Single silicon wafer storage and turnover machine for solar silicon wafers
By designing a single-chip flap storage machine for solar silicon wafers, the silicon wafer over-drying problem caused by inconsistent processing speeds of front and rear equipment is solved, and the effective cooling, buffering, flip and rotation of single-chip silicon wafers is achieved to meet the needs of the production line.
Patent Information
- Application Number
- CN202411727439.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2024-11-28
- Publication Date
- 2025-02-25
AI Technical Summary
During the solar silicon wafer production process, the processing speed of the front drying furnace and the rear printing press is inconsistent, resulting in the single-chip silicon wafer being in the drying furnace for too long, which may lead to the silicon wafer being overdried.
A single-chip flap storage machine for solar silicon wafers is designed, including transportation guide rail components, cooling components, single-chip buffer components, single-chip flap components and rotating components, which are used to achieve cooling, buffering, flip and rotation of single-chip silicon wafers to adapt to the speed differences between front and rear equipment.
It effectively prevents single-piece silicon wafers from being in the drying furnace for too long, avoids overdrying of silicon wafers, and also has cooling, flip plates and rotation functions to meet production needs.
Smart Images
Figure CN119502549A_ABST
Abstract
Description
Technical Field
[0001] The invention relates to the technical field of silicon wafer production, and in particular to a single-wafer storage and flipping machine for solar silicon wafers. Background Art
[0002] During the printing process of solar silicon wafers on the production line, they need to be dried in the front drying furnace and printed in the back printing machine. The drying furnace and the printing machine have different processing speeds for single silicon wafers, resulting in inconsistent processing time before and after. According to the front and back speeds, the cache capacity should be adapted to prevent the single silicon wafer from staying in the drying furnace for too long, resulting in over-baking of the silicon wafer. Summary of the invention
[0003] One object of the present invention is to provide a single-wafer storage and flipping machine for solar silicon wafers, which meets the single-wafer cooling, caching, flipping and rotation requirements required for the docking of front and rear equipment.
[0004] To achieve this object, the present invention adopts the following technical solutions:
[0005] A single-wafer storage and turnover machine for solar silicon wafers comprises a transport guide rail component, a cooling component, a single-wafer buffer component, a single-wafer flipping component and a rotating component, wherein the transport guide rail component is provided with a section of single-wafer conveying rail, the cooling component is located at one side of the front end of the transport guide rail component, the upper end of the cooling component is located above the transport guide rail component, the middle part of the transport guide rail component passes through the single-wafer buffer component, the single-wafer flipping component is located behind the single-wafer buffer component, and the rotating component is located at one side of the rear end of the transport guide rail component.
[0006] As a preferred technical solution, a clamping plate part is provided on the transport guide rail component, and a clamping plate motor is provided on the clamping plate part. The driving end of the clamping plate motor is connected to a clamping plate support through a synchronous wheel and a synchronous belt transmission. The clamping plate support is located on both sides of the single-piece conveyor rail, and a clamping plate wheel is rotated on the clamping plate support. A sensor is installed on one side of the single-piece conveyor rail.
[0007] As a preferred technical solution, the cooling component includes a cooling bracket and several cooling fans. A cooling plate is installed on the upper end of the cooling bracket. The cooling fans are distributed on the cooling plate along the front-to-back direction. The cooling fans are directly above the single-piece conveying rail. A start button is installed on the cooling plate.
[0008] As a preferred technical solution, the single-chip cache component includes a cache lifting module and a cache frame, the cache frame is fixed on the driving end of the cache lifting module, a single-chip cache position is arranged on the cache frame, and cache support rods are arranged on both sides of the single-chip cache position.
[0009] As a preferred technical solution, the single-piece flap component includes a flap side support, a flap motor and a flap wheel. The flap motor is fixed to the outside of the flap side support. The driving end of the flap motor is connected to a flap shaft. The flap shaft passes through the middle of the flap wheel. A plurality of flap grooves are arranged on the flap wheel. A flap guide wheel is arranged at the outer end of the flap groove.
[0010] As a preferred technical solution, the rotating component includes a steering vertical movement module and a steering motor. The driving end of the steering vertical movement module is connected to a steering support, and the steering motor is installed on the steering support. The driving end of the steering motor is transmission-connected to a steering adsorption plate, and the steering adsorption plate rotates at the lower end of the steering support.
[0011] As a preferred technical solution, a support rod is installed at the rear end of the single-piece conveyor rail, and the support rod is connected below the single-piece conveyor rail.
[0012] The beneficial effects of the present invention are as follows: a single-wafer storage and flipping machine for solar silicon wafers is provided, which caches single silicon wafers and is used to temporarily store excess single solar silicon wafers when the speed of a front drying furnace is inconsistent with a rear printing speed, to prevent the front speed from being too fast and the rear speed from not keeping up, thereby blocking the wafers in the drying furnace and causing over-drying of the wafers. The machine has the functions of cooling, flipping and rotating direction, and has a reasonable overall design and a compact structure, meeting production requirements. BRIEF DESCRIPTION OF THE DRAWINGS
[0013] The present invention is further described in detail below based on the accompanying drawings and embodiments.
[0014] Figure 1 A schematic diagram of the internal structure of a single-wafer storage and flipping machine for solar silicon wafers described in an embodiment;
[0015] Figure 2 It is a schematic structural diagram of the cooling component described in the embodiment;
[0016] Figure 3 It is a structural schematic diagram of the splint part described in the embodiment;
[0017] Figure 4 It is a schematic diagram of the structure of the monolithic cache component described in the embodiment;
[0018] Figure 5 It is a structural schematic diagram of a single-piece flap component according to an embodiment;
[0019] Figure 6 It is a structural schematic diagram of the rotating component described in the embodiment;
[0020] Figure 7 It is a schematic structural diagram of the transport rail component described in the embodiment.
[0021] Figures 1 to 7 middle:
[0022] 1. Transport guide rail component; 2. Cooling component; 3. Single-chip cache component; 4. Single-chip flap component; 5. Rotating component; 6. Clamp part; 7. Clamp motor; 8. Synchronous wheel; 9. Synchronous belt; 10. Clamp support; 11. Clamp wheel; 12. Sensor; 13. Cooling bracket; 14. Cooling fan; 15. Cooling plate; 16. Start button; 17. Cache lifting module; 18. Cache frame; 19. Single-chip cache position; 20. Cache support rod; 21. Flap side support; 22. Flap motor; 23. Flap wheel; 24. Flap slot; 25. Flap guide wheel; 26. Steering vertical movement module; 27. Steering motor; 28. Steering support; 29. Steering adsorption plate; 30. Support rod. DETAILED DESCRIPTION
[0023] The technical solution of the present invention is further described below with reference to the accompanying drawings and through specific implementation methods.
[0024] like Figures 1 to 7 As shown, in this embodiment, a single-wafer storage and turning machine for solar silicon wafers includes a transport guide rail component 1, a cooling component 2, a single-wafer buffer component 3, a single-wafer turning component 4 and a rotating component 5. A single-wafer conveyor rail is arranged on the transport guide rail component 1, the cooling component 2 is located at the front end side of the transport guide rail component 1, the upper end of the cooling component 2 is above the transport guide rail component 1, the middle part of the transport guide rail component 1 passes through the single-wafer buffer component 3, the single-wafer turning component 4 is behind the single-wafer buffer component 3, and the rotating component 5 is located at the rear end side of the transport guide rail component 1.
[0025] The single silicon wafer coming out of the drying furnace enters the transport guide component 1 for transportation, first passes through the cooling component 2 for air cooling, and then enters the single-chip buffer component 3 that can be raised and lowered for temporary storage, and then is flipped 180° in the single-chip flip component 4 according to production needs (if flipping is not required, it can be directly moved backward from the middle of the single-chip flip component 4), and finally is also adsorbed and lifted by the rotating component 5 according to production needs, and turned 90° on the plane to meet the direction correspondence of the gate line.
[0026] A clamping plate part 6 is provided on the transport guide rail component 1, and a clamping plate motor 7 is provided on the clamping plate part 6. The driving end of the clamping plate motor 7 is connected to a clamping plate support 10 through a synchronous wheel 8 and a synchronous belt 9. The clamping plate support 10 is located on both sides of the single-chip conveying rail. Clamping wheels 11 are rotated on the clamping plate support 10. A sensor 12 is installed on one side of the single-chip conveying rail. The single-chip silicon wafer is continuously conveyed backward by the belt on the single-chip conveying rail of the transport guide rail component 1. When entering the clamping plate component, the clamping plate motor 7 controls the clamping plates 10 on both sides to move closer to the middle of the single-chip conveying rail through the synchronous wheel 8 and the synchronous belt 9, so that the position of the single-chip silicon wafer is placed in the middle of the single-chip conveying rail, which is sensed by the sensor 12.
[0027] The cooling component 2 includes a cooling bracket 13 and a plurality of cooling fans 14. A cooling plate 15 is installed at the upper end of the cooling bracket 13. The cooling fans 14 are distributed on the cooling plate 15 along the front-to-back direction. The cooling fans 14 are located directly above the single-wafer conveying rail. A start button 16 is installed on the cooling plate 15. After the single silicon wafer comes out of the high-temperature furnace, it is first located below the cooling bracket 13. After the start button 16 is started, the cooling fan 14 starts working to blow air to cool the single silicon wafer.
[0028] The single-chip cache component 3 includes a cache lifting module 17 and a cache frame 18. The cache frame 18 is fixed on the driving end of the cache lifting module 17. A single-chip cache position 19 is arranged on the cache frame 18. Cache support rods 3020 are arranged on both sides of the single-chip cache position 19. The cooled single-chip silicon wafer enters the cache frame 18, and both sides are supported by the cache support rods 3020 of each layer. The cache lifting module 17 controls the cache frame 18 to realize lifting and lowering, and receives and discharges single-chip silicon wafers of different layers.
[0029] The single-chip flap component 4 includes a flap side support 21, a flap motor 22 and a flap wheel 23. The flap motor 22 is fixed on the outer side of the flap side support 21. The driving end of the flap motor 22 is connected to a flap shaft. The flap shaft passes through the middle of the flap wheel 23. A plurality of flap grooves 24 are arranged on the flap wheel 23. A flap guide wheel 25 is arranged at the outer end of the flap groove 24. The single-chip silicon wafer coming out of the single-chip cache component 3 enters the single-chip flap component 4. When the single-chip silicon wafer enters the flap groove 24 under the action of the flap guide wheel 25, the flap motor 22 controls the rotation of the flap shaft to rotate the flap wheel 23. The single-chip silicon wafer in the flap groove 24 is flipped 180° and then output from the rear.
[0030] The rotating component 5 includes a steering vertical movement module 26 and a steering motor 27. The driving end of the steering vertical movement module 26 is connected to a steering support 28, and the steering motor 27 is installed on the steering support 28. The driving end of the steering motor 27 is transmission-connected to a steering adsorption plate 29. The steering adsorption plate 29 rotates at the lower end of the steering support 28. In order to connect the processing silicon wafer directions of the front and rear equipment, the steering vertical movement module 26 controls the steering adsorption plate 29 to move downward, adsorbs the single silicon wafer, and then rotates 90° under the action of the steering motor 27 and puts it back into the single wafer conveying rail for continued backward conveying.
[0031] A support rod 30 is installed at the rear end of the single-piece conveyor rail. The support rod 30 is connected to the bottom of the single-piece conveyor rail. The support of the support rod 30 can extend the length of the single-piece conveyor rail to meet the demand for increased functions.
[0032] It should be stated that the above-mentioned specific implementation methods are only preferred embodiments of the present invention and the technical principles used. Within the technical scope disclosed by the present invention, any changes or substitutions that can be easily thought of by technicians familiar with this technical field should be included in the protection scope of the present invention.
Claims
1. A single-wafer storage and turning machine for solar silicon wafers, characterized in that: It includes a transport guide rail component, a cooling component, a single-chip buffer component, a single-chip flap component and a rotating component. The transport guide rail component is provided with a section of single-chip conveyor rail. The cooling component is located at the front end side of the transport guide rail component. The upper end of the cooling component is above the transport guide rail component. The middle part of the transport guide rail component passes through the single-chip buffer component. The single-chip flap component is located behind the single-chip buffer component. The rotating component is located at the rear end side of the transport guide rail component.
2. A solar silicon wafer storage and turning machine according to claim 1, characterized in that: The transport guide rail component is provided with a clamping plate part, and the clamping plate part is provided with a clamping plate motor. The driving end of the clamping plate motor is connected to a clamping plate support through a synchronous wheel and a synchronous belt transmission. The clamping plate support is located on both sides of the single-piece conveying rail, and a clamping plate wheel is rotated on the clamping plate support. A sensor is installed on one side of the single-piece conveying rail.
3. The single-wafer storage and turning machine for solar silicon wafers according to claim 1, characterized in that: The cooling component includes a cooling bracket and several cooling fans. A cooling plate is installed on the upper end of the cooling bracket. The cooling fans are distributed on the cooling plate along the front-to-back direction. The cooling fans are located directly above the single-piece conveying rail. A start button is installed on the cooling plate.
4. The single-wafer storage and turning machine for solar silicon wafers according to claim 1, characterized in that: The single-chip cache component includes a cache lifting module and a cache frame. The cache frame is fixed on the driving end of the cache lifting module. The cache frame is provided with a single-chip cache position. Cache support rods are provided on both sides of the single-chip cache position.
5. The single-wafer storage and turning machine for solar silicon wafers according to claim 1, characterized in that: The single-piece flap component includes a flap side support, a flap motor and a flap wheel. The flap motor is fixed on the outer side of the flap side support. The driving end of the flap motor is connected to a flap shaft. The flap shaft passes through the middle of the flap wheel. A plurality of flap grooves are arranged on the flap wheel. A flap guide wheel is arranged at the outer end of the flap groove.
6. The solar silicon wafer storage and turning machine according to claim 1, characterized in that: The rotating component includes a steering vertical movement module and a steering motor. The driving end of the steering vertical movement module is connected to a steering support. The steering motor is installed on the steering support. The driving end of the steering motor is transmission-connected to a steering adsorption plate. The steering adsorption plate rotates at the lower end of the steering support.
7. The solar silicon wafer storage and turning machine according to claim 1, characterized in that: A support rod is installed at the rear end of the single-piece conveying rail, and the support rod is connected below the single-piece conveying rail.