Split type static pressure plane type air bearing and static pressure air floating motion platform

Abstract

The invention discloses a split type static pressure plane type air bearing and a static pressure air floating motion platform, and belongs to the technical field of air bearings, the split type static pressure plane type air bearing comprises a universal base and a bearing piece, and the universal base is provided with a first air inlet used for inputting air; the bearing piece is detachably connected with the universal base, and a throttling hole is formed in the end face of the side, back on to the universal base, of the bearing piece. The throttling hole communicates with the first air inlet through an air channel between the universal base and the bearing piece. The bearing plate sprays gas through the throttling holes so that a gas film can be formed on the end face of the side back to the universal base. According to the split type static pressure plane type air bearing, the problems that an existing air bearing can only be integrally replaced and scrapped when breaking down, and a single air bearing cannot meet various requirements at the same time are solved, and the effects of reducing the use cost and improving the general applicability are achieved.

Description

Technical Field

[0001] The invention belongs to the technical field of air-floating bearings, and in particular relates to a split-type static pressure plane air-floating bearing and a static pressure air-floating motion platform. Background Art

[0002] There is an existing air bearing, including a base, the base is provided with an air inlet and a throttle hole which are interconnected. In actual application, gas is input from the air inlet and ejected from the throttle hole to form an air film between the base and the support surface, so that the air bearing is suspended on the support surface, thereby achieving frictionless and wear-free movement. However, when the throttle hole is blocked, this air bearing often needs to be replaced and scrapped as a whole, resulting in a high cost of use; in addition, the fixed shape of the throttle hole can often only meet specific needs, so that the general applicability of the air bearing is low. When faced with different needs, new air bearings can only be customized in a targeted manner, resulting in high purchase costs.

[0003] Therefore, the existing technology needs to be improved and developed. Summary of the invention

[0004] The purpose of the present invention is to provide a split hydrostatic plane air bearing and a hydrostatic air floating motion platform, so as to solve the problems that the existing air bearings can only be replaced or scrapped as a whole when they fail and that a single air bearing cannot meet multiple needs at the same time, thereby achieving the effect of reducing the use cost and improving universal applicability.

[0005] In a first aspect, the present invention provides a split type static pressure plane type air bearing, comprising: A universal base, wherein the universal base is provided with a first gas inlet for inputting gas; A bearing plate, wherein the bearing plate is detachably connected to the universal base and a throttling hole is provided on the end face facing away from the universal base, and the throttling hole is connected to the first air inlet through an air passage between the universal base and the bearing plate; the bearing plate ejects gas through the throttling hole to form an air film on the end face facing away from the universal base.

[0006] The split static pressure plane air bearing provided by the present invention avoids the replacement and scrapping of the entire air bearing through the split design of the bearing sheet, and can be better adapted to various needs, thereby achieving the effect of reducing the use cost and improving universal applicability.

[0007] Furthermore, the universal base is provided with a first air duct connected to the first air inlet, and the first air duct is provided with an air outlet; the bearing plate is provided with a second air duct connected to the throttle hole, the second air duct is provided with a second air inlet, and the second air inlet is connected to the air outlet.

[0008] Furthermore, the first air channel and the second air channel are matched with each other in a concave-convex manner and are sealed between the universal base and the bearing sheet.

[0009] The concave-convex fit is conducive to quickly positioning the first air duct and the second air duct, thereby reducing the difficulty of installation and facilitating rapid assembly.

[0010] Furthermore, the first air channel and the second air channel are both annular in shape.

[0011] The ring-shaped design has low processing difficulty, which is conducive to improving processing efficiency and saving processing costs.

[0012] Furthermore, sealing rings are provided on both the inner circle side and the outer circle side of the second air passage.

[0013] The sealing ring can prevent gas leakage, thereby ensuring that the air bearing forms a stable air film on the supporting surface.

[0014] Furthermore, the bearing sheet is fixedly connected to the universal base by screws.

[0015] Furthermore, a ball screw is movably connected to a side of the universal base facing away from the bearing plate, and the ball screw can be universally adjusted relative to the universal base.

[0016] Furthermore, a spherical groove is provided on a side of the universal base facing away from the bearing plate and a fixing bracket is installed thereon, and the fixing bracket is used to limit the ball head end of the ball head screw in the spherical groove.

[0017] In a second aspect, the present invention provides a hydrostatic air-floating motion platform, comprising the above-mentioned split hydrostatic plane air-floating bearing.

[0018] Furthermore, it also includes a guide rail and a sliding platform, the sliding platform semi-surrounds the guide rail and all sides close to the guide rail are installed with the split hydrostatic plane air bearings, the sliding platform is slidably arranged on the guide rail through the air film formed between the split hydrostatic plane air bearing and the guide rail and can move back and forth along the length direction of the guide rail.

[0019] From the above, it can be seen that the throttle hole in the split static pressure plane air bearing of the present invention is arranged on the bearing plate, and the split design allows the bearing plate to be disassembled, so that the bearing plate can be replaced individually. When the throttle hole is blocked, it is only necessary to replace the bearing plate alone without replacing the entire air bearing and scrapping it. At the same time, users can install different bearing plates according to their needs, so as to meet different needs and achieve the effect of reducing the cost of use and improving universal applicability.

[0020] Other features and advantages of the present invention will be described in the following description, and partly become apparent from the description, or be understood by implementing the embodiments of the present invention. The purpose and other advantages of the present invention can be realized and obtained by the structures particularly pointed out in the written description and the drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 A schematic structural diagram of a split-type static pressure plane air bearing provided in an embodiment of the present invention.

[0022] Figure 2 An exploded view of a split-type static pressure plane air bearing provided in an embodiment of the present invention.

[0023] Figure 3 It is a schematic structural diagram of the first bearing sheet in an embodiment of the present invention.

[0024] Figure 4 Schematic diagram of the structure of the second bearing sheet in an embodiment of the present invention.

[0025] Figure 5 Schematic diagram of the structure of the third bearing sheet in an embodiment of the present invention.

[0026] Figure 6 Schematic diagram of the structure of the fourth bearing sheet in an embodiment of the present invention.

[0027] Figure 7 A schematic structural diagram of a static pressure air floating motion platform provided in an embodiment of the present invention.

[0028] Description of labels: 100. Universal base; 110. First air inlet; 120. Spherical groove; 200. Bearing plate; 210. Throttle hole; 220. Sealing ring; 300. Ball screw; 400. Fixed bracket; 500. Split-type static pressure plane air bearing; 600. Guide rail; 700. Sliding platform. DETAILED DESCRIPTION

[0029] The embodiments of the present invention are described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0030] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first" and "second" are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, the meaning of "multiple" is two or more, unless otherwise clearly and specifically defined.

[0031] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection, an electrical connection, or mutual communication; it can be a direct connection, or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0032] In the present invention, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being "above", "above" and "above" a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes that the first feature is directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0033] The disclosure below provides many different embodiments or examples to implement different structures of the present invention. In order to simplify the disclosure of the present invention, the parts and settings of specific examples are described below. Of course, they are only examples, and the purpose is not to limit the present invention. In addition, the present invention can repeat reference numbers and / or reference letters in different examples, and this repetition is for the purpose of simplicity and clarity, which itself does not indicate the relationship between the various embodiments and / or settings discussed. In addition, the present invention provides various specific examples of processes and materials, but those of ordinary skill in the art can appreciate the application of other processes and / or the use of other materials.

[0034] Reference Figure 1 and attached Figure 2 The present invention provides a split type static pressure plane type air bearing, comprising: A universal base 100, wherein the universal base 100 is provided with a first gas inlet 110 for inputting gas; The bearing sheet 200 is detachably connected to the universal base 100 and a throttle hole 210 is provided on the end face facing away from the universal base 100. The throttle hole 210 is connected to the first air inlet 110 through an air passage between the universal base 100 and the bearing sheet 200. The bearing sheet 200 ejects gas through the throttle hole 210 to form an air film on the end face facing away from the universal base 100.

[0035] In this embodiment, the detachable connection includes but is not limited to a snap connection, a magnetic connection, a key connection, a pin connection, etc. Compared with the existing air bearing, a split design is adopted to separately set the throttle hole 210 on the bearing plate 200 and make the bearing plate 200 detachable. Therefore, when the throttle hole 210 is blocked, the user can also retain the universal base 100 and only need to replace the bearing plate 200, thereby avoiding the need for the air bearing to be replaced and scrapped as a whole, thereby achieving the effect of reducing the cost of use.

[0036] In addition, refer to the attached Figure 3 , Attachment Figure 4 , Attachment Figure 5 and attached Figure 6 The detachable bearing sheet 200 means that the user can use a bearing sheet 200 with different throttling holes 210 according to actual needs. By changing the throttling hole structure of the bearing sheet 200 (such as single-hole throttling, double-hole throttling, multi-hole throttling, throttling hole + front cavity, throttling hole + micro-groove and other structures) and by adjusting the air pressure of the air source, the air-floating bearing has the characteristics of high rigidity, high load-bearing capacity, high stability and low air consumption, thereby making the air-floating bearing suitable for more application scenarios, thereby achieving the effect of improving universal applicability.

[0037] Furthermore, the bearing plate 200 is made of metal material. Compared with the air bearing made of graphite and ceramic, the bearing plate 200 of this embodiment is easier to be ground to the required flatness, which is beneficial to shorten the grinding cycle and improve the production efficiency.

[0038] Specifically, the universal base 100 is provided with a first air duct connected to the first air inlet 110, and the first air duct is provided with an air outlet; the bearing plate 200 is provided with a second air duct connected to the throttle hole 210, the second air duct is provided with a second air inlet, and the second air inlet is connected to the air outlet.

[0039] In some embodiments, the first air duct and the second air duct are matched in a concave-convex manner and sealed between the universal base 100 and the bearing plate 200. The concave-convex fit is conducive to quickly positioning the first air duct and the second air duct, thereby reducing the difficulty of installation and facilitating rapid assembly. In addition, the first air duct and the second air duct are hidden between the universal base 100 and the bearing plate 200, which can effectively protect the air duct structure, thereby improving the overall service life and reliability.

[0040] In some embodiments, the first air duct and the second air duct are both annular in shape. The annular design of the first air duct and the second air duct has low processing difficulty, which is beneficial to improving processing efficiency and saving processing costs, and further achieves a seamless assembly effect through concave-convex matching.

[0041] In certain embodiments, referring to Figure 2 The inner and outer rings of the second air passage are both provided with sealing rings 220, which can prevent gas leakage, thereby ensuring that the air bearing forms a stable air film on the supporting surface, thereby ensuring the smooth movement of the air bearing.

[0042] In some embodiments, the bearing sheet 200 is fixedly connected to the universal base 100 by screws. The screw connection has high reliability and can prevent the bearing sheet 200 from accidentally falling off after long-term use.

[0043] In certain embodiments, referring to Figure 1 and attached Figure 2 A ball screw 300 is movably connected to the side of the universal base 100 facing away from the bearing sheet 200 , and the ball screw 300 can be universally adjusted relative to the universal base 100 .

[0044] In this embodiment, the ball screw 300 is installed on the universal base 100 so that the universal base 100 and the bearing plate 200 can be universally adjusted, which helps to ensure that the bearing plate 200 always remains parallel to the supporting surface during operation, thereby facilitating accurate and stable movement.

[0045] In certain embodiments, referring to Figure 2A spherical groove 120 is provided on the side of the universal base 100 facing away from the bearing plate 200 and a fixing bracket 400 is installed thereon. The fixing bracket 400 is used to limit the ball head end of the ball head screw 300 in the spherical groove 120 .

[0046] In this embodiment, although the ball end of the ball screw 300 is limited in the spherical groove 120, it can still be universally adjusted relative to the universal base 100, and the function of the fixing bracket 400 is only to prevent the ball screw 300 from accidentally falling off during operation. In actual application, the ball end of the ball screw 300 has enough freedom to adjust the posture of the bearing sheet 200 and keep it parallel to the supporting surface, and the other end of the ball screw 300 is fixedly connected to the sliding platform 700, ensuring that the sliding platform 700 moves smoothly without friction and wear.

[0047] Reference Figure 7 The present invention provides a hydrostatic air-floating motion platform, including the split hydrostatic plane air-floating bearing in the above-mentioned embodiment.

[0048] In some embodiments, the hydrostatic air floating motion platform also includes a guide rail 600 and a sliding platform 700. The sliding platform 700 semi-surrounds the guide rail 600 and all sides close to the guide rail 600 are installed with split hydrostatic planar air floating bearings 500. The sliding platform 700 is slidably arranged on the guide rail 600 through the air film formed between the split hydrostatic planar air floating bearing 500 and the guide rail 600 and can move back and forth along the length direction of the guide rail 600.

[0049] In this embodiment, by changing the shape and number of the throttle holes 210, various bearing plates 200 can be obtained to adapt to the application and needs of different scenarios. For example, the throttle holes can be in the form of micropores, microgrooves, and microcavities (see Appendix Figure 3 , Attachment Figure 4 , Attachment Figure 5 and attached Figure 6 ), the throttle hole in the form of micro grooves can make the gas more evenly distributed and diffused to the outer peripheral side of the air bearing, thereby improving the rigidity and stability of the air bearing. The throttle hole 210 can be obtained by CNC precision machining. The aperture diameter of the throttle hole 210 in the form of micro holes is generally between 0.1mm-0.5mm; the groove depth of the throttle hole 210 in the form of micro grooves is 0.3mm-0.5mm, and the micro groove width is 0.3mm-0.5mm; the cavity diameter of the throttle hole 210 in the form of micro cavity is generally between 0.5mm-1mm, and the cavity thickness is between 0.1mm-0.5mm.

[0050] In the description of this specification, the description with reference to the terms "one embodiment", "certain embodiments", "illustrative embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials, or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described may be combined in any one or more embodiments or examples in a suitable manner.

[0051] The above are only some embodiments of the present invention. For those skilled in the art, several modifications and improvements can be made without departing from the creative concept of the present invention, which all belong to the protection scope of the present invention.

Claims

1. A split type static pressure plane air bearing, characterized in that: include: A universal base (100), wherein the universal base (100) is provided with a first gas inlet (110) for inputting gas; A bearing sheet (200), wherein the bearing sheet (200) is detachably connected to the universal base (100) and a throttle hole (210) is provided on the end surface facing away from the universal base (100), wherein the throttle hole (210) is connected to the first air inlet (110) through an air passage between the universal base (100) and the bearing sheet (200); the bearing sheet (200) ejects gas through the throttle hole (210) so that an air film is formed on the end surface facing away from the universal base (100).

2. The split type static pressure plane air bearing according to claim 1, characterized in that: The universal base (100) is provided with a first air passage connected to the first air inlet (110), and the first air passage is provided with an air outlet; the bearing sheet (200) is provided with a second air passage connected to the throttle hole (210), and the second air passage is provided with a second air inlet, and the second air inlet is connected to the air outlet.

3. The split type static pressure plane air bearing according to claim 2, characterized in that: The first air channel and the second air channel are matched in a concave-convex manner and are sealed between the universal base (100) and the bearing sheet (200).

4. The split type static pressure plane air bearing according to claim 3 is characterized in that: The first air channel and the second air channel are both ring-shaped.

5. The split type static pressure plane air bearing according to claim 4, characterized in that: Sealing rings (220) are provided on both the inner circle side and the outer circle side of the second air passage.

6. The split type static pressure plane air bearing according to claim 1, characterized in that: The bearing sheet (200) is fixedly connected to the universal base (100) via screws.

7. The split type static pressure plane air bearing according to claim 1, characterized in that: A ball screw (300) is movably connected to a side of the universal base (100) facing away from the bearing sheet (200), and the ball screw (300) can be universally adjusted relative to the universal base (100).

8. The split type static pressure plane air bearing according to claim 7, characterized in that: A spherical groove (120) is provided on a side of the universal base (100) facing away from the bearing plate (200) and a fixing bracket (400) is installed thereon, the fixing bracket (400) being used to limit the ball head end of the ball head screw (300) within the spherical groove (120).

9. A static pressure air floating motion platform, characterized in that: It comprises the split type static pressure plane type air bearing (500) as claimed in any one of claims 1 to 8.

10. The static pressure air floating motion platform according to claim 9, characterized in that: It also comprises a guide rail (600) and a sliding platform (700), wherein the sliding platform (700) half-surrounds the guide rail (600) and all sides close to the guide rail (600) are installed with the split type static pressure plane type air floating bearing (500), and the sliding platform (700) is slidingly arranged on the guide rail (600) through the air film formed between the split type static pressure plane type air floating bearing (500) and the guide rail (600), and can reciprocate along the length direction of the guide rail (600).

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