Treatment method of methyl chlorosilane production tail gas

Abstract

The invention provides a methyl chlorosilane production tail gas treatment method which comprises the following steps: S1, carrying out incineration treatment on methyl chlorosilane production tail gas to obtain first flue gas with the temperature of 1100-1250 DEG C; s2, waste heat recovery treatment is conducted on the first flue gas, and second flue gas with the temperature ranging from 540 DEG C to 660 DEG C is obtained; s3, the second flue gas is sequentially subjected to quenching cooling treatment and gas-solid separation treatment, and third flue gas with the temperature of 180-250 DEG C is obtained; s4, the third flue gas is subjected to cooling absorption treatment, acid washing treatment and alkali washing treatment, and neutral flue gas at the temperature of 30-60 DEG C is obtained; s5, the neutral flue gas is sequentially subjected to wet electric dust removal treatment and heating treatment, and fourth flue gas with the temperature of 180-220 DEG C is obtained; s6, the fourth flue gas is subjected to SCR denitration treatment in sequence, and fifth flue gas is obtained; s7, the fifth flue gas is subjected to adsorption treatment to obtain treated tail gas, and the treated tail gas is emptied through a high point; the methyl chlorosilane tail gas treatment capacity is improved, and the equipment operation period is prolonged.

Description

Technical Field

[0001] The invention belongs to the technical field of tail gas treatment, and specifically relates to a method for treating tail gas produced by methylchlorosilane. Background Art

[0002] The production process of methylchlorosilane produces a large amount of tail gas, which is difficult to treat. The waste gas mainly contains methyl chloride, nitrogen, methylchlorosilane and a small amount of hydrocarbons. These tail gases need to be treated before they can be discharged. The conventional treatment methods for methylchlorosilane waste gas include water washing process, adsorption process and incineration process.

[0003] Although the water washing process is low-cost, it will produce a large amount of wastewater, and the wastewater treatment requires a high cost. In addition, some of the waste gas generated by methylchlorosilane is incompatible and unreactive with water. After discharge, there is a peculiar smell in the air, which pollutes the environment. The absorption effect of the adsorption process is limited, and only part of the methylchlorosilane components can be effectively recovered. The adsorbent in the adsorption process is difficult to desorb, difficult to regenerate, and has high investment costs. The adsorption effect of the adsorbent is not ideal, so the waste gas is not completely adsorbed and directly discharged to pollute the environment. The incineration process is currently a process method for effectively treating the tail gas of methylchlorosilane production at home and abroad. The waste gas is treated through a series of processes such as high-temperature incineration, waste heat recovery, flue gas quenching, cooling absorption, water washing and alkali washing, wet electrostatic precipitator, denitrification, and high-point venting. This process can effectively reduce the amount of dioxins produced, but the waste gas discharged by this process has a high oxygen content, a lot of dust in the tail gas, and molten silica will be produced during incineration. These molten silica will accumulate and become larger solid particles in the quenching tower, blocking the equipment and damaging the equipment, resulting in the inability to operate the process normally. Therefore, the conventional treatment method for methylchlorosilane tail gas in the prior art cannot meet the demand.

[0004] To this end, the present invention currently proposes a novel process for incineration treatment of tail gas from the production of methylchlorosilane to solve the above-mentioned problem. Summary of the invention

[0005] The invention provides a method for treating tail gas produced by methylchlorosilane, which is used to solve the problems in the prior art that the tail gas produced by methylchlorosilane is still difficult to meet the standards after being treated, and the treatment equipment is easily blocked and damaged, which affects the operation of the equipment and has low treatment efficiency.

[0006] The present invention provides a method for treating tail gas from the production of methylchlorosilane, comprising the following steps: S1: Incinerate the tail gas produced by methylchlorosilane to obtain the first flue gas with a temperature of 1100-1250°C; S2: recovering waste heat from the first flue gas to obtain a second flue gas with a temperature of 540-660° C.; S3: performing rapid cooling and gas-solid separation on the second flue gas in sequence to obtain a third flue gas with a temperature of 180-250° C.; S4: performing cooling absorption treatment, acid washing treatment and alkali washing treatment on the third flue gas to obtain neutral flue gas at 30-60° C.; S5: sequentially subjecting the neutral flue gas to wet electrostatic precipitator treatment and heating treatment to obtain fourth flue gas with a temperature of 180-220° C.; S6: performing SCR denitration treatment on the fourth flue gas in sequence to obtain fifth flue gas; S7: performing adsorption treatment on the fifth flue gas to obtain treated tail gas, which is discharged through a high point.

[0007] Compared with the prior art, the advantages of the present invention are as follows: the production tail gas of methylchlorosilane is fully burned through incineration treatment, hydrogen chloride, nitrogen oxides, silicon dioxide powder, etc. in the flue gas are fully removed, the waste heat can be effectively recovered, energy is saved, and the equipment operation cycle is long; large silicon dioxide particles are effectively removed through rapid cooling treatment, the generation of silicon dioxide particles is avoided, and the blockage and damage of silicon dioxide particles to equipment are reduced; the oxygen content and nitrogen oxide content of the exhaust gas are effectively reduced through wet electrostatic precipitator and SCR denitrification, thereby improving the treatment capacity of methylchlorosilane tail gas and the equipment operation cycle.

[0008] Furthermore, the temperature of the tail gas produced by methylchlorosilane is 20-30°C, the pressure is 0.03-0.1 MPaG, and the flow rate is 300-750 Nm 3 / h.

[0009] Furthermore, natural gas is used as fuel in the incineration process, and the amount of natural gas added is 200~450Nm 3 / h.

[0010] Furthermore, process water is involved in the waste heat recovery process; wherein the amount of water added is 2000-4800 kg / h.

[0011] The pressure of the steam drum in the waste heat recovery process is 0.8~1.1MPaG.

[0012] Furthermore, the rapid cooling treatment includes: making the second flue gas contact with compressed air, water and dispersant in reverse directions respectively.

[0013] Furthermore, the dispersant is AKN-210 dispersant.

[0014] Furthermore, the acid washing treatment uses a hydrochloric acid aqueous solution with a mass percentage of 6-10%; the alkali washing treatment uses a sodium hydroxide aqueous solution with a mass percentage of 10-20%.

[0015] Furthermore, the pressure of the wet electrostatic precipitator treatment is 10~20kPa.

[0016] Furthermore, a urea solution is made to participate in the SCR denitration treatment; wherein the mass concentration of urea in the urea solution is 40-50%, and the mass ratio of the urea solution to the fourth flue gas is (0.01-0.02):1.

[0017] Furthermore, the adsorbent used in the adsorption treatment includes activated carbon. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 This is a schematic diagram of a device for treating tail gas from the production of methylchlorosilane in one embodiment of the present invention.

[0019] Description of reference numerals: 01. Gas buffer tank; 02. Incineration unit; 03. Waste heat recovery unit; 04. First nitrogen exchange chamber; 05. Blowdown expansion tank; 06. Steam drum; 07. Rust removal unit; 08. Rapid cooling unit; 09. Gas-solid separation unit; 10. Second nitrogen exchange chamber; 11. Backflush gas bag; 12. Cooling absorption unit; 13. Hydrochloric acid absorption unit; 14. Dilute acid storage tank; 15. Alkaline washing unit; 16. Neutralization liquid tank; 17. Wet electrostatic precipitator unit; 18. Heating unit; 19. Urea ammonia production skid; 20. SCR denitrification unit; 21. Adsorption unit. DETAILED DESCRIPTION

[0020] In order to make the purpose, technical solutions and advantages of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in combination with the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0021] The present invention provides a method for treating tail gas produced by methylchlorosilane, comprising the following steps: S1: Incinerate the tail gas produced by methylchlorosilane to obtain the first flue gas with a temperature of 1100-1250°C; S2: recovering waste heat from the first flue gas to obtain a second flue gas with a temperature of 540-660°C; S3: performing rapid cooling and gas-solid separation on the second flue gas in sequence to obtain a third flue gas with a temperature of 180-250°C; S4: performing cooling absorption treatment, acid washing treatment and alkali washing treatment on the third flue gas to obtain neutral flue gas at 30-60°C; S5: performing wet electrostatic precipitator treatment and heating treatment on the neutral flue gas in sequence to obtain a fourth flue gas with a temperature of 180-220° C.; S6: performing SCR denitration treatment on the fourth flue gas in sequence to obtain fifth flue gas; S7: performing adsorption treatment on the fifth flue gas to obtain treated tail gas, which is discharged through a high point.

[0022] The invention provides a method for treating tail gas produced by methylchlorosilane. The method can fully burn the tail gas produced by methylchlorosilane through incineration treatment, fully remove hydrogen chloride, nitrogen oxides, silicon dioxide powder and the like in the flue gas, effectively recover the waste heat, save energy and prolong the equipment operation cycle. The method can effectively remove large silicon dioxide particles through rapid cooling treatment, avoid the generation of silicon dioxide particles and reduce the blockage and damage of equipment by silicon dioxide particles. The method can effectively reduce the oxygen content and nitrogen oxide content of the exhaust gas through wet electrostatic precipitator and SCR denitrification, thereby improving the treatment capacity of the tail gas of methylchlorosilane and the equipment operation cycle.

[0023] In a specific embodiment, the temperature of the tail gas produced by methylchlorosilane is 20-30°C, the pressure is 0.03-0.1 MPaG, and the flow rate is 300-750 Nm 3 / h.

[0024] In a specific embodiment, natural gas is used as fuel in the incineration process, and the amount of natural gas added is 200~450Nm 3 / h.

[0025] In a specific embodiment, the process water is used for waste heat recovery; the process water is stored in a steam drum, and after heat exchange with the first flue gas, the heat of the first flue gas increases the water temperature, and the water absorbs the heat to become steam and returns to the steam drum for storage. Optionally, the steam can also return to the steam main for recycling. Furthermore, phosphate is added to the steam drum for rust removal.

[0026] Specifically, the amount of water added in the waste heat recovery process is 2000~4800kg / h; the pressure of the steam drum in the waste heat recovery process is 0.8~1.1MPaG.

[0027] Furthermore, it also includes: introducing nitrogen into the solid phase material separated in the waste heat recovery process to separate the hydrogen chloride gas adsorbed by the silicon dioxide fine powder, allowing the hydrogen chloride gas to participate in the gas-solid separation process, and the carbon dioxide fine powder separated from the hydrogen chloride is discharged into a conveyor and sent to the ash storage for packaging treatment.

[0028] Specifically, the rapid cooling treatment includes: making the second flue gas contact with compressed air, water and a dispersant in reverse directions respectively, wherein the dispersant may be AKN-210 dispersant.

[0029] Optionally, the rapid cooling treatment is carried out in a rapid cooling tower, the top of which is provided with a spray device and a circular hole distributor is provided inside.

[0030] Through rapid cooling and cooling treatment, the silicon dioxide in the flue gas is further separated, and there is less agglomeration of molten silicon dioxide. The flue gas after rapid cooling and cooling is further subjected to gas-solid separation treatment, which can further separate the particles in the flue gas, discharge them into the conveyor, and centrally send them to the ash storage for packaging treatment; the third flue gas after dust removal is further treated later.

[0031] In a specific embodiment, the gas-solid separation process is performed in a dust removal chamber, and further includes blowing nitrogen into the dust removal chamber to remove particles or impurities attached to the inner wall of the dust removal chamber.

[0032] In the cooling and absorption treatment, circulating cooling water is introduced to cool the third flue gas. The circulating cooling water absorbs hydrogen chloride and other impurities in the flue gas and turns into acid liquid which is sent to the dilute acid storage tank for preparation and recycling.

[0033] After cooling and absorption treatment, the temperature of the flue gas will reach 30~60℃. After acid washing, the hydrogen chloride is further removed. The acid liquid obtained by hydrochloric acid absorption treatment is sent to the dilute acid storage tank for deployment and recycling.

[0034] Furthermore, the flue gas treated with acid washing enters the alkaline washing treatment, and the alkaline solution further removes the hydrogen chloride and alcohol therein, and absorbs the acidic liquid in the flue gas. The alkaline solution becomes neutral and is discharged into the neutralization liquid tank.

[0035] Optionally, the acid washing treatment uses a hydrochloric acid aqueous solution with a mass percentage of 6-10%; the alkali washing treatment uses a sodium hydroxide aqueous solution with a mass percentage of 10-20%.

[0036] In a specific embodiment, the pressure of the wet electrostatic precipitator treatment is 10-20 kPa.

[0037] Furthermore, the urea solution is involved in the SCR denitration process, and the ammonia generated by the thermal decomposition of urea is used as a reducing agent for denitration; wherein the mass concentration of urea in the urea solution is 40-50%, and the mass ratio of urea to the fourth flue gas is (0.01-0.02):1.

[0038] Furthermore, the adsorbent used in the adsorption treatment includes activated carbon.

[0039] It can be understood that by further defining the execution parameters of each step, the treatment effect of methylchlorosilane tail gas can be further improved, and pollutants such as hydrogen chloride, nitrogen oxides, silicon dioxide particles and dioxins in the flue gas can be further removed.

[0040] The present invention does not limit the processing device used to perform the method for processing tail gas from the production of methylchlorosilane. Figure 1 , optionally, including an incineration unit 02, a waste heat recovery unit 03, a quenching unit 08, a gas-solid separation unit 09, a cooling absorption unit 12, a hydrochloric acid absorption unit 13, an alkali washing unit 15, a wet electrostatic precipitator unit 17, a heating unit 18, an SCR denitrification unit 20 and an adsorption unit 21; Among them, the tail gas from the production of methylchlorosilane enters the treatment device through the inlet of the incineration unit 02, the outlet of the incineration unit 02 is connected to the inlet of the waste heat recovery unit 03, the outlet of the waste heat recovery unit 03 is connected to the inlet of the quenching unit 08, the outlet of the quenching unit 08 is connected to the inlet of the gas-solid separation unit 09, the outlet of the gas-solid separation unit 09 is connected to the inlet of the cooling absorption unit 12, the outlet of the cooling absorption unit 12 is connected to the inlet of the hydrochloric acid absorption unit 13, the outlet of the hydrochloric acid absorption unit 13 is connected to the inlet of the alkali washing unit 15, the outlet of the alkali washing unit 15 is connected to the inlet of the wet electrostatic precipitator unit 17, the outlet of the wet electrostatic precipitator unit 17 is connected to the inlet of the heating unit 18, the outlet of the heating unit 18 is connected to the inlet of the SCR denitrification unit 20, the outlet of the SCR denitrification unit 20 is connected to the inlet of the adsorption unit 21, and the outlet of the adsorption unit 21 is used to output the treated tail gas.

[0041] The present invention does not specifically limit the form of each unit, and any device that can achieve its function can be used. Optionally, the incineration unit 02 includes a burner incinerator, the waste heat recovery unit 03 includes a waste heat boiler, the gas-solid separation unit 09 includes a dust removal chamber, the cooling absorption unit 12 includes a cooling absorption tower, the hydrochloric acid absorption unit 13 includes a hydrochloric acid absorption tower, the alkali washing unit 15 includes an alkali washing tower, the wet electrostatic precipitator unit 17 includes a wet electrostatic precipitator, and the heating unit 18 includes a flue burner.

[0042] In a specific embodiment, a gas buffer tank 01 is further included, and the tail gas produced by methylchlorosilane is connected to the inlet of the incineration unit 02 through the gas buffer tank 01.

[0043] In a specific embodiment, a steam drum 06 is also included, and the steam drum 06 is used to provide cooling to the waste heat recovery unit 03. The water in the steam drum 06 is converted into steam after heat exchange with the flue gas, and the steam is stored and reused.

[0044] In a specific embodiment, a rust removal unit 07 is further included. The rust removal unit 07 is used to store phosphate. The outlet of the rust removal unit 07 is connected to the inlet of the steam drum 06 .

[0045] In a specific embodiment, it also includes a first nitrogen exchange bin 04, the solid phase outlet of the waste heat recovery unit 03 is connected to the inlet of the first nitrogen exchange bin 04, and the solid phase outlet of the first nitrogen exchange bin 04 is used to output silicon dioxide powder; the gas phase outlet of the first nitrogen exchange bin 04 is connected to the inlet of the gas-solid separation unit 09.

[0046] In a specific embodiment, it also includes a sewage expansion tank 05, and the waste outlet for waste heat recovery treatment is connected to the inlet of the sewage expansion tank 05.

[0047] In a specific embodiment, a second nitrogen exchange chamber 10 is further included, and the solid phase outlet of the gas-solid separation unit 09 is connected to the inlet of the second nitrogen exchange chamber 10, and the solid phase outlet of the second nitrogen exchange chamber 10 is used to output silicon dioxide powder.

[0048] In a specific embodiment, a back-blowing air bag 11 is further included, and the back-blowing air bag 11 is used to output nitrogen, and the outlet of the back-blowing air bag 11 is connected to the nitrogen inlet of the gas-solid separation unit 09. Optionally, the back-blowing air bag 11 includes a carbon steel tank for storing nitrogen.

[0049] In a specific embodiment, it also includes a dilute acid storage tank 14, and the acid liquid outlet of the cooling absorption unit 12 and the acid liquid outlet of the hydrochloric acid absorption unit 13 are respectively connected to the inlet of the dilute acid storage tank 14; it also includes a neutralization liquid tank 16, and the neutralization liquid outlet of the alkali washing unit 15 is connected to the inlet of the neutralization liquid tank 16.

[0050] In a specific embodiment, it also includes a urea-ammonia-making skid 19, and the ammonia outlet of the urea-ammonia-making skid 19 is connected to the flue gas inlet treated by the SCR denitration reactor.

[0051] In a specific embodiment, the quenching unit 08 includes a quenching tower, a spray device is provided on the top of the quenching tower, and a circular hole distributor is provided inside. The circular hole distributor makes the dispersant and water more dispersed and mixed with the flue gas evenly and fully, further reducing the generation of large silica particles and better cooling the flue gas.

[0052] Hereinafter, the method for treating tail gas from the production of methylchlorosilane provided by the present invention is described in detail through specific examples. Example 1

[0053] The tail gas from methylchlorosilane production is transported to the tail gas buffer tank through a pipeline to adjust the pressure. The pressure is 0.1MPa (G) and the flow rate is 700Nm 3 / h, temperature is 20~30℃.

[0054] The tail gas of methylchlorosilane production after flow adjustment enters the burner incinerator for incineration at 1150℃. The pressure and temperature of the incinerator are controlled by the combustion-supporting fan and the induced draft fan. 450Nm3 / h natural gas as a permanent lamp and fuel.

[0055] The first flue gas with a temperature of 1100~1250℃ after incineration enters the waste heat boiler. After adding 4800kg / h process water, the first flue gas and process water are heat exchanged for waste heat recovery treatment to obtain 1.1MPa (G) steam. The recovered steam is incorporated into the steam network for reuse; after the waste heat recovery treatment, the flue gas temperature is reduced to 540-660℃ to obtain the second flue gas.

[0056] The second flue gas enters the quenching tower, combines with the sprayed water from above and is distributed in the tower. After mixing with the dispersant, it is quenched and cooled to a temperature of 180-250°C to obtain the third flue gas. Most of the hydrogen chloride in the quenched and cooled third flue gas is absorbed, and the silica powder is collected. After the quenching and cooling third flue gas enters the dust removal chamber for gas-solid separation, and the particulate matter in the flue gas is collected again. Finally, the silica powder and particulate matter are packaged by a conveyor.

[0057] The third flue gas then enters the cooling absorption tower and the hydrochloric acid absorption tower in turn for cooling absorption treatment and hydrochloric acid absorption treatment to further absorb the hydrogen chloride in the flue gas, and the obtained 6-10% hydrochloric acid solution is continued to be sent to the cooling absorption tower for reuse; the flue gas then enters the alkali washing tower for alkali washing treatment to obtain neutral flue gas at room temperature.

[0058] The neutral flue gas at room temperature enters the wet electrostatic precipitator unit through the induced draft fan to remove the remaining silica powder and particulate matter in the gas phase under 10kPa conditions, and then enters the flue burner for heating treatment, raising the temperature to 180-220°C to obtain the fourth flue gas.

[0059] The fourth flue gas enters the SCR reactor for SCR denitration treatment to reduce the nitrogen oxide content in the flue gas to obtain the fifth flue gas; After the fifth flue gas is sent to the adsorption unit for adsorption treatment, the treated tail gas obtained is sent to a high point of the chimney for discharge.

[0060] Test Example 1 The flue gas emission monitoring was performed on the treated tail gas obtained in Example 1, and the results are shown in Table 1.

[0061] Table 1 Serial number project Detection value Standard value unit 1 <![CDATA[NO X ]]> 70 250 <![CDATA[mg / m 3 ]]> 2 CO Not detected 80 <![CDATA[mg / m 3 ]]> 3 Hydrogen chloride 0.1 50 <![CDATA[mg / m 3 ]]> 4 Dioxins 0.15 0.5 <![CDATA[TEQng / m 3 ]]> 5 Particles 0.21 20 <![CDATA[mg / m 3 ]]> 6 <![CDATA[S02]]> Not detected 80 <![CDATA[mg / m 3 ]]> The method for treating tail gas from the production of methylchlorosilane provided by the present invention has the advantages of sufficient combustion of tail gas, sufficient removal of hydrogen chloride, nitrogen oxides, and silicon dioxide powder in flue gas, effective energy recovery such as waste heat, and a long equipment operation cycle. During the incineration process of tail gas from methylchlorosilane, the quenching tower effectively removes large silicon dioxide particles, avoids the generation of silicon dioxide particles, reduces the blockage and damage of equipment by silicon dioxide particles, and effectively reduces the oxygen content and nitrogen oxide content of the exhaust gas through wet electrostatic precipitator and SCR denitrification, thereby improving the incineration capacity and operation cycle of tail gas from methylchlorosilane.

[0062] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the above embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the above embodiments, or replace some or all of the technical features therein by equivalents. If these modifications and variations fall within the scope of the claims of the present invention and their equivalent technologies, they should be considered to be within the protection scope of the present invention.

Claims

1. A method for treating tail gas from the production of methylchlorosilane, characterized in that: The following steps are involved: S1: Incinerate the tail gas produced by methylchlorosilane to obtain the first flue gas with a temperature of 1100-1250°C; S2: recovering waste heat from the first flue gas to obtain a second flue gas with a temperature of 540-660° C.; S3: performing rapid cooling and gas-solid separation on the second flue gas in sequence to obtain a third flue gas with a temperature of 180-250° C.; S4: performing cooling absorption treatment, acid washing treatment and alkali washing treatment on the third flue gas to obtain neutral flue gas at 30-60° C.; S5: sequentially subjecting the neutral flue gas to wet electrostatic precipitator treatment and heating treatment to obtain fourth flue gas with a temperature of 180-220° C.; S6: performing SCR denitration treatment on the fourth flue gas in sequence to obtain fifth flue gas; S7: performing adsorption treatment on the fifth flue gas to obtain treated tail gas, which is discharged through a high point.

2. The method for treating tail gas from the production of methylchlorosilane according to claim 1, characterized in that: The temperature of the tail gas produced by methylchlorosilane is 20-30°C, the pressure is 0.03-0.1MPaG, and the flow rate is 300-750Nm 3 / h.

3. The method for treating tail gas from the production of methylchlorosilane according to claim 2, characterized in that: The incineration process uses natural gas as fuel, and the amount of natural gas added is 200~450Nm 3 / h.

4. The method for treating tail gas from the production of methylchlorosilane according to claim 2, characterized in that: Allowing process water to participate in the waste heat recovery process; wherein the amount of water added is 2000-4800 kg / h; The pressure of the steam drum in the waste heat recovery process is 0.8~1.1MPaG.

5. The method for treating tail gas from the production of methylchlorosilane according to claim 2, characterized in that: The rapid cooling and cooling treatment includes: making the second flue gas contact with compressed air, water and dispersant in reverse directions respectively.

6. The method for treating tail gas from the production of methylchlorosilane according to claim 5, characterized in that: The dispersant is AKN-210 dispersant.

7. The method for treating tail gas from the production of methylchlorosilane according to claim 2, characterized in that: The acid washing treatment uses a hydrochloric acid aqueous solution with a mass percentage of 6-10%; the alkali washing treatment uses a sodium hydroxide aqueous solution with a mass percentage of 10-20%.

8. The method for treating tail gas from the production of methylchlorosilane according to claim 2, characterized in that: The pressure of the wet electrostatic precipitator treatment is 10-20 kPa.

9. The method for treating tail gas from the production of methylchlorosilane according to claim 2, characterized in that: The urea solution is allowed to participate in the SCR denitration treatment; wherein the mass concentration of urea in the urea solution is 40-50%, and the mass ratio of the urea solution to the fourth flue gas is (0.01-0.02):

1.

10. The method for treating tail gas from the production of methylchlorosilane according to any one of claims 1 to 9, characterized in that: The adsorbent used in the adsorption treatment includes activated carbon.

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