Generation system of high-voltage pulse power supply of time-of-flight mass spectrometer

Abstract

A generation system of a high-voltage pulse power supply of a time-of-flight mass spectrometer comprises a power supply module and a control module, and further comprises an MARX pulse steepening module, a push-pull pulse maintaining module and a coupling module. The control module generates a first pulse signal and a second pulse signal according to input parameters; the MARX pulse steepening module generates a high-voltage narrow-band pulse signal with short rising edge time according to the first pulse signal; the push-pull pulse maintaining module generates a stable high-voltage pulse signal according to the second pulse signal; and the coupling module couples the high-voltage narrow-band pulse signal with extremely short rising edge time and the stable high-voltage pulse signal, and outputs a high-voltage pulse with an ultrafast rising edge and a long-term stable pulse middle section. The high-voltage pulse generated by the invention has a faster rising edge and a higher upper limit of pulse width.

Description

Technical Field

[0001] The invention relates to the field of mass spectrometers, in particular to a generation system of a high-voltage pulse power supply of a time-of-flight mass spectrometer. Background Art

[0002] Pulse high voltage often plays the role of focusing ions in time-of-flight mass spectrometers. The amplitude, stability, and rising edge of the pulse will affect the focusing effect of the instrument. Usually, pulse high voltage is connected to an external high-voltage power supply through a pair of push-pull MOS tubes. The high-voltage MOS tubes are turned on and off in turn to achieve the generation of pulse high voltage. Its advantage is that the output pulse is stable and durable, and it can achieve long-term DC voltage stabilization output. However, in the rising edge characteristic part, this structure is very dependent on the speed of MOS tube disconnection. With the development of materials science, the gradual increase of MOS tube disconnection speed can gradually improve the effect of the rising edge. Summary of the invention

[0003] The main purpose of the present invention is to overcome the above-mentioned defects in the prior art, and propose a generation system of a high-voltage pulse power supply for a time-of-flight mass spectrometer, which combines a MARX boost structure with a push-pull output structure, and applies the ultra-fast rising edge characteristics of the MARX boost to the time-of-flight mass spectrometer, so that the rising edge characteristics of the pulse power supply in the time-of-flight mass spectrometer are no longer completely dependent on the improvement of the performance of the MOS tube, thereby obtaining performance far superior to that of the traditional push-pull pulse power supply.

[0004] The present invention adopts the following technical solution:

[0005] A high-voltage pulse power generation system for a time-of-flight mass spectrometer comprises a power module and a control module, and also comprises a MARX pulse steepening module, a push-pull pulse maintaining module and a coupling module; the control module generates a first pulse signal and a second pulse signal according to input parameters; the MARX pulse steepening module generates a high-voltage narrow-band pulse signal with a short rising edge time according to the second pulse signal; the push-pull pulse maintaining module generates a stable high-voltage pulse signal according to the first pulse signal; the coupling module couples the high-voltage narrow-band pulse signal with an extremely short rising edge time and the stable high-voltage pulse signal, and outputs a high-voltage pulse with an ultra-fast rising edge and a long-term stable middle pulse section.

[0006] Furthermore, the power supply module includes a high-voltage power supply part and a low-voltage power supply part; the high-voltage power supply part converts the input voltage into a 0-2000V adjustable high-voltage power supply to provide a high-voltage power input for the push-pull pulse maintenance module, and divides the high-voltage power supply by n times to provide a power input for the MARX pulse steepening module; the low-voltage power supply unit provides a low-voltage power input for the control module, the push-pull pulse maintenance module and the high-voltage power supply unit.

[0007] Furthermore, the high-voltage power supply part includes an analog-to-digital conversion unit and a high-voltage power supply unit. The input end of the analog-to-digital conversion unit is connected to the control module for communication, and it can convert the input digital signal into a low voltage. The output end of the analog-to-digital conversion unit is connected to the high-voltage power supply unit to control it, and the high-voltage power supply unit is connected to the analog-to-digital conversion unit to convert the input low-voltage power supply into a high-voltage power supply in proportion.

[0008] Furthermore, the MARX pulse steepening module includes a plurality of capacitors, a plurality of avalanche transistors, a plurality of first resistors, a plurality of second resistors and a load RL, wherein the plurality of avalanche transistors are arranged in sequence, the collector of each avalanche transistor is connected to one end of the first resistor, and the other end of the first resistor is connected to the power supply module; the base and emitter of the first avalanche transistor are connected to the control module to input the second pulse signal; a capacitor is connected between the collector of each avalanche transistor and the base of the next avalanche transistor; except for the first avalanche transistor, the emitter of each avalanche transistor is also connected to one end of a second resistor, the other end of the second resistor is grounded, and the other end of the capacitor connected to the last avalanche transistor and the other end of the second resistor serve as the output end of the MARX pulse steepening module; the load RL is connected to the output end of the MARX pulse steepening module.

[0009] Furthermore, the push-pull pulse maintaining module includes a digital isolation driving chip and two MOS tubes; the gates of the two MOS tubes are connected to the digital isolation driving chip, and the digital isolation driving chip performs isolation switch control on the two MOS tubes according to the input first pulse signal; the drain of one MOS tube is connected to the control module, and the source is connected to the drain of the other MOS tube and serves as the output end of the push-pull pulse maintaining module; the source of the other MOS tube is grounded.

[0010] Furthermore, the coupling module uses a capacitor, one end of which is connected to the MARX pulse steepening module, and the other end of which is connected to the push-pull pulse maintaining module.

[0011] Furthermore, the control module includes an interactive control unit and a signal generating unit, wherein the interactive control unit is used to input parameters and display actual parameter values; and the signal generating unit is used to generate the first pulse signal and the second pulse signal according to the input parameters.

[0012] Furthermore, the delay length between the first pulse signal and the second pulse signal output by the control module is T1; there is a line delay t1 and a digital isolation drive delay t2 between the output of the control module and the output of the push-pull pulse maintaining module; there is a line delay t3 between the output of the control module and the output of the MARX pulse steepening module; there is a time interval t4 between the output of the MARX pulse steepening module and the output of the push-pull pulse maintaining module; then T1=t1+t2-t3-t4.

[0013] Furthermore, it also includes a power monitoring module, which is connected to the power module, the MARX pulse steepening module and the push-pull pulse maintaining module to perform real-time monitoring and make real-time parameter adjustments or determine whether a fault occurs based on monitoring data.

[0014] It can be seen from the above description of the present invention that, compared with the prior art, the present invention has the following beneficial effects:

[0015] 1. The system of the present invention adopts a power module, a control module, a MARX pulse steepening module, a push-pull pulse maintenance module and a coupling module, etc., combines a MARX boost structure with a push-pull output structure, and applies the ultrafast rising edge characteristics of the MARX boost to a time-of-flight mass spectrometer, so that the generated high-voltage pulse has a faster rising edge and a higher upper limit pulse width.

[0016] 2. The system of the present invention, the MARX pulse steepening module mainly includes a multi-stage capacitor and an avalanche transistor structure. After charging the parallel structure capacitor, the avalanche breakdown triggering conduction characteristic of the avalanche transistor is used to make the capacitor discharge into a series structure, thereby generating a high-voltage short pulse with an extremely fast rising edge speed.

[0017] 3. In the system of the present invention, the push-pull pulse maintaining module mainly includes a digital isolation driver and a MOS tube. The input signal controls the MOS tube switch through the digital isolation driver to generate a stable high-voltage pulse.

[0018] 4. In the system of the present invention, the coupling module couples the MARX pulse steepening module with the push-pull pulse maintaining module to output a high-voltage pulse. By relying on the coupling method of capacitors with specific capacitance values, the high-voltage narrow pulse is allowed to pass through and the stable high-voltage pulse is isolated, and the high-voltage pulse with an ultra-fast rising edge and a long-term stable middle pulse is output.

[0019] 5. In the system of the present invention, a reasonable delay is set by the control module to match the output of the MARX pulse steepening module and the push-pull pulse maintaining module, so that the coupled output is stable, and has the advantages of fast rising edge speed of MARX pulse output and stable push-pull pulse output. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1It is a module diagram of the device of the present invention;

[0021] Figure 2 It is the circuit diagram of MARX pulse steepening module and push-pull pulse maintaining module;

[0022] Figure 3 The working principle flow chart of the device of the present invention is as follows;

[0023] in:

[0024] 10. Power supply module; 11. High voltage power supply part; 12. Low voltage power supply part; 20. Control module; 30. Power supply monitoring module; 40. Push-pull pulse maintenance module; 50. MARX pulse steepening module; 60. Coupling module.

[0025] The present invention is further described in detail below in conjunction with the accompanying drawings and specific embodiments. DETAILED DESCRIPTION

[0026] The present invention is further described below through specific implementation modes.

[0027] See also Figures 1 to 3 , a high-voltage pulse power generation system for a time-of-flight mass spectrometer, including a power module 10, a control module 20, a MARX pulse steepening module 50, a push-pull pulse maintenance module 40 and a coupling module 60. The control module 20 generates a first pulse signal and a second pulse signal according to the input parameters. The MARX pulse steepening module 50 generates a high-voltage narrow-band pulse signal with a short rising edge time according to the second pulse signal. The push-pull pulse maintenance module 40 generates a stable high-voltage pulse signal according to the first pulse signal; the coupling module 60 couples the high-voltage narrow-band pulse signal with a short rising edge time and the stable high-voltage pulse signal, and outputs a high-voltage pulse with a short rising edge time and a long-term stable middle pulse. The high-voltage pulse realizes a controllable voltage of 0-800V, an adjustable pulse width of 50ns-1s, a repetition rate of 75kHz, and a pulse rising edge within the range of 5ns, breaking through the current situation where the rising edge of the pulse power supply is limited to 20ns.

[0028] The power module 10 includes a high-voltage power supply part 11 and a low-voltage power supply part 12; the high-voltage power supply part 11 converts the input voltage (e.g., 220V mains) into a 0-2000V adjustable high-voltage power supply, which is used to provide a high-voltage power supply input for the push-pull pulse maintenance module 40, and divides the high-voltage power supply by n times to provide a power supply input for the MARX pulse steepening module 50. The low-voltage power supply unit is used to provide a low-voltage power supply input for the control module 20, the push-pull pulse maintenance module 40 and the high-voltage power supply unit.

[0029] The high-voltage power supply part 11 includes an analog-to-digital conversion unit and a high-voltage power supply unit. The input end of the analog-to-digital conversion unit is connected to the control module 20 for communication, and the input digital signal can be converted into a low voltage. The output end of the analog-to-digital conversion unit is connected to the high-voltage power supply unit to control it. The high-voltage power supply unit is connected to the analog-to-digital conversion unit to convert the input low-voltage power supply into a high-voltage power supply in proportion. For example, 0-5V low voltage can be converted into 0-2000V high voltage output in proportion. The output of the high-voltage power supply unit can be connected to the push-pull pulse maintenance module and the MARX pulse steepening module for modulation.

[0030] The control module 20 includes an interactive control unit and a signal generating unit. The interactive control unit is used to input parameters, adjust selected items and display actual parameter values. The input parameters include high-voltage pulse voltage V, pulse width T, repetition frequency f, etc., and obtain pulse period T0 and delay time T1; the interactive control unit allows the selected items to be replaced and the values ​​to be changed through buttons and encoders, and the parameters are actually displayed on the OLED screen. The signal generating unit is used to generate a first pulse signal and a second pulse signal according to the input parameters, that is, to generate a pair of precise pulse signals based on a pair of secondary counting modules to control the MARX pulse steepening module 50 and the push-pull pulse maintaining module 40. The signal generating unit is implemented using FPGA. The first pulse signal and the second pulse signal are push-pull pulse maintaining output control signals and MARX pulse steepening output control signals.

[0031] The MARX pulse steepening module 50 generates a high-voltage narrow-band pulse signal with a short rising edge according to the second pulse signal. The rising edge time is less than 5ns and the high voltage can reach several kV, but the pulse holding time is extremely short, only in the ns level. The MARX pulse steepening module 50 can generate high-voltage and extremely narrow pulses with instantaneous large current to give the pulse signal the characteristics of an ultra-fast rising edge. Figure 2 The MARX pulse steepening module 50 includes a plurality of capacitors C1-Cn, a plurality of avalanche transistors K1-Kn, a plurality of first resistors Rc1-Rcn, a plurality of second resistors Rf1-Rf(n-1), and a load RL, etc. The number of avalanche transistors, capacitors, and first resistors corresponds to each other, and the number of second resistors is reduced by one compared to the number of first resistors, forming an n-level structure.

[0032] Specifically, a plurality of avalanche transistors are arranged in sequence, the collector of each avalanche transistor is connected to one end of a first resistor, and the other end of the first resistor is connected to the power module 10 to access the power supply VCC. The base and emitter of the first avalanche transistor K1 are connected to the control module 20 to input the second pulse signal. A capacitor is connected between the collector of each avalanche transistor and the base of the next avalanche transistor. Except for the first avalanche transistor K1, the emitters of other avalanche transistors are also connected to one end of a second resistor, and the other end of the second resistor is grounded. The other end of the capacitor connected to the last avalanche transistor Kn and the other end of the second resistor serve as the output end of the MARX pulse steepening module 50. The load RL is connected to the output end of the MARX pulse steepening module 50.

[0033] The MARX pulse steepening module 50 is composed of a multi-stage structure including a plurality of avalanche transistors and a plurality of capacitors. The plurality of capacitors are connected to a power supply VCC for charging. When the voltage Vce on both sides of the capacitors is equal to VCC, the charging is completed. The first-stage avalanche transistor K1 is triggered to turn on by a high-level signal, so that the subsequent multi-stage avalanche transistors are triggered to turn on by avalanche breakdown. Then, the plurality of capacitors are converted from an approximately parallel connection to a series connection state and a high-voltage narrow pulse signal with a voltage of -nVCC is output at the load RL, which is used to generate a high-voltage pulse with an extremely short rising edge time.

[0034] The push-pull pulse maintaining module 40 generates a stable high-voltage pulse signal according to the first pulse signal, the stable maintaining time can reach several seconds, and the output ripple peak-to-peak value is less than 0.02%. Figure 2 The push-pull pulse maintenance module 40 includes a digital isolation driver chip and two MOS tubes Q1 and Q2; the digital isolation driver chip is connected to the control module 20 to input the second pulse signal. The gates of the two MOS tubes Q1 and Q2 are connected to the digital isolation driver chip, and the digital isolation driver chip performs isolation switch control on the two MOS tubes according to the input second pulse signal. The drain of one MOS tube Q1 is connected to the power module 10 to input the power supply VCC, and the source is connected to the drain of another MOS tube Q2 and serves as the output end of the push-pull pulse maintenance module 40, and the source of the other MOS tube Q2 is grounded.

[0035] The second pulse signal generated by the control module 20 drives the MOS tube through the digital isolation driver chip, and the MOS tube is isolated and switched to realize signal control push-pull output, thereby generating a stable high-voltage pulse signal. The coupling module 60 couples the high-voltage narrow-band pulse signal with an extremely short rising edge time and the stable high-voltage pulse signal, and outputs a high-voltage pulse with an ultra-fast rising edge and a long-term stable middle pulse. Specifically, the coupling module 60 uses a capacitor C, one end of which is connected to the MARX pulse steepening module 50, and the other end is connected to the push-pull pulse maintenance module 40. The capacitor C is connected to the push-pull pulse maintenance module 40 as the output end of the coupling module 60.

[0036] The coupling module 60 is composed of capacitors with specific capacitance values, and the capacitance values ​​of the capacitors are determined by building a push-pull-MARX circuit in the simulation software and selecting different capacitance values ​​for experimental comparison. The coupling module 60 couples the outputs of the MARX pulse steepening module 50 and the push-pull pulse maintaining module 40, allowing the high-voltage narrow pulse to pass, isolating the stable high-voltage pulse, and outputting a high-voltage pulse with an ultra-fast rising edge and a long-term stable middle pulse.

[0037] Furthermore, it is also configured that the delay length between the first pulse signal and the second pulse signal output by the control module 20 is T1; there is a line delay t1 and a digital isolation drive delay t2 between the output of the control module 20 and the output of the push-pull pulse maintaining module 40; there is a line delay t3 between the output of the control module 20 and the output of the MARX pulse steepening module 50; there is a time interval t4 between the output of the MARX pulse steepening module 50 and the output of the push-pull pulse maintaining module 40; then T1=t1+t2-t3-t4.

[0038] It also includes a power monitoring module 30, which mainly includes an STM32 master control, an ADC unit and a DAC unit. The power monitoring module 30 is connected to the power module 10, the MARX pulse steepening module 50 and the push-pull pulse maintenance module 40, and collects multiple power supply voltages through the ADC unit for real-time monitoring, and intervenes in the power output control terminal through the DAC unit according to the monitoring data to adjust the parameters in real time or determine whether a fault occurs. The power monitoring module 30 is powered by the low-voltage power supply of the power module 10. Specifically, the power monitoring module 30 also includes a 16-bit ADC unit and a DAC unit, and the ADC unit performs analog-to-digital conversion on the collected analog voltage information; the DAC unit performs digital-to-analog conversion according to the obtained voltage information to complete the feedback control of the high-voltage power closed loop.

[0039] In the system of the present invention, the MARX pulse steepening module can generate a narrow pulse high voltage with an extremely fast rising edge, and the pulse maintaining module can generate a long-term stable high-voltage pulse. The two are integrated in the time characteristics of the coupling module to generate a pulse high voltage that takes into account both the rising edge and stability. The fast rising edge and stable continuous high voltage will effectively enhance the focusing ability of the time-of-flight mass spectrometer on ions. This system will be particularly suitable for the needs of the time-of-flight mass spectrometry field.

[0040] The device of the present invention, see Figure 3 , its working principle is as follows:

[0041] Step 1. Pre-connect the power supply and turn on the switch, the power supply module 10 starts to work, and the low-voltage power supply is provided to the control module 20, the power supply monitoring module 30, the push-pull pulse maintenance module 40 and the high-voltage power supply part 11 after rectification and filtering. After power-on, the control module 20 is reset, and the interactive control unit starts to work and waits for parameter input.

[0042] Step 2. Set the corresponding parameters through the interactive control unit, including the high-voltage pulse voltage V, pulse width T, and repetition frequency f.

[0043] Step 3. The control module 20 calculates the pulse period T0 and the delay time T1 according to the input parameters of the high-voltage pulse voltage V, the pulse width T, and the repetition frequency f; the high-voltage power supply is set according to the input parameter of the high-voltage pulse voltage V, and is directly provided to the push-pull pulse maintaining module 40. The high-voltage power supply is provided to the MARX pulse steepening module 50 after being divided by n times.

[0044] Step 4. The FPGA in the control module 20 sets a counter according to the calculated result to determine the frequency f of the output pulse; and sets a secondary counter to control the delay T1 between the output of the first pulse signal and the second pulse signal.

[0045] Step 5. The signal generating unit in the control module 20 sends out a first pulse signal, and sends out a second pulse signal after a delay of T1.

[0046] Step 6. In the MARX pulse steepening module 50, all capacitors are in a state of approximately parallel connection in the initial state, and are connected to the power supply VCC for charging until the voltage Vce on both sides of the capacitor is equal to the power supply VCC. When the first pulse signal sent by the signal generating unit passes through a certain line delay, a high control level is applied to the avalanche transistor K1 to trigger it to avalanche and turn on. The voltage on one side of C1 changes from VCC to 0; since the voltage on both sides of C1 cannot change suddenly, the voltage on the other side will change to -VCC; the voltage difference between the collector and emitter of the avalanche transistor K2 becomes 2VCC, and avalanche triggers conduction; and then the subsequent multiple stages enter a state similar to the second stage and avalanche triggers conduction, so that the voltage difference between the collector and emitter of the avalanche transistor Kn at the nth stage is nVCC, and a negative high-voltage pulse signal of -nVCC is output, and is transmitted to the output through the coupling capacitor.

[0047] Step 7. In the push-pull pulse maintaining module 40, the output terminal is suspended in the initial state. When the signal generating unit generates an output control signal, the push-pull pulse maintaining module 40 outputs after line delay and digital isolation delay to generate a stable pulse signal. Before the narrow pulse output by the MARX pulse steepening module 50 disappears, a high-voltage pulse is added in time to maintain the subsequent pulses.

[0048] Step 8. After the pulse width is delayed for a time period T, the control module 20 sends a control signal to close the push-pull pulse maintaining module 40, and the push-pull pulse maintaining module 40 stops outputting.

[0049] In the present invention, the terms "first", "second", "third", etc. are only used to distinguish similar objects, and are not necessarily used to describe a specific order or sequence, nor can they be understood as indicating or implying relative importance. In the description, the directions or positional relationships indicated by "upper", "lower", "left", "right", "front", and "back" are based on the directions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention, and are not intended to indicate or imply that the device referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as limiting the scope of protection of the present invention. For those of ordinary skill in the art, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0050] In addition, in the description of this application, unless otherwise specified, "plurality" means two or more. "And / or" describes the association relationship of associated objects, indicating that three relationships may exist. For example, A and / or B can mean: A exists alone, A and B exist at the same time, and B exists alone. The character " / " generally indicates that the associated objects are in an "or" relationship.

[0051] The above is only a specific implementation of the present invention, but the design concept of the present invention is not limited thereto. Any non-substantial changes to the present invention using this concept shall be deemed as an infringement of the protection scope of the present invention.

Claims

1. A high-voltage pulse power generation system for a time-of-flight mass spectrometer, comprising a power module and a control module, characterized in that: It also includes a MARX pulse steepening module, a push-pull pulse maintaining module and a coupling module; the control module generates a first pulse signal and a second pulse signal according to the input parameters; the MARX pulse steepening module generates a high-voltage narrow-band pulse signal with a short rising edge time according to the second pulse signal; The push-pull pulse maintaining module generates a stable high-voltage pulse signal according to the first pulse signal; the coupling module couples the high-voltage narrow-band pulse signal with an extremely short rising edge time and the stable high-voltage pulse signal, and outputs a high-voltage pulse with an ultra-fast rising edge and a long-term stable middle pulse section.

2. A high voltage pulse power generation system for a time-of-flight mass spectrometer as claimed in claim 1, characterized in that: The power supply module includes a high-voltage power supply part and a low-voltage power supply part; the high-voltage power supply part converts the input voltage into a 0-2000V adjustable high-voltage power supply to provide a high-voltage power input for the push-pull pulse maintenance module, and divides the high-voltage power supply by n times to provide a power input for the MARX pulse steepening module; the low-voltage power supply unit provides a low-voltage power input for the control module, the push-pull pulse maintenance module and the high-voltage power supply unit.

3. A high voltage pulse power generation system for a time-of-flight mass spectrometer as claimed in claim 2, characterized in that: The high-voltage power supply part includes an analog-to-digital conversion unit and a high-voltage power supply unit. The input end of the analog-to-digital conversion unit is connected to the control module for communication, and it can convert the input digital signal into a low voltage. The output end of the analog-to-digital conversion unit is connected to the high-voltage power supply unit to control it. The high-voltage power supply unit is connected to the analog-to-digital conversion unit to convert the input low-voltage power supply into a high-voltage power supply in proportion.

4. The high voltage pulse power generation system for a time-of-flight mass spectrometer according to claim 1, characterized in that: The MARX pulse steepening module includes a plurality of capacitors, a plurality of avalanche transistors, a plurality of first resistors, a plurality of second resistors and a load RL. The plurality of avalanche transistors are arranged in sequence, the collector of each avalanche transistor is connected to one end of the first resistor, and the other end of the first resistor is connected to the power supply module; the base and emitter of the first avalanche transistor are connected to the control module to input the second pulse signal; a capacitor is connected between the collector of each avalanche transistor and the base of the next avalanche transistor; except for the first avalanche transistor, the emitter of each avalanche transistor is also connected to one end of a second resistor, and the other end of the second resistor is grounded; the other end of the capacitor connected to the last avalanche transistor and the other end of the second resistor serve as the output end of the MARX pulse steepening module; the load RL is connected to the output end of the MARX pulse steepening module.

5. The high voltage pulse power generation system for a time-of-flight mass spectrometer according to claim 1, characterized in that: The push-pull pulse maintaining module includes a digital isolation driving chip and two MOS tubes; the gates of the two MOS tubes are connected to the digital isolation driving chip, and the digital isolation driving chip performs isolation switch control on the two MOS tubes according to the input first pulse signal; the drain of one MOS tube is connected to the control module, and the source is connected to the drain of the other MOS tube and serves as the output end of the push-pull pulse maintaining module; the source of the other MOS tube is grounded.

6. A high voltage pulse power generation system for a time-of-flight mass spectrometer as claimed in claim 1, characterized in that: The coupling module uses a capacitor, one end of which is connected to the MARX pulse steepening module, and the other end of which is connected to the push-pull pulse maintaining module.

7. A high voltage pulse power generation system for a time-of-flight mass spectrometer as claimed in claim 1, characterized in that: The control module includes an interactive control unit and a signal generating unit. The interactive control unit is used to input parameters and display actual parameter values; the signal generating unit is used to generate the first pulse signal and the second pulse signal according to the input parameters.

8. The high voltage pulse power generation system for a time-of-flight mass spectrometer according to claim 1, characterized in that: The delay time between the first pulse signal and the second pulse signal output by the control module is T1; there is a line delay t1 and a digital isolation drive delay t2 between the output of the control module and the output of the push-pull pulse maintaining module; There is a line delay t3 between the output of the control module and the output of the MARX pulse steepening module; there is a time interval t4 between the output of the MARX pulse steepening module and the output of the push-pull pulse maintaining module; therefore, T1=t1+t2-t3-t4.

9. A high voltage pulse power generation system for a time-of-flight mass spectrometer as claimed in claim 1, characterized in that: It also includes a power monitoring module, which is connected to the power module, the MARX pulse steepening module and the push-pull pulse maintaining module to perform real-time monitoring and make real-time parameter adjustments or determine whether a fault occurs based on monitoring data.

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