Non-contact vibration isolation positioning method and device

Abstract

The invention discloses a non-contact vibration isolation positioning method and device, belongs to the technical field of vibration isolation, and is used for solving the problems that a contact positioning valve of a vibration reduction and isolation platform transmits external vibration and has small-amplitude oscillation. The non-contact vibration isolation positioning method comprises the steps that a control system obtains height data of an equipment platform through a distance measuring sensor in real time, and when it is judged that the height of the equipment platform deviates from a preset height, an action instruction is sent to an execution unit; and the execution unit executes the action instruction, so that a valve switch of the positioning valve is limited at the inflation and deflation positions, the air spring is inflated or deflated, and the equipment platform is adjusted to the preset height. According to the non-contact vibration isolation positioning method and device, the effect of preventing external vibration from being transmitted to the equipment platform is achieved, and the vibration reduction and isolation performance and reliability are improved.

Description

Technical Field

[0001] The invention belongs to the technical field of vibration isolation, and relates to a non-contact vibration isolation positioning method and device. Background Art

[0002] In the vibration isolation platform system, a two-position three-way valve is usually used to adjust the air pressure inside the air spring to adjust the height of the vibration isolation platform, thereby ensuring the horizontality and stability of the platform and meeting the working requirements of the precision equipment on the platform. This positioning valve for height adjustment is installed in the air spring system and connected to the vibration isolation platform through a sensing rod. The sensing rod will move with the change of platform height, thereby driving the valve to open or close, inputting or exhausting compressed air into or out of the airbag, and restoring the vibration isolation platform to the predetermined height.

[0003] However, due to the direct contact between the sensing rod and the vibration isolation platform, external vibration will be transmitted from here to the vibration isolation system, and the natural frequency of the vibration isolation system will be changed, seriously affecting the vibration isolation performance of the vibration isolation platform. On the other hand, the opening and closing of the valve driven by the connecting rod will inevitably have an adjustment dead zone. When the positioning valve is in the dead zone, it will affect its control of the air spring pressure, which will cause the vibration isolation platform to oscillate up and down slightly, affecting the stability of the platform height. Summary of the invention

[0004] In view of the above analysis, the present invention aims to provide a non-contact vibration isolation positioning method and positioning device to solve the technical problem that the contact positioning valve of the vibration isolation platform transmits external vibrations and has small oscillations.

[0005] The purpose of the present invention is mainly achieved through the following technical solutions.

[0006] A first aspect of the present invention provides a non-contact vibration isolation positioning method, comprising the following steps:

[0007] Step S100, starting the control system;

[0008] Step S200, monitoring the height of the equipment platform: the control system obtains the height data of the equipment platform in real time, and sends an action instruction to the execution unit when it is determined that the height of the equipment platform deviates from the preset height;

[0009] Step S300, adjusting the height of the equipment platform: the execution unit executes the action instruction to inflate or deflate the air spring to adjust the equipment platform to a preset height;

[0010] Step S400, return to step S200.

[0011] Furthermore, in step S200, the height data of the equipment platform is the real-time distance D1 between the equipment platform and the equipment platform measured by the ranging sensor in real time.

[0012] Furthermore, in step S200, the control system makes a judgment based on the preset distance D and the deviation threshold V.

[0013] Furthermore, step S200 includes the following sub-steps:

[0014] S210, the distance measuring sensor measures the real-time distance D1 between the device platform and the device platform in real time, and feeds the real-time distance D1 back to the control system;

[0015] S220, the control system calculates the real-time deviation value V1=D1-D;

[0016] S230: When |V1|>V, the control system sends an action instruction to the execution unit.

[0017] Furthermore, in step S300, the execution unit controls the valve position of the positioning valve to inflate or deflate the air spring.

[0018] Furthermore, the positioning valve adopts a two-position three-way mechanical valve.

[0019] Furthermore, in step S300, when the real-time distance D1 is less than the preset distance D, the valve core of the positioning valve is pressed in; and when the real-time distance D1 is greater than the preset distance D, the valve core of the positioning valve is released and extended.

[0020] Furthermore, the distance measuring sensor adopts a laser distance measuring sensor.

[0021] Further, the execution unit includes a linear motion mechanism driven by a motor; step S300 includes the following sub-steps:

[0022] S310, the motor executes a forward or reverse rotation instruction;

[0023] S320, the motor drives the movable part of the linear motion mechanism to move linearly in a forward or reverse direction;

[0024] S330, the movable part limits the valve switch of the positioning valve and inflates or deflates the pneumatic spring.

[0025] Furthermore, in step S330, the control system controls the displacement L of the movable part according to the data fed back by the displacement sensor to limit the valve switch of the positioning valve; when the displacement of the movable part is L0, L1 and L2, the valve switch of the positioning valve is limited to the closed, inflated and deflated positions respectively.

[0026] Further, sub-step S330 includes the following sub-steps:

[0027] S331, the displacement sensor monitors the displacement L of the movable part in real time and sends the displacement L to the control system;

[0028] S332, the control system compares the displacement L with L1 or L2;

[0029] S333: When L=L1 or L=L2, the control system generates a command for the motor to stop rotating.

[0030] Another aspect of the present invention provides a non-contact vibration isolation positioning device, which is used in any non-contact vibration isolation positioning method of the first aspect of the present invention, and includes a fixed bracket, a positioning valve, a distance measuring sensor and a control system.

[0031] Furthermore, the distance measuring sensor is fixed on a fixed bracket and is located below the equipment platform.

[0032] Furthermore, the fixed bracket includes an adjusting bracket, and the positioning valve is fixed to the fixed bracket through the adjusting bracket. The adjusting bracket can adjust the position of the positioning valve between non-contact positioning and contact positioning with the equipment platform.

[0033] Furthermore, it also includes a displacement sensor or a Hall angle sensor.

[0034] Compared with the prior art, the present invention can achieve at least one of the following beneficial effects:

[0035] 1. The vibration isolation positioning method of the present invention, by using an electric linear motion mechanism to limit the valve switch of the positioning valve in step S300, can achieve rapid response and precise control of the valve switch, thereby making the height adjustment process of the equipment platform fast, precise and stable.

[0036] 2. The vibration isolation positioning method of the present invention uses a ranging sensor to provide real-time feedback of the height data of the equipment platform in step S200, and can obtain the height data of the platform without the need for the equipment platform to contact the mechanical valve. It will not transmit external vibrations to the platform body through the positioning valve, and it also avoids the influence of the positioning valve on the natural frequency of the vibration isolation platform system.

[0037] 3. The vibration isolation positioning method of the present invention, by setting the threshold value V in step S200, can trigger the control system to generate an action instruction when the height of the equipment platform has a small deviation, thereby avoiding the dead zone problem of the two-position three-way valve in the contact vibration isolation positioning method and improving the vibration reduction and isolation performance.

[0038] 4. The vibration isolation positioning method of the present invention can determine the position of the valve switch in real time by controlling the displacement L of the movable part fed back by the Hall sensor in step S300, so that the valve switch can respond quickly and move to the desired position accurately, and switch the working state in real time and quickly, further avoiding the problem of dead zones caused by the contact-type vibration isolation method, achieving the effect of being able to adjust the height of the equipment platform with high precision, and improving the control accuracy of the positioning valve.

[0039] 5. The vibration isolation positioning device of the present invention can adjust the position of the positioning valve in special environments or situations by providing an adjustment bracket, perform contact vibration isolation positioning on the equipment platform, and improve the reliability of the non-contact vibration isolation positioning device.

[0040] In the present invention, the above-mentioned technical solutions can also be combined with each other to achieve more preferred combination solutions. Other features and advantages of the present invention will be described in the subsequent description, and some advantages can become obvious from the description, or can be understood by practicing the present invention. The purpose and other advantages of the present invention can be realized and obtained through the contents particularly pointed out in the embodiments of the description and the drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0041] Figure 1 Schematic diagram of the steps of the vibration isolation positioning method according to Embodiment 1 of the present invention;

[0042] Figure 2 Schematic diagram of the steps of step S200 of the vibration isolation positioning method according to embodiment 1 of the present invention;

[0043] Figure 3 This is a schematic diagram of a closed state of an actuator of the vibration isolation positioning method according to Example 1 of the present invention;

[0044] Figure 4 It is a schematic diagram of the inflation state of the actuator of the vibration isolation positioning method of Example 1 of the present invention;

[0045] Figure 5 It is a schematic diagram of the deflation structure of the actuator of the vibration isolation positioning method according to Example 1 of the present invention;

[0046] Figure 6 Schematic diagram of step S330 of the vibration isolation positioning method according to embodiment 1 of the present invention;

[0047] Figure 7 Schematic diagram of the structure of the vibration isolation positioning device of Example 2 of the present invention;

[0048] Figure 8 This is a schematic structural diagram of the vibration isolation and positioning device of Example 3 of the present invention.

[0049] Reference numerals:

[0050] 1-fixed bracket; 11-adjusting bracket; 12-horizontal straight groove; 2-positioning valve; 21-air source interface; 22-air bag interface; 23-exhaust port; 24-valve core; 25-valve switch; 26-pressure rod; 261-roller; 3-linear motion mechanism; 31-linear motor; 311-screw rod; 312-nut; 32-moving part; 321-pressure block; 4-distance sensor; 5-displacement sensor; 6-control system; 7-equipment platform; 8-air spring; 9-Hall angle sensor. DETAILED DESCRIPTION

[0051] The preferred embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings, wherein the accompanying drawings constitute a part of the present invention and are used together with the embodiments of the present invention to illustrate the principles of the present invention, but are not used to limit the scope of the present invention.

[0052] Example 1

[0053] This embodiment discloses a non-contact vibration isolation positioning method, such as Figure 1 As shown, the following steps are included:

[0054] Step S100, start the control system 6;

[0055] Step S200, monitoring the height of the equipment platform 7: the control system 6 obtains the height data of the equipment platform 7 in real time, and sends an action instruction to the execution unit when it is determined that the height of the equipment platform 7 deviates from the preset height;

[0056] Step S300, adjusting the height of the equipment platform 7: the execution unit executes the action instruction to inflate or deflate the air spring to adjust the equipment platform 7 to a preset height;

[0057] Step S400, return to step S200.

[0058] Specifically, in step S200 , the height data of the device platform 7 is the real-time distance D1 between the device platform 7 and the distance measuring sensor 4 measured in real time.

[0059] The vibration isolation positioning method of this embodiment uses a method in which the height data of the device platform 7 is fed back to the control system 6 by the ranging sensor 4, so that the execution unit does not come into contact with the device platform 7 and can obtain the height change of the device platform 7, thereby enabling the control system 6 to generate a control instruction for adjusting the height of the device platform 7, thereby avoiding the execution unit from transmitting external vibrations to the device platform 7 and improving the vibration isolation effect.

[0060] Preferably, the distance measuring sensor 4 is a laser distance measuring sensor, such as Figure 2 As shown, step S200 includes the following sub-steps:

[0061] S210, the distance measuring sensor 4 measures the real-time distance D1 between the device platform 7 in real time, and feeds back the real-time distance D1 to the control system 6;

[0062] S220, the control system 6 calculates the real-time deviation value V1=D1-D;

[0063] S230: When |V1|>V, the control system 6 sends an action instruction to the execution unit.

[0064] Considering that the distance sensor 4 has a high measurement accuracy, this embodiment uses a laser distance sensor to set a smaller threshold value V in the control system 6, so that when the height of the equipment platform 7 has a small deviation, the control system 6 can be triggered to generate an action instruction, thereby avoiding the problem of a dead zone in the two-position three-way valve in the contact vibration isolation positioning method. The threshold value V can be set as needed, and the smaller the value of the threshold value V, the higher the adjustment accuracy of the equipment platform.

[0065] Furthermore, in the present embodiment, the actuator adopts the method of limiting the valve switch 25 of the mechanical valve by the electric linear motion mechanism 3, and in step S230, the control system sends a forward or reverse motion instruction to the motor of the actuator unit.

[0066] Preferably, the positioning valve 2 in this embodiment adopts a two-position three-way mechanical valve. If rapid exhaust is not required inside, a one-position two-way mechanical valve can also be adopted. Figure 3 , Figure 4 and Figure 5 The diagram shows the distribution of an optional air source interface 21, an air bag interface 22, an exhaust port 23 and a valve switch 25 of a two-position three-way mechanical valve. Figure 3 The valve switch 25 is in the closed position. In step S300, Figure 4 As shown, when the real-time distance D1 < the preset distance D and |V1|>V, the valve core 24 of the positioning valve 2 is pressed in, the actuator inflates the air spring 8, and the height of the equipment platform 7 increases; Figure 5 As shown, when the real-time distance D1>the preset distance D|V1|>V, the valve core 24 of the positioning valve 2 is released and extended, the actuator deflates the air spring 8, and the height of the equipment platform 7 decreases.

[0067] Furthermore, step S300 includes the following sub-steps:

[0068] S310, the motor executes a forward or reverse rotation instruction;

[0069] S320, the motor drives the movable member 32 of the linear motion mechanism 3 to move linearly in a forward or reverse direction;

[0070] S330. The moving part 32 limits the valve switch 25 of the positioning valve 2 and inflates or deflates the air spring 8.

[0071] Specifically, by moving on the linear motion mechanism 3, the moving part 32 can limit the valve switch 25 of the positioning valve 2. When the displacement L of the moving part 32 on the linear motion mechanism 3 is L0, L1, and L2 respectively, the valve switch 25 of the positioning valve 2 is limited to the closed, inflated, and deflated positions respectively. Exemplarily, the value of the displacement L0 of the moving part 32 is set to the origin 0 value. When the valve switch 25 is in the inflated position, the displacement L1 of the moving part 32 is negative; when the valve switch 25 is in the deflated position, the displacement L2 of the moving part 32 is positive.

[0072] Preferably, the linear motion mechanism 3 adopts the method of driving the lead screw by a stepper motor or a servo motor, and a linear motor can also be used. Exemplarily, when the motor rotates forward, the displacement of the moving part is set to be positive, and when the motor rotates backward, the displacement of the moving part is set to be negative. In this example, in step S230, the inflation control instruction is the motor reverse instruction, and the deflation control instruction is the motor forward instruction.

[0073] In step S300 of this embodiment, by executing the forward or reverse instruction of the motor of the linear motion mechanism 3, the switching action executed by the valve switch 25 can be controlled, so that the height adjustment process of the equipment platform 7 is fast and stable in response, and the control process is simple and efficient.

[0074] Furthermore, in step S300, the control system 6 determines whether the valve switch 25 is in the closed, inflated, and deflated positions by obtaining the displacement L of the moving part 32 feedback by the displacement sensor 5 in real time.

[0075] Specifically, as Figure 6 shown, step S300 includes the following sub-steps:

[0076] S331. The displacement sensor 5 monitors the displacement L of the moving part 32 in real time and sends the displacement L to the control system 6;

[0077] S332. The control system 6 compares the displacement L with the inflation displacement L1 or the deflation displacement L2;

[0078] S333. When L = L1 or L = L2, the control system 6 generates an instruction for the motor to stop rotating;

[0079] S334. The control system 6 calculates the real-time deviation value V1 = D1 - D. When |V1| < V, the control system 6 sends an action instruction for the motor to rotate forward or backward to the execution unit;

[0080] S335. The motor executes the action instruction of rotating forward or backward;

[0081] S336: When L=L0, the control system 6 generates an instruction for the motor to stop rotating.

[0082] In step S300 of the present embodiment, the control system 6 determines the position of the valve switch 25 in real time through the displacement L of the movable part 32 fed back by the displacement sensor 5, so that the valve switch 25 can respond quickly and move to the desired position accurately, and switch the working state in real time and quickly, further avoiding the problem of dead zones caused by the contact-type vibration isolation method, achieving the effect of being able to adjust the height of the equipment platform with high precision, and improving the control accuracy of the positioning valve 2.

[0083] The non-contact vibration isolation positioning method of this embodiment obtains the height information of the equipment platform 7 by using the distance measuring sensor 4, and drives the valve switch 25 of the positioning valve 2 to switch positions by controlling the movement of the linear motion mechanism 3, thereby realizing the inflation and deflation of the air spring 8, thereby completing the height positioning and adjustment of the equipment platform 7. Since the positioning valve and other components in the positioning device do not come into contact with the equipment platform, the external vibration will not be transmitted to the platform body through the positioning valve, and the influence of the positioning valve on the natural frequency of the vibration reduction and isolation platform system is also avoided.

[0084] The non-contact vibration isolation positioning method of this embodiment can not only be used to adjust the height of the equipment platform 7, but also can be used to adjust the level of the equipment platform 7 when multiple air springs 8 are arranged.

[0085] Example 2

[0086] This embodiment discloses a non-contact vibration isolation positioning device, which is used in the non-contact vibration isolation positioning method of embodiment 1.

[0087] like Figure 7 As shown, the vibration isolation positioning device of this embodiment includes a fixed bracket 1, a positioning valve 2, a linear motion mechanism 3, a distance measuring sensor 4, a displacement sensor 5 and a control system 6.

[0088] The fixed bracket 1 is fixed on the ground or the support column at the bottom of the air spring, and does not come into contact with the equipment platform 7. The positioning valve 2, the linear motion mechanism 3, the distance sensor 4 and the control system 6 are installed on the fixed bracket 1, the distance sensor 4 is located below the equipment platform 7, and the positioning valve 2, the linear motion mechanism 3 and the control system 6 can be arranged around the equipment platform 7.

[0089] like Figure 7As shown, preferably, the positioning valve 2 is a two-position three-way mechanical valve, including an air source interface 21, an airbag interface 22, an exhaust port 23 and a valve core 24. The air source interface 21 is connected to the high-pressure air source through a pipeline, the airbag interface 22 is connected to the airbag of the air spring through a pipeline, and the exhaust port 23 is connected to the outside atmosphere. A valve switch is provided inside the valve core 24. When the valve core 24 is extended, the airbag interface 22 is connected to the exhaust port 23, and the positioning valve 2 is in the exhaust state; when the valve core 24 is fully pressed down, the airbag interface 22 is connected to the air source interface 21, and the positioning valve 2 is in the inflation state; when the valve core 24 is in the middle position, the air source interface 21, the airbag interface 22 and the exhaust port 23 are all in a closed state that is not connected to each other.

[0090] like Figure 7 As shown, the linear motion mechanism 3 includes a screw linear motor 31 and a movable part 32. The screw linear motor 31 includes a screw 311 and a nut 312. When the screw linear motor 31 rotates, the nut 312 can move linearly along the screw 311. The movable part 32 is a hollow rod structure. The movable part 32 is sleeved on the outer periphery of the screw 311, one end of which is fixedly connected to the nut 312, and the other end is provided with a pressure block 321. The linear motion mechanism 3 can also be a linear motor.

[0091] like Figure 7 As shown, the positioning valve 2 and the linear motion mechanism 3 are both arranged horizontally, and the valve core 24 and the pressure block 321 are opposite. When the movable member 32 is extended, the pressure block 321 can press the valve core 24 to move; when the movable member 32 is contracted, the pressure block 321 can separate from the valve core 24, releasing the pressure on the valve core, and the valve core 24 can extend outward, and the positioning valve 2 is in an exhaust state.

[0092] The distance sensor 4 is fixed on the fixed bracket 1 and is used to measure the height of the equipment platform 7. Preferably, the distance sensor 4 is a laser distance sensor, which is located below the equipment platform 7 and can feed back the real-time distance D1 between the sensor probe and the bottom surface of the equipment platform 7 to the control system 6 in real time.

[0093] The displacement sensor 5 is used to monitor the real-time displacement L of the movable part 32 and the pressure block 321 . Preferably, the displacement sensor 5 is a displacement sensor installed on the movable part 32 and can feed back the real-time displacement L data to the control system 6 .

[0094] The control system 6 is composed of a height reading unit, a motor drive unit, an angle / displacement monitoring unit, a power management unit, a communication interface and a core control unit. The height reading system reads the height data obtained by the distance measuring sensor 4 and transmits it to the control chip; the motor drive system receives the drive command from the control chip to control the movement of the linear motion mechanism 3 and monitor the load current of the motor; the angle / displacement detection system reads the position data from the displacement sensor 5 and transmits it to the control chip; the power management system is responsible for supplying power to the entire system; the communication interface is responsible for the signal exchange between the positioning valve and the outside world; the control chip collects data from the height reading and angle / displacement detection systems, performs relevant algorithm calculation analysis, issues a motor displacement command to the motor drive unit, and realizes data exchange with the outside world.

[0095] It should be noted that the control system 6 of the present invention is a prior art and does not fall within the technical improvement scope of the present invention.

[0096] Example 3

[0097] The non-contact vibration isolation positioning device disclosed in this embodiment is different from that in Embodiment 2 in that the position of the positioning valve 2 can be adjusted. When the electric system cannot work normally, the position of the positioning valve 2 is adjusted so that the vibration isolation positioning device can perform contact-type height adjustment and positioning of the equipment platform.

[0098] For example, Figure 8 As shown, the positioning valve 2 and the linear motion mechanism 3 are both arranged perpendicular to the equipment platform 7, and the fixed height of the positioning valve 2 is at the height of the contact-type vibration isolation positioning.

[0099] like Figure 8 As shown, the fixed bracket 1 includes an adjusting bracket 11, and the positioning valve 2 is fixed on the adjusting bracket 11. The horizontal position of the adjusting bracket 11 on the fixed bracket 1 can be adjusted. When the electric system of the vibration isolation positioning device cannot work normally, the horizontal position of the adjusting bracket 11 is adjusted toward the equipment platform so that the positioning valve 2 is located below the equipment platform 7, so that the positioning valve 2 can contact the equipment platform 7. When the height of the equipment platform 7 changes, the valve core 24 is limited, so that the air spring 8 is inflated and deflated, so as to achieve the effect of mechanically adjusting the height of the equipment platform.

[0100] For example, Figure 8As shown, a horizontal straight groove 12 is provided on the fixed bracket 1, and the bottom of the adjusting bracket 11 is fixed to the horizontal straight groove 12 by bolts. When the vibration isolation positioning device needs to be switched to the mechanical positioning mode, it is only necessary to move the adjusting bracket 11 along the horizontal straight groove 12 toward the equipment platform 7, and then re-tighten the bolts to fix the adjusting bracket 11 to complete the switching. The operation is convenient and quick, so that the non-contact vibration isolation positioning device of this embodiment can still ensure normal vibration isolation positioning work in special environments or situations, thereby improving the reliability of the vibration isolation positioning device.

[0101] For example, Figure 8 As shown, the positioning valve 2 adopts a lever roller type mechanical valve, and also includes a pressure rod 26, and a roller 261 is provided at the end of the pressure rod 26. When the adjustment bracket 11 adjusts the positioning valve 2 to the bottom of the equipment platform 7, the equipment platform 7 performs lever-type pressure on the pressure rod 26 when the height changes, thereby limiting the valve core 24. The pressure rod 26 is installed with a Hall angle sensor 9 on the rotating shaft on the positioning valve 2. The Hall angle sensor 9 can feed back the angle data of the pressure rod 26 to the control system 6 in real time, so that the control system 6 can obtain the real-time displacement L through calculation in real time.

[0102] The above description is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any changes or substitutions that can be easily conceived by any technician familiar with the technical field within the technical scope disclosed by the present invention should be covered within the protection scope of the present invention.

Claims

1. A non-contact vibration isolation positioning method, characterized in that: The following steps are involved: Step S100, start the control system (6); Step S200, monitoring the height of the equipment platform (7): the control system (6) acquires the height data of the equipment platform (7) in real time, and when it is determined that the height of the equipment platform (7) deviates from the preset height, sends an action instruction to the execution unit; Step S300, adjusting the height of the equipment platform (7): the execution unit executes the action instruction, inflates or deflates the air spring (8), and adjusts the equipment platform (7) to a preset height; Step S400, return to step S200.

2. The non-contact vibration isolation positioning method according to claim 1, characterized in that: In the step S200, the height data of the equipment platform (7) is the real-time distance D1 between the equipment platform (7) and the distance measuring sensor (4) measured in real time.

3. The non-contact vibration isolation positioning method according to claim 2, characterized in that: In step S200, the control system (6) makes a judgment based on a preset distance D and a deviation threshold V.

4. The non-contact vibration isolation positioning method according to claim 3, characterized in that: The step S200 includes the following sub-steps: S210, the distance measuring sensor (4) measures the real-time distance D1 between the device platform (7) and the device platform (7) in real time, and feeds back the real-time distance D1 to the control system (6); S220, the control system (6) calculates the real-time deviation value V1=D1-D; S230, when |V1|>V, the control system (6) sends an action instruction to the execution unit.

5. The non-contact vibration isolation positioning method according to claim 1, characterized in that: In step S300, the execution unit controls the valve position of the positioning valve (2) to inflate or deflate the air spring (8), wherein the positioning valve (2) is a mechanical valve.

6. The non-contact vibration isolation positioning method according to claim 5, characterized in that: The positioning valve (2) is a two-position three-way mechanical valve.

7. The non-contact vibration isolation positioning method according to claim 6, characterized in that: In the step S300, when the real-time distance D1 is less than the preset distance D, the valve core (24) of the positioning valve (2) is pressed in; when the real-time distance D1 is greater than the preset distance D, the valve core (24) of the positioning valve (2) is released and extended.

8. The non-contact vibration isolation positioning method according to any one of claims 2 to 7, characterized in that: The distance measuring sensor (4) is a laser distance measuring sensor.

9. A non-contact vibration isolation positioning device, characterized in that: The non-contact vibration isolation positioning method as claimed in any one of claims 1 to 8 comprises a fixed bracket (1), a positioning valve (2), a distance measuring sensor (4) and a control system (6).

10. The non-contact vibration isolation positioning device according to claim 9, characterized in that: The distance measuring sensor (4) is fixed on the fixing bracket (1) and is located below the equipment platform (7).

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