Appearance detection device

Abstract

The invention provides an appearance detection device. The appearance detection device comprises a visible light inspection station and two short-wave infrared light inspection stations which are sequentially arranged on the side edge of a tape transmission runner; the winding tape transmission flow channel transmits a winding tape, the winding tape comprises a covering film, a bearing tape and a chip, the chip is arranged in a pocket in the bearing tape, and the covering film covers the upper surface of the bearing tape; the visible light inspection station performs appearance inspection on the tape, and the short-wave infrared light inspection station performs appearance inspection on the surface layer of the chip. Only 100 ms is needed for moving 8 mm through a stepping motor, the overall inspection speed reaches 45 k / h, the precision of 1.38 microns and the visual range of 3.53 * 2.83 are achieved by adopting a short-wave infrared light inspection station, the image taking time is only 1 ms, and the image taking effect is not blurred during high-speed movement; the boss and the pressing wheel are additionally arranged, the winding tape is pulled upwards and pressed downwards, the winding tape is kept in a stable state on the boss, and the imaging effect of the camera is better ensured.

Description

Technical Field

[0001] The present invention relates to the field of chip appearance detection, and in particular, to an appearance detection device. Background Art

[0002] When cutting silicon wafers, if the cutter is contaminated with foreign matter such as small silicon fragments or the cutter is no longer sharp, the edge of the chip will be damaged during cutting; when the tape reel places the chip on the wafer into the pocket of the carrier tape, if the chip is not completely placed in the pocket, the chip will tilt. At this time, the process of covering film bonding will force the chip into the pocket, and the corner of the front solder ball surface of the chip will be damaged, causing chip failure.

[0003] The existing appearance inspection system has a slow inspection speed. The speed of driving the tape to move is: 170ms to move 8mm, and the overall inspection speed reaches 3k / h. The stability of the tape on the flow channel cannot be guaranteed, resulting in poor imaging effect. Short-wave infrared light imaging is not clear, the accuracy is low, and the field of view (FOV) is small. Summary of the invention

[0004] In view of the defects in the prior art, an object of the present invention is to provide an appearance inspection device.

[0005] According to the present invention, an appearance inspection device is provided, comprising: a web conveying flow channel, a visible light inspection station and a short-wave infrared light inspection station, wherein the visible light inspection station and two short-wave infrared light inspection stations are sequentially arranged on the side of the web conveying flow channel;

[0006] The tape transfer channel transfers the tape, which includes a covering film, a carrier tape and a chip. The chip is placed in a pocket in the carrier tape, and the covering film covers the upper surface of the carrier tape. The visible light inspection station performs appearance inspection on the tape, and the short-wave infrared light inspection station performs appearance inspection on the surface of the chip.

[0007] Preferably, the tape transmission channel includes an electrostatic eliminator, a needle wheel driving mechanism, a transmission channel, a width adjustment mechanism, a block pressing mechanism, a lifting cylinder and a pressing wheel mechanism. The transmission channel is provided at the middle bottom of the width adjustment mechanism. The needle wheel driving mechanism is connected to the side of the width adjustment mechanism. The upper surface of the width adjustment mechanism is provided with a block pressing mechanism and a pressing wheel mechanism. The block pressing mechanism is located directly above the needle wheel in the needle wheel driving mechanism. The pressing wheel mechanisms are respectively connected to both sides of the block pressing mechanism. A lifting cylinder is provided on the lower surface of the width adjustment mechanism. The lifting cylinder is connected to the needle wheel driving mechanism. The electrostatic eliminator is connected to both ends of the width adjustment mechanism.

[0008] The width of the transmission channel is adjusted by the width adjustment mechanism to make it compatible with the tape transmitted on the surface. The pinwheel driving mechanism drives the tape to be transmitted in the transmission channel. The static elimination device eliminates and detects static electricity on the tapes at both ends of the transmission channel.

[0009] Preferably, a detection area boss is provided on the transmission flow channel, and pressure wheel mechanisms are respectively connected to both sides of the detection area boss;

[0010] The plurality of detection zone bosses are respectively connected with the visible light inspection station and the two short-wave infrared light inspection stations in a one-to-one correspondence.

[0011] Preferably, the pressing wheel mechanism comprises a second cylinder, a pressing wheel, a pressing wheel adjusting block, a spring, a cylinder mounting plate and a pressing wheel mounting block, the cylinder mounting plate is mounted with the second cylinder, the second cylinder is connected to the pressing wheel mounting block, the pressing wheel mounting block is movably connected with the pressing wheel adjusting block, and the pressing wheel adjusting block is connected to the pressing wheel through a spring;

[0012] The pressing wheel is adjusted to the two ends of the detection area boss through the pressing wheel adjusting block, and the second cylinder drives the pressing wheel to move up and down; before loading, the second cylinder rises and the pressing wheel is separated from the detection area boss; when loading, the second cylinder descends and the pressing wheel is pressed down to the tape on the detection area boss.

[0013] Preferably, the pinwheel driving mechanism comprises a stepper motor, a pinwheel, a mounting plate, a pinwheel rotating shaft, a first linear guide rail and a coupling, the stepper motor is connected to the pinwheel rotating shaft through the coupling, the pinwheel rotating shaft is connected to the pinwheel, the lifting cylinder and the first linear guide rail are respectively connected to the mounting plate, the lifting cylinder is connected to the stepper motor, and the stepper motor is slidably connected to the first linear guide rail;

[0014] The lifting cylinder drives the stepper motor to slide on the Z axis of the first linear guide rail, and the stepper motor drives the pin wheel to rotate. The pin wheel penetrates into the side hole of the tape, so that the pin wheel drives the tape to be transmitted in the transmission channel.

[0015] Preferably, the width adjustment mechanism includes a fixed side rail, a fixed side pressure plate, a movable side pressure plate, a movable side rail, a detection area boss, a manual adjustment handle and a second linear guide rail, the fixed side rail is correspondingly connected to the movable side rail, and the movable side rail is slidably connected to the second linear guide rail through the manual adjustment handle, a fixed side pressure plate is provided on the fixed side rail, and a movable side pressure plate is provided on the movable side rail, and the fixed side pressure plate and the movable side pressure plate are located directly above the transmission flow channel;

[0016] The movable side rail is moved on the second linear guide rail by adjusting the manual adjustment handle, so that the distance between the movable side rail and the fixed side pressure plate is adapted to the winding belt.

[0017] Preferably, the pressing block structure comprises a first cylinder and a pressing block, the first cylinder is connected to the pressing block, and the pressing block is connected directly above the pin wheel;

[0018] Before loading, the first cylinder rises to separate the pressure block from the needle wheel; during loading, the tape is transmitted to the needle wheel, the first cylinder descends, and the pressure block is pressed down onto the needle wheel, so that the tape is limitedly connected to the needle wheel.

[0019] Preferably, the short-wave infrared inspection station comprises a short-wave infrared camera, a mirror tube, a microscope, a laser sensor, a backlight and a liquid lens, the short-wave infrared camera is connected to the mirror tube, the side of the mirror tube is connected to the laser sensor, the mirror tube is connected to the microscope through the liquid lens, and the microscope and the backlight are arranged correspondingly;

[0020] The distance between the laser sensor and the microscope is 16Nmm, where N is a positive integer; the laser sensor detects the straight-line distance between the laser sensor and the surface of the chip in the tape, and the liquid lens adjusts the focus according to the detected straight-line distance.

[0021] Preferably, the static electricity elimination device includes an ion wind rod and a static electricity detector. The ion wind rod is connected to the side of the static electricity detector. The ion wind rod eliminates static electricity of the chips in the tape, and the static electricity detector detects the chips after static electricity elimination.

[0022] Compared with the prior art, the present invention has the following beneficial effects:

[0023] (1) The present invention uses a stepper motor to drive the pin wheel, which penetrates the side of the tape and cooperates with the block pressing mechanism to effectively ensure the stability of the tape under high-speed movement. It only takes 100ms to move 8mm, and the overall inspection speed reaches 45k / h, which doubles the speed.

[0024] (2) The liquid lens in the short-wave infrared inspection station of the present invention performs autonomous focusing according to the distance to the chip surface measured by the laser sensor, thereby improving the image capture accuracy. A 5.32 million high-pixel short-wave infrared camera, a 0.5x lens tube, a specially made super-high-frequency flash, and a 5x infrared microscope are used in combination to achieve an accuracy of 1.38 μm and a visual range of 3.53x2.83, achieving an image capture time of only 1 ms, which can ensure that the image capture effect is not blurred when moving at high speed;

[0025] (3) The present invention adds a detection area boss and a pressure wheel mechanism on the transmission channel, so that the detection area boss and the pressure wheel mechanism can drag the braid upward and press the braid downward, so that the braid can maintain a stable state on the track, thereby better ensuring the camera imaging effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Other features, objects and advantages of the present invention will become more apparent from the detailed description of non-limiting embodiments made with reference to the following drawings:

[0027] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0028] Figure 2 This is a schematic diagram of the structure of the short-wave infrared inspection station of the present invention;

[0029] Figure 3 A top view of the belt conveying flow channel in the present invention;

[0030] Figure 4 It is a side view of the belt conveying flow channel in the present invention;

[0031] Figure 5 It is a schematic diagram of the static elimination structure in the present invention;

[0032] Figure 6 It is a schematic diagram of the structure of the pin wheel driving mechanism in the present invention;

[0033] Figure 7 It is a schematic diagram of the structure of the transmission channel and the manual width adjustment mechanism in the present invention;

[0034] Figure 8 It is a schematic diagram of the structure of the briquetting mechanism in the present invention;

[0035] Fig. 9 It is a schematic diagram of the structure of the pressure wheel mechanism in the present invention;

[0036] Fig.10 It is a schematic diagram of the structure of the visible light inspection station in the present invention.

[0037] The figure shows: a tape transport channel 11, an electrostatic eliminator 101, an ion wind rod 1011, an electrostatic detector 1012, a pinwheel drive mechanism 102, a stepper motor 1021, a pinwheel 1022, a mounting plate 1024, a pinwheel rotating shaft 1025, a first linear guide rail 1026, a coupling 1027, a transport channel 103, a detection area boss 1035, a width adjustment mechanism 104, a fixed side rail 1031, a fixed side pressure plate 1032, a movable side pressure plate 1033, a movable side rail 1034, a detection area boss 1035, a manual adjustment handle 1036, and a second linear guide rail 1026. Linear guide rail 1037, pressing block mechanism 105, first cylinder 1051, pressing block 1052, lifting cylinder 106, pressing wheel mechanism 107, second cylinder 1071, pressing wheel 1072, pressing wheel adjustment block 1073, spring 1074, cylinder mounting plate 1075, pressing wheel mounting block 1076, visible light inspection station 12, camera 301, lens 302, coaxial light source 303, infrared ring light source 304, short-wave infrared light inspection station 13, short-wave infrared camera 201, mirror tube 202, microscope 203, laser sensor 204, backlight 205, liquid lens 206. DETAILED DESCRIPTION

[0038] The present invention is described in detail below in conjunction with specific embodiments. The following embodiments will help those skilled in the art to further understand the present invention, but are not intended to limit the present invention in any form. It should be noted that, for those of ordinary skill in the art, several changes and improvements can also be made without departing from the concept of the present invention. These all belong to the protection scope of the present invention.

[0039] Example 1

[0040] According to an appearance detection device provided by the present invention, Figure 1-10 As shown, it includes: a tape transfer channel 11, a visible light inspection station 12 and a short-wave infrared light inspection station 13. The visible light inspection station 12 and two short-wave infrared light inspection stations 13 are arranged in sequence on the sides of the tape transfer channel 11; the tape transfer channel 11 transfers the tape, the tape includes a covering film, a carrier tape and a chip, the chip is placed in a pocket in the carrier tape, and the covering film covers the upper surface of the carrier tape; the visible light inspection station 12 performs an appearance inspection on the tape, and the short-wave infrared light inspection station 13 inspects the appearance of the surface of the chip through the covering film of the tape.

[0041] The tape transmission channel 11 includes an electrostatic eliminator 101, a needle wheel driving mechanism 102, a transmission channel 103, a width adjustment mechanism 104, a block pressing mechanism 105, a lifting cylinder 106 and a pressing wheel mechanism 107. The transmission channel 103 is provided at the middle bottom of the width adjustment mechanism 104. The needle wheel driving mechanism 102 is connected to the side of the width adjustment mechanism 104. The upper surface of the width adjustment mechanism 104 is respectively provided with a block pressing mechanism 105 and a pressing wheel mechanism 107. The block pressing mechanism 105 is located directly above the needle wheel in the needle wheel driving mechanism 102. The pressing wheel mechanism 107 is respectively connected to both sides of the block pressing mechanism 105. The lower surface of the width adjustment mechanism 104 is provided with a lifting cylinder 106. The lifting cylinder 106 is connected to the needle wheel driving mechanism 102. The electrostatic eliminator 101 is connected to both ends of the width adjustment mechanism 104. The width adjustment mechanism 104 is installed on the frame.

[0042] The static electricity elimination device 101 includes an ion wind rod 1011 and a static electricity detector 1012. The ion wind rod 1011 is connected to the side of the static electricity detector 1012. The ion wind rod 1011 eliminates static electricity of the chips in the tape, and the static electricity detector 1012 detects the chips after static electricity elimination.

[0043] The transmission channel 103 is adapted to the tape being transmitted on the surface by adjusting the width of the width adjustment mechanism 104, and the static elimination device 101 performs static elimination and detection on the tape at both ends of the transmission channel 103. The transmission channel 103 is provided with a detection area boss 1035, and the two sides of the detection area boss 1035 are respectively connected to the pressure wheel mechanism 107 to ensure that the tape can be stable and smooth when moving at high speed, ensuring the imaging quality of the camera. Multiple detection area bosses 1035 are respectively connected to the visible light inspection station 12 and the two short-wave infrared light inspection stations 13 in a one-to-one correspondence.

[0044] Before loading, the block pressing mechanism 105 and the pressing wheel mechanism 107 rise respectively, so that the pinwheel 1022 of the pinwheel driving mechanism 102 penetrates into the side hole of the tape; during loading, the pinwheel driving mechanism 102 drives the tape to be transmitted in the transmission channel 103, and the block pressing mechanism 105 and the pressing wheel mechanism 107 are pressed down on the tape to prevent the tape from jumping out of the pinwheel 1022. The pinwheel driving mechanism 102 moves 8mm in only 100ms, stops, and then uses the short-wave infrared light mechanism 13 to take pictures in only 1ms. The pinwheel driving mechanism 102 moves at a high speed to cooperate with the short-wave infrared light inspection station 13, and achieves an overall inspection speed of 45k / h, and ensures clear imaging.

[0045] In this embodiment, the specific operation steps are as follows:

[0046] S1, manually loading, passing the tape through the pin wheel 2022;

[0047] S2, the needle wheel lifting cylinder 106 rises, so that the needle wheel passes through the side hole of the winding belt;

[0048] S3, the pinwheel driving mechanism 102 delivers the tape to the unloading location, and the motor stops;

[0049] S4, the pressing mechanism 105 descends, and the pressing wheel mechanism 107 descends;

[0050] S5, the pinwheel driving mechanism 102 continues to rotate, and the visible light inspection station 12 and the short-wave infrared light inspection station 13 start to work;

[0051] S6, after the short-wave infrared inspection station 13 captures the first chip, the pinwheel driving mechanism 102 sends the position of the first chip to the visible light inspection station 12 to start the inspection;

[0052] S7. For a 4-pitch tape, the pinwheel drive mechanism 102 moves forward 8 mm each time, which takes 100 ms, and then stops. Two short-wave infrared inspection stations 13 take photos for inspection. The inspection time and signal transmission time take 20 ms.

[0053] S8, the cycle continues until all chips are tested.

[0054] Example 2

[0055] This embodiment 2 is completed on the basis of embodiment 1. Figure 1 , Figure 2 as well as Fig.10 The above mainly further describes the visible light inspection station 12 and the short-wave infrared light inspection station 13, specifically:

[0056] The short-wave infrared inspection station 13 includes a short-wave infrared camera 201, a mirror tube 202, a microscope 203, a laser sensor 204, a backlight 205 and a liquid lens 206. The short-wave infrared camera 201 is connected to the mirror tube 202, the side of the mirror tube 202 is connected to the laser sensor 204, the mirror tube 202 is connected to the microscope 203 through the liquid lens 206, and the microscope 203 and the backlight 205 are correspondingly arranged along both sides of the web transmission channel 11.

[0057] The short-wave infrared camera 201 uses a 5.32 million high-pixel short-wave infrared camera, the lens tube 202 includes a 0.5x lens tube and a special super-frequency flash, and the microscope 203 uses a 5x infrared microscope, so that the short-wave infrared light inspection station 13 can achieve an accuracy of 1.38μm and a visual range of 3.53x2.83. During the detection process, the focus is on the chip surface ±3μm, and other places cannot be photographed, effectively preventing interference. The distance between the laser sensor 204 and the microscope 203 is 2N, where N is the distance between two adjacent chips; the laser sensor 204 detects the straight-line distance between the laser sensor 204 and the surface of the chip in the tape, and the liquid lens 206 adjusts the focus based on the detected straight-line distance.

[0058] The visible light inspection station 12 includes a camera 301 , a lens 302 , a coaxial light source 303 , and an infrared ring light source 304 . The camera 301 is connected to the lens 302 , the lens 302 is connected to the coaxial light source 303 , and the coaxial light source 303 is connected to the infrared ring light source 304 .

[0059] More specifically, the laser sensor 204 measures the distance to the surface of the chip, and the short-wave infrared inspection station 13 also inspects the surface of the chip. Since the depth of field of the microscope 203 is only 6μm, it is easy to lose focus, so an automatic focusing liquid lens 206 is added. Before each short-wave infrared inspection station 13 takes a picture, it is necessary to call the distance data measured by the laser sensor 204, and then the liquid lens 206 automatically focuses to ensure that it does not lose focus. In the short-wave infrared inspection station 13 of this embodiment, the spacing between the laser sensor 204 and the 5x infrared microscope 203 is a common multiple of 2 / 4 / 8. For example: taking 2pitch as an example, the laser sensor 204 detects the first chip, and the distance from the laser sensor 204 to the infrared microscope 203 is 16Nmm, where N is a positive integer. The laser sensor 204 needs to detect all 8N chips, upload the data and make a table. When the first chip arrives at the first station, the laser sensor 204 is called to detect the first height, and then the liquid lens 206 focuses.

[0060] Example 3

[0061] This embodiment 3 is completed on the basis of embodiment 1 or embodiment 2. Figure 8-9As shown, the pressing wheel mechanism 107 and the pressing block structure 105 are further described, specifically:

[0062] The pressing wheel mechanism 107 includes a second cylinder 1071, a pressing wheel 1072, a pressing wheel adjusting block 1073, a spring 1074, a cylinder mounting plate 1075 and a pressing wheel mounting block 1076. The second cylinder 1071 is installed on the cylinder mounting plate 1075, the second cylinder 1071 is connected to the pressing wheel mounting block 1076, the pressing wheel mounting block 1076 is movably connected with the pressing wheel adjusting block 1073, and the pressing wheel adjusting block 1073 is connected to the pressing wheel 1072 through the spring 1074; the pressing wheel 1072 is adjusted to the two ends of the detection area boss 1035 through the pressing wheel adjusting block 1073, and the second cylinder 1071 drives the pressing wheel 1072 to move up and down; when loading, the second cylinder 1071 rises, and the pressing wheel 1072 is separated from the detection area boss 1035; when loading, the second cylinder 1071 descends, and the pressing wheel 1072 is pressed down onto the tape of the detection area boss 1035.

[0063] The pressing block structure 105 includes a first cylinder 1051 and a pressing block 1052. The first cylinder 1051 is connected to the pressing block 1052, and the pressing block 1052 is connected directly above the needle wheel 1022. Before loading, the first cylinder 1051 rises to separate the pressing block 1052 from the needle wheel 1022. During loading, the tape is transmitted to the needle wheel 1022, the first cylinder 1051 descends, and the pressing block 1052 is pressed down onto the needle wheel 1022, so that the tape limiter is connected to the needle wheel 1022.

[0064] Example 4

[0065] This embodiment 4 is completed on the basis of embodiment 1 or embodiment 2 or embodiment 3. Figure 6 As shown, the pinwheel driving mechanism 102 is further described, specifically:

[0066] The needle wheel driving mechanism 102 includes a stepper motor 1021, a needle wheel 1022, a mounting plate 1024, a needle wheel rotating shaft 1025, a first linear guide 1026 and a coupling 1027. The stepper motor 1021 is connected to the needle wheel rotating shaft 1025 via the coupling 1027. The needle wheel rotating shaft 1025 is connected to the needle wheel 1022. The lifting cylinder 106 and the first linear guide 1026 are respectively connected to the mounting plate 1024. The mounting plate 1024 is installed on the frame. The lifting cylinder 106 is connected to the stepper motor 1021. The stepper motor 1021 is slidably connected to the first linear guide 1026.

[0067] The lifting cylinder 106 drives the stepper motor 1021 to slide on the Z axis on the first linear guide 1026 , and the stepper motor 1021 drives the pin wheel 1022 to rotate. The pin wheel 1022 penetrates into the side hole of the tape, so that the pin wheel 1022 drives the tape to be transmitted in the transmission channel 103 .

[0068] Example 5

[0069] This embodiment 4 is completed on the basis of embodiment 1 or embodiment 2 or embodiment 3 or embodiment 4, and mainly further describes the pinwheel driving mechanism 102. Figure 7 As shown, specifically: the width adjustment mechanism 104 is manually adjusted through a slider and a positioning nut, and is suitable for four widths of 8, 12, 16, and 24.

[0070] The width adjustment mechanism 104 includes a fixed side rail 1031, a fixed side pressure plate 1032, a movable side pressure plate 1033, a movable side rail 1034, a detection area boss 1035, a manual adjustment handle 1036 and a second linear guide rail 1037. The fixed side rail 1031 is correspondingly connected to the movable side rail 1034, and the movable side rail 1034 is slidably connected to the second linear guide rail 1037 through the manual adjustment handle 1036. The fixed side rail 1031 is provided with a fixed side pressure plate 1032, and the movable side rail 1034 is provided with a movable side pressure plate 1033. The fixed side pressure plate 1032 and the movable side pressure plate 1033 are located directly above the transmission channel 103; the movable side rail 1034 is moved on the second linear guide rail 1037 by adjusting the manual adjustment handle 1036, so that the spacing between the movable side rail 1034 and the fixed side pressure plate 1032 is adapted to the tape.

[0071] In the description of the present application, it should be understood that the terms "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0072] The above describes the specific embodiments of the present invention. It should be understood that the present invention is not limited to the above specific embodiments, and those skilled in the art can make various changes or modifications within the scope of the claims, which does not affect the essence of the present invention. In the absence of conflict, the embodiments of the present application and the features in the embodiments can be combined with each other arbitrarily.

Claims

1. An appearance inspection device, characterized in that: include: A web conveying channel (11), a visible light inspection station (12) and a short-wave infrared light inspection station (13), wherein the visible light inspection station (12) and the two short-wave infrared light inspection stations (13) are sequentially arranged on the side of the web conveying channel (11); The roll conveying channel (11) conveys a roll of tape, the roll of tape comprising a covering film, a carrier tape and a chip, the chip being placed in a pocket in the carrier tape, the covering film covering the upper surface of the carrier tape; the visible light inspection station (12) performs an appearance inspection on the roll of tape, and the short-wave infrared light inspection station (13) performs an appearance inspection on the surface of the chip.

2. The appearance inspection device according to claim 1, characterized in that: The tape transmission channel (11) comprises an electrostatic eliminator (101), a pinwheel driving mechanism (102), a transmission channel (103), a width adjustment mechanism (104), a block pressing mechanism (105), a lifting cylinder (106) and a pressing wheel mechanism (107); the transmission channel (103) is arranged at the middle bottom of the width adjustment mechanism (104); the pinwheel driving mechanism (102) is connected to the side of the width adjustment mechanism (104); the pressing mechanism (105) is arranged on the upper surface of the width adjustment mechanism (104); The block mechanism (105) and the pressing wheel mechanism (107), the block mechanism (105) is located directly above the needle wheel in the needle wheel driving mechanism (102), the pressing wheel mechanism (107) is respectively connected to both sides of the block mechanism (105), the lower surface of the width adjustment mechanism (104) is provided with the lifting cylinder (106), the lifting cylinder (106) is connected to the needle wheel driving mechanism (102), and the static elimination device (101) is connected to both ends of the width adjustment mechanism (104); The transmission channel (103) is adapted to the surface transmission tape by adjusting the width of the width adjustment mechanism (104), the pinwheel driving mechanism (102) drives the tape to be transmitted in the transmission channel (103), and the static elimination device (101) eliminates and detects static electricity on the tape at both ends of the transmission channel (103).

3. The appearance inspection device according to claim 2, characterized in that: The transmission flow channel (103) is provided with a detection area boss (1035), and the two sides of the detection area boss (1035) are respectively connected to the pressure wheel mechanism (107); The plurality of detection zone bosses (1035) are respectively connected to the visible light inspection station (12) and the two short-wave infrared light inspection stations (13) in a one-to-one correspondence.

4. The appearance inspection device according to claim 3, characterized in that: The pressing wheel mechanism (107) comprises a second cylinder (1071), a pressing wheel (1072), a pressing wheel adjusting block (1073), a spring (1074), a cylinder mounting plate (1075) and a pressing wheel mounting block (1076); the second cylinder (1071) is mounted on the cylinder mounting plate (1075); the second cylinder (1071) is connected to the pressing wheel mounting block (1076); the pressing wheel adjusting block (1073) is movably connected to the pressing wheel mounting block (1076); the pressing wheel adjusting block (1073) is connected to the pressing wheel (1072) via the spring (1074); The pressing wheel (1072) is adjusted to the two ends of the detection area boss (1035) by the pressing wheel adjustment block (1073), and the second cylinder (1071) drives the pressing wheel (1072) to move up and down; before loading, the second cylinder (1071) rises, and the pressing wheel (1072) is separated from the detection area boss (1035); when loading, the second cylinder (1071) descends, and the pressing wheel (1072) is pressed down onto the tape of the detection area boss (1035).

5. The appearance inspection device according to claim 2, characterized in that: The pinwheel driving mechanism (102) comprises a stepping motor (1021), a pinwheel (1022), a mounting plate (1024), a pinwheel rotating shaft (1025), a first linear guide rail (1026) and a coupling (1027); the stepping motor (1021) is connected to the pinwheel rotating shaft (1025) via the coupling (1027); the pinwheel rotating shaft (1025) is connected to the pinwheel (1022); the lifting cylinder (106) and the first linear guide rail (1026) are respectively connected to the mounting plate (1024); the lifting cylinder (106) is connected to the stepping motor (1021); and the stepping motor (1021) is slidably connected to the first linear guide rail (1026); The lifting cylinder (106) drives the stepper motor (1021) to slide on the Z axis on the first linear guide rail (1026), and the stepper motor (1021) drives the needle wheel (1022) to rotate. The needle wheel (1022) penetrates into the side hole of the tape, so that the needle wheel (1022) drives the tape to be transmitted in the transmission channel (103).

6. The appearance inspection device according to claim 2, characterized in that: The width adjustment mechanism (104) comprises a fixed side rail (1031), a fixed side pressure plate (1032), a movable side pressure plate (1033), a movable side rail (1034), a detection area boss (1035), a manual adjustment handle (1036) and a second linear guide rail (1037); the fixed side rail (1031) is correspondingly connected to the movable side rail (1034), and the movable side rail (1034) is slidably connected to the second linear guide rail (1037) through the manual adjustment handle (1036); the fixed side pressure plate (1032) is provided on the fixed side rail (1031), and the movable side pressure plate (1033) is provided on the movable side rail (1034); the fixed side pressure plate (1032) and the movable side pressure plate (1033) are located directly above the transmission channel (103); The movable side rail (1034) is moved on the second linear guide rail (1037) by adjusting the manual adjustment handle (1036), so that the distance between the movable side rail (1034) and the fixed side pressure plate (1032) is adapted to the winding belt.

7. The appearance inspection device according to claim 2, characterized in that: The pressing block structure (105) comprises a first cylinder (1051) and a pressing block (1052), wherein the first cylinder (1051) is connected to the pressing block (1052), and the pressing block (1052) is connected directly above the pin wheel (1022); Before loading, the first cylinder (1051) rises to separate the pressing block (1052) from the needle wheel (1022); during loading, the tape is transmitted to the needle wheel (1022), the first cylinder (1051) descends, and the pressing block (1052) is pressed down onto the needle wheel (1022), so that the tape is limitedly connected to the needle wheel (1022).

8. The appearance inspection device according to claim 1, characterized in that: The short-wave infrared inspection station (13) comprises a short-wave infrared camera (201), a mirror tube (202), a microscope (203), a laser sensor (204), a backlight (205) and a liquid lens (206); the short-wave infrared camera (201) is connected to the mirror tube (202); a side of the mirror tube (202) is connected to the laser sensor (204); the mirror tube (202) is connected to the microscope (203) via the liquid lens (206); and the microscope (203) and the backlight (205) are arranged correspondingly; The distance between the laser sensor (204) and the microscope (203) is 16 Nmm, where N is a positive integer; the laser sensor (204) detects the straight-line distance between the laser sensor (204) and the surface layer of the chip, and the liquid lens (206) performs focus adjustment based on the straight-line distance detected by the laser sensor (204).

9. The appearance inspection device according to claim 1, characterized in that: The static electricity elimination device (101) comprises an ion wind bar (1011) and a static electricity detector (1012); the ion wind bar (1011) is connected to the side of the static electricity detector (1012); the ion wind bar (1011) eliminates static electricity of chips in the tape, and the static electricity detector (1012) detects the chips after the static electricity is eliminated.

Images