Cleaning method for removing pollutants deposited on surface of fluoride coating heater

Abstract

The invention relates to a cleaning method for removing pollutants deposited on the surface of a fluoride coating heater. The cleaning method comprises the specific steps that appearance inspection is conducted on a part, and a universal meter is used for detecting a resistor; the binding post part is protected; a white corundum sand material is used for sand blasting and film removal; blowing through an air gun; carrying out deprotection and washing; the heater is right placed in an ultrasonic cleaning tank, deionized water is used for ultrasonic cleaning, and the part is rotated by 90 degrees once every 3 min; wiping with isopropyl alcohol; the part is put into an ultrasonic cleaning tank to be cleaned, the part is rotated by 90 degrees once every 3 min, and whether marks are generated or not is observed; purging with nitrogen; performing drying; performing inspection; and vacuum packaging. The white corundum sand material is used for conducting sand blasting and film removing treatment on the surface of the component, a small amount of residual pollutants on the surface of the component can be rapidly removed, and it is guaranteed that the surface of the component keeps uniform; and the part is rotated once every 3 minutes during ultrasonic cleaning, so that the surface can be controlled not to generate marks due to ultrasonic oscillation.

Description

Technical Field

[0001] The invention relates to the technical field of cleaning precision parts of semiconductor equipment, and in particular to a cleaning method for removing pollutants deposited on the surface of a fluoride coating heater. Background Art

[0002] The existing cleaning method for aluminum nitride heater components in chemical vapor deposition equipment is to use acetone wiping + protection + neutralization acid immersion + pure water rinsing + pure water overflow. This process uses chemicals, has a high risk factor, and there is a risk of residual acid. Using this process, it is easy to reverse the seepage of acid points on the fluoride layer, affecting the use effect of the heater. Summary of the invention

[0003] The present invention aims to solve the deficiencies of the prior art and provides a cleaning method for removing pollutants deposited on the surface of a fluoride coating heater.

[0004] In order to achieve the above object, the present invention adopts the following technical solutions:

[0005] A cleaning method for removing deposited pollutants on the surface of a fluoride coating heater, the specific steps are:

[0006] S1. Visually inspect the components and use a multimeter to detect the resistance:

[0007] The appearance inspection includes: checking whether there are white spots on the heater coating surface, whether the surface of the component is damaged, and whether the terminal is bent; using a multimeter to detect whether there is resistance;

[0008] S2. Protection:

[0009] Use special tooling and black tape to protect the terminal part;

[0010] S3, stripping sandblasting:

[0011] Place the heater on the fixture, use WA220# white corundum abrasive material, and the pressure is 2-3kg / cm 2 Sandblasting is performed to remove the film. The sandblasting machine is a manual sandblasting machine. The operator holds a sandblasting gun to perform horizontal sandblasting and controls the sandblasting time according to the film quality.

[0012] S4, air gun purge:

[0013] Use an air gun to blow the heater surface until there is no obvious sand material attached, the pressure is 30±5Psi;

[0014] S5, deprotection, washing:

[0015] Remove the tooling and tape protection, use a dust-free cloth dipped in isopropyl alcohol to wipe the sealing area of ​​the component to remove the residual offset of the protective tape and rinse the surface with deionized water for 2-3 minutes. The protective fixture flows with the component;

[0016] S6, ultrasonic cleaning:

[0017] Place the heater in an ultrasonic cleaning tank and use deionized water for ultrasonic cleaning. The deionized water is in an overflow state. The ultrasonic intensity is controlled at 4-10 watts / inch for 15 minutes. Rotate the component 90 degrees every 3 minutes to prevent marks caused by ultrasonic vibration and completely remove a small amount of sand and other particles remaining on the surface of the component.

[0018] S7, Isopropyl alcohol wipe:

[0019] Wipe the entire part with a lint-free cloth dampened with isopropyl alcohol;

[0020] S8, ultrasonic cleaning:

[0021] Transfer the parts to a Class 100 clean room, then place them in an ultrasonic cleaning tank for 15 minutes, rotate the parts 90 degrees every 3 minutes, and observe whether there are any marks; Ultrasonic frequency: 40KHZ; Ultrasonic power density: 4-10 watts / square inch;

[0022] S9, Nitrogen purge:

[0023] For the flushed parts, use 99.999% pure nitrogen to purge the surface to remove residual moisture on the surface of the parts. The pressure is 30±5Psi.

[0024] S10, Drying:

[0025] Transfer the purged parts to a clean drying oven, heat them to 105°C and dry them for 2 hours. After the parts cool naturally, take them out.

[0026] S11. Inspection:

[0027] Use a particle detector to check the surface particle size; use a UV lamp to check whether there are impurities and fiber residues on the surface; use a multimeter to check the resistance of the terminal before shipment;

[0028] S12, Vacuum packaging:

[0029] Before packaging, the entire system is purged with nitrogen at a pressure of 30±5Psi; the components are vacuum packaged with 2 layers of PE bags.

[0030] In step S3, the sandblasting time is 1-3 minutes.

[0031] In step S3, the entire sandblasting operation is performed under closed sandblasting conditions.

[0032] In step S7, when wiping, the focus is on the work surface.

[0033] In step S10, the component is naturally cooled to a temperature below 40°C.

[0034] In step S10, the tooling needs to be removed before baking, and when removing it, pay attention to whether the terminal is deformed.

[0035] In step S12, the terminal part is protected with tooling before packaging, and a dust-free cloth is placed on the bottom of the component before packaging.

[0036] The beneficial effects of the present invention are as follows: the present invention uses white corundum sand material to perform sandblasting and film removal treatment on the surface of the component, which can quickly remove a small amount of residual pollutants on the surface of the component and ensure that the surface of the component remains uniform; the ultrasonic cleaning rotates the component once every 3 minutes, which can control the surface not to produce marks due to ultrasonic vibration, does not use chemical drugs for film removal, and is more environmentally friendly. DETAILED DESCRIPTION

[0037] The principles and features of the present invention are described below in conjunction with specific embodiments. The embodiments are only used to explain the present invention and are not used to limit the scope of the present invention. The advantages and features of the present invention will become more apparent from the following description.

[0038] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art of the present invention. The terms used herein in the specification of the present invention are only for the purpose of describing specific embodiments and are not intended to limit the present invention. The term "and / or" used herein includes any and all combinations of one or more related listed items.

[0039] The present invention will be further described below in conjunction with specific embodiments: Specific embodiment 1:

[0041] A cleaning method for removing deposited pollutants on the surface of a fluoride coating heater, the specific steps are:

[0042] S1. Visually inspect the components and use a multimeter to detect the resistance:

[0043] The appearance inspection includes: checking whether there are white spots on the heater coating surface, whether the surface of the component is damaged, and whether the terminal is bent; using a multimeter to detect whether there is resistance;

[0044] S2. Protection:

[0045] Use special tooling and black tape to strictly protect the terminal part;

[0046] S3, stripping sandblasting:

[0047] Place the heater on the fixture, use WA220# white corundum abrasive material, and the pressure is 2kg / cm 2 Sandblasting is performed to remove the film. The sandblasting machine is a manual sandblasting machine. The operator holds a sandblasting gun to perform horizontal sweeping sandblasting. The sandblasting time is 1 minute (depending on the film quality, the sandblasting time can be appropriately extended; the entire sandblasting operation is carried out under closed sandblasting conditions);

[0048] S4, air gun purge:

[0049] Use an air gun to blow the heater surface until there is no obvious sand material attached, the pressure is 30±5Psi;

[0050] S5, deprotection, washing:

[0051] Remove the tooling and tape protection, use a dust-free cloth dipped in isopropyl alcohol to wipe the sealing area of ​​the component to remove the residual offset of the protective tape and rinse the surface with deionized water for 2 minutes. The protective fixture flows with the component;

[0052] S6, ultrasonic cleaning:

[0053] Place the heater in an ultrasonic cleaning tank and use deionized water for ultrasonic cleaning. The deionized water is in an overflow state. The ultrasonic intensity is controlled at 4 watts / inch for 15 minutes. Rotate the component 90 degrees every 3 minutes to prevent marks caused by ultrasonic vibration and completely remove a small amount of sand and other particles remaining on the surface of the component.

[0054] S7, Isopropyl alcohol wipe:

[0055] Wipe the entire part with a dust-free cloth dipped in isopropyl alcohol, paying special attention to the work surface;

[0056] S8, ultrasonic cleaning:

[0057] Transfer the parts to a Class 100 clean room, then place them in an ultrasonic cleaning tank for 15 minutes, rotate the parts 90 degrees every 3 minutes, and observe whether there are any marks; Ultrasonic frequency: 40KHZ; Ultrasonic power density: 4 watts / square inch;

[0058] S9, Nitrogen purge:

[0059] For the flushed parts, use 99.999% pure nitrogen to purge the surface to remove residual moisture on the surface of the parts. The pressure is 30±5Psi.

[0060] S10, Drying:

[0061] Transfer the purged parts to a clean drying oven, heat them to 105°C and dry them for 2 hours. After the parts cool naturally (below 40°C), take them out. Note: the tooling must be removed before baking, and pay attention to whether the terminal is deformed when removing it.

[0062] S11. Inspection:

[0063] Use a particle detector to check the surface particle size; use a UV lamp to check whether there are impurities and fiber residues on the surface; use a multimeter to check the resistance of the terminal before shipment;

[0064] S12, Vacuum packaging:

[0065] Before packaging, the entire system is purged with nitrogen at a pressure of 30±5Psi; the components are vacuum packaged with 2 layers of PE bags, the terminal parts are protected with tooling before packaging, and dust-free cloth is placed on the bottom of the components before packaging. Specific embodiment 2:

[0067] A cleaning method for removing deposited pollutants on the surface of a fluoride coating heater, the specific steps are:

[0068] S1. Visually inspect the components and use a multimeter to detect the resistance:

[0069] The appearance inspection includes: checking whether there are white spots on the heater coating surface, whether the surface of the component is damaged, and whether the terminal is bent; using a multimeter to detect whether there is resistance;

[0070] S2. Protection:

[0071] Use special tooling and black tape to strictly protect the terminal part;

[0072] S3, stripping sandblasting:

[0073] Place the heater on the fixture, use WA220# white corundum abrasive material, and the pressure is 3kg / cm 2 Sandblasting is performed to remove the film. The sandblasting machine is a manual sandblasting machine. The operator holds a sandblasting gun to perform horizontal sweeping sandblasting. The sandblasting time is 3 minutes (depending on the film quality, the sandblasting time can be appropriately extended; the entire sandblasting operation is carried out under closed sandblasting conditions);

[0074] S4, air gun purge:

[0075] Use an air gun to blow the heater surface until there is no obvious sand material attached, the pressure is 30±5Psi;

[0076] S5, deprotection, washing:

[0077] Remove the tooling and tape protection, use a dust-free cloth dipped in isopropyl alcohol to wipe the sealing area of ​​the component to remove the residual offset of the protective tape and rinse the surface with deionized water for 3 minutes. The protective fixture flows with the component;

[0078] S6, ultrasonic cleaning:

[0079] Place the heater in an ultrasonic cleaning tank and use deionized water for ultrasonic cleaning. The deionized water is in an overflow state. The ultrasonic intensity is controlled at 10 watts / inch for 15 minutes. Rotate the component 90 degrees every 3 minutes to prevent marks caused by ultrasonic vibration and completely remove a small amount of sand and other particles remaining on the surface of the component.

[0080] S7, Isopropyl alcohol wipe:

[0081] Wipe the entire part with a dust-free cloth dipped in isopropyl alcohol, paying special attention to the work surface;

[0082] S8, ultrasonic cleaning:

[0083] Transfer the parts to a Class 100 clean room, then place them in an ultrasonic cleaning tank for 15 minutes, rotate the parts 90 degrees every 3 minutes, and observe whether there are any marks; Ultrasonic frequency: 40KHZ; Ultrasonic power density: 10 watts / square inch;

[0084] S9, Nitrogen purge:

[0085] For the flushed parts, use 99.999% pure nitrogen to purge the surface to remove residual moisture on the surface of the parts. The pressure is 30±5Psi.

[0086] S10, Drying:

[0087] Transfer the purged parts to a clean drying oven, heat them to 105°C and dry them for 2 hours. After the parts cool naturally (below 40°C), take them out. Note: the tooling must be removed before baking, and pay attention to whether the terminal is deformed when removing it.

[0088] S11. Inspection:

[0089] Use a particle detector to check the surface particle size; use a UV lamp to check whether there are impurities and fiber residues on the surface; use a multimeter to check the resistance of the terminal before shipment;

[0090] S12, Vacuum packaging:

[0091] Before packaging, the entire system is purged with nitrogen at a pressure of 30±5Psi; the components are vacuum packaged with 2 layers of PE bags, the terminal parts are protected with tooling before packaging, and dust-free cloth is placed on the bottom of the components before packaging. Specific embodiment 3:

[0093] A cleaning method for removing deposited pollutants on the surface of a fluoride coating heater, the specific steps are:

[0094] S1. Visually inspect the components and use a multimeter to detect the resistance:

[0095] The appearance inspection includes: checking whether there are white spots on the heater coating surface, whether the surface of the component is damaged, and whether the terminal is bent; using a multimeter to detect whether there is resistance;

[0096] S2. Protection:

[0097] Use special tooling and black tape to strictly protect the terminal part;

[0098] S3, stripping sandblasting:

[0099] Place the heater on the fixture, use WA220# white corundum abrasive material, and the pressure is 2.5kg / cm 2 Sandblasting is performed to remove the film. The sandblasting machine is a manual sandblasting machine. The operator holds a sandblasting gun to perform horizontal sweeping sandblasting. The sandblasting time is 2 minutes (depending on the film quality, the sandblasting time can be appropriately extended; the entire sandblasting operation is carried out under closed sandblasting conditions);

[0100] S4, air gun purge:

[0101] Use an air gun to blow the heater surface until there is no obvious sand material attached, the pressure is 30±5Psi;

[0102] S5, deprotection, washing:

[0103] Remove the tooling and tape protection, use a dust-free cloth dipped in isopropyl alcohol to wipe the sealing area of ​​the component to remove the residual offset of the protective tape and rinse the surface with deionized water for 2.5 minutes. The protective fixture flows with the component;

[0104] S6, ultrasonic cleaning:

[0105] Place the heater in an ultrasonic cleaning tank and use deionized water for ultrasonic cleaning. The deionized water is in an overflow state. The ultrasonic intensity is controlled at 4-10 watts / inch for 15 minutes. Rotate the component 90 degrees every 3 minutes to prevent marks caused by ultrasonic vibration and completely remove a small amount of sand and other particles remaining on the surface of the component.

[0106] S7, Isopropyl alcohol wipe:

[0107] Wipe the entire part with a dust-free cloth dipped in isopropyl alcohol, paying special attention to the work surface;

[0108] S8, ultrasonic cleaning:

[0109] Transfer the parts to a Class 100 clean room, then place them in an ultrasonic cleaning tank for 15 minutes, rotate the parts 90 degrees every 3 minutes, and observe whether there are any marks; Ultrasonic frequency: 40KHZ; Ultrasonic power density: 6 watts / square inch;

[0110] S9, Nitrogen purge:

[0111] For the flushed parts, use 99.999% pure nitrogen to purge the surface to remove residual moisture on the surface of the parts. The pressure is 30±5Psi.

[0112] S10, Drying:

[0113] Transfer the purged parts to a clean drying oven, heat them to 105°C and dry them for 2 hours. After the parts cool naturally (below 40°C), take them out. Note: the tooling must be removed before baking, and pay attention to whether the terminal is deformed when removing it.

[0114] S11. Inspection:

[0115] Use a particle detector to check the surface particle size; use a UV lamp to check whether there are impurities and fiber residues on the surface; use a multimeter to check the resistance of the terminal before shipment;

[0116] S12, Vacuum packaging:

[0117] Before packaging, the entire system is purged with nitrogen at a pressure of 30±5Psi; the components are vacuum packaged with 2 layers of PE bags, the terminal parts are protected with tooling before packaging, and dust-free cloth is placed on the bottom of the components before packaging.

[0118] The purpose of the present invention is to completely remove the particle pollutants and deposited pollutants on the surface of the fluoride coating on the aluminum nitride heater, reduce the loss coating thickness, increase the number of uses of such components, and reduce the use cost of the client.

[0119] The present invention uses white corundum sand material to perform sandblasting and film removal treatment on the surface of the component, which can quickly remove a small amount of residual pollutants on the surface of the component and ensure that the surface of the component remains uniform; the ultrasonic cleaning rotates the component once every 3 minutes, which can control the surface not to produce marks due to ultrasonic vibration, does not use chemical drugs for film removal, and is more environmentally friendly.

[0120] The present invention has been exemplarily described above in conjunction with specific embodiments. It is obvious that the specific implementation of the present invention is not limited to the above-mentioned methods. As long as various improvements are made using the method concept and technical solution of the present invention, or they are directly applied to other occasions without improvement, they are all within the protection scope of the present invention.

Claims

1. A cleaning method for removing contaminants deposited on the surface of a fluoride-coated heater, characterized in that: The specific steps are: S1. Visually inspect the components and use a multimeter to detect the resistance: The appearance inspection includes: checking whether there are white spots on the heater coating surface, whether the surface of the component is damaged, and whether the terminal is bent; using a multimeter to detect whether there is resistance; S2. Protection: Use special tooling and black tape to protect the terminal part; S3, stripping sandblasting: Place the heater on the fixture, use WA220# white corundum abrasive material, and the pressure is 2-3kg / cm 2 Sandblasting is performed to remove the film. The sandblasting machine is a manual sandblasting machine. The operator holds a sandblasting gun to perform horizontal sandblasting and controls the sandblasting time according to the film quality. S4, air gun purge: Use an air gun to blow the heater surface until there is no obvious sand material attached, the pressure is 30±5Psi; S5, deprotection, washing: Remove the tooling and tape protection, use a dust-free cloth dipped in isopropyl alcohol to wipe the sealing area of ​​the component to remove the residual offset of the protective tape and rinse the surface with deionized water for 2-3 minutes. The protective fixture flows with the component; S6, ultrasonic cleaning: Place the heater in an ultrasonic cleaning tank and use deionized water for ultrasonic cleaning. The deionized water is in an overflow state. The ultrasonic intensity is controlled at 4-10 watts / inch for 15 minutes. Rotate the component 90 degrees every 3 minutes to prevent marks caused by ultrasonic vibration and completely remove a small amount of sand and other particles remaining on the surface of the component. S7, Isopropyl alcohol wipe: Wipe the entire part with a lint-free cloth dampened with isopropyl alcohol; S8, ultrasonic cleaning: Transfer the parts to a Class 100 clean room, then place them in an ultrasonic cleaning tank for 15 minutes, rotate the parts 90 degrees every 3 minutes, and observe whether there are any marks; Ultrasonic frequency: 40KHZ; Ultrasonic power density: 4-10 watts / square inch; S9, Nitrogen purge: For the flushed parts, use 99.999% pure nitrogen to purge the surface to remove residual moisture on the surface of the parts. The pressure is 30±5Psi. S10, Drying: Transfer the purged parts to a clean drying oven, heat them to 105°C and dry them for 2 hours. Take them out after they cool naturally. S11. Inspection: Use a particle detector to check the surface particle size; use a UV lamp to check whether there are impurities and fiber residues on the surface; use a multimeter to check the resistance of the terminal before shipment; S12, Vacuum packaging: Before packaging, the entire system is purged with nitrogen at a pressure of 30±5Psi; the components are vacuum packaged with 2 layers of PE bags.

2. A cleaning method for removing deposited pollutants on the surface of a fluoride coating heater according to claim 1, characterized in that: In step S3, the sandblasting time is 1-3 minutes.

3. A cleaning method for removing deposited pollutants on the surface of a fluoride coating heater according to claim 2, characterized in that: In step S3, the entire sandblasting operation is performed under closed sandblasting conditions.

4. A cleaning method for removing deposited pollutants on the surface of a fluoride coating heater according to claim 3, characterized in that: In step S7, when wiping, the focus is on the work surface.

5. A cleaning method for removing deposited pollutants on the surface of a fluoride coating heater according to claim 4, characterized in that: In step S10, the component is naturally cooled to a temperature below 40°C.

6. A cleaning method for removing deposited pollutants on the surface of a fluoride coating heater according to claim 5, characterized in that: In step S10, the tooling needs to be removed before baking, and when removing it, pay attention to whether the terminal is deformed.

7. A cleaning method for removing deposited pollutants on the surface of a fluoride coating heater according to claim 6, characterized in that: In step S12, the terminal part is protected with tooling before packaging, and a dust-free cloth is placed on the bottom of the component before packaging.