Guide device, winding type processing apparatus and winding type processing method

Abstract

The invention provides a guiding device, winding type processing equipment and a winding type processing method, a plurality of guiding parts are distributed along a preset guiding track, and at least one part of track section of the guiding track is arranged in an annular rewinding mode only along a preset rewinding direction. Each guide part is used for guiding the target object to change the movement direction along the guide track, and the multiple guide parts are configured to be jointly used for guiding the target object to move along the guide track. According to the guide device, the plurality of guide parts are partially or completely arranged in an annular rewinding manner, so that more target objects can be controlled to perform rewinding movement in a limited assembly chamber of the winding type processing equipment at the same time, and the more target objects can be processed in the limited assembly chamber. Therefore, due to the design of the guide device, the size of the winding type treatment equipment can be reduced and the occupied area of the winding type treatment equipment can be reduced under the condition that the quantity of the treated target objects is not changed.

Description

Technical Field

[0001] The present application relates to the field of semiconductor technology, and in particular to a guiding device, a roll-to-roll processing equipment and a roll-to-roll processing method. Background Art

[0002] When processing flexible materials, since they can be rolled up, they can be processed continuously in a roll-to-roll manner. The processing content may include deposition, etching, surface modification, etc. Coating treatment is to coat a very thin film layer on the surface of the target object (such as flexible materials). Roll-to-roll coating refers to coating the surface of the target object by winding and unwinding.

[0003] In the semiconductor field, coating methods include atomic layer deposition, chemical deposition, physical deposition, etc. The process of making barrier films or other functional films by roll-to-roll coating is mainly achieved by coating equipment. During the coating process, a guide device needs to be set to guide the direction of the flexible material. Since the interior of the coating equipment needs to provide sufficient space for the flexible material to move, the existing coating equipment is large in size and occupies a large area. Summary of the invention

[0004] Based on this, it is necessary to provide a guiding device, a winding processing equipment and a winding processing method to address the above-mentioned technical problems.

[0005] The present application provides a guiding device for a winding processing device, the guiding device comprising:

[0006] A guiding mechanism, wherein the guiding mechanism comprises a plurality of guiding components, wherein the plurality of guiding components are distributed along a predetermined guiding trajectory, wherein at least a portion of the trajectory segment of the guiding trajectory is arranged in a circular winding shape only along a predetermined winding direction, wherein each of the guiding components is used to guide the target object to change its movement direction along the guiding trajectory, and the plurality of guiding components are configured to be used together to guide the target object to move along the guiding trajectory.

[0007] In one embodiment, the target is configured as a flexible film; and / or,

[0008] The target object has a to-be-treated surface and a non-treated surface facing opposite directions, and the guide component is configured to contact the non-treated surface of the target object; and / or,

[0009] The guide member is configured as a rolling guide roller, and the rolling guide roller is configured to be in rolling contact with the target object; and / or,

[0010] At least a portion of the guide track is wound around in a predetermined winding direction from inside to outside in a circular shape for several turns; and / or,

[0011] The guide track is arranged in a circular manner in a clockwise or counterclockwise direction; and / or,

[0012] At least one of the guide components is used to guide the target object to change its movement direction at a turning angle greater than or equal to 90°.

[0013] In one embodiment, the guiding device comprises:

[0014] A driving mechanism cooperates with the guiding mechanism to drive the target object to move relative to the guiding mechanism along the guiding trajectory.

[0015] In one embodiment, the driving mechanism comprises:

[0016] a winding device, the winding device being used to provide a winding torque to the target object, the winding torque being configured to drive the target object to move along the guide track relative to the guide mechanism; and / or,

[0017] An unwinding device is used to release the target object.

[0018] In one embodiment, the guide track is arranged to be annularly wound from inside to outside along a predetermined winding direction, forming an annular winding track that expands from inside to outside, the unwinding device is located in the inner circle of the annular winding track, used to release the target object, and the winding device is located outside the track circle of the annular winding track, used to wind up the target object along the predetermined winding direction; or,

[0019] The guide track is arranged to be circularly wound from the outside to the inside along a predetermined winding direction, forming a circular winding track that shrinks from the outside to the inside. The unwinding device is located outside the track circle of the circular winding track, and is used to release the target object. The winding device is located in the inner circle of the circular winding track, and is used to wind up the target object along the predetermined winding direction.

[0020] In one embodiment, the guiding device comprises:

[0021] A spray mechanism is used to apply a spray substance to the target object.

[0022] In one embodiment, a plurality of adjacent unit winding sections are formed during the winding movement of the target object along the guide track, at least a portion of the plurality of unit winding sections are arranged longitudinally relative to a horizontal plane, and the spray mechanism is configured to apply spray to the unit winding sections arranged longitudinally.

[0023] In one embodiment, all of the unit winding sections are arranged longitudinally relative to a horizontal plane, and the spray mechanism is configured to apply a spray to at least a portion of the unit winding sections; or,

[0024] All of the unit wrapping sections include a plurality of adjacent transverse wrapping sections and longitudinal wrapping sections, and the spray mechanism is configured to apply spray to at least a portion of the longitudinal wrapping sections.

[0025] In one embodiment, the spray mechanism comprises at least one spray plate, wherein the spray plate has a plate working surface and a plate non-working surface, and the plate working surface of at least one of the spray plates is configured to face the unit winding section arranged in a longitudinal manner, and to apply a spray to the unit winding section arranged in a longitudinal manner; and / or,

[0026] The spray mechanism is configured to apply the same or different sprays to different wraparound sections of the unit.

[0027] In one of the embodiments, the guide device is configured to have a plurality of mounting positions for positioning and mounting the spray plate, and at least one spray plate of the spray mechanism is configured to be detachably assembled relative to the mounting positions.

[0028] The present application provides a roll-to-roll processing device, the roll-to-roll processing device comprising:

[0029] A device body, wherein the device body has an assembly chamber inside;

[0030] The guide device is assembled in the assembly chamber of the equipment body.

[0031] The present application provides a roll-to-roll processing method, which comprises the following steps:

[0032] Control at least a portion of the target object to make a circular winding motion along a predetermined winding direction, so that the target object forms a plurality of adjacent unit winding segments during the winding motion, at least a portion of the plurality of unit winding segments are arranged longitudinally relative to a horizontal plane, and spray is applied to the unit winding segments arranged longitudinally.

[0033] In the above-mentioned guide device, winding processing equipment and winding processing method, the guide device arranges some or all of the guide components in a circular winding manner, so that more target objects can be controlled to perform winding movements in the limited assembly chamber of the winding processing equipment at the same time, thereby achieving the processing of more target objects in the limited assembly chamber. Therefore, the design of the above-mentioned guide device can reduce the volume of the winding processing equipment and reduce the floor space of the winding processing equipment while keeping the amount of the processed target objects unchanged. BRIEF DESCRIPTION OF THE DRAWINGS

[0034] Figure 1 A schematic diagram of the structure of a guide device provided in one embodiment of the present application.

[0035] Figure 2 A schematic structural diagram of a guide device provided in another embodiment of the present application.

[0036] Figure 3 A schematic diagram of a guide trajectory provided for one embodiment of the present application.

[0037] Figure 4 A schematic structural diagram of a winding processing device provided for one embodiment of the present application.

[0038] Figure Number:

[0039] 100. Target object;

[0040] 110, surface to be treated; 120, non-treated surface; 130, unit wrap-around section; 101, horizontal wrap-around section; 102, vertical wrap-around section;

[0041] 1000, guide device; 2000, equipment body;

[0042] 1100, guiding mechanism; 1200, driving mechanism; 1300, spraying mechanism;

[0043] 1110, guide component; 1101, guide track; 1102, movement direction;

[0044] 1210, winding device; 1220, unwinding device;

[0045] 1310, spray plate;

[0046] 2100. Assemble the chamber. DETAILED DESCRIPTION

[0047] In order to make the above-mentioned purposes, features and advantages of the present application more obvious and easy to understand, the specific implementation methods of the present application are described in detail below in conjunction with the accompanying drawings. In the following description, many specific details are set forth to facilitate a full understanding of the present application. However, the present application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without violating the connotation of the present application, so the present application is not limited by the specific embodiments disclosed below.

[0048] In the description of the present application, it should be understood that if the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. appear, the orientation or position relationship indicated by these terms is based on the orientation or position relationship shown in the accompanying drawings, which is only for the convenience of describing the present application and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present application.

[0049] In addition, if the terms "first" or "second" appear, these terms are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include at least one of the features. In the description of this application, if the term "plurality" appears, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0050] In this application, unless otherwise clearly specified and limited, if the terms "installed", "connected", "connected", "fixed" and the like appear, these terms should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integrated connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to the specific circumstances.

[0051] In the present application, unless otherwise clearly specified and limited, if there is a description that a first feature is "above" or "below" a second feature, etc., or similar descriptions appear, it may mean that the first and second features are in direct contact, or that the first and second features are in indirect contact through an intermediate medium. Moreover, the first feature being "above", "above" and "above" the second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. The first feature being "below", "below" and "below" the second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0052] It should be noted that if an element is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or there may be a central element. If an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be a central element at the same time. If any, the terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used in this application are for illustrative purposes only and do not represent the only implementation method.

[0053] See also Figures 1 to 3 As shown, the present application provides a guide device 1000 for a roll-to-roll processing device, for example, see Figure 4 As shown, the roll-to-roll processing equipment may include an equipment body 2000 and the above-mentioned guide device 1000. The equipment body 2000 has an assembly chamber 2100 inside. The assembly chamber 2100 can be set as a vacuum chamber or a non-vacuum chamber according to process requirements, which is not limited here. The guide device 1000 is assembled in the assembly chamber 2100 of the equipment body 2000. The target object 100 such as a flexible film can be used to guide the guide device 1000 in the roll-to-roll processing equipment, so that the target object 100 can move along a predetermined motion trajectory in the assembly chamber 2100 of the above-mentioned roll-to-roll processing equipment, and be subjected to coating and other treatments during the movement.

[0054] Continue reading Figure 1 As shown, the guiding device 1000 includes a guiding mechanism 1100, and the guiding mechanism 1100 is used to guide the target object 100 to move along a predetermined motion trajectory, for example, along Figure 3 In one embodiment, the guide mechanism 1100 may include a plurality of guide components 1110 to enable the target object 100 to move along the guide track 1101 as shown. Figure 3 The guide track 1101 shown in FIG. 1 may move along a plurality of guide components 1110. Figure 3 The predetermined guidance trajectory 1101 distribution is shown.

[0055] At this time, each of the plurality of guide components 1110 can be used to guide the target 100 to change the movement direction 1102 along the guide track 1101. When the target 100 moves along the guide track 1101 to a certain guide component 1110, the corresponding position of the target 100 will realize the change of the movement direction 1102 based on the guide component 1110, for example Figure 3 As shown, after the target object 100 moves along one direction to the guide component 1110 marked as m, it will move along Figure 3 The movement direction 1102 shown in the figure changes toward another direction. The change shown in the movement direction 1102 can be a change between the horizontal direction and the vertical direction, or a change between any two different predetermined directions, which is not limited here.

[0056] Therefore, those skilled in the art can distribute a plurality of guide components 1110 based on the guide trajectory 1101, so that the target object 100 can change the movement direction 1102 by using different guide components 1110 in different directions and steering angles. In the above embodiment, a plurality of guide components 1110 can work together to guide the target object 100 to move along the guide trajectory 1101, thereby achieving predictable motion control of the target object 100, i.e., movement along the guide trajectory 1101.

[0057] The guide track 1101 mentioned above can be constructed in a variety of track shapes. For example, at least a portion of the track segment of the guide track 1101 can be limited to be arranged in a circular winding manner only along a predetermined winding direction. Figure 3 As shown, the entire guide track 1101 can be arranged in a circular manner along the clockwise winding direction. In addition, the entire guide track 1101 can also be arranged in a circular manner along the counterclockwise winding direction, which is not limited here. Figure 3 As shown, the guide track 1101 may be wound in a circle from inside to outside for several turns along a predetermined winding direction, or may be wound in a circle from outside to inside for several turns along a predetermined winding direction. Those skilled in the art may select the shape and winding direction of the guide track 1101 according to actual needs, which is not limited here.

[0058] Continue reading Figure 4 As shown, the guide device 1000 for the winding processing equipment adopts Figure 1In the manner shown, some or all of the plurality of guide components 1110 are arranged in a circular winding manner, so that more target objects 100 can be controlled to perform winding motion in a limited assembly chamber 2100 at the same time, thereby achieving the processing of more target objects 100 in the limited assembly chamber 2100. Therefore, the design of the guide device 1000 can reduce the volume of the winding processing equipment and reduce the floor space of the winding processing equipment while keeping the amount of the target objects 100 processed unchanged.

[0059] In one embodiment, the target object 100 may be defined to have a to-be-treated surface 110 and a non-treated surface 120 facing opposite directions, for example Figure 1 As shown, when the target 100 is a flexible film, one surface of the flexible film is the surface to be processed 110, and the other surface of the flexible film is the non-processed surface 120. At this time, when the guide mechanism 1100 controls the target 100 to move along the guide track 1101, the guide component 1110 is limited to contact only with the non-processed surface 120 of the target 100, and the surface to be processed 110 of the target 100 is based on the state of being away from the guide component 1110, and only the non-processed surface 120 contacts the guide component 1110, thereby avoiding that the guide component 1110 contacts the surface to be processed 110 of the target 100, which affects the processing work of the surface to be processed 110.

[0060] The guide component 1110 may adopt a variety of component structures that can change the motion direction 1102 of the target 100, such as balls, rollers, etc. In one implementation, the guide component 1110 may be configured to adopt a rolling guide roller, and the rolling guide roller may roll in contact with the target 100, thereby achieving motion control of the target 100. When the rolling guide roller rolls in contact with the target 100, the rolling guide roller (i.e., the guide component 1110) may be limited to guide the target 100 to change the motion direction 1102 at a steering angle greater than or equal to 90°, that is, the rolling guide roller rolls in contact with the target 100 at a wrap angle greater than or equal to 90°, thereby preventing the rolling guide roller and the target 100 from slipping, and the tension may be more stably controlled to avoid damaging the surface of the target 100.

[0061] In one embodiment, the guide device 1000 includes a driving mechanism 1200, the driving mechanism 1200 is used to provide power for the target object 100 to move relative to the guide mechanism 1100, and the driving mechanism 1200 can cooperate with the guide mechanism 1100 to drive the target object 100 to move relative to the guide mechanism 1100 along the guide track 1101. In one embodiment, the driving mechanism 1200 includes a winding device 1210 and an unwinding device 1220, the winding device 1210 is used to provide a winding torque to the target object 100, and the winding torque is configured to drive the target object 100 to move relative to the guide mechanism 1100 along the guide track 1101, and the unwinding device 1220 is used to release the target object 100.

[0062] like Figure 1 As shown, the winding device 1210 adopts a winding wheel, and the unwinding device 1220 adopts an unwinding wheel. The target object 100 is pre-wound on the unwinding wheel. The unwinding wheel rotates counterclockwise to release the target object 100. The released target object 100 is captured by the winding wheel, and the winding wheel can rotate clockwise to rewind the target object 100. Between the winding wheel and the unwinding wheel, the target object 100 can be guided by the guide mechanism 1100 and move along the guide track 1101 toward the direction of the winding wheel. In addition, the winding device 1210 and the unwinding device 1220 can also adopt other structures or component forms, which are not limited here.

[0063] Continue reading Figure 1 and Figure 3 As shown, in one embodiment, the guide track 1101 can be arranged to be circularly wound from the inside to the outside along a predetermined winding direction, forming a circular winding track that expands from the inside to the outside. At this time, the unwinding device 1220 can be located in the inner circle of the circular winding track to release the target object 100, and the winding device 1210 is located outside the track circle of the circular winding track to wind up the target object 100 along the predetermined winding direction.

[0064] The unwinding device 1220 unwinds the target object 100 in a counterclockwise direction, and the target object 100 moves from inside to outside along the circular winding track formed above in a counterclockwise winding direction. Figure 3 As shown, the counterclockwise direction indicates the direction along the marks a, b, c, d, e, f, g, h, i, j, k, l, m, and n in the plurality of guide members 1110. In this process, the non-processed surface 120 of the target object 100 is in contact with the guide member 1110, while the surface 110 to be processed of the target object 100 is away from the guide member 1110, providing a condition that is convenient for processing. Figure 1As shown, in one embodiment, the guide device 1000 includes a spray mechanism 1300, and the spray mechanism 1300 is used to apply a spray substance to the target object 100. Those skilled in the art can select a spray substance in a mist, liquid, powder, etc. according to needs, and this is not limited here.

[0065] In addition, the guide track 1101 can be arranged to be circularly wound from the outside to the inside along a predetermined winding direction, forming a circular winding track that shrinks from the outside to the inside. At this time, the unwinding device 1220 is located outside the track circle of the circular winding track, and is used to release the target object 100. The winding device 1210 is located in the inner circle of the circular winding track, and is used to wind up the target object along the predetermined winding direction.

[0066] The unwinding device 1220 unwinds the target object 100 in a counterclockwise direction, and the target object 100 moves in a clockwise winding direction from outside to inside along the annular winding track formed above. Figure 3 As shown, the clockwise direction indicates the direction opposite to the marks a, b, c, d, e, f, g, h, i, j, k, l, m, and n in the plurality of guide members 1110. In this process, the non-processed surface 120 of the target object 100 is in contact with the guide member 1110, while the surface 110 to be processed of the target object 100 is away from the guide member 1110, providing a condition that can be conveniently processed.

[0067] Continue reading Figure 1 and Figure 2 As shown, the target object 100 can form a number of adjacent unit winding sections 130 during the winding movement along the guide track 1101, and at least a part of the unit winding sections 130 are arranged in a longitudinal manner relative to the horizontal plane. The spray mechanism 1300 is configured to apply a spray to the unit winding sections 130 arranged in the longitudinal manner, so that the spray mechanism 1300 and the unit winding sections 130 arranged in the longitudinal manner are arranged horizontally relative to each other, rather than longitudinally relative to each other, thereby solving the problem of powder falling and the problem of spraying uniformity.

[0068] Because, if the spray mechanism 1300 is arranged longitudinally relative to the target object 100, it is easy to drop dust on the surface of the target object 100. Moreover, since the target object 100 of the flexible film type has its own gravity, if the tension of the flexible film is too small, it is easy to cause the flexible film to sag. If the spray mechanism 1300 is arranged longitudinally relative to the horizontal winding section 101 of the flexible film, it will affect the distance between the spray mechanism 1300 and the flexible film, and this distance will affect the uniformity of the flexible film after coating. If the tension of the flexible film is too large, the flexible film will have irreversible deformation and damage the surface coating layer of the flexible film.

[0069] Therefore, in order to solve the above-mentioned powder falling problem and the problem of spraying uniformity, the present application stipulates that the spray mechanism 1300 and the unit winding section 130 arranged in a longitudinal manner are arranged horizontally relative to each other, thereby improving the above-mentioned powder falling problem through the relative arrangement of the spray mechanism 1300 and the target object 100, and when processing the unit winding section 130 arranged in a longitudinal manner, the problem of inconsistent spacing will not occur due to the self-gravity of the target object 100.

[0070] Whether the plurality of unit winding sections 130 can be arranged in a longitudinal manner relative to the horizontal plane may depend on the installation direction of the above-mentioned guide device relative to the horizontal plane. For example, in one embodiment, Figure 1 As shown, the overall structure of the guide device is as follows Figure 1 The X, Y, and Z directions are defined in the above, and the plane formed by X and Y is a horizontal plane. At this time, the flexible film (target 100) is arranged longitudinally relative to the horizontal plane as a whole, that is, it is arranged approximately perpendicular to the horizontal plane (along the Z direction). Figure 1 In the state shown, the rotation axes of the winding wheel and the unwinding wheel are also substantially perpendicular to the horizontal plane (along the Z direction). Therefore, all the unit winding sections 130 are arranged longitudinally relative to the horizontal plane, and the spray mechanism 1300 is configured to apply spray to one or more unit winding sections 130.

[0071] In one embodiment, if Figure 2 As shown, the overall structure of the guide device is as follows Figure 2 The X, Y, and Z directions are defined in the above, and the plane formed by X and Y is a horizontal plane. At this time, the entire unit winding section 130 can be defined as including a plurality of adjacent transverse winding sections 101 and longitudinal winding sections 102, wherein the transverse winding sections 101 are arranged approximately parallel to the horizontal plane, and the longitudinal winding sections 102 are arranged approximately perpendicular to the horizontal plane (along the Z direction). Figure 2 In the state shown, the rotation axes of the reel wheel and the unreel wheel are also substantially parallel to the horizontal plane. At this time, it can be defined that the spray mechanism 1300 is configured to apply spray to at least a portion of the longitudinal rewinding section 102 .

[0072] It should be noted that when the target object 100 forms several adjacent unit winding sections 130 (for example, several adjacent horizontal winding sections 101 and longitudinal winding sections 102) during the winding movement along the guide track 1101, the above-mentioned unit winding sections 130 are not fixed sections on the target object 100, but dynamic sections formed due to the arrangement of the several guide components 1110 when the target object 100 moves along the guide track 1101.

[0073] For example Figure 2As shown, when adjacent guiding components 1110 are laterally opposed to each other, the section of the target object 100 passing between the two guiding components 1110 is a laterally wrapping section 101, and when adjacent guiding components 1110 are longitudinally opposed to each other, the section of the target object 100 passing between the two guiding components 1110 is a longitudinally wrapping section 102. Those skilled in the art can set the arrangement of several guiding components 1110 as required, thereby forming the above-mentioned unit wrapping sections 130 (such as the laterally wrapping section 101 and the longitudinally wrapping section 102) in different sections of the target object 100.

[0074] It should be noted that the unit wrap section 130 is arranged in a longitudinal manner relative to the horizontal plane, which can be understood as being roughly in the longitudinal direction relative to the horizontal plane. It can be completely perpendicular to the horizontal plane, or it can form an angle error of no more than 15° relative to the horizontal plane. Technical personnel in this field can set it according to actual needs, and no limitation is made here.

[0075] Continue reading Figure 1 and Figure 2 As shown, the circular winding track can form three circles in a clockwise or counterclockwise direction, and the number of three circles is more in line with the transportation of the flexible film (target object 100), which can take into account both the smoothness of the transportation of the flexible film (target object 100) and the stability of the transportation of the flexible film (target object 100). In addition, the circular winding track can also be greater than three circles or less than three circles. Those skilled in the art can set the number of circles of the circular winding track and the length of each circle according to actual needs, thereby determining the length of the circular winding track, which is not limited here.

[0076] The spray mechanism 1300 can adopt a variety of structures, such as a plate-like structure, a tubular structure, etc. In one embodiment, the spray mechanism 1300 may include one or more spray plates 1310, and the spray plate 1310 is limited to have a plate working surface and a plate non-working surface. The plate working surface of the spray plate 1310 is provided with an outlet for releasing the spray, which is used to release the spray outward, wherein the plate working surface of the spray plate 1310 is configured to be set toward at least one longitudinal winding section 102 of the target object 100, thereby applying the spray to the longitudinal winding section 102 of the target object 100 through the plate working surface of the spray plate 1310.

[0077] Each of the above-mentioned spray plates 1310 can select and use different types of spray objects according to different process requirements, and can be arranged in a targeted manner in the moving direction 1102 of the target object 100 according to the process requirements. Each of the above-mentioned spray plates 1310 can also be assembled relative to the equipment body 2000 in a detachable manner. For example, each of the above-mentioned spray plates 1310 can be designed as a plate structure that is easy to pull out according to requirements, so as to facilitate the maintenance of the equipment. Moreover, if there is a heating requirement, a heating mechanism can also be set on one or more of the spray plates 1310.

[0078] like Figure 4 As shown, the spray plate 1310 is arranged relative to the target object 100 in a direction substantially perpendicular to the horizontal plane, so that the working surface of the spray plate 1310 can be arranged toward the surface 110 to be processed of the longitudinal revolving section 102 of the target object 100, and the spray is applied laterally to the surface 110 to be processed of the longitudinal revolving section 102 in a state substantially perpendicular to the horizontal plane, which can prevent dust from falling on the surface of the target object 100. Moreover, in the moving direction 1102 of the target object 100, a plurality of spray plates 1310 can be arranged, and the plurality of spray plates 1310 are arranged along the guide track 1101 corresponding to different longitudinal revolving sections 102 of the target object 100, thereby applying the spray to the surface 110 to be processed of the target object 100 for multiple times, achieving a deposition thickness and improving the treatment effect.

[0079] The present application provides a winding processing method, which includes the following steps: controlling at least a portion of a target object 100 to perform a circular winding motion along a predetermined winding direction, so that the target object 100 forms a plurality of adjacent unit winding segments 130 during the winding motion, at least a portion of the plurality of unit winding segments 130 being arranged longitudinally relative to a horizontal plane, and applying a spray to the unit winding segments 130 arranged longitudinally.

[0080] Based on the introduction of the above-mentioned guide device 1000 and the winding processing equipment, it can be known that since at least a portion of the target object 100 is controlled to move in a circular winding direction along a predetermined winding direction, more target objects 100 can be controlled to be processed synchronously at the same time in a limited space. Therefore, when the amount of the processed target objects 100 remains unchanged, this control method of the target object 100 can effectively reduce the volume of the winding processing equipment and reduce the floor space of the winding processing equipment.

[0081] The above-mentioned winding treatment method can be implemented based on the guide device 1000 and the winding treatment equipment mentioned in this application, or can also be implemented based on other equipment with similar functions, which is not limited here. Therefore, the functions and technical effects of the above-mentioned winding treatment method can all refer to the description of the guide device 1000 and the winding treatment equipment in the previous text, and will not be repeated here.

[0082] The technical features of the above-described embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0083] The above-described embodiments only express several implementation methods of the present application, and the descriptions thereof are relatively specific and detailed, but they cannot be construed as limiting the scope of the patent application. It should be pointed out that, for a person of ordinary skill in the art, several variations and improvements can be made without departing from the concept of the present application, and these all belong to the protection scope of the present application. Therefore, the protection scope of the patent application shall be subject to the attached claims.

Claims

1. A guide device (1000) for a roll-to-roll processing device, characterized in that: The guiding device (1000) comprises: A guiding mechanism (1100), the guiding mechanism (1100) comprising a plurality of guiding components (1110), the plurality of guiding components (1110) being distributed along a predetermined guiding track (1101), at least a portion of the track segments of the guiding track (1101) being arranged in a circular winding manner only along a predetermined winding direction, each of the guiding components (1110) being used to guide a target object (100) to change a movement direction (1102) along the guiding track (1101), and the plurality of guiding components (1110) being configured to be used together to guide the target object (100) to move along the guiding track (1101).

2. The guiding device (1000) according to claim 1, characterized in that: The target object (100) is configured as a flexible film; and / or, The target object (100) has a to-be-treated surface (110) and a non-treated surface (120) facing opposite directions, and the guide component (1110) is configured to contact the non-treated surface (120) of the target object (100); and / or, The guide component (1110) is configured as a rolling guide roller, and the rolling guide roller is configured to be in rolling contact with the target object (100); and / or, At least a portion of the guide track (1101) is wound around in a predetermined winding direction from inside to outside in a circular shape for a number of turns; and / or, The guide track (1101) is arranged in a circular manner in a clockwise or counterclockwise direction; and / or, At least one of the guide components (1110) is used to guide the target object (100) to change its movement direction (1102) at a turning angle greater than or equal to 90°.

3. The guiding device (1000) according to claim 1, characterized in that: The guiding device (1000) comprises: A driving mechanism (1200), the driving mechanism (1200) cooperates with the guiding mechanism (1100) and is used to drive the target object (100) to move along the guiding track (1101) relative to the guiding mechanism (1100).

4. The guiding device (1000) according to claim 3, characterized in that: The driving mechanism (1200) comprises: a winding device (1210), the winding device (1210) being used to provide a winding torque to the target object (100), the winding torque being configured to drive the target object (100) to move along the guide track (1101) relative to the guide mechanism (1100); and / or, An unwinding device (1220), the unwinding device (1220) being used to release the target object (100).

5. The guiding device (1000) according to claim 4, characterized in that: The guide track (1101) is arranged to be circularly wound from the inside to the outside along a predetermined winding direction, forming a circular winding track that expands from the inside to the outside, the unwinding device (1220) is located in the inner circle of the circular winding track, and is used to release the target object (100), and the winding device (1210) is located outside the track circle of the circular winding track, and is used to wind up the target object (100) along the predetermined winding direction; or, The guide track (1101) is arranged to be circularly wound from the outside to the inside along a predetermined winding direction, forming a circular winding track that shrinks from the outside to the inside. The unwinding device (1220) is located outside the track circle of the circular winding track and is used to release the target object (100). The winding device (1210) is located inside the track circle of the circular winding track and is used to wind up the target object (100) along the predetermined winding direction.

6. The guiding device (1000) according to claim 1, characterized in that: The guiding device (1000) comprises: A spray mechanism (1300), the spray mechanism (1300) being used to apply a spray substance to the target object (100).

7. The guiding device (1000) according to claim 6, characterized in that: During the process of the target object (100) circling along the guide track (1101), a plurality of adjacent unit winding sections (130) are formed, at least a portion of the unit winding sections (130) among the plurality of unit winding sections (130) are arranged in a longitudinal manner relative to a horizontal plane, and the spray mechanism (1300) is configured to apply a spray to the unit winding sections (130) arranged in a longitudinal manner.

8. The guiding device (1000) according to claim 7, characterized in that: All of the unit winding sections (130) are arranged in a longitudinal manner relative to a horizontal plane, and the spray mechanism (1300) is configured to apply a spray to at least a portion of the unit winding sections (130); or, All of the unit rewind sections (130) include a plurality of adjacent transverse rewind sections (101) and longitudinal rewind sections (102), and the spray mechanism (1300) is configured to apply spray to at least a portion of the longitudinal rewind sections (102).

9. The guiding device (1000) according to claim 7, characterized in that: The spray mechanism (1300) comprises at least one spray plate (1310), the spray plate (1310) having a plate working surface and a plate non-working surface, the plate working surface of at least one of the spray plates (1310) being configured to face the unit winding section (130) arranged in a longitudinal manner, and to apply a spray substance to the unit winding section (130) arranged in a longitudinal manner; and / or, The spray mechanism (1300) is configured to apply the same or different sprays to different unit winding sections (130).

10. The guiding device (1000) according to claim 9, characterized in that: The guide device is configured to have a plurality of installation positions for positioning and installing the spray plate (1310), and at least one spray plate (1310) of the spray mechanism (1300) is configured to be detachably assembled relative to the installation positions.

11. A winding processing device, characterized in that: The winding processing equipment comprises: A device body (2000), wherein the device body (2000) has an assembly chamber (2100) inside; The guiding device (1000) according to any one of claims 1 to 10, wherein the guiding device (1000) is assembled in an assembly chamber (2100) of the device body (2000).

12. A winding processing method, characterized in that: The winding treatment method comprises the following steps: At least a portion of the target object (100) is controlled to perform a circular revolving movement along a predetermined revolving direction, so that the target object (100) forms a plurality of adjacent unit revolving sections (130) during the revolving movement, at least a portion of the unit revolving sections (130) among the plurality of unit revolving sections (130) are arranged in a longitudinal manner relative to a horizontal plane, and spraying material is applied to the unit revolving sections (130) arranged in a longitudinal manner.

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