Residue scraping machine for multi-specification single crystal material seats

Abstract

The invention discloses a multi-specification single crystal material base residue scraper which comprises a frame assembly, a driving assembly and a driven assembly, the driving assembly and the driven assembly are arranged on the frame assembly, the driving assembly and the driven assembly are connected through a chain, a scraper assembly is connected to the chain, a scraper top plate assembly is connected to the position, close to one end, of the frame assembly, and a scraper top plate assembly is connected to the position, close to the other end, of the frame assembly. The frame assembly is provided with an air cylinder clamping assembly for clamping a single crystal material seat, the air cylinder clamping assembly comprises a plurality of groups of air cylinders, and the positions of the plurality of groups of air cylinders are different, so that single crystals of material seats with different specifications can be clamped. The single crystal residue scraping device can adapt to automatic scraping of single crystal residues of multi-specification material seats, and high-precision stable operation of the single crystal residue scraping device in the operation process can be ensured by adopting a motor driving and linear guide rail mechanism.

Description

Technical Field

[0001] The invention relates to the technical field of material holder residue scraping, in particular to a multi-specification single crystal material holder residue scraping machine. Background Art

[0002] In the single crystal production process, the single crystal holders used are not uniform in form, and the thickness of the single crystals remaining on the single crystal holders varies. Since the residual single crystals need to be recycled repeatedly, and there is no uniform holder residue scraping equipment available, the residual single crystals are usually removed manually, which greatly increases the number of workers and labor intensity. This production model of residual single crystals not only has poor implementation effects, but also greatly increases labor costs and the risk of human injury. Summary of the invention

[0003] The purpose of the present invention is to overcome the deficiencies and defects of the prior art and to provide a residue scraper for single crystal material holders of multiple specifications.

[0004] A residue scraper for multi-specification single crystal material holders, comprising a frame assembly, and a driving assembly and a driven assembly arranged on the frame assembly, wherein the driving assembly and the driven assembly are connected by a chain, a scraper assembly is connected to the chain, a scraper top plate assembly is connected to a position near one end of the frame assembly, a cylinder clamping assembly for clamping a single crystal material holder is arranged on the frame assembly, and the cylinder clamping assembly comprises a plurality of groups of cylinders, and the positions of the plurality of groups of cylinders are different, so as to achieve the clamping of single crystals of material holders of different specifications.

[0005] Wherein, the scraper assembly includes a scraper mounting seat, and the scraper mounting seat is mounted on the slider of the linear guide rail on the frame assembly. A group of scrapers are installed on each side of the scraper mounting seat for repeatedly scraping off the single crystal material seat fragments twice.

[0006] Wherein, both ends of the scraper mounting seat are connected to the chain joints for connecting the chain through the chain connecting shaft and fastened with nuts; and slider blocks are arranged at both ends of the scraper mounting seat.

[0007] Among them, the scraper top plate assembly includes a buffer plate, a spring, and a spring fixing seat. One end of the spring installed in the sleeve seat is connected to the buffer plate and the other end is connected to the upper surface of the buffer plate. Both sides of the upper surface of the buffer plate are connected to the guide rod fixing plate of the guide rod. The guide rod passes through the linear bearings in the holes on both sides of the sleeve seat and is connected to the guide rod limit block. Linear bearings are installed in the bearing mounting holes on both sides of the sleeve seat in a centrally positioned manner.

[0008] Wherein, the spring fixing seat and the sleeve seat are installed on the buffer mounting plate; sleeve baffles are installed on both sides of the sleeve seat, and the buffer mounting plate is installed on the linear guide rail.

[0009] Among them, the driving assembly includes a main driving shaft and a motor, and a driving sprocket located on the left end side of the frame assembly, the motor is connected to the main driving shaft, the main driving shaft is connected to the driving sprocket, and the driving sprocket is connected to the chain; the driving assembly includes a motor overload protection device and a micro switch.

[0010] Wherein, the driven assembly includes a driven shaft on the right end side of the frame assembly, the driven shaft is arranged radially apart from the main drive shaft, a driven sprocket is arranged on the driven support shaft, and the driven sprocket is connected to the chain.

[0011] Wherein, the framework components include:

[0012] A dead stopper, connected to the upper surface of the base frame, is used to limit the position of the single crystal holder following the movement of the scraper during scraping;

[0013] Limit block A, installed on both sides of the linear guide rail on the base frame, is used to limit the left side of the slider of the linear guide rail;

[0014] The limit block B is installed on both sides of the linear guide rail on the base frame and is used to limit the right side of the slider of the linear guide rail.

[0015] Wherein, the frame assembly includes a centering block, which is used for the robot to center the material seat and is installed on a block connecting piece, and the block connecting piece is installed on both sides of the base frame.

[0016] Wherein, the framework components include:

[0017] A residue box, installed in the middle of the stopper connector, for collecting water stains and residues dripping from the material seat;

[0018] The material collecting box is connected to the middle position of the base frame through a material box connecting piece and is used for collecting the residue of the material seat.

[0019] The invention can be adapted to the automatic scraping of single crystal residues from material holders of various specifications, and the motor drive and linear guide rail mechanism adopted by the invention can ensure high-precision and stable operation during the operation process.

[0020] The present invention is arranged with a material seat centering mechanism, which can ensure the secondary precision positioning of the robot during the transportation process. The equipment is also designed with a scraper top plate assembly, which adds the function of removing single crystal auxiliary stickers. The scraper assembly of the equipment is a double-sided scraper, which can effectively improve the scraping effect of the residue. The equipment occupies a small space and can also be connected to the AGV trolley function, saving a lot of labor costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 It is an overall axonometric schematic diagram of the present invention.

[0022] Figure 2 It is a front view schematic diagram of the frame assembly of the present invention.

[0023] Figure 3 It is a front view schematic diagram of the drive assembly of the present invention.

[0024] Figure 4 It is a side view schematic diagram of the driven component of the present invention.

[0025] Figure 5 It is a bottom view schematic diagram of the scraper top plate assembly of the present invention.

[0026] Figure 6 It is a top view schematic diagram of the scraper assembly of the present invention.

[0027] Figure 7 It is a top view schematic diagram of the cylinder clamping assembly of the present invention.

[0028] Figure 8 It is an axonometric perspective schematic diagram of the shield assembly of the present invention.

[0029] Fig. 9 It is an axonometric schematic diagram of the shield assembly of the present invention.

[0030] In the figure:

[0031] 1. Frame components:

[0032] 1-1 residue box, 1-2 base frame, 1-3 centering block, 1-4 block connector, 1-5 aggregate box, 1-6 aggregate box connector, 1-7 dead block, 1-8 limit block A, 1-9 limit block B, 1-10 linear guide, 1-11 switch bracket, 1-12 proximity switch;

[0033] 2. Drive components:

[0034] 2-1 motor swing limit block, 2-2 motor connecting shaft, 2-3 gasket, 2-4 spacer A, 2-5 spacer B, 2-6 driving sprocket, 2-7 shaft end baffle, 2-8 shaft limiter, 2-9 main motor mounting seat, 2-10 main driving shaft, 2-11 overload protection switch bracket, 2-12 micro switch, 2-13 flat key A, 2-14 flat key B, 2-15 motor, 2-16 spring, 2-17 bearing with seat;

[0035] 3 driven components:

[0036] 3-1 driven wheel support, 3-2 driven shaft, 3-3 spacer, 3-4 driven sprocket, 3-5 shaft end baffle, 3-6 elastic retaining ring for hole, 3-7 bearing;

[0037] 4 Scraper top plate assembly:

[0038] 4-1 spring fixing seat, 4-2 guide rod fixing plate, 4-3 guide rod limit block, 4-4 guide rod, 4-5 adjusting gasket, 4-6 buffer plate, 4-7 buffer mounting plate, 4-8 material seat limit block, 4-9 sleeve baffle, 4-10 sleeve seat, 4-11 spring, 4-12 linear bearing.

[0039] 5 scraper assembly: 5-1 scraper, 5-2 scraper mounting seat, 5-3 slider block, 5-4 chain joint, 5-5 chain connecting shaft;

[0040] 6-cylinder clamping assembly: 6-1 clamping jaw transition plate, 6-2 gasket A, 6-3 gasket B, 6-4 clamping jaw A, 6-5 clamping jaw B, 6-6 cylinder mounting seat, 6-7 cylinder;

[0041] 7 shield assembly: 7-1 shield A, 7-2 shield B, 7-3 shield C, 7-4 shield bracket A, 7-5 shield bracket B, 7-6 shield bracket C, 7-7 cylinder shield. DETAILED DESCRIPTION

[0042] The present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention.

[0043] Please refer to the attached drawings, which show an automatic scraper for single crystal residues of material holders of various specifications, comprising a frame assembly 1, a driving assembly 2, a driven assembly 3, a scraper top plate assembly 4, a scraper assembly 5, a cylinder clamping assembly 6 and a chain 8; the driving assembly and the driven assembly are connected by a chain 8, to which a scraper assembly 5 is connected, four scraper top plate assemblies are connected near one end of the frame assembly, six cylinder clamping assemblies for clamping single crystal material holders are arranged on the frame assembly, and the cylinder clamping assemblies include a plurality of cylinder groups, which are at different positions to achieve clamping of single crystals of material holders of different specifications.

[0044] In some embodiments, the scraper top plate assembly 4 includes a buffer plate 4-6, a spring 4-11, and a spring fixing seat 4-1, one end of the spring is connected to the buffer plate and the other end is connected to the upper surface of the buffer plate, both sides of the upper surface of the buffer plate are connected to the guide rod fixing plate 4-2 of the guide rod 4-4, the guide rod passes through the linear bearings 4-12 in the holes on both sides of the sleeve seat 4-10 and is connected to the guide rod limit block 4-3, and the linear bearings 4-12 are installed in the bearing mounting holes on both sides of the sleeve seat in a centrally positioned manner.

[0045] In some embodiments, the spring fixing seat 4-1 and the sleeve seat 4-10 are installed on the buffer mounting plate 4-7; sleeve baffles 4-9 are installed on both sides of the sleeve seat 4-10, and the buffer mounting plate 4-7 is installed on the linear guide rail 1-10. In addition, the scraper top plate assembly 4 also includes an adjusting gasket 4-5, which is placed between the buffer mounting plate 4-7 and the material seat limit block 4-8, and is used to adjust the position of the material seat limit block 4-8.

[0046] Furthermore, the scraper top plate assembly 4 also includes a material seat limit stop block 4-8, which is located on the side of the buffer mounting plate 4-7.

[0047] In the embodiment of the present application, the scraper top plate assembly 4 is used to push the fragments to the buffer plate 4-6 when the scraper scrapes off the material seat fragments, and use the pressing force of the spring 4-11 to clamp the material seat fragments and tape scraped up by the scraper, so as to pull the tape between the fragments and the material seat to prevent the tape from sticking to the material seat with the residue, thereby achieving the function of removing the residue and tape.

[0048] Specifically, in the scraper top plate assembly 4, the spring fixing seat 4-1 and the sleeve seat 4-10 are installed under the buffer mounting plate 4-7 by bolts, and the sleeve baffle 4-9 is installed on both sides of the sleeve seat 4-10 by bolts; the guide rod 4-4 is fixed to the buffer plate 4-6 by the guide rod fixing plate 4-2 and bolts; the guide rod 4-4 passes through the linear bearing 4-12 by center positioning and is installed in the linear bearing 4-12; the end of the guide rod 4-4 is limited in position by the guide rod limit block 4-3 and the guide rod limit block 4-3 is fastened with bolts; the material seat limit block 4-8 ​​is installed to the side of the buffer mounting plate 4-7 by bolts; the spring fixing seat 4-1 is installed to the buffer mounting plate 4-7 by bolts Below; the guide rod fixing plate 4-2 is fixed to the buffer plate 4-6 by bolts; the guide rod limit block 4-3 is fixed to the end of the guide rod 4-4 by bolts; the buffer plate 4-6 is connected to the guide rod fixing plate 4-2 by bolt fixing, and is installed to the end of the guide rod 4-4; the buffer mounting plate 4-7 is installed on the slider of the linear guide 1-10 by bolt fixing; the material seat limit block 4-8 ​​is installed to the side of the buffer mounting plate 4-7 by bolt fixing; the sleeve baffle 4-9 is installed to both sides of the sleeve seat by bolt fixing; the sleeve seat 4-10 is installed to the bottom of the buffer mounting plate 4-7 by bolts; the spring 4-11 is placed in the center hole of the sleeve seat 4-10 by center hole positioning.

[0049] In some embodiments, the scraper assembly includes a scraper mounting seat 5-2, and the scraper mounting seat 5-2 is installed on the slider of the linear guide rail 1-10 on the frame assembly 1, and a group of scrapers 5-1 are installed on each side of the scraper mounting seat for repeatedly scraping the single crystal material base fragments twice.

[0050] Wherein, both ends of the scraper mounting seat 5-2 are connected to the chain joint 5-4 for connecting the chain through the chain connecting shaft 5-5 and fastened with nuts; slider blocks 5-3 are arranged at both ends of the scraper mounting seat 5-2.

[0051] Specifically, in the present application, the scraper 5-1 and the slider block 5-3 are installed on both sides of the scraper mounting seat 5-2 by bolt fastening, and the chain joint 5-4 is threadedly connected to both sides of the scraper mounting seat 5-2 through the chain connecting shaft 5-5, and fastened with nuts; the scraper mounting seat 5-2 is installed on the slider of the linear guide 1-10 by bolt fastening; the chain connecting shaft 5-5 is threadedly connected to both sides of the scraper mounting seat 5-2, and fastened with nuts, connecting the chain joint 5-4.

[0052] In the embodiment of the present application, the scraper assembly 5, wherein the scraper mounting seat 5-2 is mounted on the slider of the linear guide rail 1-10, has high scraper position accuracy and smooth sliding, and a group of scrapers 5-1 are installed on each side of the scraper mounting seat 5-2, which can repeatedly scrape the material seat fragments twice to improve the scraping effect.

[0053] In the embodiment of the present application, the cylinder clamping assembly 6 is provided with multiple groups of cylinders 6-7, and the clamping of material holders of various specifications can be realized through the different arrangements of the groups of cylinders 6-7, thereby realizing the function of automatic scraping of single crystal residues of material holders of various specifications.

[0054] In some embodiments, the cylinder clamping assembly 6 includes a clamp transition plate 6-1, a gasket A6-2, a gasket B6-3, a clamp A6-4, a clamp B6-5, a cylinder mounting seat 6-6 and a cylinder 6-7; the cylinder 6-7 is installed on both sides of the cylinder mounting seat 6-6 by bolt fastening, and is used to clamp the material seat, and the clamp A 6-4, the clamp B 6-5 and the clamp transition plate 6-1 are installed on the cylinder flange plate by bolt fastening; the gasket A6-2 is placed on the mounting surface of the clamp A6-4 for adjusting the position, and the gasket B6-3 is placed on the mounting surface of the clamp B6-5 for adjusting the position; the cylinder mounting seat 6-6 is installed on the base frame 1-2 by bolts.

[0055] In some embodiments, the frame assembly 1 includes a residue box 1-1, a base frame 1-2, a centering block 1-3, a block connector 1-4, a collection box 1-5, a collection box connector 1-6, a dead block 1-7, a limit block A1-8, a limit block B1-9, a linear guide 1-10, a switch bracket 1-11 and a proximity switch 1-12.

[0056] Among them, the linear guide 1-10 is installed to the upper part of the base frame 1-2 by bolts; the limit block A1-8 and the limit block B1-9 are installed to the two sides of the linear guide 1-10 on the base frame 1-2 by bolts, and are used to limit the slider of the linear guide 1-10; the dead block 1-7 and the switch bracket 1-11 are installed to the upper part of the base frame 1-2 by bolts, and the proximity switch 1-12 is fastened to the switch bracket 1-11 by nuts, the centering connector 1-4 is installed to the two sides of the base frame 1-2 by bolts, and the centering block 1-3 and the collection box 1-5 are respectively installed to the top and the middle of the block connector 1-4 by bolts; the dead block 1-7 is used to limit the position of the material seat to follow the movement of the scraper when scraping; the centering block 1-3 is used for the robot to center the material seat, and is installed on the upper part of the block connector 1-4 by bolt fastening.

[0057] In an embodiment of the present application, the residue box 1-1 is installed in the middle of the block connector 1-4 by bolt fastening, and is used to collect water stains and residues dripping from the material seat; the block connector 1-4 is installed on both sides of the base frame 1-2 by bolt fastening, and the base frame 1-2 serves to support this equipment.

[0058] In the embodiment of the present application, the material collection box 1-5 is connected to the middle position of the base frame 1-2 by bolt fastening with the material collection box connection 1-6, and is used to collect the residue of the material seat;

[0059] In the embodiment of the present application, the material collection box connection 1-6 is connected to the middle position of the base frame 1-2 together with the material collection box 1-5 by bolt fastening.

[0060] In the embodiment of the present application, in the frame assembly 1, the base frame 1-2 is a high-strength square tube welded part, which reinforces the rigidity and strength of the overall equipment, and the running track is a linear guide rail 1-10, which ensures the stability of the equipment during operation; the equipment is provided with a material seat centering block 1-3, and the robot uses the centering block 1-3 for secondary positioning after grabbing the material seat, which greatly reduces the occurrence of accidents where the material seat hits the equipment.

[0061] In some embodiments, the drive assembly 2 includes a motor swing limit block 2-1, a motor connecting shaft 2-2, a gasket 2-3, a spacer A2-4, a spacer B2-5, a driving sprocket 2-6, a shaft end baffle 2-7, a shaft limiter 2-8, a main motor mounting seat 2-9, a main drive shaft 2-10, an overload protection switch bracket 2-11, a micro switch 2-12, a flat key A2-13, a flat key B2-14, a motor 2-15, a spring 2-16 and a seat bearing 2-17; the The motor 2-15 and the main drive shaft 2-10 are installed in an axial center positioning manner, the main motor mounting seat 2-9 is connected to the motor 2-15 by bolt fastening, the spacer A2-4 is installed on one side of the main motor mounting seat 2-9 in a center positioning manner, the seat bearing 2-17, the spacer B2-5 and the driving sprocket 2-6 are installed on one end of the main drive shaft in a center positioning manner, and the other end is the same, and the two ends of the main drive shaft 2-10 are fastened by the shaft end baffle 2-7 by bolt fastening. The shaft limiter 2-8 is fastened to the main motor mounting seat 2-9 by bolt fastening; a set of springs 2-16 and gaskets 2-3 are installed on the upper and lower surfaces of the waist-shaped hole of the main motor mounting seat 2-9, and the springs 2-16 are compressed by nuts; the motor connecting shaft 2-2 is connected in series in a center positioning manner of the mounting hole, and is fixed to the opening position of the motor swing limit block 2-1 by nuts.

[0062] In the driving assembly 2, the motor swing limit block 2-1 is installed on the side of the base frame 1-2 by bolt fastening; the motor connecting shaft 2-2 is connected in series by center positioning of the mounting hole, and is fixed to the opening position of the motor swing limit block 2-1 by a nut; the gasket 2-3 is connected in series with the spring through the motor connecting shaft 2-2 to adjust the spring height; the spacer A2-4 is installed on the main drive shaft 2-10 between the motor 2-15 and the seat bearing 2-17, and is used to limit the motor 2-15; the spacer B 2-5 is installed in sequence on the outer end of the seat bearing 2-17 in a manner of center positioning of the main drive shaft 2-10; the driving sprocket 2-6 is installed in the middle position of the main drive shaft 2-10 in a manner of axis center positioning; the shaft end baffles 2-7 are installed on both ends of the main drive shaft 2-10 by bolt fastening; the shaft limiter 2-8 is used for collision micro switch to protect the motor 2-15 from overload; the main motor mounting seat 2-9 is connected to the motor 2-15 by bolt fastening; the main drive shaft 2-10 installs the motor 2-15, the spacer A2-4, the seat bearing 2-17, the spacer B2-5 and the driving sprocket 2-6 in series by axial center positioning.

[0063] In the driving assembly 2, the overload protection switch bracket 2-11 is connected to the motor swing limit block 2-1 by bolt fastening; the micro switch 2-12 is connected to the overload protection switch bracket 2-11 by bolt fastening; the flat key A 2-13 is placed between the motor 2-15 and the main drive shaft 2-10; the flat key B 2-14 is placed between the driving sprocket 2-6 and the main drive shaft 2-10; the spring 2-16 is respectively placed on both sides of the waist-shaped hole of the main motor mounting seat 2-9, and is connected to the motor swing limit block 2-1 through the motor connecting shaft 2-2; the seat bearing 2-17 is installed on the end face of the base frame 1-2 by bolt fastening.

[0064] In the embodiment of the present application, the driving component 2: uses the motor 2-15 and the main driving shaft 2-10 to drive the active sprocket 2-6, which can stably provide power for the equipment and has a long service life. At the same time, it is equipped with a motor overload protection device and a micro switch 2-12, which can effectively reduce the possibility of the motor 2-15 burning out due to current overload, thereby improving the safety and stability of the equipment.

[0065] In some embodiments, the driven component 3 includes a driven wheel support 3-1, a driven shaft 3-2, a spacer 3-3, a driven sprocket 3-4, a shaft end baffle 3-5, an elastic retaining ring for a hole 3-6 and a bearing 3-7; the bearing 3-7 and the elastic retaining ring for a hole 3-6 are sequentially installed in the driven sprocket 3-4 in a center-positioned manner, wherein a spacer 3-3 is placed on each side of the driven sprocket 3-4, and is fixed to the center position of the driven wheel support 3-1 in a center-positioned manner through the driven shaft 3-2, and one end of the driven shaft 3-2 is fastened to the driven wheel support 3-1 with screws using a shaft end baffle 3-5.

[0066] In the above-mentioned driven assembly 3, the driven wheel support 3-1 is installed on the side of the base frame 1-2 by bolt fastening; the driven shaft 3-2 is placed on the driven wheel support 3-1 by means of shaft hole center positioning, and is fixed by bolt fastening through the shaft end baffle 3-5; the spacer 3-3 is placed on the outside of the driven sprocket 3-4 by means of center hole positioning; the driven sprocket 3-4 is installed in the middle position of the driven wheel support 3-1 by means of shaft center positioning; the shaft end baffle 3-5 is used to fix the driven shaft 3-2; the hole elastic retaining ring 3-6 is placed in the inner groove of the driven sprocket 3-4, and is used to limit and fix the bearing 3-7; the bearing 3-7 is placed in the groove of the driven sprocket 3-4 by means of center positioning.

[0067] In the embodiment of the present application, the driven component 3 adopts a structure in which a driven sprocket 3-4 is installed on each shaft, which can eliminate the error caused by the tooth shape when matching with the driving sprocket 2-6 and keep the chain forces on both sides of the equipment consistent.

[0068] In some embodiments, see Figure 8-9As shown, it also includes a shield assembly 7, which is arranged at the upper end of the equipment to cover the upper working area to play a protective and dust-proof function. It is formed by connecting a plurality of shields, each of which corresponds to a corresponding mechanism to form a whole and is installed on the upper end of the frame assembly through a shield bracket arranged at a corresponding position, such as shield A 7-1, shield B7-2, shield C7-3, shield bracket A7-4, shield bracket B7-5, shield bracket C7-6, and cylinder shield 7-7, to protect the cylinder clamping assembly, the driving assembly, the driven assembly, the scraper assembly and the scraper top plate assembly. The shape of the shield is arranged according to the shape of the protected assembly, and the principle is to cover the protected assembly. For example, the position corresponding to the cylinder clamping assembly is four raised rectangular shields (cylinder shields 7-7), and the lower shields B7-2 are between and on the outside of the raised rectangular shields, and the outer side of the shield B7-2 on one side is the shield A. 7-1, and the other side opposite is the shield C7-3. Except for the cylinder shield 7-7, the upper ends of the other shields are the same, and a space for a discharge seat is reserved in the middle, which can be installed by bolting through the bracket and the frame assembly. Of course, the shield can also be not set.

[0069] The basic principles and main features of the present invention and the advantages of the present invention are shown and described above. It is obvious to those skilled in the art that the present invention is not limited to the details of the above exemplary embodiments, and the present invention can be implemented in other specific forms without departing from the spirit or basic features of the present invention.

[0070] Therefore, the embodiments should be considered in all respects as illustrative and non-restrictive, and the scope of the invention is defined by the appended claims rather than the foregoing description, and it is therefore intended that all changes falling within the meaning and range of equivalent elements of the claims are included in the present invention.

[0071] In addition, it should be understood that although the present specification is described according to implementation modes, not every implementation mode contains only one independent technical solution. This description of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment may also be appropriately combined to form other implementation modes that can be understood by those skilled in the art.

Claims

1. Multi-specification single crystal material holder residue scraper, characterized in that: It includes a frame assembly and a driving assembly and a driven assembly arranged on the frame assembly, the driving assembly and the driven assembly are connected by a chain, the chain is connected to a scraper assembly, a scraper top plate assembly is connected to a position near one end of the frame assembly, and a cylinder clamping assembly for clamping a single crystal material holder is arranged on the frame assembly, the cylinder clamping assembly includes multiple groups of cylinders, and the multiple groups of cylinders are in different positions to achieve clamping of single crystals with material holders of different specifications.

2. The multi-specification single crystal material holder residue scraper according to claim 1, characterized in that: The scraper assembly includes a scraper mounting seat, which is mounted on a slider of a linear guide rail on the frame assembly. A group of scrapers are mounted on each side of the scraper mounting seat for repeatedly scraping off the single crystal material seat fragments twice.

3. The multi-specification single crystal material holder residue scraper according to claim 2, characterized in that: Both ends of the scraper mounting seat are connected to chain joints for connecting the chain through a chain connecting shaft and fastened with nuts; and slider blocks are arranged at both ends of the scraper mounting seat.

4. The multi-specification single crystal material holder residue scraper according to claim 1, characterized in that: The scraper top plate assembly includes a buffer plate, a spring, and a spring fixing seat. One end of the spring installed in the sleeve seat is connected to the buffer plate and the other end is connected to the upper surface of the buffer plate. Both sides of the upper surface of the buffer plate are connected to the guide rod fixing plate of the guide rod. The guide rod passes through the linear bearings in the holes on both sides of the sleeve seat and is connected to the guide rod limit block. Linear bearings are installed in the bearing mounting holes on both sides of the sleeve seat in a centrally positioned manner.

5. The multi-specification single crystal material holder residue scraper according to claim 4, characterized in that: The spring fixing seat and the shaft sleeve seat are installed on the buffer installation plate; shaft sleeve baffles are installed on both sides of the shaft sleeve seat, and the buffer installation plate is installed on the linear guide rail.

6. The multi-specification single crystal material holder residue scraper according to claim 1, characterized in that: The driving assembly includes a main driving shaft and a motor, and a driving sprocket located on the left end side of the frame assembly. The motor is connected to the main driving shaft, the main driving shaft is connected to the driving sprocket, and the driving sprocket is connected to the chain; the driving assembly includes a motor overload protection device and a micro switch.

7. The multi-specification single crystal material holder residue scraper according to claim 1, characterized in that: The driven assembly comprises a driven shaft at the right end side of the frame assembly, the driven shaft is spaced apart from the main drive shaft in a radial direction, a driven sprocket is arranged on the driven support shaft, and the driven sprocket is connected to the chain.

8. The multi-specification single crystal material holder residue scraper according to claim 1, characterized in that: The frame assembly includes: A dead stopper, connected to the upper surface of the base frame, is used to limit the position of the single crystal holder following the movement of the scraper during scraping; Limit block A, installed on both sides of the linear guide rail on the base frame, is used to limit the left side of the slider of the linear guide rail; The limit block B is installed on both sides of the linear guide rail on the base frame and is used to limit the right side of the slider of the linear guide rail.

9. The multi-specification single crystal material holder residue scraper according to claim 8, characterized in that: The frame assembly includes a centering block, which is used for the robot to center the material seat and is installed on a block connector. The block connector is installed on both sides of the base frame.

10. The multi-specification single crystal material holder residue scraper according to claim 9, characterized in that: The frame assembly includes: A residue box, installed in the middle of the stopper connector, for collecting water stains and residues dripping from the material seat; The material collecting box is connected to the middle position of the base frame through a material box connecting piece and is used for collecting the residue of the material seat.

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