Magnetic insulation induced voltage superposition device with axial vacuum degree consistency

Abstract

The invention relates to a vacuum system in a pulse power device, and provides a magnetic insulation induced voltage superposition device with axial vacuum degree consistency in order to solve the problems that an existing vacuum system cannot reach a target vacuum degree and is poor in uniformity, the magnetic insulation induced voltage superposition device comprises a cantilever supporting section, a plurality of groups of induction cavities and an isolation extension section which are coaxially connected in sequence, the vacuum cavity assemblies and the vacuum pump assemblies are arranged between the connecting ends; the vacuum cavity assembly comprises a vacuum cavity and a connecting cylinder, and the connecting cylinder is used for connecting the vacuum cavity assembly to the connecting ends in an inserted mode. A plurality of interface flanges are arranged on the outer side circumferential surface of the vacuum cavity, and a plurality of through holes are formed in the outer side circumferential surface of the connecting cylinder in the radial direction; the vacuum pump assembly comprises a plurality of molecular pumps, a vortex dry pump, a pre-pumping valve and an isolating valve, the molecular pumps are connected with the vacuum cavity through interface flanges, one end of the vortex dry pump is connected with the vacuum cavity through the pre-pumping valve, the other end of the vortex dry pump is connected with the molecular pumps through the isolating pump, and the vortex dry pump is used for controlling the molecular pumps to perform high vacuum pumping treatment.

Description

Technical Field

[0001] The invention relates to a vacuum system in a pulse power device, in particular to a magnetic insulation induction voltage superposition device with axial vacuum degree consistency. Background Art

[0002] The vacuum system is one of the important auxiliary equipment of large pulse power devices. In order to obtain pulse indicators with higher voltage (several MV) levels and higher power levels, the commonly used technical means is magnetically induction voltage adders (MIVA), that is, the primary is a group of induction cavities connected in parallel, and the secondary is a long metal tube for pulse superposition and transmission. The insulation stack of the induction cavity, the secondary magnetically insulated transmission line and the diode load all work under vacuum conditions, and the vacuum degree is 10 -3 Pa level, it can be seen that the vacuum degree of the device directly affects the operating safety and test efficiency of the device.

[0003] When the pulse power device is small in size, the vacuum system only needs 1 to 2 sets of diffusion pumps or 1 to 2 molecular pumps to ensure that the vacuum inside the device reaches the test conditions, and the layout of the vacuum system is also easy to achieve; for the magnetically insulated induction voltage superimposer device, as the number of stages increases, the number of insulation stacks and the length of the transmission line also increase, and both are the main sources of outgassing in the vacuum chamber. The span of the vacuum chamber of the device structure can reach tens of meters in length. It is difficult to make the device reach the target vacuum degree by relying solely on a single vacuum unit, and it is also difficult to ensure the uniformity of the vacuum degree in the chamber, which greatly increases the risk of insulation breakdown or vacuum breakdown, affecting the normal use of the device. Summary of the invention

[0004] The purpose of the present invention is to solve the problems that the existing vacuum system cannot ensure that the magnetic insulation induction voltage superimposition device reaches the target vacuum degree, and cannot ensure the uniformity of the vacuum degree in the chamber, and proposes a magnetic insulation induction voltage superposition device with axial vacuum degree consistency.

[0005] To achieve the above objectives, the technical solution proposed by the present invention is:

[0006] A magnetically insulated induction voltage superposition device with axial vacuum consistency comprises a cantilever support section, a pulse superposition section and an isolation extension section which are coaxially connected in sequence, wherein the pulse superposition section comprises a plurality of groups of induction cavities which are connected in sequence, and the device is special in that a vacuum cavity assembly is arranged between each connection end of the cantilever support section, the plurality of groups of induction cavities and the isolation extension section, and each vacuum cavity assembly is connected to a vacuum pump assembly;

[0007] The vacuum chamber assembly comprises a cylindrical vacuum chamber and a connecting tube coaxially arranged in the vacuum chamber, and a closed annular space is formed between the inner side of the vacuum chamber and the outer side of the connecting tube; the inner diameter of the connecting tube is adapted to the outer diameter of each connecting end of the cantilever support section, the multiple groups of sensing chambers and the isolation extension section, and is used to plug the vacuum chamber assembly on each connecting end; a plurality of interface flanges communicating with the annular space are arranged on the outer circumferential surface of the vacuum chamber; a plurality of through holes communicating with the annular space are opened in the radial direction on the outer circumferential surface of the connecting tube;

[0008] The vacuum pump assembly includes a plurality of molecular pumps, at least one vortex dry pump, a pre-pumping valve and an isolation valve, wherein the plurality of molecular pumps are respectively connected to the vacuum chamber through interface flanges, and the central axes of the plurality of molecular pumps are perpendicular to the longitudinal section of the vacuum chamber;

[0009] A multi-way connector is provided on the suction port of the vortex dry pump, one of the interfaces of the multi-way connector is connected to one end of a pre-pumping valve, and the other end of the pre-pumping valve is connected to the vacuum chamber, so as to control the vortex dry pump to perform low vacuum processing; another interface of the multi-way connector is connected to one end of an isolation valve, and the other end of the isolation valve is connected to at least one molecular pump, so as to control the vortex dry pump to drive the molecular pump to perform high vacuum processing.

[0010] Furthermore, the through holes on the connecting tube are all rounded;

[0011] The inner surface of the connecting tube is anodized.

[0012] Furthermore, the number of molecular pumps in the vacuum pump assembly is 4, and the number of vortex dry pumps is 2;

[0013] Four interface flanges are symmetrically provided on the outer circumferential surface of the vacuum chamber along the longitudinal section of the vacuum chamber, and four molecular pumps are respectively installed on the four interface flanges, and the central axes of the four molecular pumps are perpendicular to the longitudinal section of the vacuum chamber;

[0014] A three-way connector is provided on the suction port of the vortex dry pump, wherein one vortex dry pump is connected to one end of the isolation valve through one interface of the three-way connector, and the other end of the isolation valve is connected to two molecular pumps on one side of the vacuum chamber; the other interface of the three-way connector is connected to one end of the pre-pumping valve, and the other end of the pre-pumping valve is connected to the vacuum chamber;

[0015] Another vortex dry pump is connected to one end of the isolation valve through one interface of the three-way connector, the other end of the isolation valve is connected to two molecular pumps on the other side of the vacuum chamber, the other interface of the three-way connector is connected to one end of the pre-pumping valve, and the other end of the pre-pumping valve is connected to the vacuum chamber.

[0016] Furthermore, the vacuum chamber is connected with a low gauge and a high gauge for measuring the real vacuum degree in the vacuum chamber;

[0017] The low gauge and high gauge are remotely connected to an external vacuum gauge via cables.

[0018] Furthermore, the vacuum chamber is made of stainless steel;

[0019] The connecting tube is made of aluminum alloy.

[0020] Furthermore, the pre-pumping valve and the isolation valve are both pneumatic valve structures.

[0021] Furthermore, the vacuum chambers between the cantilever support section, the multiple groups of sensing chambers and the respective connecting ends of the isolation extension section are fixedly connected to the respective connecting ends by screws.

[0022] Furthermore, the vortex dry pump and the pre-pumping valve, the pre-pumping valve and the vacuum chamber, the vortex dry pump and the isolation valve, and the isolation valve and the molecular pump are all connected via bellows.

[0023] Furthermore, the molecular pump is connected to an external water chiller via a connecting pipe for water cooling the molecular pump.

[0024] Furthermore, the molecular pump in the vacuum pump assembly is connected to an external molecular pump controller via a cable for remotely controlling the molecular pump.

[0025] Beneficial effects of the present invention:

[0026] (1) The magnetic insulation induction voltage superposition device with axial vacuum consistency of the present invention adopts the design concept of breaking the whole into parts, which can effectively solve the problem of vacuum uniformity of large-scale magnetic insulation induction superposition devices with longer spans. While improving the vacuum extraction efficiency, it also ensures the uniformity of the vacuum degree in the cavity. It has a wide range of applications, effectively improves the vacuum extraction rate, saves the vacuum extraction time of the device, and enables the device to reach the target vacuum degree in a shorter time, and has strong practicality.

[0027] (2) The present invention obtains the same vacuum extraction rate through multiple small-volume molecular pumps, and sets the molecular pump as the main vacuum extraction pump of the device. Due to its small size and small space occupation, it is easy to install and arrange, which can not only effectively save the structural space of the device and ensure the compactness of the magnetic insulation induction voltage superimposer device, but also facilitate the later maintenance and replacement of the vacuum system, effectively saving time cost, space cost and production cost.

[0028] (3) The present invention designs the vacuum chamber and the connecting tube to be a coaxial structure, and then connects the connecting tube to each connecting end, so that multiple molecular pumps are installed on the vacuum chamber, and then maintain vacuum connection with the through holes on the connecting tube. This design can not only ensure the transition continuity of the impedance of the magnetically insulated transmission line, but also ensure that the molecular pump can perform effective vacuum extraction.

[0029] (4) The present invention rounds the through hole on the connecting tube and anodizes the inner surface of the connecting tube to effectively ensure effective connection between the connecting tube and the molecular pump, ensuring that the molecular pump can effectively pump at a high speed, while also ensuring efficient transmission of high-voltage electric pulses and avoiding the occurrence of abnormal discharge.

[0030] (5) In the present invention, the central axes of the multiple molecular pumps after installation are perpendicular to the longitudinal section of the vacuum chamber. This design can not only improve the effective pumping speed of the molecular pump, but also prevent impurities and foreign matter from entering the molecular pump and affecting the normal operation of the molecular pump and the device. It is also beneficial to the connection layout between the molecular pump and the vortex dry pump, making the overall structure of the device simple and reliable.

[0031] (6) The large pulse power device of the present invention is accompanied by strong electromagnetic pulses and strong radiation during operation, which may cause damage to electronic devices near the device. In the present invention, the external molecular pump controller connected to the molecular pump and the external vacuum gauge connected to the low-gauge / high-gauge are placed in an area far away from the device, which can effectively prevent the strong electromagnetic environment and strong pulse radiation environment from interfering with the controller, thereby extending the service life of the device. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] Figure 1 It is a structural schematic diagram of an embodiment of a magnetic insulation induction voltage superposition device with axial vacuum consistency according to the present invention;

[0033] Figure 2 A schematic diagram of the structure of a vacuum chamber in an embodiment of the present invention;

[0034] Figure 3 is a cross-sectional view of a vacuum chamber in an embodiment of the present invention;

[0035] Figure 4 A schematic diagram of the connection between the vacuum chamber assembly and the vacuum pump assembly in an embodiment of the present invention;

[0036] Figure 5 It is a schematic diagram of the structure of an embodiment of the present invention including three groups of sensing chambers;

[0037] Figure 6 A schematic diagram of the structure of a vacuum chamber assembly and a vacuum pump assembly in an embodiment of the present invention;

[0038] Figure 7Schematic diagram of the distribution of vacuum chamber components and vacuum pump components in the device of the embodiment of the present invention;

[0039] Reference numerals:

[0040] 1-cantilever support section, 2-sensing chamber, 3-isolation extension section, 4-vacuum chamber, 5-connecting cylinder, 6-interface flange, 7-through hole, 8-molecular pump, 9-vortex dry pump, 10-pre-pumping valve, 11-isolation valve, 12-low gauge, 13-high gauge, 14-bellows. DETAILED DESCRIPTION

[0041] like Figure 1 As shown, a magnetically insulated induction voltage superposition device with axial vacuum consistency includes a cantilever support section 1, a pulse superposition section and an isolation extension section 3 which are coaxially connected in sequence, and the pulse superposition section includes a plurality of groups of induction cavities 2 which are connected in sequence. There are vacuum cavity components fixedly connected by screws between each connection end of the cantilever support section 1, the plurality of groups of induction cavities 2 and the isolation extension section 3, and each vacuum cavity component is connected to a vacuum pump component;

[0042] like Figure 2 and Figure 3 As shown, the vacuum chamber assembly includes a stainless steel cylindrical vacuum chamber 4 and an aluminum alloy connecting tube 5 coaxially arranged in the vacuum chamber 4, and a closed annular space is formed between the inner side of the vacuum chamber 4 and the outer side of the connecting tube 5; the inner diameter of the connecting tube 5 is adapted to the outer diameter of each connecting end of the cantilever support section 1, multiple groups of induction chambers 2 and the isolation extension section 3, and is used to plug the vacuum chamber assembly into each connecting end to ensure the continuous impedance transition on the magnetic insulation transmission line; a plurality of interface flanges 6 connected to the annular space are arranged on the outer circumferential surface of the vacuum chamber 4; a plurality of through holes 7 connected to the annular space are opened in the radial direction on the outer circumferential surface of the connecting tube 5, and the structure of the through holes 7 should not limit the effective pumping speed of the molecular pump 8, and in addition, the efficient transmission of high-voltage electric pulses must be ensured. In order to prevent abnormal discharge, each through hole 7 must be rounded, and the inner surface of the connecting tube 5 is anodized as a whole.

[0043] The vacuum chamber 4 is connected with a low gauge 12 and a high gauge 13 for measuring the real vacuum degree in the vacuum chamber 4. The low gauge 12 and the high gauge 13 are connected to an external vacuum gauge via cables, and the data are remotely transmitted to the external vacuum gauge via the cables.

[0044] like Figure 4As shown, the vacuum pump assembly includes multiple molecular pumps 8, at least one vortex dry pump 9, a pre-pumping valve 10 and an isolation valve 11. The molecular pump 8 is grease-lubricated and can be installed at any angle. The multiple molecular pumps 8 are connected to the vacuum chamber 4 through the interface flange 6, and the central axes of the multiple molecular pumps 8 after installation are perpendicular to the longitudinal section of the vacuum chamber 4, which can effectively improve the vacuum pumping speed of the device. Since the molecular pump 8 is connected to the external molecular pump controller through a long cable, the load working area of ​​the two is far away from the isolation transmission section, and the environment in the vacuum chamber 4 is relatively clean, so there is no need to set a baffle valve between the molecular pump 8 and the vacuum chamber 4;

[0045] In addition, the molecular pump 8 is installed on the interface flange 6. After installation, the central axis of each molecular pump 8 is perpendicular to the longitudinal section of the vacuum chamber 4, which can effectively reduce the entry of impurities and foreign matter; multiple molecular pumps 8 are connected to an external chiller through a connecting pipe for water cooling of the molecular pump 8.

[0046] The external molecular pump controller and the external vacuum gauge are placed in an area far away from the device, which can effectively prevent the strong electromagnetic environment and strong pulse radiation environment from interfering with the controller.

[0047] A multi-way connector is provided on the suction port of the vortex dry pump 9, one of the interfaces of the multi-way connector is connected to one end of the pre-pumping valve 10, and the other end of the pre-pumping valve 10 is connected to the vacuum chamber 4, which is used to control the vortex dry pump 9 to perform low vacuum treatment, and quickly evacuate the air in the device to the starting pressure of the molecular pump 8; another interface of the multi-way connector is connected to one end of the isolation valve 11, and the other end of the isolation valve 11 is connected to at least one molecular pump 8, which is used to control the vortex dry pump 9 to drive the molecular pump 8 to perform high vacuum treatment. When low vacuum is being drawn, the pre-pumping valve 10 in the device is opened, and the isolation valve 11 is closed; when high vacuum is being drawn, the molecular pump 8 in the device starts to work, the pre-pumping valve 10 is closed, and the isolation valve 11 is opened.

[0048] The pre-pumping valve 10 and the isolation valve 11 are both pneumatic valves, the opening and closing of which are controlled by the air source and will not be disturbed by the strong electromagnetic environment. When the system is powered off, the valve position is reset to prevent the system from breaking and damaging the molecular pump 8.

[0049] In the embodiment of the present invention, the pulse superposition section includes three groups of induction chambers 2, and the length of the magnetic insulation transmission line is 15 meters. In order to ensure that the vacuum degree of each part meets the target requirement, that is, the vacuum degree is ≤7.0×10 -3 Pa, therefore, a set of vacuum chamber components and vacuum pump components are assembled on each connecting end of the cantilever support section 1, each set of sensing chambers 2 and the isolation extension section 3.

[0050] like Figure 5As shown, according to the axial assembly order, the first group of vacuum chamber assemblies is located between the cantilever support section 1 and the first group of sensing chambers 2, the second group of vacuum chamber assemblies is located between the first group of sensing chambers 2 and the second group of sensing chambers 2, the third group of vacuum chamber assemblies is located between the second group of sensing chambers 2 and the third group of sensing chambers 2, and the fourth group of vacuum chamber assemblies is located between the third group of sensing chambers 2 and the isolation extension section 3, and each group of vacuum chamber assemblies is connected to a group of vacuum pump assemblies.

[0051] like Figure 6 As shown, each set of vacuum pump components includes 4 molecular pumps 8, 2 vortex dry pumps 9, 1 external chiller, 2 pre-pumping valves 10, and 2 isolation valves 11; 4 interface flanges 6 are symmetrically provided on the outer circumferential surface of the vacuum chamber 4 along the longitudinal section of the vacuum chamber 4, and the 4 molecular pumps 8 are respectively installed on the 4 interface flanges 6, while ensuring that the central axes of the 4 molecular pumps 8 are perpendicular to the longitudinal section of the vacuum chamber 4;

[0052] A three-way connector is provided on the suction port of the vortex dry pump 9, one of the interfaces of the three-way connector on one of the vortex dry pumps 9 is connected to one end of the isolation valve 11, and the other end of the isolation valve 11 is connected to the two molecular pumps 8 on one side through a bellows 14; the other interface of the three-way connector is connected to one end of the pre-pumping valve 10 through the bellows 14, and the other end of the pre-pumping valve 10 is connected to the vacuum chamber 4;

[0053] One of the interfaces of the three-way connector on the other vortex dry pump 9 is connected to one end of the isolation valve 11, the other end of the isolation valve 11 is connected to the two molecular pumps 8 on the other side through the bellows 14, the other interface of the three-way connector is connected to one end of the pre-pumping valve 10 through the bellows 14, the other end of the pre-pumping valve 10 is connected to the vacuum chamber 4, and the pump body of the molecular pump 8 is water-cooled by an external chiller when working.

[0054] like Figure 7 As shown, since the length of the isolation extension section 3 is relatively long, about 4 meters, a molecular pump 8, a vortex dry pump 9 and an isolation valve 11 are added at the position of the conical outer cylinder to ensure that the vacuum at the end of the transmission line can meet the test requirements. Therefore, a total of 9 vortex rod pumps and 17 molecular pumps 8 are selected for the device.

[0055] It is known that the vacuum volume of a magnetically insulated induction voltage superposition device with a magnetically insulated transmission line length of 15 meters is ~12m 3 In this example, the vortex dry pump 9 is used to pump the vacuum in the chamber to 40 Pa and then start the molecular pump 8. The pre-pumping time is set to 50 minutes. The pumping speed S of the vortex dry pump 9 is P Satisfy the following formula:

[0056]

[0057] Where V is the vacuum volume in liters (L); t is the set pre-evacuation time in seconds; P is the target vacuum pressure in the system in Pa; P2 is the standard atmospheric pressure in Pa; K q is the correction factor, K q It is related to the pressure P when the equipment is exhausted. Refer to the vacuum design manual to obtain K q =2.

[0058] Substituting the existing data into the above formula, we can get

[0059]

[0060] That is, the total pumping speed of the pre-pump should be greater than 62.5L / s. In this embodiment, 9 vortex dry pumps 9 are selected, and the pumping speed of each dry pump should be greater than 7L / s. Considering the space requirements of the installation location, the actual pumping speed of the vortex dry pump 9 is 30m / s. 3 / h(8.3L / s).

[0061] The molecular pump 8 is responsible for pumping the vacuum of the device to the working pressure (<7×10 -3 Pa), the calculation formula for the effective pumping speed of the molecular pump 8 is:

[0062]

[0063] Where S is the effective pumping speed of molecular pump 8, P g is the working pressure of the device, Q is the total gas release volume of the vacuum chamber [Pa · L / s]. According to calculation, the total gas release in the cavity of this type of device is about ~60Pa · L / s, it can be calculated that the total effective pumping speed of the molecular pump 8 should exceed 8500L / s. In this example, 17 molecular pumps 8 are selected, and the effective pumping speed of a single molecular pump 8 should exceed 500L / s; in the present invention, the molecular pump 8 is directly connected to the vacuum chamber, so the nominal pumping speed should exceed 500L / s. At the same time, a 40% pumping speed margin is reserved, and the pumping speed of the molecular pump 8 is finally determined to be 720L / s.

[0064] According to the above design, the vacuum system of the device was deployed. In actual operation, the vacuum in the cavity dropped below 40 Pa after the 9 vortex dry pumps 9 were turned on for 40 minutes. The molecular pump 8 was started for 3 hours, and the target vacuum degree (7×10 - 3 Pa), and the vacuum degree at each vacuum chamber 4 position is consistent, meeting the design indicators and test operation requirements.

Claims

1. A magnetically insulated induction voltage superposition device with axial vacuum consistency, comprising a cantilever support section (1), a pulse superposition section and an isolation extension section (3) coaxially connected in sequence, wherein the pulse superposition section comprises a plurality of groups of induction cavities (2) connected in sequence, characterized in that: A vacuum chamber assembly is provided between each connection end of the cantilever support section (1), the plurality of sensing chambers (2) and the isolation extension section (3), and each vacuum chamber assembly is connected to a vacuum pump assembly; The vacuum chamber assembly comprises a cylindrical vacuum chamber (4) and a connecting tube (5) coaxially arranged in the vacuum chamber (4); a closed annular space is formed between the inner side of the vacuum chamber (4) and the outer side of the connecting tube (5); the inner diameter of the connecting tube (5) is adapted to the outer diameter of each connecting end of the cantilever support section (1), the plurality of sensing chambers (2) and the isolation extension section (3), and is used for plugging the vacuum chamber assembly onto each connecting end; a plurality of interface flanges (6) communicating with the annular space are arranged on the outer circumferential surface of the vacuum chamber (4); a plurality of through holes (7) communicating with the annular space are opened in a radial direction on the outer circumferential surface of the connecting tube (5); The vacuum pump assembly comprises a plurality of molecular pumps (8), at least one vortex dry pump (9), a pre-pumping valve (10) and an isolation valve (11); the plurality of molecular pumps (8) are respectively connected to the vacuum chamber (4) via an interface flange (6), and the central axes of the plurality of molecular pumps (8) are perpendicular to the longitudinal section of the vacuum chamber (4); A multi-way connector is provided on the suction port of the vortex dry pump (9), one of the interfaces of the multi-way connector is connected to one end of a pre-evacuation valve (10), the other end of the pre-evacuation valve (10) is connected to the vacuum chamber (4), and is used to control the vortex dry pump (9) to perform a low vacuum treatment; another interface of the multi-way connector is connected to one end of an isolation valve (11), the other end of the isolation valve (11) is connected to at least one molecular pump (8), and is used to control the vortex dry pump (9) to drive the molecular pump (8) to perform a high vacuum treatment.

2. The magnetic insulation induction voltage superposition device with axial vacuum consistency according to claim 1, characterized in that: The through holes (7) on the connecting tube (5) are all rounded; The inner surface of the connecting tube (5) is anodized.

3. The magnetic insulation induction voltage superposition device with axial vacuum consistency according to claim 1 or 2, characterized in that: The number of molecular pumps (8) in the vacuum pump assembly is 4, and the number of vortex dry pumps (9) is 2; Four interface flanges (6) are symmetrically provided on the outer circumferential surface of the vacuum chamber (4) along the longitudinal section of the vacuum chamber (4), and four molecular pumps (8) are respectively installed on the four interface flanges (6), and the central axes of the four molecular pumps (8) are perpendicular to the longitudinal section of the vacuum chamber (4); A three-way connector is provided on the suction port of each vortex dry pump (9), wherein one vortex dry pump (9) is connected to one end of an isolation valve (11) via one interface of the three-way connector, and the other end of the isolation valve (11) is connected to two molecular pumps (8) on one side of the vacuum chamber (4); the other interface of the three-way connector is connected to one end of a pre-pumping valve (10), and the other end of the pre-pumping valve (10) is connected to the vacuum chamber (4); Another vortex dry pump (9) is connected to one end of the isolation valve (11) via one of the interfaces of the three-way connector, the other end of the isolation valve (11) is connected to two molecular pumps (8) on the other side of the vacuum chamber (4), the other interface of the three-way connector is connected to one end of the pre-pumping valve (10), and the other end of the pre-pumping valve (10) is connected to the vacuum chamber (4).

4. The magnetic insulation induction voltage superposition device with axial vacuum consistency according to claim 3, characterized in that: The vacuum chamber (4) is connected to a low gauge (12) and a high gauge (13) for measuring the actual vacuum degree in the vacuum chamber (4); The low gauge (12) and the high gauge (13) are remotely connected to an external vacuum gauge via cables.

5. The magnetic insulation induction voltage superposition device with axial vacuum consistency according to claim 4, characterized in that: The vacuum chamber (4) is made of stainless steel; The connecting tube (5) is made of aluminum alloy.

6. The magnetic insulation induction voltage superposition device with axial vacuum consistency according to claim 5, characterized in that: The pre-pumping valve (10) and the isolation valve (11) are both pneumatic valve structures.

7. The magnetic insulation induction voltage superposition device with axial vacuum consistency according to claim 6, characterized in that: The vacuum chamber (4) between each connection end of the cantilever support section (1), the plurality of sensing chambers (2) and the isolation extension section (3) is fixedly connected to each connection end by means of screws.

8. The magnetic insulation induction voltage superposition device with axial vacuum consistency according to claim 7, characterized in that: The vortex dry pump (9) and the pre-pumping valve (10), the pre-pumping valve (10) and the vacuum chamber (4), the vortex dry pump (9) and the isolation valve (11), and the isolation valve (11) and the molecular pump (8) are all connected via bellows (14).

9. The magnetic insulation induction voltage superposition device with axial vacuum consistency according to claim 8, characterized in that: The molecular pump (8) is connected to an external water chiller via a connecting pipe, and is used to cool the molecular pump (8) with water.

10. The magnetic insulation induction voltage superposition device with axial vacuum consistency according to claim 9, characterized in that: The molecular pump (8) in the vacuum pump assembly is connected to an external molecular pump controller via a cable, so as to remotely control the molecular pump (8).

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