Piezoelectric actuator and one-dimensional, two-dimensional and three-dimensional piezoelectric deflecting mirrors

Abstract

The invention provides a piezoelectric actuator and one-dimensional, two-dimensional and three-dimensional piezoelectric deflection mirrors. The piezoelectric driver comprises a substrate layer, an electrode and at least two piezoelectric driving units. The piezoelectric driving units are arranged on the same side of the substrate layer, and the piezoelectric driving units and the substrate layer are of an integrated structure, so that the connection strength between the piezoelectric driving units and the substrate layer is enhanced, and complex installation steps between the piezoelectric driving units and the substrate layer are reduced. Each piezoelectric driving unit is provided with a mounting surface, and the mounting surface is arranged at the movable end of the piezoelectric driving unit; the mounting surface is used for providing a reliable connecting point for the lens of the piezoelectric deflecting mirror, the mounting surface can ensure that the lens is kept stable after being mounted, and the lens can generate accurate deflection or displacement along with the lens when the piezoelectric driving unit does telescopic motion, so that an expected optical adjustment effect is realized. The electrode is electrically connected with the piezoelectric driving unit, and the piezoelectric driving unit can be controlled to stretch out and draw back by applying a proper voltage signal to the electrode.

Description

Technical Field

[0001] The present application belongs to the technical field of piezoelectric actuators, and more specifically, relates to a piezoelectric actuator and a one-dimensional, two-dimensional, or three-dimensional piezoelectric deflection mirror. Background Art

[0002] In the field of optical systems, piezoelectric deflection mirrors are a key precision adjustment element widely used in laser scanning, optical communications, imaging technology and adaptive optical systems. Its core component, the piezoelectric actuator, achieves tiny mechanical displacement through the piezoelectric effect, thereby accurately controlling the angle change of the reflector and achieving high-precision adjustment of the beam direction.

[0003] Traditional piezoelectric actuator installation methods often involve complex positioning and fixing processes. Due to the small size of the piezoelectric actuator itself and the extremely high assembly precision requirements, any slight installation error may lead to a significant decline in the performance of the deflection mirror. Summary of the invention

[0004] The purpose of the embodiments of the present application is to provide a piezoelectric driver and a one-dimensional, two-dimensional, or three-dimensional piezoelectric deflection mirror to solve the technical problem in the prior art that the piezoelectric driver is difficult to install and assemble.

[0005] To achieve the above purpose, the technical solution adopted in this application is:

[0006] A piezoelectric actuator is provided, comprising:

[0007] Basal layer;

[0008] At least two piezoelectric drive units are arranged on the same side of the base layer, and the piezoelectric drive unit and the base layer are an integrated structure; the piezoelectric drive unit has a mounting surface, and the mounting surface is arranged at the active end of the piezoelectric drive unit;

[0009] The electrodes are electrically connected to the piezoelectric drive units to electrically drive the corresponding piezoelectric drive units to expand and contract.

[0010] As a further improvement of the above technical solution:

[0011] Optionally, the number of the piezoelectric drive units is two, the two piezoelectric drive units are arranged on the base layer at intervals from each other along a straight line direction, and the electrodes are connected to lateral end surfaces of the piezoelectric drive units that are opposite to each other.

[0012] Optionally, the number of the piezoelectric drive units is four, and the piezoelectric drive units are arranged in a rectangular array and spaced from each other; the four piezoelectric drive units are grouped in pairs, and the connection line between the two piezoelectric drive units in one group is parallel to the connection line between the two piezoelectric drive units in another group; the electrode is connected to the lateral end surface of the piezoelectric drive unit facing outward.

[0013] Optionally, the number of the piezoelectric drive units is three, the piezoelectric drive units are arranged at intervals from each other, and at most only two of the piezoelectric drive units are arranged along the same straight line direction; the electrode is connected to the lateral end surface of the piezoelectric drive unit facing outward.

[0014] The present application also provides a one-dimensional piezoelectric deflection mirror, comprising a mirror body and the above-mentioned piezoelectric driver, wherein the mirror body is mounted on the mounting surfaces of the two piezoelectric drive units, and the piezoelectric driver is used to drive the mirror body to rotate around a deflection axis.

[0015] The present application also provides a two-dimensional piezoelectric deflection mirror, comprising a mirror body and the above-mentioned piezoelectric driver, wherein the mirror body is mounted on the mounting surfaces of the four piezoelectric drive units, and the piezoelectric driver is used to drive the mirror body to rotate around two deflection axes perpendicular to each other.

[0016] The present application also provides a three-dimensional piezoelectric deflection mirror, including a mirror body and the above-mentioned piezoelectric driver, wherein the mirror body is mounted on the mounting surfaces of the three piezoelectric drive units, and the piezoelectric driver is used to drive the mirror body to rotate around two deflection axes perpendicular to each other, and to move along the telescopic direction of the piezoelectric drive unit.

[0017] The piezoelectric driver and the one-dimensional, two-dimensional, and three-dimensional piezoelectric deflecting mirrors provided in this application have the following beneficial effects:

[0018] The piezoelectric driver of the present application includes a substrate layer, an electrode and at least two piezoelectric drive units. The substrate layer serves as the base structure of the entire piezoelectric driver, and each piezoelectric drive unit is arranged on the same side of the substrate layer, and the piezoelectric drive unit and the substrate layer are an integrated structure, which not only enhances the connection strength between the two, but also reduces the complicated installation steps between the two. Each piezoelectric drive unit has a mounting surface, which is arranged at the movable end of the piezoelectric drive unit; the mounting surface is used to provide a reliable connection point for the lens of the piezoelectric deflection mirror, and the mounting surface can ensure that the lens remains stable after installation, and when the piezoelectric drive unit performs telescopic movement, the lens can produce precise deflection or displacement, thereby achieving the expected optical adjustment effect. The electrode is electrically connected to the piezoelectric drive unit, and the piezoelectric drive unit can be controlled to perform telescopic movement by applying an appropriate voltage signal to the electrode. The piezoelectric driver of the present application has the advantages of high structural strength and easy use and installation.

[0019] The one-dimensional, two-dimensional, and three-dimensional piezoelectric deflecting mirrors provided in the present application have the above-mentioned piezoelectric driver and therefore also have the advantages of the above-mentioned piezoelectric driver. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0021] Figure 1 A schematic diagram of the three-dimensional structure of the first piezoelectric actuator provided in this application;

[0022] Figure 2 A schematic diagram of the three-dimensional structure of the second piezoelectric actuator provided in this application;

[0023] Figure 3 A schematic diagram of the three-dimensional structure of a third piezoelectric actuator provided in this application;

[0024] Figure 4 A schematic diagram of the three-dimensional structure of the green body of the second piezoelectric actuator provided in the present application.

[0025] Among them, the reference numerals in the figure are:

[0026] 1. Base layer; 2. Piezoelectric drive unit;

[0027] 21. Mounting surface; 3. Electrode. DETAILED DESCRIPTION

[0028] Embodiments of the present invention are described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended to be used to explain the present invention, and should not be construed as limiting the present invention.

[0029] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the present invention.

[0030] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0031] In the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be an indirect connection through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0032] In the present invention, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being "above", "above" and "above" a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes that the first feature is directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0033] In addition, the technical solutions between the various embodiments can be combined with each other, but it must be based on the fact that ordinary technicians in the field can implement it. When the combination of technical solutions is contradictory or cannot be implemented, it should be deemed that such combination of technical solutions does not exist and is not within the scope of the present invention.

[0034] In the following description, suffixes such as "module", "component", "assembly" or "unit" are used only to facilitate the description of the present invention and have no specific meanings. Therefore, they can be used in combination.

[0035] The present invention will be further described in detail below through specific implementation modes in conjunction with the accompanying drawings.

[0036] like Figures 1 to 4 As shown, the present application provides a piezoelectric driver, comprising a substrate layer 1 , an electrode 3 and at least two piezoelectric driving units 2 .

[0037] The base layer 1 serves as the base structure of the entire piezoelectric driver. Each piezoelectric driving unit 2 is arranged on the same side of the base layer 1, and the piezoelectric driving unit 2 and the base layer 1 are an integrated structure, which not only enhances the connection strength between the two, but also reduces the complicated installation steps between the two.

[0038] Each piezoelectric drive unit 2 has a mounting surface 21, which is arranged at the movable end of the piezoelectric drive unit 2; the mounting surface 21 is used to provide a reliable connection point for other components (such as the lens of the piezoelectric deflection mirror), and the mounting surface 21 can ensure that the lens remains stable after installation, and when the piezoelectric drive unit 2 performs telescopic movement, the lens can produce precise deflection or displacement, thereby achieving the expected optical adjustment effect.

[0039] The electrode 3 is electrically connected to the piezoelectric drive unit 2 . By applying a proper voltage signal to the electrode 3 , the piezoelectric drive unit 2 can be controlled to perform telescopic movement.

[0040] The piezoelectric driver of the present application has the advantages of high structural strength and easy installation.

[0041] like Figure 1 As shown, in a specific embodiment of the present application, the number of the piezoelectric drive units 2 is two, and the two piezoelectric drive units 2 are arranged on the base layer 1 at intervals from each other in a straight line direction, and the electrodes 3 are connected to the lateral end surfaces of the piezoelectric drive units 2 opposite to each other to facilitate assembly and connection with external cables.

[0042] Based on the piezoelectric driver of the two piezoelectric drive units 2 in the above embodiment, the present application also provides a one-dimensional piezoelectric deflection mirror, including a mirror body (not shown) and the piezoelectric driver in the above embodiment, the mirror body is mounted on the mounting surface 21 of the two piezoelectric drive units (a, b), the two piezoelectric drive units 2 are respectively located on both sides of the deflection axis θx, and the rotation of the mirror body around the deflection axis θx can be achieved by respectively controlling the differential expansion and contraction of the two piezoelectric drive units 2. The one-dimensional piezoelectric deflection mirror has a line segment with a certain range of adjustment range for the optical path, and the length of the line segment depends on the maximum deflection angle of the piezoelectric deflection mirror and the distance between the piezoelectric deflection mirror and the next light receiving position.

[0043] like Figure 2 As shown, in a specific embodiment of the present application, the number of piezoelectric drive units 2 is four, and each piezoelectric drive unit 2 is arranged in a rectangular array and spaced from each other; the four piezoelectric drive units 2 are grouped in pairs, and the connection line between the two piezoelectric drive units 2 in one group is parallel to the connection line between the two piezoelectric drive units 2 in another group; the electrode 3 is connected to the lateral end surface of the piezoelectric drive unit 2 facing outward to facilitate assembly and connection with an external cable.

[0044] Based on the piezoelectric driver of the four piezoelectric drive units 2 in the above embodiment, the present application also provides a two-dimensional piezoelectric deflection mirror, including a mirror body (not shown) and the piezoelectric driver of the above embodiment, the mirror body is mounted on the mounting surface 21 of the four piezoelectric drive units 2, and the piezoelectric driver is used to drive the mirror body to rotate around two deflection axes perpendicular to each other.

[0045] like Figure 2 As shown, the piezoelectric drive units (a, b) are the first group, and the piezoelectric drive units (c, d) are the second group. The first group and the second group are respectively arranged on both sides of the deflection axis θx. By respectively controlling the differential expansion and contraction of the two groups of piezoelectric drive units 2, the rotation of the mirror body around the deflection axis θx can be realized.

[0046] The piezoelectric drive units (a, c) are the third group, and the piezoelectric drive units (b, d) are the fourth group. The third group and the fourth group are respectively arranged on both sides of the deflection axis θy. By respectively controlling the differential expansion and contraction of the two groups of piezoelectric drive units 2, the rotation of the mirror body around the deflection axis θy can be achieved.

[0047] The adjustment range of the optical path of the two-dimensional piezoelectric deflection mirror is a circular surface, and the area of ​​the circular surface depends on the maximum deflection angle of the piezoelectric deflection mirror and the distance between the piezoelectric deflection mirror and the next light receiving position.

[0048] like Figure 3 As shown, in a specific embodiment of the present application, the number of piezoelectric drive units 2 is three, and the piezoelectric drive units 2 are arranged at intervals from each other, and at most only two piezoelectric drive units 2 are arranged along the same straight line direction, that is, the three piezoelectric drive units 2 are respectively located at three angles of the triangle. The electrode 3 is connected to the lateral end surface of the piezoelectric drive unit 2 facing outward, so as to facilitate the assembly and connection with the external cable.

[0049] Based on the piezoelectric driver of the three piezoelectric drive units 2 in the above embodiment, the present application also provides a three-dimensional piezoelectric deflection mirror, including a mirror body and the piezoelectric driver in the above embodiment, the mirror body is installed on the mounting surface 21 of the three piezoelectric drive units 2, and the piezoelectric driver is used to drive the mirror body to rotate around two deflection axes perpendicular to each other, and move along the telescopic direction of the piezoelectric drive unit 2.

[0050] like Figure 3 As shown, the piezoelectric driving unit (b) is located on the axis of the deflection axis θx, and the piezoelectric driving units (a, c) are respectively located on both sides of the deflection axis θx. By respectively controlling the differential expansion and contraction of the piezoelectric driving units (a, c), the rotation of the mirror body around the deflection axis θx can be achieved.

[0051] Similarly, the piezoelectric drive unit (b) is located on one side of the deflection axis θy, and the piezoelectric drive unit (a, c) is located on the other side of the deflection axis θy. By respectively controlling the differential expansion and contraction of the piezoelectric drive units (a, b, c), the rotation of the mirror body around the deflection axis θy can be achieved.

[0052] In addition, by controlling the simultaneous extension and retraction of the piezoelectric drive units (a, b, c), the mirror body can be moved forward and backward along θz. The three-dimensional piezoelectric deflection mirror can form a cone for the optical path adjustment range. The area of ​​the cone cross-section circle and the cone height depend on the deflection angle of the piezoelectric deflection mirror, the linear motion range and the distance between the piezoelectric deflection mirror and the next light receiving position.

[0053] Taking the above-mentioned piezoelectric driver having four piezoelectric driving units 2 as an example, the manufacturing method of the piezoelectric driver is as follows:

[0054] The first step is slurry casting: select piezoelectric ceramic powder, slurry casting according to certain formula and process conditions to obtain 20-80μm raw ceramic tape.

[0055] The second step is printing and stacking: Use a printing machine to print the inner electrode patterns on the green porcelain tape after casting and punching using the inner electrode printing screen. Since the product has an interdigitated internal electrode structure, the positive and negative electrodes need to be led out from the opposite sides of the product respectively, so two inner electrode patterns need to be printed separately. The interval between the inner electrode cutting lines is 3mm. In the laminating machine, the two printed inner electrodes and the blank green porcelain tape are alternately stacked 40-200 layers according to the set lamination program. The bottom of the bar block is all blank green porcelain tape. The isostatic pressing process is used to press and form a bar block green body. The total thickness of the green body is about 1mm-5mm, and the thickness of the bottom pure ceramic green body is about 0.6mm-2.5mm;

[0056] The third step is cutting: cutting the block into individual green pieces along the cutting line, with the size of the green pieces being about 3mm*3mm;

[0057] The fourth step is debinding and sintering: the green body is debinded in a debinding furnace, and then placed in a sintering furnace. The inner electrode and the piezoelectric ceramic are matched and co-fired at high temperature to form a ceramic block. The thickness of the sintered product is about 0.8mm-4mm.

[0058] Step 5: Grinding: Grind the sintered ceramic block to a suitable size using a double-sided grinder, such as 2.5mm*2.5mm, to ensure the surface flatness of the product;

[0059] Step 6: Groove processing: Use a precision engraving machine to process the piezoelectric driver in different areas, and process a 0.5mm wide cross-shaped groove in the center of the entire product to form four piezoelectric drive units 2, and retain a 0.5mm-2mm pure ceramic base;

[0060] The seventh step is to coat the terminal electrodes: the outer end faces of the piezoelectric driving units 2 in each partition are coated with terminal electrodes by screen printing process, and then undergo a silver burning process to obtain stable terminal electrodes.

[0061] Step 8: Welding the leads: Alternately weld the positive and negative leads at both ends of each driving partition electrode surface of the piezoelectric actuator on which the end electrodes have been coated;

[0062] Step 9, polarization: Place the piezoelectric actuator after welding the leads in silicone oil for polarization.

[0063] The above description is only a preferred embodiment of the present application and is not intended to limit the present application. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present application should be included in the protection scope of the present application.

Claims

1. A piezoelectric actuator, characterized in that: include: basal layer (1); At least two piezoelectric drive units (2) are arranged on the same side of the base layer (1), and the piezoelectric drive unit (2) and the base layer (1) are an integrated structure; the piezoelectric drive unit (2) has a mounting surface (21), and the mounting surface (21) is arranged at the active end of the piezoelectric drive unit (2); The electrode (3) is electrically connected to the piezoelectric drive unit (2) to electrically drive the corresponding piezoelectric drive unit (2) to expand and contract.

2. The piezoelectric actuator according to claim 1, wherein: The number of the piezoelectric drive units (2) is two, and the two piezoelectric drive units (2) are arranged on the base layer (1) at intervals from each other in a straight line direction, and the electrodes (3) are connected to the lateral end surfaces of the piezoelectric drive units (2) that are opposite to each other.

3. The piezoelectric actuator according to claim 1, wherein: The number of the piezoelectric drive units (2) is four, and the piezoelectric drive units (2) are arranged in a rectangular array and are spaced apart from each other; the four piezoelectric drive units (2) are grouped in pairs, and the connection line between the two piezoelectric drive units (2) in one group is parallel to the connection line between the two piezoelectric drive units (2) in another group; and the electrode (3) is connected to the lateral end surface of the piezoelectric drive unit (2) facing outward.

4. The piezoelectric actuator according to claim 1, wherein: The number of the piezoelectric drive units (2) is three, the piezoelectric drive units (2) are arranged at intervals from each other, and at most only two of the piezoelectric drive units (2) are arranged along the same straight line direction; the electrode (3) is connected to the lateral end surface of the piezoelectric drive unit (2) facing outward.

5. A one-dimensional piezoelectric deflecting mirror, characterized in that: It comprises a mirror body and a piezoelectric driver as claimed in claim 2, wherein the mirror body is mounted on the mounting surfaces (21) of the two piezoelectric drive units (2), and the piezoelectric driver is used to drive the mirror body to rotate around a deflection axis.

6. A two-dimensional piezoelectric deflecting mirror, characterized in that: It comprises a mirror body and a piezoelectric driver as claimed in claim 3, wherein the mirror body is mounted on the mounting surface (21) of the four piezoelectric drive units (2), and the piezoelectric driver is used to drive the mirror body to rotate around two deflection axes perpendicular to each other.

7. A three-dimensional piezoelectric deflecting mirror, characterized in that: It comprises a mirror body and a piezoelectric driver as claimed in claim 4, wherein the mirror body is mounted on the mounting surfaces (21) of the three piezoelectric drive units (2), and the piezoelectric driver is used to drive the mirror body to rotate around two deflection axes perpendicular to each other and to move along the telescopic direction of the piezoelectric drive unit (2).

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