Chip unsealing equipment
By using dropping mechanism and laser ablation technology in the chip open-closing equipment, the dropping amount of chemical corrosion liquid is accurately controlled, and the problem of damage to the chip during the open-closing process is solved, achieving a safer and more efficient chip open-closing process.
Patent Information
- Application Number
- CN202411719926.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2024-11-28
- Publication Date
- 2025-02-25
AI Technical Summary
During the process of chip opening, chemical corrosion liquid is difficult to control accurately, resulting in the chip being easily damaged during the corrosion process.
A chip open sealing device is designed, using a dropping mechanism to drip a quantitative chemical corrosion liquid into the groove of the plastic sealing device in a small amount and multiple times, and the corrosion process is accurately controlled through laser ablation and the coordination of the driving mechanism.
By accurately controlling the dropping amount of corrosion liquid, the corrosion rate of plastic sealing devices is reduced and the chip is damaged.
Smart Images
Figure CN119510095A_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the field of semiconductor equipment, and in particular to a chip decapsulation device. Background Art
[0002] The main purpose of chip unsealing is to conduct in-depth technical analysis and research. By removing the packaging materials outside the chip, the circuit structure, manufacturing process and material properties inside the chip can be directly observed and analyzed, so as to conduct failure analysis, reverse engineering, reliability assessment or safety inspection. This operation is of great significance for improving chip design level, optimizing production process and ensuring product quality and safety.
[0003] At present, when the chip is unsealed, a groove larger than the chip size is processed on the surface of the plastic-sealed device using a laser, and a chemical etching liquid is dripped into the groove using a dropper. After the chemical etching liquid corrodes the surface of the plastic-sealed device, the plastic-sealed device is placed in an acetone solution and cleaned in an ultrasonic machine for 2-5 minutes, then the plastic-sealed device is taken out and the chemical etching liquid is dripped into it again. Repeat the above steps until the chip is completely exposed, and the chip is unsealed.
[0004] Since the chip and the plastic-encapsulated device are fixed by glue, when the chip thickness is extremely small, stress will be generated in the chip during the process of chemical etching liquid corroding the plastic-encapsulated device, causing damage to the chip during the corrosion process. Therefore, it is necessary to drip a very small amount of chemical etching liquid each time and slow down the corrosion rate of the plastic-encapsulated device. However, the dosage of chemical etching liquid dripped by the dropper is difficult to accurately control, so it is very easy to cause damage to the chip. Summary of the invention
[0005] In order to reduce the possibility of chip damage during chip unsealing, the present application provides a chip unsealing device.
[0006] The chip decapsulation device provided in this application adopts the following technical solution: A chip unsealing device comprises a workbench, wherein a column is arranged on the workbench, a swivel is rotatably sleeved on the column, a laser emitting mechanism and a dripping mechanism are arranged on opposite sides of the outer side wall of the swivel, a driving mechanism is arranged on the workbench, a clamping tool for clamping and fixing a plastic-sealed device is arranged on the driving end of the driving mechanism, the laser emitting mechanism performs laser ablation on the plastic-sealed device, and the dripping mechanism performs quantitative dripping on the plastic-sealed device, a cleaning tank is arranged on the workbench below the driving mechanism, and the driving mechanism drives the clamping tool to move in and out of the cleaning tank.
[0007] By adopting the above technical solution, the plastic-sealed device is fixed in the clamping fixture, the clamping fixture is fixed on the driving mechanism, the rotating ring is rotated to move the laser emitting mechanism to the top of the clamping fixture, the laser emitting mechanism laser ablates a groove on the upper surface of the plastic-sealed device, and then the rotating ring is rotated to move the dripping mechanism to the top of the clamping fixture, the dripping mechanism drips a certain amount of chemical corrosion liquid into the groove in small amounts and multiple times, the rotating ring is rotated again so that the laser emitting mechanism and the dripping mechanism are not located above the clamping fixture, the driving mechanism drives the clamping fixture to move into the cleaning tank, so as to clean the plastic-sealed device, and the above steps are repeated multiple times to complete the chip unsealing. In this way, the dripping mechanism is used to drip a certain amount of chemical corrosion liquid into the groove in small amounts and multiple times, so that the corrosion rate of the plastic-sealed device is reduced, thereby reducing the damage to the chip.
[0008] Preferably, the dripping mechanism includes a dripping box, a pull rod, a first transmission part, a second transmission part, a first piston, a liquid supply plate and a dropper, a liquid storage chamber and a pressure chamber are formed in the dripping box, the liquid supply plate is rotatably arranged in the dripping box, a part of the liquid supply plate is located in the liquid storage chamber, and another part of the liquid supply plate is located in the pressure chamber, a plurality of liquid supply holes are provided in the liquid supply plate along its own circumference at equal intervals, the pull rod is slidably arranged in the dripping box, the first transmission component is arranged in the dripping box and transmission-connects the pull rod and the liquid supply plate, a liquid storage groove is provided on the bottom wall of the dripping box located in the pressure chamber, and when the pull rod moves toward the outside of the dripping box, the pull rod is connected to the liquid supply plate through the first transmission part. The moving component drives the liquid supply plate to rotate, and when the liquid supply hole of the liquid supply plate moves through the liquid storage tank, the corrosive liquid in the liquid supply hole flows into the liquid storage tank; a first sliding hole connected to the pressure chamber is opened in the dripping box, and the first piston is slidably arranged in the first sliding hole, and the second transmission component is arranged in the dripping box and transmits and connects the pull rod and the liquid supply plate, and the dropper is arranged in the dripping box, and the top end of the dropper is connected to the liquid storage tank, and the bottom end passes through the dripping box. When the pull rod moves toward the inside of the dripping box, the pull rod drives the first piston to move toward the pressure chamber through the second transmission component, and the air pressure in the pressure chamber increases and presses the corrosive liquid in the liquid storage tank into the dropper to drip.
[0009] By adopting the above technical solution, the pull rod is pulled toward the outside of the drip box, the pull rod drives the liquid supply plate to rotate through the first transmission component, the liquid supply plate drives the liquid supply hole to rotate, the liquid supply hole moves from the liquid storage chamber to the pressure chamber, and the corrosive liquid in the liquid supply hole flows into the liquid storage tank. By controlling the pulling distance of the pull rod, the rotation angle of the liquid supply plate can be controlled, and then the dosage of the corrosive liquid in the liquid storage tank can be controlled, so that the dosage of the corrosive liquid dripped each time is more accurate; the pull rod is pushed toward the inside of the drip box, the pull rod drives the first piston to slide through the second transmission component, the first piston moves and increases the air pressure in the pressure chamber, the pressure chamber acts on the liquid storage tank, so that the corrosive liquid in the liquid storage tank flows into the dropper, and the corrosive liquid then drips from the dropper into the groove of the plastic-sealed device.
[0010] Preferably, the first transmission component includes a first gear, a synchronization shaft and a first drive rack, the first drive rack is arranged on the side wall of the pull rod, the first gear is rotatably arranged in the drip box, the two ends of the synchronization shaft are respectively fixedly connected to the first gear and the liquid supply plate, when the pull rod moves toward the outside of the drip box, the first drive rack is engaged with the first gear, and when the pull rod moves toward the inside of the drip box, the first drive rack is not engaged with the first gear.
[0011] By adopting the above technical solution, when the pull rod moves toward the outside of the drip box, the first drive rack meshes with the first gear and drives the first gear to rotate, and the first gear then drives the liquid supply plate to rotate through the synchronization shaft. When the pull rod moves toward the inside of the drip box, the first drive rack does not mesh with the first gear. At this time, the movement of the first drive rack will not drive the first gear to rotate.
[0012] Preferably, the first driving rack includes a rack body, a plurality of teeth and an elastic reset member, the rack body is fixedly arranged on the side wall of the pull rod, the plurality of teeth are rotatably arranged in the rack body at equal intervals along the length direction of the rack body, the plurality of elastic reset members are arranged in the rack body, the elastic reset member connects the rack body and the teeth and is used to drive the teeth to rotate and reset, when the pull rod moves toward the outside of the drip box, the teeth are meshed with the first gear, and when the pull rod moves toward the inside of the drip box, the teeth rotate without meshing with the first gear.
[0013] By adopting the above technical solution, when the pull rod moves toward the outside of the drip box, the tooth body engages with the first gear, thereby driving the liquid supply plate to rotate; when the pull rod moves toward the inside of the drip box, the first gear pushes the tooth body to rotate, so that the tooth body does not engage with the first gear; when the tooth body is separated from the first gear, the elastic reset member drives the tooth body to rotate and reset.
[0014] Preferably, one end of the synchronization shaft passes through the liquid supply disk, and a limiting disk is fixedly provided at the end of the synchronization shaft passing through the liquid supply disk. A plurality of limiting grooves are provided on the outer wall of the limiting disk at equal intervals along its circumference, and the plurality of limiting grooves correspond to a plurality of liquid supply holes. A limiting block is slidably provided in the drip box along the diameter direction of the limiting disk, and a first elastic member is provided in the drip box for pushing the limiting block into the limiting groove, and the end of the limiting block is arc-shaped.
[0015] By adopting the above technical scheme, when the pull rod moves toward the outside of the drip box and drives the liquid supply disc to rotate, the limit disc rotates synchronously with the liquid supply disc, and when the liquid supply hole of the liquid supply disc moves to just above the liquid storage tank, the limit disc drives the limit slot to move to the limit block, and the first elastic member pushes the limit block into the limit slot, so that the limit disc can be limited, and then the rotation of the liquid supply disc is limited, so that each time the liquid supply disc rotates, the liquid supply hole can be just above the liquid storage tank, and the end of the limit block is arc-shaped to facilitate the limit block to slide out of the limit slot; when the pull rod moves toward the inside of the drip box, the limit block limits the liquid supply disc through the limit slot, so that the liquid supply disc does not rotate.
[0016] Preferably, the second transmission component includes a second gear, a screw rod and a second drive rack, the second drive rack is arranged on the side wall of the pull rod away from the first drive rack, the second gear is rotatably arranged in the drip box and meshes with the second drive rack, the screw rod is rotatably arranged in the first slide hole of the drip box along the axial direction of the first slide hole, the screw rod is fixedly connected to the second gear rod, and the screw rod is threaded through the first piston.
[0017] By adopting the above technical solution, when the pull rod moves toward the outside of the drip box, the second drive rack drives the second gear to rotate, the second gear drives the screw rod to rotate, and the screw rod drives the first piston to move away from the pressure chamber; when the pull rod moves toward the inside of the drip box, the first piston moves toward the pressure chamber, thereby being able to press the corrosive fluid in the liquid storage tank into the dropper.
[0018] Preferably, the liquid dripping box is provided with a one-way valve connected to the pressure chamber, and external air enters the pressure chamber through the one-way valve.
[0019] By adopting the above technical solution, when the pull rod moves toward the outside of the drip box, the first piston moves away from the pressure chamber and sucks air into the pressure chamber. At this time, the external air is sucked into the pressure chamber through the one-way valve, so that the corrosive liquid in the liquid storage tank will not be sucked out of the liquid storage tank.
[0020] Preferably, a second sliding hole connected to the top of the liquid storage chamber is provided in the dripping box, a second piston is slidably arranged in the second sliding hole, an adjusting rod is rotatably arranged in the dripping box, the adjusting rod is threaded through the second piston, and the top end of the second adjusting rod passes through the dripping box.
[0021] By adopting the above technical solution, the adjusting rod is rotated, and the adjusting rod drives the second piston to move in the second sliding hole away from the liquid storage chamber, so that negative pressure is formed in the second piston, so that the corrosive liquid in the liquid storage chamber is not easy to leak from the gap into the pressure chamber.
[0022] Preferably, the driving mechanism comprises a driving member, a rotating shaft and a bracket, the driving member is arranged on a workbench, the rotating shaft is rotatably arranged on the workbench and is transmission-connected to the driving member, the bracket is fixedly arranged on the rotating shaft, and the clamping tool is arranged on the bracket.
[0023] By adopting the above technical solution, the driving member drives the bracket through the rotating shaft, and the bracket drives the plastic-sealed component to move through the clamping tool, so that the plastic-sealed component can be moved into the cleaning tank for cleaning.
[0024] Preferably, the rotating shaft includes a shaft body and a sleeve, the shaft body is rotatably set on the workbench and is transmission-connected to the driving member, the sleeve is slidably sleeved on the shaft body along the axial direction of the shaft body and is connected to the bracket, an arc rack is arranged on the outside of the shaft body on the workbench, a sliding block is arranged on the end face of the sleeve close to the arc rack, and a second elastic member for pushing the slide to move toward the direction close to the arc rack is arranged on the shaft body.
[0025] By adopting the above technical solution, when the shaft rotates, the sleeve drives the slider to rotate. When the slider moves through the arc rack, under the action of the second elastic member, the sleeve slides back and forth on the shaft body along the axial direction of the shaft body. The sleeve drives the clamping tooling to move back and forth in the cleaning tank through the bracket, thereby improving the cleaning effect of the plastic-sealed components.
[0026] In summary, the present application includes at least one of the following beneficial technical effects: 1. The dripping mechanism is used to drop the corrosive liquid into the groove of the plastic-sealed device. The dripping mechanism can accurately drop a certain amount of chemical corrosive liquid into the groove in small quantities and multiple times, so that the corrosion rate of the plastic-sealed device is reduced, thereby reducing the damage to the chip; 2. With the help of the limit plate, when the pull rod moves toward the outside of the drip box and drives the liquid supply plate to rotate, the limit plate rotates synchronously with the liquid supply plate. When the liquid supply hole of the liquid supply plate moves to just above the liquid storage tank, the limit plate drives the limit slot to move to the limit block, and the first elastic member pushes the limit block into the limit slot, so that the limit plate can be limited, and then the rotation of the liquid supply plate is limited, so that each time the liquid supply plate rotates, the liquid supply hole can be just above the liquid storage tank, and the end of the limit block is arc-shaped to facilitate the limit block to slide out of the limit slot. When the pull rod moves toward the inside of the drip box, the limit block limits the liquid supply plate through the limit slot, so that the liquid supply plate does not rotate; 3. Through the shaft body and the sleeve, when the shaft rotates, the sleeve drives the slider to rotate. When the slider moves through the arc rack, under the action of the second elastic member, the sleeve slides back and forth on the shaft body along the axial direction of the shaft body. The sleeve drives the clamping tooling to move back and forth in the cleaning tank through the bracket, thereby improving the cleaning effect of the plastic-sealed components. BRIEF DESCRIPTION OF THE DRAWINGS
[0027] Figure 1 This is a schematic diagram of the overall structure of the chip decapsulation equipment of this application; Figure 2 The chip unsealing device of this application is a partial structural cross-sectional view highlighting the dripping mechanism; Figure 3 The chip unsealing device of this application is a cross-sectional view of a part of the structure of the liquid storage tank to highlight the display; Figure 4 The chip unsealing device of the present application is a cross-sectional view highlighting a partial structure of the first driving rack; Figure 5 The chip unsealing device of this application is a cross-sectional view of a part of the structure to highlight the limit plate; Figure 6 The chip unsealing device of this application is a cross-sectional view highlighting the partial structure of the second piston; Figure 7 The chip unsealing device of this application is a schematic diagram of a part of the structure of the driving mechanism; Figure 8 The chip unsealing device of the present application is a partial structural schematic diagram highlighting the slider.
[0028] Figure numerals: 1, workbench; 2, column; 3, rotating ring; 4, laser emitting mechanism; 5, dripping mechanism; 51, dripping box; 52, pull rod; 53, first transmission part; 531, first gear; 532, synchronous shaft; 533, first driving rack; 5331, rack body; 5332, gear body; 5333, elastic reset member; 54, second transmission part; 541, second gear; 542, screw rod; 543, second driving rack; 55, first piston; 56, liquid supply tray; 57, dropper; 6, driving mechanism; 61, driving member; 62, rotating shaft; 6 21. Shaft body; 622. Bushing; 63. Bracket; 7. Clamping tool; 8. Cleaning tank; 9. Liquid storage chamber; 10. Pressure chamber; 11. Liquid supply hole; 12. Liquid storage tank; 13. First sliding hole; 14. Limiting plate; 15. Limiting groove; 16. Limiting block; 17. First elastic member; 18. One-way valve; 19. Second sliding hole; 20. Second piston; 21. Adjusting rod; 22. Arc rack; 23. Sliding block; 24. Second elastic member; 25. Rotating groove; 26. Rotating block; 27. Guide groove; 28. Guide block; 29. Retaining ring; 30. Connecting hole; 31. Handle. DETAILED DESCRIPTION
[0029] The following is combined with Figure 1-Figure 8 This application is described in further detail.
[0030] The embodiment of the present application discloses a chip desealing device.
[0031] Reference Figure 1A chip unsealing device includes a workbench 1, on the top wall of the workbench 1, a column 2 is fixedly installed in the vertical direction, a swivel 3 is rotatably sleeved on the column 2, a laser emitting mechanism 4 and a dripping mechanism 5 are fixedly installed on the symmetrical sides of the outer wall of the swivel 3, and the swivel 3 is driven by a motor and can rotate 90° each time. A cleaning pool 8 is fixedly embedded in the top wall of the workbench 1, and a cleaning liquid is stored in the cleaning pool 8. A driving mechanism 6 is installed at the opening of the cleaning pool 8 of the workbench 1, and a clamping tool 7 is detachably fixedly installed on the driving end of the driving mechanism 6, and the plastic-sealed device is fixed in the clamping tool 7.
[0032] When unsealing the chip, the rotating ring 3 drives the laser emitting mechanism 4 to move to the top of the clamping tool 7. The laser emitting mechanism 4 laser-ablates a groove on the upper surface of the plastic-sealed device. The rotating ring 3 then drives the dripping mechanism 5 to move to the top of the clamping tool 7. The dripping mechanism 5 drips a certain amount of chemical corrosion liquid into the groove in small amounts and multiple times, thereby reducing the corrosion rate of the plastic-sealed device and reducing the damage to the chip. The rotating ring 3 is rotated again so that the laser emitting mechanism 4 and the dripping mechanism 5 are not located above the clamping tool 7. The driving mechanism 6 drives the clamping tool 7 to rotate into the cleaning tank 8 and clean the plastic-sealed device. Repeat the above steps multiple times to complete the chip unsealing.
[0033] Reference Figure 2 Specifically, the dripping mechanism 5 includes a dripping box 51, a pull rod 52, a first transmission part 53, a second transmission part 54, a first piston 55, a liquid supply plate 56 and a dropper 57. The dripping box 51 is fixedly installed on the outer wall of the rotating ring 3. A liquid storage chamber 9 is formed in the dripping box 51, and the liquid storage chamber 9 stores corrosive liquid. A pressure chamber 10 is formed in the dripping box 51. The liquid supply plate 56 is rotatably installed in the dripping box 51. Half of the liquid supply plate 56 is located at the bottom of the liquid storage chamber 9, and the other half is located at the bottom of the pressure chamber 10.
[0034] Reference Figure 2 and Figure 3 The liquid supply plate 56 has a liquid supply hole 11 extending through the liquid supply plate 56 along its axis direction. A plurality of liquid supply holes 11 are provided at equal intervals along the circumference of the liquid supply plate 56. The drip box 51 is provided with a liquid storage tank 12 on the bottom wall of the pressure chamber 10. When the liquid supply plate 56 rotates, the liquid supply hole 11 in the liquid supply plate 56 can transport the corrosive liquid from the liquid storage chamber 9 to the pressure chamber 10. When the liquid supply hole 11 moves to the top of the liquid storage tank 12, the corrosive liquid in the liquid supply hole 11 can flow into the liquid storage tank 12.
[0035] The first transmission part 53 is installed in the dripping box 51, and the first transmission part 53 includes a first gear 531, a synchronization shaft 532 and a first driving rack 533. The pull rod 52 is slidably installed in the dripping box 51 along the horizontal direction, and one end of the pull rod 52 extends to the outside of the dripping box 51. The first driving rack 533 is fixedly installed on the side wall of the pull rod 52, and the first gear 531 is rotatably installed in the dripping box 51. The top end of the synchronization shaft 532 is fixedly installed in the middle of the end face of the first gear 531, and the bottom end of the synchronization shaft 532 is fixedly connected to the middle of the end face of the liquid supply plate 56.
[0036] Reference Figure 2 and Figure 4 The first driving rack 533 includes a rack body 5331, a plurality of teeth 5332 and an elastic reset member 5333. The rack body 5331 is fixedly mounted on the side wall of the pull rod 52. The teeth 5332 are rotatably mounted in the side wall of the rack body 5331 away from the pull rod 52. The plurality of teeth 5332 are arranged at equal intervals along the length direction of the rack body 5331. The plurality of elastic reset members 5333 are respectively mounted at the rotation connection of the plurality of teeth 5332. In the present application, the elastic reset member 5333 can be selected as a torsion spring. A plurality of rotating grooves 25 are provided in the rack body 5331. A rotating block 26 is fixedly mounted on one side of the side wall of the tooth 5332 close to the inside of the rack body 5331. When the tooth 5332 rotates, the tooth 5332 drives the rotating block 26 to rotate in the rotating groove 25.
[0037] There are scales on the surface of the pull rod 52. When the pull rod 52 moves toward the outside of the drip box 51, the rotating block 26 abuts against the end wall of the rotating groove 25, so that the tooth body 5332 cannot rotate. At this time, the tooth body 5332 meshes with the first gear 531 and drives the first gear 531 to rotate. The first gear 531 then drives the liquid supply plate 56 to rotate through the synchronous shaft 532. The liquid supply plate 56 drives multiple liquid supply holes 11 to pass over the liquid storage tank 12 in sequence and allows the corrosive liquid to flow into the liquid storage tank 12. In this way, the moving distance of the pull rod 52 can be quickly known through the scale, so that a specified amount of corrosive liquid can be accurately delivered to the liquid storage tank 12.
[0038] Reference Figure 2 and Figure 5The bottom end of the synchronous shaft 532 passes through the liquid supply plate 56 and extends to the bottom of the liquid supply plate 56. The bottom end of the synchronous shaft 532 is fixedly installed with a limit plate 14 located below the liquid supply plate 56. The limit plate 14 is rotatably installed in the drip box 51. A plurality of limit grooves 15 are evenly spaced on the outer peripheral side wall of the limit plate 14. The plurality of limit grooves 15 correspond to the plurality of liquid supply holes 11 one by one. The drip box 51 is located on the outer side of the limit plate 14 and is slidably installed with two limit blocks 16 along the diameter direction of the limit plate 14. A first elastic member 17 is installed on the side wall of the two limit blocks 16 away from each other. In the present application, the first elastic member 17 can be selected as a spring, and the first elastic member 17 pushes the limit block 16 to move toward the limit plate 14.
[0039] When the liquid supply hole 11 of the liquid supply plate 56 moves to the top of the liquid storage tank 12, the limiting plate 14 drives the limiting groove 15 to move to the limiting block 16, and the first elastic member 17 drives the limiting block 16 to be inserted into the limiting groove 15, so that the liquid supply plate 56 can be limited, so that the liquid supply hole 11 moves accurately to the top of the liquid storage tank 12. The ends of the limiting groove 15 and the limiting block 16 are both arc-shaped. When the liquid supply plate 56 continues to rotate, the arc-shaped limiting groove 15 and the limiting block 16 end facilitate the limiting block 16 to detach from the limiting groove 15.
[0040] Reference Figure 4 When the pull rod 52 moves toward the inside of the drip box 51, the first gear 531 pushes the tooth body 5332 to rotate, and the tooth body 5332 drives the rotating block 26 to rotate in the rotating groove 25. At this time, the first gear 531 is not engaged with the tooth body 5332, and the limit block 16 is clamped in the limit groove 15 and limits the liquid supply plate 56, so that the liquid supply plate 56 does not rotate. After the first gear 531 is transmitted through the tooth body 5332, the elastic reset member 5333 drives the tooth body 5332 to rotate and reset.
[0041] Reference Figure 2 The second transmission part 54 includes a second gear 541, a screw rod 542 and a second drive rack 543. The second drive rack 543 is fixedly mounted on the side wall of the pull rod 52 away from the first drive rack 533. The second gear 541 is rotatably mounted in the drip box 51 and meshes with the first drive rack 533. The screw rod 542 is fixedly mounted in the middle of the bottom wall of the second gear 541. The drip box 51 is provided with a first sliding hole 13 with an opening at the top. The drip box 51 is provided with a connecting hole 30 connecting the first sliding hole 13 and the pressure chamber 10. The first piston 55 is slidably mounted in the first sliding hole 13 along the axial direction of the first sliding hole 13. The screw rod 542 is threaded through the first piston 55. A one-way valve 18 connected to the pressure chamber 10 is installed on the drip box 51. The dropper 57 is installed in the drip box 51. The top of the dropper 57 is connected to the liquid storage tank 12, and the bottom of the dropper 57 extends to the outside of the drip box 51.
[0042] When the pull rod 52 moves toward the outside of the drip box 51, the pull rod 52 drives the first piston 55 to move away from the pressure chamber 10 through the second driving rack 543, the second gear 541 and the screw 542, and the external air enters the pressure chamber 10 through the one-way valve 18; when the pull rod 52 moves toward the inside of the drip box 51, the first piston 55 moves toward the pressure chamber 10, the pressure in the pressure chamber 10 increases and presses the corrosive liquid in the liquid storage tank 12 into the dropper 57, and the corrosive liquid then drips from the dropper 57 into the groove of the plastic-sealed device, so that the drip mechanism 5 can accurately drip a specified amount of corrosive liquid.
[0043] Reference Figure 6 The dripping box 51 is provided with a second sliding hole 19 connected to the top of the liquid storage chamber 9. The second piston 20 is slidably installed in the second sliding hole 19 along its own axial direction. The adjusting rod 21 is rotatably installed in the dripping box 51. The top of the adjusting rod 21 extends to the outside of the dripping box 51, and the lower half of the adjusting rod 21 is threaded through the second piston 20. When the adjusting rod 21 is rotated, the adjusting rod 21 drives the second piston 20 to move away from the liquid storage chamber 9 in the second sliding hole 19, so that negative pressure is formed in the second piston 20, so that the corrosive liquid in the liquid storage chamber 9 is not easy to leak from the gap into the pressure chamber 10.
[0044] Reference Figure 7 and Figure 8 Specifically, the driving mechanism 6 includes a driving member 61, a rotating shaft 62 and a bracket 63. The driving member 61 is fixedly mounted on the side wall of the workbench 1, and the rotating shaft 62 is rotatably mounted on the workbench 1 at the opening of the cleaning tank 8. The rotating shaft 62 is transmission-connected to the driving end of the driving member 61 through a gear set, and the bracket 63 is fixedly mounted on the rotating shaft 62, and the clamping fixture 7 is detachably fixedly mounted on the bracket 63. In the present application, the driving member 61 can be selected as a servo motor. The driving member 61 drives the clamping fixture 7 to rotate through the rotating shaft 62 and the bracket 63, thereby driving the plastic-encapsulated device to rotate, and the plastic-encapsulated device rotates into the cleaning tank 8 for cleaning.
[0045] The rotating shaft 62 includes a shaft body 621 and a sleeve 622. The shaft body 621 is rotatably installed in the workbench 1 and is connected to the driving member 61. The sleeve 622 is slidably installed on the shaft body 621 along the axial direction of the shaft body 621. A guide groove 27 is opened on the side wall of the shaft body 621 along its own axial direction. A guide block 28 is fixedly provided in the middle of the inner wall of the sleeve 622. The guide block 28 is adapted to be slidably installed in the guide groove 27, so as to guide the movement of the sleeve 622.
[0046] A semicircular arc rack 22 is fixedly installed on the workbench 1 below the shaft body 621, and a slider 23 is fixedly installed on the end wall of the sleeve 622 close to the arc rack 22. When the rotating shaft 62 drives the plastic-sealed device into the cleaning tank 8, the sleeve 622 drives the slider 23 to move to the arc rack 22.
[0047] A second elastic member 24 is sleeved on the shaft body 621, and a retaining ring 29 is fixedly installed on the end of the shaft body 621. The two ends of the second elastic member 24 respectively abut the retaining ring 29 and the guide block 28. In the present application, the second elastic member 24 can be selected as a spring. The second elastic member 24 acts on the sleeve 622 through the guide block 28, so that the sleeve 622 moves toward the direction close to the arc rack 22.
[0048] When the slider 23 moves past the arc rack 22, the second elastic member 24 acts on the sleeve 622, causing the sleeve 622 to slide back and forth along the axis of the shaft body 621. The sleeve 622 drives the plastic-encapsulated device to move back and forth through the bracket 63 and the clamping tool 7, thereby increasing the cleaning effect of the plastic-encapsulated device.
[0049] The implementation principle of a chip unsealing device in the embodiment of the present application is as follows: when the pull rod 52 moves toward the outside of the drip box 51, the tooth body 5332 meshes with the first gear 531 and drives the first gear 531 to rotate, and the first gear 531 drives the liquid supply plate 56 to rotate through the synchronous shaft 532, and the liquid supply plate 56 drives the multiple liquid supply holes 11 to pass over the liquid storage tank 12 in sequence and make the corrosive liquid flow into the liquid storage tank 12. When the pull rod 52 moves toward the inside of the drip box 51, the first piston 55 moves toward the pressure chamber 10, the pressure in the pressure chamber 10 increases and presses the corrosive liquid in the liquid storage tank 12 into the dropper 57, and the corrosive liquid then drips from the dropper 57 into the groove of the plastic-sealed device, so that the drip mechanism 5 can accurately drip a specified amount of corrosive liquid, and drip a certain amount of chemical corrosive liquid into the groove in small amounts and multiple times, so that the corrosion rate of the plastic-sealed device is reduced, thereby reducing the damage to the chip.
[0050] The above are all preferred embodiments of the present application, and the protection scope of the present application is not limited thereto. Therefore, any equivalent changes made according to the structure, shape, and principle of the present application should be included in the protection scope of the present application.
Claims
1. A chip unsealing device, characterized in that: The invention comprises a workbench (1), wherein a column (2) is arranged on the workbench (1), a rotating ring (3) is rotatably sleeved on the column (2), a laser emitting mechanism (4) and a dripping mechanism (5) are arranged on opposite sides of the outer wall of the rotating ring (3), a driving mechanism (6) is arranged on the workbench (1), a clamping tool (7) for clamping and fixing a plastic-sealed device is arranged on the driving end of the driving mechanism (6), the laser emitting mechanism (4) performs laser ablation on the plastic-sealed device, and the dripping mechanism (5) performs quantitative dripping on the plastic-sealed device, and a cleaning pool (8) is arranged on the workbench (1) below the driving mechanism (6), and the driving mechanism (6) drives the clamping tool (7) to move in and out of the cleaning pool (8).
2. A chip desealing device according to claim 1, characterized in that: The liquid dripping mechanism (5) comprises a liquid dripping box (51), a pull rod (52), a first transmission part (53), a second transmission part (54), a first piston (55), a liquid supply plate (56) and a dropper (57). A liquid storage chamber (9) and a pressure chamber (10) are formed in the liquid dripping box (51). The liquid supply plate (56) is rotatably arranged in the liquid dripping box (51). Part of the liquid supply plate (56) is located in the liquid storage chamber (9), and the other part of the liquid supply plate (56) is located in the pressure chamber (10). The liquid supply plate (56) is provided with a plurality of liquid supply holes (11) at equal intervals along its circumference. The pull rod (52) is slidably arranged in the liquid dripping box (51). The first transmission part (53) is arranged in the liquid dripping box (51) and transmits and connects the pull rod (52) and the liquid supply plate (56). The liquid dripping box (51) is provided with a liquid storage tank (12) on the bottom wall of the pressure chamber (10). When the pull rod (52) moves toward the outside of the liquid dripping box (51), the pull rod (52) is transmitted through the first transmission part. The part (53) drives the liquid supply plate (56) to rotate, and when the liquid supply hole (11) of the liquid supply plate (56) moves past the liquid storage tank (12), the corrosive liquid in the liquid supply hole (11) flows into the liquid storage tank (12); the drip box (51) is provided with a first sliding hole (13) connected to the pressure chamber (10), the first piston (55) is slidably arranged in the first sliding hole (13), and the second transmission part (54) is arranged in the drip box (51) and transmits the connection between the pull rod (52) and the liquid supply plate (56). The liquid tray (56) is provided with a dropper (57) in a liquid dripping box (51). The top end of the dropper (57) is connected to a liquid storage tank (12), and the bottom end thereof passes through the liquid dripping box (51). When the pull rod (52) moves toward the inside of the liquid dripping box (51), the pull rod (52) drives the first piston (55) to move toward the pressure chamber (10) through the second transmission part (54). The air pressure in the pressure chamber (10) increases and presses the corrosive fluid in the liquid storage tank (12) into the dropper (57) to drip.
3. A chip desealing device according to claim 2, characterized in that: The first transmission part (53) includes a first gear (531), a synchronization shaft (532) and a first driving rack (533). The first driving rack (533) is arranged on the side wall of the pull rod (52). The first gear (531) is rotatably arranged in the drip box (51). The two ends of the synchronization shaft (532) are respectively fixedly connected to the first gear (531) and the liquid supply plate (56). When the pull rod (52) moves toward the outside of the drip box (51), the first driving rack (533) is meshed with the first gear (531). When the pull rod (52) moves toward the inside of the drip box (51), the first driving rack (533) is not meshed with the first gear (531).
4. The chip desealing device according to claim 3, characterized in that: The first driving rack (533) includes a rack body (5331), a plurality of teeth (5332) and an elastic reset member (5333), wherein the rack body (5331) is fixedly arranged on the side wall of the pull rod (52), and the plurality of teeth (5332) are rotatably arranged in the rack body (5331) at equal intervals along the length direction of the rack body (5331), and the plurality of elastic reset members (5333) are arranged in the rack body (5331), and the elastic reset member (5333) connects the rack body (5331) and the teeth (5332) and is used to drive the teeth (5332) to rotate and reset, and when the pull rod (52) moves toward the outside of the drip box (51), the teeth (5332) mesh with the first gear (531), and when the pull rod (52) moves toward the inside of the drip box (51), the teeth (5332) rotate and do not mesh with the first gear (531).
5. The chip desealing device according to claim 4, characterized in that: One end of the synchronization shaft (532) passes through the liquid supply disk (56), and a limit disk (14) is fixedly arranged at the end of the synchronization shaft (532) passing through the liquid supply disk (56). A plurality of limit grooves (15) are provided on the outer wall of the limit disk (14) at equal intervals along its own circumference, and the plurality of limit grooves (15) correspond to the plurality of liquid supply holes (11). A limit block (16) is slidably arranged in the drip box (51) along the diameter direction of the limit disk (14), and a first elastic member (17) is arranged in the drip box (51) for pushing the limit block (16) into the limit groove (15), and the end of the limit block (16) is arc-shaped.
6. The chip desealing device according to claim 3, characterized in that: The second transmission part (54) includes a second gear (541), a screw rod (542) and a second drive rack (543). The second drive rack (543) is arranged on the side wall of the pull rod (52) away from the first drive rack (533). The second gear (541) is rotatably arranged in the drip box (51) and meshed with the second drive rack (543). The screw rod (542) is rotatably arranged in the first slide hole (13) of the drip box (51) along the axial direction of the first slide hole (13). The screw rod (542) is fixedly connected to the second gear (541), and the screw rod (542) is threadedly penetrated by the first piston (55).
7. The chip desealing device according to claim 6, characterized in that: The liquid dripping box (51) is provided with a one-way valve (18) connected to the pressure chamber (10), and external air enters the pressure chamber (10) through the one-way valve (18).
8. The chip desealing device according to claim 2, characterized in that: The liquid dripping box (51) is provided with a second sliding hole (19) which is in communication with the top of the inner cavity of the liquid storage cavity (9); a second piston (20) is slidably arranged in the second sliding hole (19); an adjusting rod (21) is rotatably arranged in the liquid dripping box (51); the adjusting rod (21) is threadedly passed through the second piston (20), and the top end of the second adjusting rod (21) passes through the liquid dripping box (51).
9. The chip desealing device according to claim 1, characterized in that: The driving mechanism (6) comprises a driving member (61), a rotating shaft (62) and a bracket (63); the driving member (61) is arranged on the workbench (1); the rotating shaft (62) is rotatably arranged on the workbench (1) and is transmission-connected to the driving member (61); the bracket (63) is fixedly arranged on the rotating shaft (62); and the clamping tool (7) is arranged on the bracket (63).
10. The chip desealing device according to claim 9, characterized in that: The rotating shaft (62) comprises a shaft body (621) and a shaft sleeve (622); the shaft body (621) is rotatably arranged on the workbench (1) and is transmission-connected to the driving member (61); the shaft sleeve (622) is slidably sleeved on the shaft body (621) along the axial direction of the shaft body (621) and is connected to the bracket (63); an arc rack (22) is arranged on the workbench (1) on the outer side of the shaft body (621); a sliding block (23) is arranged on the end surface of the shaft sleeve (622) close to the arc rack (22); and a second elastic member (24) for pushing the sliding block to move in a direction close to the arc rack (22) is arranged on the shaft body (621).
Citation Information
Cited By
Directional migration device and method for liquid drops on super-hydrophobic surface
CN120838493A