Defect detection device and detection method for nitride ceramic substrate

Abstract

The invention discloses a defect detection device and method for nitride ceramic substrates, and relates to the technical field of detection devices.The defect detection device comprises a workbench, three substrate placement assemblies are arranged on the upper end face of the workbench, a transfer plate is arranged on the workbench, a mounting plate is movably arranged on the workbench, and an air cylinder is fixed to one side of the mounting plate; a first connecting plate is fixed to the tail end of the telescopic end of the air cylinder, a first feeding adsorption assembly and a first discharging adsorption assembly are symmetrically arranged on the lower end face of the first connecting plate, two detection assemblies are arranged on the workbench, a multi-axis mechanical arm is further arranged on the workbench, and a steering motor is fixed to the tail end of the multi-axis mechanical arm. A carrying electric push rod is fixedly arranged at the working end of the steering motor, a second connecting plate is fixed to the tail end of the telescopic end of the carrying electric push rod, and a second feeding adsorption assembly and a second discharging adsorption assembly are symmetrically arranged on the lower end face of the second connecting plate. When the device is used, feeding and discharging of the ceramic substrate body are facilitated, and therefore the detection efficiency of the detection method is high.

Description

Technical Field

[0001] The present invention relates to the technical field of detection devices, and in particular to a defect detection device and a detection method for a nitride ceramic substrate. Background Art

[0002] Ceramic substrate refers to a special process board in which copper foil is directly bonded to the surface (single or double sides) of a ceramic substrate such as alumina or aluminum nitride at high temperature. The ultra-thin composite substrate has excellent electrical insulation properties, high thermal conductivity, excellent soft solderability and high adhesion strength. It can be etched with various patterns like PCB boards and has a large current carrying capacity. Nitride ceramic substrate is a ceramic substrate with refractory compounds of nitrogen and metal or non-metal elements combined by covalent bonds as the main component, and has a series of excellent properties.

[0003] After the production of ceramic substrates is completed, they need to be tested to determine whether they are qualified. Currently, the voltage resistance test is widely used in the substrate industry as an intuitive judgment method. When the existing detection device is in use, the electrode detection component is used to power on the ceramic substrate to be tested. When testing large quantities of ceramic substrates, the efficiency of loading and unloading the ceramic substrates is low, resulting in low detection efficiency. Summary of the invention

[0004] The purpose of the present invention is to solve the problems existing in the prior art: When the existing detection device detects the ceramic substrate through the electrode detection component, the loading and unloading efficiency of the ceramic substrate is low.

[0005] A defect detection device and a defect detection method for a nitride ceramic substrate are proposed.

[0006] In order to achieve the above object, the present invention adopts the following technical solutions: A defect detection device for a nitride ceramic substrate comprises a workbench, wherein the upper end surface of the workbench is provided with three substrate placement components, a transfer plate is provided on the workbench, a mounting plate is movably provided on the workbench, a cylinder is fixed on one side of the mounting plate, a connecting plate 1 is fixed to the end of the telescopic end of the cylinder, a loading adsorption component 1 and a unloading adsorption component 1 are symmetrically provided on the lower end surface of the connecting plate 1, two detection components are provided on the workbench, a multi-axis mechanical arm is also provided on the workbench, a steering motor is fixed to the end of the multi-axis mechanical arm, a transporting electric push rod is fixed to the working end of the steering motor, a connecting plate 2 is fixed to the end of the telescopic end of the transporting electric push rod, a loading adsorption component 2 and a unloading adsorption component 2 are symmetrically provided on the lower end surface of the connecting plate 2.

[0007] As a further technical solution of the present invention, each of the detection components includes a mounting frame fixed to one side of the workbench, a lower flat electrode is fixed to one side of the mounting frame, and an upper flat electrode is movably arranged directly above each lower flat electrode.

[0008] As a further technical solution of the present invention, two support frames are symmetrically fixed on the upper end surface of the workbench, and an electric guide rail 1 is fixed on the upper end surface of each support frame. The same movable seat is movably arranged on the two electric guide rails 1, an electric guide rail 2 is fixed on one side of the movable seat, and the mounting plate is movably arranged on one side of the electric guide rail 2.

[0009] As a further technical solution of the present invention, each of the substrate placement components includes two vertical mounting seats and two horizontal mounting seats, a lifting plate is movably arranged between the two vertical mounting seats and the two horizontal mounting seats, a lifting electric push rod used in conjunction with the lifting plate is arranged on the workbench, two vertical translation blocks are symmetrically and movably arranged between the two vertical mounting seats, a vertical baffle is fixed on the upper end surface of each vertical translation block, a vertical screw rod is rotatably arranged between the two vertical mounting seats, the vertical screw rod thread passes through the two vertical translation blocks, one end of the vertical screw rod rotates through the vertical mounting seats and is fixed with a handwheel, a vertical guide rod is fixed between the two vertical mounting seats, the vertical guide rod movably passes through the two vertical translation blocks, and a vertical movable slide rail used in conjunction with the vertical translation block is arranged on the upper end surface of the workbench.

[0010] As a further technical solution of the present invention, two transverse translation blocks are symmetrically and movably arranged between each pair of transverse mounting seats, a transverse baffle is fixed on the upper end surface of each transverse translation block, a transverse screw rod is rotatably arranged between the two transverse mounting seats, the transverse screw rod thread passes through the two transverse translation blocks, one end of the transverse screw rod rotates through the transverse mounting seat and is fixed with a handwheel 2, a transverse guide rod is fixed between the two transverse mounting seats, the transverse guide rod movably passes through the two transverse translation blocks, and a transverse moving slide rail used in conjunction with the transverse translation block is arranged on the upper end surface of the workbench.

[0011] As a further technical solution of the present invention, a limiting slide groove is provided on the upper end surface of the workbench, and a passive slider is slidably arranged in the limiting slide groove, a rack is fixed on the upper end surface of the passive slider, a transverse gear plate 1 is fixedly sleeved on the outer surface of the transverse screw rod near the rack, and the transverse gear plate 1 is meshingly connected to the rack, and an extension seat is fixedly arranged at one end of two transverse mounting seats near the rack, a worm is rotatably arranged between the two extension seats, one end of the worm rotates through the extension seat and is fixedly sleeved with a transverse gear plate 2, and the transverse gear plate 2 is meshingly connected to the rack, a worm wheel is fixedly sleeved on the outer surface of the vertical screw rod, and the worm wheel is meshingly connected to the worm, and a linkage assembly for use with the passive slider is arranged on the moving seat.

[0012] As a further technical solution of the present invention, the linkage assembly includes an active slider slidably arranged in a limiting slide groove, a connecting arm is fixed between the active slider and the movable seat, a sliding cavity is opened in the passive slider, a built-in slider is slidably arranged in the sliding cavity, a connecting column is fixed between the built-in slider and the active slider, and the connecting column movably passes through the sliding cavity.

[0013] As a further technical solution of the present invention, a placement rack is fixed to the upper end surface of the workbench, a transfer plate is arranged on the upper end surface of the placement rack, and two groups of auxiliary positioning components are arranged on the upper end surface of the transfer plate, each group of auxiliary positioning components includes a plurality of positioning wedge blocks fixed to the upper end surface of the transfer plate.

[0014] As a further technical solution of the present invention, the upper end surface of the placement rack is provided with a translation sliding groove, a translation sliding block is slidably arranged in the translation sliding groove, the transfer plate is fixed to the upper end surface of the translation sliding block, and two L-shaped connecting seats are symmetrically fixed on the side of the placement rack away from the connecting arm, a spring is fixed between each L-shaped connecting seat and the transfer plate, and two translation guide rods are symmetrically fixed on one side of the transfer plate, one end of each translation guide rod slides through the corresponding L-shaped connecting seat, and each spring is movably sleeved on the outer surface of the corresponding translation guide rod, an arc-shaped protrusion is fixed on the side of the transfer plate close to the connecting arm, a built-in groove is provided on one side of the connecting arm, a U-shaped rack is fixed on the inner wall of the built-in groove, and a resistance wheel is rotatably arranged on the inner wall of the U-shaped rack.

[0015] A detection method for a defect detection device of a nitride ceramic substrate, the specific operation steps of the method are: Step 1: The mounting plate moves with the cylinder, the connecting plate 1, the loading adsorption component 1 and the unloading adsorption component 1 to move the ceramic substrate body to be detected in the substrate placement component to the transfer plate, and then the multi-axis robot drives the steering motor, the handling electric push rod, the connecting plate 2, the loading adsorption component 2 and the unloading adsorption component 2 to move and cooperate to move the ceramic substrate body to be detected placed on the transfer plate to one of the detection components, and then according to this principle, the ceramic substrate body to be detected is also placed on the other detection component; Step 2: The multi-axis robot cooperates with the second connecting plate, the second loading adsorption component and the second unloading adsorption component to adsorb a ceramic substrate body to be detected again, and then approaches the detection component that works first. After the detection component finishes working, the second unloading adsorption component adsorbs the ceramic substrate body that has been detected, and then the steering motor drives the second connecting plate, the second loading adsorption component and the second unloading adsorption component to rotate 180° forward, so that the second loading adsorption component places the ceramic substrate body to be detected on the detection component, and then the steering motor drives the second connecting plate, the second loading adsorption component and the second unloading adsorption component to rotate 180° in the opposite direction, and then the multi-axis robot brings the second loading adsorption component, the second unloading adsorption component and the ceramic substrate body that has been detected close to the transfer plate; Step 3: When the multi-axis robot arm moves the loading adsorption component 2, the unloading adsorption component 2 and the inspected ceramic substrate body to the top of the transfer plate, the unloading adsorption component 2 cooperates with the handling electric push rod to place the inspected ceramic substrate body on the transfer plate, and the loading adsorption component 2 adsorbs the ceramic substrate body to be inspected placed on the transfer plate, and then replaces the ceramic substrate body on another inspection component; Step 4: The mounting plate moves the cylinder, the connecting plate 1, the loading adsorption component 1, the unloading adsorption component 1 and the ceramic substrate body to be inspected to the top of the transfer plate, and then the cylinder causes the connecting plate 1, the loading adsorption component 1 and the unloading adsorption component 1 to move downward, and then the loading adsorption component 1 releases the ceramic substrate body to be inspected. During this process, the unloading adsorption component 1 adsorbs the inspected ceramic substrate body placed on the transfer plate; Step 5: The mounting plate moves toward the substrate placement assembly with the cylinder, the connecting plate 1, the loading adsorption assembly 1, the unloading adsorption assembly 1 and the inspected ceramic substrate body, and then the unloading adsorption assembly 1 releases the inspected ceramic substrate body, and then the loading adsorption assembly 1 adsorbs the next ceramic substrate body to be inspected.

[0016] Beneficial effects of the present invention: 1. The multi-axis robot cooperates with the connecting plate 2, the loading adsorption component 2 and the unloading adsorption component 2 to adsorb a ceramic substrate body to be detected again, and then approaches the detection component that works first. At this time, the steering motor does not drive the connecting plate 2, the loading adsorption component 2 and the unloading adsorption component 2 to rotate. At this time, the detection component has finished working, and the multi-axis robot cooperates with the connecting plate 2, the loading adsorption component 2 and the unloading adsorption component 2 to move, prompting the unloading adsorption component 2 to move to the top of the ceramic substrate body that has been detected, and then adsorb the ceramic substrate body, and then the steering motor drives the connecting plate 2, the loading adsorption component 2 and the unloading adsorption component 2 to rotate 180° forward, prompting the loading adsorption component 2 to place the ceramic substrate body to be detected on the detection component, and then the steering motor drives the connecting plate 2, the loading adsorption component 2 and the unloading adsorption component 2 to rotate 180° in the opposite direction, and then the multi-axis robot carries the loading adsorption component 2, the unloading adsorption component 2 and the detected ceramic substrate body. The body is close to the transfer plate. During this process, the detection component works again. After the multi-axis robotic arm moves the loading adsorption component 2, the unloading adsorption component 2 and the detected ceramic substrate body to the top of the transfer plate, the unloading adsorption component 2 cooperates with the handling electric push rod to place the detected ceramic substrate body on the transfer plate. During this process, the loading adsorption component 2 adsorbs the ceramic substrate body to be detected placed on the transfer plate, and then replaces the ceramic substrate body on the second detection position. At this time, the mounting plate carries the cylinder, the connecting plate 1, the loading adsorption component 1, the unloading adsorption component 1 and the ceramic substrate body to be detected to the top of the transfer plate, and then the cylinder prompts the connecting plate 1, the loading adsorption component 1, and the unloading adsorption component 1 to move downward, and then the loading adsorption component 1 releases the ceramic substrate body to be detected. During this process, the unloading adsorption component 1 adsorbs the detected ceramic substrate body placed on the transfer plate. The detection component is loaded and unloaded in this cycle, and the work efficiency is high.

[0017] 2. In the initial state, the moving seat, the mounting plate with the cylinder, the connecting plate 1, the loading adsorption component 1 and the unloading adsorption component 1 are located between the transfer plate and the substrate placement component to avoid affecting the staff from placing the ceramic substrate body to be tested in the substrate placement component located on the far right. In the initial state, the two vertical baffles and the two horizontal baffles in the substrate placement component located on the far right are in a state of being away from each other to avoid affecting the placement of the ceramic substrate body. When the ceramic substrate bodies are stacked and placed on the upper end surface of the lifting plate, the sides of the ceramic substrate bodies in the stacked state are prone to unevenness. In order to avoid the following process (the lifting plate delivers the ceramic substrate body upward and the loading adsorption component 1 adsorbs When the ceramic substrate body is located at the top, the stacked ceramic substrate bodies tilt and collapse, and the inner walls of the vertical baffles and the horizontal baffles are scratched during the upward movement. Therefore, the moving seat will first move toward the direction of the transfer plate. During this process, the passive slider and the rack are driven to move forward through the linkage assembly, thereby driving the horizontal gear plate 1 and the horizontal screw to rotate, causing the two horizontal baffles to approach each other. During this process, the rack drives the horizontal gear plate 2 and the worm to rotate, thereby driving the worm wheel plate and the vertical screw to rotate, causing the two vertical baffles to approach each other. During the movement, the horizontal baffle and the vertical baffle will approach and contact the side walls of the ceramic substrate body, thereby centering the ceramic substrate body.

[0018] 3. When the moving seat, the mounting plate, the cylinder, the connecting plate 1, the loading adsorption component 1 and the unloading adsorption component 1 move toward the direction of the substrate placement component, the linkage component will drive the passive slider and the rack to move in the opposite direction, and through the cooperation of the horizontal gear plate 1 and the horizontal gear plate 2, the two horizontal baffles and the two vertical baffles are prompted to move away from the ceramic substrate body. When the loading adsorption component 1 is just moved above the ceramic substrate body, the horizontal baffle and the vertical baffle stop moving. At this time, there is a gap between the horizontal baffle and the vertical baffle and the side wall of the ceramic substrate body to prevent the loading adsorption component 1 from scratching the inner wall of the horizontal baffle or the vertical baffle during the upward movement of the ceramic substrate body when cooperating to adsorb the ceramic substrate body located on the top layer. In addition, according to the rhythm of the translation of the loading adsorption component 1, the ceramic substrate body to be inspected can be added to the substrate placement component located on the far right without stopping the machine. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 The overall structure of the present invention is shown in FIG. Figure 1 ; Figure 2 The overall structure of the present invention is shown in FIG. Figure 2 ; Figure 3 It is a schematic diagram of the connection between the mounting plate and the electric guide rail 2 in the present invention; Figure 4It is a schematic diagram of the connection between the steering motor and the multi-axis mechanical arm in the present invention; Figure 5 It is a schematic diagram of the connection between the mounting frame and the lower flat plate electrode in the present invention; Figure 6 It is a schematic diagram of the connection between the vertical translation block and the vertical baffle in the present invention; Figure 7 It is a schematic diagram of the connection between the rack and the transverse gear plate 1 in the present invention; Figure 8 The internal structure of the limiting slide in the present invention is shown in FIG. Figure 1 ; Fig. 9 The internal structure of the limiting slide in the present invention is shown in FIG. Figure 2 ; Fig.10 The internal structure of the limiting slide in the present invention is shown in FIG. Figure 3 ; Fig.11 It is a schematic diagram of the connection between the transfer plate and the placement rack in the present invention; Fig.12 It is a schematic diagram of the connection between the transfer plate and the arc-shaped protrusion in the present invention.

[0020] In the figure: 1. workbench; 2. substrate placement assembly; 3. transfer plate; 4. mounting plate; 5. cylinder; 6. connecting plate 1; 7. material loading adsorption assembly 1; 8. material unloading adsorption assembly 1; 9. multi-axis robot arm; 10. steering motor; 11. handling electric push rod; 12. connecting plate 2; 13. material loading adsorption assembly 2; 14. material unloading adsorption assembly 2; 15. mounting frame; 16. lower flat electrode; 17. upper flat electrode; 18. support frame; 19. electric guide rail 1; 20. moving seat; 21. electric guide rail 2; 22. vertical mounting seat; 23. horizontal mounting seat; 24. lifting plate; 25. vertical translation block; 26. vertical baffle; 27. vertical screw rod; 28. hand wheel 1; 29, vertical guide rod; 31, horizontal translation block; 32, horizontal baffle; 33, horizontal screw rod; 34, hand wheel two; 35, horizontal guide rod; 37, limit slide; 38, passive slider; 39, rack; 40, horizontal gear plate one; 41, extension seat; 42, worm; 43, horizontal gear plate two; 44, worm wheel; 45, active slider; 46, connecting arm; 47, sliding cavity; 48, built-in slider; 49, connecting column; 50, placement rack; 51, positioning wedge block; 52, translation sliding block; 53, L-shaped connecting seat; 54, spring; 55, translation guide rod; 56, arc-shaped protrusion; 57, U-shaped frame; 58, contact wheel; 59, ceramic substrate body. DETAILED DESCRIPTION

[0021] In order to further explain the technical means and effects adopted by the present invention to achieve the predetermined invention purpose, the specific implementation mode, structure, characteristics and effects of the present invention are described in detail below in combination with the accompanying drawings and preferred embodiments.

[0022] Reference Figure 1-Figure 12 A defect detection device for a nitride ceramic substrate comprises a workbench 1. Three substrate placement components 2 are arranged on the upper end surface of the workbench 1. The substrate placement component 2 located on the far right is used to receive and place a ceramic substrate body 59 to be detected (close to the side of the multi-axis robot 9), the substrate placement component 2 located in the middle position is used to receive and place a qualified ceramic substrate body 59 that has been inspected, and the substrate placement component 2 located on the far left is used to receive and place an unqualified ceramic substrate body 59 that has been inspected (close to the side of the detection component).

[0023] refer to Figure 1-Figure 4 , Figure 6 and Figure 7 A transfer plate 3 is provided on the workbench 1, a mounting plate 4 is movably provided on the workbench 1, a cylinder 5 is fixed on one side of the mounting plate 4, a connecting plate 6 is fixed to the end of the telescopic end of the cylinder 5, a loading adsorption component 7 and a unloading adsorption component 8 are symmetrically provided on the lower end surface of the connecting plate 6, two detection components are provided on the workbench 1, a multi-axis robotic arm 9 is also provided on the workbench 1, a steering motor 10 is fixed to the end of the multi-axis robotic arm 9, a transporting electric push rod 11 is fixed to the working end of the steering motor 10, a connecting plate 2 12 is fixed to the end of the telescopic end of the transporting electric push rod 11, a loading adsorption component 2 13 and a unloading adsorption component 2 14 are symmetrically provided on the lower end surface of the connecting plate 2 12, and the ceramic substrate body 59 is a nitride ceramic substrate.

[0024] The loading adsorption component 1 7, the unloading adsorption component 1 8, the loading adsorption component 2 13 and the unloading adsorption component 2 14 have the same structure and function and are all prior art, and adsorb the ceramic substrate body 59 through the principle of negative pressure adsorption, with specific reference to the principle of glass adsorption and transportation in the prior art (the specific structure can be a combination of a mounting block and a suction nozzle, the suction nozzle is fixed through the mounting block, and then the other end of the suction nozzle is connected to the exhaust equipment through a ventilation hose).

[0025] Reference Figure 1 , Figure 2 , Figure 3 , Figure 7 and Fig.12The transfer plate 3 is divided into a right loading area (the side close to the multi-axis robot 9) and a left unloading area (the side close to the detection component). The loading adsorption component 1 7 and the loading adsorption component 2 13 are used in conjunction with the right loading area to only process the ceramic substrate body 59 to be detected. The unloading adsorption component 1 8 and the unloading adsorption component 2 14 are used in conjunction with the left unloading area to only process the ceramic substrate body 59 that has been detected.

[0026] When in use, the ceramic substrate body 59 to be detected is stacked in the substrate placement component 2 located on the far right, and then the mounting plate 4 moves with the cylinder 5, the connecting plate 6, the loading adsorption component 7 and the unloading adsorption component 8 until the loading adsorption component 7 is translated to the top of the substrate placement component 2 on the far right, and the unloading adsorption component 8 is translated to the top of the substrate placement component 2 located in the middle position, and then the telescopic end of the cylinder 5 extends to push the connecting plate 6, the loading adsorption component 7 and the unloading adsorption component 8 to move downward, and then the loading adsorption component 7 will resist and be adsorbed to the ceramic substrate body 59 to be detected located at the top, and then the telescopic end of the cylinder 5 contracts, and then the mounting plate 4 moves with the cylinder 5. The cylinder 5, the connecting plate 16, the loading adsorption component 17 and the unloading adsorption component 18 are translated to the top of the transfer plate 3, and then the telescopic end of the cylinder 5 is extended, and the loading adsorption component 17 places the adsorbed ceramic substrate body 59 to be detected on the transfer plate 3, and then the loading adsorption component 17 and the unloading adsorption component 18 are translated to the top of the substrate placement component 2 again, and the loading adsorption component 17 adsorbs a piece of ceramic substrate body 59 to be detected again, and then waits for loading onto the transfer plate 3. As long as the ceramic substrate body 59 to be detected on the transfer plate 3 is taken away by the loading adsorption component 213, the loading adsorption component 17 and other components will load the transfer plate 3 with a new ceramic substrate body 59 to be detected; When the loading adsorption component 1 7 and the unloading adsorption component 1 8 are translated to the top of the substrate placement component 2 again, the multi-axis robot arm 9 drives the steering motor 10, the transporting electric push rod 11, the connecting plate 2 12, the loading adsorption component 2 13 and the unloading adsorption component 2 14 to move until the loading adsorption component 2 13 and the unloading adsorption component 2 14 move to the top of the transfer plate 3, and then the telescopic end of the transporting electric push rod 11 extends to push the connecting plate 2 12, the loading adsorption component 2 13 and the unloading adsorption component 2 14 to move downward until the loading adsorption component 2 13 adsorbs and fixes the ceramic substrate body 59 located on the transfer plate 3, and then the telescopic end of the transporting electric push rod 11 contracts to drive the loading adsorption component 2 13 and the unloading adsorption component 2 14 upward away from the transfer plate 3, and then The rear steering motor 10 drives the transport electric push rod 11, the connecting plate 12, the loading adsorption component 13 and the unloading adsorption component 14 to rotate 180° in the forward direction, so as to make the loading adsorption component 13 and the ceramic substrate body 59 to be detected closer to the detection component, and then the multi-axis robot 9 cooperates with the loading adsorption component 13 to place the ceramic substrate body 59 just adsorbed on the detection component (No. 1 detection position) for detection, and then the steering motor 10 drives the transport electric push rod 11, the connecting plate 12, the loading adsorption component 13 and the unloading adsorption component 14 to rotate 180° in the opposite direction, and then in the process of detecting the ceramic substrate body 59, according to the above principle, the ceramic substrate body 59 is also placed on another detection component (No. 2 detection position); Then, according to the above principle, the multi-axis robot 9 cooperates with the connecting plate 2 12, the loading adsorption component 2 13 and the unloading adsorption component 2 14 to adsorb another ceramic substrate body 59 to be detected, and then approaches the detection component that worked first. At this time, the steering motor 10 does not drive the connecting plate 2 12, the loading adsorption component 2 13 and the unloading adsorption component 2 14 to rotate. At this time, the detection component has finished working, and the multi-axis robot 9 cooperates with the connecting plate 2 12, the loading adsorption component 2 13 and the unloading adsorption component 2 14 to move, prompting the unloading adsorption component 2 14 to move to the top of the ceramic substrate body 59 that has been detected, and then the ceramic substrate body 59 is inspected. The ceramic substrate body 59 is adsorbed, and then the steering motor 10 drives the connecting plate 2 12, the loading adsorption component 2 13 and the unloading adsorption component 2 14 to rotate 180° forward, so that the loading adsorption component 2 13 places the ceramic substrate body 59 to be detected on the detection component, and then the steering motor 10 drives the connecting plate 2 12, the loading adsorption component 2 13 and the unloading adsorption component 2 14 to rotate 180° in the opposite direction, and then the multi-axis robot 9 brings the loading adsorption component 2 13, the unloading adsorption component 2 14 and the detected ceramic substrate body 59 close to the transfer plate 3, and in this process, the detection component works again; When the multi-axis robot arm 9 moves to the top of the transfer plate 3 with the loading adsorption component 2 13, the unloading adsorption component 2 14 and the ceramic substrate body 59 that has been inspected, the unloading adsorption component 2 14 cooperates with the handling electric push rod 11 to place the ceramic substrate body 59 that has been inspected on the transfer plate 3, the loading adsorption component 2 13 adsorbs the ceramic substrate body 59 to be inspected placed on the transfer plate 3, and then replaces the ceramic substrate body 59 on the second inspection position. At this time, the mounting plate 4 moves to the top of the transfer plate 3 with the cylinder 5, the connecting plate 1 6, the loading adsorption component 1 7, the unloading adsorption component 1 8 and the ceramic substrate body 59 to be inspected, and then the cylinder 5 prompts the connecting plate 1 6, the loading adsorption component 1 7, and the unloading adsorption component 1 8 to move downward, and then the loading adsorption component 1 7 releases the ceramic substrate body 59 to be inspected. In this process, the unloading adsorption component 1 8 adsorbs the ceramic substrate body 59 that has been inspected and placed on the transfer plate 3. If the ceramic substrate body 59 is detected as qualified, the mounting plate 4, together with the cylinder 5, the connecting plate 6, the loading adsorption assembly 7, and the unloading adsorption assembly 8, are translated to the initial loading position again, so that the loading adsorption assembly 7 adsorbs the next ceramic substrate body 59 to be inspected, and prepares to load the transfer plate 3. During this process, the unloading adsorption assembly 8 releases the qualified ceramic substrate body 59 into the substrate placement assembly 2 located in the middle position; If the ceramic substrate body 59 is detected as unqualified, the mounting plate 4, together with the cylinder 5, the connecting plate 6, the loading adsorption assembly 7, and the unloading adsorption assembly 8, are respectively moved vertically and horizontally until the unloading adsorption assembly 8 is located above the leftmost substrate placement assembly 2, and then the unloading adsorption assembly 8 releases the ceramic substrate body 59, and then the mounting plate 4, together with the cylinder 5, the connecting plate 6, the loading adsorption assembly 7, and the unloading adsorption assembly 8 are translated horizontally again, prompting the loading adsorption assembly 7 to move to the top of the rightmost substrate placement assembly 2, adsorb the next ceramic substrate body 59 to be inspected, and prepare to load the transfer plate 3.

[0027] Reference Figure 1 , Figure 2 , Figure 5 and Figure 7 Each detection component includes a mounting frame 15 fixed to one side of the workbench 1, and a lower flat electrode 16 is fixed to one side of the mounting frame 15. An upper flat electrode 17 is movably arranged directly above each lower flat electrode 16. In the initial state, the upper flat electrode 17 and the lower flat electrode 16 are in a separated and open state, which is convenient for placing the ceramic substrate body 59. When the ceramic substrate body 59 is placed, the upper flat electrode 17 moves downward to fit close to the ceramic substrate body 59, which prompts the upper flat electrode 17 to move vertically downward, which is a conventional technical means.

[0028] When the loading adsorption component 2 13 places the ceramic substrate body 59 to be tested on the lower flat electrode 16, the upper flat electrode 17 moves downward close to the ceramic substrate body 59, and the lower flat electrode 16 cooperates with the upper flat electrode 17 to detect the ceramic substrate body 59. Whether the current passing through the fixed voltage for a period of time exceeds the set value can be determined to determine whether the ceramic substrate body 59 is qualified.

[0029] Reference Figure 1-Figure 3 Two support frames 18 are symmetrically fixed to the upper end surface of the workbench 1, and an electric guide rail 19 is fixed to the upper end surface of each support frame 18. The same moving seat 20 is movably set on the two electric guide rails 19, and an electric guide rail 21 is fixed to one side of the moving seat 20. The mounting plate 4 is movably set on one side of the electric guide rail 21.

[0030] By the cooperation of the electric guide rail 19 and the moving seat 20, the connecting plate 6, the loading adsorption assembly 7 and the unloading adsorption assembly 8 can be driven to move vertically and move back and forth above the transfer plate 3 and the substrate placement assembly 2.

[0031] By cooperating with the electric guide rail 21 and the mounting plate 4, the connecting plate 6, the loading adsorption assembly 7 and the unloading adsorption assembly 8 can be driven to translate horizontally and move back and forth above the substrate placement assembly 2 at different positions.

[0032] Reference Figure 1 , Figure 6 and Figure 7 Each substrate placement assembly 2 includes two vertical mounting seats 22 and two horizontal mounting seats 23. A lifting plate 24 is movably arranged between the two vertical mounting seats 22 and the two horizontal mounting seats 23. A lifting electric push rod used in conjunction with the lifting plate 24 is arranged on the workbench 1. Two vertical translation blocks 25 are symmetrically and movably arranged between the two vertical mounting seats 22. A vertical baffle 26 is fixed to the upper end surface of each vertical translation block 25. A vertical screw rod 27 is rotatably arranged between the two vertical mounting seats 22. The vertical screw rod 27 threadably penetrates the two vertical translation blocks 25. One end of the vertical screw rod 27 rotatably penetrates the vertical mounting seats 22 and is fixed with a hand wheel 28. A vertical guide rod 29 is fixed between the two vertical mounting seats 22. The vertical guide rod 29 movably penetrates the two vertical translation blocks 25. The upper end surface of the workbench 1 is provided with a vertical moving slide rail used in conjunction with the vertical translation block 25.

[0033] When the vertical screw rod 27 rotates in the positive direction, the two vertical translation blocks 25 are driven to approach each other, thereby driving the two vertical baffles 26 to approach each other. This part of the structure is an existing technology and belongs to conventional technical means.

[0034] Reference Figure 1 , Figure 6 and Figure 7Two transverse translation blocks 31 are symmetrically and movably arranged between each pair of transverse mounting seats 23, and a transverse baffle 32 is fixed to the upper end surface of each transverse translation block 31. A transverse screw rod 33 is rotatably arranged between the two transverse mounting seats 23, and the transverse screw rod 33 threads through the two transverse translation blocks 31. One end of the transverse screw rod 33 rotates through the transverse mounting seat 23 and is fixed with a second hand wheel 34. A transverse guide rod 35 is fixed between the two transverse mounting seats 23, and the transverse guide rod 35 movably passes through the two transverse translation blocks 31. The upper end surface of the workbench 1 is provided with a transverse moving slide rail used in conjunction with the transverse translation block 31.

[0035] When the transverse screw rod 33 is driven to rotate in the forward direction, the two transverse translation blocks 31 are driven to approach each other, thereby driving the two transverse baffles 32 to approach each other. This part of the structure is an existing technology and belongs to a conventional technical means.

[0036] When in use, the lifting plate 24 is used to support the ceramic substrate body 59, and the ceramic substrate body 59 can be stacked on the upper end surface of the lifting plate 24. The lifting electric push rod cooperates to raise or lower the lifting plate 24, so as to cooperate with the loading adsorption component 7 to adsorb the ceramic substrate body 59 located in the rightmost substrate placement component 2, and cooperate with the unloading adsorption component 8 to place the inspected ceramic substrate body 59 in the corresponding substrate placement component 2. This part of the content is all prior art.

[0037] Reference Figure 1 , Figure 2 , Figure 7-10 A limited slide groove 37 is provided on the upper end surface of the workbench 1, and a passive slider 38 is slidably arranged in the limited slide groove 37. A rack 39 is fixed on the upper end surface of the passive slider 38. A fixed sleeve of a horizontal gear plate 40 is provided on the outer surface of the horizontal screw rod 33 near the rack 39. The horizontal gear plate 40 is meshed with the rack 39. One end of the two horizontal mounting seats 23 near the rack 39 is fixed with an extension seat 41. A worm 42 is rotatably arranged between the two extension seats 41. One end of the worm 42 rotates through the extension seat 41 and is fixedly sleeved with a horizontal gear plate 2 43. The horizontal gear plate 2 43 is meshed with the rack 39. A fixed sleeve of a worm wheel 44 is provided on the outer surface of the vertical screw rod 27. The worm wheel 44 is meshed with the worm 42. A linkage component used in conjunction with the passive slider 38 is provided on the moving seat 20.

[0038] In the initial state, the movable seat 20, the mounting plate 4 with the cylinder 5, the connecting plate 6, the loading adsorption component 7 and the unloading adsorption component 8 are located between the transfer plate 3 and the substrate placement component 2 to avoid affecting the staff from placing the ceramic substrate body 59 to be tested in the substrate placement component 2 located on the far right. In the initial state, the two vertical baffles 26 and the two horizontal baffles 32 in the substrate placement component 2 located on the far right are in a state of being away from each other to avoid affecting the placement of the ceramic substrate body 59. When the ceramic substrate bodies 59 are stacked and placed on the upper end surface of the lifting plate 24, the sides of each ceramic substrate body 59 in the stacked state are prone to unevenness. In order to avoid the subsequent process (the lifting plate 24 delivers the ceramic substrate body 59 upward and the loading adsorption component 7 adsorbs the top When the ceramic substrate body 59 is stacked, the stacked ceramic substrate bodies 59 tilt and collapse, and the vertical baffles 26 and the inner walls of the horizontal baffles 32 are scratched during the upward movement. Therefore, the moving seat 20 will first move toward the direction of the transfer plate 3. During this process, the passive slider 38 and the rack 39 are driven to move forward through the linkage assembly, thereby driving the horizontal gear plate 1 40 and the horizontal screw 33 to rotate, causing the two horizontal baffles 32 to approach each other. During this process, the rack 39 drives the horizontal gear plate 2 43 and the worm 42 to rotate, thereby driving the worm wheel plate 44 and the vertical screw 27 to rotate, causing the two vertical baffles 26 to approach each other. During the movement, the horizontal baffle 32 and the vertical baffle 26 will approach and contact the side walls of the ceramic substrate body 59, thereby centering the ceramic substrate body 59. When the moving seat 20 moves with the mounting plate 4, the cylinder 5, the connecting plate 16, the loading adsorption component 17 and the unloading adsorption component 18 toward the substrate placement component 2, the linkage component will drive the passive slider 38 and the rack 39 to move in the opposite direction, and through the cooperation of the horizontal gear plate 1 40 and the horizontal gear plate 2 43, the two horizontal baffles 32 and the two vertical baffles 26 are prompted to move away from the ceramic substrate body 59. When the loading adsorption component 17 is just moved above the ceramic substrate body 59, the horizontal baffle 32 and the vertical baffle 26 stop moving. At this time, there is a gap between the horizontal baffle 32 and the vertical baffle 26 and the side wall of the ceramic substrate body 59, so as to prevent the loading adsorption component 17 from scratching the inner wall of the horizontal baffle 32 or the vertical baffle 26 during the upward movement of the ceramic substrate body 59 when cooperating to adsorb the ceramic substrate body 59 located on the uppermost layer. In addition, according to the rhythm of the translation of the loading adsorption component 17, the ceramic substrate body 59 to be detected can be added to the substrate placement component 2 located on the far right without stopping the machine.

[0039] In other embodiments, the rack 39, the transverse gear plate 1 40 and the transverse gear plate 2 43 of different specifications and sizes can be replaced for use in combination.

[0040] For the other two substrate placement assemblies 2 , the corresponding transverse baffles 32 and vertical baffles 26 can be manually adjusted to appropriate positions to avoid subsequent scratches on the side walls of the ceramic substrate body 59 .

[0041] Reference Figure 7-10 The linkage assembly includes an active slider 45 slidably set in the limiting slide groove 37, a connecting arm 46 is fixed between the active slider 45 and the moving seat 20, a sliding cavity 47 is opened in the passive slider 38, a built-in slider 48 is slidably set in the sliding cavity 47, a connecting column 49 is fixed between the built-in slider 48 and the active slider 45, and the connecting column 49 movably passes through the sliding cavity 47.

[0042] In the initial state, refer to Figure 8 The movable seat 20, the mounting plate 4 with the cylinder 5, the connecting plate 6, the loading adsorption assembly 7 and the unloading adsorption assembly 8 are located between the transfer plate 3 and the substrate placement assembly 2 to avoid affecting the staff from placing the ceramic substrate body 59 to be tested in the substrate placement assembly 2 located on the far right; When the ceramic substrate bodies 59 to be inspected are stacked and placed in the substrate placement assembly 2 located on the far right, refer to Fig. 9 , the moving seat 20 will first move toward the transfer plate 3, and in this process, it will drive the connecting arm 46, the active slider 45, the connecting column 49 and the built-in slider 48 to move together. After moving a certain distance, the built-in slider 48 will contact the inner wall of the sliding cavity 47, thereby driving the passive slider 38 to move together, thereby driving the horizontal gear plate 1 40 and the horizontal gear plate 2 43 to rotate through the rack 39; When the moving seat 20 moves with the mounting plate 4, the cylinder 5, the connecting plate 6, the upper material adsorption assembly 7 and the lower material adsorption assembly 8 toward the substrate placement assembly 2, Fig.10 The moving seat 20 will drive the connecting arm 46, the active slider 45, the connecting column 49 and the built-in slider 48 to move together. During this process, the built-in slider 48 will first move a distance in the sliding cavity 47, and then it will hit the inner wall of the sliding cavity 47, and then drive the passive slider 38 and the rack 39 to move together, and drive the transverse gear plate 1 40 and the transverse gear plate 2 43 to rotate through the rack 39.

[0043] Reference Figure 1 , Figure 2 , Fig.11 and Fig.12 A placement rack 50 is fixed to the upper end surface of the workbench 1, and the transfer plate 3 is arranged on the upper end surface of the placement rack 50. Two groups of auxiliary positioning components are arranged on the upper end surface of the transfer plate 3, and each group of auxiliary positioning components includes a plurality of positioning wedge blocks 51 fixed to the upper end surface of the transfer plate 3.

[0044] The ceramic substrate body 59 placed on the transfer plate 3 is positioned by means of the plurality of positioning wedge blocks 51 .

[0045] Reference Figure 1 , Figure 2 , Fig.11 and Fig.12 A translation sliding groove is provided on the upper end surface of the placement frame 50, and a translation sliding block 52 is slidably arranged in the translation sliding groove. The transfer plate 3 is fixed to the upper end surface of the translation sliding block 52. Two L-shaped connecting seats 53 are symmetrically fixed on the side of the placement frame 50 away from the connecting arm 46, and a spring 54 is fixed between each L-shaped connecting seat 53 and the transfer plate 3. Two translation guide rods 55 are symmetrically fixed on one side of the transfer plate 3, and one end of each translation guide rod 55 slides through the corresponding L-shaped connecting seat 53, and each spring 54 is movably sleeved on the outer surface of the corresponding translation guide rod 55. An arc-shaped protrusion 56 is fixed on the side of the transfer plate 3 close to the connecting arm 46, and a built-in groove is provided on one side of the connecting arm 46. A U-shaped frame 57 is fixed on the inner wall of the built-in groove, and a resistance wheel 58 is rotatably arranged on the inner wall of the U-shaped frame 57.

[0046] When the movable seat 20 moves with the mounting plate 4, the cylinder 5, the connecting plate 6, the loading adsorption assembly 7 and the unloading adsorption assembly 8 toward the transfer plate 3, and cooperates with the loading adsorption assembly 7 and the unloading adsorption assembly 8 to load and unload materials onto the transfer plate 3 respectively, the movable seat 20 will move with the connecting arm 46, thereby driving the U-shaped frame 57 and the resistance wheel 58 to move horizontally. During the translation of the connecting arm 46 with the U-shaped frame 57 and the resistance wheel 58, the resistance wheel 58 will collide with the arc-shaped protrusion 56, causing the translation of the transfer plate 3. During the translation process, the transfer plate 3 will squeeze the spring 54. Under the action of the elastic potential energy of the spring 54, the transfer plate 3 will be caused to shake slightly for several times, thereby causing the ceramic substrate body 59 that is not placed in place on the transfer plate 3 to fall into the set position during this process in cooperation with the guidance of the inclined surface of the positioning wedge block 51, which is convenient to use.

[0047] A detection method for a defect detection device of a nitride ceramic substrate, the specific operation steps of the method are: Step 1: The mounting plate 4 moves with the cylinder 5, the connecting plate 1 6, the loading adsorption component 1 7 and the unloading adsorption component 1 8 to move the ceramic substrate body 59 to be detected in the substrate placement component 2 to the transfer plate 3, and then the multi-axis robot 9 drives the steering motor 10, the transport electric push rod 11, the connecting plate 2 12, the loading adsorption component 2 13 and the unloading adsorption component 2 14 to move and cooperate to move the ceramic substrate body 59 to be detected placed on the transfer plate 3 to one of the detection components, and then according to this principle, the ceramic substrate body 59 to be detected is also placed on the other detection component; Step 2, the multi-axis robot 9 cooperates with the connecting plate 2 12, the loading adsorption component 2 13 and the unloading adsorption component 2 14 to adsorb a ceramic substrate body 59 to be detected again, and then approaches the detection component that works first. After the detection component finishes working, the unloading adsorption component 2 14 adsorbs the ceramic substrate body 59 that has been detected, and then the steering motor 10 drives the connecting plate 2 12, the loading adsorption component 2 13 and the unloading adsorption component 2 14 to rotate 180° forward, so that the loading adsorption component 2 13 places the ceramic substrate body 59 to be detected on the detection component, and then the steering motor 10 drives the connecting plate 2 12, the loading adsorption component 2 13 and the unloading adsorption component 2 14 to rotate 180° in the opposite direction, and then the multi-axis robot 9 brings the loading adsorption component 2 13, the unloading adsorption component 2 14 and the ceramic substrate body 59 that has been detected close to the transfer plate 3; Step 3: When the multi-axis robot arm 9 moves to the top of the transfer plate 3 with the loading adsorption component 2 13, the unloading adsorption component 2 14 and the inspected ceramic substrate body 59, the unloading adsorption component 2 14 cooperates with the transport electric push rod 11 to place the inspected ceramic substrate body 59 on the transfer plate 3, the loading adsorption component 2 13 adsorbs the ceramic substrate body 59 to be inspected placed on the transfer plate 3, and then replaces the ceramic substrate body 59 on another inspection component; Step 4: The mounting plate 4 moves the cylinder 5, the connecting plate 6, the loading adsorption assembly 7, the unloading adsorption assembly 8 and the ceramic substrate body 59 to be inspected to the top of the transfer plate 3, and then the cylinder 5 causes the connecting plate 6, the loading adsorption assembly 7 and the unloading adsorption assembly 8 to move downward, and then the loading adsorption assembly 7 releases the ceramic substrate body 59 to be inspected. In this process, the unloading adsorption assembly 8 adsorbs the inspected ceramic substrate body 59 placed on the transfer plate 3; Step five, the mounting plate 4 moves with the cylinder 5, the connecting plate 6, the loading adsorption assembly 7, the unloading adsorption assembly 8 and the inspected ceramic substrate body 59 toward the substrate placement assembly 2, and then the unloading adsorption assembly 8 releases the inspected ceramic substrate body 59, and then the loading adsorption assembly 7 adsorbs the next ceramic substrate body 59 to be inspected.

[0048] When the present invention is in use, in the initial state, the movable seat 20, the mounting plate 4 with the cylinder 5, the connecting plate 6, the loading adsorption component 7 and the unloading adsorption component 8 are located between the transfer plate 3 and the substrate placement component 2, so as to avoid affecting the staff from placing the ceramic substrate body 59 to be tested in the substrate placement component 2 located on the far right. In the initial state, the two vertical baffles 26 and the two horizontal baffles 32 in the substrate placement component 2 located on the far right are in a state of being away from each other, so as to avoid affecting the placement of the ceramic substrate body 59. When the ceramic substrate bodies 59 are stacked and placed on the upper end surface of the lifting plate 24, the sides of each ceramic substrate body 59 in the stacked state are prone to unevenness. In order to avoid the following process (the lifting plate 24 delivers the ceramic substrate body 59 upward and the loading adsorption component 7 adsorbs the ceramic substrate body 59 located on the far right) When the top ceramic substrate body 59 is moved, the stacked ceramic substrate bodies 59 tilt and collapse, and the vertical baffles 26 and the inner walls of the horizontal baffles 32 are scratched during the upward movement. Therefore, the moving seat 20 will first move toward the transfer plate 3. During this process, the passive slider 38 and the rack 39 are driven to move forward through the linkage assembly, thereby driving the horizontal gear plate 1 40 and the horizontal screw 33 to rotate, causing the two horizontal baffles 32 to approach each other. During this process, the rack 39 drives the horizontal gear plate 2 43 and the worm 42 to rotate, thereby driving the worm wheel plate 44 and the vertical screw 27 to rotate, causing the two vertical baffles 26 to approach each other. During the movement, the horizontal baffle 32 and the vertical baffle 26 will approach and contact the side walls of the ceramic substrate body 59, thereby centering the ceramic substrate body 59. When the moving seat 20, the mounting plate 4, the cylinder 5, the connecting plate 16, the loading adsorption component 17 and the unloading adsorption component 18 move toward the substrate placement component 2, the linkage component will drive the passive slider 38 and the rack 39 to move in the opposite direction, and through the cooperation of the horizontal gear plate 1 40 and the horizontal gear plate 2 43, the two horizontal baffles 32 and the two vertical baffles 26 are prompted to move away from the ceramic substrate body 59. When the loading adsorption component 17 is just moved above the ceramic substrate body 59, the horizontal baffle 32 and the vertical baffle 26 stop moving. At this time, there is a gap between the horizontal baffle 32 and the vertical baffle 26 and the side wall of the ceramic substrate body 59, so as to prevent the loading adsorption component 17 from scratching the inner wall of the horizontal baffle 32 or the vertical baffle 26 when cooperating to adsorb the ceramic substrate body 59 located on the uppermost layer during the upward movement of the ceramic substrate body 59. In addition, according to the rhythm of the translation of the loading adsorption component 17, the ceramic substrate body 59 to be detected can be added to the substrate placement component 2 located on the far right without stopping the machine. When in use, the mounting plate 4 moves with the cylinder 5, the connecting plate 1 6, the loading adsorption component 1 7 and the unloading adsorption component 1 8 to move and cooperate, and move the ceramic substrate body 59 to be detected in the substrate placement component 2 to the transfer plate 3, and then the multi-axis robot 9 drives the steering motor 10, the transport electric push rod 11, the connecting plate 2 12, the loading adsorption component 2 13 and the unloading adsorption component 2 14 to move and cooperate, and move the ceramic substrate body 59 to be detected placed on the transfer plate 3 to be placed on one of the detection components, and then according to this principle, the ceramic substrate body 59 to be detected is also placed on the other detection component; The multi-axis robot arm 9 cooperates with the connecting plate 2 12, the loading adsorption component 2 13 and the unloading adsorption component 2 14 to adsorb a ceramic substrate body 59 to be detected again, and then approaches the detection component that works first. After the detection component finishes working, the unloading adsorption component 2 14 adsorbs the ceramic substrate body 59 that has been detected, and then the steering motor 10 drives the connecting plate 2 12, the loading adsorption component 2 13 and the unloading adsorption component 2 14 to rotate 180° forward, so that the loading adsorption component 2 13 places the ceramic substrate body 59 to be detected on the detection component, and then the steering motor 10 drives the connecting plate 2 12, the loading adsorption component 2 13 and the unloading adsorption component 2 14 to rotate 180° in the opposite direction, and then the multi-axis robot arm 9 brings the loading adsorption component 2 13, the unloading adsorption component 2 14 and the ceramic substrate body 59 that has been detected close to the transfer plate 3; When the multi-axis robot arm 9 moves to the top of the transfer plate 3 with the loading adsorption component 2 13, the unloading adsorption component 2 14 and the inspected ceramic substrate body 59, the unloading adsorption component 2 14 cooperates with the carrying electric push rod 11 to place the inspected ceramic substrate body 59 on the transfer plate 3, the loading adsorption component 2 13 adsorbs the ceramic substrate body 59 to be inspected placed on the transfer plate 3, and then replaces the ceramic substrate body 59 on another inspection component; The mounting plate 4 moves the cylinder 5, the connecting plate 6, the loading adsorption assembly 7, the unloading adsorption assembly 8 and the ceramic substrate body 59 to be inspected to the top of the transfer plate 3, and then the cylinder 5 causes the connecting plate 6, the loading adsorption assembly 7 and the unloading adsorption assembly 8 to move downward, and then the loading adsorption assembly 7 releases the ceramic substrate body 59 to be inspected. In this process, the unloading adsorption assembly 8 adsorbs the inspected ceramic substrate body 59 placed on the transfer plate 3; The mounting plate 4 moves with the cylinder 5, the connecting plate 6, the loading adsorption assembly 7, the unloading adsorption assembly 8 and the inspected ceramic substrate body 59 toward the substrate placement assembly 2, and then the unloading adsorption assembly 8 releases the inspected ceramic substrate body 59, and then the loading adsorption assembly 7 adsorbs the next ceramic substrate body 59 to be inspected.

[0049] The above description is only a preferred embodiment of the present invention and does not limit the present invention in any form. Although the present invention has been disclosed as a preferred embodiment as above, it is not used to limit the present invention. Any technical personnel in this field can make some changes or modify the technical contents disclosed above into equivalent embodiments with equivalent changes without departing from the scope of the technical solution of the present invention.

Claims

1. A defect detection device for a nitride ceramic substrate, comprising a workbench (1), characterized in that: The upper end surface of the workbench (1) is provided with three substrate placement components (2), the workbench (1) is provided with a transfer plate (3), the workbench (1) is movably provided with a mounting plate (4), a cylinder (5) is fixed on one side of the mounting plate (4), a connecting plate (6) is fixed at the end of the telescopic end of the cylinder (5), a loading adsorption component (7) and a unloading adsorption component (8) are symmetrically arranged on the lower end surface of the connecting plate (6), two detection components are arranged on the workbench (1), a multi-axis mechanical arm (9) is also provided on the workbench (1), a steering motor (10) is fixed at the end of the multi-axis mechanical arm (9), a transporting electric push rod (11) is fixed at the working end of the steering motor (10), a connecting plate (12) is fixed at the end of the telescopic end of the transporting electric push rod (11), and a loading adsorption component (13) and a unloading adsorption component (14) are symmetrically arranged on the lower end surface of the connecting plate (12).

2. A defect detection device for a nitride ceramic substrate according to claim 1, characterized in that: Each of the detection components comprises a mounting frame (15) fixed to one side of the workbench (1), a lower flat plate electrode (16) being fixed to one side of the mounting frame (15), and an upper flat plate electrode (17) being movably arranged directly above each lower flat plate electrode (16).

3. The defect detection device for a nitride ceramic substrate according to claim 1, characterized in that: Two support frames (18) are symmetrically fixed on the upper end surface of the workbench (1), and an electric guide rail 1 (19) is fixed on the upper end surface of each support frame (18). The same movable seat (20) is movably arranged on the two electric guide rails 1 (19), and an electric guide rail 2 (21) is fixed on one side of the movable seat (20). The mounting plate (4) is movably arranged on one side of the electric guide rail 2 (21).

4. The defect detection device for a nitride ceramic substrate according to claim 1, characterized in that: Each of the substrate placement components (2) comprises two vertical mounting seats (22) and two horizontal mounting seats (23); a lifting plate (24) is movably arranged between the two vertical mounting seats (22) and the two horizontal mounting seats (23); a lifting electric push rod used in conjunction with the lifting plate (24) is arranged on the workbench (1); two vertical translation blocks (25) are symmetrically movably arranged between the two vertical mounting seats (22); a vertical baffle (26) is fixed to the upper end surface of each vertical translation block (25); and the two A vertical screw rod (27) is rotatably arranged between the two vertical mounting seats (22), the vertical screw rod (27) threadedly penetrates the two vertical translation blocks (25), one end of the vertical screw rod (27) rotatably penetrates the vertical mounting seat (22) and is fixed with a hand wheel (28), a vertical guide rod (29) is fixed between the two vertical mounting seats (22), the vertical guide rod (29) movably penetrates the two vertical translation blocks (25), and the upper end surface of the workbench (1) is provided with a vertical moving slide rail used in conjunction with the vertical translation blocks (25).

5. A defect detection device for a nitride ceramic substrate according to claim 4, characterized in that: Two transverse translation blocks (31) are symmetrically and movably arranged between each pair of transverse mounting seats (23), and a transverse baffle (32) is fixed to the upper end surface of each transverse translation block (31). A transverse screw rod (33) is rotatably arranged between the two transverse mounting seats (23), and the transverse screw rod (33) is threadedly penetrated through the two transverse translation blocks (31). One end of the transverse screw rod (33) is rotatably penetrated through the transverse mounting seat (23) and is fixed with a second hand wheel (34). A transverse guide rod (35) is fixed between the two transverse mounting seats (23), and the transverse guide rod (35) movably penetrates the two transverse translation blocks (31). The upper end surface of the workbench (1) is provided with a transverse movable slide rail used in conjunction with the transverse translation block (31).

6. The defect detection device for a nitride ceramic substrate according to claim 5, characterized in that: The upper end surface of the workbench (1) is provided with a limit slide groove (37), a passive slide block (38) is slidably arranged in the limit slide groove (37), a rack (39) is fixed to the upper end surface of the passive slide block (38), a transverse gear plate (40) is fixedly sleeved on the outer surface of the transverse screw rod (33) near the rack (39), and the transverse gear plate (40) is meshingly connected with the rack (39), and one end of the two transverse mounting seats (23) near the rack (39) is fixed with an extension seat ( 41), a worm (42) is rotatably provided between the two extension seats (41), one end of the worm (42) is rotatably passed through the extension seat (41) and fixedly sleeved with a transverse gear plate (43), the transverse gear plate (43) is meshingly connected with the rack (39), the outer surface of the vertical screw (27) is fixedly sleeved with a worm wheel (44), the worm wheel (44) is meshingly connected with the worm (42), and a linkage assembly used in conjunction with the passive slider (38) is provided on the movable seat (20).

7. The defect detection device for a nitride ceramic substrate according to claim 6, characterized in that: The linkage assembly comprises an active slider (45) slidably arranged in a limiting slide groove (37), a connecting arm (46) is fixed between the active slider (45) and the movable seat (20), a sliding cavity (47) is provided in the passive slider (38), a built-in slider (48) is slidably arranged in the sliding cavity (47), a connecting column (49) is fixed between the built-in slider (48) and the active slider (45), and the connecting column (49) movably passes through the sliding cavity (47).

8. The defect detection device for a nitride ceramic substrate according to claim 7, characterized in that: A placement rack (50) is fixed to the upper end surface of the workbench (1), a transfer plate (3) is arranged on the upper end surface of the placement rack (50), and two groups of auxiliary positioning components are arranged on the upper end surface of the transfer plate (3), each group of auxiliary positioning components includes a plurality of positioning wedge blocks (51) fixed to the upper end surface of the transfer plate (3).

9. The defect detection device for a nitride ceramic substrate according to claim 8, characterized in that: The upper end surface of the placement frame (50) is provided with a translation sliding groove, in which a translation sliding block (52) is slidably arranged, and the transfer plate (3) is fixed to the upper end surface of the translation sliding block (52). Two L-shaped connecting seats (53) are symmetrically fixed to the side of the placement frame (50) away from the connecting arm (46), and a spring (54) is fixed between each L-shaped connecting seat (53) and the transfer plate (3). Two translation guide rods (55) are symmetrically fixed to one side of the transfer plate (3), and one end of each translation guide rod (55) slides through the corresponding L-shaped connecting seat (53), and each spring (54) is movably sleeved on the outer surface of the corresponding translation guide rod (55). An arc-shaped protrusion (56) is fixed to the side of the transfer plate (3) close to the connecting arm (46), and a built-in groove is provided on one side of the connecting arm (46). A U-shaped frame (57) is fixed on the inner wall of the built-in groove, and a resistance wheel (58) is rotatably arranged on the inner wall of the U-shaped frame (57).

10. The detection method of a defect detection device for a nitride ceramic substrate according to any one of claims 1 to 9, characterized in that: The specific steps are as follows: Step 1: The mounting plate (4) moves with the cylinder (5), the connecting plate 1 (6), the loading adsorption component 1 (7) and the unloading adsorption component 1 (8) to move the ceramic substrate body (59) to be detected in the substrate placement component (2) to the transfer plate (3); then the multi-axis robot arm (9) drives the steering motor (10), the transport electric push rod (11), the connecting plate 2 (12), the loading adsorption component 2 (13) and the unloading adsorption component 2 (14) to move and cooperate to move the ceramic substrate body (59) to be detected placed on the transfer plate (3) to one of the detection components; then, according to this principle, the ceramic substrate body (59) to be detected is also placed on the other detection component; Step 2: The multi-axis robot arm (9) cooperates with the second connecting plate (12), the second loading adsorption component (13) and the second unloading adsorption component (14) to adsorb a ceramic substrate body (59) to be inspected again, and then approaches the inspection component that works first. After the inspection component finishes working, the second unloading adsorption component (14) adsorbs the inspected ceramic substrate body (59), and then the steering motor (10) drives the second connecting plate (12), the second loading adsorption component (13) and the second unloading adsorption component (14) to rotate 180° in the forward direction, so that the second loading adsorption component (13) places the ceramic substrate body (59) to be inspected on the inspection component. Then the steering motor (10) drives the second connecting plate (12), the second loading adsorption component (13) and the second unloading adsorption component (14) to rotate 180° in the reverse direction, and then the multi-axis robot arm (9) brings the second loading adsorption component (13), the second unloading adsorption component (14) and the inspected ceramic substrate body (59) close to the transfer plate (3); Step 3, when the multi-axis robot arm (9) moves with the loading adsorption component 2 (13), the unloading adsorption component 2 (14) and the inspected ceramic substrate body (59) to the top of the transfer plate (3), the unloading adsorption component 2 (14) cooperates with the transport electric push rod (11) to place the inspected ceramic substrate body (59) on the transfer plate (3), the loading adsorption component 2 (13) adsorbs the ceramic substrate body (59) to be inspected placed on the transfer plate (3), and then replaces the ceramic substrate body (59) on another inspection component; Step 4: The mounting plate (4) moves the cylinder (5), the connecting plate (6), the loading adsorption assembly (7), the unloading adsorption assembly (8) and the ceramic substrate body (59) to be inspected to the top of the transfer plate (3); then the cylinder (5) causes the connecting plate (6), the loading adsorption assembly (7) and the unloading adsorption assembly (8) to move downward; then the loading adsorption assembly (7) releases the ceramic substrate body (59) to be inspected; during this process, the unloading adsorption assembly (8) adsorbs the inspected ceramic substrate body (59) placed on the transfer plate (3); Step 5: The mounting plate (4) moves with the cylinder (5), the connecting plate 1 (6), the loading adsorption assembly 1 (7), the unloading adsorption assembly 1 (8) and the inspected ceramic substrate body (59) toward the substrate placement assembly (2); then the unloading adsorption assembly 1 (8) releases the inspected ceramic substrate body (59); and then the loading adsorption assembly 1 (7) adsorbs the next ceramic substrate body (59) to be inspected.

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