Multi-axis ultrafast laser ultrasonic combined machining equipment

Abstract

The invention relates to the technical field of laser processing, in particular to multi-axis ultrafast laser and ultrasonic combined processing equipment. The five-axis linkage machining equipment is used for simultaneously or independently moving in five different axial directions of an X axis, a Y axis, a Z axis, an A axis and a B axis, and a workpiece to be machined is clamped on the workbench; the laser generator is mounted on a cross beam of the five-axis linkage processing equipment; the ultrasonic vibration main shaft is mounted on a Z-axis mounting seat in the five-axis linkage machining equipment; the four-axis small motion platform is mounted on a Z-axis mounting seat in the five-axis linkage machining equipment and is used for accurately adjusting the spatial position of the galvanometer and the rotating angle of a laser beam, so that the four-axis small motion platform and the ultrasonic vibration main shaft cutter form combined machining with different laser incident angles; the three-dimensional scanner is used for obtaining the six-degree-of-freedom point cloud model of the workpiece to be machined. A three-dimensional scanner, a galvanometer and an ultrasonic vibration main shaft are integrated in five-axis linkage machining equipment, so that the equipment compactness and the operation convenience are improved; therefore, the ultra-fast laser is suitable for hard light path transmission.

Description

Technical Field

[0001] The invention relates to the technical field of laser processing, in particular to multi-axis ultrafast laser ultrasonic composite processing equipment. Background Art

[0002] Laser ultrasonic composite processing is an advanced manufacturing technology that combines laser processing technology with ultrasonic vibration technology. This technology improves the processing capability and quality of laser manufacturing by applying external ultrasonic vibration, and has become a hot topic of research at home and abroad. Ultrasonic vibration can affect the flow of the molten pool and the solidification behavior of semi-solid / liquid materials, and promote the uniform distribution of elements and grain refinement through cavitation and flow effects. The mechanical effect of ultrasonic vibration promotes the discharge of slag, reduces the shielding of the laser beam, and improves the quality and efficiency of laser ablation. In laser ultrasonic composite cutting processing, ultrasonic processing and laser heating assisted processing are carried out simultaneously, which can reduce tool wear, reduce processing costs, and improve processing quality.

[0003] Existing processing equipment includes independent laser processing and ultrasonic processing modules. The laser processing system controls the movement of the laser beam through a galvanometer, while the ultrasonic processing system removes materials through ultrasonic vibration. In laser processing, a high-energy laser beam is used to cut or engrave materials. Ultrasonic processing uses high-frequency vibration to assist the cutting process, improve material removal rate and processing quality. However, existing laser ultrasonic composite processing equipment has the following problems:

[0004] 1) Low integration: Existing laser ultrasonic composite processing equipment does not integrate all functions into a compact unit, resulting in large equipment size, complex operation, and limited efficiency and accuracy during processing;

[0005] 2) Complex adjustment: The alignment of the laser focus and the center point of the ultrasonic tool needs to be manually adjusted, which is not only time-consuming but also difficult to ensure high precision;

[0006] 3) Functional limitations: It is impossible to quickly switch between multiple processing methods, such as ultrasonic processing, laser processing, laser angle processing, laser and ultrasonic composite processing, laser angle and ultrasonic composite processing, etc.;

[0007] 4) Low degree of automation: lack of high-precision positioning system, making it difficult to achieve automated processing and precise workpiece positioning;

[0008] 5) Insufficient flexibility: It is difficult to process complex surfaces or the processing efficiency is low;

[0009] 6) It is only applicable to fiber lasers through optical fiber, and is not suitable for ultrafast lasers transmitted by hard optical paths. Summary of the invention

[0010] The technical problem to be solved by the present invention is: in order to solve the problems existing in the prior art in the above-mentioned background technology, a multi-axis ultrafast laser ultrasonic composite processing equipment is provided which integrates a three-dimensional scanner, a galvanometer, and an ultrasonic vibration spindle, which significantly improves the flexibility, efficiency and automation level of processing.

[0011] The technical solution adopted by the present invention to solve the technical problem is: a multi-axis ultrafast laser ultrasonic composite processing equipment, comprising

[0012] Five-axis linkage processing equipment, including a frame and a worktable, used to move simultaneously or individually in five different axes: X-axis, Y-axis, Z-axis, A-axis and B-axis, and the workpiece to be processed is clamped on the worktable;

[0013] A laser generator is used to be installed on the crossbeam of a five-axis machining device;

[0014] The ultrasonic vibration spindle is installed on the Z-axis mounting seat in the five-axis linkage processing equipment, and an ultrasonic tool is installed at the lower end of the ultrasonic vibration spindle;

[0015] The four-axis small motion table is installed on the Z-axis mounting seat of the five-axis linkage processing equipment. The four-axis small motion table is equipped with a galvanometer to accurately adjust the spatial position of the galvanometer and the rotation angle of the laser beam;

[0016] The 3D scanner is installed on the Z-axis mounting seat in the five-axis linkage processing equipment to obtain the 6-DOF point cloud model of the workpiece to be processed.

[0017] Further, the four-axis small motion platform includes a connecting seat, a Z2-axis sliding assembly driving the connecting seat to move along the Z axis is installed on the short side of the connecting seat, an X2-axis sliding assembly driving the connecting seat to move along the X axis is installed on the long side of the connecting seat, a connecting plate is installed on the X2-axis sliding assembly, an A2-axis rotating assembly for rotating along the A axis is installed at the lower end of the connecting plate, and a galvanometer is installed on the A2-axis rotating assembly;

[0018] The Z2-axis sliding assembly is equipped with a Y2-axis sliding assembly that drives it to move in the Y-axis. The Y2-axis sliding assembly is installed on the Z-axis mounting seat in the five-axis linkage processing equipment.

[0019] Furthermore, a laser beam optical path reversing device is provided between the laser generator and the A2-axis rotation assembly, and the laser beam optical path reversing device includes a first cage-type right-angle mirror frame, a second cage-type right-angle mirror frame and a third cage-type right-angle mirror frame, wherein the first cage-type right-angle mirror frame is installed above the Z-axis mounting seat, the third cage-type right-angle mirror frame is installed below the Z-axis mounting seat, the reflection port of the first cage-type right-angle mirror frame is opposite to the incident port of the third cage-type right-angle mirror frame, the second cage-type right-angle mirror frame is installed on the connecting plate, and the reflection port of the third cage-type right-angle mirror frame is opposite to the incident port of the second cage-type right-angle mirror frame.

[0020] Furthermore, the A2-axis rotation component has a hollow hole, a through hole is opened on the lower plate surface of the connecting plate, and the emission port of the second cage right-angle mirror frame faces the hollow hole.

[0021] Furthermore, the hollow hole, the through hole and the emission port of the second cage-type right-angle mirror frame are coaxially arranged.

[0022] Further, the X2-axis sliding assembly, the Y2-axis sliding assembly and the Z2-axis sliding assembly all include a driving motor and a sliding mounting plate, the sliding mounting plate has a notch on its surface, the driving motor is mounted on the side of the sliding mounting plate, a lead screw is mounted on the output end of the driving motor, the lead screw extends into the notch, and a lead screw nut is mounted on the lead screw;

[0023] One plate surface of the sliding mounting plate is the mounting plate surface, and the other plate surface of the sliding mounting plate is provided with a slide plate through a slide rail assembly, and a screw rod nut is connected with the slide plate.

[0024] Furthermore, the five-axis linkage processing equipment includes a frame, a Y-axis sliding assembly for movement in the Y-axis direction is installed at the lower end of the frame, an X-axis sliding assembly for movement in the X-axis direction is installed on the crossbeam of the frame, a Z-axis sliding assembly for movement in the Z-axis direction is installed on the X-axis sliding assembly, a Z-axis mounting seat is installed on the Z-axis sliding assembly, and a worktable for rotation in the A-axis and C-axis directions is installed on the middle cross plate of the frame, and the workpiece to be processed is clamped on the worktable.

[0025] Furthermore, a control component is also included.

[0026] Beneficial effects of the present invention:

[0027] 1) High integration: The 3D scanner, galvanometer and ultrasonic vibration spindle are integrated into a five-axis linkage processing device to reduce the size of the device, improve the convenience of operation, and improve the compactness and convenience of operation of the device;

[0028] 2) High-precision adjustment: Through the adjustment of the four-axis small motion table (x2, y2, z2, A2), the laser focus and the center point of the ultrasonic tool can be aligned quickly and accurately;

[0029] 3) Multifunctional processing: It can realize the composite processing of ultrasonic vibration and laser, the rapid switching between ultrasonic vibration and laser processing, as well as separate ultrasonic vibration processing and laser beam tilt processing at any angle, which improves the flexibility and efficiency of processing. At the same time, it has high processing accuracy and is suitable for processing multiple scenes and workpieces with high processing accuracy requirements, such as ceramics and other materials;

[0030] 4) High degree of automation: The configured 3D scanner can obtain the 6-DOF workpiece point cloud model, which is used to measure the workpiece clamping error and realize automatic positioning. The use of 3D scanner improves the degree of automation of processing, reduces manual intervention, and improves production efficiency;

[0031] 5) Enhanced flexibility: 12-axis multi-axis machining equipment provides higher flexibility and can adapt to more complex machining requirements;

[0032] 6) Ultrafast lasers suitable for hard optical path transmission. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] The present invention is further described below in conjunction with the accompanying drawings and embodiments.

[0034] Figure 1 It is a schematic diagram of the structure of the present invention;

[0035] Figure 2 The present invention Figure 1 A schematic diagram of the structure in another direction;

[0036] Figure 3 It is a structural schematic diagram of the four-axis small motion platform of the present invention;

[0037] Figure 4 The present invention Figure 3 A schematic diagram of the structure in another direction;

[0038] Figure 5 The present invention Figure 4 Exploded diagram of

[0039] Figure 6 It is a structural schematic diagram of the shaft sliding assembly of the present invention;

[0040] Figure 7 The present invention Figure 6 A schematic diagram of the structure in another direction;

[0041] In the figure: 1. Five-axis linkage ultrasonic machining equipment, 11. Frame, 12. Y-axis sliding assembly, 13. X-axis sliding assembly, 14. Z-axis sliding assembly, 15. Z-axis mounting seat, 16. Workbench,

[0042] 2. Ultrasonic vibration spindle,

[0043] 3. Four-axis small motion table, 31. X2 axis sliding assembly, 32. Y2 axis sliding assembly, 33. Z2 axis sliding assembly, 34. A2 axis rotation assembly, 35. Connecting seat, 36. Connecting plate, 37. Hollow hole, 38. Through hole, 39. Driving motor, 310. Sliding mounting plate, 311. Notch, 312. Screw, 313. Screw nut, 314. Slide plate,

[0044] 4. 3D scanner, 5. laser generator, 6. galvanometer, 7. second cage-type right-angle mirror frame, 8. first cage-type right-angle mirror frame, 9. third cage-type right-angle mirror frame. DETAILED DESCRIPTION

[0045] The present invention will now be described in further detail with reference to the accompanying drawings. These drawings are simplified schematic diagrams, which only illustrate the basic structure of the present invention in a schematic manner, and therefore only show the components related to the present invention.

[0046] like Figures 1 to 7 A multi-axis ultrafast laser ultrasonic composite processing equipment is shown, comprising:

[0047] The five-axis linkage processing equipment 1 includes a frame 11 and a worktable 16, which is used to move simultaneously or individually in five different axial directions: X-axis, Y-axis, Z-axis, A-axis and B-axis, and the workpiece to be processed is clamped on the worktable 16;

[0048] A laser generator 5, used for being mounted on the crossbeam of the five-axis linkage processing equipment 1;

[0049] The ultrasonic vibration spindle 2 is mounted on the Z-axis mounting seat 15 in the five-axis linkage processing equipment 1. An ultrasonic tool is mounted on the lower end of the ultrasonic vibration spindle 2, which not only drives the ultrasonic tool to rotate, but also drives the ultrasonic tool to vibrate at a very high vibration frequency to drive the discharge of chips.

[0050] The four-axis small motion table 3 is installed on the Z-axis mounting seat 15 in the five-axis linkage processing equipment 1. The four-axis small motion table 3 is equipped with a galvanometer 6 for accurately adjusting the spatial position (X2, Y2, Z2 directions) of the galvanometer 6 and the rotation angle (A2) of the laser beam. The laser focus and the center point of the ultrasonic tool are coincident under the premise of a fixed laser beam angle by adjustment, thereby forming a composite processing with different laser incident angles with the ultrasonic vibration spindle tool. At the same time, ultrasonic vibration processing can be realized separately, and laser beam tilt processing at any angle can be realized. It has a powerful processing function, increases the flexibility and functional diversity of processing, and transmits the ultrafast laser through the lens;

[0051] The three-dimensional scanner 4 (commercially available according to demand) is installed on the Z-axis mounting seat 15 in the five-axis linkage processing equipment 1 to obtain the 6-DOF point cloud model of the workpiece to be processed, thereby measuring the clamping error of the workpiece, realizing automatic positioning, and improving the automation of processing. It is suitable for some workpieces that cannot be clamped or made of hard and brittle materials and in the absence of a reference. A control component is also included.

[0052] like Figures 2 to 7As shown, the four-axis small motion platform 3 includes a connecting seat 35, a Z2-axis sliding assembly 33 driving the connecting seat 35 to move in the Z axis is installed on the short side of the connecting seat 35, an X2-axis sliding assembly 31 driving the connecting seat 35 to move in the X axis is installed on the long side of the connecting seat 35, a connecting plate 36 is installed on the X2-axis sliding assembly 31, an A2-axis rotating assembly 34 for A-axis rotation is installed at the lower end of the connecting plate 36, and the galvanometer 6 is installed on the A2-axis rotating assembly 34;

[0053] The Z2-axis sliding assembly 33 is provided with a Y2-axis sliding assembly 32 which drives the Z2-axis sliding assembly 33 to move in the Y-axis direction. The Y2-axis sliding assembly 32 is installed on the Z-axis mounting seat 15 in the five-axis linkage processing device 1 .

[0054] like Figures 3 to 5 As shown, a laser beam optical path reversing device is provided between the laser generator 5 and the A2-axis rotation assembly 34, and the laser beam optical path reversing device includes a first cage-type right-angle mirror frame 8, a second cage-type right-angle mirror frame 7 and a third cage-type right-angle mirror frame 9. The first cage-type right-angle mirror frame 8 is installed above the Z-axis mounting seat 15, and the third cage-type right-angle mirror frame 9 is installed below the Z-axis mounting seat 15. The reflection port of the first cage-type right-angle mirror frame 8 is opposite to the incident port of the third cage-type right-angle mirror frame 9. The second cage-type right-angle mirror frame 7 is installed on the connecting plate 36, and the reflection port of the third cage-type right-angle mirror frame 9 is opposite to the incident port of the second cage-type right-angle mirror frame 7.

[0055] like Figure 5 As shown, the A2-axis rotating assembly 34 has a hollow hole 37 , a through hole 38 is formed on the lower plate surface of the connecting plate 36 , and the emission port of the second cage-type right-angle mirror frame 7 faces the hollow hole 37 .

[0056] like Figure 5 As shown, the hollow hole 37, the through hole 38 and the emission port of the second cage-type right-angle mirror frame 7 are coaxially arranged.

[0057] like Figures 6-7 As shown, the X2-axis sliding assembly 31, the Y2-axis sliding assembly 32 and the Z2-axis sliding assembly 33 all include a driving motor 39 and a sliding mounting plate 310, the sliding mounting plate 310 has a notch 311 on its surface, the driving motor 39 is mounted on the side of the sliding mounting plate 310, a screw rod 312 is mounted on the output end of the driving motor 39, the screw rod 312 extends into the notch 311, and a screw nut 313 is mounted on the screw rod 312;

[0058] One surface of the sliding mounting plate 310 is a mounting surface, and the other surface of the sliding mounting plate 310 is provided with a slide plate 314 via a slide rail assembly, and the screw nut 313 is connected to the slide plate 314 .

[0059] like Figures 1-2As shown, the five-axis linkage processing equipment 1 (which is the existing technology and can be purchased by customers according to their needs) includes a frame 11, a Y-axis sliding assembly 12 for movement in the Y-axis direction is installed at the lower end of the frame 11, an X-axis sliding assembly 13 for movement in the X-axis direction is installed on the crossbeam of the frame 11, a Z-axis sliding assembly 14 for movement in the Z-axis direction is installed on the X-axis sliding assembly 13, a Z-axis mounting seat 15 is installed on the Z-axis sliding assembly 14, a workbench 16 for rotation in the A-axis and C-axis directions is installed on the middle cross plate of the frame 11, and a workbench 16 to be processed is clamped on the workbench 16.

[0060] Working process:

[0061] Step 1: First, install the five-axis linkage processing equipment 1, and install the ultrasonic tool on the ultrasonic vibration spindle 2;

[0062] Step 2: Then, the galvanometer 6 is mounted on the four-axis small motion table 3, and the laser focus is aligned with the center point of the ultrasonic tool by adjusting the four-axis small motion table 3. The laser beam angle can be set to different angles according to the process requirements to complete the tool setting;

[0063] Among them, Figures 3 to 5 As shown, the path of the laser beam is as follows: the laser beam emitted by the laser generator 5 is reflected by the reflector and then shot into the first cage right-angle mirror frame 8, and then the adjusted laser beam is shot into the second cage right-angle mirror frame 7, and then the laser beam passes through the A2 axis rotating assembly 34 and is shot into the galvanometer 6, and finally the laser beam is shot out from the galvanometer 6;

[0064] At the same time, the equipment can independently realize ultrasonic vibration processing and laser beam tilt processing at any angle;

[0065] Step 3: Finally, the three-dimensional scanner 4 is installed on the Z-axis mounting seat 15 and calibrated. The workpiece model is obtained by measuring with the scanner, thereby obtaining the spatial position of the workpiece on the five-axis linkage processing equipment 1, realizing the integration of measurement positioning and compound processing, and finally starting processing.

[0066] Based on the above ideal embodiments of the present invention, the relevant staff can make various changes and modifications without departing from the technical concept of the present invention through the above description. The technical scope of the present invention is not limited to the contents of the specification, and its technical scope must be determined according to the scope of the claims.

Claims

1. A multi-axis ultrafast laser ultrasonic composite processing equipment, characterized in that: include A five-axis linkage processing device (1) comprises a frame (11) and a worktable (16), which is used to move simultaneously or individually in five different axial directions: an X-axis, a Y-axis, a Z-axis, an A-axis and a B-axis, and a workpiece to be processed is clamped on the worktable (16); A laser generator (5) is used to be installed on the crossbeam of the five-axis linkage processing equipment (1); An ultrasonic vibration spindle (2) is mounted on a Z-axis mounting seat (15) in a five-axis linkage processing device (1), and an ultrasonic tool is mounted on the lower end of the ultrasonic vibration spindle (2); A four-axis small motion table (3) is mounted on a Z-axis mounting seat (15) in a five-axis linkage processing device (1), and a galvanometer (6) is mounted on the four-axis small motion table (3) for accurately adjusting the spatial position of the galvanometer (6) and the rotation angle of the laser beam, thereby forming a composite processing with different laser incident angles with the ultrasonic vibration spindle tool; A three-dimensional scanner (4) is mounted on a Z-axis mounting seat (15) in a five-axis linkage processing device (1) and is used to obtain a 6-degree-of-freedom point cloud model of a workpiece to be processed.

2. The multi-axis ultrafast laser ultrasonic composite processing equipment according to claim 1, characterized in that: The four-axis small motion platform (3) comprises a connecting seat (35), a Z2-axis sliding assembly (33) for driving the connecting seat (35) to move in the Z axis is installed on the short side of the connecting seat (35), an X2-axis sliding assembly (31) for driving the connecting seat (35) to move in the X axis is installed on the long side of the connecting seat (35), a connecting plate (36) is installed on the X2-axis sliding assembly (31), an A2-axis rotating assembly (34) for A-axis rotation is installed at the lower end of the connecting plate (36), and the galvanometer (6) is installed on the A2-axis rotating assembly (34); The Z2-axis sliding component (33) is provided with a Y2-axis sliding component (32) for driving the Z2-axis sliding component (33) to move along the Y-axis. The Y2-axis sliding component (32) is installed on a Z-axis mounting seat (15) in a five-axis linkage processing device (1).

3. The multi-axis ultrafast laser ultrasonic composite processing equipment according to claim 2, characterized in that: A laser beam optical path reversing device is provided between the laser generator (5) and the A2-axis rotating assembly (34), and the laser beam optical path reversing device comprises a first cage-type right-angle mirror frame (8), a second cage-type right-angle mirror frame (7) and a third cage-type right-angle mirror frame (9), wherein the first cage-type right-angle mirror frame (8) is mounted above the Z-axis mounting seat (15), the third cage-type right-angle mirror frame (9) is mounted below the Z-axis mounting seat (15), the reflection port of the first cage-type right-angle mirror frame (8) faces the incident port of the third cage-type right-angle mirror frame (9), the second cage-type right-angle mirror frame (7) is mounted on the connecting plate (36), and the reflection port of the third cage-type right-angle mirror frame (9) faces the incident port of the second cage-type right-angle mirror frame (7).

4. The multi-axis ultrafast laser ultrasonic composite processing equipment according to claim 3, characterized in that: The A2-axis rotating assembly (34) has a hollow hole (37), a through hole (38) is provided on the lower plate surface of the connecting plate (36), and the emission port of the second cage-type right-angle mirror frame (7) faces the hollow hole (37).

5. The multi-axis ultrafast laser ultrasonic composite processing equipment according to claim 4, characterized in that: The hollow hole (37), the through hole (38) and the emission port of the second cage-type right-angle mirror frame (7) are coaxially arranged.

6. The multi-axis ultrafast laser ultrasonic composite processing equipment according to claim 2, characterized in that: The X2-axis sliding assembly (31), the Y2-axis sliding assembly (32) and the Z2-axis sliding assembly (33) all include a driving motor (39) and a sliding mounting plate (310), the sliding mounting plate (310) has a notch (311) on its surface, the driving motor (39) is mounted on the side of the sliding mounting plate (310), a screw rod (312) is mounted on the output end of the driving motor (39), the screw rod (312) extends into the notch (311), and a screw nut (313) is mounted on the screw rod (312); One plate surface of the sliding mounting plate (310) is a mounting plate surface, and the other plate surface of the sliding mounting plate (310) is mounted with a slide plate (314) via a slide rail assembly, and a screw nut (313) is connected to the slide plate (314).

7. The multi-axis ultrafast laser ultrasonic composite processing equipment according to claim 1, characterized in that: The five-axis linkage processing equipment (1) comprises a frame (11), a Y-axis sliding assembly (12) for movement in the Y-axis direction is installed at the lower end of the frame (11), an X-axis sliding assembly (13) for movement in the X-axis direction is installed on the crossbeam of the frame (11), a Z-axis sliding assembly (14) for movement in the Z-axis direction is installed on the X-axis sliding assembly (13), a Z-axis mounting seat (15) is installed on the Z-axis sliding assembly (14), and a worktable (16) for rotation in the A-axis and C-axis directions is installed on the middle cross plate of the frame (11), and a workpiece to be processed is clamped on the worktable (16).

8. The multi-axis ultrafast laser ultrasonic composite processing equipment according to claim 1, characterized in that: A control assembly is also included.

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