High-precision electron beam deflection compensation method

Abstract

The invention provides a high-precision electron beam deflection compensation method. The high-precision electron beam deflection compensation method comprises the following steps: S1, monitoring the deflection state of an electron beam in real time; s2, the obtained deflection state serves as an input value, and the compensation amount is calculated; s3, the compensation amount is converted into a control signal, and a compensation device is driven to compensate the electron beam; and S4, performing quality evaluation on the compensated electron beam to ensure the compensation effect. According to the invention, rapid and accurate compensation of electron beam deflection is realized through algorithm and hardware design.

Description

Technical Field

[0001] The invention relates to the technical field of electron beam processing, and in particular to a high-precision electron beam deflection compensation method. Background Art

[0002] In the field of electron beam processing technology, electron beam deflection is one of the key factors affecting processing accuracy. Traditional electron beam deflection compensation methods often have problems such as low accuracy and slow response speed, which are difficult to meet the needs of modern high-precision processing. Therefore, the present invention proposes a high-precision electron beam deflection compensation method, which aims to achieve fast and accurate compensation of electron beam deflection through advanced control algorithms and hardware design. Summary of the invention

[0003] The purpose of the present invention is to overcome the shortcomings of the prior art and provide a high-precision electron beam deflection compensation method, which is specifically achieved through the following technical solutions:

[0004] The present invention provides a high-precision electron beam deflection compensation method, comprising the following steps:

[0005] S1, real-time monitoring of the deflection state of the electron beam;

[0006] S2, using the obtained deflection state as an input value to calculate the compensation amount;

[0007] S3, converting the compensation amount into a control signal, and driving the compensation device to compensate the electron beam;

[0008] S4. Perform quality assessment on the compensated electron beam to ensure compensation effect.

[0009] Optionally or preferably, when the electron beam is subjected to real-time deflection, a sensor array is used to capture deflection information of the electron beam, and a data processing unit is used to process and analyze the collected deflection information to determine the deflection state of the electron beam.

[0010] Optionally or preferably, when calculating the compensation amount, fuzzy control is adopted, which specifically includes the following steps:

[0011] A1. Fuzzify the obtained deflection state to obtain a fuzzy vector;

[0012] A2. Define fuzzy rules. According to the defined fuzzy rules, each fuzzy vector can find the corresponding fuzzy compensation amount;

[0013] A3, defuzzifying the obtained fuzzy compensation amount;

[0014] A4. The compensation amount obtained after defuzzification is used as the input of the neural network algorithm.

[0015] Optionally or preferably, when obtaining the fuzzy vector, the following steps are included:

[0016] A11. Determine the fuzzy set of input values; each fuzzy set consists of at least one fuzzy subset;

[0017] A12. define a membership function for each fuzzy subset; the membership function is used to describe the degree to which the input value belongs to the subset;

[0018] A13. Calculate the membership value of the input value for each fuzzy subset according to the defined membership function;

[0019] A14. Generate fuzzy vector: combine the calculated membership values ​​into a fuzzy vector as the input of fuzzy control. The fuzzy vector contains the membership information of the input value to all fuzzy subsets.

[0020] Optionally or preferably, the fuzzy rule consists of a series of IF-THEN statements.

[0021] Optionally or preferably, when defuzzification is performed, a centroid method may be used for defuzzification, and the compensation amount Δ may be expressed as:

[0022]

[0023] Among them, μ i (θ,ω) represents the membership function of the i-th rule; x i represents the compensation amount corresponding to the i-th fuzzy rule; θ represents the deflection angle; ω represents the deflection speed.

[0024] Optionally or preferably, the compensation device includes an electromagnetic coil and piezoelectric ceramics, which can respond quickly according to a control signal and accurately compensate the electron beam; the compensation device also has a self-calibration function and can maintain high accuracy and stability during long-term operation.

[0025] Optionally or preferably, when evaluating the quality of the electron beam, the beam spot size and divergence angle parameters are evaluated by a beam quality analyzer or an imaging system.

[0026] Based on the above technical solution, the present invention provides a high-precision electron beam deflection compensation method, which can produce the following technical effects:

[0027] (1) High precision: Through the control algorithm and compensation device, high-precision compensation of electron beam deflection is achieved, which improves the accuracy and stability of electron beam processing;

[0028] (2) Fast response: The compensation device uses efficient driving elements and optimized control strategies, which can quickly respond to and compensate for electron beam deflection in a short time;

[0029] (3) Adaptability: The compensation device has a self-learning function and can automatically adjust the compensation parameters according to different processing conditions and environmental changes, thereby improving the adaptability of the system;

[0030] (4) Easy to integrate: This method can be seamlessly integrated with existing electron beam processing equipment without the need for large-scale modification of the original equipment;

[0031] (5) High cost-effectiveness: Although the initial investment may be high, in the long run, it has a high return on investment due to improved processing accuracy and efficiency, reduced scrap rate and production costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the structures shown in these drawings without paying creative work.

[0033] Figure 1 It is a flow chart of the steps of the present invention. DETAILED DESCRIPTION

[0034] It should be understood that the specific embodiments described herein are only used to explain the present invention, and are not used to limit the present invention.

[0035] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0036] Embodiment 1:

[0037] like Figure 1 As shown:

[0038] The present invention provides a high-precision electron beam deflection compensation method, comprising the following steps:

[0039] S1, real-time monitoring of the deflection state of the electron beam;

[0040] S2, using the obtained deflection state as an input value to calculate the compensation amount;

[0041] S3, converting the compensation amount into a control signal, and driving the compensation device to compensate the electron beam;

[0042] S4. Perform quality assessment on the compensated electron beam to ensure compensation effect.

[0043] In this embodiment, when the electron beam is being deflected in real time, a sensor array is used to capture the deflection information of the electron beam, and a data processing unit is used to process and analyze the collected deflection information to determine the deflection state of the electron beam.

[0044] In this embodiment, fuzzy control is used when calculating the compensation amount, which specifically includes the following steps:

[0045] A1. Fuzzify the obtained deflection state to obtain a fuzzy vector;

[0046] A2. Define fuzzy rules. According to the defined fuzzy rules, each fuzzy vector can find the corresponding fuzzy compensation amount;

[0047] A3, defuzzifying the obtained fuzzy compensation amount;

[0048] A4. The compensation amount obtained after defuzzification is used as the input of the neural network algorithm.

[0049] In this embodiment, when obtaining the fuzzy vector, the following steps are included:

[0050] A11. Determine a fuzzy set of input values; each fuzzy set is composed of at least one fuzzy subset; specifically, for the deflection angle, there may be the following fuzzy subsets: "small deflection angle", "medium deflection angle" and "large deflection angle"; for the deflection speed, there may be the following fuzzy subsets: "small deflection speed", "medium deflection speed" and "large deflection speed";

[0051] A12. Define a membership function for each fuzzy subset; the membership function is used to describe the degree to which the input value belongs to the subset; specifically, the triangular membership function can be used to define the membership of the three fuzzy subsets of "small", "medium" and "large";

[0052] A13. According to the defined membership function, the membership value of the input value for each fuzzy subset is calculated. The membership value ranges from 0 to 1, representing the degree to which the input value belongs to the fuzzy subset.

[0053] A14. Generate fuzzy vector: combine the calculated membership values ​​into a fuzzy vector as the input of fuzzy control. The fuzzy vector contains the membership information of the input value to all fuzzy subsets.

[0054] In this embodiment, the fuzzy rules consist of a series of IF-THEN statements;

[0055] Specifically, you can set:

[0056] Rule 1: IF the deflection angle is large AND the deflection speed is fast THEN the compensation amount is large

[0057] Rule 2: IF deflection angle is in AND deflection speed is in THEN compensation amount is in

[0058] Rule 3: IF the deflection angle is small AND the deflection speed is slow THEN the compensation amount is small.

[0059] In this embodiment, when defuzzification is performed, the centroid method may be used for defuzzification, and the compensation amount Δ may be expressed as:

[0060]

[0061] Among them, μ i (θ,ω) represents the membership function of the i-th rule; x i represents the compensation amount corresponding to the i-th fuzzy rule; θ represents the deflection angle; ω represents the deflection speed.

[0062] In this embodiment, the compensation device includes an electromagnetic coil and piezoelectric ceramics, which can respond quickly according to the control signal and accurately compensate the electron beam; the compensation device also has a self-calibration function and can maintain high accuracy and stability during long-term operation.

[0063] In this embodiment, when evaluating the quality of the electron beam, the beam spot size and divergence angle parameters are evaluated by a beam quality analyzer or an imaging system.

[0064] The present invention provides a high-precision electron beam deflection compensation method, the working principle and operation flow of which are as follows:

[0065] 1. Preparation stage: Build a real-time monitoring system for electron beam deflection, including a sensor array and a data processing unit. Select a suitable compensation device (such as an electromagnetic coil, piezoelectric ceramics, etc.), and install and debug it. Write a control algorithm program and load it into the control system;

[0066] 2. Measurement phase: Turn on the electron beam generator to generate a stable electron beam. Use the sensor array to monitor the deflection state of the electron beam in real time and transmit the data to the data processing unit for processing and analysis;

[0067] 3. Calculation stage: The data processing unit uses a fuzzy algorithm to calculate the compensation amount based on the monitored electron beam deflection state. The algorithm can dynamically adjust the size and direction of the compensation amount according to the deflection trend and amplitude of the electron beam;

[0068] 4. Compensation stage: The calculated compensation amount is converted into a control signal to drive the compensation device to compensate the electron beam. The compensation device uses efficient driving elements and optimized control strategies to quickly respond to and compensate for the electron beam deflection in a short time;

[0069] 5. Evaluation stage: Use beam quality analyzers, imaging systems and other equipment to evaluate the quality of the compensated electron beam. The evaluation content includes parameters such as beam spot size and divergence angle. Based on the evaluation results, the design of the compensation algorithm and compensation device can be further optimized;

[0070] 6. Optimization stage: According to the quality assessment results and actual processing requirements, the control algorithm and compensation device are continuously optimized and improved. This includes adjusting algorithm parameters, optimizing hardware structure, improving system stability, etc. Through continuous optimization and improvement, a higher precision electron beam deflection compensation effect can be achieved.

[0071] The above is only a preferred embodiment of the present invention. It should be understood that the present invention is not limited to the form disclosed herein, and should not be regarded as excluding other embodiments, but can be used in various other combinations, modifications and environments, and can be modified within the scope of the concept described herein through the above teachings or the technology or knowledge of the relevant field. The changes and modifications made by those skilled in the art shall not deviate from the spirit and scope of the present invention, and shall be within the scope of protection of the claims attached to the present invention.

Claims

1. A high-precision electron beam deflection compensation method, characterized in that: The following steps are involved: S1, real-time monitoring of the deflection state of the electron beam; S2, using the obtained deflection state as an input value to calculate the compensation amount; S3, converting the compensation amount into a control signal, and driving the compensation device to compensate the electron beam; S4. Perform quality assessment on the compensated electron beam to ensure compensation effect.

2. A high-precision electron beam deflection compensation method according to claim 1, characterized in that: When the electron beam is subjected to real-time monitoring, a sensor array is used to capture the deflection information of the electron beam, and a data processing unit is used to process and analyze the collected deflection information to determine the deflection state of the electron beam.

3. A high-precision electron beam deflection compensation method according to claim 1, characterized in that: When calculating the compensation amount, fuzzy control is used, which specifically includes the following steps: A1. Fuzzify the obtained deflection state to obtain a fuzzy vector; A2. Define fuzzy rules. According to the defined fuzzy rules, each fuzzy vector can find the corresponding fuzzy compensation amount; A3, defuzzifying the obtained fuzzy compensation amount; A4. The compensation amount obtained after defuzzification is used as the input of the neural network algorithm.

4. A high-precision electron beam deflection compensation method according to claim 3, characterized in that: When obtaining the fuzzy vector, the following steps are included: A11. Determine the fuzzy set of input values; each fuzzy set consists of at least one fuzzy subset; A12. defining a membership function for each fuzzy subset; the membership function is used to describe the degree to which the input value belongs to the subset; A13. Calculate the membership value of the input value for each fuzzy subset according to the defined membership function; A14. Generate fuzzy vector: combine the calculated membership values ​​into a fuzzy vector as the input of fuzzy control. The fuzzy vector contains the membership information of the input value to all fuzzy subsets.

5. A high-precision electron beam deflection compensation method according to claim 3, characterized in that: The fuzzy rules consist of a series of IF-THEN statements.

6. A high-precision electron beam deflection compensation method according to claim 3, characterized in that: When defuzzifying, the centroid method can be used for defuzzification, and the compensation amount Δ can be expressed as: Among them, μ i (θ,ω) represents the membership function of the i-th rule; x i represents the compensation amount corresponding to the i-th fuzzy rule; θ represents the deflection angle; ω represents the deflection speed.

7. A high-precision electron beam deflection compensation method according to claim 1, characterized in that: The compensation device includes an electromagnetic coil and piezoelectric ceramics, which can respond quickly according to a control signal and accurately compensate the electron beam; the compensation device also has a self-calibration function and can maintain high precision and stability during long-term operation.

8. A high-precision electron beam deflection compensation method according to claim 1, characterized in that: When evaluating the quality of an electron beam, the beam spot size and divergence angle parameters are evaluated using a beam quality analyzer or an imaging system.

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