the winding portion 151 provides a winding force, and the pulling portion 152 pulls the adhesive tape 17 to be peeled off from the attachment 18 under the action of the winding force.

[0125] In some embodiments, in the above step S1061, the tape stripping device 15 further includes a guide 153; during the above step S1063, the guide 153 contacts the non-adhesive surface 171 of the adhesive tape 17 to be stripped away from the attachment 18, and moves as the adhesive tape 17 to be stripped is stripped, thereby adjusting the stripping angle of the adhesive tape 17 to be stripped. In this way, the adhesive tape 17 to be stripped can be stripped more smoothly and controllably, reducing the risk of damaging the attachment 18 by stripping the adhesive tape 17 to be stripped.

[0126] In some embodiments, for the above step S1062 , connecting the second end of the traction portion 152 to the adhesive tape 17 to be peeled includes: connecting multiple second ends of multiple traction portions 152 to multiple different positions of the adhesive tape 17 to be peeled, respectively.

[0127] In some embodiments, reference Figure 5 As shown, the traction part 152 includes a traction tape 1524, but is not limited thereto. In this way, on the one hand, the traction tape 1524 can be fixedly connected to the adhesive tape 17 to be peeled and the winding part 151 by utilizing the viscosity of the traction tape 1524, and the connecting piece connecting the traction part 152 and the adhesive tape 17 to be peeled can be omitted. On the other hand, the traction tape 1524 is also easier to be rolled up and recycled.

[0128] In some embodiments, for the above step S1062, connecting the first end of the traction portion 152 to the reel portion 151 includes: bonding one end of the traction tape to the reel portion 151;

[0129] Connecting the second end of the traction portion 152 to the adhesive tape 17 to be peeled includes: bonding the other end of the traction tape to the adhesive tape 17 to be peeled.

[0130] In the tape stripping method of some embodiments of the present application, first, the attachment 18 attached with the tape 17 to be stripped is transferred to the carrier 13, and the attachment 18 is arranged in the receiving groove 13c of the carrier 13. Next, the adsorption holes 161 on the carrier 13 are evacuated to fix the attachment 18; finally, the traction part 152, the guide part 153 and the winding part 151 cooperate with each other to strip the tape 17 to be stripped from the attachment 18, and at the same time, the ion wind F flows from the first surface 13a to the sticky surface 172 of the tape 17 to be stripped. In this way, the ion wind F can better improve the static electricity problem in the stripping process and reduce the risk of static electricity causing damage to the attachment 18. Moreover, in the process of stripping the tape 17 to be stripped, the attachment 18 is arranged in the receiving groove 13c, which can also improve the damage problem of the attachment 18 caused by movement.

[0131] The description of the above embodiments is only used to help understand the technical solutions and core ideas of the present application. Ordinary technical personnel in this field should understand that they can still modify the technical solutions recorded in the aforementioned embodiments, or replace some of the technical features therein with equivalents. However, these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present application.

Claims

1. A tape stripping system, characterized in that: include: The carrier comprises a receiving groove and a first surface and a second surface which are arranged opposite to each other, wherein the receiving groove is sunken from the first surface to the second surface; as well as The static electricity elimination device includes an ion wind transmission part and an ion wind generating part. The ion wind transmission part penetrates the carrier in the direction from the first surface to the second surface and is spaced apart from the receiving groove. The ion wind generating part generates ion wind, and the ion wind is transmitted to the tape to be peeled off via the ion wind transmission part.

2. The tape stripping system according to claim 1, characterized in that: The ion wind transmission part comprises: an ion wind transmission hole, which passes through the carrier in a direction from the first surface to the second surface; The static electricity elimination device also includes: a blowing part connected to the ion wind generating part, the air outlet of the blowing part is arranged adjacent to the ion wind transmission hole, and the ion wind flows out from the air outlet and flows into the ion wind transmission hole.

3. The tape stripping system according to claim 1, characterized in that: Also included is a tape stripping device, the tape stripping device comprising: The winding section provides the winding force; The traction part includes a first end and a second end opposite to each other. When peeling off the adhesive tape to be peeled off, the first end of the traction part is connected to the winding part, and the second end of the traction part is connected to the adhesive tape to be peeled off. The traction part pulls the adhesive tape to be peeled off under the action of the winding force.

4. The tape stripping system according to claim 3, characterized in that: The tape stripping device also includes: The guide part contacts the non-sticky surface of the adhesive tape to be peeled off and moves along with the peeling of the adhesive tape to be peeled off to adjust the peeling angle of the adhesive tape to be peeled off.

5. The tape stripping system according to claim 3, characterized in that: The plurality of second ends are respectively connected to different positions of the adhesive tape to be peeled off.

6. The tape stripping system according to any one of claims 3 to 5, characterized in that: The traction portion includes a traction tape.

7. The tape stripping system according to claim 1, characterized in that: It also includes a vacuum adsorption device, the vacuum adsorption device comprising: The adsorption hole extends from the second surface to the containing groove and is communicated with the containing groove.

8. The tape stripping system according to claim 7, characterized in that: The vacuum adsorption device also includes: A suction nozzle is arranged on the second surface, and an air flow channel of the suction nozzle is communicated with the adsorption hole.

9. The tape stripping system according to claim 1, characterized in that: At least two of the containing grooves have different sizes.

10. A tape stripping method, characterized in that: The method comprises: Providing an attachment having an adhesive tape to be peeled off; Providing a carrier, the carrier comprising a containing groove and a first surface and a second surface arranged opposite to each other, the containing groove being sunken from the first surface to the second surface; A static electricity elimination device is provided, comprising an ion wind transmission part and an ion wind generating part, wherein the ion wind transmission part penetrates the carrier in a direction from the first surface to the second surface and is spaced apart from the containing groove; placing the attachment in the receiving groove, and placing the adhesive tape to be peeled off on a side of the attachment away from the first surface; and The ion wind generating unit generates ion wind, and the ion wind is transmitted to the adhesive tape to be peeled off via the ion wind transmitting unit.

11. The tape stripping method according to claim 10, characterized in that: The ion wind transmission part comprises: an ion wind transmission hole, which passes through the carrier in a direction from the first surface to the second surface; The static elimination device further comprises: a blowing part connected to the ion wind generating part, wherein the air outlet of the blowing part is arranged adjacent to the ion wind transmission hole; The method further includes: the ion wind flows out from the air outlet and flows into the ion wind transmission hole.

12. The tape stripping method according to claim 10, characterized in that: The method further comprises: Providing a tape stripping device, the tape stripping device comprising a winding portion and a pulling portion, the pulling portion comprising a first end and a second end opposite to each other; Connecting the first end of the traction portion to the winding portion, and connecting the second end of the traction portion to the adhesive tape to be peeled; and The winding portion provides a winding force, and the traction portion pulls the adhesive tape to be peeled off from the attachment under the action of the winding force.

13. The tape stripping method according to claim 12, characterized in that: The tape stripping device further includes a guide portion, and the method further includes: The guide portion contacts the non-adhesive surface of the adhesive tape to be peeled away from the attachment, and moves along with the peeling of the adhesive tape to be peeled, so as to adjust the peeling angle of the adhesive tape to be peeled.

14. The tape stripping method according to claim 12, characterized in that: The step of connecting the second end of the traction portion to the adhesive tape to be peeled comprises: The plurality of second ends are respectively connected to a plurality of different positions of the adhesive tape to be peeled off.

15. The tape stripping method according to claim 12, characterized in that: The traction part includes a traction tape; The step of connecting the first end of the traction portion to the winding portion comprises: bonding one end of the traction tape to the winding portion; The step of connecting the second end of the traction portion to the adhesive tape to be peeled includes: bonding the other end of the traction tape to the adhesive tape to be peeled.

16. The tape stripping method according to claim 10, characterized in that: The carrier is also provided with an adsorption hole extending from the second surface to the containing groove and communicating with the containing groove; The method further includes: vacuuming the adsorption hole to adsorb the attachment.

17. The tape stripping method according to claim 10, characterized in that: At least two of the receiving grooves have different sizes; and placing the attachment in the receiving groove comprises: The at least two attachments of different sizes are respectively placed in the at least two receiving grooves of different sizes.