Recycling system device for sand blasting waste of sand blasting machine and working method and application of recycling system device

Abstract

The invention provides a recycling system device for sand blasting waste of a sand blasting machine and a working method and application of the recycling system device. The sand blasting waste comprises waste sand and waste water, and the recycling system device comprises a sand blasting machine, a waste collecting device and a multi-stage dust collecting, filtering and capturing device which are sequentially connected in the moving direction of the waste. A sand collecting opening in one side of the multi-stage dust collecting, filtering and capturing device is used for outputting waste sand liquid below 600 meshes and recycling the waste sand liquid into the sand blasting machine, and a waste opening in the other side of the multi-stage dust collecting, filtering and capturing device is used for outputting residual waste; the recycling system device further comprises a waste water treatment device, and the waste water treatment device is connected with a waste material opening of the multi-stage dust collecting, filtering and capturing device and used for recycling waste water into the sand blasting machine. Sand and water of the sand blasting machine can be recycled, stable operation of the recycling process can be ensured, resource consumption and waste generation are reduced, the working efficiency and economic benefits are improved, and safe treatment of waste and environmental protection are ensured.

Description

Technical Field

[0001] The invention belongs to the technical field of resource recovery and reuse, and in particular relates to a system device for recovering and utilizing sandblasting waste of a sandblasting machine, a working method and an application thereof. Background Art

[0002] Sandblasting is an important part of the semiconductor production process. During the sandblasting process, fine sand will be lost with the flow of water. According to statistics, a production line will lose about 5%-25% of the content, which seriously affects the stability of the sandblasting process. At the same time, during the sandblasting process, about 200L of wastewater is generated every hour. For conventional wet sandblasting machines, wastewater and waste sand are directly discharged, or simply filtered, and the recycled water is reused in the sandblasting machine. However, the recycled water is often blocked by the filter cloth of the filter press, resulting in insufficient water supply, causing low liquid level in the sandblasting tank. The water pump will stop working due to low liquid level protection, which is very unstable.

[0003] Therefore, it is urgent to design a new type of recycling system device to ensure the stable operation of the recycling process, while ensuring the safe treatment of waste and environmental protection, and improving work efficiency and economic benefits. Summary of the invention

[0004] In view of the deficiencies in the prior art, the purpose of the present invention is to provide a system device for recycling sandblasting waste from a sandblasting machine, as well as its working method and application. The present invention captures waste sand of different mesh sizes by designing a multi-stage dust collection and filtration capture device, and then reuses the waste sand of different mesh sizes in the corresponding sandblasting machine, and at the same time recycles the waste water into the sandblasting machine with the help of a wastewater treatment device. Through the above design, the sand and water of the sandblasting machine can be recycled, which can not only ensure the stable operation of the recycling process, reduce resource consumption and waste generation, and improve work efficiency and economic benefits, but also ensure the safe treatment of waste and environmental protection, and has a bright development prospect.

[0005] In order to achieve the purpose of the invention, the present invention adopts the following technical solutions:

[0006] In a first aspect, the present invention provides a system device for recycling sandblasting waste from a sandblasting machine, wherein the sandblasting waste includes waste sand and waste water, and the recycling system device includes a sandblasting machine, a waste collection device, and a multi-stage dust collection and filtering capture device connected in sequence along the direction of waste movement.

[0007] The sand collecting port on one side of the multi-stage dust collecting, filtering and capturing device is used to output waste sand liquid below 600 meshes for reuse in the sandblasting machine, and the waste material port on the other side is used to output the remaining waste material.

[0008] The recycling system device also includes a wastewater treatment device, which is connected to the waste material port of the multi-stage dust collection, filtering and capturing device and is used to recycle wastewater into the sandblasting machine.

[0009] The present invention captures waste sand of different mesh sizes by designing a multi-stage dust collection and filtering capture device, and then reuses the waste sand of different mesh sizes in the corresponding sandblasting machine, and at the same time recycles waste water into the sandblasting machine with the help of a wastewater treatment device. Through the above design, the sand and water of the sandblasting machine can be recycled, which can not only ensure the stable operation of the recycling process, reduce resource consumption and waste generation, improve work efficiency and economic benefits, but also ensure the safe treatment of waste and environmental protection, and has a bright development prospect.

[0010] In the present invention, the waste sand liquid with a mesh size of less than 600 can be, for example, a waste sand liquid with a mesh size of less than 580, a waste sand liquid with a mesh size of less than 560, a waste sand liquid with a mesh size of less than 540, a waste sand liquid with a mesh size of less than 520, or a waste sand liquid with a mesh size of less than 500.

[0011] Preferably, the multi-stage dust collecting, filtering and capturing device includes a primary dust collecting, filtering and capturing device, a secondary dust collecting, filtering and capturing device and a tertiary dust collecting, filtering and capturing device connected in sequence along the direction of waste movement. The sand collecting port of the primary dust collecting, filtering and capturing device is used to output waste sand liquid of 250-300 mesh, for example, it can be 250 mesh, 260 mesh, 270 mesh, 280 mesh, 290 mesh or 300 mesh, etc.; the sand collecting port of the secondary dust collecting, filtering and capturing device is used to output waste sand liquid of 350-450 mesh, for example, it can be 350 mesh, 370 mesh, 400 mesh, 420 mesh or 450 mesh, etc.; the sand collecting port of the tertiary dust collecting, filtering and capturing device is used to output waste sand liquid of 500-600 mesh, for example, it can be 500 mesh, 520 mesh, 540 mesh, 560 mesh, 580 mesh or 600 mesh, etc.

[0012] Preferably, the recycling system device also includes an automatic sand and water concentration monitoring system and a drying system.

[0013] Preferably, the automatic sand-water concentration monitoring system is used to detect and determine the concentration of sand in the waste sand liquid. If the target concentration requirement is met, the waste sand liquid is recycled into the sandblasting machine; if the target concentration requirement is not met, the waste sand liquid is input into the drying system for drying and storage.

[0014] Preferably, the waste collection device is an open flow trough.

[0015] Preferably, an aeration device is installed at the bottom of the open flow trough.

[0016] Preferably, an ejector is provided between the waste collection device and the multi-stage dust collection, filtering and capturing device, for ejecting waste in the waste collection device into the multi-stage dust collection, filtering and capturing device.

[0017] Preferably, the wastewater treatment device comprises a sedimentation device, a filter press device and a filtration device connected in sequence along the direction of movement of the waste.

[0018] Preferably, the sedimentation device is a sedimentation tank.

[0019] Preferably, there is a flocculant in the sedimentation tank.

[0020] Preferably, the filter press device is a plate and frame mud press having a waste sand outlet and a waste water outlet.

[0021] Preferably, a diaphragm pump is provided on the pipeline between the precipitation device and the filter press device.

[0022] Preferably, the filtering device comprises a supernatant tank, a sand filter tank and a filter which are connected in sequence, and the inlet of the supernatant tank is connected to the wastewater outlet of the plate and frame mud press.

[0023] Preferably, the outlet of the filter is connected to a recycling water pump for pumping the filtered water into the sandblasting machine.

[0024] In a second aspect, the present invention provides a working method of the sandblasting waste recycling system device of the sandblasting machine as described in the first aspect, and the working method comprises the following steps:

[0025] The sandblasting machine is started, and the waste generated by the sandblasting machine is collected by a waste collection device and transported to a multi-stage dust collection and filtering capture device, and waste sand liquid below 600 mesh is output from a sand collection port, and the waste sand liquid is recovered into the sandblasting machine for continued use.

[0026] The remaining waste output from the waste outlet of the multi-stage dust collecting, filtering and capturing device is transported to a wastewater treatment device for wastewater recovery treatment, and the obtained recycled water is returned to the sandblasting machine for continued use.

[0027] Preferably, the recycling system device also includes an automatic sand and water concentration monitoring system and a drying system.

[0028] Preferably, the judgment criteria of the automatic monitoring system for sand and water concentration are: the target concentration is within the range of 100-150g / L, for example, it can be 100g / L, 110g / L, 120g / L, 130g / L, 140g / L or 150g / L, etc.

[0029] In a third aspect, the present invention provides an application of the sandblasting waste recycling system device of the sandblasting machine as described in the first aspect in the semiconductor field.

[0030] The numerical range described in the present invention not only includes the point values ​​listed above, but also includes any point values ​​between the above numerical ranges that are not listed. Due to space limitations and for the sake of simplicity, the present invention no longer exhaustively lists the specific point values ​​included in the range.

[0031] Compared with the prior art, the present invention has the following beneficial effects:

[0032] The present invention captures waste sand of different mesh sizes by designing a multi-stage dust collection and filtering capture device, and then reuses the waste sand of different mesh sizes in the corresponding sandblasting machine, and at the same time recycles waste water into the sandblasting machine with the help of a wastewater treatment device. Through the above design, the sand and water of the sandblasting machine can be recycled, which can not only ensure the stable operation of the recycling process, reduce resource consumption and waste generation, improve work efficiency and economic benefits, but also ensure the safe treatment of waste and environmental protection, and has a bright development prospect. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] Figure 1 The present invention provides a schematic structural diagram of a system for recycling waste sandblasting materials from a sandblasting machine.

[0034] Among them, 1-sandblasting machine; 2-waste collection device; 3-multi-stage dust collection, filtering and capturing device; 31-first-stage dust collection, filtering and capturing device; 32-second-stage dust collection, filtering and capturing device; 33-third-stage dust collection, filtering and capturing device; 4-wastewater treatment device; 5-sand and water concentration automatic monitoring system; 6-drying system; 7-ejector; 8-precipitation device; 9-filter press device; 10-diaphragm pump; 11-filter device; 111-supernatant tank; 112-sand filter tank; 113-filter; 12-recycled water pump. DETAILED DESCRIPTION

[0035] It should be understood that, in the description of the present invention, the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention. In addition, the terms "first", "second", etc. are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined as "first", "second", etc. may explicitly or implicitly include one or more of the features. In the description of the present invention, unless otherwise specified, "multiple" means two or more.

[0036] It should be noted that in the description of the present invention, unless otherwise clearly specified and limited, the terms "disposed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood by specific circumstances.

[0037] The technical solution of the present invention is further illustrated below through specific implementation methods.

[0038] In a specific embodiment, the present invention provides a system device for recycling sandblasting waste of a sandblasting machine, and its structural schematic diagram is as follows: Figure 1 As shown, the sandblasting waste includes waste sand and waste water, and the recycling system device includes a sandblasting machine 1, a waste collection device 2 and a multi-stage dust collection and filtering capture device 3 which are sequentially connected along the direction of waste movement.

[0039] The sand collecting port on one side of the multi-stage dust collecting, filtering and capturing device 3 is used to output waste sand liquid below 600 meshes for reuse in the sandblasting machine 1, and the waste material port on the other side is used to output the remaining waste material.

[0040] The recycling system device also includes a wastewater treatment device 4, which is connected to the waste material port of the multi-stage dust collection, filtering and capturing device 3, and is used to recycle wastewater into the sandblasting machine 1.

[0041] The present invention captures waste sand of different mesh sizes by designing a multi-stage dust collection and filtering capture device 3, and then reuses the waste sand of different mesh sizes in the corresponding sandblasting machine 1, and at the same time recovers waste water to the sandblasting machine 1 with the help of a wastewater treatment device 4. Through the above design, the sand and water of the sandblasting machine 1 can be recycled, which can not only ensure the stable operation of the recycling process, reduce resource consumption and waste generation, and improve work efficiency and economic benefits, but also ensure the safe treatment of waste and environmental protection, and has a bright development prospect.

[0042] In the present invention, the waste sand liquid below 600 meshes may be, for example, waste sand liquid below 580 meshes, waste sand liquid below 560 meshes, waste sand liquid below 540 meshes, waste sand liquid below 520 meshes, or waste sand liquid below 500 meshes, etc. In particular, since the sand in the waste sand liquid above 600 meshes is extremely fine sand and cannot meet the needs of production, it does not need to be recycled and collected.

[0043] It should be noted that the multi-stage dust collection, filtering and capturing device refers to an overall filtering and capturing device with multiple levels of capturing systems arranged inside. Each level of the capturing system is a semi-permeable membrane filter material of different mesh sizes, which is used to collect and filter sand of different mesh sizes.

[0044] Furthermore, the multi-stage dust collecting, filtering and capturing device 3 includes a primary dust collecting, filtering and capturing device 31, a secondary dust collecting, filtering and capturing device 32 and a tertiary dust collecting, filtering and capturing device 33 which are connected in sequence along the direction of waste movement. The sand collecting port of the primary dust collecting, filtering and capturing device 31 is used to output waste sand liquid of 250-300 mesh, for example, it can be 250 mesh, 260 mesh, 270 mesh, 280 mesh, 290 mesh or 300 mesh, etc.; the sand collecting port of the secondary dust collecting, filtering and capturing device 32 is used to output waste sand liquid of 350-450 mesh, for example, it can be 350 mesh, 370 mesh, 400 mesh, 420 mesh or 450 mesh, etc.; the sand collecting port of the tertiary dust collecting, filtering and capturing device 33 is used to output waste sand liquid of 500-600 mesh, for example, it can be 500 mesh, 520 mesh, 540 mesh, 560 mesh, 580 mesh or 600 mesh, etc.

[0045] In the present invention, waste sand is collected through graded dust collection, filtering and capturing devices. Such a design is helpful for the utilization of site space. Through the internal multi-level capture system, the footprint is small and the space is closed. The usable sand after collection is in the state of sand and water, and will not affect the environment due to dust. Through automated processing procedures and optimized resource utilization, the system can effectively reduce energy consumption and operating costs. This economic benefit is particularly significant in long-term operation.

[0046] Furthermore, the recycling system device also includes a sand and water concentration automatic monitoring system 5 and a drying system 6.

[0047] It should be noted that the sand-water concentration automatic monitoring system 5 is a system for real-time, automatic monitoring of the concentration of sand in an aqueous solution containing sand particles. The system realizes real-time, automatic monitoring, does not require frequent manual sampling and testing, saves labor costs, and can quickly feedback concentration information, making adjustment operations in the production process more timely, reducing production stagnation and product quality problems caused by abnormal concentration, and ensuring continuous and efficient production; at the same time, the system can more accurately measure the concentration of waste sand liquid, which can better meet process requirements.

[0048] Furthermore, the sand-water concentration automatic monitoring system 5 is used to detect and determine the concentration of sand in the waste sand liquid. If the target concentration requirement is met, the waste sand liquid is recycled to the sandblasting machine 1; if the target concentration requirement is not met, the waste sand liquid is input into the drying system 6 for drying and storage.

[0049] In the present invention, the sand and water concentration automatic monitoring system 5 can automatically identify and reuse sand and water whose concentration meets the standard, reducing dependence on fresh water sources, reducing production costs and resource consumption. This closed-loop utilization method helps to achieve sustainable resource utilization; those that do not meet the requirements are dried and put aside. For sand and water whose concentration does not meet the standard, the system will automatically guide it to the subsequent drying system for standby treatment to avoid environmental pollution that may be caused by direct discharge. This treatment method helps to reduce pollution to water bodies and meets the requirements of environmental protection regulations.

[0050] Furthermore, the waste collection device 2 is an open flow trough.

[0051] Furthermore, an aeration device is installed at the bottom of the open flow trough.

[0052] In the present invention, the open flow trough is a trough structure in which water flows in the form of an open channel, and an aeration device is installed at the bottom. Air (or a mixed gas containing a certain amount of oxygen) is filled into the water body in the open flow trough through the device, so that the air is dispersed in the water body in the form of bubbles, thereby ensuring that the waste sand in the waste is in a moving state, thereby improving the recovery efficiency.

[0053] Furthermore, an ejector 7 is provided between the waste collection device 2 and the multi-stage dust collection, filtering and capturing device 3 , for ejecting waste in the waste collection device 2 into the multi-stage dust collection, filtering and capturing device 3 .

[0054] Furthermore, the wastewater treatment device 4 includes a sedimentation device 8, a filter press device 9 and a filtration device 11 which are connected in sequence along the direction of movement of the waste.

[0055] Furthermore, the sedimentation device 8 is a sedimentation tank.

[0056] Furthermore, the sedimentation tank has a flocculant. Exemplarily, the flocculant may be an inorganic flocculant, an organic flocculant or a microbial flocculant, the inorganic flocculant may be aluminum sulfate, polyaluminum chloride, ferric chloride or polyferric sulfate, the organic flocculant may be polyacrylamide, polydimethyldiallyl ammonium chloride or chitosan flocculant, etc.

[0057] Furthermore, the filter press device 9 is a plate-frame mud press having a waste sand outlet and a waste water outlet.

[0058] In the present invention, the plate and frame mud press mainly realizes waste sand dehydration based on the principle of pressure difference. First, the waste material to be processed is transported to the filter chamber formed by the filter plates and filter frames of the plate and frame mud press arranged alternately. Then, the external pressure is applied by a hydraulic system or a mechanical device, so that the sludge in the filter chamber is under the action of pressure, and the water in the sludge seeps out through the filter cloth (installed on the filter plate), while the solid particles are trapped in the filter chamber. As the pressure continues to act and the water is continuously discharged, the sludge is gradually compressed, and finally forms waste sand with a low water content, thereby achieving the purpose of dehydration.

[0059] Furthermore, a diaphragm pump 10 is provided on the pipeline between the precipitation device 8 and the filter press device 9. For example, it can be a pneumatic diaphragm pump or an electric diaphragm pump.

[0060] In the present invention, the diaphragm pump 10 mainly realizes the delivery or pressurization of liquid through the reciprocating motion of the diaphragm, has good self-priming ability, good sealing performance, and adjustable flow rate.

[0061] Furthermore, the filtering device 11 comprises a supernatant tank 111, a sand filter tank 112 and a filter 113 which are connected in sequence, and the inlet of the supernatant tank 111 is connected to the wastewater outlet of the plate and frame mud press.

[0062] Furthermore, the outlet of the filter 113 is connected to a recycling water pump 12 for pumping filtered water into the sandblasting machine 1 .

[0063] In another specific embodiment, the present invention provides a working method of the sandblasting waste recycling system as described above, the working method comprising the following steps:

[0064] The sandblasting machine is started, and the waste generated by the sandblasting machine is collected by a waste collection device and transported to a multi-stage dust collection and filtering capture device, and waste sand liquid below 600 mesh is output from a sand collection port, and the waste sand liquid is recovered into the sandblasting machine for continued use.

[0065] The remaining waste output from the waste outlet of the multi-stage dust collecting, filtering and capturing device is transported to a wastewater treatment device for wastewater recovery treatment, and the obtained recycled water is returned to the sandblasting machine for continued use.

[0066] The technical solution of the present invention is further described below by specific implementation methods. It should be understood by those skilled in the art that the embodiments are only to help understand the present invention and should not be regarded as specific limitations of the present invention.

[0067] Example 1

[0068] The present embodiment provides a system device for recycling sandblasting waste from a sandblasting machine, wherein the sandblasting waste includes waste sand and waste water, and the recycling system device includes a sandblasting machine, an open flow trough, an ejector, a primary dust collecting, filtering and capturing device, a secondary dust collecting, filtering and capturing device, and a tertiary dust collecting, filtering and capturing device, which are connected in sequence along the direction of movement of the waste.

[0069] The sand collecting port of the first-level dust collecting, filtering and capturing device is used to output 250-300 mesh waste sand liquid, the sand collecting port of the second-level dust collecting, filtering and capturing device is used to output 350-450 mesh waste sand liquid, and the sand collecting port of the third-level dust collecting, filtering and capturing device is used to output 500-600 mesh waste sand.

[0070] The recycling system device also includes an automatic sand and water concentration monitoring system and a drying system. The automatic sand and water concentration monitoring system is used to detect and determine the concentration of sand in the outputted waste sand liquid. If the target concentration requirement is met (within the range of 100-150g / L), the waste sand liquid is recycled to the sandblasting machine; if the target concentration requirement is not met, the waste sand liquid is input into the drying system for drying and storage.

[0071] An aeration device is installed at the bottom of the open flow trough.

[0072] The recycling system also includes a wastewater treatment device, which includes a sedimentation tank, a pneumatic diaphragm pump, a plate and frame mud press, a supernatant tank, a sand filter tank and a filter connected in sequence along the direction of waste movement; the inlet of the sedimentation tank is connected to the waste port of the three-stage dust collection, filtering and capturing device, and the flocculant in the sedimentation tank is aluminum sulfate; the pneumatic diaphragm pump is used to pump the waste sand liquid precipitated in the sedimentation tank into the plate and frame mud press; the plate and frame mud press has a waste sand outlet and a wastewater outlet, and the inlet of the supernatant tank is connected to the wastewater outlet of the plate and frame mud press; the outlet of the filter is connected to a reuse water pump, which is used to pump the filtered water into the sandblasting machine.

[0073] This embodiment also provides a working method of the above-mentioned sandblasting waste recycling system device, and the working method includes the following steps:

[0074] Start the sandblasting machine, collect the waste generated by the sandblasting machine through the open flow trough, and move it to the primary dust collecting and filtering capturing device, the secondary dust collecting and filtering capturing device and the tertiary dust collecting and filtering capturing device with the help of the ejector, and output waste sand liquid of different mesh sizes from the sand collecting ports of the dust collecting and filtering capturing devices at each level. After being judged by the automatic monitoring system for sand and water concentration, the waste sand liquid whose sand concentration meets the target concentration is recovered to the sandblasting machine for continued use, and the waste sand liquid that does not meet the target concentration requirement is input into the drying system for drying and storage.

[0075] The remaining waste material output from the waste port of the three-stage dust collecting, filtering and capturing device is transported to the sedimentation tank for precipitation reaction, and then the remaining waste sand liquid is pumped into the plate and frame mud press through a pneumatic diaphragm pump for filter pressing. The waste sand is squeezed dry and treated as waste. At the same time, the remaining waste water is transported to the supernatant pool through the wastewater outlet of the plate and frame mud press, and then passes through the sand filter tank and the filter in turn for filtration treatment. The recycled water obtained after filtration is returned to the sand blasting machine through the recycled water pump for continued use.

[0076] The applicant declares that the present invention illustrates the process method of the present invention through the above-mentioned embodiments, but the present invention is not limited to the above-mentioned process steps, that is, it does not mean that the present invention must rely on the above-mentioned process steps to be implemented. Those skilled in the art should understand that any improvement of the present invention, equivalent replacement of the raw materials selected by the present invention, addition of auxiliary components, selection of specific methods, etc., all fall within the protection scope and disclosure scope of the present invention.

Claims

1. A system for recycling waste sandblasting from a sandblasting machine, characterized in that: The sandblasting waste includes waste sand and waste water, and the recycling system device includes a sandblasting machine, a waste collection device and a multi-stage dust collection and filtering device connected in sequence along the direction of waste movement; The sand collecting port on one side of the multi-stage dust collecting and filtering device is used to output waste sand liquid below 600 meshes for reuse in the sandblasting machine, and the waste material port on the other side is used to output the remaining waste material; The recycling system device also includes a wastewater treatment device, which is connected to the waste material port of the multi-stage dust collection, filtering and capturing device and is used to recycle wastewater into the sandblasting machine.

2. The recycling system according to claim 1, characterized in that: The multi-stage dust collection, filtering and capturing device includes a primary dust collection, filtering and capturing device, a secondary dust collection, filtering and capturing device and a tertiary dust collection, filtering and capturing device connected in sequence along the direction of waste movement; The sand collecting port of the primary dust collecting, filtering and capturing device is used to output 250-300 mesh waste sand liquid; The sand collecting port of the secondary dust collecting, filtering and capturing device is used to output 350-450 mesh waste sand liquid; The sand collecting port of the three-stage dust collecting, filtering and capturing device is used to output 500-600 mesh waste sand liquid.

3. The recycling system according to claim 1, characterized in that: The recycling system device also includes a sand and water concentration automatic monitoring system and a drying system; The automatic sand-water concentration monitoring system is used to detect and determine the concentration of sand in the waste sand liquid. If the target concentration requirement is met, the waste sand liquid is recycled to the sandblasting machine; if the target concentration requirement is not met, the waste sand liquid is input into the drying system for drying and storage.

4. The recycling system according to any one of claims 1 to 3, characterized in that: The waste collection device is an open flow trough; Preferably, an aeration device is installed at the bottom of the open flow trough; Preferably, an ejector is provided between the waste collection device and the multi-stage dust collection, filtering and capturing device, for ejecting waste in the waste collection device into the multi-stage dust collection, filtering and capturing device.

5. The recycling system according to any one of claims 1 to 4, characterized in that: The wastewater treatment device includes a sedimentation device, a filter press device and a filtration device connected in sequence along the direction of waste movement; Preferably, the sedimentation device is a sedimentation tank; Preferably, there is a flocculant in the sedimentation tank.

6. The recycling system according to any one of claims 1 to 5, characterized in that: The filter press device is a plate-frame mud press having a waste sand outlet and a waste water outlet; Preferably, a diaphragm pump is provided on the pipeline between the precipitation device and the filter press device.

7. The recycling system according to any one of claims 1 to 6, characterized in that: The filtering device comprises a supernatant tank, a sand filter tank and a filter connected in sequence, and the inlet of the supernatant tank is connected to the wastewater outlet of the plate and frame mud press; Preferably, the outlet of the filter is connected to a recycling water pump for pumping the filtered water into the sandblasting machine.

8. A working method of the sandblasting waste recycling system device according to any one of claims 1 to 7, characterized in that: The working method comprises the following steps: The sandblasting machine is started, waste generated by the sandblasting machine is collected by a waste collection device, and is transported to a multi-stage dust collection and filtering device, waste sand liquid with a size of less than 600 mesh is output from a sand collection port, and the waste sand liquid is recovered to the sandblasting machine for continued use; The remaining waste output from the waste outlet of the multi-stage dust collecting, filtering and capturing device is transported to a wastewater treatment device for wastewater recovery treatment, and the obtained recycled water is returned to the sandblasting machine for continued use.

9. The working method according to claim 8, characterized in that: The recycling system device also includes a sand and water concentration automatic monitoring system and a drying system; The judgment criteria of the automatic monitoring system for sand and water concentration are: the target concentration is within the range of 100-150g / L.

10. Application of the sandblasting waste recycling system device of any one of claims 1 to 7 in the semiconductor field.

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