Processing equipment for quartz product

By designing processing equipment for quartz products, using automated grinding components and sensor control, the problems of uneven grinding surfaces and inconsistent verticality of the quartz boat stand side plates are solved, and automated grinding is realized, reducing the workload and strength of manual grinding.

CN119635517AActive Publication Date: 2025-03-18ZHEJIANG FULEDE QUARTZ TECH CO LTD
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Patent Information

Application Number
CN202510023558.X
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2025-01-07
Publication Date
2025-03-18
Estimated Expiration
2045-01-07

AI Technical Summary

Technical Problem

The prior art cannot ensure that the grinding surface of the side plate of the quartz boat frame is the same plane, and the perpendicularity with the bottom plate cannot be guaranteed, resulting in large workloads of manual grinding, high strength, and multiple measurements and adjustments are required.

Method used

A processing equipment for quartz products is designed, including racks, clamping components and grinding components. The grinding assembly consists of a grinding block, a driving mechanism, abrasive cylinder, agitator and a grinding recycling box. The grinding block is driven automatically to reciprocate through a motor, and the feed position is controlled with the sensor to ensure the stability of the grinding pressure.

Benefits of technology

Automatic uniform grinding of the side plates of the quartz boat frame is realized, ensuring that the grinding surface of the side plate after grinding is consistent with the perpendicularity of the bottom plate, and reducing the workload and strength of manual grinding.

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Abstract

The invention relates to the technical field of quartz product processing equipment, in particular to processing equipment for quartz products, which comprises a rack, a base, a feeding device and a discharging device, the clamping assembly is arranged on the rack and used for clamping a product located on the workbench; the grinding assembly is arranged on the rack and used for grinding the side face of the product on the workbench; wherein the grinding assembly comprises a grinding block, a grinding wheel, a grinding wheel and a driving device, a cavity used for storing grinding sand is formed in the grinding block, and a grinding sand hole communicated with the cavity is formed in the grinding end of the grinding block; and the driving mechanism is used for driving the grinding block to move so that the grinding block can grind the side face of the product.
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Description

Technical Field

[0001] The present invention relates to the technical field of quartz product processing equipment, and more specifically, to an equipment for grinding a quartz boat. Background Art

[0002] Quartz boat is an important component of semiconductor components. At present, the quartz boat frame is completed by welding the bottom plate and the side plate after processing them separately. After welding, due to the influence of welding accuracy and stress deformation, the verticality between the side plate and the bottom plate of the boat frame cannot meet the use requirements of the product. At this time, it is necessary to manually hold the grinding block, fix the boat frame with the bottom plate as the reference, and then grind the side plate to make the verticality of the two meet the product requirements. However, due to the uneven force of manual grinding on the entire surface, it is often impossible to ensure that the grinding surface of the side plate of the boat frame after grinding is the same plane, and the verticality between the bottom plate cannot be guaranteed. It is necessary to measure and grind again after multiple times, which is labor-intensive and has high work intensity.

[0003] Based on this, it is necessary to develop a device that can automatically grind the quartz boat. Summary of the invention

[0004] The main purpose of the present invention is to provide a processing device for quartz products to solve the technical problems mentioned in the background technology.

[0005] In order to solve the above technical problems, the present invention proposes a processing device for quartz products, comprising:

[0006] A frame having a workbench for placing products thereon;

[0007] A clamping assembly, disposed on the frame, for clamping the product on the workbench;

[0008] and a grinding assembly, disposed on the frame and used for grinding the side of the product on the workbench;

[0009] The grinding components include:

[0010] A grinding block, which has a chamber for storing grinding sand inside, and a grinding sand hole connected to the chamber is opened at the grinding end;

[0011] And a driving mechanism is used for driving the grinding block to reciprocate in the vertical direction so that the grinding block grinds the side surface of the product.

[0012] In the above technical solution, further, a groove located below the grinding sand hole is provided on the grinding end of the grinding block, and the groove is arranged obliquely.

[0013] In any of the above technical solutions, further, the grinding assembly also includes:

[0014] A grinding sand cylinder, used for storing grinding sand;

[0015] and a stirrer for stirring the abrasive sand in the abrasive sand cylinder;

[0016] The outlet end of the grinding sand cylinder is connected to the chamber of the grinding block and is used to transport the grinding sand into the grinding block.

[0017] In any of the above technical solutions, further, the grinding assembly also includes:

[0018] The grinding sand recovery box is arranged on the frame and is used for collecting the grinding sand flowing out from the grinding block.

[0019] In any of the above technical solutions, further, the driving mechanism includes:

[0020] A first slide rail is horizontally arranged on the workbench;

[0021] A mounting frame, slidably disposed on the first slide rail, for approaching or moving away from the product on the workbench;

[0022] A first power unit, used for driving the mounting frame to move on the first slide rail;

[0023] A second slide rail is vertically arranged on the mounting frame, and the grinding block is slidably arranged on the second slide rail;

[0024] And a second power unit is used for driving the grinding block to move on the second slide rail.

[0025] In any of the above technical solutions, further, the driving mechanism also includes:

[0026] A first limit sensor unit, used to control the operating state of the first power unit to control the moving position of the mounting frame;

[0027] And a second limit sensor unit is used to control the operating state of the second power unit so that the grinding block can reciprocate on the second slide rail.

[0028] In any of the above technical solutions, further, the first power unit includes:

[0029] A threaded rod, one end of which is disposed on the mounting frame and the other end of which is threadedly connected to the frame. When the threaded rod rotates, the threaded rod moves the mounting frame toward or away from the product on the workbench;

[0030] and a first motor, for driving the threaded rod to rotate;

[0031] A torque limiter is further provided between the first motor and the threaded rod. When the output torque of the first motor is greater than a threshold value set by the torque limiter, the output end of the torque limiter idles to stop the threaded rod from rotating.

[0032] In any of the above technical solutions, further, the first power unit also includes:

[0033] The first transmission pulley assembly is used to connect one end of the threaded rod close to the mounting frame with the torque limiter.

[0034] In any of the above technical solutions, further, the second power unit includes:

[0035] A second transmission pulley set, the grinding block is connected to a belt on the second transmission pulley set through a connecting piece;

[0036] And a second motor is used for driving the second transmission belt pulley group to operate, so that the second transmission belt pulley group drives the grinding block to move upward or downward.

[0037] In any of the above technical solutions, further, rollers are arranged around the bottom of the frame.

[0038] Beneficial effect: Compared with the prior art, the present invention drives the grinding block to automatically reciprocate through a motor, and cooperates with the motor to drive the grinding block to do feeding movement, thereby automatically grinding the side of quartz boat products, and limiting the feeding position through a sensor to ensure the size of the product. In addition, since the grinding pressure is provided by the motor feeding, the stability of the pressure is guaranteed, thereby ensuring the flatness of the grinding surface of the side plate and the verticality with the bottom surface, thereby solving the problem that current manual grinding cannot ensure the flatness of the grinding surface and the verticality with the bottom surface. BRIEF DESCRIPTION OF THE DRAWINGS

[0039] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0040] Figure 1 It is a three-dimensional structural schematic diagram of the present invention;

[0041] Figure 2 It is a three-dimensional structural schematic diagram of another viewing angle of the present invention;

[0042] Figure 3 It is a schematic diagram of the structure of the quartz boat of the present invention placed on a workbench;

[0043] Figure 4 It is a schematic diagram of the structure of the grinding assembly of the present invention located on a workbench;

[0044] Figure 5is a structural schematic diagram of the grinding assembly of the present invention located on a workbench from another viewing angle;

[0045] Figure 6 It is a structural schematic diagram of a workbench of the present invention.

[0046] The following are the descriptions of the reference numerals:

[0047] 100, quartz boat frame; 101, large side plate; 102, side groove plate; 103, middle groove plate; 1, frame; 11, roller; 12, workbench; 2, clamping assembly; 3, grinding assembly; 31, grinding block; 311, grinding sand hole; 312, groove; 32, driving mechanism; 321, first slide rail; 322, mounting frame; 3221, mounting base plate; 3222, mounting side plate; 323, first power unit; 3231, threaded rod; 3232, first motor; 3233, first transmission pulley group; 324, second slide rail; 325, second power unit; 3251, second transmission pulley group; 3252, second motor; 326, first limit sensor unit; 327, second limit sensor unit; 33, grinding sand cylinder; 34, agitator; 35, grinding sand recovery box. DETAILED DESCRIPTION

[0048] Below, the example embodiments according to the present application will be described in detail with reference to the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments of the present application, and it should be understood that the present application is not limited to the example embodiments described herein. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0049] It should be noted that, as shown in this application and claims, unless the context clearly indicates an exception, the words "a", "an", "a kind" and / or "the" do not specifically refer to the singular, but may also include the plural. Generally speaking, the terms "include" and "comprise" only indicate the inclusion of clearly identified steps and elements, and these steps and elements do not constitute an exclusive list, and the method or device may also include other steps or elements.

[0050] If the embodiments of the present invention involve directional indications (such as up, down, left, right, front, back, etc.), the directional indications are only used to explain the relative position relationship, movement status, etc. between the components under a certain specific posture (as shown in the accompanying drawings). If the specific posture changes, the directional indication will also change accordingly.

[0051] In the present invention, unless otherwise clearly specified and limited, the terms "connection", "fixation", etc. should be understood in a broad sense. For example, "fixation" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0052] In addition, if there are descriptions involving "first", "second", etc. in the embodiments of the present invention, the descriptions of "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In addition, the meaning of "and / or" appearing in the full text includes three parallel schemes. Taking "A and / or B" as an example, it includes scheme A, or scheme B, or a scheme that satisfies both A and B. In addition, the technical solutions between the various embodiments can be combined with each other, but it must be based on the ability of ordinary technicians in the field to implement. When the combination of technical solutions is contradictory or cannot be implemented, it should be deemed that such a combination of technical solutions does not exist and is not within the scope of protection required by the present invention.

[0053] The quartz boat frame is mainly composed of a large side plate, a side groove plate and an intermediate groove plate. The large side plate is first placed horizontally, and then the side groove plate and the intermediate groove plate are assembled on the large side plate, followed by welding to form an integrated structure. Since the verticality between the intermediate groove plate and the large side plate after welding is difficult to meet the product's use requirements, the intermediate groove plate needs to be polished. In order to improve the polishing accuracy, this application provides an automatic grinding device.

[0054] The following embodiments are used to describe in detail a processing device for quartz products of the present application.

[0055] Embodiment 1:

[0056] like Figure 1-Figure 6 As shown, in this embodiment, a processing device for quartz products includes: a frame 1, the bottom of which is provided with rollers 11 around to facilitate movement, and the top of which is provided with a workbench 12 for placing products; a clamping assembly 2, which is arranged on the frame 1 and is used to clamp the product on the workbench 12; and a grinding assembly 3, which is arranged on the frame 1 and is used to grind the side of the product on the workbench 12;

[0057] Among them, the grinding assembly 3 includes: a grinding block 31, which has a chamber for storing grinding sand inside, and a grinding sand hole 311 connected to the chamber is opened at its grinding end; and a driving mechanism 32, which is used to drive the grinding block 31 to move so that the grinding block 31 grinds the side of the product.

[0058] The welded quartz boat is placed on the workbench 12, and then the quartz boat is clamped by the clamping assembly 2, and then the driving mechanism 32 is started to drive the grinding block 31 to move back and forth. The grinding sand dropped from the grinding block 31 can achieve uniform grinding of the middle groove plate on the quartz boat under the action of the grinding sand.

[0059] It should be noted that the clamping assembly 2 is a quick-clamping structure. After the quartz boat is placed on the workbench 12, the quick-clamping structure can be used to quickly fix the quartz boat.

[0060] Embodiment 2:

[0061] This embodiment is a further improvement made on the basis of the first embodiment.

[0062] like Figure 3 and Figure 4 As shown, in this embodiment, a groove 312 located below the grinding sand hole 311 is further provided on the grinding end of the grinding block 31, and the groove 312 is inclined.

[0063] In order to prevent the grinding sand from flowing out of the grinding sand hole 311 on the grinding block 31 and then being lost quickly, a groove 312 is provided. Under the action of the groove 312, the grinding sand flowing out of the grinding sand hole 311 will flow into the groove 312. The groove 312 can well retain the grinding sand, thereby reducing the waste of grinding sand.

[0064] It should be noted that the groove 312 is tilted so that the grinding sand in the groove 312 can slowly flow downward under its own gravity, and then continuously act on the middle groove plate of the quartz boat to achieve continuous grinding of the middle groove plate.

[0065] Embodiment three:

[0066] This embodiment is a further improvement made on the basis of any of the above embodiments.

[0067] like Figure 1-Figure 5 As shown, the grinding assembly 3 further includes: a grinding sand barrel 33 for storing grinding sand; and a stirrer 34 for stirring the grinding sand in the grinding sand barrel 33;

[0068] The outlet end of the grinding sand cylinder 33 is connected to the chamber of the grinding block 31 for conveying grinding sand into the grinding block 31 .

[0069] In order to continuously supply grinding sand to the grinding block 31, a grinding sand cylinder 33 is provided. A large amount of grinding sand can be stored in the grinding sand cylinder 33, and then the grinding block 31 is loaded by the grinding sand cylinder 33, which greatly reduces the loading time of the staff.

[0070] It should be noted that since the abrasive sand has low fluidity and is relatively dense, the abrasive sand in the abrasive sand barrel 33 is easily deposited at the bottom and then blocks the outlet. For this reason, an agitator 34 is provided in the abrasive sand barrel 33. Under the stirring action of the agitator 34, the abrasive sand can flow and avoid deposition.

[0071] In this embodiment, in order to optimize and prevent the grinding sand from falling onto the ground after flowing out of the grinding block 31, a grinding sand recovery box 35 is provided. The grinding sand recovery box 35 is installed on the frame 1 to collect the grinding sand flowing out of the grinding block 31 to avoid waste and facilitate cleaning.

[0072] Embodiment 4:

[0073] This embodiment is a further improvement made on the basis of any of the above embodiments.

[0074] like Figure 4-Figure 6 As shown, the driving mechanism 32 includes: a first slide rail 321, horizontally arranged on the workbench 12; a mounting frame 322, slidably arranged on the first slide rail 321, used to move closer to or away from the product on the workbench 12; a first power unit 323, used to drive the mounting frame 322 to move on the first slide rail 321; a second slide rail 324, vertically arranged on the mounting frame 322, and the grinding block 31 is slidably arranged on the second slide rail 324; and a second power unit 325, used to drive the grinding block 31 to move on the second slide rail 324.

[0075] In order to automatically grind the quartz boat, this can be achieved by driving the grinding block 31 to perform linear reciprocating motion. During the grinding process, if the grinding block 31 is only reciprocated up and down, there will be a problem of insufficient grinding. For this reason, an external force is required on the grinding block 31 so that the grinding block 31 always acts on the quartz boat, so that sufficient grinding can be achieved.

[0076] Specifically, during grinding, the grinding block 31 is driven by the second power unit 325 to make up and down reciprocating motion, the grinding sand flows out from the grinding block 31, and then rubs on the quartz boat frame to achieve grinding. At the same time, the first power unit 323 needs to drive the mounting frame 322 to move, so as to drive the grinding block 31 to move toward the quartz boat frame, so that the grinding block 31 is pressed against the quartz boat frame.

[0077] It should be noted that the main purpose of grinding the quartz boat is to improve the verticality between the middle groove plate and the large side plate. Therefore, the grinding block 31 needs to move vertically. For this purpose, the mounting frame 322 is divided into a vertical mounting side plate 3222 and a horizontal mounting bottom plate 3221. The mounting bottom plate 3221 is slidably arranged on the first slide rail 321, and the second slide rail 324 is vertically arranged on the mounting side plate 3222.

[0078] In this embodiment, the driving mechanism 32 is optimized and also includes: a first limit sensor unit 326, which is used to control the operating state of the first power unit 323 to control the moving position of the mounting frame 322; and a second limit sensor unit 327, which is used to control the operating state of the second power unit 325 to make the grinding block 31 reciprocate on the second slide rail 324.

[0079] After the quartz boat frame is fully ground, it is necessary to control the first power unit 323 to stop running to avoid further grinding. Therefore, a first limit sensor unit 326 is provided. After the mounting frame 322 moves to a certain position, that is, after the grinding block 31 moves to a certain position, the first limit sensor unit 326 detects the moving position of the mounting frame 322 or the grinding block 31. At this time, the first power unit 323 stops running, so that the mounting frame 322 stops moving. Similarly, the grinding block 31 needs to grind the entire middle groove plate on the quartz boat frame, so the moving path of the grinding block 31 needs to cover the middle groove plate. For this purpose, a second limit sensor unit 327 is provided. There are two second limit sensor units 327, which are respectively provided upper and lower to control the uppermost position and the lowermost position of the grinding block 31. When the grinding block 31 moves to be detected by the second limit sensor unit 327 above, the second power unit 325 drives the grinding block 31 to move in the opposite direction, that is, to move downward. When the grinding block 31 moves downward to be detected by the second limit sensor unit 327 below, the second power unit 325 drives the grinding block 31 to move upward again. In this way, the reciprocating motion of the grinding block 31 is realized.

[0080] In this embodiment, the first power unit 323 is optimized to include: a threaded rod 3231, one end of which is arranged on the mounting frame 322, and the other end is threadedly connected to the frame 1, when the threaded rod 3231 rotates, the threaded rod 3231 moves the mounting frame 322 closer to or away from the product on the workbench 12; and a first motor 3232, which is used to drive the threaded rod 3231 to rotate;

[0081] A torque limiter is further provided between the first motor 3232 and the threaded rod 3231 . When the output torque of the first motor 3232 is greater than the threshold value set by the torque limiter, the output end of the torque limiter idles to stop the threaded rod 3231 from rotating.

[0082] In order to drive the mounting frame 322 to move, a threaded rod 3231 is provided on the mounting frame 322, and the threaded rod 3231 can rotate on the mounting frame 322, and the other end of the threaded rod 3231 is threadedly connected to the frame 1. When the threaded rod 3231 is rotated, the threaded rod 3231 extends into the frame 1 or extends from the frame 1, and at the same time drives the mounting frame 322 to move synchronously. Specifically, the threaded rod 3231 is driven to rotate by the first motor 3232 to achieve this. In order to make the grinding block 31 grind the quartz boat frame evenly, the force exerted by the grinding block 31 on the quartz boat frame needs to be kept constant. Based on this, a torque limiter is provided to limit the output torque of the first motor 3232, thereby maintaining a stable pressure. The first motor 3232 rotates continuously during the grinding process. Since the torque limiter is installed on the motor shaft, when the grinding block 31 contacts the quartz boat frame and reaches a certain pressure, the torque limiter is in a slipping state, and the first motor 3232 cannot drive the grinding block 31 forward, but only provides a forward thrust, thereby ensuring the stability of the grinding pressure.

[0083] It should be noted that the first power unit 323 further includes: a first transmission pulley set 3233, and the first transmission pulley set 3233 is used to connect the end of the threaded rod 3231 close to the mounting frame 322 with the torque limiter.

[0084] It should be noted that the second power unit 325 includes: a second transmission pulley group 3251, the grinding block 31 is connected to the belt on the second transmission pulley group 3251 through a connecting piece; and a second motor 3252, which is used to drive the second transmission pulley group 3251 to operate, so that the second transmission pulley group 3251 drives the grinding block 31 to move upward or downward.

[0085] The embodiments of the present disclosure have been described above, and the above description is exemplary, not exhaustive, and is not limited to the disclosed embodiments. Many modifications and changes will be apparent to those of ordinary skill in the art without departing from the scope and spirit of the described embodiments. The selection of terms used herein is intended to best explain the principles of the embodiments, practical applications, or improvements to the technology in the market, or to enable other persons of ordinary skill in the art to understand the embodiments disclosed herein.

Claims

1. A processing device for quartz products, characterized in that: include: A frame (1) having a workbench (12) for placing products thereon; A clamping assembly (2), arranged on the frame (1) and used for clamping a product located on the workbench (12); and a grinding assembly (3), arranged on the frame (1) and used for grinding the side surfaces of the product on the workbench (12); Wherein, the grinding assembly (3) comprises: A grinding block (31) having a chamber for storing grinding sand inside, and a grinding sand hole (311) communicating with the chamber is opened at the grinding end; and a driving mechanism (32) for driving the grinding block (31) to move so that the grinding block (31) grinds the side surface of the product.

2. A processing device for quartz products according to claim 1, characterized in that: The grinding end of the grinding block (31) is also provided with a groove (312) located below the hole of the grinding sand (311), and the groove (312) is arranged obliquely.

3. A processing device for quartz products according to claim 1, characterized in that: The grinding assembly (3) further comprises: A grinding sand cylinder (33), used for storing grinding sand; and a stirrer (34) for stirring the abrasive sand in the abrasive sand cylinder (33); The outlet end of the grinding sand cylinder (33) is communicated with the chamber of the grinding block (31) and is used for conveying grinding sand into the grinding block (31).

4. A processing device for quartz products as claimed in claim 3, characterized in that: The grinding assembly (3) further comprises: A grinding sand recovery box (35) is arranged on the frame (1) and is used to collect the grinding sand flowing out of the grinding block (31).

5. A processing device for quartz products according to claim 1, characterized in that: The driving mechanism (32) comprises: A first slide rail (321) is horizontally arranged on the workbench (12); A mounting frame (322) slidably disposed on the first slide rail (321) and used for moving closer to or further away from the product on the workbench (12); A first power unit (323) for driving the mounting frame (322) to move on the first slide rail (321); A second slide rail (324) is vertically arranged on the mounting frame (322), and the grinding block (31) is slidably arranged on the second slide rail (324); And a second power unit (325) is used to drive the grinding block 3 (1) to move on the second slide rail (324).

6. A processing device for quartz products as claimed in claim 5, characterized in that: The driving mechanism (32) further comprises: A first limit sensor unit (326) is used to control the operating state of the first power unit (323) so as to control the moving position of the mounting frame (322); and a second limit sensor unit (327) for controlling the operating state of the second power unit (325) so as to enable the grinding block (31) to reciprocate on the second slide rail (324).

7. A processing device for quartz products as claimed in claim 5, characterized in that: The first power unit (323) comprises: a threaded rod (3231), one end of which is arranged on the mounting frame (322) and the other end of which is threadedly connected to the frame (1); when the threaded rod (3231) rotates, the threaded rod (3231) moves the mounting frame (322) toward or away from the product on the workbench (12); and a first motor (3232), used for driving the threaded rod (3231) to rotate; A torque limiter is also provided between the first motor (3232) and the threaded rod (3231). When the output torque of the first motor (3232) is greater than a threshold value set by the torque limiter, the output end of the torque limiter idles to stop the threaded rod (3231) from rotating.

8. A processing device for quartz products as claimed in claim 7, characterized in that: The first power unit (323) further includes: A first transmission pulley set (3233), wherein the first transmission pulley set (3233) is used to connect one end of the threaded rod (3231) close to the mounting frame (322) with the torque limiter.

9. A processing device for quartz products as claimed in claim 5, characterized in that: The second power unit (325) comprises: A second transmission pulley set (3251), wherein the grinding block (31) is connected to a belt on the second transmission pulley set (3251) via a connecting piece; And a second motor (3252) is used to drive the second transmission pulley set (3251) to operate, so that the second transmission pulley set (3251) drives the grinding block (31) to move upward or downward.

10. A processing device for quartz products according to any one of claims 1 to 9, characterized in that: Rollers (11) are arranged around the bottom of the frame (1).

Citation Information

Patent Citations

  • Method and device for honing metal strip of arbitrary width in continuous motion

    CN102196885A

  • Micro-pore abrasive particle fluid grinding equipment

    CN214186716U

  • In-situ control polishing rate of chemical mechanical polishing stage

    TW462905B

  • Numerical control machine tool for grinding two sides of a plane by shifting self-rotation and ultrasonic vibration

    WO2012034497A1