Electron optical lens barrel and charged particle beam detection and imaging apparatus

Abstract

The invention discloses an electron optical lens barrel and charged particle beam detection and imaging equipment, and the electron optical lens barrel used for the charged particle beam detection and imaging equipment comprises a barrel body which is provided with a light path direction which extends along the axis of the barrel body and points from a first end to a second end of the barrel body; the anastigmatism assembly is arranged in the cylinder body; the anastigmatic assembly is configured to deflect the electron beam; the diaphragm and the detector are both arranged in the barrel, the diaphragm is arranged on the side, facing the anastigmatism assembly, of the detector, and the optical axis of the diaphragm is parallel to the light path direction; the diaphragm is movably arranged in the direction perpendicular to the light path, and the detector is movably arranged in the direction perpendicular to the light path; and the objective lens is arranged on one side, deviating from the first cavity, of the second cavity in the light path direction. According to the electron optical lens cone and the charged particle beam detection and imaging equipment disclosed by the invention, the centering of the electron optical lens cone can be quickly and efficiently checked and adjusted.

Description

Technical Field

[0001] The present application relates to the field of semiconductor detection technology, and in particular to an electron optical lens barrel and a charged particle beam detection and imaging device. Background Art

[0002] Charged particle beam detection and imaging equipment is widely used in the semiconductor industry. For example, scanning electron microscopes are usually used for defect detection of production objects such as chips. The main principle of charged particle beam detection and imaging equipment is to use a charged particle beam to bombard the surface of the object to be tested, and detect the secondary electron signal generated in the bombarded area to obtain various physical and chemical information of the sample to be tested, such as morphology, composition, characteristic distribution, etc. Charged particle beam detection and imaging equipment is widely used in the semiconductor industry. For example, scanning electron microscopes are usually used for defect detection of production objects such as chips. The main principle of charged particle beam detection and imaging equipment is to use a charged particle beam to bombard the surface of the object to be tested, and detect the secondary electron signal generated in the bombarded area to obtain various physical and chemical information of the sample to be tested, such as morphology, composition, characteristic distribution, etc.

[0003] However, the above-mentioned centering methods and the equipped tools are used in the test production process. If the overall centering of the lens barrel needs to be checked on the official final machine, it cannot meet the requirements. For example, when the equipment has been verified on the customer's site, if the centering of the electronic optical lens barrel needs to be checked during use, some manufacturers need to use special tools for calibration, some manufacturers need to intervene with algorithms for judgment, and some manufacturers need to send it back to the original factory for verification. Summary of the invention

[0004] The embodiments of the present application provide an electron optical lens barrel and a charged particle beam detection and imaging device, which can quickly and efficiently check the centering of the electron optical lens barrel.

[0005] In the first aspect, an embodiment of the present application provides an electron optical lens barrel for a charged particle beam detection and imaging device, comprising: a barrel body, which has an optical path direction extending along its axis and pointing from its first end to its second end; an anti-stigmation component, which is arranged in the barrel body; the anti-stigmation component is configured to deflect the electron beam; an aperture and a detector, both of which are arranged in the barrel body, the aperture is arranged on the side of the detector facing the anti-stigmation component, and the optical axis of the aperture is parallel to the optical path direction; the aperture is movably arranged in a direction perpendicular to the optical path, and the detector is movably arranged in a direction perpendicular to the optical path; an objective lens is arranged on a side of the barrel body along the optical path direction away from the anti-stigmation component.

[0006] According to an embodiment of the first aspect of the present application, the stigmator assembly includes a stigmator; the stigmator receives a first signal and adjusts the radial magnetic field strength in the direction of the optical path to converge or diverge the electron beam; the stigmator receives a second signal and adjusts the circumferential magnetic field strength in the direction of the optical path to deflect the electron beam.

[0007] According to an embodiment of the first aspect of the present application, the stigmator assembly includes a stigmator and a scanner; the stigmator receives a first signal and adjusts the radial magnetic field strength in the direction of the optical path to converge or diverge the electron beam; the scanner receives a second signal and adjusts the circumferential magnetic field strength in the direction of the optical path to deflect the electron beam.

[0008] According to an embodiment of the first aspect of the present application, the anti-stigmation component further includes a first electrode and a second electrode parallel to each other, and the first electrode and the second electrode are both parallel to or intersecting with the direction of the optical path.

[0009] According to an embodiment of the first aspect of the present application, the anti-stigmation component also includes a first coil, which generates a parallel magnetic field, and the direction of the magnetic flux lines of the parallel magnetic field intersects with the direction of the optical path.

[0010] According to an embodiment of the first aspect of the present application, it also includes a first driving component, the first driving component includes a first fixed end and a first movable end, the first fixed end is connected to the second cavity, the first movable end is connected to the aperture, and the first movable end drives the aperture to move along a direction perpendicular to the optical path.

[0011] According to the embodiment of the first aspect of the present application, it also includes a second driving component, the second driving component includes a second fixed end and a second movable end, the second fixed end is connected to the second cavity, the second movable end is connected to the detector, and the second movable end drives the detector to move along the direction perpendicular to the optical path.

[0012] According to an embodiment of the first aspect of the present application, it also includes a connecting flange, and the second cavity, the connecting flange and the objective lens are connected in sequence along the optical path direction.

[0013] According to an embodiment of the first aspect of the present application, the barrel includes a first barrel portion having a first cavity and a second barrel portion having a second cavity; the anti-stigmation component is arranged in the first cavity, and the aperture and the detector are both arranged in the second cavity; the electron optical lens barrel for charged particle beam detection and imaging equipment also includes a locking portion, which fixes the first barrel portion and the second barrel portion.

[0014] According to an embodiment of the first aspect of the present application, the aperture includes a plurality of central holes, and the central holes penetrate the aperture along the direction of the light path.

[0015] In a second aspect, an embodiment of the present application further provides a charged particle beam detection and imaging device, comprising the electron optical lens barrel for the charged particle beam detection and imaging device of the embodiment of the first aspect of the present application.

[0016] In the electron optical lens barrel and charged particle beam detection and imaging device provided by the embodiment of the present application, the optical axis direction of the electron optical lens barrel corresponds to the optical path direction, and the aperture and the detector can be moved in the direction perpendicular to the optical path, so as to adjust the relative position of the center hole of the aperture and the optical axis, and also can adjust the relative position of the detector and the optical axis. In addition to being able to diverge or converge the electron beam, the anti-stigmation component can also deflect the electron beam. The electron beam can be emitted from the center hole of the aperture at a certain angle through the anti-stigmation component, and irradiated on the sample to be tested after passing through the objective lens. The detector can image the electron, thereby realizing the detection of the sample to be tested. When the sample to be tested adopts a determined calibration sample, the obtained spot image can be used to determine whether each device is centered, by adjusting the direction of the electron beam when it is emitted from the aperture, by adjusting the relative position of the center hole of the aperture and the optical axis, and the relative position of the detector and the optical axis, so that the spot image obtained by the detector is located in an ideal position, at this time, it can be regarded that the various components of the electron optical lens barrel for charged particle beam detection and imaging equipment of the embodiment of the present application have been centered, and the centered electron optical lens barrel can be directly used to detect the sample to be tested. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the embodiments of the present application will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0018] Figure 1 This is a schematic diagram of the structure of an electron optical lens barrel for a charged particle beam detection and imaging device according to an embodiment of the present application.

[0019] Figure 2 This is an actual image of an electron optical column used in a charged particle beam detection and imaging device according to an embodiment of the present application when centering adjustment is required.

[0020] Figure 3 This is an ideal image during the centering adjustment process of the electron optical column of the charged particle beam detection and imaging device according to the embodiment of the present application.

[0021] Figure 4 A schematic structural diagram of a first cavity and an anti-stigmation component of an electron optical lens barrel for a charged particle beam detection and imaging device according to an embodiment of the present application.

[0022] Figure 5 Another structural schematic diagram of the first cavity and the anti-stigmation component of the electron optical lens barrel for the charged particle beam detection and imaging device according to an embodiment of the present application.

[0023] Figure 6Another structural schematic diagram of the first cavity and the anti-stigmation component of the electron optical lens barrel for the charged particle beam detection and imaging device according to an embodiment of the present application.

[0024] Figure 7 A structural schematic diagram of a second cavity, an aperture, a detector, a first drive assembly and a second drive assembly of an electron optical lens barrel for a charged particle beam detection and imaging device according to an embodiment of the present application.

[0025] Reference numerals:

[0026] 1. Cylinder;

[0027] 21. first barrel portion; 22. second barrel portion;

[0028] 3. Anti-stigmation component; 31. Anti-stigmation device; 32. Scanner;

[0029] 4. Aperture; 41. Center hole;

[0030] 5. Detector;

[0031] 6. First driving assembly; 61. First fixed end; 62. First moving end;

[0032] 7. second driving assembly; 71. second fixed end; 72. second movable end;

[0033] 8. Connecting flange;

[0034] 9a, objective lens; 9b, sample;

[0035] A. Direction of light path. DETAILED DESCRIPTION

[0036] The features and exemplary embodiments of various aspects of the application will be described in detail below. In the detailed description below, many specific details are proposed to provide a comprehensive understanding of the application. However, it is obvious to those skilled in the art that the application can be implemented when some details in these specific details are not needed. The following description of the embodiments is only to provide a better understanding of the application by illustrating the example of the application.

[0037] It should be noted that, in the absence of conflict, the embodiments and features in the embodiments of the present application can be combined with each other. The embodiments will be described in detail below in conjunction with the accompanying drawings.

[0038] Relational terms such as first and second, etc., are used only to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "comprises," "comprising," or any other variations thereof are intended to cover non-exclusive inclusion, so that a process, method, article, or device that includes a series of elements includes not only those elements, but also other elements that are not explicitly listed, or also includes elements that are inherent to such process, method, article, or device. In the absence of further restrictions, the elements defined by the statement "comprising ..." do not exclude the presence of additional identical elements in the process, method, article, or device that includes the elements.

[0039] It should be understood that when describing the structure of a component, when a layer or a region is referred to as being "on" or "over" another layer or another region, it may mean that it is directly on the other layer or another region, or that other layers or regions are included between it and the other layer or another region. Moreover, if the component is turned over, the layer or a region will be "below" or "beneath" another layer or another region.

[0040] In addition, the term "and / or" in this article is only a description of the association relationship between the associated objects, indicating that there can be three relationships. For example, A and / or B can represent: A exists alone, A and B exist at the same time, and B exists alone. In addition, the character " / " in this article generally indicates that the associated objects before and after are in an "or" relationship.

[0041] It should be understood that in the embodiment of the present application, "B corresponding to A" means that B is associated with A, and B can be determined according to A. However, it should also be understood that determining B according to A does not mean determining B only according to A, and B can also be determined according to A and / or other information.

[0042] The applicant has found that when using an electron optical lens barrel to detect charged particle beams, the electron beam gun tip, objective lens, deflector and other components need to be aligned when the equipment is installed, and then the electron optical lens barrel is installed as a whole in the charged particle beam detection equipment. Considering that it is difficult to keep the relative positions of various components completely unchanged during the installation process, it is necessary to perform alignment verification again after the electron optical lens barrel is installed in the detection equipment. If the verification result does not meet the requirements, the electron optical lens barrel needs to be removed and adjusted again. In addition, for different test samples, the electron optical lens barrel needs to be removed, and then the electron optical lens barrel needs to be adjusted with different parameters. Therefore, the process of charged particle beam detection is relatively complicated, which reduces the detection efficiency.

[0043] In view of the above analysis, the applicant proposed an electron optical lens barrel and charged particle beam detection and imaging equipment, including a barrel, an anti-stigmation component, an aperture, a detector and an objective lens. The optical axis direction of the electron optical lens barrel corresponds to the direction of the optical path, and the aperture and the detector can move in a direction perpendicular to the optical path, so as to adjust the relative position of the center hole of the aperture and the optical axis, and also adjust the relative position of the detector and the optical axis. In addition to diverging or converging the electron beam, the anti-stigmation component can also deflect the electron beam. The electron beam can be emitted from the center hole of the aperture at a certain angle through the anti-stigmation component, and irradiated on the sample to be tested after passing through the objective lens. The detector can image the electrons, thereby realizing the detection of the sample to be tested. When the sample to be tested uses a certain calibration sample, the obtained spot image can be used to determine whether each device is aligned. By adjusting the direction of the electron beam when it is emitted from the aperture, by adjusting the relative position of the center hole of the aperture and the optical axis, and the relative position of the detector and the optical axis, the spot image obtained by the detector is located in an ideal position. At this time, it can be regarded that the various components of the electron optical lens barrel for charged particle beam detection and imaging equipment in the embodiment of the present application have been aligned, and the centered electron optical lens barrel can be directly used to detect the sample to be tested.

[0044] Figure 1 This is a schematic diagram of the structure of an electron optical lens barrel for a charged particle beam detection and imaging device according to an embodiment of the present application.

[0045] See also Figure 1 The embodiment of the present application provides an electron optical lens barrel for charged particle beam detection and imaging equipment, comprising a barrel 1, an anti-stigmation component 3, an aperture 4, a detector 5 and an objective lens 9a. The barrel 1 has an optical path direction A extending along its axis and pointing from its first end to its second end; the anti-stigmation component 3 is arranged in the barrel 1; the anti-stigmation component 3 is configured to deflect the electron beam; the aperture 4 and the detector 5 are both arranged in the barrel 1, the aperture 4 is arranged on the side of the detector 5 facing the anti-stigmation component 3, and the optical axis of the aperture 4 is parallel to the optical path direction A; the aperture 4 is movably arranged along the vertical optical path direction A, and the detector 5 is movably arranged along the vertical optical path direction A; the objective lens 9a is arranged on the side of the barrel 1 away from the anti-stigmation component 3 along the optical path direction A.

[0046] The electron optical lens barrel for charged particle beam detection and imaging device of the embodiment of the present application can be used for charged particle beam detection, and the electron optical lens barrel has an optical axis. The axes of the anastigmatism component 3, the aperture 4, the detector 5 and the objective lens 9a should be coaxial with the optical axis of the electron optical lens barrel for charged particle beam detection and imaging device of the embodiment of the present application, and the optical path direction A can be regarded as coinciding with the optical axis of the electron optical lens barrel for charged particle beam detection and imaging device of the embodiment of the present application.

[0047] Specifically, the barrel 1 is in the shape of a hollow cylinder, and the interior can be used as a accommodating space to provide a stable environment for optical devices and reduce the impact of water vapor and dust on optical devices. The barrel 1 should be able to keep the physical and chemical properties in the barrel 1 basically stable, and can be in the form of multiple structures connected. Exemplarily, the barrel 1 includes a first barrel portion 21 having a first cavity and a second barrel portion 22 having a second cavity, and the first barrel portion 21 and the second barrel portion 22 can be directly connected or indirectly connected. It can be understood that in the embodiment of the present application, the number of cavities in the barrel 1 is not limited to two, and there can be only one cavity, or there can be three or more cavities.

[0048] The anti-stigmation component 3 is arranged in the cylinder 1, and can diverge or converge the electron beam. At this time, the axial direction of the electron beam is not changed, and the astigmatism phenomenon generated during imaging can be weakened; the anti-stigmation component 3 can also deflect the electron beam. At this time, the axial direction of the electron beam changes, so that the electron beam can scan the surface of the measured sample 9b, thereby realizing the scanning of the surface of the measured sample 9b. In addition, during the centering adjustment, the irradiation direction of the electron beam can be adjusted.

[0049] The aperture 4 and the detector 5 are both arranged in the barrel 1. The aperture 4 has a central hole 41, which can block part of the electron beam so that the electron beam passing through the aperture 4 can form an electron beam with stable intensity and shape. In actual use, when the electron beam is deflected by the anti-stigmation component 3 for scanning, the scanning range should be larger than the diameter of the central hole 41 of the aperture 4, so that the detector 5 can obtain an image of a circular spot. The aperture 4 and the detector 5 can both move along the direction A perpendicular to the optical path, so that the relative positions of the aperture 4 and the detector 5 relative to the optical axis of the electron optical lens barrel for the charged particle beam detection and imaging device of the embodiment of the present application can be adjusted, so that the aperture 4 and the detector 5 can be located on the optical axis to achieve the purpose of centering.

[0050] Furthermore, the barrel 1 includes a first barrel portion 21 having a first cavity and a second barrel portion 22 having a second cavity; the anti-stigmation component 3 is disposed in the first cavity, and the aperture 4 and the detector 5 are both disposed in the second cavity. The electron optical lens barrel for the charged particle beam detection and imaging device of the embodiment of the present application also includes a locking portion, which fixes the first barrel portion and the second barrel portion.

[0051] In the embodiment of the present application, the barrel 1 having two cavities is used as an example for explanation, wherein the first barrel portion 21 forms a first cavity, and the second barrel portion 22 forms a second cavity. The anti-stigmation component 3 is disposed in the first cavity, and the aperture 4 and the detector 5 are both disposed in the second cavity, which can meet the different requirements of the anti-stigmation component 3, the aperture 4 and the detector 5 for the working environment, that is, the physical and chemical properties in the first cavity and the second cavity can be different.

[0052] The first barrel 21 and the second barrel 22 can move along the optical path direction A, and the object distance and / or image distance of the electron optical lens barrel for charged particle beam detection and imaging equipment of the embodiment of the present application have been adjusted. The locking portion can fix the position of the first barrel 21 and the second barrel 22, and the position of the first barrel 21 and the second barrel 22 can be adjusted first, and then the first barrel 21 and the second barrel 22 can be fixed, or the first barrel 21 and the second barrel 22 can be fixed as a whole, and then the first barrel 21 and the second barrel 22 can be moved as a whole. Exemplarily, the locking portion can be in the form of a bolt.

[0053] Figure 2 This is an actual image of an electron optical column used in a charged particle beam detection and imaging device according to an embodiment of the present application when centering adjustment is required. Figure 3 This is an ideal image during the centering adjustment process of the electron optical column of the charged particle beam detection and imaging device according to the embodiment of the present application.

[0054] See also Figure 2 and Figure 3 , and combined with Figure 1 , the electron beam passing through the aperture 4 can be irradiated on the sample 9b to be tested through the objective lens 9a, and after reflection, it is detected and imaged by the detector 5, and the image obtained by imaging can be used to determine whether there are defects on the sample 9b to be tested. It should be noted that before using the electron optical lens barrel for charged particle beam detection and imaging equipment of the embodiment of the present application to perform charged particle beam detection, the calibration sample 9b can be subjected to charged particle beam detection, that is, the measured area on the surface of the sample 9b has been determined, then the ideal image to be obtained can be expected, according to the actual image of the electron optical lens barrel for charged particle beam detection and imaging equipment of the embodiment of the present application, the position of the aperture 4 and the detector 5 relative to the optical axis is adjusted so that the aperture 4 and the detector 5 can be located on the optical axis, so that the electron optical lens barrel for charged particle beam detection and imaging equipment of the embodiment of the present application has good centering. After completing the centering, the calibration sample 9b can be directly replaced with the sample 9b to be tested, and the charged particle beam detection can be performed on the sample 9b to be tested. Since the electron optical lens barrel after centering can be directly used to detect the sample 9b to be tested, the electron optical lens barrel for charged particle beam detection and imaging equipment according to the embodiment of the present application can reduce the influence of external factors after centering and before detection, thereby improving the accuracy of detection. In addition, according to different parameter requirements, the anti-stigmation component 3, the aperture 4 and the detector 5 can be adaptively adjusted without removing the electron optical lens barrel for adjustment, thereby improving the detection efficiency. It can be understood that during the centering process, the object to be measured is the calibration sample 9b, and during the detection process, the object to be measured is the sample 9b to be tested.

[0055] It is better to add the effect of using the anti-stigmation component 3 (rather than other components) to deflect the electron beam. If it is good, it is difficult for those skilled in the art to think of it. In short, the application documents are prepared for the subsequent OA reply.

[0056] Figure 4 A schematic structural diagram of a first barrel portion and an anti-stigmation component of an electron optical lens barrel for a charged particle beam detection and imaging device according to an embodiment of the present application. Figure 5 Another structural schematic diagram of the first barrel portion and the anti-stigmation assembly of the electron optical lens barrel for the charged particle beam detection and imaging device according to an embodiment of the present application.

[0057] For further information, see Figure 4 and Figure 5 , and combined with Figure 1 The anti-stigmator component 3 includes an anti-stigmator 31; the anti-stigmator 31 receives a first signal and adjusts the radial magnetic field strength in the optical path direction A to converge or diverge the electron beam; the anti-stigmator 31 receives a second signal and adjusts the circumferential magnetic field strength in the optical path direction A to deflect the electron beam.

[0058] The stigmator 31 adjusts the direction of movement of the electrons by adjusting the magnetic field, and at the same time realizes the stigmator function and scanning function of the electron optical lens barrel for the charged particle beam detection and imaging device of the embodiment of the present application. Taking the electron beam incident along the optical axis as an example, when the stigmator 31 receives the first signal, the stigmator 31 can adjust the radial magnetic field strength of the optical path direction A, so that the electrons of the electron beam can be deflected radially along the optical path direction A. At this time, the electron beam converges or diverges as a whole, reducing the astigmatism; when the stigmator 31 receives the second signal, the stigmator 31 can adjust the circumferential magnetic field strength of the optical path direction A, so that the electrons of the electron beam can be deflected in a certain direction. At this time, the electron beam is scanned. It can be understood that by adjusting the amplitude of the second signal, the maximum deflection angle of the electron beam can be increased, that is, the scanning range of the electron beam can be increased, so that when centered, the scanning range of the electron beam is greater than the diameter of the central hole 41 of the aperture 4.

[0059] Figure 6 Another structural schematic diagram of the first barrel portion and the anti-stigmation assembly of the electron optical lens barrel for the charged particle beam detection and imaging device according to an embodiment of the present application.

[0060] Optionally, see Figure 6 , and combined with Figure 1 The anti-stigmation component 3 includes an anti-stigmation device 31 and a scanner 32; the anti-stigmation device 31 receives a first signal and adjusts the radial magnetic field strength around the optical path direction A to converge or diverge the electron beam; the scanner 32 receives a second signal and adjusts the circumferential magnetic field strength around the optical path direction A to deflect the electron beam.

[0061] The stigmator 31 and the scanner 32 both adjust the direction of movement of the electrons by adjusting the magnetic field. The stigmator 31 realizes the stigmator function of the electron optical lens barrel for the charged particle beam detection and imaging device of the embodiment of the present application, and the scanner 32 realizes the scanning function of the electron optical lens barrel for the charged particle beam detection and imaging device of the embodiment of the present application. Taking the electron beam incident along the optical axis as an example, when the stigmator 31 receives the first signal, the stigmator 31 can adjust the radial magnetic field strength around the optical path direction A, so that the electrons of the electron beam can be deflected radially along the optical path direction A. At this time, the electron beam converges or diverges as a whole, reducing the astigmatism; when the scanner 32 receives the second signal, the scanner 32 can adjust the circumferential magnetic field strength around the optical path direction A, so that the electrons of the electron beam can be deflected in a certain direction, at this time, the electron beam is scanned. It is understandable that by adjusting the amplitude of the second signal, the maximum deflection angle of the electron beam can be increased, that is, the scanning range of the electron beam can be increased, so that when centered, the scanning range of the electron beam is larger than the diameter of the central hole 41 of the aperture 4.

[0062] Furthermore, the anti-stigmation component 3 further includes a first electrode and a second electrode which are parallel to each other, and the first electrode and the second electrode are parallel to or intersect with the optical path direction A.

[0063] The first electrode and the second electrode can form an electric field, and can also deflect electrons to achieve the centering process. Exemplarily, the first electrode and the second electrode can be in the form of electrode plates, and are parallel to or intersecting the optical axis, and the electric field formed can deflect the electron beam in a certain direction.

[0064] Furthermore, the anti-stigmation component 3 also includes a first coil, which generates a parallel magnetic field, and the direction of the magnetic flux lines of the parallel magnetic field intersects with the direction A of the optical path.

[0065] The first coil can generate a parallel magnetic field. When the electrons in the electron beam move in the parallel magnetic field, they can also be deflected to achieve the centering process. The direction of the magnetic flux lines of the parallel magnetic field intersects with the direction A of the optical path, so that the electrons can be affected by the Lorentz force in the parallel magnetic field and be deflected.

[0066] Figure 7 A structural schematic diagram of a second barrel portion, an aperture, a detector, a first drive assembly, and a second drive assembly of an electron optical lens barrel for a charged particle beam detection and imaging device according to an embodiment of the present application.

[0067] For further information, see Figure 7 , and combined with Figure 1The aperture 4 includes a plurality of center holes 41, and the center holes 41 penetrate the aperture 4 along the optical path direction A. The apertures of the plurality of center holes 41 are different from each other, and the center holes 41 through which the electron beam passes can be adjusted for different samples 9b to be measured, thereby adjusting the diameter of the light spot that can be obtained by the detector 5 according to the sample 9b to be measured.

[0068] Further, see Figure 7 , and combined with Figure 1 The embodiment of the present application also includes a first driving assembly 6, which includes a first fixed end 61 and a first movable end 62. The first fixed end 61 is connected to the second barrel 22 (barrel 1), and the first movable end 62 is connected to the diaphragm 4. The first movable end 62 drives the diaphragm 4 to move along the direction A perpendicular to the optical path.

[0069] The first drive assembly 6 can drive the aperture 4 to move along the vertical optical path direction A, so that the optical axis of the aperture 4 can coincide with the optical axis of the electron optical lens barrel for the charged particle beam detection and imaging device of the embodiment of the present application, so as to achieve the purpose of centering. The first fixed end 61 of the first drive assembly 6 is connected to the second barrel 22, and the first movable end 62 of the first drive assembly 6 is connected to the aperture 4. Exemplarily, the first drive assembly 6 can be in the form of a slide rail slider, the slide rail is connected to the second barrel 22, the slider is connected to the aperture 4, and a motor or a telescopic cylinder can be used to drive the slider; the first drive assembly 6 can also be in the form of a screw nut, the nut is connected to the second barrel 22, and the screw is connected to the aperture 4; the first drive assembly 6 can also be in the form of a gear rack, the gear is connected to the second barrel 22, and the rack is connected to the aperture 4.

[0070] Further, see Figure 7 , and combined with Figure 1 The electron optical lens barrel for charged particle beam detection and imaging equipment of the embodiment of the present application also includes a second driving assembly 7, the second driving assembly 7 includes a second fixed end 71 and a second movable end 72, the second fixed end 71 is connected to the second barrel portion 22 (barrel body 1), the second movable end 72 is connected to the detector 5, and the second movable end 72 drives the detector 5 to move along the direction A perpendicular to the optical path.

[0071] Similar to the first drive assembly 6, the second drive assembly 7 can drive the detector 5 to move along the vertical light path direction A, so that the optical axis of the detector 5 can coincide with the optical axis of the electron optical lens barrel for the charged particle beam detection and imaging device of the embodiment of the present application, so as to achieve the purpose of centering. The second fixed end 71 of the second drive assembly 7 is connected to the second barrel 22, and the second movable end 72 of the second drive assembly 7 is connected to the detector 5. Exemplarily, the second drive assembly 7 can be in the form of a slide rail slider, the slide rail is connected to the second barrel 22, and the slider is connected to the detector 5, and a motor or a telescopic cylinder can be used to drive the slider; the second drive assembly 7 can also be in the form of a screw nut, the nut is connected to the second barrel 22, and the screw is connected to the detector 5; the second drive assembly 7 can also be in the form of a gear rack, the gear is connected to the second barrel 22, and the rack is connected to the detector 5.

[0072] Further, see Figure 1 The electron optical lens barrel for charged particle beam detection and imaging equipment of the embodiment of the present application further includes a connecting flange 8, and the second barrel portion 22 (barrel body 1), the connecting flange 8 and the objective lens 9a are sequentially connected along the optical path direction A.

[0073] Considering that the material of the objective lens 9a is difficult to be directly connected to the material of the second barrel 22, in the embodiment of the present application, the second cavity 2 and the objective lens 9a are indirectly connected via the connecting flange 8. In addition, the distance between the objective lens 9a and the detector 5 can be fine-tuned via the connecting flange 8, thereby improving the clarity of the imaging of the detector 5 and improving the detection accuracy.

[0074] The embodiment of the present application also provides a charged particle beam detection and imaging device, including the electron optical lens barrel of the aforementioned embodiment of the present application. When using the charged particle beam detection and imaging device of the embodiment of the present application, the sample 9b to be measured should be placed on one side of the electron optical lens barrel along the optical path direction A, at this time, the objective lens 9a of the electron optical lens barrel is closer to the sample 9b to be measured than the anastigmatism component 3.

[0075] In summary, the embodiments of the present application provide an electron optical lens barrel and a charged particle beam detection and imaging device. The optical axis direction of the electron optical lens barrel corresponds to the optical path direction, and both the aperture and the detector can be moved in a direction perpendicular to the optical path, thereby adjusting the relative position of the center hole of the aperture and the optical axis, and also adjusting the relative position of the detector and the optical axis. In addition to being able to diverge or converge the electron beam, the anti-stigmation component can also deflect the electron beam. The electron beam can be emitted from the center hole of the aperture at a certain angle through the anti-stigmation component, and after passing through the objective lens, it is irradiated on the sample to be tested. The detector can image the electrons, thereby realizing the detection of the sample to be tested. When the sample to be tested uses a certain calibration sample, the obtained spot image can be used to determine whether each device is aligned. By adjusting the direction of the electron beam when it is emitted from the aperture, by adjusting the relative position of the center hole of the aperture and the optical axis, and the relative position of the detector and the optical axis, the spot image obtained by the detector is located in an ideal position. At this time, it can be regarded that the various components of the electron optical lens barrel for charged particle beam detection and imaging equipment in the embodiment of the present application have been aligned, and the centered electron optical lens barrel can be directly used to detect the sample to be tested.

[0076] The above is only a specific implementation of the present application, but the protection scope of the present application is not limited thereto. Any technician familiar with the technical field can easily think of various equivalent modifications or replacements within the technical scope disclosed in the present application, and these modifications or replacements should be included in the protection scope of the present application. Therefore, the protection scope of the present application shall be based on the protection scope of the claims.

Claims

1. An electron optical lens barrel for charged particle beam detection and imaging equipment, characterized in that: include: A barrel having an optical path direction extending along its axis and pointing from its first end to its second end; An anti-stigmation component is disposed in the cylinder; the anti-stigmation component is configured to deflect the electron beam; The diaphragm and the detector are both arranged in the cylinder, the diaphragm is arranged on the side of the detector facing the anastigmatism component, and the optical axis of the diaphragm is parallel to the direction of the optical path; the diaphragm is movably arranged in a direction perpendicular to the optical path, and the detector is movably arranged in a direction perpendicular to the optical path; The objective lens is arranged on a side of the barrel away from the anastigmatism component along the direction of the optical path.

2. The electron optical lens column for charged particle beam detection and imaging equipment according to claim 1, characterized in that: The anti-stigmator assembly includes an anti-stigmator; the anti-stigmator receives a first signal and adjusts the radial magnetic field strength in the direction of the optical path to converge or diverge the electron beam; the anti-stigmator receives a second signal and adjusts the circumferential magnetic field strength in the direction of the optical path to deflect the electron beam.

3. The electron optical lens column for charged particle beam detection and imaging equipment according to claim 1, characterized in that: The anti-stigmation component includes an anti-stigmation device and a scanner; the anti-stigmation device receives a first signal and adjusts the radial magnetic field strength in the direction of the optical path to converge or diverge the electron beam; the scanner receives a second signal and adjusts the circumferential magnetic field strength in the direction of the optical path to deflect the electron beam.

4. The electron optical lens barrel for charged particle beam detection and imaging equipment according to claim 2 or 3, characterized in that: The anti-stigmation component further includes a first electrode and a second electrode which are parallel to each other, and the first electrode and the second electrode are both parallel to or intersecting with the direction of the optical path.

5. The electron optical lens barrel for charged particle beam detection and imaging equipment according to claim 2 or 3, characterized in that: The anti-stigmation component also includes a first coil, which generates a parallel magnetic field, and the direction of the magnetic flux lines of the parallel magnetic field intersects with the direction of the optical path.

6. The electron optical lens column for charged particle beam detection and imaging equipment according to claim 1, characterized in that: It also includes a first driving component, which includes a first fixed end and a first movable end, the first fixed end is connected to the cylinder, the first movable end is connected to the diaphragm, and the first movable end drives the diaphragm to move in a direction perpendicular to the light path.

7. The electron optical lens column for charged particle beam detection and imaging equipment according to claim 1, characterized in that: It also includes a second driving component, which includes a second fixed end and a second movable end, the second fixed end is connected to the cylinder, the second movable end is connected to the detector, and the second movable end drives the detector to move in a direction perpendicular to the optical path.

8. The electron optical lens column for charged particle beam detection and imaging equipment according to claim 1, characterized in that: It also includes a connecting flange, and the barrel, the connecting flange and the objective lens are connected in sequence along the direction of the optical path.

9. The electron optical lens column for charged particle beam detection and imaging equipment according to claim 1, characterized in that: The cylinder comprises a first cylinder portion having a first cavity and a second cylinder portion having a second cavity; the anti-astigmatism component is arranged in the first cavity, and the aperture and the detector are both arranged in the second cavity; The electron optical lens barrel for charged particle beam detection and imaging equipment further includes a locking portion that fixes the first barrel portion and the second barrel portion.

10. The electron optical lens column for charged particle beam detection and imaging equipment according to claim 1, characterized in that: The aperture includes a plurality of central holes, and the central holes penetrate the aperture along the direction of the light path.

11. A charged particle beam detection and imaging device, characterized in that: An electron optical lens column for a charged particle beam detection and imaging device as claimed in any one of claims 1 to 10.

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