Rotatable wafer detection head

Abstract

The invention relates to a rotatable wafer detection head, and belongs to the technical field of wafer detection, the rotatable wafer detection head comprises an upper plate body, the upper surface of the upper plate body is fixedly provided with a lifting rod, the top of the upper plate body is fixedly provided with a driving assembly, the driving assembly comprises a driving motor fixed on the upper surface of the upper plate body, and the bottom of the upper plate body is rotatably provided with a synchronizing wheel; the synchronous wheel is sleeved with a synchronous belt, an output shaft of the driving motor penetrates through the upper plate body to be in power connection with the synchronous wheel, fixing mechanisms are evenly distributed on the outer wall of the synchronous belt, an assembling structure is arranged on each fixing mechanism, a detection assembly is installed on each assembling structure, and the lifting rod can control the upper plate body to descend. According to the invention, the detection assembly is arranged on the wafer, then the detection assembly is moved above the wafer through the synchronous belt, the position detector can detect the position of the synchronous belt and avoid dislocation during movement, a plurality of probe structures can be installed on the synchronous belt, and the cost of the probe structures is reduced by reducing the function realized by a single probe structure, and meanwhile, the subsequent replacement and maintenance are facilitated.

Description

Technical Field

[0001] The present invention relates to the technical field of wafer detection, and in particular to a rotatable wafer detection head. Background Art

[0002] Wafers are important manufacturing materials in semiconductor manufacturing. When making silicon semiconductor circuits, a series of processes are required to manufacture components on single crystal silicon wafers and set up electrical circuits. Before packaging, the circuits and components on the wafers need to be tested. There are multiple wafer matrices on the wafer, and using automated equipment to test the wafers can greatly improve detection efficiency.

[0003] For example, the Chinese utility model patent document with the announcement number CN207908631U discloses a rotatable wafer inspection head, including a U-shaped bracket and a connecting column. A rotating shaft is provided between the lower ends of the U-shaped bracket, a base is fixed on the rotating shaft, and positioning seats are provided on the four sides of the base. Each positioning seat is provided with a probe assembly, and the probe assembly includes a probe positioning plate and a plurality of probes fixed on the probe positioning plate; a passive gear is provided at the right end of the rotating shaft, a stepping motor is provided on the right side of the U-shaped bracket, and an active gear meshing with the passive gear is provided at the shaft end of the stepping motor, and an automatic locking mechanism is provided between the rotating shaft and the U-shaped bracket. The utility model prolongs the probe replacement cycle, shortens the probe replacement time, and thus improves the wafer inspection efficiency.

[0004] In the above document, the probes are arranged on the outer wall of the rotating shaft, and when the rotating shaft rotates, the corresponding probes are rotated to above the wafer to be inspected, and then the inspection is performed.

[0005] However, this method can use a series of probes to detect wafers, but the number of installed probes is limited, which results in a large amount of detection carried by a single probe and a high requirement on the functional quality of the probe itself.

[0006] For example, the Chinese invention patent document with the announcement number CN109164280B discloses a quickly replaceable wafer inspection head assembly, including a base, wherein the base is provided with a plurality of vertical positioning through holes, each positioning through hole is provided with a probe positioning sleeve, the probe positioning sleeve is provided with a probe hole, the probe hole is provided with a probe, a connecting plate is provided on one side of the top surface of the base, connecting holes are provided at both ends of the connecting plate, and a threaded hole is provided on the side of the base which is vertically connected to the positioning through hole, and a locking bolt is provided in each threaded hole.

[0007] In the above document, the probe is quickly fixed by a locking bolt, but a positioning device is lacking, and the installed probe needs to be further positioned, which can reduce positional deviation during detection and better avoid damage to the probe structure. Summary of the invention

[0008] In order to overcome the technical defects of the prior art, the present invention provides a rotatable wafer inspection head, in which a synchronous belt moves the inspection component above the wafer. During movement, a position detector can detect the position of the synchronous belt to avoid misalignment, and multiple probe structures can be installed on the synchronous belt. By reducing the functions realized by a single probe structure, the cost of the probe structure can be reduced, and subsequent replacement and maintenance can be facilitated.

[0009] The technical solution adopted by the present invention is: it includes an upper plate body, a lifting rod is fixed on the upper surface of the upper plate body, the lifting rod requires additional structural support, and controls the descent of the upper plate body when necessary, a driving assembly is fixed on the top of the upper plate body, and the driving assembly includes a driving motor fixed on the upper surface of the upper plate body, a synchronous wheel is rotatably installed on the bottom of the upper plate body, a synchronous belt is provided on the outer sleeve of the synchronous wheel, the driving motor is a servo motor, and when in use, it needs to be matched with an external control system for precise behavior control, the output shaft of the driving motor passes through the upper plate body and is dynamically connected to the synchronous wheel, and fixing mechanisms are evenly distributed on the outer wall of the synchronous belt, the fixing mechanism is used to install the assembly structure on the synchronous belt, and the synchronous belt is periodically bent and moved when in use, an assembly structure is provided on the fixing mechanism, a detection assembly is installed on the assembly structure, and a power connector is provided on one side of the upper plate body through a power cord.

[0010] Preferably, in order to further limit the position of the assembly structure, a connecting frame is fixed to the bottom of the upper plate body, a lower plate body is fixed to the bottom of the connecting frame, and the lower plate body is located below the synchronous belt.

[0011] Preferably, in order to prevent the synchronous belt from sliding down and deviating, a limit strip is fixed on the inner wall of the synchronous belt, a receiving groove is provided on the limit strip, a detection piece is provided in the receiving groove, a position detector is fixed on the connecting frame, the position detector can use a photoelectric detection device, the detection piece can use a reflective material, or a visual detector can be used to monitor the position of the detection piece and the driven length of the synchronous belt, and a snap-in groove is provided on the outer wall of the synchronous wheel corresponding to the position of the limit strip.

[0012] Preferably, in order to better fix it on the outer wall of the synchronous belt, the fixing mechanism includes a bottom block fixed to the outer wall of the synchronous belt, the outer wall of the bottom block has a support extending to both sides, a vertical arc groove is opened in the center of the side wall of the bottom block, and a vertical cutting seam is provided in the center of the side wall of the bottom block. The cutting seam can divide the bottom block into two mirror-symmetrical parts, reducing the structural interference with the synchronous belt, connecting nails are fixed on the side wall of the support, and a cover plate is fixed on the side wall of the support through the connecting nails, and a vertical arc groove is also provided on the side of the cover plate close to the bottom block.

[0013] Preferably, in order to facilitate stable restriction of the installed detection component position and to facilitate convenient disassembly of the detection component when necessary, the assembly structure includes an assembly plate, a side plate body extending to one side of the fixing mechanism is fixed to the bottom of the assembly plate, a plug-in column is installed at the bottom of the assembly plate, a lower track groove is opened at the bottom of the lower plate body, the bottom end of the plug-in column passes through the vertical arc groove and extends into the lower track groove, a positioning column is fixed to the top of the assembly plate, an upper track groove is opened at the bottom of the upper plate body, the top end of the positioning column extends into the upper track groove, and the lower The track groove and the upper track groove can jointly limit the position of the assembly plate. An operating notch is provided on one side of the upper plate body. The size of the operating notch allows the assembly structure to pass through. A filling plate is provided in the operating notch. The filling plate corresponds to the upper track groove and is provided with a filling track groove. A connecting plate is fixed to the upper surface of the filling plate. The connecting plate is fixed to the upper plate body by connecting bolts. A hand-held plate is provided on the filling plate. During normal use, the assembly plate is neatly restricted between the upper plate body and the lower plate body. After the filling plate is removed, the assembly structure can be further removed conveniently.

[0014] Preferably, in order to facilitate the removal and replacement of the probe structure, the detection component includes a detection rod, the bottom end of the detection rod is provided with a probe structure, the bottom of the probe structure is a probe arranged according to the detection requirements, and a plurality of probe structures with different detection functions can be evenly arranged on the outer wall of the synchronous belt. After using a single probe structure to detect the wafer, the synchronous belt can sequentially detect the wafers in sequence, thereby performing multi-faceted functional tests on a single wafer, and at the same time, a probe structure with a higher degree of integration is not used, thereby reducing the loss cost of the probe structure. A connecting harness is provided at the top of the detection rod, and a plug interface is fixed at the top of the assembly plate. A plug connector is provided at one end of the connecting harness, and the plug connector is plugged into In the plug interface, a contact panel is fixed on the upper surface of the assembly plate, and the contact panel needs to be electrically connected to the plug interface. A clamping structure for fixing the detection rod is fixed on the side plate body, and a transmission structure is installed on the upper plate body. The transmission structure includes a clutch telescopic rod fixed on the upper plate body, and the bottom end of the clutch telescopic rod extends to below the bottom of the upper plate body. A bottom plate is fixed to the bottom end of the clutch telescopic rod, and a transmission mother block is fixed to the bottom of the bottom plate. A transmission contact is provided at the bottom of the transmission mother block, and a receiving contact is provided on the contact panel. The transmission contact has a complete detection function electrical supply, while the receiving contact changes according to the corresponding probe structure function and only has a partial function of electrical receiving capability.

[0015] Preferably, in order to better limit the position of the detection rod, the clamping structure includes a clamping seat fixed on the side plate, a polygonal block is fixed on the outer wall of the detection rod, the clamping seat is provided with a docking notch corresponding to the polygonal block and the shape of the detection column, the clamping seat is provided with a docking cover, the bottom of the docking cover extends to one side of the docking notch, and the docking cover is provided with an upper notch allowing the detection rod to pass through.

[0016] Preferably, in order to facilitate fixing the position of the docking cover, an ear plate is fixed on the side wall of the docking cover, a fastening hole is opened on the ear plate, a fastening bolt is installed on the ear plate, and one end of the fastening bolt passes through the fastening hole and is installed on the side plate body by threading.

[0017] Preferably, in order to limit the position of the plug-in column, an annular groove is provided on the outer wall of the plug-in column, and the annular groove is located below the bottom of the side plate body. An anti-slip plate is provided on the plug-in column, and a pressing notch is provided on the side of the ear plate close to the side plate body. A circular hole is provided on the top of the anti-slip plate, and the top of the anti-slip plate is sleeved on the fastening bolt through the circular hole. The other end of the anti-slip plate is provided with a clamping portion and extends into the annular groove.

[0018] The beneficial effects of the present invention are as follows: the detection head can be arranged above the wafer to be detected. When detection is required, the upper plate is controlled to descend by the lifting rod, and then the detection component is moved above the wafer through the synchronous belt. During the movement, the position detector can detect the position of the synchronous belt to avoid misalignment, and multiple probe structures can be installed on the synchronous belt. Different probe structures implement different functions. By reducing the functions implemented by a single probe structure, the cost of the probe structure is reduced, and it is convenient for subsequent replacement and maintenance. An operating notch is reserved to facilitate disassembly operations. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a schematic diagram of the three-dimensional structure of the present invention.

[0020] Figure 2 It is a schematic diagram of the structure of the driving component of the present invention.

[0021] Figure 3 It is a schematic diagram of the structure of the position detector of the present invention.

[0022] Figure 4 It is a schematic diagram of the transmission structure of the present invention.

[0023] Figure 5 It is a schematic diagram of the assembly structure of the present invention.

[0024] Figure 6 It is a schematic diagram of the fixing mechanism structure of the present invention.

[0025] Figure 7 It is a schematic diagram of the structure of the anti-slip plate of the present invention.

[0026] Figure 8 It is a schematic diagram of the clamping structure of the present invention.

[0027] Fig. 9 It is a schematic diagram of the structure of the detection component of the present invention.

[0028] Description of the accompanying drawings: In the figure: 1, upper plate; 101, connecting frame; 102, lower plate; 103, lower track groove; 104, upper track groove; 2, driving assembly; 201, driving motor; 202, synchronous wheel; 203, synchronous belt; 204, limiting strip; 205, receiving groove; 206, position detector; 3, fixing mechanism; 301, bottom block; 302, support platform; 303, vertical arc groove; 304, connecting nail; 305, cover plate; 4, assembly structure; 401, assembly plate; 402, side plate; 40 3. Plug-in column; 404. Positioning column; 405. Plug interface; 406. Contact panel; 407. Annular groove; 5. Detection component; 501. Detection rod; 502. Probe structure; 503. Connecting harness; 504. Polygonal block; 6. Filling plate; 601. Filling track groove; 602. Connecting plate; 603. Hand-held plate; 7. Snap-in structure; 701. Snap-in seat; 702. Docking cover; 703. Ear plate; 8. Transmission structure; 801. Clutch telescopic rod; 802. Bottom plate; 803. Transmission mother block; 9. Anti-slip plate. DETAILED DESCRIPTION

[0029] The present invention will be further described below in conjunction with the accompanying drawings: like Figure 1-Figure 9As shown, this embodiment provides a rotatable wafer inspection head, including an upper plate body 1, a lifting rod is fixed on the upper surface of the upper plate body 1, and the lifting rod needs additional structural support to control the descent of the upper plate body 1 when necessary. A driving component 2 is fixed on the top of the upper plate body 1, and the driving component 2 includes a driving motor 201 fixed on the upper surface of the upper plate body 1. A synchronous wheel 202 is rotatably installed at the bottom of the upper plate body 1, and a synchronous belt 203 is provided on the outer sleeve of the synchronous wheel 202. The driving motor 201 is a servo motor, and an external control system is required to be used for precise behavior control when in use. The output shaft of the driving motor 201 passes through the upper plate body 1 and is dynamically connected to the synchronous wheel 202. The outer wall of the synchronous belt 203 is evenly distributed with fixing mechanisms 3. The fixing mechanisms 3 are used to install the assembly structure 4 on the synchronous belt 203. The synchronous belt 203 is bent and moved periodically during use. The fixing mechanisms 3 are provided with an assembly structure 4. The assembly structure 4 is provided with a detection component 5. One side of the upper plate body 1 is provided with a power connector through a power cord. The bottom of the upper plate body 1 is fixed with a connecting frame 101. The bottom of the connecting frame 101 is fixed with a lower plate body 102. The lower plate body 10 2 is located below the synchronous belt 203, so that the position of the assembly structure 4 can be further limited. A limit strip 204 is fixed on the inner wall of the synchronous belt 203, and a receiving groove 205 is opened on the limit strip 204. A detection piece is arranged in the receiving groove 205. A position detector 206 is fixed on the connecting frame 101. The position detector 206 can use a photoelectric detection device, and the detection piece can use a reflective material, or a visual detector can be used to monitor the position of the detection piece and the driven length of the synchronous belt 203. The position of the limit strip 204 on the outer wall of the synchronous wheel 202 is corresponding to the position of the limit strip 204. A snap-in groove is provided to prevent the synchronous belt 203 from sliding down and deviating. When in use, the synchronous belt 203 is limited in its running trajectory by the synchronous wheel 202, so that the length direction of the synchronous belt 203 is perpendicular to the running direction of the wafer, and multiple rows of wafers are arranged. The synchronous belt 203 can drive the detection component 5 to detect the wafers one by one, and in order to increase the number of detection functions, the two detection heads can be mirrored so that the detection component 5 partially overlaps and the probe structure 502 is located on the same motion trajectory, thereby jointly detecting a row of wafers.

[0030] The fixing mechanism 3 includes a bottom block 301 fixed to the outer wall of the synchronous belt 203, and the outer wall of the bottom block 301 extends to both sides with a support platform 302, and a vertical arc groove 303 is opened in the center of the side wall of the bottom block 301, and a vertical cutting seam is provided in the center of the side wall of the bottom block 301. The cutting seam can divide the bottom block 301 into two mirror-symmetrical parts to reduce the structural interference with the synchronous belt 203, and a connecting nail 304 is fixed on the side wall of the support platform 302, and a cover plate 305 is fixed on the side wall of the support platform 302 through the connecting nail 304. The side of the cover plate 305 close to the bottom block 301 is also provided with a vertical arc groove 303, so that it can be better fixed on the outer wall of the synchronous belt 203. The synchronous belt 203 will bend when passing through the synchronous wheel 202, and the bottom block 301 will rotate accordingly. The divided bottom blocks 301 can be relatively separated without interfering with each other, and structural deformation will occur between the cover plate 305 and the bottom block 301.

[0031] The assembly structure 4 includes an assembly plate 401, a side plate body 402 extending to one side of the fixing mechanism 3 is fixed at the bottom of the assembly plate 401, a plug-in column 403 is installed at the bottom of the assembly plate 401, a lower track groove 103 is provided at the bottom of the lower plate body 102, the bottom end of the plug-in column 403 passes through the vertical arc groove 303 and extends into the lower track groove 103, a positioning column 404 is fixed to the top of the assembly plate 401, an upper track groove 104 is provided at the bottom of the upper plate body 1, the top end of the positioning column 404 extends into the upper track groove 104, the lower track groove 103 and the upper track groove 104 can jointly limit the position of the assembly plate 401, an operating notch is provided on one side of the upper plate body 1, the size of the operating notch allows the assembly structure 4 to pass through, a filling plate 6 is provided in the operating notch, and the filling plate 6 corresponds to the filling plate 104 provided with the upper track groove 104 Track groove 601, a connecting plate 602 is fixed on the upper surface of the filling plate 6, and the connecting plate 602 is fixed to the upper plate body 1 by connecting bolts. A hand-held plate 603 is provided on the filling plate 6. During normal use, the assembly plate 401 is neatly restricted between the upper plate body 1 and the lower plate body 102. After the filling plate 6 is removed, the assembly structure 4 can be further removed conveniently, which can facilitate the stable restriction of the position of the installed detection component 5 and the convenient disassembly of the detection component 5 when needed. When in use, a single fixing mechanism 3 or a pair of fixing mechanisms 3 can be set to limit the position of the assembly structure 4. When two fixing mechanisms 3 are set, the positioning column 404 is preferably rotatably connected to the assembly plate 401, and when the assembly plate 401 is driven by the fixing mechanism 3, the positioning column 404 and the plug-in column 403 can be used to limit its own position.

[0032] The detection assembly 5 includes a detection rod 501, and a probe structure 502 is provided at the bottom end of the detection rod 501. The bottom of the probe structure 502 is a probe set according to the detection requirements. A plurality of probe structures 502 with different detection functions can be evenly arranged on the outer wall of the synchronous belt 203. After a single probe structure 502 is used to detect a wafer, the synchronous belt 203 can sequentially detect the wafers, thereby performing multi-faceted functional tests on a single wafer. At the same time, the probe structure 502 with a high degree of integration is not used, which reduces the number of probe structures 502. The detection rod 501 has a connection harness 503 at the top, a plug interface 405 is fixed at the top of the assembly plate 401, one end of the connection harness 503 is provided with a plug connector, and the plug connector is plugged into the plug interface 405, a touch panel 406 is fixed on the upper surface of the assembly plate 401, and the touch panel 406 needs to be electrically connected to the plug interface 405, a clamping structure 7 for fixing the detection rod 501 is fixed on the side plate 402, and a transmission structure 8 is installed on the upper plate 1, and the transmission structure 8 includes a clutch telescopic rod 801 fixed on the upper plate 1 The bottom end of the clutch telescopic rod 801 extends to the bottom of the upper plate 1, and the bottom end of the clutch telescopic rod 801 is fixed with a bottom plate 802, and the bottom of the bottom plate 802 is fixed with a transmission mother block 803. The bottom of the transmission mother block 803 is provided with a transmission contact, and the contact panel 406 is provided with a receiving contact. The transmission contact has a complete detection function electrical supply, and the receiving contact changes according to the corresponding probe structure 502 function, and only has a partial function of the electrical receiving ability, so that the probe structure 502 can be easily dismantled and replaced. When in use, the wafer reaches the probe The needle structure 502 is under the needle structure 502, and then the lifting rod controls the upper plate body 1 to descend, so that the probe structure 502 is pressed on the wafer, the clutch telescopic rod 801 extends and drives the transmission mother block 803 to fit on the contact panel 406, and then electrically connects with the probe structure 502, and then the external detection system can perform functional detection through the corresponding probe structure 502. After the probe structure 502 completes the detection, the clutch telescopic rod 801 is retracted, and the synchronous belt 203 moves the subsequent probe structures 502 into place one by one, thereby performing various functional detections on the wafer.

[0033] The clamping structure 7 includes a clamping seat 701 fixed on the side plate body 402, a polygonal block 504 is fixed on the outer wall of the detection rod 501, and the clamping seat 701 is provided with a docking notch corresponding to the polygonal block 504 and the appearance of the detection column, and the clamping seat 701 is provided with a docking cover 702, the bottom of the docking cover 702 extends to one side of the docking notch, and the docking cover 702 is provided with an upper notch allowing the detection rod 501 to pass through, so that the position of the detection rod 501 can be better limited, and an ear plate 703 is fixed on the side wall of the docking cover 702, and a fastening hole is provided on the ear plate 703, and a fastening bolt is installed on the ear plate 703, one end of the fastening bolt passes through the fastening hole and is installed on the side plate body 402 by threading, so that the position of the docking cover 702 can be fixed conveniently, and an annular groove 4 is provided on the outer wall of the plug-in column 403 07, the annular groove 407 is located below the bottom of the side plate body 402, an anti-slip plate 9 is provided on the plug-in column 403, and a pressing notch is opened on the side of the ear plate 703 close to the side plate body 402, and a circular hole is provided on the top of the anti-slip plate 9, and the top of the anti-slip plate 9 is sleeved on the fastening bolt through the circular hole, and the other end of the anti-slip plate 9 is provided with a clamping portion and extends into the annular groove 407, so that the position of the plug-in column 403 can be limited. When it is necessary to remove the detection component 5 or the assembly structure 4, the detection component 5 or the assembly structure 4 to be removed is moved to the bottom of the operation notch, and then the connecting bolts are removed, and then the filling plate 6 is removed. At this time, the fastening bolts are removed to remove the docking cover 702, and then the detection component 5 can be removed, and then the anti-slip plate 9 is removed, and the plug-in column 403 can be pulled out upwards, and then the assembly structure 4 is taken out.

[0034] The detection head can be set above the wafer to be detected. When detection is needed, the upper plate 1 is controlled to descend by the lifting rod, and then the detection component 5 is moved to above the wafer through the synchronous belt 203. During the movement, the position detector 206 can detect the position of the synchronous belt 203 to avoid misalignment, and multiple probe structures 502 can be installed on the synchronous belt 203. By reducing the functions realized by a single probe structure 502, the cost of the probe structure 502 is reduced, and subsequent replacement and maintenance are facilitated.

[0035] The synchronous belt 203 is limited in its running track by the synchronous wheel 202, so that the length direction of the synchronous belt 203 can be perpendicular to the running direction of the wafer, and multiple rows of wafers are set. The synchronous belt 203 can drive the detection component 5 to detect the wafers one by one, and in order to increase the number of detection functions, the two detection heads can be set in a mirror image so that the detection components 5 overlap and jointly detect a row of wafers. During normal use, the assembly plate 401 is neatly restricted between the upper plate body 1 and the lower plate body 102. After the filling plate 6 is removed, the assembly structure 4 can be further removed conveniently, which can facilitate the stable restriction of the position of the installed detection component 5 and the convenient disassembly of the detection component 5 when needed. When in use, a single fixing mechanism 3 or a pair of fixing mechanisms 3 can be set to limit the position of the assembly structure 4. When two fixing mechanisms 3 are set, the positioning column 404 is preferably rotatably connected to the assembly plate 401, and when the assembly plate 401 is driven by the fixing mechanism 3, its own position can be limited by the positioning column 404 and the plug-in column 403.

[0036] When the wafer reaches below the probe structure 502, the lifting rod can control the upper plate 1 to descend, so that the probe structure 502 is pressed on the wafer, the clutch telescopic rod 801 extends and drives the transmission mother block 803 to fit on the contact panel 406, and then electrically connects with the probe structure 502, and then the external detection system can perform functional detection through the corresponding probe structure 502. After the probe structure 502 completes the detection, the clutch telescopic rod 801 is retracted, and the synchronous belt 203 moves the subsequent probe structures 502 into place in sequence, thereby performing various functional detections on the wafer. When it is necessary to remove the detection component 5 or the assembly structure 4, move the detection component 5 or the assembly structure 4 to be removed to the bottom of the operation gap, then remove the connecting bolts, and then remove the filling plate 6. At this time, remove the docking cover 702 by removing the fastening bolts, and then remove the detection component 5, and then remove the anti-drop plate 9, and then pull out the plug-in column 403 upwards, and then take out the assembly structure 4.

[0037] The above shows and describes the basic principles, main features and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The above embodiments and descriptions are only for illustrating the principles of the present invention. Without departing from the spirit and scope of the present invention, the present invention may have various changes and improvements, which shall fall within the scope of the present invention to be protected. The scope of protection of the present invention shall be defined by the attached claims and their equivalents.

Claims

1. A rotatable wafer inspection head, comprising an upper plate body (1), a lifting rod being fixed to the upper surface of the upper plate body (1), characterized in that: A driving assembly (2) is fixed on the top of the upper plate body (1), the driving assembly (2) comprising a driving motor (201) fixed on the upper surface of the upper plate body (1), a synchronous wheel (202) is rotatably mounted on the bottom of the upper plate body (1), a synchronous belt (203) is provided on the outer sleeve of the synchronous wheel (202), an output shaft of the driving motor (201) passes through the upper plate body (1) and is dynamically connected to the synchronous wheel (202), fixing mechanisms (3) are evenly distributed on the outer wall of the synchronous belt (203), an assembly structure (4) is provided on the fixing mechanism (3), a detection assembly (5) is installed on the assembly structure (4), and a power connector is provided on one side of the upper plate body (1) via a power cord.

2. The rotatable wafer inspection head according to claim 1, characterized in that: A connecting frame (101) is fixed to the bottom of the upper plate body (1), and a lower plate body (102) is fixed to the bottom of the connecting frame (101), wherein the lower plate body (102) is located below the synchronous belt (203).

3. The rotatable wafer inspection head according to claim 2, characterized in that: A limit strip (204) is fixed on the inner wall of the synchronous belt (203), a receiving groove (205) is provided on the limit strip (204), a detection sheet is provided in the receiving groove (205), a position detector (206) is fixed on the connecting frame (101), and a clamping groove is provided on the outer wall of the synchronous wheel (202) at a position corresponding to the limit strip (204).

4. The rotatable wafer inspection head according to claim 3, characterized in that: The fixing mechanism (3) comprises a bottom block (301) fixed to the outer wall of the synchronous belt (203); the outer wall of the bottom block (301) is provided with a support platform (302) extending to both sides; a vertical arc groove (303) is provided at the center of the side wall of the bottom block (301); a vertical cutting seam is provided at the center of the side wall of the bottom block (301); a connecting nail (304) is fixed on the side wall of the support platform (302); a cover plate (305) is fixed on the side wall of the support platform (302) through the connecting nail (304); and a vertical arc groove (303) is also provided on a side of the cover plate (305) close to the bottom block (301).

5. The rotatable wafer inspection head according to claim 4, characterized in that: The assembly structure (4) comprises an assembly plate (401), a side plate (402) extending to one side of the fixing mechanism (3) is fixed at the bottom of the assembly plate (401), a plug-in column (403) is installed at the bottom of the assembly plate (401), a lower track groove (103) is provided at the bottom of the lower plate (102), the bottom end of the plug-in column (403) passes through the vertical arc groove (303) and extends into the lower track groove (103), a positioning column (404) is fixed at the top of the assembly plate (401), and an upper track groove (103) is provided at the bottom of the upper plate (1). 04), the top end of the positioning column (404) extends into the upper track groove (104), an operating notch is provided on one side of the upper plate body (1), the size of the operating notch allows the assembly structure (4) to pass through, a filling plate (6) is provided in the operating notch, the filling plate (6) is provided with a filling track groove (601) corresponding to the upper track groove (104), a connecting plate (602) is fixed on the upper surface of the filling plate (6), the connecting plate (602) is fixed to the upper plate body (1) by connecting bolts, and a hand-held plate (603) is provided on the filling plate (6).

6. The rotatable wafer inspection head according to claim 5, characterized in that: The detection assembly (5) comprises a detection rod (501), the bottom end of the detection rod (501) is provided with a probe structure (502), the top end of the detection rod (501) is provided with a connection harness (503), a plug interface (405) is fixed on the top of the assembly plate (401), one end of the connection harness (503) is provided with a plug connector, and the plug connector is plugged into the plug interface (405), a contact panel (406) is fixed on the upper surface of the assembly plate (401), and a contact panel (406) is fixed on the side plate (402) for fixing the detection rod (501). 1), a transmission structure (8) is installed on the upper plate body (1), the transmission structure (8) comprises a clutch telescopic rod (801) fixed on the upper plate body (1), the bottom end of the clutch telescopic rod (801) extends below the bottom of the upper plate body (1), a bottom plate (802) is fixed to the bottom end of the clutch telescopic rod (801), a transmission mother block (803) is fixed to the bottom of the bottom plate (802), a transmission contact is provided at the bottom of the transmission mother block (803), and a receiving contact is provided on the contact panel (406).

7. The rotatable wafer inspection head according to claim 6, characterized in that: The clamping structure (7) comprises a clamping seat (701) fixed on the side plate body (402); a polygonal block (504) is fixed on the outer wall of the detection rod (501); a docking notch corresponding to the outer shape of the polygonal block (504) and the detection column is provided on the clamping seat (701); a docking cover (702) is provided on the clamping seat (701); the bottom of the docking cover (702) extends to one side of the docking notch; and an upper notch is provided on the docking cover (702) for allowing the detection rod (501) to pass through.

8. The rotatable wafer inspection head according to claim 7, characterized in that: An ear plate (703) is fixed to the side wall of the docking cover (702), a fastening hole is provided on the ear plate (703), a fastening bolt is installed on the ear plate (703), and one end of the fastening bolt passes through the fastening hole and is installed on the side plate body (402) by threading.

9. The rotatable wafer inspection head according to claim 8, characterized in that: An annular groove (407) is provided on the outer wall of the plug-in column (403), and the annular groove (407) is located below the bottom of the side plate body (402). An anti-slip plate (9) is provided on the plug-in column (403), and a pressing notch is provided on the side of the ear plate (703) close to the side plate body (402). A circular hole is provided at the top end of the anti-slip plate (9), and the top of the anti-slip plate (9) is sleeved on the fastening bolt through the circular hole. A clamping portion is provided at the other end of the anti-slip plate (9) and extends into the annular groove (407).

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