Direct-driven regulating valve

Abstract

The invention discloses a direct-driven regulating valve which is particularly suitable for an RPS bypass pipeline. The direct-driven regulating valve comprises a valve body base, a valve body and a valve plate. The valve body and the valve body base are integrally and vertically connected with each other, and the valve plate is located in the valve body; the valve body comprises a magnetic encoder, a first radial magnetic suspension bearing, a stator, a second radial magnetic suspension bearing and an axial magnetic suspension bearing, wherein the magnetic encoder, the first radial magnetic suspension bearing, the stator and the second radial magnetic suspension bearing are located above the valve body base and are sequentially arranged from top to bottom, and the axial magnetic suspension bearing is located below the valve body base. The valve plate is controlled by radial suspension of the first radial magnetic suspension bearing and the second radial magnetic suspension bearing and axial suspension of the axial magnetic suspension bearing, is driven by the stator to rotate, and adjusts flow resistance according to a detection signal of the magnetic encoder.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor equipment manufacturing, and in particular to a regulating valve. Background Art

[0002] The existing remote plasma bypass or cross pipe regulating valves mostly use Mini GV, angle valves, and magnetic coupling valves. The internal transmission support rod of the angle valve uses an O-ring for dynamic sealing, which is easily affected by both plasma and temperature, has a short service life, and is also prone to generate particulate matter. Therefore, the angle valve can only perform a switch function and cannot stop in the middle to adjust the flow resistance. The magnetic coupling valve uses a swing cylinder, and the cylinder rotation has a swing error of ±4°, which affects the accuracy of the switch, and also cannot adjust the opening and flow resistance.

[0003] Therefore, there is an urgent need for a regulating valve that can reduce the generation of particulate matter, reduce rotational friction, reduce the cumulative error of the transmission mechanism and can adjust the flow resistance. Summary of the invention

[0004] In order to overcome the defects of the prior art, the present invention provides a direct-drive regulating valve, which is particularly suitable for an RPS bypass pipeline.

[0005] The direct-drive regulating valve of the present invention comprises: a valve body base, a valve body and a valve plate.

[0006] The valve body and the valve body base are integrally connected vertically to each other, and the valve plate is located inside the valve body.

[0007] The valve body comprises a magnetic encoder, a first radial magnetic suspension bearing, a stator, a second radial magnetic suspension bearing, and an axial magnetic suspension bearing located below the valve body base, which are arranged in sequence from top to bottom.

[0008] The valve plate is controlled by radial suspension of the first radial magnetic suspension bearing and the second radial magnetic suspension bearing and by axial suspension of the axial magnetic suspension bearing, and is driven by the stator to rotate, and the flow resistance is adjusted according to the detection signal of the magnetic encoder.

[0009] In one embodiment, the first radial magnetic bearing comprises a first group of electromagnetic coils for magnetic suspension drive and a first group of radial eddy current sensors arranged radially.

[0010] The first group of electromagnetic coils are distributed in a circumferential direction and are located close to the valve plate side.

[0011] The first group of radial eddy current sensors detects the suspended radial eccentricity state of the valve plate in real time.

[0012] In one embodiment, the second radial magnetic bearing comprises a second group of electromagnetic coils for magnetic suspension drive and a second group of radial eddy current sensors arranged radially.

[0013] The second group of electromagnetic coils are distributed in the circumferential direction and are located close to the valve plate side.

[0014] The second group of radial eddy current sensors detects the suspended radial eccentricity state of the valve plate in real time.

[0015] In one embodiment, the axial magnetic suspension bearing comprises: an axial electromagnetic coil for magnetic suspension drive and an axially arranged axial eddy current sensor.

[0016] The axial electromagnetic coil is located below the bottom of the valve plate.

[0017] The axial eddy current sensor detects the suspended axial eccentricity state of the valve plate in real time.

[0018] In one embodiment, the magnetic encoder detects the rotation angle of the valve body; a stator coil is provided inside the stator, and the current passing through the stator coil is controlled according to the rotation angle detected by the magnetic encoder to adjust the current rotation angle of the valve plate to achieve flow resistance regulation.

[0019] In one embodiment, the flow resistance is adjusted in a manner of precisely adjusting the desired rotation angle of the valve plate by adjusting the number of current pulses supplied to the stator coil when the valve plate rotates one circle.

[0020] In one embodiment, the valve plate includes a top permanent magnet, a first group of circumferentially distributed permanent magnets, a third group of circumferentially distributed permanent magnets, a second group of circumferentially distributed permanent magnets, a valve plate block, and a bottom permanent magnet distributed from top to bottom.

[0021] In one embodiment, the valve block is located in a gas passage where the valve body base and the valve body meet.

[0022] In one embodiment, the top permanent magnet is located below the magnetic encoder to provide a magnetic pole signal to the magnetic encoder.

[0023] In one embodiment, the positions of the first group of circumferentially distributed permanent magnets correspond to the positions of the electromagnetic coils of the first radial magnetic bearing, serving as the internal magnetic field of the first radial magnetic bearing to provide a first radial force acting on the valve plate.

[0024] In one embodiment, the position of the second group of circumferentially distributed permanent magnets corresponds to the position of the electromagnetic coil of the second radial magnetic bearing, serving as the internal magnetic field of the second radial magnetic bearing to provide a second radial force acting on the valve plate.

[0025] In one embodiment, the third group of circumferentially distributed permanent magnets are located at positions corresponding to the stator coils of the stator, and are used to cooperate with the stator coils to drive the valve plate to rotate.

[0026] In one embodiment, the bottom permanent magnet is located above the electromagnetic coil of the axial magnetic bearing, and serves as the axial magnetic field of the axial magnetic bearing to provide an axial force acting on the valve plate.

[0027] In one embodiment, an O-ring is further provided at the junction of the valve body and the valve body base, working in a static sealing state.

[0028] In one embodiment, the valve body base has a gas channel and three ports inside; the gas channel has a valve plate rotation space inside; two of the three ports are ports for external pipelines, serving as gas inlet and outlet; the other port is provided with a transparent observation window, and a visual sensor monitors the rotation angle or working status of the valve plate through the transparent observation window.

[0029] The direct-drive regulating valve of the present invention has the following beneficial technical effects:

[0030] Firstly, the valve plate and the motor rotor are combined into one-part design, there is no cumulative error in the transmission mechanism, there is no contact in the rotating parts, and the O-ring works in a static sealing state.

[0031] Secondly, the valve plate can work in three states: open, closed, and flow resistance adjustment.

[0032] Third, a magnetic encoder is used to detect the position of the valve plate (direct drive motor) in real time to control the flow resistance in real time.

[0033] Fourthly, the use of magnetic levitation shaft can eliminate the hidden danger of particulate matter. BRIEF DESCRIPTION OF THE DRAWINGS

[0034] The above invention content and the following specific embodiments of the present invention will be better understood when read in conjunction with the accompanying drawings. It should be noted that the accompanying drawings are only examples of the claimed invention. In the accompanying drawings, the same reference numerals represent the same or similar elements.

[0035] Figure 1 An overall schematic diagram of a direct-drive regulating valve according to an embodiment of the present invention is shown;

[0036] Figure 2 A cross-sectional view of a direct-drive regulating valve according to an embodiment of the present invention is shown.

[0037] Figure 3 A cross-sectional view of a direct-drive regulating valve according to an embodiment of the present invention is shown.

[0038] Figure 4 A cross-sectional view of a direct-drive regulating valve according to an embodiment of the present invention is shown.

[0039] Figure 5 A top cross-sectional view of a first radial magnetic bearing or a second radial magnetic bearing according to an embodiment of the present invention is shown.

[0040] Figure 6 A top cross-sectional view of a stator according to an embodiment of the present invention is shown. DETAILED DESCRIPTION

[0041] The detailed features and advantages of the present invention are described in detail in the specific embodiments below, and the content is sufficient to enable any person skilled in the art to understand the technical content of the present invention and implement it accordingly, and according to the description, claims and drawings disclosed in this specification, those skilled in the art can easily understand the relevant purposes and advantages of the present invention. Although the description of the present invention will be introduced in conjunction with the preferred embodiment, this does not mean that the features of this invention are limited to this embodiment. On the contrary, the purpose of introducing the invention in conjunction with the embodiment is to cover other options or modifications that may be extended based on the claims of the present invention. In order to provide a deep understanding of the present invention, many specific details will be included in the following description. The present invention can also be implemented without using these details. In addition, in order to avoid confusion or blurring the focus of the present invention, some specific details will be omitted in the description.

[0042] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0043] In addition, the terms "upper", "lower", "left", "right", "top", "bottom", "horizontal" and "vertical" used in the following description should be understood as the directions shown in the paragraph and the related drawings. Such relative terms are only used for the convenience of description and do not mean that the device described therein must be manufactured or operated in a specific direction, and therefore should not be understood as limiting the present invention.

[0044] It is understood that although the terms "first", "second", "third", etc. may be used herein to describe various components, channels, components, regions, layers and / or parts, these components, channels, components, regions, layers and / or parts should not be limited by these terms, and these terms are only used to distinguish different components, channels, components, regions, layers and / or parts. In addition, the terms "first", "second", "third" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance.

[0045] As shown in this application and claims, unless the context clearly indicates an exception, the words "a", "an", "an" and / or "the" do not refer to the singular and may also include the plural. Generally speaking, the terms "include" and "comprise" only indicate the inclusion of the steps and elements that have been clearly identified, and these steps and elements do not constitute an exclusive list. The method or device may also include other steps or elements.

[0046] In some embodiments, numbers describing the number of components and attributes are used. It should be understood that such numbers used in the description of the embodiments are modified by the modifiers "about", "approximately" or "substantially" in some examples. Unless otherwise specified, "about", "approximately" or "substantially" indicate that the numbers are allowed to vary by ±20%. Accordingly, in some embodiments, the numerical parameters used in the specification and claims are approximate values, which may change according to the required features of individual embodiments. In some embodiments, the numerical parameters should take into account the specified significant digits and adopt the general method of retaining digits. Although the numerical domains and parameters used to confirm the breadth of their range in some embodiments of the present application are approximate values, in specific embodiments, the setting of such numerical values ​​is as accurate as possible within the feasible range.

[0047] At the same time, the present application uses specific words to describe the embodiments of the present application. For example, "one embodiment", "an embodiment", and / or "some embodiments" refer to a certain feature, structure or characteristic related to at least one embodiment of the present application. Therefore, it should be emphasized and noted that "one embodiment" or "an embodiment" or "an alternative embodiment" mentioned twice or more in different positions in this specification does not necessarily refer to the same embodiment. In addition, some features, structures or characteristics in one or more embodiments of the present application can be appropriately combined.

[0048] Figure 1The overall schematic diagram of a direct-drive regulating valve according to an embodiment of the present invention is shown. The direct-drive regulating valve does not require a traditional rotary cylinder, and uses the valve plate itself as the rotor of the motor. The stator coil around the outer ring of the valve plate is supplied with current to generate a driving force, so that the valve plate rotates. In addition, the valve body located outside the valve plate has two radial magnetic bearings and an axial magnetic bearing, so that the valve plate can maintain its position in the vertical direction and the radial direction. According to the signal feedback of the radial and axial eddy current sensors, the radial and axial displacements of the valve plate can be precisely controlled.

[0049] The direct-drive regulating valve includes, but is not limited to, a valve body base 101, a valve body 102, a valve plate 115 (such as Figure 2 The valve body 102 and the valve body base 101 are integrally connected vertically to each other. The valve plate 115 is located in the inner space of the valve body 102.

[0050] The valve body base 101 has a gas channel and three ports 103, 104, and 105 inside. The gas channel has a space for the valve plate to rotate. Two of the three ports 103 and 104 are ports for external pipelines, serving as gas inlet and outlet. The other port 105 is provided with a transparent observation window, through which a visual sensor (not shown) can monitor the internal conditions of the valve body, such as the rotation angle position or movement state of the internal valve plate.

[0051] exist Figure 1 In the example shown, the gas passage inside the valve body base 101 is L-shaped. Figure 1 The control valve shown can be used as a bypass control valve.

[0052] It should be pointed out that after the port position of the control valve of the present invention is modified, the control valve of the present invention can also be applied to a cross-pipe control valve.

[0053] The valve body 102 includes, from top to bottom, a magnetic encoder 106, a first radial magnetic bearing 107, a stator 108, a second radial magnetic bearing 109, and an axial magnetic bearing 110. The magnetic encoder 106, the first radial magnetic bearing 107, the stator 108, and the second radial magnetic bearing 109 are located above the valve body base 101, and the axial magnetic bearing 110 is located below the valve body base 101.

[0054] In addition, an O-ring is provided at the junction of the valve body 102 and the valve body base 101 (see Figure 3 and Figure 4 301), since the rotating parts of the present invention have no contact, the O-ring does not act as a dynamic seal, but works in a static seal state.

[0055] The magnetic encoder 106 detects the magnetic pole signal of the permanent magnet on the upper part of the valve plate and detects the position of the valve plate (ie, the rotation angle) in real time to facilitate the determination of the working state of the regulating valve: open state, closed state or flow resistance adjustment state.

[0056] The first radial magnetic bearing 107 is used for radial suspension control of the valve plate.

[0057] The second radial magnetic bearing 109 is used for radial suspension control of the valve plate.

[0058] By providing two radial magnetic bearings, the radial force of the valve plate can be better controlled and the radial deviation can be reduced.

[0059] The stator 108 is located between the first radial magnetic bearing 107 and the second radial magnetic bearing 109 and is used to rotationally drive the valve plate.

[0060] The axial magnetic bearing 110 is used for axial suspension control of the valve plate.

[0061] Figure 2 , Figure 3 and Figure 4 The invention shows cross-sectional views of a direct-drive regulating valve at different viewing angles according to an embodiment of the present invention.

[0062] Figure 5 A top cross-sectional view of a first radial magnetic bearing or a second radial magnetic bearing according to an embodiment of the present invention is shown.

[0063] like Figure 5 As shown, the first radial magnetic bearing 107 includes a first group of electromagnetic coils 113 for magnetic suspension drive, which are circumferentially distributed and located close to the inner valve plate side. The first radial magnetic bearing 107 also includes a first group of radial eddy current sensors 111 arranged radially to detect the suspension radial eccentricity state of the valve plate in real time. According to the detection signal fed back by the first group of radial eddy current sensors 111, the suspension radial eccentricity degree of the valve plate can be adjusted accordingly.

[0064] In one embodiment, the first group of radial eddy current sensors 111 includes four equidistantly distributed radial eddy current sensors.

[0065] The second radial magnetic bearing 109 includes a second set of electromagnetic coils 114 for magnetic suspension drive, which are circumferentially distributed and located close to the inner valve plate side. The second radial magnetic bearing 109 also includes a second set of radial eddy current sensors 112 arranged radially to detect the suspension radial eccentricity state of the valve plate in real time. The suspension radial eccentricity of the valve plate can be adjusted accordingly according to the detection signal fed back by the second set of radial eddy current sensors 112.

[0066] In one embodiment, the second group of radial eddy current sensors 112 includes four equidistantly distributed radial eddy current sensors.

[0067] return Figures 2 to 4 The axial magnetic suspension bearing 110 includes an axial electromagnetic coil 207 for magnetic suspension drive, and the axial electromagnetic coil 207 is located below the bottom of the valve plate. The axial magnetic suspension bearing 110 also includes an axial eddy current sensor 208 arranged axially to detect the suspension axial eccentricity of the valve plate in real time. According to the detection signal fed back by the axial eddy current sensor 208, the suspension axial eccentricity of the valve plate can be adjusted accordingly.

[0068] Figure 6 A top cross-sectional view of a stator according to an embodiment of the present invention is shown.

[0069] like Figure 6 As shown, the stator 108 has a stator coil 116 inside for driving rotation. After the stator coil 116 is passed with current, it can drive the valve plate 115 to rotate.

[0070] return Figures 2 to 4 The valve plate 115 is used as a suspension body, and permanent magnets corresponding to the first radial magnetic suspension bearing 107, the second radial magnetic suspension bearing 109, and the axial magnetic suspension bearing 110 are respectively arranged at corresponding positions. When the permanent magnets interact magnetically with the electromagnetic coils in each magnetic suspension bearing, the suspension body is subjected to axial and radial forces, thereby achieving suspension. The suspension height and radial eccentricity of the valve plate are related to the magnitude of the current passed by the electromagnetic coil. The magnitude of the current can be adjusted according to the suspension height and suspension radial eccentricity measured by the sensor, so as to adjust the suspension height and suspension radial eccentricity of the valve plate.

[0071] In addition, the valve plate 115 serves as the rotor of the direct drive motor, and is provided with a permanent magnet corresponding to the stator 108 at a corresponding position. The valve plate 115 is driven by the stator 108 to rotate to realize the opening, closing and flow resistance adjustment of the regulating valve.

[0072] The valve plate 115 includes, distributed from top to bottom, a top permanent magnet 201 , a first group of circumferentially distributed permanent magnets 202 , a third group of circumferentially distributed permanent magnets 203 , a second group of circumferentially distributed permanent magnets 204 , a valve plate 205 , and a bottom permanent magnet 206 .

[0073] The valve plate 205 is located in the gas passage where the valve body base 101 and the valve body 102 intersect, and controls the on-off of the gas passage.

[0074] The top permanent magnet 201 is located below the magnetic encoder 106 and is used to provide a magnetic pole signal to the magnetic encoder 106 .

[0075] The first group of circumferentially distributed permanent magnets 202 are located at positions corresponding to the positions of the electromagnetic coils of the first radial magnetic bearing 107 , and serve as the internal magnetic field of the first radial magnetic bearing 107 to provide a first radial force acting on the valve plate.

[0076] The second group of circumferentially distributed permanent magnets 204 are located at positions corresponding to the positions of the electromagnetic coils of the second radial magnetic bearing 109 , and serve as the internal magnetic field of the second radial magnetic bearing 109 to provide a second radial force acting on the valve plate.

[0077] The position of the third group of circumferentially distributed permanent magnets 203 corresponds to the position of the stator coil 116 of the stator 108, and is used to cooperate with the stator coil to drive the valve plate to rotate.

[0078] The position of the bottom permanent magnet 206 corresponds to the position of the electromagnetic coil of the axial magnetic bearing 110 , and serves as the axial magnetic field of the axial magnetic bearing 110 to provide a vertical force acting on the valve plate.

[0079] like Figure 2 and Figure 3 The regulating valve shown is in an open state, the valve plate 205 is parallel to the air inlet direction, and the gas flow resistance in the internal gas channel of the valve body is minimal. Figure 2 and Figure 3 On the basis, after the valve plate is rotated 90 degrees, that is, the valve plate 205 is 90 degrees with the air inlet direction, the valve plate will block the internal gas channel, and the regulating valve is in a closed state. Figure 4 The state between the open state and the closed state is the flow resistance adjustment state.

[0080] The present invention can accurately adjust the rotation angle of the valve plate by adjusting the current passed into the stator coil to achieve the adjustment of the flow resistance. Specifically, the current rotation angle of the valve plate can be adjusted according to the detection signal fed back by the magnetic encoder. For example, the number of pulses passed into the valve plate when it rotates one circle can be controlled to achieve the angle to be adjusted.

[0081] The direct-drive regulating valve of the present invention has the following beneficial technical effects:

[0082] Firstly, the valve plate and the motor rotor are combined into one-part design, there is no cumulative error in the transmission mechanism, there is no contact in the rotating parts, and the O-ring works in a static sealing state.

[0083] Secondly, the valve plate can work in three states: open, closed, and flow resistance adjustment.

[0084] Third, a magnetic encoder is used to detect the position of the valve plate (direct drive motor) in real time to control the flow resistance in real time.

[0085] Fourthly, the use of magnetic levitation shaft can eliminate the hidden danger of particulate matter.

[0086] The terms and expressions used above are for descriptive purposes only, and the present invention should not be limited to these terms and expressions. The use of these terms and expressions does not mean to exclude any equivalent features of the illustrations and descriptions (or parts thereof), and it should be recognized that various modifications that may exist should also be included in the scope of the claims. Other modifications, changes and substitutions may also exist. Accordingly, the claims should be deemed to cover all such equivalents.

[0087] Similarly, it should be noted that in order to simplify the description of the disclosure of this application and thus facilitate the understanding of one or more embodiments of the invention, in the foregoing description of the embodiments of this application, multiple features are sometimes combined into one embodiment, drawing or description thereof. However, this disclosure method does not mean that the features required by the object of this application are more than the features mentioned in the claims.

[0088] Similarly, it should be pointed out that although the present invention has been described with reference to the current specific embodiments, ordinary technicians in this technical field should realize that the above embodiments are only used to illustrate the present invention, and various equivalent changes or substitutions may be made without departing from the spirit of the present invention. Therefore, as long as the changes and modifications to the above embodiments are within the scope of the essential spirit of the present invention, they will fall within the scope of the claims of this application.

Claims

1. A direct-drive regulating valve, characterized in that: include: Valve body base, valve body and valve plate; The valve body and the valve body base are integrally connected vertically to each other, and the valve plate is located inside the valve body; The valve body comprises a magnetic encoder, a first radial magnetic bearing, a stator, a second radial magnetic bearing, and an axial magnetic bearing located below the valve body base, which are arranged in sequence from top to bottom; The valve plate is controlled by radial suspension of the first radial magnetic suspension bearing and the second radial magnetic suspension bearing and by axial suspension of the axial magnetic suspension bearing, and is driven by the stator to rotate, and the flow resistance is adjusted according to the detection signal of the magnetic encoder.

2. The direct-drive regulating valve according to claim 1, characterized in that: The first radial magnetic bearing comprises: a first group of electromagnetic coils for magnetic levitation driving, wherein the first group of electromagnetic coils are circumferentially distributed and located close to the valve plate; and A first group of radial eddy current sensors arranged radially detects the suspended radial eccentricity state of the valve plate in real time.

3. The direct-drive regulating valve according to claim 1, characterized in that: The second radial magnetic bearing comprises: a second group of electromagnetic coils for magnetic levitation driving, the second group of electromagnetic coils being distributed circumferentially and located close to the valve plate side; and A second group of radial eddy current sensors arranged radially detects the suspended radial eccentricity state of the valve plate in real time.

4. The direct-drive regulating valve according to claim 1, characterized in that: The axial magnetic bearing comprises: An axial electromagnetic coil for magnetic suspension drive, the axial electromagnetic coil being located below the bottom of the valve plate; and An axial eddy current sensor arranged axially detects the suspended axial eccentricity state of the valve plate in real time.

5. The direct-drive regulating valve according to claim 1, characterized in that: The magnetic encoder detects the rotation angle of the valve body; the stator has a stator coil inside, and the current passing through the stator coil is controlled according to the rotation angle detected by the magnetic encoder to adjust the current rotation angle of the valve plate to achieve flow resistance regulation.

6. The direct-drive regulating valve according to claim 5, characterized in that: The flow resistance regulation is precisely adjusted to a desired rotation angle of the valve plate by adjusting the number of current pulses introduced into the stator coil when the valve plate rotates one circle.

7. The direct-drive regulating valve according to claim 1, characterized in that: The valve plate includes a top permanent magnet distributed from top to bottom, a first group of circumferentially distributed permanent magnets, a third group of circumferentially distributed permanent magnets, a second group of circumferentially distributed permanent magnets, a valve plate block and a bottom permanent magnet.

8. The direct-drive regulating valve according to claim 7, characterized in that: The valve plate is located in the gas passage where the valve body base and the valve body intersect; The top permanent magnet is located below the magnetic encoder and provides a magnetic pole signal to the magnetic encoder; The position of the first group of circumferentially distributed permanent magnets corresponds to the position of the electromagnetic coil of the first radial magnetic bearing, serving as the internal magnetic field of the first radial magnetic bearing to provide a first radial force acting on the valve plate; The position of the second group of circumferentially distributed permanent magnets corresponds to the position of the electromagnetic coil of the second radial magnetic bearing, serving as the internal magnetic field of the second radial magnetic bearing to provide a second radial force acting on the valve plate; The position of the third group of circumferentially distributed permanent magnets corresponds to the position of the stator coil of the stator, and is used to cooperate with the stator coil to drive the valve plate to rotate; The bottom permanent magnet is located above the electromagnetic coil of the axial magnetic bearing, and serves as the axial magnetic field of the axial magnetic bearing to provide an axial force acting on the valve plate.

9. The direct-drive regulating valve according to claim 1, characterized in that: An O-type rubber ring is also provided at the junction of the valve body and the valve body base, working in a static sealing state.

10. The direct-drive regulating valve according to claim 1, characterized in that: The valve body base has a gas channel and three ports inside; the gas channel has a valve plate rotation space inside; two of the three ports are ports for external pipelines, serving as gas inlet and outlet; the other port is provided with a transparent observation window, and a visual sensor monitors the rotation angle or working status of the valve plate through the transparent observation window.

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