Overhead transport vehicle

Abstract

The invention relates to an elevated transport vehicle. An overhead transport vehicle that travels along a track and transports articles is provided with: a transfer unit that transfers articles between the transfer unit and a loading port provided in a device; a plurality of sensors that emit detection waves downward and detect the presence or absence of an obstacle when the article is transferred by the transfer unit, the plurality of sensors having mutually different detection ranges; and a control unit that controls the overhead transport vehicle. The transfer unit includes a gripping unit that grips an article, a rotating unit that rotates the gripping unit about a rotational axis along a vertical direction, and a lifting unit that lifts the gripping unit. The control unit controls the rotating unit in accordance with the direction in which the article is moved into and out of the loading port so as to move the article in a predetermined direction when the article is transferred by the transfer unit, and does not perform, among the plurality of sensors, detection processing by one or more sensors including the device in the detection range in accordance with the positional relationship with respect to the loading port.

Description

Technical Field

[0001] One aspect of the present invention relates to an overhead travelling truck. Background Art

[0002] As a technology related to overhead conveyors, for example, Patent Document 1 describes an overhead traveling conveyor device having a track provided on a ceiling and a trolley (overhead conveyor device) with an elevator that travels along the track. In the overhead traveling conveyor device described in Patent Document 1, the traveling trolley with an elevator is stopped above a loading port of a manufacturing device, a handle hanging portion is rolled down and the handle is lowered, and the article is held by the handle. An obstacle detection sensor (sensor) is provided on the side of the trolley with an elevator, and the sensor performs an optical search on the lifting path between the trolley with an elevator and the loading port to detect the presence of an obstacle.

[0003] Patent Document 1: Japanese Patent No. 3371897

[0004] The article has a cover in one direction of the side, and the loading port needs to be received in a manner in which the cover is in a specific direction relative to the loading port itself. That is, in the above-mentioned technology, in order to make the orientation of the articles transferred between the loading port and the loading port consistent with the specified orientation, there is a concern that the direction of the overhead transport vehicle entering and exiting the loading port will be restricted. Specifically, in order to meet the above-mentioned conditions, only tracks extending in the left and right directions of the loading port can be set. Moreover, in this case, the orientation of the overhead transport vehicle relative to the loading port is always constant, so the sensor that ensures the safety around the loading port only detects a fixed area in one direction. Based on the above situation, in the above-mentioned technology, the layout of the track has a low degree of freedom, and in order to enter and exit the loading port, the overhead transport vehicle may have to take a long detour on the track, so there is a possibility of reduced transportation efficiency. Summary of the invention

[0005] Therefore, an object of one aspect of the present invention is to provide an overhead transport vehicle that can increase the degree of freedom in track layout and improve transport efficiency.

[0006] The overhead transport vehicle according to one aspect of the present invention travels along a track and transports articles, and comprises: a transfer unit that transfers articles between a loading port of a device; a plurality of sensors that, when the articles are transferred by the transfer unit, emit a detection wave downward and detect the presence of an obstacle, and have different detection ranges; and a control unit that controls the overhead transport vehicle, wherein the transfer unit comprises: a holding unit that holds the articles, a rotating unit that rotates the holding unit with a rotation axis along a vertical direction as a base axis, and a lifting unit that lifts and lowers the holding unit, and when the articles are transferred by the transfer unit, the control unit controls the rotating unit according to the direction of entry and exit on the loading port in a manner that the articles are transferred in a specified direction, and does not perform detection processing on one or more sensors of the device whose detection range includes the device according to the positional relationship with respect to the loading port.

[0007] In an overhead transport vehicle, when transferring an article, the article can be rotated in a manner that the article is transferred to the loading port in a specified direction. At this time, the detection process of one or more sensors that include the device in the detection range is not performed, so the device will not be mistakenly detected as an obstacle by the sensor. Therefore, regardless of the direction in which the overhead transport vehicle enters and exits the loading port, the sensor can ensure the safety of the loading port and the article can be transferred between the overhead transport vehicle and the loading port so that the article and the loading port are aligned in a specified direction. For example, the overhead transport vehicle does not need to go around the track that is far away to enter and exit the loading port, which can increase the freedom of track layout and improve transportation efficiency.

[0008] In the overhead travelling vehicle of one aspect of the present invention, the lifting unit may lift the rotating unit and the gripping unit together, or the rotating unit may rotate only the gripping unit. In this case, the rotation for changing the orientation of the article during transfer can be realized with a small mechanism.

[0009] In the overhead transport vehicle of one aspect of the present invention, the rotating portion may also rotate the gripping portion in a manner that switches the rotational position of the gripping portion about the rotation axis between at least a first position, a second position that is +90° different from the first position, and a third position that is -90° different from the first position. In this case, a device (encoder, etc.) for adjusting the rotation angle brought about by the rotating portion is not required.

[0010] In an overhead transport vehicle of one aspect of the present invention, the sensor may also set at least three directions of the front, rear, and one side of the traveling direction of the overhead transport vehicle as the detection range in a top view. Thus, even if the overhead transport vehicle enters and exits the loading port from three directions, it is possible to detect the presence of obstacles by appropriately using any one of the sensors provided in the three directions according to the direction of entry and exit to the loading port. In addition, the number of sensors used can be suppressed, and the presence of obstacles can be detected.

[0011] In an overhead transport vehicle according to one aspect of the present invention, the transfer unit may also include an adjustment unit that causes the lifting unit, the holding unit, and the rotating unit to rotate together with the rotating unit around the rotating axis to adjust the rotational position of the holding unit, the rotating unit, and the lifting unit around the rotating axis. In this case, the article can be rotated in two stages: the adjustment unit and the rotating unit.

[0012] In the overhead transport vehicle of one aspect of the present invention, the control unit may also pre-store sensor information that associates the rotation position of the gripping unit around the rotation axis with one or more sensors used in the plurality of sensors, and when the transfer unit transfers the article, the control unit may determine one or more sensors to be invalid based on the sensor information and the rotation position of the gripping unit around the rotation axis. In this case, the pre-stored sensor information may be used to prevent one or more sensors of the device included in the detection range from performing detection processing.

[0013] In an overhead transport vehicle of one aspect of the present invention, the overhead transport vehicle travels along a track, and the track may also include a through track that passes through the device and passes through the loading port of the device along the front-rear direction of the loading port. In this way, since the track includes the through track, the transport efficiency can be improved compared with the case where the track includes a track that enters and exits in a manner of bypassing the loading port.

[0014] In an overhead transport vehicle of one aspect of the present invention, the control unit may also control the vehicle to not emit a detection wave when one or more sensors in the detection range of the device are not detected. The control unit may also be disabled by stopping the sensor. In this case, no extra power is used.

[0015] In the overhead travelling vehicle of one aspect of the present invention, the control unit may also control the rotating unit so that the article is held by the holding unit in a predetermined direction when the article is transferred from the loading port to the holding unit. In this case, the overhead travelling vehicle can always hold the article in a constant direction, and subsequent rotation adjustment becomes easy. In addition, since the center of gravity is always constant, the load applied to the travel is small.

[0016] According to one aspect of the present invention, it is possible to provide an overhead transport vehicle that can increase the degree of freedom of track layout and improve transport efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a schematic side view showing the overhead travelling vehicle according to the embodiment.

[0018] Figure 2 It is a top view showing an example of track layout.

[0019] Figure 3This is a diagram showing an example of transferring articles from a loading port to an overhead travelling vehicle.

[0020] Figure 4 This is a diagram showing another example of transferring articles from a loading port to an overhead travelling vehicle.

[0021] Figure 5 It is a diagram showing another example of transferring articles from a loading port to an overhead travelling vehicle.

[0022] Figure 6 (a) is a diagram showing a detection range of a second sensor according to a modified example. Figure 6 (b) is a diagram showing the detection range of the second sensor according to another modification example. DETAILED DESCRIPTION

[0023] Hereinafter, one embodiment will be described in detail with reference to the drawings. The same reference numerals are given to the same or corresponding components, and duplicate descriptions are omitted.

[0024] like Figure 1 , Figure 2 as well as Figure 3 As shown, the overhead transport vehicle 1 travels along a track 20 laid near the ceiling of a clean room for manufacturing semiconductor equipment. The overhead transport vehicle 1 transports an article 100. The article 100 is, for example, a FOUP (Front Opening Unified Pod) storing a plurality of semiconductor wafers. In the figure, the X direction corresponds to a horizontal direction, the Y direction corresponds to a horizontal direction perpendicular to the X direction, and the Z direction corresponds to a vertical direction.

[0025] The overhead travelling vehicle 1 transfers articles 100 between loading ports 210 of a plurality of processing devices (devices) 200. The processing device 200 is, for example, a device that performs various processes on semiconductor wafers. Figure 2 In the example shown, the components are arranged in the clean room so as to be aligned in the X direction at predetermined intervals.

[0026] The track 20 is suspended from the ceiling, for example. The track 20 is a predetermined one-way travel path for the overhead travelling vehicle 1 to travel. The track 20 passes through a plurality of loading ports 210. The track 20 includes a through track 25. The through track 25 passes through the processing device 200 and is a track that passes through the loading port 210 of the processing device 200 along the front-rear direction of the loading port 210.

[0027] The loading port 210 is a loading platform of the processing device 200. One or more articles 100 are loaded on the loading port 210. The loading port 210 is arranged on the passage side (outer edge side) of the processing device 200 in a top view. The loading port 210 is set with a direction, for example, the passage side of the loading port 210 is set as the front side (front side). The article 100 is transferred to the loading port 210 in a predetermined direction. For example, the article 100 is loaded on the loading port 210 in such a manner that the front side (the side opposite to the cover side) of the article 100 and the front side of the loading port 210 are aligned.

[0028] The loading port 210 includes a first loading port 201, a second loading port 202, and a third loading port 203. The first loading port 201 is a loading platform whose front-to-rear direction intersects (is orthogonal to) the passage direction of the track 20. The second and third loading ports 202 and 203 are loading platforms through which the track 25 passes along its front-to-rear direction. In the second loading port 202, the direction from the front side toward the rear side corresponds to the passage direction through the track 25. In the third loading port 203, the direction from the rear side toward the front side corresponds to the passage direction through the track 25. The second and third loading ports 202 and 203 are arranged to enter the processing device 200 in a top view. The second and third loading ports 202 and 203 are arranged in a space open to the passage side and the upward side in the processing device 200.

[0029] The overhead crane 1 includes a frame unit 2 , a travel unit 3 , a lateral unit 4 , a modulator unit (adjustment unit) 5 , a lifting drive unit (lifting unit) 6 , a rotation unit (rotation unit) 7 , a gripping unit (gripping unit) 8 , and a crane controller (control unit) 9 .

[0030] The frame unit 2 includes a center frame 15, a front frame 16, and a rear frame 17. The front frame 16 extends downward from the end of the front side (the front side in the traveling direction of the overhead travelling vehicle 1) of the center frame 15. The rear frame 17 extends downward from the end of the rear side (the rear side in the traveling direction of the overhead travelling vehicle 1) of the center frame 15.

[0031] The travel unit 3 is arranged on the upper side of the center frame 15. The travel unit 3 travels along the track 20 by receiving power supply from a high-frequency current line laid along the track 20 in a non-contact manner, for example. The lateral unit 4 is arranged on the lower side of the center frame 15. The lateral unit 4 moves the modulator unit 5, the lifting drive unit 6, the rotation unit 7, and the holding unit 8 in the lateral direction (to the side of the traveling direction of the overhead transport vehicle 1).

[0032] The modulator unit 5 is arranged at the lower side of the lateral unit 4. The modulator unit 5 rotates the lifting drive unit 6 together with the holding unit 8 and the rotating unit 7 with the central axis (rotation axis) along the Z direction as the base axis, and adjusts the rotation positions of the holding unit 8, the rotating unit 7 and the lifting drive unit 6 around the central axis. The lifting drive unit 6 is arranged at the lower side of the modulator unit 5. The lifting drive unit 6 lifts and lowers the rotating unit 7 together with the holding unit 8. The lifting drive unit 6 is lifted and lowered by winding or unwinding the belt B connected to the rotating unit 7.

[0033] The rotating unit 7 is suspended on the lifting drive unit 6 by a plurality of belts B. The rotating unit 7 rotates only the holding unit 8 with the central axis (rotation axis) along the Z direction as the base axis. The rotating unit 7 constitutes a rotating mechanism of a slip ring type. For example, the rotating unit 7 includes a slip ring arranged on the central axis, and a motor arranged away from the central axis and connected to the slip ring through a gear. The rotating unit 7 rotates the holding unit 8 in a manner that switches the rotation position of the holding unit 8 around the central axis between at least an initial position, i.e., a first position, a second position different from the first position by +90°, and a third position different from the first position by -90°.

[0034] The holding unit 8 is arranged on the lower side of the rotating unit 7. The holding unit 8 holds (holds) the article 100 in a predetermined direction. The holding unit 8 has a pair of clamps 12, 12. The pair of clamps 12, 12 are opened and closed by, for example, a driving motor and a connecting rod mechanism. The rotating unit 7 and the holding unit 8 are raised and lowered by winding or unwinding the belt B by the lifting drive unit 6. The lateral unit 4, the modulator unit 5, the lifting drive unit 6, the rotating unit 7 and the holding unit 8 constitute a transfer unit that transfers the article 100 between the loading port 210. Hereinafter, the lateral unit 4, the modulator unit 5, the lifting drive unit 6, the rotating unit 7 and the holding unit 8 are also referred to as the "transfer unit".

[0035] The transport vehicle controller 9 is disposed, for example, in the frame unit 2 . The transport vehicle controller 9 is an electronic control unit composed of a CPU (Central Processing Unit), a ROM (Read only memory), and a RAM (Random access memory). The transport vehicle controller 9 controls various parts of the overhead transport vehicle 1 .

[0036] Here, the overhead transport vehicle 1 of this embodiment is equipped with a plurality of sensors S. When the article 100 is transferred by the transfer unit (the lateral unit 4, the modulator unit 5, the lifting drive unit 6, the rotation unit 7, and the holding unit 8), the sensor S emits a directional detection wave downward to detect the presence or absence of an obstacle. The sensor S is a so-called overhead sensor. Although the sensor S is not particularly limited, for example, a laser rangefinder is used. The sensor S may also be a structure that irradiates other detection waves such as ultrasonic waves.

[0037] For example, the sensor S emits a laser toward the vicinity of the lowering destination of the gripping unit 8 and receives its reflected light. The sensor S detects whether there is an obstacle around the loading port 210 based on the received reflected light of the laser. For example, the sensor S detects whether there is an obstacle such as an operator in front of the loading port 210 (the passage side). The sensor S is connected to the transport vehicle controller 9. The plurality of sensors S include a first sensor S1, a second sensor S2, and a third sensor S3.

[0038] The first sensor S1 is arranged on one side of the traveling direction of the overhead transport vehicle 1 in the top view. The first sensor S1 is arranged at the lower part of the lifting drive unit 14. The first sensor S1 detects the presence or absence of obstacles within the detection range R1. The detection range R1 is a range that extends downward along the XZ plane in a two-dimensional shape starting from the first sensor S1. The detection range R1 is a range in which the detection result of the first sensor S1 is set as valid. The range of the detection range R1 only needs to be along the XZ plane, and can also be inclined relative to the XZ plane.

[0039] The second sensor S2 is arranged at the rear of the traveling direction of the overhead transport vehicle 1 in the top view. The second sensor S2 is arranged at the lower part of the rear frame 17. The detection range R2 is a range extending two-dimensionally downward along the YZ plane starting from the second sensor S2. The detection range R2 is a range in which the detection result of the second sensor S2 is set to be valid. The range of the detection range R2 only needs to be along the YZ plane, and can also be inclined relative to the YZ plane.

[0040] The third sensor S3 is arranged in front of the traveling direction of the overhead transport vehicle 1 in the top view. The third sensor S3 is arranged at the lower part of the front frame 16. The detection range R3 is a range that extends downward along the YZ plane in a two-dimensional shape starting from the third sensor S3. The detection range R3 is a range in which the detection result of the third sensor S3 is set to be valid. The range of the detection range R3 only needs to be along the YZ plane, and can also be inclined relative to the YZ plane.

[0041] The transport vehicle controller 9 stores mapping table data related to the positions and directions of multiple loading ports 210 in advance. For example, when the transport vehicle controller 9 receives a transport instruction to transport an article 100 from a higher-level controller, it obtains port information related to the positions and prescribed directions of the loading ports 210 of the transport source and the transport destination from the mapping table data. The transport vehicle controller 9 controls the travel unit 3 based on the port information to drive the overhead transport vehicle 1 to the position corresponding to the loading port 210. In addition, the transport vehicle controller 9 controls the transfer unit to transfer the article 100 between the loading ports 210.

[0042] The transport vehicle controller 9 controls the rotating unit 7 to transfer the article 100 in a predetermined direction when the article 100 is transferred by the transfer unit. Specifically, when the article 100 is transferred by the transfer unit, the transport vehicle controller 9 controls the rotating unit 7 based on the port information to rotate the holding unit 8 around the central axis in a manner that the predetermined direction specified by the loading port 210 is consistent with the direction of the article 100 held by the holding unit 8.

[0043] When the transport vehicle controller 9 transfers the article 100 by the transfer unit, one or more sensors S in the detection range of the multiple sensors S are set to invalid. Specifically, the transport vehicle controller 9 pre-stores the use sensor information that associates the rotation position of the holding unit 8 around the central axis with one or more sensors used in the multiple sensors S. Although the detection processing of all sensors S is not performed during driving, when the article 100 is transferred by the transfer unit, the transport vehicle controller 9 performs the detection processing of the used sensors S based on the use sensor information and the rotation position of the holding unit 8 around the central axis. Specifically, the case where the detection processing is performed is the case where a laser is emitted toward the vicinity of the descending destination of the holding unit 8 and its reflected light is received. When the transfer is performed based on the above situation, the one or more sensors S in the detection range that include the processing device 200 are not performed.

[0044] In the sensor information used here, the rotational position of the gripping unit 8 includes a first position, a second position, and a third position, and the sensor S used, that is, any one of the first to third sensors S1 to S3, is associated with each of the above rotational positions. For example, in the sensor information used, the first sensor S1 is associated with the first position where the rotational position of the gripping unit 8 is the initial position, the second sensor S2 is associated with the second position where the rotational position of the gripping unit 8 is +90° of the first position, and the third sensor S3 is associated with the third position where the rotational position of the gripping unit 8 is -90° of the first position.

[0045] The overhead travelling vehicle 1 configured as described above operates as follows as an example.

[0046] [Transfer between the first loading port 201 and the overhead travelling vehicle 1]

[0047] For example, Figure 3 As shown, in the case of transferring an article 100 from the first loading port 201 to the overhead transport vehicle 1, first, the overhead transport vehicle 1 without holding the article 100 obtains port information related to the position and orientation of the first loading port 201 from the mapping table data. The overhead transport vehicle 1 travels based on the port information, travels along the track 20 to a position corresponding to the first loading port 201 and stops. At the same time, the overhead transport vehicle 1 rotates the rotating unit 7 in a manner that the orientation of the transferred article 100 is consistent with the prescribed orientation based on the port information to adjust the direction of the holding unit 8. In addition, in the case of transferring to the first loading port 201, in the overhead transport vehicle 1, the transfer can be performed in a state where the rotation position of the holding unit 8 around the central axis is the initial position, that is, the first position, so the rotating unit 7 is not rotated. However, at this time, when the position of the descending holding unit 8 deviates from the first loading port 201, the overhead transport vehicle 1 adjusts the horizontal position and horizontal angle of the rotating unit 7 and the holding unit 8 by driving the lateral unit 4 and the modulator unit 5.

[0048] In the overhead transport vehicle 1 of the present embodiment, when the article 100 is transferred, the detection processing of one or more sensors S including the processing device 200 in the detection range is not performed among the multiple sensors S. Specifically, the overhead transport vehicle 1 refers to the sensor information, and based on the situation that the rotation position of the holding unit 8 around the central axis is the initial position, that is, the first position, it is decided to use the first sensor S1 and not perform the detection processing of the second and third sensors S2 and S3. Moreover, the overhead transport vehicle 1 only uses the first sensor S1 to detect the presence or absence of obstacles around the first loading port 201 (front side). Next, the overhead transport vehicle 1 lowers the rotating unit 7 and the holding unit 8 through the lifting drive unit 6, and holds the flange of the article 100 loaded on the first loading port 201 through the holding unit 8. Then, the overhead transport vehicle 1 can travel after the rotating unit 7 and the holding unit 8 are raised to the highest position by the lifting drive unit 6.

[0049] On the other hand, when transferring the article 100 from the overhead transport vehicle 1 to the first loading port 201, first, the overhead transport vehicle 1 holding the article 100 obtains the port information related to the position and orientation of the first loading port 201 from the mapping table data. The overhead transport vehicle 1 travels based on the port information, travels along the prescribed 20 to the position corresponding to the first loading port 201 and stops. At the same time, the overhead transport vehicle 1 adjusts the direction of the holding unit 8 by rotating the rotating unit 7 in a manner consistent with the prescribed orientation based on the port information. Here, in the overhead transport vehicle 1, the transfer can be performed in a state where the rotation position of the holding unit 8 around the central axis is the first position, so the rotating unit is not rotated. However, at this time, when the position of the descending holding unit 8 deviates from the first loading port 201, the overhead transport vehicle 1 adjusts the horizontal position and horizontal angle of the rotating unit 7 and the holding unit 8 by driving the lateral unit 4 and the modulator unit 5.

[0050] In the overhead transport vehicle 1 of the present embodiment, when the article 100 is transferred, the detection processing of one or more sensors S including the processing device 200 in the detection range is not performed among the multiple sensors S. Specifically, the overhead transport vehicle 1 refers to the sensor information used, and based on the situation that the rotation position of the holding unit 8 around the central axis is the first position, it is decided to use the first sensor S1 and not to perform the detection processing of the second and third sensors S2 and S3. Moreover, the overhead transport vehicle 1 only uses the first sensor S1 to detect the presence or absence of obstacles around the first loading port 201 (front side). Next, the overhead transport vehicle 1 lowers the rotating unit 7 and the holding unit 8 through the lifting drive unit 6, loads the article 100 to the first loading port 201, and releases the holding of the flange by the holding unit 8. Then, the overhead transport vehicle 1 can travel after the rotating unit 7 and the holding unit 8 are raised to the highest position through the lifting drive unit 6.

[0051] [Transfer between the second loading port 202 and the overhead travelling vehicle 1]

[0052] For example, Figure 4As shown, in the case of transferring an article 100 from the second loading port 202 to the overhead transport vehicle 1, first, the overhead transport vehicle 1 without holding the article 100 obtains port information related to the position and orientation of the second loading port 202 from the mapping table data. The overhead transport vehicle 1 travels based on the port information, travels along the track 20 to a position corresponding to the second loading port 202 and stops. At the same time, the overhead transport vehicle 1 rotates the rotating unit 7 in a manner consistent with the prescribed orientation of the transferred article 100 based on the port information to adjust the direction of the holding unit 8. Here, the overhead transport vehicle 1 controls the rotating unit 7 to set the rotation position of the holding unit 8 around the central axis to a second position that differs by +90° relative to the first position, and causes the holding unit 8 to hold the article 100 in a prescribed orientation. At this time, when the position of the descending holding unit 8 deviates from the second loading port 202, the overhead transport vehicle 1 adjusts the horizontal position and horizontal angle of the rotating unit 7 and the holding unit 8 by driving the lateral unit 4 and the modulator unit 5.

[0053] In the overhead transport vehicle 1 of the present embodiment, when the article 100 is transferred, among the multiple sensors S, the detection processing of one or more sensors S including the processing device 200 in the detection range is not performed. Specifically, the overhead transport vehicle 1 refers to the sensor information used, and based on the situation that the rotation position around the central axis of the holding unit 8 is the second position, it is decided to use the second sensor S2 and not perform the detection processing of the first and third sensors S1 and S3. Then, the overhead transport vehicle 1 only uses the second sensor S2 to detect the presence or absence of obstacles around (front side) of the second loading port 202, and stops the output of the detection wave from the first and third sensors S1 and S3. Next, the overhead transport vehicle 1 lowers the rotating unit 7 and the holding unit 8 through the lifting drive unit 6, and the flange of the article 100 loaded on the second loading port 202 is held by the holding unit 8. Then, the overhead transport vehicle 1 raises the rotating unit 7 and the holding unit 8 to the highest position through the lifting drive unit 6, and then rotates the rotating unit 7 to return the rotating position of the holding unit 8 to the initial position, that is, the first position. After the rotating position of the holding unit 8 returns to the initial position, the overhead transport vehicle 1 can travel.

[0054] On the other hand, when transferring the article 100 from the overhead transport vehicle 1 to the second loading port 202, first, the overhead transport vehicle 1 holding the article 100 obtains the port information related to the position and orientation of the second loading port 202 from the mapping table data. The overhead transport vehicle 1 travels based on the port information, travels along the track 20 to the position corresponding to the second loading port 202 and stops. At the same time, the overhead transport vehicle 1 rotates the rotating unit 7 in a manner that the orientation of the transferred article 100 is consistent with the prescribed orientation based on the port information. Here, the overhead transport vehicle 1 controls the rotating unit 7, sets the rotation position of the holding unit 8 around the central axis to the second position, and places the article 100 on the second loading port 202 in a prescribed orientation. At this time, when the position of the descending holding unit 8 deviates from the second loading port 202, the overhead transport vehicle 1 adjusts the horizontal position and horizontal angle of the rotating unit 7 and the holding unit 8 by driving the lateral unit 4 and the modulator unit 5.

[0055] In the overhead transport vehicle 1 of the present embodiment, when the article 100 is transferred, the detection processing of one or more sensors S including the processing device 200 in the detection range is not performed among the multiple sensors S. Specifically, the overhead transport vehicle 1 refers to the sensor information, and based on the situation that the rotation position of the holding unit 8 around the central axis is the second position, it is decided to use the second sensor S2 and not to perform the detection processing of the first and third sensors S1 and S3. Then, the overhead transport vehicle 1 uses only the second sensor S2 to detect the presence or absence of obstacles around (front side) of the second loading port 202. Next, the overhead transport vehicle 1 lowers the rotating unit 7 and the holding unit 8 through the lifting drive unit 6, loads the article 100 to the second loading port 202, and releases the grip of the flange by the holding unit 8. Then, after the overhead transport vehicle 1 raises the rotating unit 7 and the holding unit 8 to the highest position through the lifting drive unit 6, the rotating unit 7 is rotated in a manner that the rotation position of the holding unit 8 returns to the initial position, that is, the first position. After the rotation position of the gripping unit 8 returns to the initial position, the overhead travelling vehicle 1 can travel.

[0056] [Transfer between the third loading port 203 and the overhead travelling vehicle 1]

[0057] For example, Figure 5As shown, when transferring articles 100 from the third loading port 203 to the overhead transport vehicle 1, first, the overhead transport vehicle 1 without holding the articles 100 obtains port information related to the position and orientation of the third loading port 203 from the mapping table data. The overhead transport vehicle 1 travels based on the port information, travels along the track 20 to the position corresponding to the third loading port 203 and stops. At the same time, the overhead transport vehicle 1 rotates the rotating unit 7 in a manner consistent with the prescribed orientation of the transferred articles 100 based on the port information to adjust the direction of the holding unit 8. Here, the overhead transport vehicle 1 controls the rotating unit 7, sets the rotation position of the holding unit 8 around the central axis to the third position which differs from the first position by -90°, and holds the articles 100 relative to the holding unit 8 in a prescribed orientation. At this time, the overhead transport vehicle 1 adjusts the horizontal position and horizontal angle of the rotating unit 7 and the holding unit 8 by driving the lateral unit 4 and the modulator unit 5 when the position of the descending holding unit 8 deviates from the third loading port 203.

[0058] In the overhead transport vehicle 1 of the present embodiment, when the article 100 is transferred, the detection processing of one or more sensors S including the processing device 200 in the detection range is not performed among the multiple sensors S. Specifically, the overhead transport vehicle 1 refers to the sensor information, and based on the situation that the rotation position of the holding unit 8 around the central axis is the third position, it is decided to use the third sensor S3 and not to perform the detection processing of the first and second sensors S1 and S2. Then, the overhead transport vehicle 1 only uses the third sensor S3 to detect the presence or absence of obstacles around (front side) of the third loading port 203. Next, the overhead transport vehicle 1 lowers the rotating unit 7 and the holding unit 8 through the lifting drive unit 6, and the holding unit 8 holds the flange of the article 100 loaded on the third loading port 203. Then, after the overhead transport vehicle 1 raises the rotating unit 7 and the holding unit 8 to the highest position through the lifting drive unit 6, the rotating unit 7 is rotated in a manner that the rotation position of the holding unit 8 returns to the initial position, that is, the first position. After the rotation position of the gripping unit 8 returns to the initial position, the overhead travelling vehicle 1 can travel.

[0059] On the other hand, when the article 100 is transferred from the overhead transport vehicle 1 to the third loading port 203, first, the overhead transport vehicle 1 holding the article 100 obtains port information related to the position and orientation of the third loading port 203 from the mapping table data. The overhead transport vehicle 1 travels based on the port information, travels along the track 20 to the position corresponding to the third loading port 203 and stops. At the same time, the overhead transport vehicle 1 adjusts the direction of the holding unit 8 by rotating the rotating unit 7 in a manner that the orientation of the transferred article 100 is consistent with the prescribed orientation based on the port information. Here, the overhead transport vehicle 1 controls the rotating unit 7 to set the rotation position of the holding unit 8 around the central axis to the third position, and places the article 100 on the third loading port 203 in a prescribed orientation. At this time, when the position of the descending holding unit 8 deviates from the third loading port 203, the overhead transport vehicle 1 adjusts the horizontal position and horizontal angle of the rotating unit 7 and the holding unit 8 by driving the lateral unit 4 and the modulator unit 5.

[0060] In particular, in the overhead transport vehicle 1 of the present embodiment, when the article 100 is transferred, the detection processing of one or more sensors S including the processing device 200 in the detection range is not performed among the multiple sensors S. Specifically, the overhead transport vehicle 1 refers to the sensor information, and based on the situation that the rotation position of the holding unit 8 around the central axis is the third position, it is decided to use the third sensor S3 and not to perform the detection processing of the first and second sensors S1 and S2. Moreover, the overhead transport vehicle 1 only uses the third sensor S3 to detect the presence or absence of obstacles around (front side) the third loading port 203. Next, the overhead transport vehicle 1 lowers the rotating unit 7 and the holding unit 8 through the lifting drive unit 6, loads the article 100 to the third loading port 203, and releases the grip of the flange by the holding unit 8. Then, after the overhead transport vehicle 1 raises the rotating unit 7 and the holding unit 8 to the highest position through the lifting drive unit 6, the rotating unit 7 is rotated in a manner that the rotation position of the holding unit 8 returns to the initial position, that is, the first position. After the rotation position of the gripping unit 8 returns to the initial position, the overhead travelling vehicle 1 can travel.

[0061] As described above, in the overhead transport vehicle 1, when transferring the article 100, the article 100 can be rotated in a manner that the article 100 is transferred in a prescribed direction. At this time, since the detection process of one or more sensors S including the processing device 200 in the detection range is not performed, there is no case where the processing device 200 is mistakenly detected as an obstacle by the sensor S. Therefore, regardless of the direction in which the overhead transport vehicle 1 enters and exits the loading port 210, the safety of the surrounding area of ​​the loading port 210 can be ensured by the sensor S, the direction of the article 100 can be made consistent with the prescribed direction, and the article 100 can be transferred between the overhead transport vehicle 1 and the loading port 210.

[0062] Therefore, for example, when the presence or absence of an obstacle is detected by the sensor S whose detection range is one direction, there is a concern that the processing device 200 is included in the detection range of the sensor S due to the direction in which the overhead transport vehicle 1 enters and exits the loading port 210, and an obstacle may be erroneously detected. However, in the overhead transport vehicle 1, such erroneous detection can be avoided, and the restrictions on the layout of the track 20 are also eliminated. In addition, in order to make the orientation of the article 100 consistent with the prescribed orientation when transferring the article 100, the direction in which the overhead transport vehicle 1 enters and exits the loading port 210 is sometimes determined, but in the overhead transport vehicle 1, there is no such restriction on the layout of the track 20. Therefore, according to the overhead transport vehicle 1, for example, it is not necessary for the overhead transport vehicle 1 to detour the track 20 such as the one in and out of the loading port 210, and the degree of freedom of the layout of the track 20 can be increased, and the transportation efficiency can be improved.

[0063] In the overhead travelling vehicle 1, the lifting drive unit 6 lifts and lowers the rotating unit 7 together with the gripping unit 8, and the rotating unit 7 rotates only the gripping unit 8. In this case, the rotation that changes the orientation of the article 100 during transfer can be realized with a small mechanism.

[0064] In the overhead travelling truck 1, the rotating unit 7 rotates the holding unit 8 in such a manner that the rotation position of the holding unit 8 around the central axis is switched between a first position, a second position different from the first position by +90°, and a third position different from the first position by -90°. In this case, a device (encoder, etc.) for adjusting the rotation angle of the rotating unit 7 is not required.

[0065] In the overhead transport vehicle 1, the sensor S includes the first to third sensors S1 to S3 that set the three directions of the front, rear, and one side of the traveling direction of the overhead transport vehicle 1 as the detection range in the top view. Thus, even if the overhead transport vehicle 1 enters and exits the loading port 210 from three directions, any one of the first to third sensors S1 to S3 that sets the detection range in the three directions can be appropriately used according to the entry and exit direction on the loading port 210 to detect the presence or absence of an obstacle. In addition, the number of sensors S used can be suppressed, and the presence or absence of an obstacle can be detected.

[0066] In the overhead travelling vehicle 1, the transfer unit includes a modulator unit 5 for adjusting the rotational positions of the gripping unit 8, the rotating unit 7, and the lifting and lowering drive unit 6 around the rotation axis. In this case, the modulator unit 5 and the rotating unit 7 can rotate the article 100 in two stages.

[0067] In the overhead transport vehicle 1, the transport vehicle controller 9 determines one or more sensors S not to perform detection processing based on the use sensor information and the rotation position around the central axis of the gripping unit 8 when the article 100 is transferred by the transfer unit. In this case, the use sensor information stored in advance can be used to make one or more sensors S not to perform detection processing when the detection range includes the processing device 200.

[0068] In the overhead travelling vehicle 1, the track 20 includes a through track 25, and the through track 25 passes through the processing device 200 and passes through the first and second loading ports 201 and 202 of the processing device 200 along the front-rear direction of the first and second loading ports 201 and 202. As the track 20 includes the through track 25, the transport efficiency can be improved compared to the case of a rotary track that enters and exits in a manner of winding around the first and second loading ports 201 and 202.

[0069] In the overhead transport vehicle 1, the transport vehicle controller 9 controls the vehicle 1 in a manner that does not emit a detection wave when the detection processing of one or more sensors S in the detection range including the processing device 200 is not performed among the multiple sensors S1 to S3. In this case, unnecessary detection waves are not emitted, which can achieve labor saving. In addition, the state of not performing the detection processing of the sensor S is not particularly limited to the case of not emitting a detection wave, and for example, it can also be to stop the sensor S (set the power supply to off), process in a manner that does not use the detection result of the sensor S, and physically cut off the detection wave of the sensor S, etc.

[0070] In the overhead transport vehicle 1, when the article 100 is transferred from the loading port 210 to the gripping unit 8, the transport vehicle controller 9 controls the rotation unit 7 so as to grip the article 100 in a predetermined direction relative to the gripping unit 8. In this case, the overhead transport vehicle 1 can always grip the article 100 in a constant direction, and subsequent rotation adjustment becomes easy.

[0071] Although the embodiment has been described above, one embodiment of the present invention is not limited to the above embodiment, and various changes can be made without departing from the spirit of the invention.

[0072] In the above embodiment, although the object 100 is set as the object, the object is not particularly limited, and various objects can be used as long as they are objects transported by the overhead transport vehicle 1. In the above embodiment, although the transport vehicle controller 9 is provided as the control unit, one or more controllers different from the transport vehicle controller 9 can be provided as the control unit instead. In the above embodiment, the number and position of the sensor S are not limited. It is sufficient that a plurality of sensors S are provided in the overhead transport vehicle 1, and the sensor S can be provided at various positions.

[0073] In the above embodiment, the first position where the gripping part is least required to rotate in the layout of the track is set as the initial position, but the present invention is not limited thereto. The second position and the third position may also be the initial position, or other positions may be used.

[0074] In the above embodiment, the detection ranges R1 to R3 of the first to third sensors S1 to S3 are not particularly limited. The first to third sensors S1 to S3 may also be sensors that can appropriately change (switch) the detection ranges R1 to R3. For example, Figure 6 As shown in (a), when the second sensor S2 places the articles 100A and 100B side by side in the Y direction on the second loading port 202, the detection range R2A corresponding to the article 100A may be switched to the detection range R2. The detection range R2A is a range that includes the article 100A and does not include the article 100B (i.e., only covers the article 100A) when viewed from the front side of the second loading port 202. Figure 6 As shown in (b), when the second sensor S2 places the articles 100A and 100B side by side in the Y direction on the second loading port 202, the detection range R2B corresponding to the article 100B may be switched to the detection range R2. The detection range R2B is a range that includes the article 100B and does not include the article 100A (i.e., covers only the article 100B) as viewed from the front side of the second loading port 202. In addition, the second sensor S2 may of course also be a detection range corresponding to both the articles 100A and 100B (a range that includes the articles 100A and 100B, a range that covers the articles 100A and 100B).

[0075] In the above embodiment, the holding unit 8 is rotated by the rotating unit 7 to switch the rotation position of the holding unit 8 between the first to third positions, but the rotation of the holding unit 8 by the rotating unit 7 is not particularly limited. For example, in the above embodiment, the rotating unit 7 may rotate the holding unit 8 in such a manner that the rotation position of the holding unit 8 around the central axis becomes an arbitrary position. Moreover, for example, in the above embodiment, the holding unit 8 may be rotated by the rotating unit 7 in such a manner that the rotation position of the holding unit 8 is switched between at least two of the first to fifth positions. The fourth position is a rotation position that differs by +180° from the first position, and the fifth position is a rotation position that differs by -180° from the first position. In the case where the rotation position of the holding unit 8 includes at least one of the fourth and fifth rotation positions, another sensor S may be further provided on the other side of the travel direction of the lifting drive unit 14 of the overhead travelling vehicle 1 (on the side opposite to the first sensor S1).

[0076] In the above embodiment, the port information is obtained from the mapping table data, but it can also be obtained by receiving it from a host controller (not shown). Figure 2 The examples shown, various layouts can be adopted.

[0077] Each structure in the above-mentioned embodiment is not limited to the above-mentioned materials and shapes, and various materials and shapes can be applied. Each structure in the above-mentioned embodiment or modification example can be arbitrarily applied to each structure of other embodiments or modification examples. A part of each structure in the above-mentioned embodiment or modification example can be appropriately omitted within the scope of the purpose of one embodiment of the present invention.

[0078] (The following includes records on dealing with multiple citations.)

[0079] Furthermore, a structural member according to an embodiment of the present invention will be described below.

[0080] <Invention 1>

[0081] An overhead conveyor vehicle travels along a track and conveys articles, and has:

[0082] A transfer unit, which transfers the above-mentioned articles between the loading port of the device;

[0083] a plurality of sensors which emit detection waves downward to detect the presence or absence of obstacles when the article is transferred by the transfer unit, and have different detection ranges; and

[0084] A control unit, which controls the overhead transport vehicle,

[0085] The transfer unit includes: a gripping unit for gripping the article, a rotating unit for rotating the gripping unit with a rotation axis along a vertical direction as a base axis, and a lifting unit for lifting the gripping unit.

[0086] When the above-mentioned article is transferred by the above-mentioned transfer unit, the above-mentioned control unit controls the above-mentioned rotating unit in a manner of transferring the above-mentioned article in a prescribed direction according to the direction of entry and exit on the above-mentioned loading port, and among the above-mentioned multiple sensors, detection processing is not performed on one or more sensors of the above-mentioned device included in the above-mentioned detection range according to the positional relationship with respect to the above-mentioned loading port.

[0087] <Invention 2>

[0088] According to the overhead transport vehicle of Invention 1,

[0089] The lifting unit lifts and lowers the rotating unit together with the holding unit, and the rotating unit rotates only the holding unit.

[0090] <Invention 3>

[0091] The overhead transport vehicle according to Invention 1 or 2, wherein:

[0092] The rotating portion rotates the holding portion by switching the rotational position of the holding portion around the rotation axis between at least a first position, a second position different from the first position by +90°, and a third position different from the first position by -90°.

[0093] <Invention 4>

[0094] The overhead travelling truck according to any one of Inventions 1 to 3, wherein:

[0095] The sensor sets at least three directions, namely, the front, the rear, and one side, of the traveling direction of the overhead travelling vehicle as the detection range in a plan view.

[0096] <Invention 5>

[0097] The overhead travelling truck according to any one of Inventions 1 to 4, wherein:

[0098] The transfer unit includes an adjustment unit that rotates the lifting unit together with the holding unit and the rotating unit about the rotation axis to adjust rotational positions of the holding unit, the rotating unit, and the lifting unit around the rotation axis.

[0099] <Invention 6>

[0100] The overhead travelling truck according to any one of Inventions 1 to 5, wherein:

[0101] The control unit pre-stores usage sensor information that associates the rotation position of the holding unit around the rotation axis with one or more sensors used in the multiple sensors. When the article is transferred by the transfer unit, one or more sensors are determined to be invalid based on the usage sensor information and the rotation position of the holding unit around the rotation axis.

[0102] <Invention 7>

[0103] The overhead travelling truck according to any one of Inventions 1 to 6, wherein the rail includes a passing rail that passes over the device and passes over the loading port of the device along a front-rear direction of the loading port.

[0104] <Invention 8>

[0105] The overhead travelling vehicle according to any one of Inventions 1 to 7, wherein the control unit performs control so as not to emit the emission wave when the detection processing of one or more sensors including the device in the detection range among the plurality of sensors is not performed.

[0106] <Invention 9>

[0107] The overhead travelling truck according to any one of Inventions 1 to 8, wherein:

[0108] The control unit controls the rotating unit so that the article is gripped by the gripping unit in a predetermined direction when the article is transferred from the loading port to the gripping unit.

[0109] Description of Reference Numerals

[0110] 1…overhead transport vehicle, 4…lateral unit (transfer part), 5…modulator unit (transfer part, adjustment part), 6…lifting drive unit (transfer part, lifting part), 7…rotation unit (transfer part, rotation part), 8…holding unit (transfer part, holding part), 9…transport vehicle controller (control part), 20…track, 100…article, 200…processing device (device), 201…first loading port (loading port), 202…second loading port (loading port), 203…third loading port (loading port), 210…loading port, S…sensor, S1…first sensor (sensor), S2…second sensor, S3…third sensor.

Claims

1. An overhead transport vehicle, which travels along a track and transports articles, comprising: A transfer unit, which transfers the above-mentioned articles between the loading port of the device; a plurality of sensors which emit detection waves downward to detect the presence or absence of obstacles when the article is transferred by the transfer unit, and have different detection ranges; and A control unit, which controls the overhead transport vehicle. The transfer unit includes: a gripping unit for gripping the article, a rotating unit for rotating the gripping unit with a rotation axis along a vertical direction as a base axis, and a lifting unit for lifting the gripping unit. When the above-mentioned article is transferred by the above-mentioned transfer unit, the above-mentioned control unit controls the above-mentioned rotating unit in a manner of transferring the above-mentioned article in a specified direction according to the direction of entry and exit on the above-mentioned loading port, and does not perform detection processing on one or more sensors of the above-mentioned device included in the above-mentioned detection range according to the positional relationship with respect to the above-mentioned loading port among the multiple sensors.

2. The overhead transport vehicle according to claim 1, wherein: The lifting part causes the rotating part to be lifted and lowered together with the holding part. The rotating part rotates only the holding part.

3. The overhead transport vehicle according to claim 1 or 2, wherein: The rotating portion rotates the holding portion around the rotation axis so as to switch the rotation position of the holding portion between at least a first position, a second position different from the first position by +90°, and a third position different from the first position by -90°.

4. The overhead transport vehicle according to claim 1 or 2, wherein: The sensor sets at least three directions, namely, the front, the rear, and one side, of the traveling direction of the overhead travelling vehicle as the detection range in a plan view.

5. The overhead transport vehicle according to claim 1 or 2, wherein: The transfer unit includes: The adjusting unit rotates the lifting unit together with the holding unit and the rotating unit about the rotating axis to adjust the rotational positions of the holding unit, the rotating unit, and the lifting unit around the rotating axis.

6. The overhead transport vehicle according to claim 1 or 2, wherein: The control unit stores in advance the use sensor information that associates the rotation position of the grip unit around the rotation axis with one or more sensors used among the plurality of sensors. When the article is transferred by the transfer unit, one or more sensors to be disabled are determined based on the usage sensor information and the rotational position of the gripping unit around the rotation axis.

7. The overhead transport vehicle according to claim 1 or 2, wherein: The track includes a passing track that passes through the device and passes through the loading port of the device along the front-rear direction of the loading port.

8. The overhead transport vehicle according to claim 1 or 2, wherein: The control unit performs control so as not to emit the outgoing wave when the detection process of one or more sensors including the device in the detection range among the plurality of sensors is not performed.

9. The overhead transport vehicle according to claim 1 or 2, wherein: The control unit controls the rotating unit so that the article is gripped by the gripping unit in a predetermined direction when the article is transferred from the loading port to the gripping unit.

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