ESC joint assembling device

Abstract

The invention relates to the technical field of semiconductor devices, and discloses an ESC joint assembly device, the ESC comprises a chuck main body and a substrate, the device comprises a base provided with a first accommodating cavity used for installing the chuck main body; the cover plate is provided with a second accommodating cavity, and the cover plate is detachably connected with the base; a first base; one end of the rotating shaft is rotationally connected with the first base, and the other end of the rotating shaft is fixedly connected with the base and the cover plate; the second base is arranged opposite to the first base; the output end of the driving motor is fixedly connected with the base and the cover plate, and the driving motor and the rotating shaft are coaxially arranged; and a support assembly. The automatic overturning device has the beneficial effects that an assembly of the chuck body and the base plate can be automatically overturned by 180 degrees, the situation that an adhesive layer is unevenly distributed on the chuck body in the overturning process of the assembly is avoided, the bonding strength between the chuck body and the base plate is improved, and the production efficiency is improved.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor devices, and in particular to an ESC joining and assembling device. Background Art

[0002] The electrostatic adsorption technology used by the electrostatic chuck (ESC) is an advantageous technology that replaces traditional mechanical support and vacuum adsorption methods. It is widely used in semiconductors, panel displays, optics and other fields.

[0003] In the process of assembling the electrostatic suction cup, it is generally necessary to first coat the adhesive material on the chuck body to form an adhesive layer, then place the substrate on the adhesive layer, and bond the chuck body and the substrate. After bonding, the assembly of the chuck body and the substrate needs to be flipped 180° to assemble other parts on the back of the chuck body. In the prior art, the assembly is generally flipped manually. Due to the slow flipping speed and uneven force during the flipping process, it is easy to cause the adhesive layer to be unevenly distributed on the chuck body, generate bubbles, and affect the bonding strength between the chuck body and the substrate. In addition, manual flipping of the assembly is slow, which affects production efficiency. Summary of the invention

[0004] The purpose of the present invention is: the present invention provides an ESC joint assembly device, which can automatically flip the assembly of the chuck body and the substrate 180°, avoid uneven distribution of the adhesive layer on the chuck body during the flipping process of the assembly, improve the bonding strength between the chuck body and the substrate, and improve production efficiency.

[0005] In order to achieve the above object, the present invention provides an ESC joint assembly device, wherein the ESC comprises a chuck body and a substrate, including:

[0006] A base having a first accommodating cavity for mounting the chuck body;

[0007] A cover plate, having a second accommodating cavity, the second accommodating cavity is arranged toward the first accommodating cavity and is used for installing the substrate, and the cover plate is detachably connected to the base;

[0008] First base

[0009] A rotating shaft, one end of which is rotatably connected to the first base, and the other end of which is fixedly connected to the base and the cover plate;

[0010] a second base, arranged opposite to the first base;

[0011] A driving motor, wherein an output end of the driving motor is fixedly connected to the base and the cover plate, and is coaxially arranged with the rotating shaft;

[0012] Support components;

[0013] The driving motor drives the base and the cover to rotate synchronously by 180°, and the supporting assembly is actuated to support the base or the cover.

[0014] Furthermore, a first groove is symmetrically opened on one end surface of the base, and a second groove is symmetrically opened on one end surface of the cover plate. The two first grooves respectively cooperate with one second groove to form two limit grooves, and the output ends of the rotating shaft and the driving motor are provided with T-shaped limit portions corresponding to the limit grooves.

[0015] Furthermore, a buckle groove is provided on the side wall of the cover plate in a circumferential direction toward the base, and a buckle head corresponding to the buckle groove is provided on the base.

[0016] Furthermore, a first gasket is detachably connected to the bottom of the first accommodating cavity, the first gasket is arranged between the base and the chuck body, and a flexible limiting column is circumferentially provided on the outer side of the first gasket and is fitted with an outer wall of the chuck body, and the flexible limiting column is detachably connected to the base.

[0017] Furthermore, a second gasket is detachably connected to the bottom of the second accommodating cavity, and an annular limiting portion is provided on the edge of the second gasket extending toward the base, the annular limiting portion is fitted with the outer wall of the substrate, and the flexible limiting column is fitted with the outer wall of the annular limiting portion.

[0018] Furthermore, the first pad, the second pad, and the flexible limiting column are made of rubber or epoxy resin material.

[0019] Furthermore, a positioning boss is axially provided at the center of the first accommodating cavity and the second accommodating cavity, and a positioning hole corresponding to the positioning boss is provided at the first gasket and the second gasket.

[0020] Furthermore, it also includes a control module, which is electrically connected to the drive motor and the support assembly.

[0021] Furthermore, the support components are in two groups and are arranged opposite to each other, one group of the support components is arranged on the first base, and the other group of the support components is arranged on the second base.

[0022] Furthermore, the support assembly includes a linear motion unit and a support plate, and the linear motion unit can drive the support plate to reciprocate along the axial direction of the rotating shaft.

[0023] Compared with the prior art, an ESC joining and assembling device according to an embodiment of the present invention has the following beneficial effects: the cover plate and the base are detachably fixed, and when the chuck body and the substrate are bonded, the driving motor drives the base and the cover plate to flip 180°, thereby automatically flipping the assembly of the chuck body and the substrate 180°, and the supporting component is actuated to support the cover plate. At this time, the base can be disassembled so that the back of the chuck body faces upward, which is convenient for assembling other parts on the back of the chuck body, avoiding uneven distribution of the adhesive layer on the chuck body caused by flipping, thereby improving the bonding strength between the chuck body and the substrate and improving production efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 It is a schematic structural diagram of an ESC joint assembly device implemented in the present invention;

[0025] Figure 2 It is a partial structural schematic diagram of an ESC joint assembly device implemented in the present invention;

[0026] Figure 3 is a cross-sectional view of an ESC joint assembly device according to the present invention;

[0027] Figure 4 It is an exploded view of the parts of the base and the cover plate of the ESC joint assembly device implemented in the present invention;

[0028] Figure 5 It is a workflow diagram of the ESC joint assembly device implemented in the present invention.

[0029] In the figure, 1, base; 110, first accommodating cavity; 120, first groove; 130, snap head; 2, cover plate; 210, second accommodating cavity; 220, second groove; 230, snap groove; 3, first base; 4, rotating shaft; 5, second base; 6, driving motor; 7, supporting assembly; 71, linear motion unit; 72, supporting plate; 8, first pad; 9, flexible limiting column; 10, second pad; 101, annular limiting part; 11, limiting groove; 12, T-shaped limiting part; 13, positioning boss; 14, positioning hole; a, chuck body; b, adhesive layer; c, substrate. DETAILED DESCRIPTION

[0030] The specific implementation of the present invention is further described in detail below in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.

[0031] In the description of the present invention, it should be understood that the terms "upper", "lower", "front", "back", "inside", "outside", etc. used in the present invention to indicate the orientation or positional relationship are based on the positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the referred devices and elements must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0032] In the description of the present invention, it should be understood that the present invention uses the terms "first", "second", etc. to describe various information, but these information should not be limited to these terms, and these terms are only used to distinguish the same type of information from each other. For example, without departing from the scope of the present invention, "first" information may also be referred to as "second" information, and similarly, "second" information may also be referred to as "first" information.

[0033] like Figures 1 to 5 As shown, an ESC joint assembly device according to a preferred embodiment of the present invention comprises a chuck body a and a substrate c, which is used to bond the chuck body a to the substrate c, and can automatically flip the assembly of the chuck body and the substrate by 180°, so as to facilitate the assembly of other parts on the back of the chuck body. The ESC comprises a base 1, a cover plate 2, a first base 3, a rotating shaft 4, a second base 5, a driving motor 6 and a supporting assembly 7, wherein the base 1 is provided with a first accommodating cavity 110 for installing the chuck body; the cover plate 2 is provided with a second accommodating cavity 210, and the second accommodating cavity 220 is provided. The second accommodating cavity 210 is arranged toward the first accommodating cavity 110, and is used for installing the substrate, and the cover plate 2 is detachably connected to the base 1; one end of the rotating shaft 4 is rotatably connected to the first base 3, and the other end is fixedly connected to the base 1 and the cover plate 2. The rotating shaft 4 can be rotatably connected to the first base 3 by a bearing. At the same time, an annular groove is opened on the rotating shaft 4 for installing a retaining spring to facilitate axial limiting of the rotating shaft 4 when installing; the second base 5 is arranged opposite to the first base 3; the driving motor 6, the output end of the driving motor 6 is fixedly connected to the base 1 and the cover plate 2, and is coaxially arranged with the rotating shaft 4.

[0034] Among them, Figure 5As shown, when the chuck body a and the substrate c need to be bonded, the support component 7 is actuated to support the base 1. After the adhesive layer b is coated, the substrate c and the chuck body a are bonded to form an assembly. The cover plate 2 is placed on top of the substrate, and the cover plate 2 is fixed to the base 1. Subsequently, the assembly of the chuck body and the substrate needs to be flipped 180°. At this time, the support component 7 is reset and the base 1 is not supported. The drive motor 6 drives the base 1 and the cover plate 2 to rotate synchronously by 180°. Subsequently, the support component 7 is actuated to support the cover plate 2. The base 1 is removed, and the other parts on the back of the chuck body a can be assembled to avoid uneven distribution of the adhesive layer b on the chuck body a during the flipping process, thereby improving the bonding strength between the chuck body a and the substrate c and improving production efficiency.

[0035] In some embodiments, in order to make the driving motor 6 cooperate with the rotating shaft 4 to make the base 1 and the cover 2 rotate synchronously, and to meet the requirement of the detachable connection between the cover 2 and the base 1, refer to Figures 1 to 3 The base 1 has a first groove 120 symmetrically formed on one end surface, and the cover 2 has a second groove 220 symmetrically formed on one end surface. The two first grooves 120 cooperate with the second groove 220 to form two limiting grooves 11. The output ends of the rotating shaft 4 and the driving motor 6 are provided with a T-shaped limiting portion 12 corresponding to the limiting groove 11. The T-shaped limiting portion 12 is arranged in the limiting groove 11, which can meet the requirements of assembling the cover 2 and disassembling the base 1.

[0036] At the same time, in order to facilitate the disassembly and assembly between the cover plate 2 and the base 1, in this embodiment, the cover plate 2 is provided with a buckle groove 230 in the circumferential direction downward, and the base 1 is provided with a buckle head 130 corresponding to the buckle groove 230. The cover plate 2 and the base 1 are connected by a buckle structure, which can be quickly disassembled and assembled. In some other embodiments, screws can also be used to detachably connect the base 1 and the cover plate 2.

[0037] Furthermore, in order to prevent the first accommodating cavity 110 from scratching the chuck body when it contacts the end surface of the chuck body, a first gasket 8 is detachably connected to the bottom of the first accommodating cavity 110, and the first gasket 8 is arranged between the base 1 and the chuck body. In order to prevent the chuck body a from moving in the radial direction, a flexible limiting column 9 is arranged on the outer circumference of the first gasket 8 and is fitted with the outer wall of the chuck body. The flexible limiting column 9 is detachably connected to the base 1, and the number of the flexible limiting columns 9 is at least three, and they are evenly distributed in the circumference of the chuck body. In this embodiment, four are preferred.

[0038] Similarly, the second accommodating cavity 210 has a second gasket 10 detachably connected to the bottom thereof, and an annular limiting portion 101 is provided on the edge of the second gasket 10 extending toward the bottom thereof, and the annular limiting portion 101 is in contact with the outer wall of the substrate, and the flexible limiting column 9 is in contact with the outer wall of the annular limiting portion 101, so as to improve the limiting strength of the substrate. Since in the present embodiment, the first gasket 8 and the base 1, the second gasket 10 and the cover plate 2, and the flexible limiting column 9 and the base 1 are all detachably connected, the structures of the first gasket 8, the second gasket 10 and the flexible limiting column 9 can be synchronously adjusted according to the specifications of the ESC coupling device to be produced, so as to be suitable for the production of electrostatic suction cups of different specifications, wherein the first gasket 8 and the base 1, the second gasket 10 and the cover plate 2 can be detachably connected by adhesive bonding or screws, and the flexible connection column and the base 1 can be detachably connected by screws. In some embodiments, in order to facilitate the positioning of the first gasket 8 and the second gasket 10 during installation, refer to Figure 3 A positioning boss 13 is axially arranged at the center of the first accommodating cavity 110 and the second accommodating cavity 210, and a positioning hole 14 corresponding to the positioning boss is arranged at the first liner 8 and the second liner 10. In this embodiment, in order to avoid scratching the surface of the chuck body or the substrate, the first liner 8, the second liner 10, and the flexible limiting column 9 can be made of rubber or epoxy resin material.

[0039] In this embodiment, in order to ensure the stability of the support assembly 7 when supporting the base 1 or the cover plate 2, the support assembly 7 is composed of two groups and is arranged relatively, one group of the support assembly 7 is arranged on the first base 3, and the other group of the support assembly 7 is arranged on the second base 5. Specifically, the support assembly 7 includes a linear motion unit 71 and a support plate 72, and the linear motion unit 71 can drive the support plate 72 to reciprocate along the axial direction of the rotating shaft 4. The linear motion unit 71 can use a linear drive element such as a cylinder or a motor to reduce the design difficulty.

[0040] In some embodiments, in order to facilitate the monitoring and debugging of the working parameters of the drive motor 6 such as the rotation speed and the rotation angle, and to control the support assembly 7, the present invention also includes a control module (not shown in the figure), which is electrically connected to the drive motor 6 and the support assembly 7.

[0041] In summary, an embodiment of the present invention provides an ESC joining and assembly device, in which the cover plate 2 and the base 1 are detachably fixed. After the chuck body and the substrate are bonded, the driving motor 6 drives the base 1 and the cover plate 2 to flip 180°, thereby automatically flipping the assembly of the chuck body and the substrate 180°. The support component 7 is actuated to support the cover plate 2. At this time, the base 1 can be disassembled so that the back of the chuck body faces upward, which is convenient for assembling other parts on the back of the chuck body, avoiding uneven distribution of the adhesive layer on the chuck body caused by flipping, thereby improving the bonding strength between the chuck body and the substrate, and improving production efficiency.

[0042] The above is only a preferred embodiment of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and substitutions can be made without departing from the technical principles of the present invention. These improvements and substitutions should also be regarded as the scope of protection of the present invention.

Claims

1. An ESC assembly device, the ESC comprising a chuck body and a base plate, characterized in that: include A base having a first accommodating cavity for mounting the chuck body; A cover plate, having a second accommodating cavity, the second accommodating cavity is arranged toward the first accommodating cavity and is used for installing the substrate, and the cover plate is detachably connected to the base; First base A rotating shaft, one end of which is rotatably connected to the first base, and the other end of which is fixedly connected to the base and the cover plate; a second base, arranged opposite to the first base; A driving motor, wherein an output end of the driving motor is fixedly connected to the base and the cover plate, and is coaxially arranged with the rotating shaft; Support components; The driving motor drives the base and the cover to rotate synchronously by 180°, and the supporting assembly is actuated to support the base or the cover.

2. The ESC joint assembly device according to claim 1, characterized in that: A first groove is symmetrically opened on one end surface of the base, and a second groove is symmetrically opened on one end surface of the cover plate. The two first grooves cooperate with one second groove to form two limiting grooves, and the output ends of the rotating shaft and the driving motor are provided with T-shaped limiting parts corresponding to the limiting grooves.

3. The ESC joint assembly device according to claim 1, characterized in that: A buckle groove is provided on the side wall of the cover plate in a circumferential direction toward the base, and a buckle head corresponding to the buckle groove is provided on the base.

4. The ESC joint assembly device according to claim 1, characterized in that: A first gasket is detachably connected to the bottom of the first accommodating cavity, and the first gasket is arranged between the base and the chuck body. A flexible limiting column is circumferentially arranged on the outer side of the first gasket and is fitted with the outer wall of the chuck body. The flexible limiting column is detachably connected to the base.

5. The ESC joint assembly device according to claim 4, characterized in that: The bottom of the second accommodating cavity is detachably connected with a second gasket, and an annular limiting portion is provided on the edge of the second gasket extending toward the base. The annular limiting portion is fitted with the outer wall of the substrate, and the flexible limiting column is fitted with the outer wall of the annular limiting portion.

6. The ESC joint assembly device according to claim 5, characterized in that: The first pad, the second pad and the flexible limiting column are made of rubber or epoxy resin material.

7. The ESC joint assembly device according to claim 5, characterized in that: A positioning boss is axially provided at the center of the first accommodating cavity and the second accommodating cavity, and a positioning hole corresponding to the positioning boss is provided at the first gasket and the second gasket.

8. The ESC joint assembly device according to claim 1, wherein: It also includes a control module, which is electrically connected to the drive motor and the support assembly.

9. The ESC joint assembly device according to claim 1, wherein: The supporting components are in two groups and are arranged opposite to each other. One group of the supporting components is arranged on the first base, and the other group of the supporting components is arranged on the second base.

10. The ESC joint assembly device according to claim 1, wherein: The support assembly includes a linear motion unit and a support plate. The linear motion unit can drive the support plate to reciprocate along the axial direction of the rotating shaft.

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