Ion exchange equipment for producing RGB (red, green and blue) photoresist diluent

Abstract

The invention discloses ion exchange equipment for RGB photoresist diluent production, and belongs to the technical field of ion exchange equipment.The ion exchange equipment comprises an ion exchange tank, a dissolving cavity is formed in the inner wall of the ion exchange tank, a draught fan is installed on the outer side wall of the ion exchange tank, and an air inlet pipe penetrating through one side of the dissolving cavity is fixed to the output end of the draught fan; a collecting tank is fixed to the end of the air inlet pipe, a plurality of flow guide pipes are fixed to the end of the collecting tank, a plurality of exhaust ports are fixed to the surfaces of the flow guide pipes, and a water inlet pipe penetrates through the end of the dissolving cavity; after the air is in contact with the liquid, the amount of carbon dioxide in the liquid is reduced, the workload of the ion exchange tank is relieved, meanwhile, the air is conveniently dispersed, the flowing range of the air in the dissolving cavity is increased, the contact area of the air and the liquid is increased, and an operator can conveniently disassemble and assemble the supporting frame and the fixing rod; and the usability of an operator is improved.

Description

Technical Field

[0001] The invention belongs to the technical field of ion exchange equipment, and in particular relates to an ion exchange equipment for producing RGB photoresist dilution liquid. Background Art

[0002] In the production process of RGB photoresist diluent, ion exchange equipment is usually used in the water treatment step to ensure the purity and consistency of the final product. Ion exchange equipment removes ionic impurities in water, such as hardness ions (calcium, magnesium) and other dissolved solids through ion exchange resin. This process is essential for preparing ultrapure water or high-purity water, because these waters will be used as solvents for diluting photoresist materials. Through ion exchange, the total dissolved solids (TDS) content of water can be effectively reduced, and heavy metal ions that may be present in water, as well as other ions that may interfere with the performance of photoresist, can be removed. Therefore, it can be seen that the existing ion exchange equipment basically meets people's use needs, but the following problems still exist.

[0003] When using ion exchange equipment to treat water, the operator needs to pour the liquid into the ion exchange equipment, and exchange ions of the liquid with the anions and cations in the ion exchange tank to purify the liquid. During the ion exchange process, reverse osmosis may be required first. Since there is a large amount of carbon dioxide in the liquid, the carbon dioxide in the liquid may increase the workload of the ion exchange tank during reverse osmosis. For this reason, we propose an ion exchange equipment for the production of RGB photoresist diluent. Summary of the invention

[0004] The present invention provides an ion exchange device for producing RGB photoresist diluent, wherein liquid is introduced into a dissolving chamber through a water inlet pipe, and a fan introduces air into a collecting tank through an air inlet pipe, and gas is discharged through the collecting tank, so that the gas contacts the liquid sprayed in the water inlet pipe, thereby reducing the amount of carbon dioxide in the liquid and alleviating the work burden of the ion exchange tank.

[0005] To achieve the above-mentioned purpose, the present invention provides the following technical solutions: an ion exchange device for producing RGB photoresist diluent, comprising an ion exchange tank, a dissolving chamber is provided on the inner wall of the ion exchange tank, a fan is installed on the outer wall of the ion exchange tank, and an air inlet pipe passing through one side of the dissolving chamber is fixed to the output end of the fan, and a collecting tank is fixed to the end of the air inlet pipe, a plurality of groups of guide pipes are fixed to the end of the collecting tank, and a plurality of groups of exhaust ports are fixed to the surface of the guide pipe, a water inlet pipe passes through the end of the dissolving chamber, and a plurality of groups of fixing frames are threadedly installed on the surface of the water inlet pipe, and the fixing frames are connected to the ion exchange tank.

[0006] Furthermore, a support frame is provided at the upper end of the guide tube, and the support frame is connected to the inner wall of the defusing chamber, and a plurality of groups of spherical knocking balls are sleeved around the support frame.

[0007] Furthermore, a collar is sleeved on the surface of the collecting tank, and a plurality of sets of fixing rods are installed between the collar and the dissolving chamber, a rotating sleeve is sleeved on the surface of the fixing rod, and blades are fixed around the rotating sleeve.

[0008] Furthermore, fixed blocks are fixed at the ends of the fixed rod and the support frame, and the surfaces of the fixed blocks are provided with mounting grooves fixed on the inner wall of the dissolving chamber. Spring grooves are opened in the middle of the fixed blocks, and buttons and springs are arranged inside the spring grooves. The two side ends of the springs are respectively abutted between the two groups of buttons, and the ends of the buttons pass through the mounting grooves.

[0009] Furthermore, the cross sections of the fixing rods are all arranged in a stepped shape, and the depth of the stepped shape of the cross sections of the fixing rods matches the thickness of the rotating sleeve.

[0010] Furthermore, the opening of the exhaust port faces downward, and the opening of the exhaust port is configured to expand outward.

[0011] Furthermore, the collecting tank passes through a partition fixed on the inner wall of the decomposition chamber, and circular through holes are provided around the partition, and funnel-shaped grooves are provided at the openings of the circular through holes provided around the partition.

[0012] Furthermore, the guide tubes are all provided with mounting sleeves on all sides, and the mounting sleeves are all mounted on the dissolving chamber by means of bolt threads.

[0013] The beneficial effects of the present invention are:

[0014] 1. The ion exchange equipment for the production of RGB photoresist dilution liquid is provided with a water inlet pipe, a fan, an air inlet pipe, a collecting tank and a guide pipe. The liquid is sprayed into the dissolution chamber through the water inlet pipe, and then the fan guides the air into the air inlet pipe, and then the gas is guided into the guide pipe through the collecting tank, and then the gas is discharged into the dissolution chamber through the exhaust ports fixed around the guide pipe. After the air and the liquid come into contact with each other, the amount of carbon dioxide in the liquid is reduced, thereby reducing the workload of the ion exchange tank.

[0015] 2. The ion exchange equipment for the production of RGB photoresist diluent is provided with a support frame, a knocking ball, a blade, a rotating sleeve and a fixed rod. After the liquid is discharged into the dissolving chamber, the liquid drips onto the surface of the support frame and the knocking ball. After the liquid is impacted, the liquid disperses with each other, increasing the contact area between the liquid and the air. When the air blows the blade, the blade drives the rotating sleeve to rotate on the surface of the fixed rod, which is convenient for dispersing the air, increasing the flow range of the air in the dissolving chamber, and increasing the contact area between the air and the liquid.

[0016] 3. The ion exchange equipment for the production of RGB photoresist diluent is provided with a fixed block, a mounting groove and a button. The fixed block is inserted into the mounting groove through the support frame, and then the button passes through the mounting groove to connect the fixed block and the mounting groove to each other, which is convenient for the operator to disassemble and install the support frame and the fixed rod, thereby improving the usability of the operator. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a front cross-sectional structural schematic diagram of the present invention;

[0018] Figure 2 It is a schematic diagram of the side cross-sectional structure of the installation sleeve and the flow guide pipe of the present invention;

[0019] Figure 3 It is a schematic diagram of a top cross-sectional structure of the installation sleeve and the flow guide pipe of the present invention;

[0020] Figure 4 It is a schematic diagram of the cross-sectional structure of the guide tube and the blade of the present invention;

[0021] Figure 5 It is a schematic diagram of a top view of a cross-sectional structure of a striking ball and a supporting frame of the present invention;

[0022] Figure 6 For the present invention Figure 1 A schematic diagram of the enlarged structure at A in the middle;

[0023] Figure 7 For the present invention Figure 1 A schematic diagram of the enlarged structure at B in the middle;

[0024] Figure 8 For the present invention Figure 1 Schematic diagram of the enlarged structure at C in the middle;

[0025] Fig. 9 For the present invention Figure 5 Schematic diagram of the enlarged structure at D in the middle.

[0026] In the figure:

[0027] 1. Ion exchange tank; 2. Dissolution chamber; 3. Fan; 4. Air inlet pipe; 5. Collecting tank; 6. Partition; 7. Ring; 8. Support frame; 9. Water inlet pipe; 10. Fixed frame; 11. Guide pipe; 12. Fixed rod; 13. Mounting sleeve; 14. Button; 15. Mounting slot; 16. Spring slot; 17. Spring; 18. Blade; 19. Rotating sleeve; 20. Fixed block; 21. Exhaust port; 22. Knocking ball. DETAILED DESCRIPTION

[0028] In order to further understand the content, features and effects of the present invention, the following embodiments are given as examples and described in detail with reference to the accompanying drawings.

[0029] Example:

[0030] See also Figure 1 - Fig. 9 An ion exchange device for producing RGB photoresist diluent comprises an ion exchange tank 1, wherein the inner wall of the ion exchange tank 1 is provided with a dissolving chamber 2, a fan 3 is threadedly installed on the outer wall of the ion exchange tank 1, and an air inlet pipe 4 passing through one side of the dissolving chamber 2 is threadedly installed on the output end of the fan 3, and a collecting tank 5 is welded to the end of the air inlet pipe 4, and a plurality of groups of guide pipes 11 are welded to the end of the collecting tank 5, and a plurality of groups of exhaust ports 21 are welded to the surface of the guide pipe 11, the opening of the exhaust port 21 faces downward, and the opening of the exhaust port 21 is set as an opening expanding outward, and the opening of the exhaust port 21 faces downward to prevent liquid from being sprayed from the water inlet pipe 9, and the liquid enters the guide pipe 11 through the exhaust port 21, and the end of the dissolving chamber 2 passes through the water inlet pipe 9, and a plurality of sets of fixing frames 10 are threadedly installed on the surface of the water inlet pipe 9, and the fixing frames 10 are interconnected with the ion exchange tank 1. When reducing the carbon dioxide in the liquid, the operator discharges the liquid into the dissolving chamber 2 through the water inlet pipe 9. After the liquid enters the dissolving chamber 2, the liquid knocks on the surface of the support frame 8 and the knocking ball 22, so that the support frame 8 and the knocking ball 22 sprinkle the liquid to avoid excessive concentration of the liquid, and start the fan 3, the fan 3 discharges the air into the collection tank 5 through the air inlet pipe 4, the air is dispersed into the guide pipe 11, and the gas in the guide pipe 11 is discharged through the exhaust port 21. After the air and the liquid contact each other, the amount of carbon dioxide in the liquid is reduced, and the workload of the ion exchange tank 1 is reduced.

[0031] In other embodiments, a support frame 8 is provided at the upper end of the guide tube 11, and the support frame 8 is connected to the inner wall of the dissolving chamber 2, and a plurality of groups of spherical knocking balls 22 are sleeved around the support frame 8, a ring 7 is sleeved on the surface of the collecting tank 5, and a plurality of groups of fixed rods 12 are installed between the ring 7 and the dissolving chamber 2, and a rotating sleeve 19 is sleeved on the surface of the fixed rod 12, and blades 18 are welded around the rotating sleeve 19. When liquid drops onto the surface of the support frame 8 and the knocking ball 22, the liquid is hit by the support frame 8 and the knocking ball 22 and splashes. When the liquid splashes, the efficiency of the contact between the liquid and the air is improved, and when the gas pushes the blade 18, the blade 18 drives the rotating sleeve 19 to rotate on the surface of the fixed rod 12. After the blade 18 rotates, the blade 18 scatters the gas, increases the moving trajectory of the gas in the dissolving chamber 2, increases the flow range of the air in the dissolving chamber 2, and increases the area of ​​contact between the air and the liquid.

[0032] In other embodiments, the ends of the fixing rod 12 and the support frame 8 are welded with a fixing block 20, and the surface of the fixing block 20 is sleeved with a mounting groove 15 welded on the inner wall of the dissolving chamber 2, a spring groove 16 is opened in the middle of the fixing block 20, and a button 14 and a spring 17 are arranged inside the spring groove 16, and the two side ends of the spring 17 are respectively abutted between the two groups of buttons 14, and the ends of the buttons 14 pass through the mounting groove 15. When the operator needs to install the fixing rod 12 and the support frame 8, the operator first presses the button 14 to make the button 14 slide in the spring groove 16, and when the button 14 slides in the spring groove 16, the button 14 squeezes the spring 17 to make the spring 17 elastically deformed, and after the spring 17 is elastically deformed, the spring 17 presses the button 14 avoids, and the button 14 enters the spring groove 16, the button 14 avoids the installation groove 15, and then the operator pulls the support frame 8 or the fixed rod 12, so that the support frame 8 or the fixed rod 12 drives the fixed block 20 to move, and the fixed block 20 drives the button 14 to move through the spring groove 16, and moves the button 14 to the through holes opened on both sides of the installation groove 15. After the inner wall of the installation groove 15 no longer squeezes the spring 17 through the button 14, the spring 17 recovers its elastic deformation, and the spring 17 pushes the button 14 to move, so that the button 14 is inserted into the through holes opened on both sides of the installation groove 15, and the support frame 8 or the fixed rod 12 is installed on the inner wall of the dissolving chamber 2, which is convenient for the operator to disassemble and install the support frame 8 and the fixed rod 12, thereby improving the practicality of the operator.

[0033] In other embodiments, the cross-section of the fixed rod 12 is arranged in a stepped shape, and the depth of the steps arranged in the cross-section of the fixed rod 12 matches the thickness of the rotating sleeve 19. The cross-section of the fixed rod 12 is arranged in a stepped shape, and the thickness of the rotating sleeve 19 matches the depth of the steps arranged in the cross-section of the fixed rod 12. The steps arranged in the cross-section of the fixed rod 12 restrict the rotating sleeve 19, preventing the rotating sleeve 19 from moving back and forth on the surface of the fixed rod 12 when the rotating sleeve 19 rotates on the surface of the fixed rod 12, thereby improving the stability of the rotating sleeve 19 rotating on the surface of the fixed rod 12.

[0034] In other embodiments, the guide tube 11 is provided with a mounting sleeve 13 all around, and the mounting sleeve 13 is installed on the defusing chamber 2 by means of bolt threads. By putting the mounting sleeve 13 on the surface of the guide tube 11, and then the operator uses bolts to thread the mounting sleeve 13 on the inner wall of the defusing chamber 2, the position of the guide tube 11 is fixed conveniently, thereby increasing the stability of the guide tube 11 during use.

[0035] In other embodiments, the collecting tank 5 passes through the partition 6 welded on the inner wall of the defusing chamber 2, and circular through holes are opened around the partition 6, and funnel-shaped grooves are opened at the openings of the circular through holes opened around the partition 6. When the liquid is sprayed into the defusing chamber 2 through the water inlet pipe 9, the liquid finally falls into the partition 6, so that the partition 6 collects the liquid, and the liquid is discharged through the through holes opened around the partition 6. At the same time, the openings of the through holes opened around the partition 6 are set as funnel-shaped grooves, which are convenient for collecting the liquid and avoiding liquid remaining on the surface of the partition 6.

[0036] The above shows and describes the basic principles, main features and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited by the above embodiments. The above embodiments and descriptions are only preferred examples of the present invention and are not intended to limit the present invention. Without departing from the spirit and scope of the present invention, the present invention may have various changes and improvements, which fall within the scope of the present invention. The scope of protection of the present invention is defined by the attached claims and their equivalents.

Claims

1. An ion exchange device for producing RGB photoresist dilution liquid, comprising an ion exchange tank (1), characterized in that: The inner wall of the ion exchange tank (1) is provided with a decomposition chamber (2), the outer wall of the ion exchange tank (1) is installed with a fan (3), and an air inlet pipe (4) passing through one side of the decomposition chamber (2) is fixed to the output end of the fan (3), and a collection tank (5) is fixed to the end of the air inlet pipe (4), and a plurality of groups of flow guide pipes (11) are fixed to the end of the collection tank (5), and a plurality of groups of exhaust ports (21) are fixed on the surface of the flow guide pipe (11), a water inlet pipe (9) passes through the end of the decomposition chamber (2), and a plurality of groups of fixing frames (10) are threadedly installed on the surface of the water inlet pipe (9), and the fixing frames (10) and the ion exchange tank (1) are connected to each other.

2. The ion exchange equipment for producing RGB photoresist dilution liquid according to claim 1, characterized in that: A support frame (8) is provided at the upper end of the guide tube (11), and the support frame (8) is connected to the inner wall of the decomposition chamber (2). A plurality of groups of spherical knocking balls (22) are sleeved around the support frame (8).

3. The ion exchange equipment for producing RGB photoresist dilution liquid according to claim 1, characterized in that: The surface of the collecting tank (5) is sleeved with a collar (7), and a plurality of groups of fixing rods (12) are installed between the collar (7) and the dissolving chamber (2). The surfaces of the fixing rods (12) are sleeved with rotating sleeves (19), and blades (18) are fixed around the rotating sleeves (19).

4. The ion exchange device for producing RGB photoresist dilution liquid according to claim 3, characterized in that: The ends of the fixing rod (12) and the support frame (8) are both fixed with a fixing block (20), and the surface of the fixing block (20) is sleeved with a mounting groove (15) fixed on the inner wall of the dissolving chamber (2), and the middle of the fixing block (20) is provided with a spring groove (16), and the spring groove (16) is provided with a button (14) and a spring (17), and the two side ends of the spring (17) are respectively abutted between the two groups of buttons (14), and the ends of the buttons (14) pass through the mounting groove (15).

5. The ion exchange equipment for producing RGB photoresist dilution liquid according to claim 3, characterized in that: The cross sections of the fixing rods (12) are all arranged in a stepped shape, and the depth of the stepped shape of the cross sections of the fixing rods (12) matches the thickness of the rotating sleeve (19).

6. The ion exchange equipment for producing RGB photoresist dilution liquid according to claim 1, characterized in that: The opening of the exhaust port (21) faces downward, and the opening of the exhaust port (21) is configured as an opening that expands outward.

7. The ion exchange equipment for producing RGB photoresist dilution liquid according to claim 1, characterized in that: The collecting tank (5) passes through a partition (6) fixed on the inner wall of the decomposition chamber (2), and circular through holes are provided around the partition (6), and funnel-shaped grooves are provided at the openings of the circular through holes provided around the partition (6).

8. The ion exchange equipment for producing RGB photoresist dilution liquid according to claim 1, characterized in that: The guide tube (11) is provided with a mounting sleeve (13) on all four sides, and the mounting sleeve (13) is mounted on the dissolving chamber (2) through bolt threads.

Images