Glass coating device and glass coating method

Abstract

The invention discloses a glass coating device and a glass coating method, and relates to the technical field of glass coating devices, the glass coating device comprises a coating device main body, the bottom of the coating device main body is provided with a glass main body, and the coating device main body is internally provided with an air inlet slit and an air exhaust slit which are used for allowing a precursor and fourth nitrogen to enter and exit; through the designed extension mechanism, the first bottom surface, the second bottom surface and the third bottom surface are arranged between the gas inlet slit and the gas exhaust slit, and the flow, the temperature and the direction of a plurality of nitrogen output from the three bottom surfaces are regulated and controlled, so that the nitrogen can be used as carrier gas; the power is also used as power for driving the precursor to make more contact with the glass surface and power for driving the precursor to be transversely uniform, the utilization rate of the precursor is increased, the effective output time of the precursor is prolonged, and the coating effect on the glass surface is improved.

Description

Technical Field

[0001] The invention belongs to the technical field of glass coaters, and in particular relates to a glass coater and a glass coating method. Background Art

[0002] Chemical vapor reaction coating is a common method for coating on glass surfaces. Usually, a gaseous precursor containing the elements that constitute the thin film is carried by a carrier gas (such as nitrogen) and output from the air inlet slit of the coater. The air inlet slit and the exhaust slit are horizontally arranged above the longitudinally moving glass. Between the air inlet slit and the exhaust slit is the bottom surface of the coater, which is usually a plane. The precursor undergoes a chemical reaction in the process of passing under the bottom surface, and the solid phase products of the reaction are deposited on the glass surface to form a thin film. The gas phase products of the reaction are called exhaust gas. The exhaust gas, unreacted precursor and carrier gas that do not participate in the reaction are discharged from the exhaust slit together.

[0003] The problems with the existing technology are: the utilization rate of the precursor is too low, usually less than 30% of the precursor participates in the chemical reaction, and a large amount of unreacted precursor is discharged from the exhaust slit, resulting in serious waste of coating materials; the effective output time of the precursor is too short. The duration from the start of the coater's use to the blockage of the air inlet slit, resulting in unqualified film quality, is called the effective output time of the precursor. Usually, after the effective output time reaches 12-48 hours, the precursor output from the air inlet slit will become uneven in the horizontal direction. The solid phase products of the chemical reaction will not only be deposited on the glass surface, but also on the lower port of the air inlet slit. In the actual production process, as the coating time accumulates, deposition will occur at the lower port of the slit, and this deposition is not evenly distributed. A certain point at the lower port of the slit will first become narrower or blocked, causing the output of the precursor at this point to be reduced or completely eliminated, resulting in uneven lateral distribution of the precursor. The observable result is that a longitudinal continuous film abnormality will appear at a certain position on the finished film layer of the coated glass, such as color and transmittance abnormalities. The only way to resume coating production is to stop the machine and clean the outlet end of the air inlet slit. For this reason, we propose a glass coater and a glass coating method. Summary of the invention

[0004] The object of the present invention is to provide a glass coating device and a glass coating method to solve the technical problems raised in the above background technology.

[0005] To achieve the above object, the present invention provides the following technical solution: a glass coater, comprising a coater body, a glass body is arranged at the bottom of the coater body, and an air inlet slit and an exhaust slit are respectively opened inside the coater body for allowing a precursor and a fourth nitrogen gas to enter and be exhausted;

[0006] An extension mechanism is provided inside the coating device body, and the extension mechanism comprises:

[0007] A combined bottom surface is arranged at the bottom of the coater body and is used for the precursor and the fourth nitrogen gas to pass through between the glass body and the coater body.

[0008] Preferably, the combined bottom surface includes a first bottom surface, a second bottom surface and a third bottom surface, the first bottom surface and the third bottom surface are parallel to the glass body, the second bottom surface is inclined to the glass body, and the distance between the bottom of the third bottom surface and the glass body is greater than the distance between the bottom of the first bottom surface and the glass body.

[0009] Preferably, the first bottom surface includes a first opening area and a non-porous area provided on the coating device body, and the first opening area is provided with a plurality of first holes for outputting the first nitrogen gas;

[0010] The second bottom surface is a second opening area, and the second opening area is provided with a plurality of second holes for outputting the second nitrogen;

[0011] The third bottom surface is a third opening area, and a plurality of third holes are formed on the third opening area for outputting the third nitrogen.

[0012] Preferably, the third holes include a plurality of single openings opening vertically downward and a plurality of double openings opening obliquely downward.

[0013] Preferably, a film layer detector is provided on one side of the coating device body, and the film layer detector moves back and forth laterally to scan the color and transmittance of the film on the glass body.

[0014] Preferably, the extension mechanism further comprises:

[0015] A plurality of first tubes, wherein the first tubes are arranged inside the coating device body, and the bottom of the first tubes is connected to the first hole;

[0016] A plurality of groups of second tubes, wherein the second tubes are arranged inside the coating device body, and the bottoms of the second tubes are connected to the second holes;

[0017] A plurality of third tubes are provided, wherein the third tubes are arranged inside the main body of the coating device, and the bottom of the third tubes is connected with the third hole.

[0018] Preferably, a plurality of groups of blocking members are provided at the bottom of the coating device body for slowing down the speed of the precursor and the fourth nitrogen gas;

[0019] The blocking member comprises a track and a long baffle plate, a T-shaped slide plate is slidably arranged inside the track, and the long baffle plate is fixed on the top of the T-shaped slide plate.

[0020] Preferably, a short baffle is provided on one side of the long baffle, an adjustment slot is provided inside the short baffle, a fixing nut is fixedly provided on one side of the long baffle, and a locking nut is threadedly connected to the outside of the fixing nut.

[0021] Preferably, a first flow meter and a first flow regulating valve are provided on the top of the first tube for controlling the output of the first nitrogen.

[0022] The present invention also discloses a glass coating method, which specifically comprises the following steps:

[0023] S1, the precursor and the fourth nitrogen gas form a first mixed gas which is transported into the coating device body from the gas inlet slit;

[0024] S2, the first mixed gas enters the bottom of the coating device body, the precursor undergoes a chemical reaction above the glass body, and the solid phase product of the reaction is deposited on the surface of the glass body to form a thin film;

[0025] S3, during the film forming process, the first nitrogen gas, the second nitrogen gas and the third nitrogen gas are respectively output downward through the first tube, the second tube and the third tube in the extension mechanism to contact the first mixed gas;

[0026] S4, tail gas, unreacted precursor and nitrogen that does not participate in the reaction are discharged together from the exhaust slit;

[0027] S5. The coated glass body passes under the film layer detector, and the film layer detector scans horizontally back and forth above the glass body to measure the color and transmittance of the film on the glass body;

[0028] S6. When there is a blockage point at the air inlet slit, the first nitrogen output of the two first holes closest to the blockage point is reduced through the first flow regulating valve, so that the precursor passing under the first bottom surface can quickly become uniform in the lateral direction.

[0029] Compared with the prior art, the present invention has the following beneficial effects:

[0030] (1) The present invention uses a designed extension mechanism, a first bottom surface, a second bottom surface and a third bottom surface set between the air inlet slit and the exhaust slit, and regulates the flow rate, temperature and direction of multiple nitrogen gases output from the above three bottom surfaces, so that nitrogen is used not only as a carrier gas, but also as a power to drive the precursor to have more contact with the glass surface and to drive the precursor to be laterally uniform. This not only improves the utilization rate of the precursor, but also extends the effective output time of the precursor, thereby improving the effect of coating on the glass surface.

[0031] (2) The blocking member designed in the present invention allows the precursor and the fourth nitrogen gas to enter between the coater body and the glass body from the air inlet slit during use and pass between the short baffle plate in the blocking member and the inner wall of the coater body. At this time, the precursor and the fourth nitrogen gas will pass through the multiple blocking members in an S shape, making their passing speed slower, further increasing the time the precursor contacts the glass, and further improving the effect of coating the glass surface.

[0032] (3) The present invention is designed with a first flow meter and a first flow regulating valve. When a blockage point appears in the air inlet slit, the flow of the first flow regulating valve on the top of the two first holes closest to the blockage point is reduced, so that the precursor passing under the first bottom surface can quickly reach uniformity in the horizontal direction. There is no need to stop the machine to clean the bottom outlet end of the air inlet slit, which facilitates the coating production. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] Figure 1 It is a schematic diagram of the main structure of the existing coating device of the present invention;

[0034] Figure 2 It is a schematic cross-sectional structure diagram of the main body of the film coating device of the present invention;

[0035] Figure 3 It is a schematic diagram of the structure of the blocking member of the present invention;

[0036] Figure 4 It is a schematic diagram of the structure of the first tube, the second tube and the third tube of the present invention;

[0037] Figure 5 For the present invention Figure 2 Schematic diagram of the AA structure;

[0038] Figure 6 For the present invention Figure 5 Schematic diagram of the BB structure;

[0039] Figure 7 For the present invention Figure 5 The enlarged structural diagram of the middle part I;

[0040] Figure 8 It is a left-side structural schematic diagram of a long baffle and a short baffle of the present invention;

[0041] Fig. 9 For the present invention Figure 2 Schematic diagram of CC structure;

[0042] In the figure: 1, first bottom surface; 11, first opening area; 12, non-porous area; 1a, first hole; 1b, first tube; 2, second bottom surface; 2a, second hole; 2b, second tube; 3, third bottom surface; 3a, third hole; 3b, third tube; 4, air inlet slit; 5, combined bottom surface; 6, exhaust slit; 7, glass body; 8, coater body; D, blockage point; M, first adjacent hole; N, second adjacent hole; Q, vertical foot; R, first port; S, second port; 9, long baffle; 901, short baffle; 902, track; 903, T-shaped slide; 904, locking nut; 905, adjustment slot; 906, fixing nut. DETAILED DESCRIPTION

[0043] The technical solution of the present invention will be clearly and completely described below in conjunction with the embodiments. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0044] Embodiment 1

[0045] See also Figure 1-7 The present invention provides a technical solution: a glass coater, comprising a coater body 8, a glass body 7 is arranged at the bottom of the coater body 8, an air inlet slit 4 and an exhaust slit 6 are respectively opened inside the coater body 8, for allowing a precursor and a fourth nitrogen gas to enter and be discharged, an extension mechanism is arranged inside the coater body 8, the extension mechanism comprises a combined bottom surface 5, the combined bottom surface 5 is arranged at the bottom of the coater body 8, for the precursor and the fourth nitrogen gas to pass through between the glass body 7 and the coater body 8;

[0046] The combined bottom surface 5 includes a first bottom surface 1, a second bottom surface 2 and a third bottom surface 3, wherein the first bottom surface 1 and the third bottom surface 3 are parallel to the glass body 7, the second bottom surface 2 is inclined to the glass body 7, and the distance between the bottom of the third bottom surface 3 and the glass body 7 is greater than the distance between the bottom of the first bottom surface 1 and the glass body 7;

[0047] The first bottom surface 1 includes a first opening area 11 and a non-porous area 12 arranged on the coating device body 8, the first opening area 11 is provided with a plurality of first holes 1a for outputting the first nitrogen gas, the second bottom surface 2 is a second opening area, the second opening area is provided with a plurality of second holes 2a for outputting the second nitrogen gas, and the third bottom surface 3 is a third opening area, the third opening area is provided with a plurality of third holes 3a for outputting the third nitrogen gas;

[0048] The openings of the first hole 1a and the second hole 2a are both single openings facing vertically downward, and the third hole 3a includes a plurality of single openings facing vertically downward and a plurality of double openings facing obliquely downward. Figure 5 From the top, the plurality of third holes 3a are arranged with each group opening vertically downwards, and the rest are arranged with double openings inclined downwards;

[0049] A film layer detector is provided on one side of the coating device body 8, and the film layer detector moves back and forth laterally to scan the color and transmittance of the film on the glass body 7;

[0050] The extension mechanism further includes a plurality of first tubes 1b, the top of the first tubes 1b is provided with a first heater for heating the first nitrogen gas, the first tubes 1b are arranged inside the coating device body 8, and the bottom of the first tubes 1b is connected to the first hole 1a;

[0051] A plurality of groups of second tubes 2b, wherein the second tubes 2b are arranged inside the coating device body 8, and the bottom of the second tubes 2b is connected to the second hole 2a;

[0052] A plurality of sets of third tubes 3b, wherein the third tubes 3b are arranged inside the coating device body 8, and the bottom of the third tubes 3b is connected to the third hole 3a;

[0053] The tops of the first tube 1b, the second tube 2b and the third tube 3b are all installed with corresponding second flow meters, second flow regulating valves, second heaters and insulated delivery pipes. The nitrogen to be delivered into the first tube 1b, the second tube 2b and the third tube 3b is heated by the second heater, and then the heated nitrogen moves downward to between the glass body 7 and the coater body 8, slowing down the speed of the precursor and the fourth nitrogen passing through, and increasing the contact time between the precursor and the surface of the glass body 7.

[0054] The present invention adopts a designed extension mechanism, a first bottom surface 1, a second bottom surface 2 and a third bottom surface 3 are arranged between the air inlet slit 4 and the exhaust slit 6, and the flow rate, temperature and direction of multiple nitrogen gases output from the above three bottom surfaces are regulated, so that the nitrogen is used not only as a carrier gas, but also as a power to drive the precursor to have more contact with the surface of the glass body 7 and to drive the precursor to be laterally uniform. This not only improves the utilization rate of the precursor, but also extends the effective output time of the precursor, thereby improving the effect of coating on the surface of the glass body 7.

[0055] Embodiment 2

[0056] Based on Example 1, please refer to Figure 2 , Figure 3 , Figure 8 and Fig. 9 , a plurality of groups of blocking members are provided at the bottom of the coating device body 8 for slowing down the speed of the precursor and the fourth nitrogen gas;

[0057] The blocking member includes a track 902 and a long baffle 9. A T-shaped slide plate 903 is slidably arranged inside the track 902. The top of the track 902 located at the bottom of the second bottom surface 2 is an inclined surface, which is flush with the bottom of the second bottom surface 2. The long baffle 9 is fixed on the top of the T-shaped slide plate 903. A short baffle 901 is arranged on one side of the long baffle 9. An adjustment groove 905 is opened inside the short baffle 901. A fixing nut 906 is fixedly arranged on one side of the long baffle 9. A locking nut 904 is threadedly connected to the outside of the fixing nut 906.

[0058] The blocking member designed in the present invention allows the precursor and the fourth nitrogen gas to enter between the coater body 8 and the glass body 7 from the air inlet slit 4 during use and pass between the short baffle 901 in the blocking member and the inner wall of the coater body 8. At this time, the precursor and the fourth nitrogen gas will pass through the multiple blocking members in an S shape, making their passing speed slower, further increasing the time the precursor contacts the glass body 7, and further improving the effect of coating the surface of the glass body 7.

[0059] Embodiment 3

[0060] Based on Example 2, please refer to Figure 5 and Figure 7 A first flow meter and a first flow regulating valve are provided at the top of the first tube 1b to control the output of the first nitrogen. The method is applied to coating (tin coating) float glass. The temperature of the glass body 7 below the coating device is 630°C. The glass body 7 moves under the support driving mechanism below it. The precursor is a gas containing tin, which is an element constituting the thin film. The amount of the precursor is 6Nm 3 / h, (this is the parameter under standard conditions, the following gas quantities are all under standard conditions), the amount of nitrogen is 200Nm 3 / h, the 200Nm 3 / h of nitrogen is the total amount of nitrogen used, including the first, second, third and fourth nitrogen mentioned above, accounting for 30%-40%, 15%-25%, 10%-20% and 30%-60% respectively. In this embodiment, it is specifically: 32Nm 3 / h、21NNm 3 / h、15Nm 3 / h、32Nm 3 / h; the temperature and flow rate of each of the above-mentioned nitrogen gases are provided by the corresponding heaters, flow meters, flow regulating valves and insulated delivery pipelines arranged outside the coating device body 8.

[0061] The present invention is designed with a first flow meter and a first flow regulating valve. When a blockage point D appears in the air inlet slit 4, the flow of the first flow regulating valve on the top of the two first holes 1a closest to the blockage point D is reduced, so that the precursor passing under the first bottom surface 1 can quickly reach uniformity in the horizontal direction, without stopping the machine to clean the bottom outlet end of the air inlet slit 4, thereby facilitating film coating production.

[0062] Embodiment 4

[0063] Based on Example 3, please refer to Figure 1-Figure 9 The present invention also discloses a glass coating method, which specifically comprises the following steps:

[0064] S1, precursor (6Nm 3 / h) and the fourth nitrogen (32Nm 3 / h) to form a first mixed gas which is transported from the gas inlet slit 4 to the coating device body 8;

[0065] S2, the first mixed gas enters the bottom of the coating device body 8, the first mixed gas is mixed with the first nitrogen gas, the second nitrogen gas and the third nitrogen gas respectively delivered from the first hole 1a, the second hole 2a and the third hole 3a, the precursor undergoes a chemical reaction above the glass body 7, and the solid phase product of the reaction is deposited on the surface of the glass body 7 to form a thin film;

[0066] S3, during the film forming process, the first nitrogen gas, the second nitrogen gas and the third nitrogen gas are respectively output downwardly through the first tube 1b, the second tube 2b and the third tube 3b in the extension mechanism to contact the first mixed gas. The first nitrogen gas, the second nitrogen gas and the third nitrogen gas can increase the contact time between the first mixed gas and the surface of the glass body 7, thereby increasing the reaction effect. The plurality of long baffles 9 and the short baffles 901 in the extension mechanism are staggered so that the first mixed gas presents an S-shaped channel in the process of flowing toward the exhaust slit 6, thereby further increasing the contact time between the first mixed gas and the surface of the glass body 7;

[0067] S31, first bottom surface 1 below stage

[0068] The first mixed gas first enters below the first bottom surface 1;

[0069] The first holes 1a are viewed as a row from the front to the back of the coater body 8 and in the direction of movement toward the glass body 7. The holes in a row of the first holes 1a are evenly distributed in the horizontal direction. A row of first tubes 1b corresponding to the row of the first holes 1a is vertically arranged inside the coater body 8 above the first opening area 11. A first flow meter and a first flow regulating valve are arranged on the pipeline of each first tube 1b that is higher than the top surface of the coater body 8. Then, each first tube 1b is connected to a first heater that heats the first nitrogen gas.

[0070] In this step, all the first flow regulating valves are fully opened, and the first nitrogen gas (30 Nm 3 / h) from the first heater for heating the first nitrogen gas through the first pipe 1b and output from the first hole 1a, that is, the first nitrogen gas ejected from each first hole 1a has the same temperature and flow rate;

[0071] In this step, the first part of the precursor participates in the chemical reaction, and the first tail gas is generated while the first film is generated on the surface of the glass body 7; the first tail gas, the remaining part of the precursor except the first part (including the second part, the third part and the fourth part described below), and the first and fourth nitrogen gases form a second mixed gas at the end of the first bottom surface 1, and the temperature of the second mixed gas is 630°C;

[0072] S32, second bottom surface 2 lower stage

[0073] The second mixed gas enters below the second bottom surface 2;

[0074] The second holes 2a are arranged in multiple rows from the front to the back and right side of the coater body 8. The structural dimensions of each row of the multiple rows of second holes 2a are exactly the same. The holes in each row are evenly distributed in the horizontal direction, and each row is evenly spaced in the vertical direction in the moving direction of the glass body 7. In this embodiment, three rows of second tubes 2b corresponding to the three rows of second holes 2a are vertically arranged inside the coater body 8 above the second bottom surface 2. A second flow meter and a second flow regulating valve are provided on each second tube 2b that is higher than the top surface of the coater body 8. Then, each row of the tubes is connected to its corresponding second heater for heating the second nitrogen. There are three second heaters, and the temperature of each row increases in turn with the increase of the distance between each row and the first bottom surface 1. In this embodiment, the second nitrogen (21Nm 3 / h) The temperature output from the second holes 2a in the three rows increases by 10°C as the distance between each row and the first bottom surface 1 increases, and is respectively: 640°C, 650°C and 660°C, and the output of each row is 7Nm 3 / h;

[0075] In this step, the function of the second bottom surface 2 is that when the second mixed gas enters the bottom of the second bottom surface 2, the second nitrogen flows from the second hole 2a of the second bottom surface from top to bottom. Since the temperature of the second nitrogen (greater than or equal to 640°C) is higher than the temperature of the second mixed gas (630°C), the second nitrogen can temporarily occupy the upper layer position of the cross section of the area below the second bottom surface 2 and flow forward. At the same time, the second mixed gas can also temporarily occupy the lower layer position of the cross section of the area below the second bottom surface 2 and flow forward. The two flow forward in layers and in parallel. In this way, (drive)

[0076] The space of the second mixed gas is compressed, so that the precursor therein cannot diffuse upwards and can only move close to the surface of the glass body 7, thereby increasing the contact time between the precursor and the surface of the glass body 7, so that the second part of the precursor participates in the reaction in this area, thereby increasing the utilization rate of the precursor;

[0077] At the same time, the function of the second bottom surface 2 is that, since the precursor in the second mixed gas continuously generates the second tail gas during the forward movement, the amount of tail gas below the second bottom surface 2 is continuously increasing. The present invention increases the temperature of the three columns of second nitrogen gas in sequence and in equal amounts as the distance between each column and the first bottom surface 1 increases, so that the volume of the second nitrogen gas at the upper layer of the cross section of the area below the second bottom surface 2 can increase accordingly as it flows forward, and then continuously increases the pressure of the upper layer of the second nitrogen gas on the gas that is continuously expanding in the lower space, so that the precursor is still suppressed in the lower layer, and the contact time between the precursor and the surface of the glass body 7 can continue to increase, so that more precursors participate in the reaction in this area, and the utilization rate of the precursor is further increased;

[0078] In this step, the second part of the precursor participates in the chemical reaction, and generates a second tail gas while generating a second film on the surface of the first film; the second tail gas, the remaining part of the precursor except the first and second parts (including the third part and the fourth part described below), the fourth, the second, the first nitrogen gas, and the first tail gas, form a third mixed gas at the end of the second bottom surface 2;

[0079] S33, third bottom 3 lower stage

[0080] The third mixed gas enters below the third bottom surface 3;

[0081] like Figure 5 As shown, the third bottom surface 3 is provided with five rows of third holes 3a in parallel with the moving direction of the glass body 7, wherein the first, third and fifth rows are single openings opening vertically downward, and the openings of the second and fourth rows are double openings obliquely pointing to the left and right downwards; the rows are arranged at equal intervals in the horizontal direction, and the holes in each row are evenly distributed in the moving direction of the glass body 7;

[0082] Five rows of third tubes 3b corresponding to the five rows of third holes 3a are arranged inside the coating device body 8 above the third bottom surface 3. A third flow meter and a third flow regulating valve are arranged on each third tube 3b above the top surface of the coating device body 8. Then, each third tube 3b is connected to a third heater for heating the third nitrogen gas. In this step, the third nitrogen gas (15Nm 3 The output temperature is 630℃ and the output of each column is 3Nm 3 / h;

[0083] In this step, the function of the third bottom surface 3 is that, since the first, third and fifth columns are single openings opening vertically downward, and the openings of the second and fourth columns are double openings tilted to the left and right and downward, and the flow rates of each column are the same, the third nitrogen gas output from the first, third and fifth columns and the third nitrogen gas output from the second and fourth columns drive the second mixed gas to form a lateral vortex in the area below the third bottom surface 3, thereby increasing the contact time between the precursor and the surface of the glass body 7, and further increasing the utilization rate of the precursor;

[0084] In this step, the third part of the precursor participates in the reaction, and a third tail gas is generated while a third film is generated on the surface of the second film; the third tail gas, the fourth part of the precursor other than the first, second and third parts, and the fourth, third, second and first nitrogen, second and first tail gases, spirally move forward under the third bottom surface 3, and form a fourth mixed gas at the end of the third bottom surface 3;

[0085] S4, the tail gas and the unreacted precursor and the nitrogen that does not participate in the reaction are discharged from the exhaust slit 6 together. At this time, the fourth mixed gas is discharged from the exhaust slit 6. In this embodiment, the amount of unreacted precursor in the fourth mixed gas discharged from the exhaust slit 6 is 2.4Nm 3 / h, that is, the utilization rate of the precursor reaches 60%, which is greatly improved compared with the existing technology;

[0086] S5, the coated glass body 7 passes under the film layer detector, and the film layer detector scans horizontally back and forth above the glass to measure the color and transmittance of the thin film on the glass body 7;

[0087] S6. When there is a blockage point in the air inlet slit 4, the first nitrogen output of the two first holes 1a closest to the blockage point is reduced through the first flow regulating valve, so that the precursor passing under the first bottom surface 1 can be quickly uniform in the horizontal direction;

[0088] If the quality inspection result exceeds the specified value and the deviation exceeds the acceptable deviation, and the deviation is continuously distributed at a certain position on the surface of the glass body 7 parallel to the moving direction of the glass body 7, it can be determined that the air inlet slit 4 corresponding to this position has a blockage point D. In this embodiment, the duration from the start of use of the film coating device body 8 to the occurrence of unqualified film quality due to blockage is 40.1 hours, that is, the effective output time of the precursor is 40.1 hours. After this, if no adjustment is made, the precursor will be in an invalid output state;

[0089] S81, Adjustment

[0090] In this step, the function of the first bottom surface 1 is to reduce the flow of the two first holes 1a closest to the blockage point D when it is determined that the air inlet slit 4 has a blockage point D, so that the precursor passing under the first bottom surface 1 can be quickly uniform in the horizontal direction, and the reduction value of the flow of the first hole 1a is 1% to 100% of the original flow. The specific operation includes the following steps:

[0091] S82, set the number

[0092] The number includes:

[0093] a. First column numbering: dividing the air inlet slit 4 into grid points with the same spacing in the horizontal direction (the spacing is 1 mm in this embodiment), and numbering each of the grid points;

[0094] b. The second column numbering is to divide the surface of the glass body 7 into grid points with the same spacing in the horizontal direction (the spacing is 10 mm in this embodiment) and number the above grid points;

[0095] c. The third column is numbered, and each hole in a column of first holes 1a is numbered.

[0096] S83, determining the blocking point D;

[0097] According to the grid point position in the second column numbering that exceeds the acceptable deviation as described in S6, find the corresponding grid point position in the first column numbering (both are on the same straight line parallel to the moving direction of the glass body 7), and this position is the blocking point of the air inlet slit 4. Figure 7 As shown, the blocking point is D;

[0098] S84, adjust the flow rate of the first hole 1a

[0099] Then find the numbers of the two first holes 1a closest to the blocking point D in the third column, and reduce the output of the first nitrogen gas of each hole in proportion according to the distance between the two holes and the blocking point D. The closer the hole is to the blocking point D, the more its gas flow rate is reduced in proportion, and the reduction in flow rate is 1% to 100% of the original flow rate. In this embodiment, it is assumed that the output flow rate of each hole in a row of first holes 1a in step S31 is 1, such as Figure 7 As shown, the third column numbers of the two first holes 1a closest to the blocking point D are the first adjacent hole M and the second adjacent hole N, and a perpendicular line is drawn from point D to the line connecting the first adjacent hole M and the second adjacent hole N, with the foot of the perpendicular being Q. In this embodiment, MQ / QN=4:6, and the output of the first nitrogen gas of the first hole 1a at the first adjacent hole M is reduced to 0.4l (the reduction is 60% of the original flow), and the output of the first nitrogen gas of the first hole 1a at the second adjacent hole N is reduced to 0.6l (the reduction is 40% of the original flow), and at the same time, the flow of the remaining first holes 1a remains unchanged at l;

[0100] In this step, when the two first holes 1a of the first adjacent hole M and the second adjacent hole N closest to the blocking point D reduce the output of the first nitrogen, the pressure of the first nitrogen output from the two holes on the first mixed gas directly below them will be reduced, so the first mixed gas located directly below the first adjacent hole M and the second adjacent hole N will diffuse upward (towards the first bottom surface 1); at the same time, since the flow rates of the remaining first holes 1a on the left and right sides of the first adjacent hole M and the second adjacent hole N remain unchanged, the first mixed gas on the left and right sides will quickly replenish to the bottom of the first adjacent hole M and the second adjacent hole N, that is, Figure 7 The first mixed gas under the first port R and the first holes 1a on its left side, and the first mixed gas under the second port S and the first holes 1a on its right side, will quickly diffuse horizontally to the first adjacent hole M and the second adjacent hole N, wherein the first mixed gas supplemented under the first adjacent hole M is proportionally more, so that the first mixed gas under the first opening area 11 of the first bottom surface 1 quickly tends to be uniform in the horizontal direction, and the longitudinal length of the subsequent non-porous area 12 is at least 3 times the longitudinal length of the first opening area 11, so that the above gases have sufficient space and time to be homogenized and stabilized. That is, by reducing the output of the first nitrogen gas of the two first holes 1a closest to the blocking point D, the uneven lateral output of the precursor caused by the (driving) blocking point D is restored to uniformity;

[0101] S85, continue to run steps S32, S33, S5, S6, S7

[0102] If the quality inspection result is within the acceptable deviation compared with the specified value, it indicates that the uneven film layer caused by the above-mentioned blockage point D has been completely eliminated, and the coating device body 8 can continue to operate according to the parameters adjusted in S84, that is, the effective output time of the precursor is extended;

[0103] If the quality inspection result is better than the specified value, but still exceeds the acceptable deviation, and the deviation is continuously distributed in the longitudinal direction of the coated glass, it can be determined that the coating quality defects caused by the blockage point D of the air outlet channel corresponding to the longitudinal position have not been completely eliminated, then repeat step S83, and based on the quality inspection result, continue to proportionally reduce the output of the two first holes 1a, the first adjacent hole M and the second adjacent hole N, on the basis of the last flow reduction, until the quality inspection is qualified.

[0104] In this embodiment, after adjustment in step S8, the coating quality is restored to qualified and maintained for 10.5 hours before the coating quality defects appear again, that is, the effective output time of the precursor is extended by 10.5 hours. However, after the blockage point D appears in the gas outlet channel of the prior art, the machine can only be shut down for cleaning before the coating production can be resumed, that is, the effective output time of the precursor in the prior art cannot be extended.

[0105] The working principle and use process of the present invention:

[0106] When the present invention is in use, the first mixed gas composed of the precursor and the fourth nitrogen gas enters the position between the coating device body 8 and the glass body 7 from the air inlet slit 4, and then the precursor undergoes a chemical reaction above the glass body 7, and the solid phase product of the reaction is deposited on the surface of the glass body 7 to form a thin film; when the precursor moves to the right, while moving, the first, second and third nitrogen gases after heating are blown downward from the first tube 1b, the second tube 2b and the third tube 3b, and the first, second and third nitrogen gases are distributed at the bottom of the coating device body 8, so that the contact time between the precursor and the upper surface of the glass body 7 is prolonged, thereby increasing the utilization rate of the precursor, and the gas phase product of the reaction is called tail gas, which is discharged from the exhaust slit 6 together with the unreacted precursor and the nitrogen gas that does not participate in the reaction;

[0107] When the precursor enters from the air inlet slit 4 to the position between the coater body 8 and the glass body 7 and then is discharged from the exhaust slit 6, the precursor will pass through multiple groups of blocking members, which are staggered at the bottom of the coater body 8. The channel formed between the short baffle 901 on the blocking member and the inner wall of the coater body 8 is S-shaped when viewed from the top. At this time, when the precursor passes through, most of the upper part of the precursor will pass through the formed S-shaped channel, which can increase the time the precursor passes through, increase the contact time between the precursor and the surface of the glass body 7, and further increase the effect and quality of coating on the glass body 7;

[0108] When a blockage point D appears in the air inlet slit 4, the flow of the first flow regulating valve on the top of the first tube 1b of the two first holes 1a closest to the blockage point D is controlled and reduced, so that the flow through the two closest first holes 1a is reduced, and the precursor passing under the first bottom surface 1 can quickly reach uniformity in the horizontal direction, without stopping the machine to clean the bottom outlet end of the air inlet slit 4, thereby facilitating film production.

[0109] The above embodiments are only used to illustrate the technical method of the present invention rather than to limit it. Although the present invention has been described in detail with reference to the preferred embodiments, those skilled in the art should understand that the technical method of the present invention may be modified or replaced by equivalents without departing from the spirit and scope of the technical method of the present invention.

Claims

1. A glass coater, comprising a coater body (8), wherein a glass body (7) is arranged at the bottom of the coater body (8), characterized in that: The coating device body (8) is provided with an air inlet slit (4) and an exhaust slit (6) inside, respectively, for allowing the precursor and the fourth nitrogen gas to enter and be exhausted; An extension mechanism is provided inside the coating device body (8), and the extension mechanism comprises: A combined bottom surface (5) is arranged at the bottom of the coating device body (8) and is used for the precursor and the fourth nitrogen gas to pass through between the glass body (7) and the coating device body (8).

2. A glass coater according to claim 1, characterized in that: The combined bottom surface (5) comprises a first bottom surface (1), a second bottom surface (2) and a third bottom surface (3); the first bottom surface (1) and the third bottom surface (3) are parallel to the glass body (7); the second bottom surface (2) is inclined to the glass body (7); and the distance between the bottom of the third bottom surface (3) and the glass body (7) is greater than the distance between the bottom of the first bottom surface (1) and the glass body (7).

3. A glass coater according to claim 2, characterized in that: The first bottom surface (1) comprises a first opening area (11) and a non-porous area (12) arranged on the coating device body (8); the first opening area (11) is provided with a plurality of first holes (1a) for outputting the first nitrogen gas; The second bottom surface (2) is a second opening area, and the second opening area is provided with a plurality of second holes (2a) for outputting the second nitrogen; The third bottom surface (3) is a third opening area, and a plurality of third holes (3a) are provided on the third opening area for outputting the third nitrogen.

4. A glass coater according to claim 3, characterized in that: The third holes (3a) include a plurality of single openings opening vertically downward and a plurality of double openings opening obliquely downward.

5. A glass coater according to claim 1, characterized in that: A film layer detector is arranged on one side of the coating device body (8), and the film layer detector moves back and forth laterally to scan the color and transmittance of the film on the glass body (7).

6. A glass coater according to claim 3, characterized in that: Extension agencies also include: A plurality of groups of first tubes (1b), wherein the first tubes (1b) are arranged inside the coating device body (8), and the bottom of the first tubes (1b) is connected to the first hole (1a); A plurality of groups of second tubes (2b), wherein the second tubes (2b) are arranged inside the coating device body (8), and the bottom of the second tubes (2b) is connected to the second hole (2a); A plurality of groups of third tubes (3b), wherein the third tubes (3b) are arranged inside the coating device body (8), and the bottom of the third tubes (3b) is connected to the third hole (3a).

7. A glass coater according to claim 1, characterized in that: The bottom of the coating device body (8) is provided with a plurality of groups of blocking members for slowing down the speed of the precursor and the fourth nitrogen gas; The blocking member comprises a track (902) and a long baffle (9); a T-shaped slide plate (903) is slidably arranged inside the track (902); and the long baffle plate (9) is fixed on the top of the T-shaped slide plate (903).

8. A glass coater according to claim 7, characterized in that: A short baffle (901) is provided on one side of the long baffle (9), an adjustment slot (905) is provided inside the short baffle (901), a fixing nut (906) is fixedly provided on one side of the long baffle (9), and a locking nut (904) is threadedly connected to the outside of the fixing nut (906).

9. A glass coater according to claim 6, characterized in that: A first flow meter and a first flow regulating valve are arranged on the top of the first tube (1b) for controlling the output of the first nitrogen.

10. A glass coating method according to any one of claims 1 to 9, characterized in that: The specific steps include: S1, the precursor and the fourth nitrogen gas form a first mixed gas which is transported from the gas inlet slit (4) into the coating device body (8); S2, the first mixed gas enters the bottom of the coating device body (8), the precursor undergoes a chemical reaction above the glass body (7), and the solid phase product of the reaction is deposited on the surface of the glass body (7) to form a thin film; S3, during the film forming process, the first nitrogen gas, the second nitrogen gas and the third nitrogen gas are respectively output downwardly through the first tube (1b), the second tube (2b) and the third tube (3b) in the extension mechanism to contact the first mixed gas; S4, tail gas, unreacted precursor and nitrogen that does not participate in the reaction are discharged together from the exhaust slit (6); S5, the coated glass body (7) passes under a film layer detector, and the film layer detector scans back and forth horizontally above the glass to measure the color and transmittance of the film on the glass body (7); S6. When there is a blockage point in the air inlet slit (4), the first nitrogen output of the two first holes (1a) closest to the blockage point is reduced through the first flow regulating valve, so that the precursor passing under the first bottom surface (1) can quickly become uniform in the horizontal direction.

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