Exhaust duct cleaning device and semiconductor process equipment

Abstract

The invention provides an exhaust duct cleaning device and semiconductor process equipment, the exhaust duct cleaning device comprises a mounting base body, an adjusting main body and a locking assembly, the mounting base body can be mounted on an exhaust duct during use; the adjusting body can stretch into the exhaust pipeline and is provided with a flow inlet channel used for conveying cleaning fluid, and a flow outlet of the flow inlet channel is used for being communicated with the interior of the exhaust pipeline. The locking assembly is in spiral fit with the adjusting body and can be rotationally connected to the mounting base body around the spiral axis. The locking assembly can be switched between a locking state and an adjusting state, and in the locking state, the locking assembly is used for locking the adjusting body to the mounting base body; in the adjusting state, the locking assembly can rotate around the spiral axis and drive the adjusting body to move along the spiral axis relative to the mounting base body. According to the scheme, operation can be simplified, and the leakage risk of cleaning liquid is reduced.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor manufacturing, and in particular to an exhaust duct cleaning device and semiconductor process equipment. Background Art

[0002] For example, in the single-wafer cleaning equipment in the IC field, the actual cleaning process is carried out in the process chamber. According to different process requirements, one or more acid, alkali, and organic liquid medicines will be applied. The environment in the process chamber is harsh, and an exhaust device is required to timely extract the gas volatilized from the liquid medicine during the process from the chamber to ensure that the gas field of the cleaning microenvironment is smooth and no corrosive gas overflows, so as to ensure continuous and good wafer cleaning effect. In actual applications, some volatile gases are easy to crystallize, adhere to the inner wall of the exhaust duct, and accumulate continuously, thereby changing the flow area of ​​the exhaust duct, affecting the exhaust volume, and ultimately affecting the process effect. Therefore, it is necessary to regularly use cleaning fluid to flush the crystals on the exhaust duct.

[0003] In the prior art, an exhaust duct cleaning device is used to spray cleaning liquid into the exhaust duct to wash away crystals on the exhaust duct. On this basis, the exhaust pressure can be adjusted by adjusting the position of the exhaust duct cleaning device inserted into the exhaust duct. However, before adjusting the position of the exhaust duct cleaning device, the connection between the exhaust duct cleaning device and the supply pipeline of the cleaning liquid needs to be disconnected, which is not only inconvenient to operate, but also has the risk of leakage of the cleaning liquid. Summary of the invention

[0004] The present invention aims to solve at least one of the technical problems existing in the prior art, and proposes an exhaust duct cleaning device and semiconductor process equipment, which can solve the problem that the prior art requires disconnecting the connection between the exhaust duct cleaning device and the supply pipeline of the cleaning liquid first, which causes inconvenience in operation and the risk of leakage of the cleaning liquid.

[0005] To achieve the purpose of the present invention, an exhaust duct cleaning device is provided, which is applied to semiconductor process equipment and includes a mounting base, an adjustment body and a locking assembly, wherein the mounting base can be mounted on the exhaust duct when in use;

[0006] The regulating body can extend into the exhaust duct and has an inlet channel for conveying a cleaning fluid, and an outlet of the inlet channel is used to communicate with the interior of the exhaust duct;

[0007] The locking assembly is spirally matched with the adjusting body and is rotatably connected to the mounting base around a spiral axis; the locking assembly can switch between a locking state and an adjusting state, in which the locking assembly is used to lock the adjusting body to the mounting base; in the adjusting state, the locking assembly can rotate around the spiral axis and drive the adjusting body to move along the spiral axis relative to the mounting base.

[0008] In some embodiments, the regulating body comprises a columnar body having an outer circumference with an external thread, and the axis of the columnar body is the spiral axis; the inlet channel is arranged in the columnar body;

[0009] The locking assembly includes an adapter ring having an inner circumference with an internal thread, and a locking structure, wherein the internal thread of the adapter ring cooperates with the external thread of the columnar body; the locking structure is used to lock the adapter ring to the mounting base in the locking state; and to release the locking of the adapter ring in the adjustment state.

[0010] In some embodiments, the outer circumference of the adapter ring has external threads;

[0011] The locking structure includes a first locking nut, the internal thread of the first locking nut cooperates with the external thread of the adapter ring, and the first locking nut can be locked to the mounting base in the locking state to lock the adapter ring to the mounting base.

[0012] In some embodiments, the mounting base includes a shell, the shell can be sealed and mounted on the exhaust duct when in use, and the internal space of the shell is connected to the opening on the exhaust duct; the shell wall opposite to the opening is provided with a mounting through hole, and the columnar body is passed through the mounting through hole;

[0013] The adapter ring is at least partially located on the side of the shell wall away from the opening, and the external thread of the adapter ring is arranged on the portion of the adapter ring located on the side of the shell wall away from the opening, and the first locking nut can be locked to the shell wall in the locked state.

[0014] In some embodiments, the locking structure further includes a second locking nut, the internal thread of the second locking nut cooperates with the external thread of the columnar body, and the second locking nut can be locked on the end face of the adapter ring facing away from the opening.

[0015] In some embodiments, the locking assembly further includes a limiting support structure, which is fixedly connected to the shell wall on a side close to the opening; the limiting support structure is used to support the end face of the adapter ring close to the opening.

[0016] In some embodiments, the position-limiting support structure includes a support plate and a fastener, wherein the support plate is annular and is disposed around the columnar body and is fixedly connected to the shell wall through the fastener on a side close to the opening;

[0017] The support plate is used to support the end surface of the adapter ring close to the opening.

[0018] In some embodiments, the hole wall of the mounting through hole is provided with a first step surface facing the opening, and the outer periphery of the adapter ring is provided with a limiting protrusion, and the limiting protrusion is respectively abutted between the first step surface and the support plate.

[0019] In some embodiments, a spray body is also included, which can be rotatably connected to the adjustment body around the spiral axis and has a spray channel. The inlet of the spray channel is connected to the outlet of the inlet channel, and the outlet of the spray channel is used to communicate with the inside of the exhaust duct for spraying the cleaning fluid into the exhaust duct.

[0020] In some embodiments, the spray channel is configured to enable the spray body to rotate relative to the adjustment body around the spiral axis by means of fluid power when spraying the cleaning fluid.

[0021] In some embodiments, the spray channel includes at least one guide space and a plurality of sub-spray channels connected to each of the guide spaces. A main channel is arranged in the spray body, one end of the main channel is connected to the outlet of the inlet channel, and the other end is provided with a guide plug. The side of the guide plug exposed to the inside of the main channel and the channel wall of the main channel constitute the guide space. When the cleaning fluid flows through the guide space, the fluid force causes the spray body to rotate around the spiral axis relative to the adjustment body.

[0022] In some embodiments, the flow guide plug includes a flow guide plug column, and a plurality of flow guide portions disposed on one side of the flow guide plug column and located inside the spray channel, wherein the plurality of flow guide portions are spaced apart and distributed around the spiral axis;

[0023] The plurality of guide portions and the channel wall of the main channel form a plurality of guide spaces. The surfaces of the guide portions forming the guide spaces include a first surface, and the first surface is an arc-shaped surface.

[0024] In some embodiments, the outer peripheral surface of the spray body is a part of a spherical surface;

[0025] The plurality of sub-spray channels connected to each of the flow guide spaces extend in a plurality of different directions along the axial cross section of the outer peripheral surface of the spray body, and are radially distributed from the inner wall of the main channel to the outer peripheral surface of the spray body.

[0026] In some embodiments, the axis of the bottommost one of the plurality of sub-spray channels is tangent to the lower end of the arc-shaped surface; and / or

[0027] A tangent line of the upper end of the arcuate surface is parallel to the spiral axis.

[0028] In some embodiments, the surface of the guide portion constituting the guide space further includes a second surface opposite to the first surface, and the second surface is a vertical surface parallel to the spiral axis.

[0029] In some embodiments, the exhaust duct cleaning device further comprises a bearing assembly, through which the spray body can be rotatably connected to the adjustment body around the spiral axis; the bearing assembly comprises a bearing, a bearing seat and a bearing locking member, wherein the bearing seat is fixed to the end of the inlet channel of the adjustment body where the outlet is located, and an installation space is provided in the bearing seat; the bearing is provided in the installation space and is sleeved on the outer periphery of the spray body;

[0030] The bearing locking member is arranged between the bearing and the adjusting body, and is used to limit the position of the bearing in a direction parallel to the screw axis.

[0031] In some embodiments, the bearing locking member is spaced apart from the adjusting body, and the bearing locking member can rotate with the spraying body;

[0032] The interval between the bearing locking member and the adjusting body forms a labyrinth structure; and / or at least one of the surfaces of the bearing locking member and the adjusting body facing each other is provided with at least one groove.

[0033] As another technical solution, the present invention also provides a semiconductor process equipment, including a process chamber, an exhaust duct connected to the process chamber, and an exhaust duct cleaning device; the exhaust duct cleaning device adopts the above-mentioned exhaust duct cleaning device provided by the present invention.

[0034] In some embodiments, the semiconductor process equipment includes a cleaning equipment, and the process chamber includes a plurality of recovery chambers stacked in a vertical direction;

[0035] There are multiple exhaust ducts, and the multiple exhaust ducts are connected to the multiple recovery chambers one by one, and are used to discharge the gas in each recovery chamber respectively; each exhaust duct is provided with an opening;

[0036] There are multiple exhaust duct cleaning devices, and the multiple exhaust duct cleaning devices are installed in a one-to-one correspondence on the multiple exhaust ducts, and the adjustment body can extend into the exhaust duct through the corresponding openings of the exhaust duct.

[0037] The present invention has the following beneficial effects:

[0038] The exhaust duct cleaning device provided by the present invention is provided with a spirally matched adjusting body and a locking assembly, and the locking assembly can rotate around the spiral axis in the adjusting state, and drive the adjusting body to move along the spiral axis relative to the mounting base, so that the adjusting body can change its relative position with the exhaust duct without rotating, so as to adjust the ventilation cross-sectional area of ​​the exhaust duct, and at the same time ensure that the adjusting body and the supply pipeline of the cleaning fluid are always connected during the adjustment process, so that there is no need to disconnect the connection between the adjusting body and the supply pipeline before adjustment, thereby simplifying the operation and reducing the risk of leakage of the cleaning liquid.

[0039] The semiconductor process equipment provided by the present invention adopts the exhaust duct cleaning device provided by the present invention, which eliminates the need to disconnect the connection between the adjustment body and the supply pipeline before adjustment, thereby simplifying the operation and reducing the risk of leakage of the cleaning liquid. BRIEF DESCRIPTION OF THE DRAWINGS

[0040] Figure 1 A cross-sectional view of an exhaust duct cleaning device provided for related art;

[0041] Figure 2 A cross-sectional view of a shower head provided for related art;

[0042] Figure 3 A three-dimensional diagram of a shower head provided for related art;

[0043] Figure 4 A cross-sectional view of a semiconductor process equipment provided by an embodiment of the present invention;

[0044] Figure 5 A cross-sectional view of the exhaust duct cleaning device provided by an embodiment of the present invention when in use;

[0045] Figure 6 A partial cross-sectional view of the exhaust duct cleaning device provided by an embodiment of the present invention above the locking assembly;

[0046] Figure 7 A partial cross-sectional view of the exhaust duct cleaning device provided by an embodiment of the present invention at a portion below the second column;

[0047] Figure 8 This is a front view of the spray body used in the embodiment of the present invention;

[0048] Fig. 9 for Figure 8 Sectional view along line EE;

[0049] Fig.10 for Figure 8 View in the middle D direction;

[0050] Fig.11 A three-dimensional diagram of a flow guide plug used in an embodiment of the present invention;

[0051] Fig.12 A partial cross-sectional view of the exhaust duct cleaning device provided by an embodiment of the present invention at the spray body and the guide plug;

[0052] Fig.13 A side view of a guide plug used in an embodiment of the present invention;

[0053] Fig.14 A partial cross-sectional view of the exhaust duct cleaning device provided in an embodiment of the present invention at the bearing locking member. DETAILED DESCRIPTION

[0054] In order to enable those skilled in the art to better understand the technical solution of the present invention, the exhaust duct cleaning device and semiconductor process equipment provided by the present invention are described in detail below in conjunction with the accompanying drawings.

[0055] For related technologies, see Figure 1The exhaust duct cleaning device 01 is installed in the exhaust duct 02 of the semiconductor process equipment, and includes a housing 011, an exhaust adjustment member 012 and a shower head 015, wherein the housing 011 is composed of a circumferential housing wall 011a and a top housing wall 011b, and the circumferential housing wall 011a and the top housing wall 011b enclose an installation space 011c with an open bottom. The housing 011 is fixed at the opening of the exhaust duct 02, specifically fixed on the horizontal pipe section 021 of the exhaust duct 02, and corresponds to the opening set on the top of the horizontal pipe section 021, and the above-mentioned installation space 011c is connected with the interior of the horizontal pipe section 021 through the opening. The opening on the horizontal pipe section 021 is located above the vertical pipe section 022. The exhaust air adjusting member 012 is columnar and vertically arranged. The exhaust air adjusting member 012 has an external thread. A threaded hole is arranged on the top shell wall 011b. The exhaust air adjusting member 012 is inserted into the threaded hole and cooperates with the threaded hole through the external thread, so that the exhaust air adjusting member 012 can be rotated to adjust the length of the exhaust air adjusting member 012 extending into the interior of the horizontal pipe section 021, thereby adjusting the ventilation cross-sectional area of ​​the exhaust air duct 02 and achieving the adjustment of the exhaust air pressure. After adjustment, the exhaust air adjusting member 012 can be locked to the top shell wall 011b by cooperating with the external thread of the exhaust air adjusting member 012 through the locking nut 013 and locking it to the top shell wall 011b. In addition, an inlet channel 014 is provided in the exhaust air regulating member 012, which passes through the exhaust air regulating member 012 in the vertical direction. The inlet of the inlet channel 014 is connected to the supply pipeline 04 of the cleaning fluid through the joint 03, and the outlet of the inlet channel 014 is connected to the spray head 015. The cleaning fluid (which can be a cleaning liquid or a cleaning gas) provided by the supply pipeline 04 can flow into the exhaust air duct 02 through the inlet channel 014 and the spray head 015 in sequence. The fluid flow direction is as follows: Figure 1 As shown by the arrow. Figure 2 As shown, the spray channel in the spray head 015 is composed of a main channel 015a and a plurality of fine holes 015b, and the main channel 015a is used to connect the inlet channel 014 with the plurality of fine holes 015b; Figure 3 As shown, outlet ends 015b1 of a plurality of fine holes 015b are spaced apart along the circumference of the shower head 015 and are used to spray cleaning fluid at a certain pressure and spray speed, thereby cleaning the crystals on the inner wall of the exhaust duct 02 .

[0056] In the related art, if it is necessary to adjust the length of the exhaust adjustment member 012 extending into the interior of the horizontal pipe section 021 to adjust the ventilation cross-sectional area of ​​the exhaust duct 02, it is necessary to first disconnect the connection between the exhaust adjustment member 012 and the connector 03, or disconnect the connection between the connector 03 and the supply pipeline 04, and then loosen the locking nut 013 and rotate the exhaust adjustment member 012. This is not only inconvenient to operate, but also poses a risk of leakage of the cleaning liquid.

[0057] To solve the above problems, see Figure 4 The embodiment of the present invention provides an exhaust duct cleaning device 100, which is applied to a semiconductor process equipment 10 and is used to adjust the ventilation cross-sectional area of ​​the exhaust duct 200 of the semiconductor process equipment 10 to adjust the exhaust pressure. The so-called ventilation cross-sectional area refers to the minimum cross-sectional area of ​​the exhaust duct 200 that can allow gas to pass through. Specifically, the exhaust duct 200 is connected to the exhaust port of the process chamber 30 of the semiconductor process equipment 10, and is used to discharge the gas in the process chamber 30. Taking the semiconductor process equipment 10 as a single-wafer cleaning equipment as an example, its process chamber 30 includes a plurality of recovery chambers 31 stacked in a vertical direction, which are used to recover the gas volatilized during the cleaning process (such as harmful gases such as acid and alkaline), each recovery chamber 31 has an exhaust port and is connected to the exhaust duct 200, and the exhaust duct 200 is used to discharge the gas in the recovery chamber 31. The chuck 40 is arranged in a space surrounded by a plurality of recovery chambers 31 in a manner that can be raised and lowered and rotated, and can reach a height position corresponding to any layer of the recovery chamber 31. During the process, the chuck 40 drives the wafer to rotate, and at the same time, the nozzle 20 located above the wafer starts to spray liquid medicine onto the wafer. After the liquid medicine falls on the wafer, it will splash into the corresponding recovery chamber 31 along the circumferential direction under the action of centrifugal force. In this process, liquid medicine particles will be generated due to the impact of the liquid medicine on the wafer and the side wall of the recovery chamber 31 to form liquid mist, which will be spread throughout the space. At the same time, the exhaust flow field will draw the scattered liquid mist away from the recovery chamber 31 through the exhaust duct 200, thereby preventing the liquid mist from spreading. It should be noted that Figure 4 Only one exhaust duct 200 is shown to be connected to the recovery chamber 31 of the uppermost layer. In fact, there may be multiple exhaust ducts 200, and multiple exhaust ducts 200 are connected to multiple recovery chambers 31 in a one-to-one correspondence. Moreover, each exhaust duct 200 may be installed with the exhaust duct cleaning device 100 provided in the embodiment of the present invention. Of course, the number of exhaust ducts 200 may also be less than the number of recovery chambers 31, that is, exhaust ducts 200 may be installed in a part of the recovery chambers 31, and exhaust ducts 200 may not be installed in another part of the recovery chambers 31. In addition, the exhaust duct cleaning device 100 provided in the embodiment of the present invention may also be installed in a part of the exhaust ducts 200, and not installed in another part of the exhaust ducts 200.

[0058] On this basis, the exhaust duct cleaning device 100 provided in the embodiment of the present invention is used to flush the crystals on the corresponding exhaust duct 200 to avoid the accumulation of crystals and change the flow area of ​​the exhaust duct 200, affect the exhaust volume, and ultimately affect the process effect. In addition, the exhaust duct cleaning device 100 is also used to adjust the ventilation cross-sectional area of ​​the exhaust duct 200 by adjusting the position inserted into the exhaust duct 200, so that the exhaust pressure can be adjusted. The size of the exhaust pressure can adjust the speed at which the liquid medicine mist is extracted from the process chamber 30 during the cleaning process. By adjusting the speed, it is not only possible to avoid a large amount of liquid medicine mist staying on the recovery chamber 31 and the upper surface of the chuck 40, affecting the wafer cleanliness and process effect, but also to avoid the increase of crystals on the inner wall of the exhaust duct 200.

[0059] On this basis, the exhaust duct cleaning device 100 provided in an embodiment of the present invention can ensure that it always remains connected to the supply pipeline 50 of the cleaning fluid during the process of adjusting the position of being inserted into the exhaust duct 200, thereby eliminating the need to disconnect the connection between the adjustment body 120 and the supply pipeline 50 before adjustment, thereby simplifying the operation and reducing the risk of leakage of the cleaning liquid.

[0060] It should be noted that the exhaust duct cleaning device 100 provided in the embodiment of the present invention is not limited to application in the above-mentioned single-wafer cleaning equipment, but can also be applied to other semiconductor process equipment 10 having an exhaust duct 200, an exhaust duct or an exhaust duct.

[0061] See also Figure 5 The exhaust duct cleaning device 100 for realizing the above functions includes a mounting base 110, an adjusting body 120 and a locking assembly 130, wherein the mounting base 110 can be mounted on the exhaust duct 200 when in use. Taking the exhaust duct 200 as an example, which includes a horizontal pipe section 201 and a vertical pipe section 202 connected in sequence, the inlet end of the horizontal pipe section 201 is connected to the exhaust port of the process chamber 30, the outlet end of the horizontal pipe section 201 is connected to the inlet end of the vertical pipe section 202, and the outlet end of the vertical pipe section 202 is used to be connected to the exhaust device. The horizontal pipe section 201 and the vertical pipe section 202 constitute a right-angle pipe, and the vertical pipe section 202 is bent downward 90° relative to the horizontal pipe section 201. In this case, the outlet end of the horizontal pipe section 201 is located at the bottom of the circumferential pipe wall, and an opening is provided at the top of the circumferential pipe wall of the horizontal pipe section 201, which is located above the inlet end of the vertical pipe section 202 (which is also the outlet end of the horizontal pipe section 201), and the mounting base 110 is installed at the opening of the horizontal pipe section 201.

[0062] The mounting base 110 is used to provide a mounting base for the adjusting body 120 and the locking assembly 130. In some embodiments, the mounting base 110 includes a housing, which can be sealed and mounted on the exhaust duct 200 when in use, and the internal space 103 of the housing is connected to an opening on the exhaust duct 200 (e.g., the horizontal pipe section 201). The sealing method between the housing and the exhaust duct 200 includes welding, riveting, sealing connection through fasteners and sealing rings, etc.

[0063] In some embodiments, in order to facilitate installation, an annular positioning protrusion 203 is provided on the exhaust duct 200 (e.g., the horizontal pipe section 201) and around the opening, and correspondingly, an annular positioning groove 104 is provided on the installation end surface of the shell, and the positioning groove 104 is limitedly matched with the positioning protrusion 203 to limit the position of the shell on the exhaust duct 200 (e.g., the horizontal pipe section 201). In a specific embodiment, the shell includes a shell wall (hereinafter referred to as the top shell wall 101) arranged opposite to the opening on the exhaust duct 200 (e.g., the horizontal pipe section 201), and an annular circumferential shell wall 102, the lower end surface of the circumferential shell wall 102 is the installation end surface of the above-mentioned shell, and the top shell wall 101 is arranged on the upper end surface of the circumferential shell wall 102, and is fixedly connected to the circumferential shell wall 102 by a plurality of fastening screws 105. The circumferential shell wall 102 and the top shell wall 101 together form the internal space 103 of the shell. The circumferential shell wall 102 is, for example, cylindrical, and correspondingly, the top shell wall 101 is, for example, disc-shaped.

[0064] It should be noted that the above-mentioned mounting base 110 is not limited to the use of a shell. In practical applications, any other structure may also be used, as long as it can provide a mounting basis for the adjustment body 120 and the locking assembly 130 and seal the opening on the exhaust duct 200 (such as the horizontal pipe section 201).

[0065] The regulating body 120 has an inlet channel 123 for conveying a cleaning fluid, which can be a cleaning liquid or a cleaning gas. The inlet of the inlet channel 123 is used to connect with the supply pipeline 50 of the cleaning fluid, for example, by sealing connection through a joint 60, and the outlet of the inlet channel 123 is used to communicate with the inside of the exhaust duct 200 (for example, the horizontal pipe section 201); the cleaning fluid provided by the supply pipeline 50 can flow into the exhaust duct 200 from the opening through the inlet channel 123 to flush the crystals on the exhaust duct 200.

[0066] The regulating body 120 can extend into the exhaust duct 200, that is, extend into the exhaust duct 200 through the opening on the exhaust duct 200 (for example, the horizontal pipe section 201). The longer the regulating body 120 extends into the exhaust duct 200, the smaller the ventilation cross-sectional area of ​​the exhaust duct 200 (for example, the horizontal pipe section 201), and the smaller the exhaust volume; conversely, the shorter the length of the regulating body 120 extending into the exhaust duct 200, the larger the ventilation cross-sectional area of ​​the exhaust duct 200 (for example, the horizontal pipe section 201), and the larger the exhaust volume. Therefore, by adjusting the relative position of the regulating body 120 and the exhaust duct 200 to adjust the length of the regulating body 120 extending into the exhaust duct 200, the exhaust volume can be adjusted, and thus the exhaust pressure in the process chamber 30 can be adjusted to meet the process requirements. It is easy to understand that the outlet of the inlet channel 123 is located at the end of the regulating body 120 extending into the exhaust duct 200 so as to be able to communicate with the interior of the exhaust duct 200 (such as the horizontal pipe section 201).

[0067] See also Figure 6 The locking assembly 130 is screw-matched with the adjusting body 120 and is rotatably connected to the mounting base 110 around the screw axis A; the screw axis A is the rotation centerline around which the locking assembly 130 and the adjusting body 120 rotate relative to each other, for example, it coincides or substantially coincides with the axis of the opening of the exhaust duct 200 (for example, the horizontal pipe section 201). Under the premise that the adjusting body 120 does not rotate, when the locking assembly 130 is rotated (but it does not move in the direction along the screw axis A), the adjusting body 120 can be driven to move along the screw axis A under the action of the screw match between the locking assembly 130 and the adjusting body 120, and when the locking assembly 130 switches between two opposite rotation directions, the adjusting body 120 switches between two opposite directions of movement along the screw axis A. In other words, the screw match between the locking assembly 130 and the adjusting body 120 can convert the rotation of the locking assembly 130 into the movement of the adjusting body 120 along the screw axis A.

[0068] On this basis, the locking assembly 130 can switch between a locking state and an adjustment state. In the locking state, the locking assembly 130 is used to lock the adjustment body 120 to the mounting base 110, and the adjustment body 120 cannot move at this time. In the adjustment state, the locking assembly 130 can rotate around the spiral axis A and drive the adjustment body 120 to move along the spiral axis A relative to the mounting base 110, so that the length of the adjustment body 120 extending into the exhaust duct 200 can be adjusted, and then the ventilation cross-sectional area of ​​the exhaust duct 200 can be adjusted. At the same time, since the adjustment body 120 does not need to rotate, during the adjustment process, it can be ensured that the adjustment body 120 and the supply pipeline 50 are always connected, so there is no need to disconnect the connection between the adjustment body 120 and the supply pipeline 50 before adjustment, thereby simplifying the operation and reducing the risk of leakage of the cleaning liquid.

[0069] By providing a spirally matched adjusting body 120 and a locking assembly 130, and the locking assembly 130 can rotate around the spiral axis A in the adjusting state, and drive the adjusting body 120 to move along the spiral axis A relative to the mounting base 110, the adjusting body 120 can change its relative position with the exhaust duct 200 without rotating, so as to adjust the ventilation cross-sectional area of ​​the exhaust duct 200, and at the same time ensure that the adjusting body 120 and the supply pipeline 50 of the cleaning fluid can always remain connected during the adjustment process, so that there is no need to disconnect the connection between the adjusting body 120 and the supply pipeline 50 before adjustment, thereby simplifying the operation and reducing the risk of leakage of the cleaning liquid.

[0070] The specific manner in which the locking assembly 130 and the adjusting body 120 are screw-fitted is, for example, that the adjusting body 120 includes a columnar body having an outer thread on the outer periphery, and the axis of the columnar body is the screw axis A; the inlet channel 123 is disposed in the columnar body. The inlet channel 123, for example, passes through the columnar body along the axis of the columnar body. In some embodiments, Figure 5 As shown, the columnar body includes a first column 121 and a second column 122 which are connected in sequence and arranged coaxially, wherein an external thread is arranged on the first column 121. When in use, the second column 122 is closer to the opening of the exhaust duct 200 than the first column 121, and the outer circumference of the second column 122 is larger than the outer circumference of the first column 121. In one example, the outer circumference of the second column 122 is movably matched with the inner circumference of the shell (i.e., the circumferential shell wall 102), such as clearance fit. Moreover, a plurality of annular grooves 124 are formed on the outer circumference of the second column 122, and the plurality of annular grooves 124 are distributed along the axial direction of the second column 122 at intervals, and the annular grooves 124 are used to increase the resistance of the cleaning fluid flowing along the gap, thereby reducing or avoiding the leakage of the cleaning fluid. The inlet channel 123 extends along the axis (i.e., the spiral axis A) of the first column 121 and the second column 122, and passes through the first column 121 and the second column 122 in sequence.

[0071] like Figure 6As shown, the locking assembly 130 includes an adapter ring 131 having an inner circumference with an internal thread, and a locking structure, wherein the internal thread of the adapter ring 131 cooperates with the external thread of the columnar body (e.g., the first column 121); the locking structure is used to lock the adapter ring 131 to the mounting base 110 in a locking state; and release the locking of the adapter ring 131 in an adjustment state. Specifically, the locking structure can switch between a locking state and an adjustment state, and in the locking state, the locking structure is used to lock the adapter ring 131 to the mounting base 110. In the adjustment state, the locking structure can release the lock of the adapter ring 131. At this time, by rotating the adapter ring 131 (and preventing it from moving in the direction along the spiral axis A), the internal thread of the adapter ring 131 and the external thread of the columnar body (such as the first column 121) can cooperate to drive the columnar body to move along the spiral axis A, thereby adjusting the length of the columnar body extending into the exhaust duct 200, and then adjusting the ventilation cross-sectional area of ​​the exhaust duct 200.

[0072] It should be noted that, in actual applications, when adjusting the length of the columnar body extending into the exhaust duct 200, the columnar body can be prevented from rotating and can only move along the spiral axis A by manual or tools. At the same time, the adapter ring 131 can only rotate and cannot move in the direction of the spiral axis A by manual or tools or a limiting support structure set on the mounting base 110 (described in detail later).

[0073] When the locking structure is in a locked state, it is configured to prevent the adapter ring 131 and the columnar body from rotating or moving. There may be a variety of locking structures to achieve this function. In some embodiments, the outer periphery of the adapter ring 131 has an external thread; the locking structure includes a first locking nut 132, the internal thread of the first locking nut 132 cooperates with the external thread of the adapter ring 131, and the first locking nut 132 can be locked to the mounting base 110 in a locked state to lock the adapter ring 131 to the mounting base 110. The first locking nut 132 is locked to the mounting base 110, which means that when the first locking nut 132 is tightened, there is a certain friction torque between the surfaces opposite to each other and the mounting base 110, generating a locking force. At this time, the adapter ring 131 cannot rotate or move.

[0074] In the embodiment where the mounting base 110 includes a housing, a housing wall (i.e., the top housing wall 101) opposite to the opening is provided with a mounting through hole, and the columnar body (e.g., the first column 121) is inserted through the mounting through hole. The outlet end of the inlet channel 123 of the columnar body can pass through the inner space 103 of the housing and the opening on the exhaust duct 200 (e.g., the horizontal pipe section 201) in sequence, and extend into the exhaust duct 200. The adapter ring 131 is at least partially located on the side of the housing wall facing away from the outlet (i.e., the first column 121). Figure 6In one example, a portion of the adapter ring 131 is rotatably disposed in the mounting through hole, and another portion of the adapter ring 131 is located on the side of the top shell wall 101 away from the opening. By rotatably disposing a portion of the adapter ring 131 in the mounting through hole, the adapter ring 131 can be more reliably locked to the mounting base 110. In another example, the adapter ring 131 can also be located entirely on the side of the top shell wall 101 away from the opening.

[0075] The external thread of the adapter ring 131 is arranged on the portion of the adapter ring 131 located on the side of the top shell wall 101 facing away from the outlet, so that the first locking nut 132 can cooperate with the adapter ring 131 on the side of the top shell wall 101 facing away from the outlet, and the first locking nut 132 can be locked to the top shell wall 101 in a locked state, that is, the first locking nut 132 generates a locking force between the surfaces opposite to each other of the top shell wall 101 when being tightened.

[0076] In some embodiments, in order to strengthen the locking between the columnar body (e.g., the first column 121) and the adapter ring 131 in the locked state, the locking structure may further include a second locking nut 133, the internal thread of the second locking nut 133 cooperates with the external thread of the columnar body (e.g., the first column 121), and the second locking nut 133 can be locked to the end surface of the adapter ring 131 located on the side of the top shell wall 101 away from the outlet (i.e., Figure 6 The second locking nut 133 can prevent the columnar body (such as the first column 121) and the adapter ring 131 from moving relative to each other due to loosening by generating a locking force between the second locking nut 133 and the upper end surface of the adapter ring 131 when being tightened, thereby improving the structural reliability. The locking method with the second locking nut 133 can reduce the occupied space and have a certain sealing performance.

[0077] In some embodiments, in order to make the adapter ring 131 only rotate and unable to move in the direction along the spiral axis A on the basis of installing the adapter ring 131 on the installation base 110 (i.e., the top shell wall 101), the locking assembly 130 also includes a limiting support structure, which is fixedly connected to the top shell wall 101 on the side close to the opening (i.e., the lower side of the top shell wall 101); the limiting support structure is used to support the end face of the adapter ring 131 close to the opening (i.e., the lower end face of the adapter ring 131). With the help of the limiting support structure, the adapter ring 131 can be supported by the limiting support structure when the first locking nut 132 is in a loose state, thereby preventing the adapter ring 131 from falling.

[0078] Furthermore, there may be a variety of position limiting support structures for realizing the above functions. For example, the position limiting support structure includes a support plate 134 and a fastener 135. The support plate 134 is annular and is arranged around the columnar body (for example, the first column 121), and is fixedly connected to the top shell wall 101 by the fastener 135 on the side of the top shell wall 101 close to the opening. The support plate 134 is used to support the end face of the adapter ring 131 close to the opening (that is, the lower end face of the adapter ring 131). Specifically, the inner circumference size of the support plate 134 is smaller than the size of the mounting through hole on the top shell wall 101, so that the inner circumference of the support plate 134 can protrude toward the inside of the mounting through hole relative to the hole wall of the mounting through hole, and the protruding inner circumference can support the adapter ring 131. It should be noted that the support plate 134 is not limited to being annular, as long as it can play a supporting role. In addition, the fastener 135 is, for example, a fastening screw, and a plurality of fasteners 135 may be used, and the fasteners 135 may be distributed at intervals along the circumference of the support plate 134, so that the support plate 134 can be evenly stressed and the connection stability is improved. Of course, the embodiment of the present invention is not limited to the support plate 134 being fixedly connected to the top shell wall 101 by the fastener 135. In practical applications, the support plate 134 and the top shell wall 101 may also be connected by a detachable method such as plugging, clamping, etc., or a non-detachable method such as welding, riveting, etc.

[0079] In some embodiments, in order to limit the relative position of the adapter ring 131 and the top shell wall 101 along the spiral axis A so that the adapter ring 131 can only rotate, the hole wall of the installation through hole is provided with a first step surface 101a facing the opening, and the outer periphery of the adapter ring 131 is provided with a limiting convex portion 131a, and the limiting convex portion 131a is respectively abutted between the first step surface 101a and the support plate 134. In this way, the top shell wall 101 and the support plate 134 can clamp and fix the limiting convex portion 131a therebetween, thereby realizing the limiting of the adapter ring 131 without affecting the rotation of the adapter ring 131.

[0080] Furthermore, in some embodiments, in order to reduce the space occupied by the support plate 134 in the internal space 103 of the shell and to limit the support plate 134, an annular groove is provided on the surface of the top shell wall 101 close to the opening side, and the annular groove surrounds the first step surface 101a, and the support plate 134 is at least partially disposed in the annular groove.

[0081] In the related art, a shower head (such as Figure 2 and Figure 3 The spray head 015 shown in the figure sprays the cleaning fluid at a certain pressure and spray speed. However, since the spray head sprays the cleaning fluid at a fixed angle, the cleaning range is small, which may cause some positions of the exhaust duct to not be cleaned. To solve this problem, please refer to Figure 5 and Figure 7 The exhaust duct cleaning device 100 provided in the embodiment of the present invention further includes a spray body 141, which is rotatably connected to the adjustment body 120 around the spiral axis A and has a spray channel 142, the inlet of the spray channel 142 is connected to the outlet of the inlet channel 123, and the outlet of the spray channel 142 ( Figure 7 The spray body 141 is used to communicate with the inside of the exhaust duct 200 and spray the cleaning fluid into the exhaust duct 200. The cleaning fluid provided by the supply pipeline 50 can flow into the spray channel 142 through the inlet channel 123, and the cleaning fluid is sprayed out through the spray channel 142 at a certain pressure and spray speed to wash the crystals on the exhaust duct 200. It is easy to understand that when the spray body 141 is provided, the spray body 141 can be extended into the exhaust duct 200 to adjust the ventilation cross-sectional area of ​​the exhaust duct 200.

[0082] On this basis, the spray channel 142 is configured to enable the spray body 141 to rotate relative to the adjustment body 120 around the spiral axis A by means of fluid power when spraying the cleaning fluid, that is, along the Figure 7 In other words, in the process of the cleaning fluid flowing through the spray body 141 until it is sprayed out, the cleaning fluid will apply a force to the spray body 141, and the force is the above-mentioned fluid power, which is used to drive the spray body 141 to rotate around the spiral axis A, so that the angle of the outlet of the spray channel 142 spraying the cleaning fluid in the circumferential direction can change with the rotation of the spray body 141, thereby expanding the cleaning range, ensuring that basically or even all positions of the exhaust duct 200 can be cleaned, and improving the cleaning effect.

[0083] Furthermore, in order to further expand the cleaning range and form a three-dimensional spray effect, please refer to Figures 7 to 12 The spray channel 142 includes at least one guide space 142a1 and a plurality of sub-spray channels 142b connected to each guide space 142a1. A main channel 142a is provided in the spray body 141. One end of the main channel 142a is connected to the outlet of the inlet channel 123, and the other end is provided with a guide plug 143. The side of the guide plug 143 exposed to the inside of the main channel 142a forms the above-mentioned guide space 142a1 with the channel wall of the main channel 142a. When the cleaning fluid flows through the guide space 142a1, the fluid power causes the spray body 141 to rotate around the spiral axis A relative to the adjustment body 120.

[0084] The above-mentioned guide plug 143 can not only block the cleaning fluid and prevent the cleaning fluid from flowing out directly from the lower end of the spray channel 142, but also when the cleaning fluid flows into the guide space 142a1, the guide plug 143 will exert a force on the surface of the guide space 142a1, and the force is the above-mentioned fluid power, which is used to drive the spray body 141 to rotate around the spiral axis A. The guide plug 143 to achieve this function can have a variety of structures, for example, Fig.11 As shown, the flow guide plug 143 includes a flow guide plug column, and a plurality of flow guide portions 144 disposed on the flow guide plug column at one side of the spray channel 142 (i.e., the main channel 142a) (i.e., the side opposite to the fluid flow direction in the main channel 142a), and the plurality of flow guide portions 144 are spaced and distributed around the spiral axis A. The plurality of flow guide portions 144 and the channel wall of the main channel 142a form a flow guide space 142a1, and the surface of the flow guide portion 144 forming the flow guide space 142a1 includes a first surface 1441, and the first surface 1441 is an arc-shaped surface, which is used to convert the flow direction of the cleaning fluid flowing into the flow guide space 142a1, so that the cleaning fluid after the flow direction conversion applies the above-mentioned fluid power to the flow guide portion 144.

[0085] Specifically, by distributing multiple guide portions 144 at intervals around the spiral axis A, part of the main channel 142a can be divided into multiple guide spaces 142a1 in the circumferential direction around the spiral axis A. In this way, the cleaning fluid entering the multiple guide spaces 142a1 can simultaneously apply a force to the surface of the guide spaces 142a1 constituted by the multiple guide portions 144, so that the forces are superimposed, thereby helping to drive the spray body 141 to rotate around the spiral axis A.

[0086] On this basis, during the spraying process, the cleaning fluid in the main channel 142a will flow along the Figure 7 The cleaning fluid flows into each guide space 142a1 in the direction of the downward arrow shown, and by making the first surface 1441 an arc-shaped surface, the cleaning fluid that originally flows vertically downward can change its flow direction under the action of the first surface 1441. The cleaning fluid after the flow direction change will generate a component force in the tangential direction of the circle around the spiral axis A, thereby applying a thrust to the guide part 144 on the opposite side, and then driving the spray body 141 to rotate around the spiral axis A relative to the adjustment body 120.

[0087] In some embodiments, the surface of each guide portion 144 constituting the guide space 142a1 further includes a second surface 1442, and the second surface 1442 is opposite to the first surface 1441. It is easy to understand that, among the two adjacent guide portions 144, the first surface 1441 of one guide portion 144 forms an angle with the second surface 1442 of the other guide portion 144, and the two and the channel wall of the main channel 142a form a guide space 142a1. The second surface 1442 is a vertical surface parallel to the spiral axis A. The second surface 1442 is used to drive the spray body 141 to rotate around the spiral axis A relative to the adjustment body 120 under the impetus of the cleaning fluid after the flow direction is converted. By making the second surface 1442 a vertical surface parallel to the spiral axis A, on the one hand, the cleaning fluid can flow more smoothly into the guide space 142a1; on the other hand, it can be ensured that when the cleaning fluid after the flow direction is changed acts on the second surface 1442, no force opposite to the component force in the tangential direction of the circle around the spiral axis A is generated, thereby ensuring that the fluid dynamics generated by the cleaning fluid after the flow direction is changed can drive the spray body 141 to rotate around the spiral axis A relative to the adjustment body 120.

[0088] Specifically, the flow guide portion 144 is a sheet-like protrusion formed on the flow guide plug column. The sheet-like protrusion as a whole generally extends along the radial direction of the circumference around the spiral axis A. The sheet-like protrusion has two surfaces that are separated from each other in the circumferential direction around the spiral axis A. The two surfaces are the first surface 1441 and the second surface 1442 mentioned above. Fig.11 Taking the clockwise rotation of the spiral axis A as an example, the multiple first surfaces 1441 can convert the flow direction of the cleaning fluid, and the cleaning fluid after the flow direction conversion will generate a component force in the tangential direction of the circle around the spiral axis A in the clockwise direction, pushing the guide plug column to rotate clockwise, and then driving the spray body 141 to rotate synchronously.

[0089] In some embodiments, the inlets 142b1 of the plurality of sub-spray channels 142b are located on the inner wall of the main channel 142a and communicate with the corresponding flow guide spaces 142a1; the outlets 142b2 of the plurality of sub-spray channels 142b are located on the outer peripheral surface of the spray body 141. Under the flow guiding effect of the first surface 1441, the cleaning fluid flowing into each flow guide space 142a1 will flow through the inlets 142b1 of the plurality of sub-spray channels 142b corresponding to each flow guide space 142a1, enter the sub-spray channels 142b, and finally be sprayed out from the outlets 142b2 on the outer peripheral surface of the spray body 141. Since the outlet 142b2 of each sub-spray channel 142b is located on the outer peripheral surface of the spray body 141, the cleaning fluid can be sprayed toward the surroundings of the spray body 141. Combined with the rotation of the spray body 141 around the rotation axis A during the spraying process, the cleaning range can be further expanded to form a three-dimensional spray effect, thereby greatly improving the cleaning effect.

[0090] like Fig.10 and Fig.12 As shown, a plurality of sub-spray channels 142b connected to the same flow guiding space 142a1 form a spray group 142b3, and each spray group 142b3 is arranged in one-to-one correspondence with each flow guiding space 142a1. Figure 8 , Fig. 9 and Fig.12 As shown, the outer peripheral surface of the spray body 141 is a part of a spherical surface, specifically, a middle part of the complete spherical surface that is retained after the upper part and the lower part are removed.

[0091] On this basis, the plurality of sub-spray channels 142b in each spray group 142b3 are respectively along the axial cross section ( Fig. 9 The spray angles of the outlets 142b2 of the plurality of sub-spray channels 142b in each spray group 142b3 can cover a larger angle range, thereby forming a three-dimensional spray effect. Fig. 9As shown, on the axial section of the outer circumferential surface of the spray body 141 (i.e., the middle part of the above-mentioned spherical surface), the inlets 142b1 of the multiple sub-spray channels 142b in each spray group 142b3 are spaced apart in a direction parallel to the spiral axis A, the outlets 142b2 of the multiple sub-spray channels 142b in each spray group 142b3 are spaced apart along the arc-shaped contour of the outer circumferential surface of the spray body 141 (i.e., the middle part of the above-mentioned spherical surface), and the multiple sub-spray channels 142b in each spray group 142b3 are radially distributed from the inside to the outside, thereby helping to further expand the cleaning range.

[0092] Furthermore, in some embodiments, Fig.13 As shown, the tangent C1 at the upper end of the first surface 1441 (i.e., the arc-shaped surface) is parallel to the spiral axis A, so that the fluid in the main channel 142a can flow into the guide space 142a1 with minimum resistance. In some embodiments, the axis of any one of the multiple sub-spray channels 142b in each spray group 142b3 is tangent to the lower end of the first surface 1441 (i.e., the arc-shaped surface), so that the fluid in the guide space 142a1 can flow smoothly to the inlet 142b1 of each sub-spray channel 142b under the guidance of the first surface 1441 (i.e., the arc-shaped surface). Preferably, the axis of the one located at the bottom of the multiple sub-spray channels 142b in each spray group 142b3 is tangent to the lower end of the first surface 1441 (i.e., the arc-shaped surface), and the guide effect is better.

[0093] In practical applications, when designing the above-mentioned arcuate surface, after determining the above-mentioned tangent C1 and tangent C2, the intersection O of the normals D1 and D2 on the axial section of the guide plug column, which are respectively perpendicular to the tangent C1 and tangent C2, can be used as the center of the orthographic projection of the arcuate surface on the axial section of the guide plug column, thereby determining the orthographic projection shape of the arcuate surface on the axial section of the guide plug column.

[0094] In a specific embodiment, the plurality of guide portions 144 are connected to the guide plug column as a whole, and between each two adjacent guide portions 144, the first surface 1441 of one guide portion 144 and the second surface 1442 of the other guide portion 144 are smoothly transitioned through an arc surface 1443 to ensure smooth flow of the cleaning fluid. On this basis, the plurality of guide portions 144 are evenly distributed along the circumferential direction around the spiral axis A, for example, Fig.13 Four guide portions 144 are shown, and the angle between the upper end of the first surface 1441 and the upper end of the second surface 1442 is, for example, 90°.

[0095] There are many ways to connect the spray body 141 to the adjustment body 120 rotatably around the spiral axis A, for example, Figure 7As shown, the spray assembly 140 also includes a bearing assembly, through which the spray body 141 can be rotatably connected to the adjustment body 120 around the spiral axis A; and the bearing assembly includes a bearing 145, a bearing seat 146 and a bearing locking member 147, wherein the bearing seat 146 is fixed to the end of the outlet of the inlet channel 123 of the adjustment body 120, such as the lower end of the second column 122. The specific fixing method is, for example, that the outer periphery of the bearing seat 146 is provided with an external thread, the second column 122 is provided with a threaded hole, and the bearing seat 146 is fixed to the second column 122 by matching its external thread with the threaded hole. In some embodiments, a sealing boss 1461 is also provided on the outer periphery of the bearing seat 146, and a sealing ring 1462 is provided between the sealing boss 1461 and the second column 122 to prevent leakage of the cleaning fluid. An installation space is provided in the bearing seat 146; the bearing 145 is provided in the installation space and sleeved on the outer periphery of the spray body 141. In some embodiments, there are two bearings 145 , for example, which are arranged in sequence along the screw axis A and separated by the shaft ring 1463 .

[0096] The bearing locking member 147 is disposed between the bearing 145 and the adjusting body 120 (e.g., the second cylinder 122) to limit the position of the bearing 145 in a direction parallel to the spiral axis A. The bearing seat 146 provides support for the bearing 145, and the bearing locking member 147 prevents the bearing 145 from being displaced in a direction parallel to the spiral axis A by pressing the bearing 145.

[0097] In some embodiments, the bearing 145 is, for example, a rolling bearing, and its inner ring portion is used to cooperate with the spray body 141 and rotate together; the outer ring portion is used to cooperate with the bearing seat 146 to support the inner ring portion and the rolling element in the middle. In this case, the outer periphery of the spray body 141 is provided with a second step surface 141c facing the bearing locking member 147, and the upper and lower end surfaces of the inner ring portion of the bearing 145 in the direction of the spiral axis A are respectively against the second step surface 141c and the bearing locking member 147; and the bearing locking member 147 is spaced apart from the adjustment body 120 (for example, the second column 122), and the bearing locking member 147 can rotate with the spray body 141. The inner wall of the bearing seat 146 constituting the installation space is provided with a third step surface 1464 facing the bearing locking member 147, and the outer ring portion of the bearing 145 is supported by the third step surface 1464.

[0098] In a specific embodiment, the spray body 141 includes a connecting column 141a and a spherical spray head 141b, wherein the installation space of the bearing seat 146 is a through hole that passes through the bearing seat 146 in a direction parallel to the spiral axis A, and an annular flange 1465 is provided on the wall of the through hole to prevent the bearing 145 from coming out of the through hole, and a third step surface 1464 is provided on the annular flange 1465 to support the outer ring portion of the bearing 145. The connecting column 141a is penetrated through the through hole, and the outer peripheral surface of the connecting column 141a is provided with a second step surface 141c facing the bearing locking member 147, and the second step surface 141c is used to support the inner ring portion of the bearing 145. In some examples, the second step surface 141c is flush with the third step surface 1464. The spherical spray head 141b is located outside the through hole, the main channel 142a passes through the connecting column 141a and the spherical spray head 141b in sequence, and the guide plug 143 is arranged in the spherical spray head 141b. For example, the guide plug 143 is embedded in the part of the main channel 142a in the spherical spray head 141b by welding or the like.

[0099] like Fig.14 As shown, the surface of the bearing locking member 147 opposite to the connecting column 141a is provided with an accommodating groove, a part of the connecting column 141a is provided in the accommodating groove, and a sealing ring 148 is provided between the connecting column 141a and the groove bottom surface of the accommodating groove and around the main channel 142a to prevent the cleaning fluid from leaking from the gap between the connecting column 141a and the bearing locking member 147 and flowing to the position where the bearing 145 is located. In addition, a fourth step surface 1472 is provided on the surface of the bearing locking member 147 opposite to the bearing 145, and the fourth step surface 1472 abuts against the inner ring part of the bearing 145, that is, the fourth step surface 1472 and the second step surface 141c jointly clamp and fix the inner ring part of the bearing 145, thereby realizing the limiting of the bearing 145. It should be noted that the outer ring part of the bearing 145 is not subjected to pressure on the side of the bearing locking member 147.

[0100] In some embodiments, in order to increase the resistance of the cleaning fluid flowing along the gap and reduce the leakage of the cleaning fluid, the interval 149 between the bearing locking member 147 and the adjusting body 120 (for example, the second column 122) forms a labyrinth structure. The two surfaces of the bearing locking member 147 and the adjusting body 120 facing each other are, for example, concave-convex surfaces, and the concave parts and convex parts in the two concave-convex surfaces are nested with each other to form the above-mentioned labyrinth structure. Fig.14 The convex portion 1473 of the bearing locking member 147 and the concave portion of the second column 122 are shown to be nested with each other, and the convex portion 1221 of the second column 122 and the concave portion of the bearing locking member 147 are shown to be nested with each other.

[0101] In some embodiments, in order to increase the resistance of the cleaning fluid flowing along the gap and reduce the leakage of the cleaning fluid, at least one of the surfaces of the bearing locking member 147 and the adjusting body 120 (for example, the second column 122) facing each other is provided with at least one groove 1491. The groove 1491 is, for example, annular and surrounds the main channel 142a or the inlet channel 123.

[0102] To summarize, the exhaust duct cleaning device 100 provided in the embodiment of the present invention is provided with a spirally matched adjusting body 120 and a locking assembly 130, and the locking assembly 130 can rotate around the spiral axis A in the adjustment state, and drive the adjusting body 120 to move along the spiral axis A relative to the mounting base 110, so that the adjusting body 120 can change its relative position with the exhaust duct 200 without rotating, so as to adjust the ventilation cross-sectional area of ​​the exhaust duct 200, and at the same time ensure that the adjusting body 120 and the supply pipeline 50 of the cleaning fluid are always connected during the adjustment process, so that there is no need to disconnect the connection between the adjusting body 120 and the supply pipeline 50 before adjustment, thereby simplifying the operation and reducing the risk of leakage of the cleaning liquid.

[0103] As another technical solution, Figure 4 As shown, an embodiment of the present invention further provides a semiconductor process equipment, including a process chamber 30, an exhaust duct 200 connected to the process chamber 30, and an exhaust duct cleaning device; the exhaust duct cleaning device adopts the above-mentioned exhaust duct cleaning device 100 provided by an embodiment of the present invention.

[0104] In some embodiments, taking the semiconductor process equipment 10 as a single-wafer cleaning equipment as an example, its process chamber 30 includes a plurality of recovery chambers 31 stacked in a vertical direction, which are used to recover gases (such as harmful gases such as acidic and alkaline gases) volatilized during the cleaning process. Each recovery chamber 31 has an exhaust port and is connected to an exhaust duct 200. The exhaust duct 200 is used to discharge the gas in the recovery chamber 31. The chuck 40 is arranged in a space surrounded by a plurality of recovery chambers 31 and can be raised and lowered and rotated, and can reach a height position corresponding to any layer of recovery chambers 31. During the process, the chuck 40 drives the wafer to rotate, and at the same time, the nozzle located above the wafer starts to spray liquid medicine on the wafer. After the liquid medicine falls on the wafer, it will splash into the corresponding recovery chamber 31 in the circumferential direction under the action of centrifugal force. In this process, liquid medicine particles will be generated due to the impact of the liquid medicine on the wafer and the side wall of the recovery chamber 31 to form liquid mist, and spread to the entire space. At the same time, the exhaust flow field draws the scattered liquid mist away from the recovery chamber 31 through the exhaust duct 200, thereby preventing the liquid mist from spreading. It should be noted that the figure only shows that one exhaust duct 200 is connected to the recovery chamber 31 of the top layer. In fact, there can be multiple exhaust ducts 200, and multiple exhaust ducts 200 are connected to multiple recovery chambers 31 in a one-to-one correspondence. In addition, each exhaust duct 200 can be installed with the exhaust duct cleaning device 100 provided in the embodiment of the present invention.

[0105] The semiconductor process equipment provided by the embodiment of the present invention adopts the above-mentioned exhaust duct cleaning device 100 provided by the embodiment of the present invention, which does not need to disconnect the connection between the adjustment body 120 and the supply pipeline 50 before adjustment, thereby simplifying the operation and reducing the risk of leakage of the cleaning liquid.

[0106] It is to be understood that the above embodiments are merely exemplary embodiments used to illustrate the principles of the present invention, but the present invention is not limited thereto. For those of ordinary skill in the art, various modifications and improvements can be made without departing from the spirit and essence of the present invention, and these modifications and improvements are also considered to be within the scope of protection of the present invention.

Claims

1. An exhaust duct cleaning device, applied to semiconductor process equipment, characterized in that: It comprises a mounting base, an adjusting body and a locking assembly, wherein the mounting base can be mounted on the exhaust duct when in use; The regulating body can extend into the exhaust duct and has an inlet channel for conveying a cleaning fluid, and an outlet of the inlet channel is used to communicate with the interior of the exhaust duct; The locking assembly is spirally matched with the adjusting body and is rotatably connected to the mounting base around a spiral axis; the locking assembly can switch between a locking state and an adjusting state, in which the locking assembly is used to lock the adjusting body to the mounting base; in the adjusting state, the locking assembly can rotate around the spiral axis and drive the adjusting body to move along the spiral axis relative to the mounting base.

2. The exhaust duct cleaning device according to claim 1, characterized in that: The regulating body comprises a columnar body with an outer circumference having an external thread, and the axis of the columnar body is the spiral axis; the inlet channel is arranged in the columnar body; The locking assembly includes an adapter ring having an inner circumference with an internal thread, and a locking structure, wherein the internal thread of the adapter ring cooperates with the external thread of the columnar body; the locking structure is used to lock the adapter ring to the mounting base in the locking state; and to release the locking of the adapter ring in the adjustment state.

3. The exhaust duct cleaning device according to claim 2, characterized in that: The outer circumference of the adapter ring has external threads; The locking structure includes a first locking nut, the internal thread of the first locking nut cooperates with the external thread of the adapter ring, and the first locking nut can be locked to the mounting base in the locking state to lock the adapter ring to the mounting base.

4. The exhaust duct cleaning device according to claim 3, characterized in that: The mounting base comprises a shell, which can be sealed and mounted on the exhaust duct when in use, and the inner space of the shell is communicated with the opening on the exhaust duct; a mounting through hole is provided on the shell wall of the shell opposite to the opening, and the columnar body is passed through the mounting through hole; The adapter ring is at least partially located on the side of the shell wall away from the opening, and the external thread of the adapter ring is arranged on the portion of the adapter ring located on the side of the shell wall away from the opening, and the first locking nut can be locked to the shell wall in the locked state.

5. The exhaust duct cleaning device according to claim 4, characterized in that: The locking structure also includes a second locking nut, the internal thread of the second locking nut cooperates with the external thread of the columnar body, and the second locking nut can be locked on the end surface of the adapter ring away from the opening.

6. The exhaust duct cleaning device according to claim 4, characterized in that: The locking assembly further comprises a limiting support structure, which is fixedly connected to the shell wall at a side close to the opening; the limiting support structure is used to support the end face of the adapter ring close to the opening.

7. The exhaust duct cleaning device according to claim 6, characterized in that: The position-limiting support structure includes a support plate and a fastener, wherein the support plate is annular and is disposed around the columnar body and is fixedly connected to the shell wall through the fastener on a side close to the opening; The support plate is used to support the end surface of the adapter ring close to the opening.

8. The exhaust duct cleaning device according to claim 7, characterized in that: The hole wall of the mounting through hole is provided with a first step surface facing the opening, and the outer periphery of the adapter ring is provided with a limiting convex portion, and the limiting convex portion is respectively abutted between the first step surface and the support plate.

9. The exhaust duct cleaning device according to any one of claims 1 to 8, characterized in that: It also includes a spray body, which can be rotatably connected to the adjustment body around the spiral axis and has a spray channel. The inlet of the spray channel is connected to the outlet of the inlet channel, and the outlet of the spray channel is used to communicate with the inside of the exhaust duct for spraying the cleaning fluid into the exhaust duct.

10. The exhaust duct cleaning device according to claim 9, characterized in that: The spray channel is configured to enable the spray body to rotate relative to the adjustment body around the spiral axis by means of fluid power when spraying the cleaning fluid.

11. The exhaust duct cleaning device according to claim 9, characterized in that: The spray channel includes at least one guide space and a plurality of sub-spray channels connected to each of the guide spaces. A main channel is arranged in the spray body, one end of the main channel is connected to the outlet of the inlet channel, and the other end is arranged with a guide plug. The side of the guide plug exposed to the inside of the main channel and the channel wall of the main channel constitute the guide space. When the cleaning fluid flows through the guide space, the fluid power causes the spray body to rotate around the spiral axis relative to the adjustment body.

12. The exhaust duct cleaning device according to claim 11, characterized in that: The guide plug comprises a guide plug column, and a plurality of guide parts arranged on one side of the guide plug column and located inside the spray channel, wherein the plurality of guide parts are spaced and distributed around the spiral axis; The plurality of guide portions and the channel wall of the main channel form a plurality of guide spaces. The surfaces of the guide portions forming the guide spaces include a first surface, and the first surface is an arc-shaped surface.

13. The exhaust duct cleaning device according to claim 12, characterized in that: The outer peripheral surface of the spray body is a part of a spherical surface; The plurality of sub-spray channels connected to each of the flow guide spaces extend in a plurality of different directions along the axial cross section of the outer peripheral surface of the spray body, and are radially distributed from the inner wall of the main channel to the outer peripheral surface of the spray body.

14. The exhaust duct cleaning device according to claim 13, characterized in that: The axis of the bottommost one of the plurality of sub-spray channels is tangent to the lower end of the arc-shaped surface; and / or A tangent line of the upper end of the arcuate surface is parallel to the spiral axis.

15. The exhaust duct cleaning device according to claim 12, characterized in that: The surface of the guide portion constituting the guide space further includes a second surface opposite to the first surface, and the second surface is a vertical surface parallel to the spiral axis.

16. The exhaust duct cleaning device according to claim 9, characterized in that: The exhaust duct cleaning device further comprises a bearing assembly, through which the spray body can be rotatably connected to the adjustment body around the spiral axis; the bearing assembly comprises a bearing, a bearing seat and a bearing locking member, wherein the bearing seat is fixed to the end of the flow outlet of the inlet channel of the adjustment body, and an installation space is provided in the bearing seat; the bearing is provided in the installation space and sleeved on the outer periphery of the spray body; The bearing locking member is arranged between the bearing and the adjusting body, and is used to limit the position of the bearing in a direction parallel to the screw axis.

17. The exhaust duct cleaning device according to claim 16, characterized in that: The bearing locking member is spaced apart from the adjusting body, and the bearing locking member can rotate along with the spraying body; The interval between the bearing locking member and the adjusting body forms a labyrinth structure; and / or at least one of the surfaces of the bearing locking member and the adjusting body facing each other is provided with at least one groove.

18. A semiconductor process equipment, comprising a process chamber, an exhaust duct connected to the process chamber, and an exhaust duct cleaning device; characterized in that: The exhaust duct cleaning device adopts the exhaust duct cleaning device as described in any one of claims 1-17.

19. The semiconductor process equipment according to claim 18, characterized in that: The semiconductor process equipment includes a cleaning device, and the process chamber includes a plurality of recovery chambers stacked in a vertical direction; There are multiple exhaust ducts, and the multiple exhaust ducts are connected to the multiple recovery chambers one by one, and are used to discharge the gas in each recovery chamber respectively; each exhaust duct is provided with an opening; There are multiple exhaust duct cleaning devices, and the multiple exhaust duct cleaning devices are installed in a one-to-one correspondence on the multiple exhaust ducts, and the adjustment body can extend into the exhaust duct through the corresponding openings of the exhaust duct.

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