Micro-fluidic chip

By setting a pressure relief opening on the top wall of the flow channel body of the microfluidic chip, and using a movable diaphragm to open the pressure relief opening when the liquid is cut off, the problem of pneumatic microvalve closing delay is solved, rapid response and liquid cutoff are achieved, and operating efficiency is improved.

CN119633918AActive Publication Date: 2025-03-18LEAD HEALTHCARE TECHNOLOGY (GUANGZHOU) CO LTD
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Patent Information

Application Number
CN202411986971.8
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2024-12-31
Publication Date
2025-03-18
Estimated Expiration
2044-12-31

AI Technical Summary

Technical Problem

When the pneumatic micro valve is closed, the valve structure is closed delayed or hysteresis due to the existence of pressure in the flow channel, which affects the response effect.

Method used

A microfluidic chip is designed, including a runner body, pressure relief opening, a movable diaphragm and a valve structure. The pressure relief opening is located on the top wall of the runner body and is connected to the atmosphere or waste liquid pipe. The movable diaphragm opens the pressure relief opening when the liquid is cut off to reduce the pressure in the runner.

Benefits of technology

The air pressure in the flow channel is discharged through the pressure relief opening, which significantly reduces the resistance when the valve structure is closed, achieves rapid response and liquid cutoff, and improves operating efficiency.

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Abstract

The invention discloses a micro-fluidic chip. The micro-fluidic chip comprises a runner body, a pressure relief opening, a movable diaphragm and a valve structure, wherein an inlet and an outlet are formed in the runner body; the valve structure is arranged between the inlet and the outlet of the flow channel body, and the valve structure is used for controlling circulation or cut-off of liquid in the flow channel body; the pressure relief opening is located on the upstream of the valve structure in the flowing direction of liquid in the flow channel body, the pressure relief opening is formed in the top wall of the flow channel body, and the pressure relief opening communicates with the flow channel body; the movable diaphragm is arranged on the top wall of the runner body, is used for sealing and covering the pressure relief opening when liquid passes through the runner body, and is also used for opening the pressure relief opening when the liquid in the runner body stops flowing. The pressure relief opening is formed in the flow channel body, the pressure in the flow channel body can be reduced, the valve structure can be rapidly closed in a short time, the movable membrane can seal and cover the pressure relief opening, and normal flowing of liquid is prevented from being affected by the pressure relief opening.
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Description

Technical Field

[0001] The present application relates to the technical field of microfluidic chips, and in particular to a microfluidic chip. Background Art

[0002] In microfluidic chips, valves are usually used to control the flow or stop of liquids. Valves are usually opened and closed by air pressure or mechanical force. For example, when the valve is closed, it can block the flow of liquid, or a rotating structure can be used to block the flow of liquid. Microfluidic valves can be roughly divided into rotary valves, paraffin valves, paraffin hot melt valves, magnet moving valves, pneumatic valves, mechanical valves, etc. These valves are widely used in biochemical applications, especially pneumatic microvalves, which are usually used in scenarios such as single-cell sequencing.

[0003] In the related art, pneumatic microvalves have certain defects when in use. When the valve is closed, the pressure in the flow channel always exists, and this pressure will reduce the speed of valve closing and affect the response effect of the valve. Summary of the invention

[0004] In order to solve at least one of the above technical problems, the present application provides a microfluidic chip that can overcome the problem of delayed or lag closing of the valve structure caused by the pressure in the flow channel. The technical solution adopted is as follows.

[0005] The microfluidic chip provided in the present application includes a flow channel body, a pressure relief opening, a movable diaphragm and a valve structure. The flow channel body is formed with an inlet and an outlet; the valve structure is arranged between the inlet and the outlet of the flow channel body, and the valve structure is used to control the flow or cutoff of the liquid in the flow channel body; along the flow direction of the liquid in the flow channel body, the pressure relief opening is located upstream of the valve structure, the pressure relief opening is arranged on the top wall of the flow channel body, and the pressure relief opening is connected to the flow channel body; the movable diaphragm is arranged on the top wall of the flow channel body, and the movable diaphragm is used to cover the pressure relief opening when the flow channel body passes through the liquid, and the movable diaphragm is also used to open the pressure relief opening when the liquid in the flow channel body stops flowing.

[0006] In certain embodiments of the present application, the first end of the movable diaphragm is connected to the top wall of the flow channel body, and the second end opposite to the first end of the movable diaphragm is movable relative to the top wall of the flow channel body; the second end of the movable diaphragm is in contact with the top wall of the flow channel body when liquid passes through the flow channel body, so that the movable diaphragm seals the pressure relief opening, and when the liquid in the flow channel body stops flowing, the second end of the movable diaphragm is separated from the top surface of the flow channel body, so that the movable diaphragm opens the pressure relief opening.

[0007] In certain embodiments of the present application, when the movable diaphragm seals the pressure relief opening, the direction from the first end to the second end is the same as the flow direction of the liquid in the flow channel body.

[0008] In some embodiments of the present application, the first end of the movable diaphragm is connected to the flow channel body by plasma bonding; or, the first end of the movable diaphragm is connected to the flow channel body by thermal compression bonding.

[0009] In some embodiments of the present application, the material of the movable membrane is one of polydimethylsiloxane, silicone, cycloolefin copolymer, cycloolefin polymer, polystyrene or resin.

[0010] In certain embodiments of the present application, the pressure relief opening is connected to the atmosphere.

[0011] In certain embodiments of the present application, the pressure relief opening is connected to a waste liquid pipe.

[0012] In certain embodiments of the present application, the valve structure includes an air chamber, a film and a control chamber. The film separates the air chamber and the control chamber. The control chamber is arranged in the flow channel body. The film is used to bulge toward the control chamber and seal the control chamber when the air chamber is inflated.

[0013] In some embodiments of the present application, the top wall of the flow channel body is configured as a curved surface.

[0014] In certain embodiments of the present application, the microfluidic chip includes a first structural layer and a second structural layer, the flow channel body is at least arranged in the first structural layer or the second structural layer, the pressure relief opening is arranged in the first structural layer, the valve structure includes an air chamber, a film and a control cavity, the film separates the air chamber and the control cavity, the control cavity and the flow channel body are arranged in the same structural layer, the air chamber is arranged in the second structural layer, and the first structural layer and the second structural layer are encapsulated and connected.

[0015] The embodiments of the present application have at least the following beneficial effects: by setting a pressure relief opening on the top wall of the flow channel body, and setting the pressure relief opening upstream of the valve structure, and by setting a movable diaphragm to open the pressure relief opening when the liquid in the flow channel body is cut off, when the valve structure is used to cut off the liquid, the air pressure rising in the flow channel body caused by the closing action of the valve structure can be discharged through the pressure relief opening, thereby helping to reduce the pressure in the flow channel body, so that the valve structure can be quickly closed in a short time, solving the problem of large resistance when the valve structure is closed due to the increase in air pressure in the flow channel body, overcoming the problem of delay or lag in closing of the valve structure caused by resistance, so that the valve structure has a rapid response effect, realizes the cutoff of the liquid, and improves the operation efficiency. On the basis of setting the pressure relief opening, a movable diaphragm is set on the top wall of the flow channel body, so that the movable diaphragm can cover the pressure relief opening when the flow channel body passes the liquid, which can avoid the pressure relief opening affecting the normal flow of the liquid and ensure the normal use of the microfluidic chip. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] The present application is further illustrated below in conjunction with the accompanying drawings and embodiments. It should be noted that the embodiments embodied in the following drawings are exemplary and are only used to explain the present application, and cannot be understood as limiting the present application.

[0017] Figure 1 A schematic diagram of an exemplary structure of a microfluidic chip provided in an embodiment of the present application;

[0018] Figure 2 for Figure 1 AA section view;

[0019] Figure 3 for Figure 1 BB cross-section diagram;

[0020] Figure 4 Another exemplary structural schematic diagram of the microfluidic chip provided in an embodiment of the present application.

[0021] Figure numerals: 100, microfluidic chip; 10, flow channel body; 11, inlet; 12, outlet; 13, pressure relief opening; 20, valve structure; 21, air chamber; 22, film; 23, control chamber; 30, movable diaphragm; 31, first end; 32, second end; 110, first structural layer; 120, second structural layer. DETAILED DESCRIPTION

[0022] The embodiments of the present application are described in detail below in conjunction with the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present application, and cannot be understood as limiting the present application.

[0023] In the description of the present application, it should be understood that the terms "center", "middle", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, which are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0024] In the description of this application, "several" means more than one, "more" means more than two, "greater than", "less than", "exceed", etc. are understood to exclude the number itself, and "above", "below", "within", etc. are understood to include the number itself. If there is a description of "first" or "second", it is only used for the purpose of distinguishing technical features, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features or implicitly indicating the order of the indicated technical features.

[0025] In the description of this application, unless otherwise clearly specified and limited, the terms "set", "install", "connect", and "connect" should be understood in a broad sense, for example: it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0026] In the description of the present application, if the reference terms "as an implementation", "an embodiment", "some instances", "some embodiments", "illustrative embodiment", "example", "specific example", "some examples", etc. appear, it means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present application. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner.

[0027] See also Figure 1 to Figure 2The present application provides a microfluidic chip 100, comprising a flow channel body 10, a pressure relief opening 13, an active diaphragm 30 and a valve structure 20. The flow channel body 10 is formed with an inlet 11 and an outlet 12; the valve structure 20 is arranged between the inlet 11 and the outlet 12 of the flow channel body 10, and the valve structure 20 is used to control the flow or cutoff of the liquid in the flow channel body 10; along the flow direction of the liquid in the flow channel body 10, the pressure relief opening 13 is located upstream of the valve structure 20, the pressure relief opening 13 is arranged on the top wall of the flow channel body 10, and the pressure relief opening 13 is connected to the flow channel body 10; the active diaphragm 30 is arranged on the top wall of the flow channel body 10, and the active diaphragm 30 is used to cover the pressure relief opening 13 when the flow channel body 10 passes the liquid, and the active diaphragm 30 is also used to open the pressure relief opening 13 when the liquid in the flow channel body 10 stops flowing. By setting a pressure relief opening 13 on the top wall of the flow channel body 10, and setting the pressure relief opening 13 upstream of the valve structure 20, and by setting an active diaphragm 30 to open the pressure relief opening 13 when the liquid in the flow channel body 10 is cut off, when the valve structure 20 is used to cut off the liquid, the rising air pressure in the flow channel body 10 caused by the closing action of the valve structure 20 can be discharged through the pressure relief opening 13, thereby helping to reduce the pressure in the flow channel body 10, so that the valve structure 20 can be quickly closed in a short time, solving the problem of greater resistance when the valve structure 20 is closed due to the increase in air pressure in the flow channel body 10, and overcoming the problem of delayed or lagging closing of the valve structure 20 caused by resistance, so that the valve structure 20 has a quick response effect, realizes the cutoff of the liquid, and thus improves the operating efficiency. On the basis of setting the pressure relief opening 13, a movable diaphragm 30 is set on the top wall of the flow channel body 10, so that the movable diaphragm 30 can cover the pressure relief opening 13 when liquid passes through the flow channel body 10, thereby preventing the pressure relief opening 13 from affecting the normal flow of liquid and ensuring the normal use of the microfluidic chip 100.

[0028] Exemplarily, the pressure relief opening 13 adopts a hole structure with a diameter of tens to hundreds of microns, and the size of the pressure relief opening 13 can be adjusted according to actual pressure relief requirements; accordingly, the size of the active diaphragm 30 can also be adaptively adjusted according to the size of the pressure relief opening 13 so that the active diaphragm 30 can cover the pressure relief opening 13.

[0029] In some embodiments, the first end 31 of the movable diaphragm 30 is connected to the top wall of the flow channel body 10, and the second end 32 opposite to the first end 31 of the movable diaphragm 30 is movable relative to the top wall of the flow channel body 10; the second end 32 of the movable diaphragm 30 is attached to the top wall of the flow channel body 10 when the flow channel body 10 passes through the liquid, so that the movable diaphragm 30 seals the pressure relief opening 13, and the second end 32 of the movable diaphragm 30 is separated from the top surface of the flow channel body 10 when the liquid in the flow channel body 10 stops flowing, so that the movable diaphragm 30 opens the pressure relief opening 13. The first end 31 of the movable diaphragm 30 is connected to the top wall of the flow channel body 10, and the second end 32 is set to be movable relative to the top wall of the flow channel body 10, so that the movable diaphragm 30 can be positioned in the flow channel body 10 and the pressure relief opening 13 can be covered and opened. Specifically, the second end 32 of the movable diaphragm 30 can make a lifting or falling movement relative to the first end 31. When the second end 32 of the movable diaphragm 30 is lifted, the movable diaphragm 30 fits against the top wall of the flow channel body 10 to achieve a sealing effect on the pressure relief opening 13; when the second end 32 of the movable diaphragm 30 falls, the movable diaphragm 30 is separated from the top wall of the flow channel body 10, thereby opening the pressure relief opening 13. When the valve structure 20 controls the flow of liquid in the flow channel body 10, the liquid flows into the flow channel body 10 from the inlet 11 and fills the entire flow channel body 10. At this time, the liquid can lift the second end 32 of the movable diaphragm 30 so that the movable diaphragm 30 fits against the top wall of the flow channel body 10, so that the movable diaphragm 30 seals the pressure relief opening 13. When the valve structure 20 controls the liquid in the flow channel body 10 to be cut off, the liquid in the flow channel body 10 stops flowing, and the lifting effect of the liquid on the diaphragm disappears. At this time, the second end 32 of the movable diaphragm 30 will fall under the action of its own gravity, thereby opening the pressure relief opening 13 and releasing the pressure in the flow channel body 10. When the pressure in the flow channel body 10 is reduced, the valve can quickly respond to the closing command and complete the liquid cutoff.

[0030] In some embodiments, when the movable diaphragm 30 covers the pressure relief opening 13, the direction from the first end 31 to the second end 32 is the same as the flow direction of the liquid in the flow channel body 10. That is, by setting the first end 31 of the movable diaphragm 30 on the side of the pressure relief opening 13 close to the inlet 11 of the flow channel body 10, and movably setting the second end 32 of the movable diaphragm 30 on the side of the pressure relief opening 13 close to the outlet 12 of the flow channel body 10, the movement direction of the second end 32 of the movable diaphragm 30 can be made to conform to the flow direction of the liquid in the flow channel body 10 during the process of the movable diaphragm 30 opening and covering the pressure relief opening 13, thereby preventing the movable diaphragm 30 from being affected by the resistance of the liquid flow.

[0031] In some embodiments, the first end 31 of the movable diaphragm 30 is connected to the flow channel body 10 by plasma bonding. Exemplarily, the material of the flow channel body 10 can be PDMS (Polyd imethy lsi loxane), silicone, COC (Copo lymers of Cyc loo lefin), COP (Cyc lo OlefinPolymer), PS (Polystyrene) or PC (Polycarbonate). Exemplarily, when the material of the flow channel body 10 is PDMS, one side of the movable diaphragm 30 can be connected to the flow channel body 10 by plasma bonding;

[0032] In some embodiments, the first end 31 of the movable diaphragm 30 is connected to the flow channel body 10 by hot pressing. For example, when the flow channel body 10 is made of plastic, one side of the movable diaphragm 30 can be connected to the flow channel body 10 by hot pressing. The connection between the movable diaphragm 30 and the flow channel body 10 can be easily completed by plasma bonding and hot pressing, and the operability is strong. According to the different materials of the flow channel body 10, the connection method between the movable diaphragm 30 and the flow channel body 10 can be flexibly selected.

[0033] In some embodiments, the material of the active membrane 30 is PDMS, silica gel, COC, COP, PS or resin. PDMS, silica gel, COC, COP, PS or resin are common membrane materials, which can reduce the manufacturing cost and difficulty of the active membrane 30.

[0034] Exemplarily, the material of the movable diaphragm 30 may also be PC.

[0035] In some embodiments, the pressure relief opening 13 is connected to the atmosphere. By connecting the pressure relief opening 13 to the atmosphere, the pressure in the flow channel body 10 can be quickly released when the movable diaphragm 30 opens the pressure relief opening 13, so that the valve structure 20 can quickly cut off the liquid in the flow channel body 10.

[0036] In some embodiments, the pressure relief opening 13 is connected to a waste liquid pipe. By connecting the pressure relief opening 13 with the waste liquid pipe, when the valve structure 20 cuts off the liquid in the flow channel body 10, the waste liquid pipe can be used to collect the liquid that may overflow, thereby preventing the liquid from contaminating the pressure relief opening 13.

[0037] See also Figure 3In some embodiments, the valve structure 20 includes an air chamber 21, a film 22 and a control chamber 23. The film 22 separates the air chamber 21 and the control chamber 23. The control chamber 23 is provided in the flow channel body 10. The film 22 is used to swell toward the control chamber 23 and block the control chamber 23 when the air chamber 21 is inflated. It can be understood that the control chamber 23 can be communicated with the flow channel body 10. By providing the air chamber 21, the film 22 and the control chamber 23 in the valve structure 20, the film 22 can be driven by the air pressure change of the air chamber 21. By pressurizing the air chamber 21, the film 22 swells toward the control chamber 23 and blocks the control chamber 23, thereby realizing the interception of the liquid in the flow channel body 10.

[0038] Optionally, the film 22 has elasticity (deformable properties), can be deformed and bulge toward the flow channel body 10 under the pressure of the air chamber 21, and can retract when the air pressure in the air chamber 21 drops, restoring the flow channel body 10 The flow capacity of the liquid; the valve structure 20 can also be provided with a pneumatic structure (such as an air pump, etc.), the pneumatic structure is connected to the air chamber 21, and is used to adjust the air pressure in the air chamber 21, for example, gas is introduced into the air chamber 21 to increase the pressure of the air chamber 21, so as to achieve the effect of bulging the film 22. Of course, in other examples, the air chamber 21 can be connected to other microfluidic structures, and the microfluidic structure is used to adjust the air pressure in the air chamber 21, which is not limited here.

[0039] In some embodiments, the top wall of the flow channel body 10 is configured as a curved surface. By configuring the top wall of the flow channel body 10 as a curved surface, when the valve structure 20 is used to cut off the liquid in the flow channel body 10, the shape of the bulged film 22 can fit the top wall of the flow channel body 10, thereby improving the interception effect of the valve structure 20.

[0040] Optionally, the valve structure 20 can be any form of active microvalve structure, and the specific structure of the valve structure 20 is not limited in this embodiment. The microfluidic chip 100 provided in the present application can also be connected to a microfluidic channel with an active microvalve structure, and is arranged upstream of the microvalve structure along the flow direction of the liquid. During the closing process of the microvalve structure, the microfluidic chip 100 of the present application can be used to discharge the pressure in the flow channel, thereby improving the response efficiency of the microvalve structure.

[0041] In some embodiments, the microfluidic chip 100 includes a first structural layer 110 and a second structural layer 120, the flow channel body 10 is at least arranged in the first structural layer 110 or the second structural layer 120, the pressure relief opening 13 is arranged in the first structural layer 110, the valve structure 20 includes an air chamber 21, a film 22 and a control cavity 23, the film 22 separates the air chamber 21 and the control cavity 23, the control cavity 23 and the flow channel body 10 are arranged in the same structural layer, the air chamber 21 is arranged in the second structural layer 120, and the first structural layer 110 and the second structural layer 120 are packaged and connected. By arranging the flow channel body 10, the pressure relief opening 13 and the valve structure 20 in different structural layers, not only can the mutual packaging connection of the first structural layer 110 and the second structural layer 120 be utilized to realize the rapid connection and assembly of the flow channel body 10, the pressure relief opening 13 and the valve structure 20, but also the structure of the microfluidic chip 100 can be easily realized, thereby improving the manufacturing efficiency of the microfluidic chip 100.

[0042] See also Figure 2 and Figure 4 Optionally, the flow channel body 10 is arranged on a side of the first structural layer 110 close to the second structural layer 120, the pressure relief opening 13 is arranged on the top wall of the flow channel body 10, and the control cavity 23 is arranged on the first structural layer 110 corresponding to the flow channel body 10; or, the flow channel body 10 can be arranged on a side of the second structural layer 120 close to the first structural layer 110, the first structural layer 110 is provided with channels which can respectively correspond to the inlet 11 and the outlet 12 of the flow channel body 10, the pressure relief opening 13 is arranged on a side of the first structural layer 110 close to the second structural layer 120, and the control cavity 23 is arranged on the second structural layer 120 corresponding to the flow channel body 10.

[0043] The above is a detailed description of the implementation methods of the present application in conjunction with the accompanying drawings, but the present application is not limited to the above implementation methods. Various changes can be made within the knowledge of ordinary technicians in the technical field without departing from the purpose of the present application. In addition, the embodiments of the present application and the features in the embodiments can be combined with each other without conflict.

Claims

1. A microfluidic chip, characterized in that: include A flow channel body, wherein the flow channel body is formed with an inlet and an outlet; A valve structure, the valve structure is arranged between the inlet and the outlet of the flow channel body, and the valve structure is used to control the flow or cutoff of the liquid in the flow channel body; A pressure relief opening, along the flow direction of the liquid in the flow channel body, the pressure relief opening is located upstream of the valve structure, the pressure relief opening is arranged on the top wall of the flow channel body, and the pressure relief opening is connected to the flow channel body; The movable diaphragm is arranged on the top wall of the flow channel body, and is used to cover the pressure relief opening when the flow channel body passes liquid, and is also used to open the pressure relief opening when the flow of liquid in the flow channel body is stopped.

2. The microfluidic chip according to claim 1, characterized in that: The first end of the movable diaphragm is connected to the top wall of the flow channel body, and the second end opposite to the first end of the movable diaphragm is movable relative to the top wall of the flow channel body; the second end of the movable diaphragm is attached to the top wall of the flow channel body when liquid passes through the flow channel body, so that the movable diaphragm seals the pressure relief opening, and when the liquid in the flow channel body stops flowing, the second end of the movable diaphragm is separated from the top surface of the flow channel body, so that the movable diaphragm opens the pressure relief opening.

3. The microfluidic chip according to claim 2, characterized in that: When the movable diaphragm covers the pressure relief opening, the direction from the first end to the second end is the same as the flow direction of the liquid in the flow channel body.

4. The microfluidic chip according to claim 1, characterized in that: The first end of the movable diaphragm is connected to the flow channel body by plasma bonding; or The first end of the movable diaphragm is connected to the flow channel body by heat pressing.

5. The microfluidic chip according to claim 1, characterized in that: The material of the movable membrane is one of polydimethylsiloxane, silica gel, cycloolefin copolymer, cycloolefin polymer, polystyrene or resin.

6. The microfluidic chip according to any one of claims 1 to 5, characterized in that: The pressure relief opening is connected to the atmosphere.

7. The microfluidic chip according to any one of claims 1 to 5, characterized in that: The pressure relief opening is connected to a waste liquid pipe.

8. The microfluidic chip according to any one of claims 1 to 5, characterized in that: The valve structure includes an air chamber, a film and a control cavity. The film separates the air chamber and the control cavity. The control cavity is arranged in the flow channel body. The film is used to bulge toward the control cavity and block the control cavity when the air chamber is inflated.

9. The microfluidic chip according to claim 8, characterized in that: The top wall of the flow channel body is configured as a curved surface.

10. The microfluidic chip according to claim 1, characterized in that: The microfluidic chip includes a first structural layer and a second structural layer, the flow channel body is at least arranged in the first structural layer or the second structural layer, the pressure relief opening is arranged in the first structural layer, the valve structure includes an air chamber, a film and a control cavity, the film separates the air chamber and the control cavity, the control cavity and the flow channel body are arranged in the same structural layer, the air chamber is arranged in the second structural layer, and the first structural layer and the second structural layer are packaged and connected.

Citation Information

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