Conductive particle, conductive particle preparation method and test connector

Abstract

A conductive particle is provided for use in a test connector disposed between a terminal of a device under test and a pad of a test apparatus to perform an electrical test on the device under test, in which a plurality of conductive particles are disposed in an elastic insulating material at each position corresponding to the terminal of the device under test, a conductive particle for forming a conductive path by pressing a device under test, the conductive particle comprising: a core particle comprising a ferromagnetic material; and a coating layer disposed on a surface of the core particle, in which the coating layer includes a coating body surrounding the core particle and an uneven portion formed on an outer surface of the coating body, and the uneven portion includes a plurality of convex portions protruding from the outer surface of the coating body and concave portions disposed between the convex portions, wherein the uneven portion is formed by an etching process and protrudes over the entire outer surface of the coating body.

Description

Technical Field

[0001] The present disclosure relates to a conductive particle used for electrical testing of a device under test, a method for manufacturing the conductive particle, and a test connector provided with the conductive particle. Background Art

[0002] For electrical testing of a device under test (i.e., a device to be tested), a connector is used in the related art, the connector contacts the device under test and a test device to electrically connect the device under test to the test device. The connector transmits electrical signals from the test device to the device under test, and transmits electrical signals from the device under test to the test device. A single-pin spring connector test socket and a conductive rubber sheet are known in the art as such connectors.

[0003] The single-pin spring connector test socket has a single-pin spring connector (pogo pin) that is pushed up and down by an external force applied to the device under test. Since the single-pin spring connector test socket requires a component for accommodating the single-pin spring connector, it is difficult to have a small thickness and difficult to be applied to the terminal of the device under test with a fine pitch. The conductive rubber sheet can be elastically deformed by the external force applied to the device under test.

[0004] The conductive rubber sheet has a plurality of conductive parts that electrically connect the device under test to the test equipment and an insulating part that separates the conductive parts. The insulating part can be made of hardened silicone rubber. Compared with a single-pin spring connector test socket, the conductive rubber sheet is advantageous in that it can be manufactured at a low manufacturing cost, does not damage the terminals of the device under test, and has a very small thickness.

[0005] like Figure 1 As shown in the figure, the conductive rubber sheet is arranged between a device under test (20) and a test equipment (10), and comprises a conductive part (12) and an insulating part (13), in which a plurality of conductive particles (12a) are arranged in the thickness direction of the silicone rubber at positions corresponding to terminals (21) of the device under test (20), and the insulating part (13) is located between the conductive parts (12) and supports and insulates the conductive parts (12).

[0006] When the terminal (21) of the device under test (20) presses the conductive part (12), the conductive particles (12a) in the conductive part (12) are in close contact with each other to form a conductive path, and when a specific electrical signal is applied from the test equipment (10), the signal is transmitted to the device under test (20) via the conductive part (12), and a specific electrical test is performed.

[0007] The conductive rubber sheet has an advantage of densely arranging gaps between conductive parts while having a small thickness, but there is a problem that conductive particles in the conductive part are separated from the conductive part during frequent testing processes. Specifically, a plurality of conductive particles are densely oriented in the silicone rubber. During the testing process, the conductive part is repeatedly compressed and expanded, or the conductive particles combined with the silicone rubber are separated and released due to contact with the terminals of the device under test. In this way, when the conductive particles are separated from the conductive part, the resistance increases, thereby adversely affecting the reliability of the electrical test.

[0008] To solve this problem, Korean Patent Registration No. 1748184 discloses a technology in which, after a plurality of pores are formed on the surface of a conductive particle, silicone rubber infiltrates into the pores, thereby increasing the bonding force with the silicone rubber and thus preventing the conductive particle from being easily separated from the conductive portion.

[0009] Specifically, if Figure 2 As shown in the figure, conductive particles (12a) are manufactured by the following steps: (a) preparing a metal powder (1) constituting a particle body of the conductive particles; (b) preparing a sacrificial powder (2) to be fused with the metal powder (1); (c) forming a composite powder (3) by mechanically alloying the metal powder (1) and the sacrificial powder (2); and (d) forming pores (12a') in the particle body (12a") by removing the sacrificial powder (2) included in the composite powder (3).

[0010] In operation (c), the composite powder (3) can be formed by ball milling as a mechanical alloying method, and a horizontal ball milling device and a high-energy ball milling device (such as a planetary ball mill, an attrition ball mill, a SPEX ball mill, or a vibrating mill) are used as a device for ball milling.

[0011] In addition, as a method of removing the sacrificial powder in operation (d), when the sacrificial powder is a graphite material, graphite fused to the metal powder at a high temperature is evaporated into a gaseous state using a vaporization method to be removed.

[0012] Conventional conductive particles provided with pores (12a') allow silicone rubber to penetrate into the pores (12a') to slightly increase bonding with the silicone rubber, but have the following problems.

[0013] First, if you can Figure 2 As seen in (d), the pores (12a') are distributed only on a portion of the surface of the conductive particles, and therefore, the effect of increasing the surface area is not significant.

[0014] In addition, during the mechanical alloying process, the metal powder (1) moves inside the ball mill jar and contacts the sacrificial powder (2), and in this process, shear force and vertical load act on the surface of the metal powder (1). However, since the ball mill jar rotates at a high speed, the sacrificial powder (2) can easily penetrate the metal powder (1), so the force applied to the metal powder (1) is very large, and in this process, the overall shape deformation of the metal powder (1) is inevitable. Therefore, there is a problem that it is difficult to maintain the original shape of the metal powder (1).

[0015] In addition, in the mechanical alloying, since the sacrificial powder (2) is not alloyed with the metal powder (1) in a uniform form, Figure 2 As shown in (d), the shape of the pores (12a') becomes very uneven. In particular, since the metal powder (1) is generally not a perfect sphere, there will be problems such as the sacrificial powder (2) adhering or not adhering depending on the curve of the surface, and therefore, the pores (12a') are unevenly distributed.

[0016] In addition, during the collision with the metal powder in the high-speed rotating ball mill, the sacrificial powder (2) is alloyed in a wide and flat form. Figure 2 The pores (12a') manufactured by the manufacturing method shown in the figure have a relatively thin groove thickness and an almost flat shape, and therefore have a disadvantage in that the effect of improving the bonding strength with the silicone rubber is not great. Summary of the invention

[0017] Technical issues

[0018] The present disclosure is designed to solve the above problems, and more specifically, a technical purpose of the present disclosure is to provide a conductive particle that is not easily separated from a conductive portion due to improved adhesion with silicone rubber, which can improve the life of a test connector.

[0019] In addition, the technical object of the present disclosure is to provide a method for producing conductive particles capable of improving adhesion with silicone rubber.

[0020] In addition, a technical object of the present disclosure is to provide a test connector provided with conductive particles which are not separated from a conductive portion due to improved adhesion with silicone rubber.

[0021] Technical means

[0022] The present disclosure provides a conductive particle, wherein the conductive particle is applied to a test connector, wherein the test connector is disposed between a terminal of a device under test and a pad of a test device to perform an electrical test on the device under test.

[0023] wherein a plurality of conductive particles are disposed in the elastic insulating material at each position corresponding to the terminal of the device under test, so as to form a conductive path by pressing the device under test,

[0024] Conductive particles include:

[0025] a core particle comprising a ferromagnetic material; and

[0026] A coating layer is provided on the surface of the core particle,

[0027] wherein the coating layer comprises a coating body surrounding the core particle and an uneven portion formed on an outer surface of the coating body, and

[0028] The uneven portion includes a plurality of convex portions protruding from the outer surface of the coating body and a concave portion disposed between the convex portions.

[0029] The uneven portion is formed by an etching process and protrudes over the entire outer surface of the coating body.

[0030] The present disclosure provides a conductive particle, wherein the conductive particle is applied to a test connector, wherein the test connector is disposed between a terminal of a device under test and a pad of a test device to perform an electrical test on the device under test.

[0031] wherein a plurality of conductive particles are disposed in the elastic insulating material at each position corresponding to the terminal of the device under test, so as to form a conductive path by pressing the device under test,

[0032] Conductive particles include:

[0033] a core particle comprising a mixture of a ferromagnetic material and a highly conductive material; and

[0034] The uneven portion is provided on the surface of the core particle,

[0035] wherein the uneven portion includes a plurality of convex portions protruding from the outer surface of the core particle and concave portions disposed between the convex portions, and

[0036] The uneven portion is formed by an etching process and protrudes over the entire outer surface of the core particle.

[0037] In the conductive particle, at least one of the convex portions may have a shape with a round tip.

[0038] In the conductive particle, at least one of the convex portions may have a shape with a tip inclined to one side.

[0039] In the conductive particle, tips of two convex portions adjacent to each other may be connected to each other to have a ring shape as a whole.

[0040] In the conductive particles, the uneven portion may have a multi-layered three-dimensional network structure.

[0041] In the conductive particles, an average height of the convex portions may be 50 nanometers to 3 micrometers.

[0042] In the conductive particles, the average width of the convex portions may be 50 nanometers to 3 micrometers.

[0043] In the conductive particles, the coating body and the convex portion may include the same material.

[0044] In the conductive particles, the coating body and the convex portion may include one of gold, silver, palladium, rhodium, and copper, or an alloy thereof.

[0045] In the conductive particles, the surface of the convex portion may be coated with a highly conductive metal layer.

[0046] The present disclosure provides a conductive particle, wherein the conductive particle is applied to a test connector, wherein the test connector is disposed between a terminal of a device under test and a pad of a test device to perform an electrical test on the device under test.

[0047] wherein a plurality of conductive particles are disposed in the elastic insulating material at each position corresponding to the terminal of the device under test, so as to form a conductive path by pressing the device under test,

[0048] Conductive particles include:

[0049] a core particle comprising a mixture of a ferromagnetic material and a highly conductive material; and

[0050] A coating layer is provided on the surface of the core particle,

[0051] wherein the coating layer comprises a coating body surrounding the core particle and an uneven portion formed on the outer surface of the coating body, and

[0052] The uneven portion includes a plurality of convex portions protruding from the outer surface of the coating body and concave portions disposed between the convex portions.

[0053] The uneven portion is formed by an etching process and protrudes over the entire outer surface of the coating body.

[0054] In the conductive particles, in the core particles, a plurality of ferromagnetic particles may be distributed in a base material including a highly conductive metal.

[0055] Among the conductive particles, each of the ferromagnetic particles may have one or a combination of a spherical shape, a star shape, a column shape, a horn shape, a cross shape, a slot shape, a Lego shape, a spring shape, a pipe shape, and a peanut shape.

[0056] In the conductive particles, the base material of the core particle and the convex portion include the same material.

[0057] The present disclosure provides a method for manufacturing conductive particles, wherein the conductive particles are applied to a test connector, wherein the test connector is disposed between a terminal of a device under test and a pad of a test device to perform an electrical test on the device under test.

[0058] wherein a plurality of conductive particles are disposed in the elastic insulating material at each position corresponding to the terminal of the device under test, so as to form a conductive path by pressing the device under test,

[0059] The method comprises:

[0060] (a) preparing core particles comprising ferromagnetic material;

[0061] (b) coating a coating layer comprising a highly conductive material on the surface of the core particle;

[0062] (c) deforming the shape of the coating layer using an etchant; and

[0063] (d) Conductive particles are obtained in which uneven portions including convex portions and concave portions are formed on the surface of the coating layer.

[0064] The present disclosure provides a method for manufacturing conductive particles, wherein the conductive particles are applied to a test connector, wherein the test connector is disposed between a terminal of a device under test and a pad of a test device to perform an electrical test on the device under test.

[0065] wherein a plurality of conductive particles are disposed in the elastic insulating material at each position corresponding to the terminal of the device under test, so as to form a conductive path by pressing the device under test,

[0066] The method comprises:

[0067] (a) preparing core particles comprising ferromagnetic material;

[0068] (b) coating a coating layer comprising a highly conductive material on the surface of the core particle;

[0069] (c) deforming the shape of the coating layer using an etchant; and

[0070] (d) coating a highly conductive metal layer on the surface of the coating layer.

[0071] The present disclosure provides a method for manufacturing conductive particles, wherein the conductive particles are applied to a test connector, wherein the test connector is disposed between a terminal of a device under test and a pad of a test device to perform an electrical test on the device under test.

[0072] wherein a plurality of conductive particles are disposed in the elastic insulating material at each position corresponding to the terminal of the device under test, so as to form a conductive path by pressing the device under test,

[0073] (a) preparing a core particle in which a plurality of ferromagnetic particles are distributed in a matrix comprising a highly conductive material;

[0074] (b) deforming the shape of the surface of the core particle using an etchant; and

[0075] (c) Conductive particles are obtained in which uneven portions including convex portions and concave portions are formed on the surface of a core particle.

[0076] The present disclosure provides a method for manufacturing conductive particles, wherein the conductive particles are applied to a test connector, wherein the test connector is disposed between a terminal of a device under test and a pad of a test device to perform an electrical test on the device under test.

[0077] wherein a plurality of conductive particles are disposed in the elastic insulating material at each position corresponding to the terminal of the device under test, so as to form a conductive path by pressing the device under test,

[0078] (a) preparing a core particle in which a plurality of ferromagnetic particles are distributed in a matrix comprising a highly conductive material;

[0079] (b) deforming the shape of the surface of the core particle using an etchant, thereby forming an uneven portion including a convex portion and a concave portion on the surface of the core particle; and

[0080] (c) A highly conductive metal layer is coated on the surface of the uneven portion.

[0081] In the method of manufacturing the conductive particle, at least one of the convex portions may have a shape with a rounded tip.

[0082] In the method of manufacturing the conductive particle, at least one of the convex portions may have a shape with a tip inclined to one side.

[0083] In the method of manufacturing the conductive particle, tips of two convex portions adjacent to each other may be connected to each other to have a ring shape as a whole.

[0084] In the method of manufacturing the conductive particles, the uneven portion may have a three-dimensional network structure.

[0085] In the method of manufacturing the conductive particles, the average height and the average width of the convex portions may be 50 nanometers to 3 micrometers.

[0086] The present disclosure provides a test connector, which is arranged between a terminal of a device under test and a pad of a test device to perform an electrical test on the device under test. The test connector includes:

[0087] a conductive portion in which a plurality of conductive particles are arranged to extend in a thickness direction in the elastic insulating material at each position corresponding to a terminal of a device under test; and

[0088] Insulating parts, which insulate and support the conducting parts from each other,

[0089] wherein each of the conductive particles comprises:

[0090] core particles; and

[0091] A coating layer is provided on the surface of the core particle,

[0092] wherein the coating layer is provided with a plurality of convex portions protruding from the outer surface of the core particle and concave portions provided between the convex portions, and an uneven portion is uniformly formed on the entire outer surface of the core particle by an etching process, and

[0093] The elastic insulating material penetrates into the concave portions between the convex portions and is firmly coupled to the conductive particles.

[0094] The present disclosure provides a test connector, which is arranged between a terminal of a device under test and a pad of a test device to perform an electrical test on the device under test. The test connector includes:

[0095] a conductive portion in which a plurality of conductive particles are arranged to extend in a thickness direction in the elastic insulating material at each position corresponding to a terminal of a device under test; and

[0096] Insulating parts, which insulate and support the conducting parts from each other,

[0097] wherein each of the conductive particles comprises:

[0098] a core particle comprising a mixture of a ferromagnetic material and a highly conductive material; and

[0099] The uneven part is formed on the surface of the core particle.

[0100] wherein the uneven portion includes a plurality of convex portions protruding from the outer surface of the core particle and concave portions formed between the convex portions, and the uneven portion is formed by an etching process and protrudes over the entire outer surface of the core particle, and

[0101] The elastic insulating material penetrates into the concave portions between the convex portions and is firmly coupled to the conductive particles.

[0102] Effects of the Invention

[0103] According to the present disclosure, in the process of manufacturing the test connector, the liquid silicone rubber penetrates into the concave portions of the conductive particles, and when the silicone rubber is cured in this state, the contact area between the silicone rubber and the conductive particles increases, thereby improving the bonding strength.

[0104] According to the present disclosure, the uneven portion of the conductive particle is formed over the entire surface of the conductive particle by etching, and the width and depth of the convex portion and the concave portion can be adjusted to a desired level, thereby maximizing the adhesive force.

[0105] According to the present disclosure, when the adhesion between the silicone rubber and the conductive particles is improved, the conductive particles are not separated from the silicone rubber, and thus, the overall life of the test connector can be improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0106] Figure 1 is a diagram showing a conventional test connector.

[0107] Figure 2is a diagram showing a conventional method of manufacturing conductive particles.

[0108] Figure 3 is a diagram showing a test connector according to an embodiment of the present disclosure.

[0109] Figure 4 It is shown Figure 3 The operation of the test connector is shown in the figure.

[0110] Figure 5 FIG. 1 is a diagram showing conductive particles according to a first embodiment of the present disclosure.

[0111] Figure 6 It shows the manufacturing Figure 5 A diagram showing a method of conducting particles.

[0112] Figures 7 to 12 yes Figure 5 Actual photograph of conductive particles shown.

[0113] Fig.13 FIG. 5 is a diagram showing conductive particles according to a second embodiment of the present disclosure.

[0114] Fig.14 It shows the manufacturing Fig.13 A diagram showing a method of conducting particles.

[0115] Fig.15 FIG. 4 is a diagram showing conductive particles according to a third embodiment of the present disclosure.

[0116] Fig.16 It shows the manufacturing Fig.15 A diagram showing a method of conducting particles.

[0117] Fig.17 is a diagram illustrating a method of manufacturing conductive particles according to another embodiment. DETAILED DESCRIPTION

[0118] The embodiments of the present disclosure are provided as examples to illustrate the technical concept of the present disclosure. The scope of the present disclosure is not limited to the embodiments described below or the specific description of the embodiments.

[0119] Unless otherwise defined, all technical terms and scientific terms used in this disclosure have the same meaning as those commonly understood by those skilled in the art to which this disclosure belongs. All terms used in this disclosure are selected to more clearly describe this disclosure and are not intended to limit the scope of this disclosure.

[0120] Unless otherwise stated in a phrase or sentence containing terms such as “comprising,” “including,” and “having” used in the present disclosure, the terms should be understood as open-ended terms meaning that also include the possibility of other embodiments.

[0121] Unless otherwise specified, terms in the singular may also include plural forms, and the same applies to terms in the singular in the patent claims.

[0122] Terms such as “first” and “second” are used in the present disclosure to distinguish multiple elements from each other and do not limit the order or importance of the elements.

[0123] In the present disclosure, it should be understood that when an element is referred to as being “coupled” or “connected” to another element, the element may be directly coupled to or directly connected to the other element, or any other elements may be interposed between the two elements.

[0124] In the present disclosure, the term "upward" indicating a direction is based on the direction in which the test socket is positioned relative to the test board, and the term "downward" indicating a direction refers to the opposite direction of the upward direction. In the present disclosure, it should be understood that the term "vertical" indicating a direction includes both the upward direction and the downward direction, rather than referring to only one of the upward direction and the downward direction.

[0125] The "etching process" used in the present disclosure not only means that the outer surface of the coated body is etched by the etchant, but also means that the shape of the coated body is deformed by the etchant. For example, the metal solution dissolved in response to the etchant is re-combined with the coated body and the shape is deformed, or the shape of the coated body is deformed along with other etchants.

[0126] The embodiments will be described with reference to the examples shown in the accompanying drawings. In the accompanying drawings, the same reference numerals represent the same elements. In addition, in the following description of the embodiments, the same or corresponding elements may not be described in detail. However, even when the description of some elements is omitted from the description of some embodiments, the elements are not intended to be included in the embodiments.

[0127] Figure 3 A connector for testing according to an embodiment (ie, a test connector) is schematically shown. To illustrate the embodiment, Figure 4 The exemplary shapes of the test connector, the test equipment in which the test connector is disposed, and the device under test (ie, the device to be tested) in contact with the test connector are shown. Figure 4 The shape of the test connector, the shape of the conductive portion, and the shape of the insulating portion are schematically shown and are merely examples selected for understanding the embodiments.

[0128] Reference Figure 3 and Figure 4 According to the embodiment, the test connector (100) is located between the test equipment (10) and the device under test (20), and during the electrical test of the device under test (20), the test connector (100) contacts the test equipment (10) and the device under test (20) to electrically connect the test equipment (10) to the device under test (20). For example, the test connector (100) can be used during the final electrical test of the device under test (20) in a later process of the manufacturing process of the device under test (20).

[0129] The test connector (100) has a sheet-shaped structure. The test connector (100) can be coupled to a test socket (not shown) and can be removably mounted on a test device (10). The test socket receives a device under test (20) carried to the test device (10) by a conveying device, and places the device under test (20) in the test device (10).

[0130] The device under test (20) may be a semiconductor package having a semiconductor integrated circuit (IC) chip therein, but is not limited thereto. The device under test (20) may have a plurality of hemispherical terminals (21) on its lower side.

[0131] The test device (10) can test the electrical characteristics, functional characteristics, operating speed and the like of the device under test (20). The test device (10) can have a plurality of terminals (11) capable of outputting electrical test signals and receiving response signals from a board on which the test is performed. The test connector (100) can be arranged to contact the terminals (11) of the test device (10) via a test socket.

[0132] Most of the test connector (100) may be made of an insulating material having elasticity, and the test connector (100) may have elasticity in the vertical direction (VD) and the horizontal direction (HD). When an external force is applied downward to the test connector (100) in the vertical direction (VD), the test connector (100) may be elastically deformed, and when the external force is removed, the test connector (100) may return to its original shape. During the test of the device under test (20), the external force may be generated by pushing the device under test (20) toward the test equipment (10) using a pusher device.

[0133] The test connector (100) includes a plurality of conductive parts (110) and an insulating part (120). The plurality of conductive parts (110) extend in a vertical direction (VD), are spaced apart from each other in a horizontal direction (HD), and are conductive in the vertical direction (VD). The insulating part (120) supports the plurality of conductive parts (110) spaced apart in a horizontal direction (HD), and insulates the plurality of conductive parts (110) from each other.

[0134] The conductive part (110) contacts the terminal (21) of the device under test (20) at the upper end of the conductive part (110), and contacts the terminal (11) of the test equipment (10) at the lower end of the conductive part (110). Therefore, a conductive path in a vertical direction (VD) is formed between the terminal (11) and a terminal (21) corresponding to one conductive part (110) via the conductive part (110). Therefore, a test signal of the test equipment (10) can be transmitted from the terminal (11) to the terminal (21) of the device under test (20) via the conductive part (110), and a response signal of the device under test (20) can be transmitted from the terminal (21) to the terminal (11) of the test equipment (10) via the conductive part (110).

[0135] The planar arrangement of the conductive parts (110) may vary according to the arrangement of the terminals (21) of the device under test (20). The conductive parts (110) may be arranged in a matrix or a pair of matrices within the insulating part (120) having a rectangular shape. Alternatively, the conductive parts (110) may be arranged in a plurality of rows along each side of the insulating part (120) having a rectangular shape.

[0136] In each conductive portion (110), an insulating material may fill the space between the conductive particles (111). The insulating material forming the conductive portion (110) may be the same as the insulating material forming the insulating portion (120). That is, the conductive portion (110) partially includes the insulating material forming the insulating portion (120), and the insulating material of the conductive portion (110) may exist from one end to the other end of the conductive portion (110). In addition, the insulating material forming the insulating portion (120) may maintain the plurality of conductive particles (111) in the shape of the conductive portion (110). Therefore, each conductive portion (110) including the insulating material has elasticity in the vertical direction (VD) and the horizontal direction (HD). When each conductive portion (110) is pressed downward by the terminal (21) of the device under test (20), each conductive portion (110) may expand slightly in the horizontal direction (HD), and each insulating portion (120) may allow the conductive portion (110) to expand.

[0137] The insulating material constituting the conductive part (110) is preferably an elastic polymer material having a cross-linked structure. Various curable polymer forming materials can be used to obtain such an elastic polymer material, but silicone rubber is preferably used in terms of molding processability and electrical properties.

[0138] As the silicone rubber, a cross-linked or condensed liquid silicone rubber is preferred. The liquid silicone rubber may be a condensation type, an addition type, or a type containing a vinyl group or a hydroxyl group. Specifically, examples of the liquid silicone rubber include dimethyl silicone raw rubber, methyl vinyl silicone raw rubber, methyl phenyl vinyl silicone raw rubber, and the like.

[0139] Among these materials, liquid silicone rubber containing vinyl groups (polydimethylsiloxane containing vinyl groups) is generally obtained by hydrolyzing and condensing dimethyldichlorosilane or dimethyldialkoxysilane in the presence of dimethylvinylchlorosilane or dimethylvinylalkoxysilane (for example, by continuously performing fractionation using repeated dissolution-precipitation). In addition, liquid silicone rubber containing vinyl groups at both ends is obtained by anion polymerization of cyclic siloxane (for example, octamethylcyclotetrasiloxane) in the presence of a catalyst, by using, for example, dimethyldivinylsiloxane as a polymerization terminator, and by appropriately selecting other reaction conditions (for example, the amount of cyclic siloxane and the amount of polymerization terminator). Here, a base such as tetramethylammonium hydroxide and n-butylphosphonium hydroxide or a solution of these silanolates can be used as a catalyst for anionic polymerization, and the reaction temperature is, for example, about 80° C. to about 130° C. The vinyl-containing polydimethylsiloxane preferably has a molecular weight Mw (with reference to the standard polystyrene equivalent weight average molecular weight) of 10,000 to 40,000. In addition, from the perspective of heat resistance of the conductive path element obtained, the molecular weight distribution index (a value indicating the ratio Mw / Mn of the standard polystyrene equivalent weight average molecular weight Mw to the standard polystyrene equivalent number average molecular weight Mn) is preferably 2 or less.

[0140] The insulating part (120) may form a rectangular elastic region of the test connector (100). The insulating part (120) may be formed as an elastic body and has elasticity in the vertical direction (VD) and the horizontal direction (HD). The insulating part (120) maintains the shape of the conductive part (110) and supports the conductive part (110) in the vertical direction.

[0141] The insulating portion (120) is made of an insulating material. In detail, the insulating portion (120) is molded by solidifying a liquid insulating material. As an example, a magnetic field can be used to form the conductive portion (110) from a liquid insulating material in which the conductive particles (111) are dispersed, and then the insulating portion (120) can be formed by solidifying the liquid insulating material. Specifically, when a magnetic field is applied in a vertical direction to each area in which the conductive portion (110) is to be formed after manufacturing, the conductive particles (111) dispersed in the liquid insulating material are densely arranged in the area in which the magnetic field is applied, and then, when heat is applied to harden the liquid insulating material, a test connector (100) is manufactured in which the conductive particles (111) are concentrated in the conductive portion (110). In this case, the insulating material constituting the conductive portion (110) and the insulating material constituting the insulating portion (120) can be the same material.

[0142] As another example, a through-hole (in which the liquid insulating material is cured and molded) is formed with a material having the shape of a test connector at each position of the conductive portion (110), and the through-hole is filled with the liquid insulating material, and the conductive portion (110) can be formed by a magnetic field. In this case, the insulating material constituting the conductive portion (110) and the insulating material constituting the insulating portion (120) can be the same material, but can also be different materials. For example, in order to prevent the conductive portion (110) from being excessively deformed due to an external force, the insulating material constituting the insulating portion (120) can be a material having a higher hardness than the insulating material constituting the conductive portion (110).

[0143] The insulating material constituting the conductive part (110) and the insulating part (120) has insulating properties and elasticity. Such insulating material constitutes the insulating part (120) and constitutes a part of the conductive part (110).

[0144] As the conductive particles (111) distributed in the conductive portion (110), it is preferable to use conductive particles (111) that exhibit magnetic properties in terms of easy orientation of the particles. In addition, it is preferable that the conductive particles (111) exhibit high conductivity to improve electrical conductivity. In view of this, in the present disclosure, both magnetic materials and highly conductive materials are used to manufacture the conductive particles (111).

[0145] according to Figure 5 In the first embodiment shown in the figure, the conductive particles (111) include particles of a metal exhibiting magnetism (such as iron, cobalt or nickel), particles of an alloy thereof or particles including these metals as core particles, and a coating layer (113) is formed on the surface of the core particles, and the coating layer (113) is coated with a highly conductive material (such as gold, silver, palladium or rhodium).

[0146] Specifically, the core particle (112) may have a substantially spherical shape made of a ferromagnetic material. However, the shape of the core particle (112) is not limited to a spherical shape, and may have a flake, a polygon, or other various shapes as desired.

[0147] The coating layer (113) surrounds the core particle (112) and is made of a highly conductive material to improve electrical conductivity when in contact with another conductive particle (111).

[0148] The manner of coating the core particles (112) with the highly conductive material is not particularly limited, but the coating may be performed by, for example, chemical plating or electrolytic plating.

[0149] The coating layer (113) has a specific thickness, and includes a coating body (1131) having a constant thickness and surrounding the core particle (112), and an uneven portion (1132) formed on an outer surface of the coating body (1131).

[0150] The uneven portion (1132) is composed of a plurality of convex portions (1132a) protruding from the outer surface of the coating body (1131) and concave portions (1132b) arranged between the convex portions (1132a), and the uneven portion (1132) is formed on the entire outer surface of the coating body (1131) through an etching process.

[0151] Chemical etching is mainly used as an etching method for forming the uneven portion (1132). In addition, any one selected from nitric acid, hydrochloric acid, potassium hydroxide, potassium ferrocyanide, ammonium persulfate, copper sulfate (II), iron sulfate (III), picric acid, red blood salt (K3Fe(CN)6) and glacial acetic acid, or a combination of two or more solutions can be used as a solution for chemical etching. However, the present disclosure is not limited thereto, and various materials can be used as long as the material can etch a highly conductive material.

[0152] The shapes of the concave portion (1132b) and the convex portion (1132a) can be adjusted according to the etching conditions. Specifically, the width and depth of the concave portion (1132b) and the height and width of the convex portion (1132a) can be adjusted in various ways according to the etching solution used and the etching time.

[0153] Among the uneven portions (1132) manufactured by this etching process, the convex portion (1132a) may have a shape with a rounded tip. That is, in the case where the etching process is performed, at least one convex portion (1132a) may have a shape with a rounded tip. Therefore, the convex portion (1132a) is not easily damaged, and the contact area of ​​the convex portion (1132a) and the silicone rubber as an insulating material can be increased.

[0154] The average height and width of the convex portion (1132a) are preferably 50 nanometers to 3 micrometers. When the width and height of the convex portion (1132a) are less than 50 nanometers, the area bonded to the silicone rubber is small, and thus the adhesive strength is not substantially increased, which is not preferred. Even when the width and height of the convex portion (1132a) are greater than 3 micrometers, the surface area bonded to the silicone rubber is small, and thus the bonding force with the silicone rubber is not favorable.

[0155] At least one of the convex portions (1132a) has a tip inclined to one side, and therefore, when the silicone rubber penetrates into the concave portion (1132b) and is then cured, the cured silicone rubber does not easily fall out of the concave portion (1132b).

[0156] Preferably, the convex portion (1132a) is made of the same material as the coating body (1131). Specifically, after the coating layer (113) is immersed in an etchant, a portion of the coating layer (113) is etched, or the uneven portion (1132) is formed by a complex reaction, and therefore, the convex portion (1132a) can be made of the same material as the coating body (1131).

[0157] The concave portion (1132b) is a space between the convex portions (1132a) and is configured so that the silicone rubber can penetrate therein. This concave portion (1132b) is located between the convex portions (1132a).

[0158] Each of the conductive particles (111) may be Figure 6 The method shown in is used to manufacture.

[0159] First, a core particle including a ferromagnetic material is prepared (operation S100). Next, a coating layer (113) made of a highly conductive material is plated on the surface of the core particle (operation S200). Next, the shape of the coating layer (113) is deformed by immersing the coating layer (113) in an etchant (operation S300). In this case, the uneven portion (1132) may have various shapes depending on the time for immersing the coating layer (113) in the etchant and the type of the etchant.

[0160] Next, the conductive particles (111) in which the uneven portion (1132) consisting of the convex portion (1132a) and the concave portion (1132b) is formed on the surface of the coating layer (113) are obtained (operation S400).

[0161] The conductive particles (111) manufactured in this manner are injected into liquid silicone rubber and then cured while a magnetic field is applied to the mold to manufacture a desired test connector.

[0162] In this case, since the core particles (112) are made of a material exhibiting ferromagnetism, when a magnetic field is applied to the conductive particles (112), the conductive particles (112) can be easily moved to a desired position.

[0163] In addition, since the coating layer (113) of the conductive particle (111) is made of a highly conductive material, the resistance can be significantly reduced when the conductive particle (111) contacts another adjacent conductive particle (111) or a terminal (21) of the device under test (20).

[0164] In addition, on the surface of the conductive particles (111), the irregularities produced by a chemical process rather than a mechanical process are evenly distributed over the entire range of the conductive particles (111), and thus, it is advantageous for the silicone rubber to penetrate into the concave portion (1132b), and the contact area between the silicone rubber and the conductive particles (111) can be increased as a whole, so that the bonding strength can be improved. In this way, when the bonding strength between the silicone rubber and the conductive rubber is improved, the conductive particles (111) will not separate from the silicone rubber, and thus, the life of the test connector can be improved.

[0165] Figure 7and Figure 8 Shown by Figure 6 The general shape of the conductive particles (111) manufactured by the method shown. Figure 7 and Figure 8 As shown in , the convex portion (1132a) and the concave portion (1132b) are uniformly distributed over the entire surface of the conductive particles (111) having uneven portions formed on the surface by etching, and therefore, the bonding area with the liquid silicone rubber can be relatively large.

[0166] Fig. 9 and Fig.10 A case where the size of the convex portion (1132a) is relatively increased by changing the etching conditions is shown. The liquid silicone rubber can penetrate into the concave portion (1132b) between the convex portions (1132a), and thus, the conductive particles (111) can be firmly bonded to each other.

[0167] By changing the etching conditions in this manner, the designer can easily set the size of the convex portion (1132a) as desired.

[0168] The conductive particles (111) disclosed herein are not limited thereto.

[0169] First, in the conductive particle (111), when the upper end of the convex portion (1132a) is formed in an inclined shape and is located on the concave portion (1132b) and is connected to the adjacent convex portion (1132a), in many cases, the convex portion (1132a) and the concave portion (1132b) may not be observed on the surface of the conductive particle (111).

[0170] For example, Fig.11 and Fig.12 As shown in , even if the upper ends of the convex parts (1132a) are connected to each other, the through hole (1132c) through which the liquid silicone rubber flows remains not completely sealed. Therefore, since the liquid silicone rubber flows into the concave part (1132b) via the through hole (1132c), and the inside and outside of the concave part (1132b) are connected to each other, the bonding strength is improved.

[0171] In this case, the convex parts (1132a) can be connected to each other to have a ring shape as a whole. In this way, when some convex parts (1132a) of the uneven part (1132) are connected to each other to have a ring shape, not only the bonding strength with the silicone rubber is further improved, but also the silicone rubber penetrating into the through hole (1132c) is not easily separated from the conductive particles (111), and therefore, the life of the test connector can be greatly improved.

[0172] In addition, the convex parts (1132a) of the conductive particles (111) can be connected to each other on the concave parts (1132b) to form a space, thereby forming a multi-layer three-dimensional network structure. In this way, when the uneven part (1132) has a three-dimensional network structure as a whole, the bonding strength with the silicone rubber is further improved.

[0173] Fig.13 Shown in Figure 5 and Figure 6 In the first embodiment shown, a highly conductive metal layer (114) is additionally coated on the surface of the uneven portion (1132). Specifically, by additionally plating the surface of the uneven portion (1132) with the same material as the uneven portion (1132) or a highly conductive material having better oxidation resistance, higher hardness, or better conductivity than the uneven portion (1132), the oxidation resistance or wear resistance of the conductive particles (111) can be improved.

[0174] In this case, the high-conductivity metal layer (114) formed on the surface of the uneven portion (1132) is preferably lower than the height and width of the convex portion (1132a). Specifically, when the high-conductivity metal layer (114) completely removes the concave portion (1132b), the adhesive strength with the silicone rubber is reduced, and therefore, the width of the high-conductivity metal layer (114) is preferably in the range of 1 / 10 to 4 / 10 of the height and width of the convex portion (1132a). When the width of the high-conductivity metal layer (114) is too narrow, it is difficult to improve the conductivity, and when the high-conductivity metal layer (114) is too thick, the shape of the convex portion (1132a) is buried inside the high-conductivity metal layer (114), making it difficult to obtain the desired bonding force with the silicone rubber.

[0175] Fig.13 The conductive particles (111) shown in FIG. Fig.14 The method shown in is used to manufacture.

[0176] Specifically, the conductive particles (111) can be manufactured by a method including the following steps: (a) preparing a core particle including a ferromagnetic material (operation S100'); (b) plating a coating layer made of a highly conductive material on the surface of the core particle (operation S200'); (c) forming an uneven portion made of a convex portion (1132a)' and a concave portion (1132b)' by deforming the shape of the coating layer using an etchant (operation S300'); and (d) coating a highly conductive metal layer (114) on the surface of the coating layer (operation S400').

[0177] The conductive particles (111) manufactured as described above are put into liquid silicone rubber, and then cured while a magnetic field is applied to the mold to manufacture a desired connector for testing.

[0178] The conductive particles (111) disclosed herein can be Fig.15 The deformation shown in .

[0179] Specifically, Fig.15 The conductive particle (111') shown in the figure includes a core particle (112") made of a mixture of a ferromagnetic material and a highly conductive material and an uneven portion (113") disposed on the surface of the core particle (112").

[0180] Specifically, in the core particle (112"), a plurality of ferromagnetic particles (1122") are contained in a substrate (1121") made of a highly conductive material. In this case, each of the ferromagnetic particles (1122") may have one or a combination of a spherical shape, a star shape, a column shape, a horn shape, a cross shape, a groove shape, a Lego shape, a spring shape, a tube shape, and a peanut shape.

[0181] In addition, the uneven portion (113") includes a plurality of convex portions (1131") protruding from the outer surface of the core particle and concave portions (1132") disposed between the convex portions (1131"). The uneven portion (113") is formed by an etching process and protrudes above the entire outer surface of the core particle.

[0182] As such, since the substrate (1121") made of a highly conductive material includes ferromagnetic particles (1122"), it is advantageous for the conductive particles (111) to move by magnetic force, and due to the highly conductive material, the conductive performance can be improved.

[0183] Fig.15 The conductive particles (111') shown in FIG. Fig.16 Specifically, the conductive particles (111') can be manufactured by a method including the following steps: preparing a core particle in which a plurality of ferromagnetic particles are distributed in a substrate made of a highly conductive metal (operation S500); deforming the surface of the core particle using an etchant (operation S600); and obtaining a conductive particle in which an uneven portion made of a convex portion and a concave portion is formed on the surface of the core particle (operation S700).

[0184] In addition, a highly conductive metal layer may be coated on the uneven portion of the conductive particles, and the highly conductive metal layer may be manufactured by a method such as Fig.17 as shown in .

[0185] Specifically, conductive particles having an uneven portion coated with a highly conductive metal layer can be manufactured by a method comprising the following steps: preparing a core particle in which a plurality of ferromagnetic particles are distributed in a substrate comprising a highly conductive material (operation S500'); deforming the shape of a surface of the core particle using an etchant so that an uneven portion including convex portions and concave portions is formed on the surface of the core particle (operation S600'); and coating a highly conductive metal layer on the surface of the uneven portion (operation S700').

[0186] Although one or more embodiments have been described with reference to the drawings, it will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the present disclosure as defined by the following claims.

Claims

1. A conductive particle, applied to a test connector, wherein the test connector is arranged between a terminal of a device under test and a pad of a test device to perform an electrical test on the device under test, wherein a plurality of the conductive particles are disposed in the elastic insulating material at each position corresponding to the terminal of the device under test, so as to form a conductive path by pressing the device under test, The conductive particles include: a core particle comprising a ferromagnetic material; as well as A coating layer is disposed on the surface of the core particle, wherein the coating layer comprises a coating body surrounding the core particle and an uneven portion formed on an outer surface of the coating body, and The uneven portion includes a plurality of convex portions protruding from the outer surface of the coating body and concave portions disposed between the convex portions. The uneven portion is formed by an etching process and protrudes above the entire outer surface of the coating body.

2. A conductive particle used in a test connector, wherein the test connector is arranged between a terminal of a device under test and a pad of a test device to perform an electrical test on the device under test. wherein a plurality of the conductive particles are disposed in the elastic insulating material at each position corresponding to the terminal of the device under test, so as to form a conductive path by pressing the device under test, The conductive particles include: a core particle comprising a mixture of ferromagnetic material and highly conductive material; as well as an uneven portion disposed on the surface of the core particle, wherein the uneven portion includes a plurality of convex portions protruding from the outer surface of the core particle and concave portions disposed between the convex portions, and The uneven portion is formed by an etching process and protrudes over the entire outer surface of the core particle. 3 . The conductive particle according to claim 1 , wherein at least one of the convex portions has a shape with a rounded tip. 4 . The conductive particle according to claim 1 , wherein at least one of the convex portions has a shape of a pointed end inclined to one side. 5 . The conductive particle according to claim 1 , wherein tips of two convex portions adjacent to each other among the convex portions are connected to each other to have a ring shape as a whole. The conductive particle according to claim 5 , wherein the uneven portion has a multi-layered three-dimensional network structure. 7 . The conductive particle according to claim 1 , wherein an average height of the convex portions is 50 nanometers to 3 micrometers. The conductive particle according to claim 1 , wherein an average width of the convex portion is 50 nanometers to 3 micrometers. 9 . The conductive particle according to claim 1 , wherein the coating body and the convex portion comprise the same material. 10 . The conductive particle of claim 9 , wherein the coating body and the convex portion include one of gold, silver, palladium, rhodium, and copper, or an alloy thereof.

11. The conductive particle according to claim 1 or 2, wherein a surface of the convex portion is coated with a highly conductive metal layer.

12. The conductive particle according to claim 2, wherein: In the core particle, a plurality of ferromagnetic particles are distributed in a matrix comprising a highly conductive metal.

13. The conductive particles of claim 12, wherein each of the ferromagnetic particles has one or a combination of a spherical shape, a star shape, a column shape, a trumpet shape, a cross shape, a slot shape, a Lego shape, a spring shape, a tube shape, and a peanut shape. The conductive particle according to claim 13 , wherein the base material of the core particle and the convex portion comprise the same material.

15. A method for manufacturing conductive particles, wherein the conductive particles are applied to a test connector, wherein the test connector is arranged between a terminal of a device under test and a pad of a test device to perform an electrical test on the device under test, wherein a plurality of the conductive particles are disposed in the elastic insulating material at each position corresponding to the terminal of the device under test, so as to form a conductive path by pressing the device under test, The method comprises: (a) preparing core particles comprising ferromagnetic material; (b) plating a coating layer comprising a highly conductive material on the surface of the core particle; (c) deforming the shape of the coating layer using an etchant; as well as (d) obtaining conductive particles in which an uneven portion including a convex portion and a concave portion is formed on a surface of the coating layer.

16. A method for manufacturing conductive particles, wherein the conductive particles are applied to a test connector, wherein the test connector is arranged between a terminal of a device under test and a pad of a test device to perform an electrical test on the device under test, wherein a plurality of the conductive particles are disposed in the elastic insulating material at each position corresponding to the terminal of the device under test, so as to form a conductive path by pressing the device under test, The method comprises: (a) preparing core particles comprising ferromagnetic material; (b) plating a coating layer comprising a highly conductive material on the surface of the core particle; (c) deforming the shape of the coating layer using an etchant; and (d) coating a highly conductive metal layer on the surface of the coating layer.

17. A method for manufacturing conductive particles, wherein the conductive particles are applied to a test connector, wherein the test connector is arranged between a terminal of a device under test and a pad of a test device to perform an electrical test on the device under test, wherein a plurality of the conductive particles are disposed in the elastic insulating material at each position corresponding to the terminal of the device under test, so as to form a conductive path by pressing the device under test, (a) preparing a core particle in which a plurality of ferromagnetic particles are distributed in a matrix comprising a highly conductive material; (b) deforming the shape of the surface of the core particle using an etchant; and (c) obtaining conductive particles in which an uneven portion including a convex portion and a concave portion is formed on the surface of the core particle.

18. A method for manufacturing conductive particles, wherein the conductive particles are applied to a test connector, wherein the test connector is arranged between a terminal of a device under test and a pad of a test device to perform an electrical test on the device under test, wherein a plurality of the conductive particles are disposed in the elastic insulating material at each position corresponding to the terminal of the device under test, so as to form a conductive path by pressing the device under test, (a) preparing a core particle in which a plurality of ferromagnetic particles are distributed in a matrix comprising a highly conductive material; (b) deforming the shape of the surface of the core particle using an etchant, thereby forming an uneven portion including a convex portion and a concave portion on the surface of the core particle; and (c) coating a highly conductive metal layer on the surface of the uneven portion. 19 . The method for producing conductive particles according to claim 15 , wherein at least one of the convex portions has a shape with a rounded tip.

20. The method according to any one of claims 15 to 18, wherein at least one of the convex portions has a shape of a pointed tip inclined to one side. 21 . The method for producing conductive particles according to claim 15 , wherein tips of two convex portions adjacent to each other among the convex portions are connected to each other to have a ring shape as a whole. 22 . The method for producing conductive particles according to claim 15 , wherein the uneven portion has a three-dimensional network structure. 23 . The method for producing conductive particles according to claim 15 , wherein an average height and an average width of the convex portions are 50 nanometers to 3 micrometers.

24. A test connector, arranged between a terminal of a device under test and a pad of a test device to perform an electrical test on the device under test, the test connector comprising: a conductive portion in which a plurality of conductive particles are arranged to extend in a thickness direction in an elastic insulating material at each position corresponding to the terminal of the device under test; as well as an insulating portion supporting the conductive portion and insulating the conductive portions from each other, Each of the conductive particles comprises: a core particle comprising a ferromagnetic material; as well as A coating layer is disposed on the surface of the core particle, wherein the coating layer is provided with a plurality of convex portions protruding from the outer surface of the core particle and concave portions provided between the convex portions, and an uneven portion is uniformly formed on the entire outer surface of the core particle by an etching process, and The elastic insulating material penetrates into the concave portions between the convex portions and is firmly coupled to the conductive particles.

25. A test connector, arranged between a terminal of a device under test and a pad of a test device to perform an electrical test on the device under test, the test connector comprising: a conductive portion in which a plurality of conductive particles are arranged to extend in a thickness direction in an elastic insulating material at each position corresponding to the terminal of the device under test; as well as an insulating portion supporting the conductive portion and insulating the conductive portions from each other, Each of the conductive particles comprises: a core particle comprising a mixture of ferromagnetic material and highly conductive material; as well as An uneven portion is formed on the surface of the core particle, wherein the uneven portion includes a plurality of convex portions protruding from the outer surface of the core particle and concave portions formed between the convex portions, and the uneven portion is formed by an etching process and protrudes over the entire outer surface of the core particle, and The elastic insulating material penetrates into the concave portions between the convex portions and is firmly coupled to the conductive particles.

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