High-temperature-resistant high-power laser cleaning galvanometer

Abstract

The invention relates to the technical field of laser cleaning galvanometers, and provides a high-temperature-resistant high-power laser cleaning galvanometer which is characterized in that a drive board module is independently provided with a drive packaging assembly for cooling, so that introduction of a heat source around a galvanometer lens module is reduced, and the size of the galvanometer lens module subjected to heat insulation treatment is reduced; cooling water circulation water channels are formed in the galvanometer packaging assembly and the driving packaging assembly, air cooling areas are formed in the galvanometer packaging assembly and the driving packaging assembly, and the galvanometer can normally work in a high-temperature environment through water cooling and air cooling double-layer protection. Comprising a galvanometer lens module, a drive board module, a galvanometer packaging assembly and a drive packaging assembly, the galvanometer packaging assembly and the drive packaging assembly comprise a galvanometer surrounding piece and a drive board surrounding piece respectively, and the galvanometer surrounding piece and the drive board surrounding piece are fixedly connected with the galvanometer lens module and the drive board module respectively. The galvanometer surrounding piece and the drive plate surrounding piece are fixedly connected with a galvanometer wrapping piece and a drive plate wrapping piece respectively.

Description

Technical Field

[0001] The invention relates to the technical field of laser cleaning galvanometers, and in particular to a high-temperature resistant and high-power laser cleaning galvanometer. Background Art

[0002] The working mode of laser cleaning is to use the laser beam to scan the working surface through the galvanometer system and the field lens to achieve the cleaning of the entire working surface. The main function of the laser cleaning galvanometer is to scan the working surface through the galvanometer system and the field lens, and use the high energy and narrow pulse width of the laser to instantly vaporize the adhered substances or rust on the surface of the workpiece being cleaned. As the name suggests, the high-temperature resistant and high-power laser cleaning galvanometer is a high-power laser cleaning galvanometer that can be used in a high-temperature environment.

[0003] With the popularization of domestic high-power pulsed lasers, the proportion of high-power laser cleaning has increased. At present, most of the galvanometers used in high-power laser cleaning can only work stably at an ambient temperature of 25℃±10℃. The galvanometer will be unstable in a high-temperature environment, mainly due to the high-temperature failure of the drive board and the motor. There are optical lenses in the high-power laser cleaning galvanometer, and there are special requirements for the water temperature used for cooling, which is generally required to be 24℃~28℃. This makes it more difficult to cool the high-power laser cleaning galvanometer in a high-temperature environment. The heat sources in the high-power laser cleaning galvanometer are mainly: 1. The heat generated by the stray light of the high-power laser shining on the machined parts; 2. The heat generated when the motor and the drive board are working; 3. When the ambient temperature is higher than the galvanometer temperature, the heat generated by thermal alternation. The existing high-power laser cleaning galvanometer structure is roughly divided into a collimation module, a galvanometer lens module, a field lens module and a wind knife module.

[0004] The above-mentioned prior art has the following disadvantages: 1. The high-power laser cleaning galvanometer has no heat insulation material, which is easy to produce heat alternation with the ambient temperature and cannot work normally in a high temperature environment; 2. The built-in driver board increases the heat source, and the excessive temperature of the driver board will also affect the stability of the galvanometer. When the driver board is built-in, the thermal balance problem of the driver board is difficult to solve; 3. Water pipes, wires and optical fibers are easily aged in a high temperature environment. Summary of the invention

[0005] In view of the deficiencies in the prior art, the present invention provides a high-power laser cleaning galvanometer that is resistant to high temperatures. A drive board module is separately provided with a drive package assembly for cooling, thereby reducing the introduction of heat sources around the galvanometer lens module and reducing the volume of the galvanometer lens module that undergoes heat insulation treatment. Cooling water circulation channels are formed inside the galvanometer package assembly and inside the drive package assembly, and air-cooling areas are formed inside the galvanometer package assembly and inside the drive package assembly. By providing double-layer protection of water cooling and air cooling, the galvanometer is ensured to work normally in a high-temperature environment. The galvanometer package assembly is a heat-insulating material with low thermal conductivity, so that the galvanometer lens module and the drive board module are respectively wrapped to isolate them from heat sources. The wire harness, water pipe and optical fiber parts are wrapped with flexible heat-insulating materials, so that the wire harness, water pipe and optical fiber parts are wrapped to isolate them from heat sources.

[0006] To achieve the above-mentioned objectives, the present invention provides the following technical solutions: a high-temperature resistant high-power laser cleaning galvanometer, comprising a galvanometer lens module and a drive board module, and also comprising a galvanometer packaging assembly and a drive packaging assembly, the galvanometer packaging assembly and the drive packaging assembly respectively comprising a galvanometer surround and a drive board surround, the galvanometer surround and the drive board surround are respectively fixedly connected to the galvanometer lens module and the drive board module, the galvanometer surround and the drive board surround are respectively fixedly connected with a galvanometer covering and a drive board covering, a transverse covering reflux cavity and a longitudinal through-port are both provided in the galvanometer surround and the drive board surrounding part, a longitudinal covering reflux cavity and a transverse through-port are both provided in the galvanometer covering and the drive board covering part, the two transverse covering reflux cavities are respectively matched with the two transverse through-ports, the two longitudinal covering reflux cavities are respectively matched with the two longitudinal through-ports, and the galvanometer surround and the drive board surrounding part are both installed with a pipeline connection system.

[0007] Preferably, the two pipe connection systems each include a water inlet joint, a water return joint, an air inlet joint and an air return joint, the two water inlet joints are respectively fixedly connected to the galvanometer surround and the drive plate surround, the two water return joints are respectively fixedly connected to the galvanometer surround and the drive plate surround, the two longitudinal through ports are respectively connected to the two water inlet joints, the two transversely coated reflux chambers are also respectively connected to the two water inlet joints, the two longitudinal through ports are respectively connected to the two water return joints, the two transversely coated reflux chambers are respectively connected to the two water return joints, the two longitudinal through ports are respectively connected to the two water return joints, the two transversely coated reflux chambers are respectively connected to the two water return joints, and the two longitudinal through ports are respectively connected to the two water return joints. A longitudinal oblique partition plate is arranged in the opening, and a transverse oblique partition plate is arranged in the two transverse enclosing reflux chambers. The two water inlet joints are respectively located on one side of the two longitudinal oblique partition plates, and the two water return joints are respectively located on the other side of the two longitudinal oblique partition plates. The two water inlet joints are respectively located on one side of the two transverse oblique partition plates, and the two water return joints are respectively located on the other side of the two transverse oblique partition plates. The two air inlet joints are respectively connected with the interior of the galvanometer surround and the interior of the drive plate surround, and the two air return joints are respectively connected with the interior of the galvanometer surround and the interior of the drive plate surround.

[0008] Preferably, the two air inlet joints are both connected to a guiding double-bend pipe, and the two guiding double-bend pipes are respectively fixedly connected in the galvanometer surround and the driving plate surround, and the two guiding double-bend pipes are both provided with a through-air distribution port.

[0009] Preferably, the two through-air distribution ports are both fixedly connected with double-slope guide blocks, and the two double-slope guide blocks are both provided with a first step slope surface and a second step slope surface.

[0010] Preferably, the water inlet joint and the air inlet joint are respectively equipped with an air inlet branch pipe and a water inlet branch pipe, and the air inlet branch pipe and the water inlet branch pipe are respectively connected with an inner spiral pipe and an outer spiral pipe, and the inner spiral pipe is sleeved in the outer spiral pipe.

[0011] Preferably, a plurality of inner support rings are fixedly connected between the inner spiral tube and the outer spiral tube, a plurality of liquid holes are opened on the plurality of inner support rings, a plurality of vertical support plates are fixedly connected to the plurality of inner support rings, an inner extension plate and an outer extension plate are arranged on the plurality of vertical support plates, a plurality of the inner extension plates are fixedly connected to the inner spiral tube, and a plurality of the outer extension plates are fixedly connected to the outer spiral tube.

[0012] Preferably, the galvanometer lens module and the drive plate module are both fixedly connected with a plurality of external internal threaded sleeves, the galvanometer surround and the drive plate surround are both provided with a plurality of through openings, the plurality of through openings are each provided with positioning bolts, the plurality of positioning bolts are respectively threadedly connected with the plurality of external internal threaded sleeves, the galvanometer surround and the drive plate surround are both provided with a plurality of thread grooves, the plurality of thread grooves are threadedly connected with assembly bolts, the galvanometer cover and the drive plate cover are both provided with a plurality of assembly openings, the plurality of assembly openings are respectively used for the passage of the plurality of assembly bolts.

[0013] Preferably, the galvanometer lens module is equipped with a fiber optic connecting head, the galvanometer surround is provided with a circular opening matching the fiber optic connecting head, the drive board module is equipped with a wiring insertion head, and the drive packaging assembly is provided with a strip opening matching the wiring insertion head.

[0014] Preferably, a contact seal is provided between the galvanometer cover and the galvanometer surround, and a contact seal is also provided between the drive plate cover and the drive plate surround.

[0015] Preferably, the drive plate cover is fixedly connected with two diagonal mounting ears, and the two diagonal mounting ears are both provided with mounting circular holes.

[0016] Compared with the prior art, the present invention provides a high-temperature resistant high-power laser cleaning galvanometer, which has the following beneficial effects: (1) In the present invention, through the design of the galvanometer package component and the design of the drive package component, the galvanometer lens module and the drive board module are respectively matched to form a package, and the drive board module is independently provided with a drive package component cooling, thereby reducing the introduction of heat sources around the galvanometer lens module and reducing the volume of the galvanometer lens module for heat insulation treatment. The interior of the galvanometer package component and the interior of the drive package component both form air cooling areas, and the double-layer protection of water cooling and air cooling is used to ensure that the galvanometer can work normally in a high temperature environment.

[0017] (2) In the present invention, by opening a transversely coated reflux cavity, a longitudinal through-port, and a longitudinally coated reflux cavity and a transverse through-port, a cooling water flow channel is formed inside the galvanometer package assembly and inside the drive package assembly, and a cooling water circulation cavity can be formed inside the galvanometer package assembly and inside the drive package assembly.

[0018] (3) In the present invention, by designing the pipeline connection system, the water paths and airflows in the galvanometer package assembly and the drive package assembly are coordinated to form a quick-connect structure, which facilitates the circulation of external cooling water and external cooling air. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1It is a schematic diagram of the three-dimensional structure of the galvanometer packaging assembly of the present invention relative to the galvanometer lens module packaging; Figure 2 It is a schematic diagram of a partially disassembled three-dimensional structure of a galvanometer packaging assembly of the present invention; Figure 3 For the present invention Figure 2 A schematic diagram of the local enlarged structure at point A in the middle; Figure 4 It is a schematic diagram of a three-dimensional structure of a partially disassembled galvanometer packaging assembly of the present invention from another angle; Figure 5 For the present invention Figure 4 A schematic diagram of the local enlarged structure at B in the middle; Figure 6 For the present invention Figure 4 A schematic diagram of the local enlarged structure at C in the middle; Figure 7 It is a schematic diagram of a three-dimensional structure of a sectional view of the galvanometer surround, a water inlet joint, and a transverse oblique partition plate of the present invention; Figure 8 It is a schematic diagram of a three-dimensional structure of a sectional view of the galvanometer surround, a water inlet joint, and a longitudinal oblique partition plate of the present invention; Fig. 9 It is a schematic diagram of the exploded three-dimensional structure of the galvanometer package assembly relative to the galvanometer lens module package of the present invention; Fig.10 It is a schematic diagram of the three-dimensional structure of the galvanometer package assembly of the present invention relative to the galvanometer lens module package when viewed from the bottom; Fig.11 It is a schematic diagram of the three-dimensional structure of the driver package assembly of the present invention relative to the driver board module package; Fig.12 It is a schematic diagram of the exploded three-dimensional structure of the driver package assembly of the present invention; Fig.13 It is a schematic diagram of the three-dimensional structure of the air intake branch pipe, the water intake branch pipe and the outer spiral pipe of the present invention; Fig.14 It is a schematic diagram of a three-dimensional structure of the cross-section of the air intake branch pipe, the water intake branch pipe and the inner spiral pipe of the present invention; Fig.15 For the present invention Fig.14 A schematic diagram of the local enlarged structure at D in the middle; Fig.16 It is a schematic diagram of a three-dimensional structure of a cross-section of the inner support ring and the vertical support plate of the present invention.

[0020] In the figure: 1. galvanometer head module; 2. drive board module; 3. galvanometer surround; 4. drive board surround; 5. galvanometer cover; 6. drive board cover; 7. transverse cover reflux chamber; 8. longitudinal through port; 9. longitudinal cover reflux chamber; 10. transverse through port; 11. water inlet joint; 12. water return joint; 13. air inlet joint; 14. air return joint; 15. longitudinal oblique partition; 16. transverse oblique partition; 17. guide double elbow; 18. through air distribution port; 19. double slope guide block; 20. First step slope; 21. Second step slope; 22. Air inlet branch pipe; 23. Water inlet branch pipe; 24. Inner spiral pipe; 25. Outer spiral pipe; 26. Inner support ring; 27. Liquid hole; 28. Vertical support plate; 29. ​​Inner extension plate; 30. Outer extension plate; 31. External internal threaded sleeve; 32. Positioning bolt; 33. Assembly bolt; 34. Fiber optic pipe connector; 35. Circular opening; 36. Wiring insertion head; 37. Strip opening; 38. Diagonal mounting ear; 39. Mounting circular hole. DETAILED DESCRIPTION

[0021] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0022] For examples, see Figure 1-Figure 16A high-temperature resistant high-power laser cleaning galvanometer comprises a galvanometer lens module 1 and a driving board module 2, and also comprises a galvanometer lens packaging component and a driving packaging component. The galvanometer lens packaging component and the driving packaging component respectively comprise a galvanometer lens surround 3 and a driving board surround 4. The galvanometer lens surround 3 and the driving board surround 4 are respectively fixedly connected to the galvanometer lens module 1 and the driving board module 2. The galvanometer lens surround 3 and the driving board surround 4 are respectively fixedly connected to a galvanometer lens coating 5 and a driving board coating 6. Through the design of the galvanometer lens packaging component and the design of the driving packaging component, the galvanometer lens module 1 is respectively packaged and the driving board module 2 is packaged. The driving board module 2 is separately provided with a driving packaging component cooling, which reduces the introduction of heat sources around the galvanometer lens module 1 and reduces the galvanometer lens module 1. The volume is insulated, and air-cooling areas are formed inside the galvanometer packaging component and the driving packaging component. The double-layer protection of water cooling and air cooling is used to ensure that the galvanometer can work normally in a high-temperature environment. A transverse sheathing reflux chamber 7 and a longitudinal through-port 8 are provided in the galvanometer surround 3 and the driving plate surround 4. A longitudinal sheathing reflux chamber 9 and a transverse through-port 10 are provided in the galvanometer cover 5 and the driving plate cover 6. The two transverse sheathing reflux chambers 7 are matched with the two transverse through-ports 10 respectively, and the two longitudinal sheathing reflux chambers 9 are matched with the two longitudinal through-ports 8 respectively. By opening the transverse sheathing reflux chamber 7, the longitudinal through-port 8, the longitudinal sheathing reflux chamber 9 and the transverse through-port 10, a circulation waterway for cooling water is formed inside the galvanometer packaging component and the driving packaging component. , a circulating water cavity for cooling water can be formed in both the galvanometer packaging component and the drive packaging component, a contact seal is provided between the galvanometer coating 5 and the galvanometer surround 3, and a contact seal is also provided between the drive plate coating 6 and the drive plate surround 4, to ensure the relative sealing between the longitudinal coating reflux cavity 9 and the longitudinal through-port 8, and also to ensure the relative sealing between the transverse coating reflux cavity 7 and the transverse through-port 10, the drive plate coating 6 is fixedly connected to two diagonal mounting ears 38, and the two diagonal mounting ears 38 are provided with mounting circular holes 39, the galvanometer surround 3 and the drive plate surround 4 are both installed with a pipeline connection system, and the two pipeline connection systems include a water inlet joint 11, a water return joint 12, an air inlet joint 13 and an air return joint 14, and the two water inlet joints 1 1 are respectively fixedly connected to the galvanometer surround 3 and the drive plate surround 4, the two return water joints 12 are respectively fixedly connected to the galvanometer surround 3 and the drive plate surround 4, the two longitudinal through-ports 8 are respectively communicated with the two water inlet joints 11, the two transversely coated reflux chambers 7 are also respectively communicated with the two water inlet joints 11, the two longitudinal through-ports 8 are respectively communicated with the two return water joints 12, the two transversely coated reflux chambers 7 are respectively communicated with the two return water joints 12, the two longitudinal through-ports 8 are each provided with a longitudinal oblique partition plate 15, the two transversely coated reflux chambers 7 are each provided with a transverse oblique partition plate 16, the two water inlet joints 11 are respectively located on one side of the two longitudinal oblique partition plates 15, and the two return water joints 12 are respectively located on the other side of the two longitudinal oblique partition plates 15,The two water inlet joints 11 are respectively located on one side of the two transverse oblique partitions 16, the two water return joints 12 are respectively located on the other side of the two transverse oblique partitions 16, the two air inlet joints 13 are respectively connected to the interior of the galvanometer surround 3 and the interior of the drive plate surround 4, and the two air return joints 14 are respectively connected to the interior of the galvanometer surround 3 and the interior of the drive plate surround 4. Through the design of the pipeline connection system, the waterways and airflows in the galvanometer package assembly and the drive package assembly form a quick connection structure, which is convenient for the circulation access of external cooling water and the circulation access of external cooling air.

[0023] It should be further explained that the two air inlet joints 13 are connected to the guiding double elbow pipes 17, and the two guiding double elbow pipes 17 are respectively fixedly connected in the galvanometer surround 3 and the drive plate surround 4, and the two guiding double elbow pipes 17 are provided with through-air distribution ports 18, so as to improve the flow guidance of the gas fed by the air inlet joint 13, make the distance between the gas entry point and the gas reflux point farther, and the heat exchange of the circulating cooling air is better, and the two through-air distribution ports 18 are fixedly connected with double-slope guide blocks 19, and the two double-slope guide blocks 19 are provided with a first step slope 20 and a second step slope 21, so as to guide and disperse the gas discharged from the through-air distribution ports 18, and the water inlet joint 11 The air inlet joint 13 is respectively equipped with an air inlet branch pipe 22 and a water inlet branch pipe 23, the air inlet branch pipe 22 and the water inlet branch pipe 23 are respectively connected with an inner spiral pipe 24 and an outer spiral pipe 25, the inner spiral pipe 24 is sleeved in the outer spiral pipe 25, and the overall structure formed by the inner spiral pipe 24 and the outer spiral pipe 25 is spirally wound around the wire harness, water pipe and optical fiber part to achieve cooling of the wire harness, water pipe and optical fiber part. At the same time, during the use of the inner and outer nested inner and outer spiral pipes 24 and 25, the cooling water circulating outside can form temperature protection for the cooling air circulating inside, thereby ensuring the cooling effect of the cooling air on the galvanometer lens module 1 and the driving board module 2. A plurality of inner support rings 26 are fixedly connected between the spiral tube 24 and the outer spiral tube 25, and a plurality of liquid holes 27 are provided on the plurality of inner support rings 26, and a plurality of vertical support plates 28 are fixedly connected to the plurality of inner support rings 26, and an inner extension plate 29 and an outer extension plate 30 are provided on the plurality of vertical support plates 28, and a plurality of inner extension plates 29 are fixedly connected to the inner spiral tube 24, and a plurality of outer extension plates 30 are fixedly connected to the outer spiral tube 25, so as to ensure the relative connection and positioning of the inner spiral tube 24 and the outer spiral tube 25, and a plurality of external internal threaded sleeves 31 are fixedly connected to the galvanometer lens module 1 and the drive plate module 2, and a plurality of liquid holes 27 are provided on the galvanometer surround 3 and the drive plate surround 4. A plurality of through openings are provided with positioning bolts 32, and the plurality of positioning bolts are respectively threadedly connected with a plurality of external internal threaded sleeves 31; a plurality of thread grooves are provided on the galvanometer surround 3 and the drive plate surround 4, and assembly bolts 33 are threadedly connected in the plurality of thread grooves; a plurality of assembly ports are provided on the galvanometer cover 5 and the drive plate cover 6, and the plurality of assembly ports are respectively used for the passage of a plurality of assembly bolts 33; a fiber optic pipe connector 34 is installed on the galvanometer lens module 1, a circular opening 35 matching the fiber optic pipe connector 34 is provided on the galvanometer surround 3, a wiring insertion head 36 is installed on the drive plate module 2, and a strip opening 37 matching the wiring insertion head 36 is provided on the drive packaging assembly.

[0024] In summary, the working principle of the high-temperature resistant high-power laser cleaning galvanometer is as follows: when in use, first connect the air intake branch pipe 22 with the air intake joint 13, connect the water intake branch pipe 23 with the water intake joint 11, and wind the outer spiral tube 25 around the wire harness, water pipe and optical fiber part, connect the other end of the air intake branch pipe 22 with the external cold source air, connect the other end of the water intake branch pipe 23 with the external circulating cooling water, connect the return water pipeline to the return water joint 12, connect the return air pipeline to the return air joint 14, send cooling air to the air intake joint 13 through the external cold source air, and the cooling air is guided to the cooling water pipe 12. The double bend pipe 17 guides the air distribution in the galvanometer package assembly or the driver package assembly, and the cooling air will surround the galvanometer lens module 1 or the driver board module 2, and finally be led out through the return air connector 14 to form an air path circulation. In the process of the cooling air contacting with the galvanometer lens module 1 or the driver board module 2, the heat dissipation of the galvanometer lens module 1 or the driver board module 2 is realized through heat exchange, and the cooling water sent into the water inlet connector 11 through the external circulating cooling water will form a flow circulation in the transversely encapsulated reflux cavity 7 and the transverse through port 10, and will also form a flow circulation in the longitudinal through port 8 and the longitudinally encapsulated reflux cavity 9. A flow cycle is formed, and the circulating cooling water is finally discharged at the return water joint 12, forming a circulation wrap of cooling water outside the galvanometer lens module 1 and a circulation wrap outside the drive board module 2, and the wrapped cooling water also wraps the air-cooled area, thereby improving the heat dissipation effect of the operation space of the galvanometer lens module 1 and the drive board module 2, and the drive board module 2 is separately provided with a drive package component cooling, thereby reducing the introduction of heat sources around the galvanometer lens module 1, and reducing the volume of the galvanometer lens module 1 for heat insulation treatment, the interior of the galvanometer package component and the interior of the drive package component are both water-cooled with machined parts, and the galvanometer package component Air-cooling areas are formed inside the component and inside the driver package assembly. Double-layer protection of water cooling and air cooling is used to ensure that the galvanometer can work normally in a high-temperature environment. The galvanometer package assembly is an insulating material with low thermal conductivity (such as a mold insulation board, thermal conductivity: 0.197W / mk, resistant to 1000°C high temperature), so that the galvanometer head module 1 and the driver board module 2 are wrapped and isolated from the heat source respectively. The wire harness, water pipe and optical fiber are wrapped with flexible insulating materials (such as silicone glass fiber sleeve, thermal conductivity: 0.5W / mk, resistant to 300°C high temperature) to isolate the wire harness, water pipe and optical fiber from the heat source.

[0025] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A high-temperature resistant high-power laser cleaning galvanometer, comprising a galvanometer lens module (1) and a drive board module (2), characterized in that: The invention also includes a galvanometer packaging component and a drive packaging component, wherein the galvanometer packaging component and the drive packaging component respectively include a galvanometer surround (3) and a drive board surround (4), wherein the galvanometer surround (3) and the drive board surround (4) are respectively fixedly connected to the galvanometer head module (1) and the drive board module (2), wherein the galvanometer surround (3) and the drive board surround (4) are respectively fixedly connected to a galvanometer coating (5) and a drive board coating (6), wherein the galvanometer surround (3) and the drive board surround are respectively fixedly connected to each other. The winding member (4) is provided with a transverse wrapping reflux chamber (7) and a longitudinal through-port (8); the galvanometer wrapping member (5) and the drive plate wrapping member (6) are provided with a longitudinal wrapping reflux chamber (9) and a transverse through-port (10); the two transverse wrapping reflux chambers (7) are matched with the two transverse through-ports (10) respectively; the two longitudinal wrapping reflux chambers (9) are matched with the two longitudinal through-ports (8) respectively; and the galvanometer wrapping member (3) and the drive plate wrapping member (4) are both provided with a pipeline connection system.

2. The high temperature resistant high power laser cleaning galvanometer according to claim 1, characterized in that: The two pipe connection systems each comprise a water inlet joint (11), a water return joint (12), an air inlet joint (13) and an air return joint (14); the two water inlet joints (11) are respectively fixedly connected to the galvanometer surround (3) and the drive plate surround (4); the two water return joints (12) are respectively fixedly connected to the galvanometer surround (3) and the drive plate surround (4); the two longitudinal through ports (8) are respectively connected to the two water inlet joints (11); the two transversely wrapped reflux chambers (7) are also respectively connected to the two water inlet joints (11); the two longitudinal through ports (8) are respectively connected to the two water return joints (12); the two transversely wrapped reflux chambers (7) are respectively connected to the two water return joints (12); the two longitudinal through ports (8 ... ) are provided with longitudinal oblique partition plates (15), and transverse oblique partition plates (16) are provided in the two transverse enclosing reflux chambers (7). The two water inlet joints (11) are respectively located on one side of the two longitudinal oblique partition plates (15), and the two water return joints (12) are respectively located on the other side of the two longitudinal oblique partition plates (15). The two water inlet joints (11) are respectively located on one side of the two transverse oblique partition plates (16), and the two water return joints (12) are respectively located on the other side of the two transverse oblique partition plates (16). The two air inlet joints (13) are respectively connected to the interior of the galvanometer surround (3) and the interior of the drive plate surround (4), and the two air return joints (14) are respectively connected to the interior of the galvanometer surround (3) and the interior of the drive plate surround (4).

3. The high temperature resistant high power laser cleaning galvanometer according to claim 2, characterized in that: The two air inlet joints (13) are both connected to a guiding double-bend pipe (17), the two guiding double-bend pipes (17) are respectively fixedly connected inside the galvanometer surround (3) and inside the drive plate surround (4), and the two guiding double-bend pipes (17) are both provided with a through-gas distribution port (18).

4. The high temperature resistant high power laser cleaning galvanometer according to claim 3, characterized in that: The two through-gas distribution ports (18) are both fixedly connected with a double-slope guide block (19), and the two double-slope guide blocks (19) are both provided with a first step slope surface (20) and a second step slope surface (21).

5. The high temperature resistant high power laser cleaning galvanometer according to claim 4, characterized in that: The water inlet joint (11) and the air inlet joint (13) are respectively equipped with an air inlet branch pipe (22) and a water inlet branch pipe (23); the air inlet branch pipe (22) and the water inlet branch pipe (23) are respectively connected with an inner spiral pipe (24) and an outer spiral pipe (25); the inner spiral pipe (24) is sleeved inside the outer spiral pipe (25).

6. The high temperature resistant high power laser cleaning galvanometer according to claim 5, characterized in that: A plurality of inner support rings (26) are fixedly connected between the inner spiral tube (24) and the outer spiral tube (25); a plurality of liquid holes (27) are provided on the plurality of inner support rings (26); a plurality of vertical support plates (28) are fixedly connected to the plurality of inner support rings (26); an inner extension plate (29) and an outer extension plate (30) are provided on the plurality of vertical support plates (28); the plurality of inner extension plates (29) are fixedly connected to the inner spiral tube (24); and the plurality of outer extension plates (30) are fixedly connected to the outer spiral tube (25).

7. The high temperature resistant high power laser cleaning galvanometer according to claim 6, characterized in that: The galvanometer lens module (1) and the drive plate module (2) are both fixedly connected with a plurality of external internal threaded sleeves (31); the galvanometer surround (3) and the drive plate surround (4) are both provided with a plurality of through openings; positioning bolts (32) are arranged in the plurality of through openings; the plurality of positioning bolts (32) are respectively threadedly connected to the plurality of external internal threaded sleeves (31); the galvanometer surround (3) and the drive plate surround (4) are both provided with a plurality of thread grooves; assembly bolts (33) are threadedly connected in the plurality of thread grooves; the galvanometer cover (5) and the drive plate cover (6) are both provided with a plurality of assembly openings; the plurality of assembly openings are respectively used for the passage of the plurality of assembly bolts (33).

8. The high temperature resistant high power laser cleaning galvanometer according to claim 7, characterized in that: The galvanometer lens module (1) is equipped with an optical fiber connecting head (34), the galvanometer surround (3) is provided with a circular opening (35) matching the optical fiber connecting head (34), the drive board module (2) is equipped with a wiring insertion head (36), and the drive package assembly is provided with a strip opening (37) matching the wiring insertion head (36).

9. The high temperature resistant high power laser cleaning galvanometer according to claim 8, characterized in that: A contact seal is provided between the galvanometer cover (5) and the galvanometer surround (3), and a contact seal is also provided between the drive plate cover (6) and the drive plate surround (4).

10. The high temperature resistant high power laser cleaning galvanometer according to claim 9, characterized in that: The drive plate covering member (6) is fixedly connected to two diagonal mounting ears (38), and the two diagonal mounting ears (38) are both provided with mounting circular holes (39).

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