Boat structure
By setting up slit film parts and counterweights on both sides of the accommodating space of the boat structure, the clamping structure and gravity tension between the clamping members and the clamping grooves are used to solve the problem that the film material is prone to wrinkles and deformation on the boat structure, and the stable tension and efficient load bearing of the material are achieved.
Patent Information
- Application Number
- CN202411986459.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-30
- Publication Date
- 2025-04-15
AI Technical Summary
In plasma enhanced chemical vapor deposition technology, thin film materials are prone to folding and deformation on the boat structure, mainly due to the poor tensile stability of the elastic tension device on the material.
A boat structure is designed. By providing a cushion member and a counterweight member on both sides of the accommodating space, the two sides of the film material are pressed by the clamping structure between the clamping member and the clamping groove, and the tension is generated by the counterweight member under the action of gravity, so that the film material is in a tension state.
It effectively avoids wrinkles and deformation problems of film materials, improves the stability and bearing capacity of the material, simplifies structural design and reduces production costs.
Smart Images
Figure CN119824395A_ABST
Abstract
Description
Technical Field
[0001] The present disclosure relates to the field of photovoltaic and semiconductor technology, and in particular to a boat structure. Background Art
[0002] Plasma Enhanced Chemical Vapor Deposition (PECVD) technology is widely used in surface coating of semiconductor materials and photovoltaic materials, where the materials that can be coated include flat materials, sheet materials and thin film materials. At present, the industry usually uses a boat structure to load the materials to be coated.
[0003] At present, when the material to be coated is a thin film material, an elastic tensioning device is usually provided on the boat structure, and the thin film material is tensioned by the elastic tensioning device to avoid wrinkles and deformation of the thin film material as much as possible. However, since the tensioning force of the elastic tensioning device on the thin film material is relatively poor in stability, the thin film material still has wrinkles and deformation problems. Summary of the invention
[0004] In view of this, an embodiment of the present disclosure provides a boat structure, which solves the problem that the thin film material is prone to wrinkles and deformation when the boat structure carries the thin film material.
[0005] An embodiment of the present disclosure provides a boat structure configured to carry a thin film material, wherein the thin film material has a first side and a second side opposite to each other; wherein the boat structure includes: at least two support members arranged opposite to each other in a first direction, wherein there is a accommodating space between each two of the oppositely arranged support members, and the accommodating space is configured to accommodate the thin film material; at least one film clamping member, wherein the film clamping member is located on a first side of the accommodating space, and the two ends of the film clamping member are respectively connected to the two oppositely arranged support members, wherein the film clamping member has a first clamping groove extending along the first direction; at least one first clamping member, wherein the first clamping member can be clamped with the first clamping groove; and at least one counterweight member, wherein the counterweight member is located on the second side of the accommodating space, wherein the first side of the accommodating space is connected to the accommodating space. The second side of the film material is relatively arranged in a second direction, and the counterweight has a second clamping groove extending along the first direction, wherein the second direction is perpendicular to the first direction; at least one second clamping member, the second clamping member can be clamped with the second clamping groove; wherein, when the film material is located in the accommodating space, the first side edge of the film material extends between the first clamping groove and the first clamping member, so that the first side edge of the film material is pressed between the first clamping member and the film clamping member, and the second side edge of the film material extends between the second clamping groove and the second clamping member, so that the second side edge of the film material is pressed between the second clamping member and the counterweight, and the counterweight generates a pulling force on the film material under the action of gravity, so that the film material can be in a tensioned state.
[0006] In some embodiments, the cross-sections of the first clamping groove and the second clamping groove are both arc-shaped, and the cross-sections of the first clamping member and the second clamping member are both annular or circular.
[0007] In some embodiments, both the first clamping member and the second clamping member are elastic.
[0008] In some embodiments, the number of the support members is multiple, and the multiple support members are arranged into multiple rows along the third direction and into two columns along the first direction. The number of the accommodating space, the film clamping member, the first clamping member, the counterweight member, the second clamping member and the film material are all multiple and arranged one by one, wherein two adjacent support members in each column are connected to each other, and the two support members in each row are arranged relatively along the first direction, wherein the third direction is perpendicular to the first direction and the second direction, respectively.
[0009] In some embodiments, the first direction is a first horizontal direction, the second direction is a vertical direction, and the third direction is a second horizontal direction; wherein, the film material is vertically arranged, and the length extension direction of the film material is the first horizontal direction, wherein, the first side and the second side are opposite to each other in the vertical direction; wherein, the support member comprises: a first sub-support member, vertically arranged; wherein, a first accommodating space is provided between two first sub-support members located in the same row, and the first accommodating space is configured to accommodate the film material; wherein, the two first sub-support members located in the same row are respectively configured to support the two ends of the first clamping member, the film clamping member is located above the first clamping member, and the opening of the first clamping groove faces the first clamping member, the first side extends to the upper side of one side of the first clamping member, and the first clamping member is clamped with the first clamping groove to press the first side; wherein, the counterweight member is close to the second side, and the opening of the second clamping groove faces upward, and the second clamping member is clamped with the second clamping groove to press the second side.
[0010] In some embodiments, the materials of the first sub-support member and the film-blocking member both include conductive materials; the boat structure also includes: a first connecting member, which is vertically arranged and located between two adjacent first sub-support members and connects the two first sub-support members, wherein the material of the first connecting member includes insulating material; wherein, for the multiple rows of the first sub-support members in each column, the first sub-support members located in the 2N-1th row are electrically connected to each other, and the first sub-support members located in the 2Nth row are electrically connected to each other, wherein the first sub-support member located in the 2N-1th row in a column is electrically connected to the first electrode of the power supply, and the first sub-support member located in the 2Nth row in a column is electrically connected to the second electrode of the power supply, so that the two adjacent thin film materials are electrically connected to the first electrode and the second electrode respectively, wherein the polarities of the first electrode and the second electrode are opposite, and wherein N is an integer greater than or equal to 1.
[0011] In some embodiments, the boat structure also includes: two first electrode plates, which are vertically arranged and respectively arranged on one side of the first sub-support members in the first row and the first sub-support members in the last row, respectively, away from the first accommodating space, and both extend along the first horizontal direction; wherein, the first electrode plate and the first sub-support members in adjacent rows are respectively electrically connected to the first electrode and the second electrode, and the first electrode plate and the first sub-support members in adjacent rows are insulated from each other.
[0012] In some embodiments, the first electrode plate is electrically connected to the first sub-support members in the second row or the second to last row.
[0013] In some embodiments, the first direction is a third horizontal direction, the second direction is a vertical direction, and the third direction is a fourth horizontal direction; wherein the film material is vertically arranged, and the width extension direction of the film material is the third horizontal direction, wherein the first side edge and the second side edge are opposite to each other in the vertical direction; wherein the support member comprises: a second sub-support member, vertically arranged; wherein a second accommodating space is provided between two second sub-support members located in the same row, and the second accommodating space is configured to accommodate the film material; wherein the two second sub-support members located in the same row are respectively configured to support the two ends of the first clamping member, the clamping film member is located above the first clamping member, and the opening of the first clamping groove faces the first clamping member, the first side edge extends to the upper side of one side of the first clamping member, and the first clamping member is clamped with the first clamping groove to press the first side edge; wherein the counterweight member is close to the second side edge, and the opening of the second clamping groove faces upward, and the second clamping member is clamped with the second clamping groove to press the second side edge.
[0014] In some embodiments, the materials of the second sub-support and the film-blocking member both include conductive materials; the boat structure also includes: two second electrode plates, which are vertically arranged and respectively located on the side of the two columns of the second sub-supports away from the second accommodating space, and both extend along the fourth horizontal direction, wherein the first second electrode plate connects multiple second sub-supports in the first column, and the second second electrode plate connects multiple second sub-supports in the second column; wherein the second sub-support located in the 2N-1th row in the first column is electrically connected to the first second electrode plate, the second sub-support located in the 2Nth row in the first column is insulated from the first second electrode plate, the first second electrode plate is electrically connected to the first electrode of the power supply, the second sub-support located in the 2N-1th row in the second column is insulated from the second second electrode plate, the second sub-support located in the 2Nth row in the second column is electrically connected to the second second electrode plate, and the second second electrode plate is electrically connected to the second electrode of the power supply, so that two adjacent thin film materials are electrically connected to the first electrode and the second electrode respectively, wherein the polarities of the first electrode and the second electrode are opposite, and wherein N is an integer greater than or equal to 1.
[0015] In some embodiments, the first direction is the fifth horizontal direction, the second direction is the sixth horizontal direction, and the third direction is the vertical direction; wherein the film material is horizontally arranged, the width extension direction of the film material is the fifth horizontal direction, the length extension direction of the film material is the sixth horizontal direction, and the first side edge and the second side edge are opposite to each other along the sixth horizontal direction; wherein the support member comprises: a third sub-support member, horizontally arranged; wherein a third accommodating space is provided between two of the third sub-support members located in the same row, and the third accommodating space is configured to accommodate the film material; wherein the two third sub-support members located in the same row are respectively configured to support the film clamping member at both ends, the opening of the first clamping groove faces the side away from the third accommodating space, the first side extends to near the first clamping groove, and is clamped with the first clamping groove by the first clamping piece to press the first side; wherein, the counterweight is close to the second side, and the opening of the second clamping groove faces upward, and is clamped with the second clamping groove by the second clamping piece to press the second side; wherein, the boat structure also includes: a plurality of fourth sub-support members, which are arranged in sequence at intervals in the vertical direction, and are respectively arranged corresponding to multiple rows of the third sub-support members along the sixth horizontal direction, and the fourth sub-support members extend along the fifth horizontal direction and are configured to support the film material.
[0016] In some embodiments, the materials of the third sub-support, the fourth sub-support and the film-blocking member all include conductive materials; the boat structure also includes: a first conductive member, configured to connect the third sub-support located in the 2N-1th row in the first column, or the fourth sub-support located in the 2N-1th row; a second conductive member, configured to connect the third sub-support located in the 2Nth row in the second column, or the fourth sub-support located in the 2Nth row; wherein the third sub-supports in two adjacent rows are insulated and connected, and the two adjacent fourth sub-supports are insulated and connected, the first conductive member is electrically connected to the first electrode of the power supply, and the second conductive member is electrically connected to the second electrode of the power supply, so that the two adjacent thin film materials are electrically connected to the first electrode and the second electrode respectively, wherein the polarity of the first electrode is opposite to that of the second electrode, and wherein N is an integer greater than or equal to 1.
[0017] In some embodiments, the boat structure also includes: two third electrode plates, which are horizontally arranged and respectively arranged above the first row of the third sub-support members and the first row of the fourth sub-support members, and below the last row of the third sub-support members and the last row of the fourth sub-support members, and both extend along the sixth horizontal direction; wherein the third sub-support member and the fourth sub-support member and the adjacent third electrode plates are respectively electrically connected to the first electrode of the power supply and the second electrode of the power supply, and the third sub-support member and the fourth sub-support member are insulated from the adjacent third electrode plates.
[0018] In some embodiments, the third electrode plate is electrically connected to the third sub-support and the fourth sub-support located in the second row or the second to last row.
[0019] The boat structure provided by the embodiment of the present disclosure utilizes the first clamping piece to be clamped with the first clamping groove of the film clamping piece to press the first side of the film material against the boat structure. At the same time, a counterweight is arranged on the second side of the film material, and the second clamping piece is clamped with the second clamping groove of the counterweight to press the second side of the film material. The counterweight generates a pulling force on the film material under the action of gravity, so that the film material can be in a tensioned state, thereby avoiding the problem of wrinkles and deformation of the film material. BRIEF DESCRIPTION OF THE DRAWINGS
[0020] Figure 1 Shown is a schematic structural diagram of a boat structure and a thin film material provided in one embodiment of the present disclosure.
[0021] Figure 2 Shown Figure 1 A side view of the film clamping member, the first clamping member, the counterweight member, the second clamping member and the film material is shown.
[0022] Figure 3 Shown is a top view of a boat structure provided by another embodiment of the present disclosure.
[0023] Figure 4 Shown Figure 3 A partial enlarged view of the boat structure in area A is shown.
[0024] Figure 5 Shown is a schematic structural diagram of a boat structure and a power supply provided in another embodiment of the present disclosure.
[0025] Figure 6 Shown Figure 5 A partial enlarged view of the boat structure in area B is shown.
[0026] Figure 7 Shown Figure 6 A partial enlarged view of region C is shown.
[0027] Figure 8 Shown is a front view of a boat structure and a thin film material provided by an embodiment of the present disclosure.
[0028] Fig. 9 Shown Figure 8 A cross-sectional view of the boat structure and the film material in the DD direction is shown.
[0029] Fig.10 Shown Fig. 9 A partial enlarged view of the boat structure and the thin film material in area E is shown.
[0030] Fig.11 Shown Fig. 9 A partial enlarged view of the boat structure and the thin film material in area F is shown.
[0031] Fig.12 Shown is a top view of a boat structure provided by another embodiment of the present disclosure.
[0032] Fig.13 Shown is a schematic structural diagram of a boat structure, a thin film material and a power supply provided in another embodiment of the present disclosure.
[0033] Fig.14 Shown Fig.13 A partial enlarged view of the boat structure and thin film material in area G is shown.
[0034] Fig.15 Shown is a cross-sectional view of a second sub-support member, a first clamping member, a counterweight member, a second clamping member, and a film material provided in one embodiment of the present disclosure.
[0035] Fig.16 Shown is a schematic structural diagram of a boat structure and a thin film material provided in another embodiment of the present disclosure.
[0036] Fig.17 Shown Fig.16 A partial enlarged view of the boat structure and the thin film material in the H region is shown.
[0037] Fig.18 Shown Fig.16 A partial enlarged view of the boat structure and thin film material in area I is shown.
[0038] Fig.19 Shown is a schematic structural diagram of a boat structure and a thin film material provided in another embodiment of the present disclosure.
[0039] Fig. 20 Shown Fig.19 A partial enlarged view of the boat structure and the thin film material in the J area is shown.
[0040] Fig.21 Shown is a front view of a boat structure and a thin film material provided by another embodiment of the present disclosure.
[0041] Fig. 22 Shown Fig.21 A partial enlarged view of the boat structure and thin film material in the K region is shown.
[0042] Fig.23 Shown Fig.21 A partial enlarged view of the boat structure and the thin film material in the L area is shown.
[0043] Fig.24 Shown is a side view of a boat structure and a thin film material provided by another embodiment of the present disclosure.
[0044] Fig.25 Shown is a side view of a boat structure, a thin film material, and a power supply provided in accordance with another embodiment of the present disclosure.
[0045] Reference numerals:
[0046] 10. Boat structure; 100. Support member; 1001. Accommodation space; 1011. First side of the accommodation space; 1021. Second side of the accommodation space; 110. First sub-support member; 1101. First accommodation space; 1110. Third clamping groove; 200. Clamping film member; 201. First clamping groove; 300. First clamping member; 400. Counterweight member; 401. Second clamping groove; 500. Second clamping member; 600. First connecting member; 700. First electrode plate; 800. First electrode feed-in member; 900. Second electrode feed-in member; 1000. Second connecting member; 120. Second sub-support member; 1201. Second accommodation space; 1210. Fourth clamping groove; 1100. second electrode plate; 1200, third connecting member; 1300, third electrode feeding member; 1400, fourth electrode feeding member; 1500, fourth connecting member; 1600, fifth connecting member; 130, third sub-support member; 1301, third accommodating space; 140, fourth sub-support member; 1700, first conductive member; 1800, second conductive member; 1900, third electrode plate; 2000, sixth connecting member; 2100, fifth electrode feeding member; 2200, sixth electrode feeding member; X1, first direction; X2, second direction; X3, third direction; 2, thin film material; 21, first side; 22, second side; 3, power supply; 31, first electrode; 32, second electrode. DETAILED DESCRIPTION
[0047] The following will be combined with the drawings in the embodiments of the present disclosure to clearly and completely describe the technical solutions in the embodiments of the present disclosure. Obviously, the described embodiments are only part of the embodiments of the present disclosure, not all of the embodiments. Based on the embodiments in the present disclosure, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present disclosure.
[0048] Figure 1 Shown is a schematic structural diagram of a boat structure and a thin film material provided in one embodiment of the present disclosure. Figure 2 Shown Figure 1 The side view of the film clamping member, the first clamping member, the counterweight member, the second clamping member and the film material is shown. Figure 1 and Figure 2 As shown, the boat structure 10 is configured to carry a film material 2. The film material 2 has a first side 21 and a second side 22 that are opposite.
[0049] The boat structure 10 includes at least two supporting members 100 arranged opposite to each other in a first direction X1, at least one film clamping member 200, at least one first clamping member 300, at least one weight member 400 and at least one second clamping member 500. There is a receiving space 1001 between each two supporting members 100 arranged opposite to each other, and the receiving space 1001 is configured to receive the film material 2. The film clamping member 200 is located at a first side 1011 of the receiving space, and the two ends of the film clamping member 200 are respectively connected to the two supporting members 100 arranged opposite to each other. The film clamping member 200 has a first clamping groove 201 extending along the first direction X1, and the first clamping member 300 can be clamped with the first clamping groove 201. The weight member 400 is located at a second side 1021 of the receiving space, and the first side 1011 of the receiving space and the second side 1021 of the receiving space are arranged opposite to each other in a second direction X2. The weight member 400 has a second clamping groove 401 extending along the first direction X1, and the second direction X2 is perpendicular to the first direction X1. The second clamping member 500 can be clamped with the second clamping slot 401 .
[0050] When the film material 2 is located in the accommodating space 1001, the first side edge 21 of the film material 2 extends between the first clamping groove 201 and the first clamping member 300, so that the first side edge 21 of the film material 2 is pressed between the first clamping member 300 and the film clamping member 200, and the second side edge 22 of the film material 2 extends between the second clamping groove 401 and the second clamping member 500, so that the second side edge 22 of the film material 2 is pressed between the second clamping member 500 and the counterweight 400. The counterweight 400 generates a pulling force on the film material 2 under the action of gravity, so that the film material 2 can be in a tensioned state.
[0051] The boat structure 10 utilizes the first clamping piece 300 to clamp with the first clamping groove 201 of the film clamping piece 200, so as to press the first side edge 21 of the film material 2 against the boat structure 10. At the same time, a counterweight piece 400 is arranged on the second side edge 22 of the film material 2, and the second clamping piece 500 is clamped with the second clamping groove 401 of the counterweight piece 400 to press the second side edge 22 of the film material 2. Under the action of gravity, the counterweight piece 400 generates a pulling force on the film material 2, so that the film material 2 can be in a tensioned state, thereby avoiding the problem of wrinkles and deformation of the film material 2.
[0052] Exemplarily, the first direction X1 is a horizontal direction, and the second direction X2 is a vertical direction. Exemplarily, the boat structure 10 includes two support members 100 arranged opposite to each other in the first direction X1, a clamping film member 200, a first clamping member 300, a counterweight member 400, and a second clamping member 500. The two support members 100 arranged opposite to each other respectively support the two ends of the first clamping member 300, the clamping film member 200 is located above the first clamping member 300, and the opening of the first clamping groove 201 faces downward. The second clamping member 500 is located above the counterweight member 400, and the opening of the second clamping groove 401 faces upward.
[0053] Exemplarily, the film clamping member 200, the first clamping member 300, the weight member 400 and the second clamping member 500 are all rod-shaped structures, and all extend along the first direction X1. Exemplarily, the film clamping member 200, the first clamping member 300, the weight member 400 or the second clamping member 500 can be a rectangular rod-shaped structure, other polygonal rod-shaped structures or a special-shaped rod-shaped structure.
[0054] Exemplarily, both ends of the film clamping member 200 are detachably connected to the support member 100 to facilitate replacement and maintenance of the film clamping member 200 .
[0055] In some embodiments, the cross-sections of the first clamping groove 201 and the second clamping groove 401 are both arc-shaped, and the cross-sections of the first clamping member 300 and the second clamping member 500 are both annular or circular.
[0056] The above arrangement enables the first clamping member 300 to enter the first clamping groove 201 in a rolling manner, and the rolling friction between the first clamping member 300 and the first side edge 21 of the film material 2 is convenient for the first clamping member 300 to enter the first clamping groove 201 and press the first side edge 21 of the film material 2, and also reduces the friction between the first clamping member 300 and the first side edge 21 of the film material 2 as much as possible. In addition, the above arrangement also enables the second clamping member 500 to enter the second clamping groove 401 in a rolling manner, and the rolling friction between the second clamping member 500 and the second side edge 22 of the film material 2 is convenient for the second clamping member 500 to enter the second clamping groove 401 and press the second side edge 22 of the film material 2, and also reduces the friction between the second clamping member 500 and the second side edge 22 of the film material 2 as much as possible, thereby avoiding damage to the film material 2 as much as possible.
[0057] For example, Figure 2 As shown, the cross-sections of the first clamping member 300 and the second clamping member 500 are both in the shape of a circular ring. Compared with the solid first clamping member 300, the hollow first clamping member 300 is lighter and easier to take and put. Similarly, compared with the solid second clamping member 500, the hollow second clamping member 500 is lighter and easier to take and put.
[0058] In some embodiments, both the first clamping member 300 and the second clamping member 500 are elastic, so that the first clamping member 300 can enter the first clamping groove 201 and tightly press the first side edge 21 of the film material 2 between the first clamping member 300 and the film clamping member 200, and the second clamping member 500 can enter the second clamping groove 401 and tightly press the second side edge 22 of the film material 2 between the second clamping member 500 and the counterweight 400.
[0059] In some embodiments, the number of the supporting members 100 is multiple, and the multiple supporting members 100 are arranged in multiple rows along the third direction X3 and in two columns along the first direction X1. The number of the accommodating spaces 1001, the film clamping members 200, the first clamping members 300, the counterweight members 400, the second clamping members 500, and the film material 2 are multiple and arranged one by one. The two adjacent supporting members 100 in each column are connected to each other, and the two supporting members 100 in each row are arranged opposite to each other along the first direction X1. The third direction X3 is perpendicular to the first direction X1 and the second direction X2.
[0060] The boat structure 10 is used to simultaneously carry and tension multiple film materials 2, thereby further improving the carrying capacity of the boat structure 10. In addition, it is convenient for the boat structure 10 to simultaneously deliver multiple film materials 2 to the process equipment, so that the process equipment can simultaneously process multiple film materials 2, thereby further improving the production capacity of the process equipment.
[0061] In some embodiments, Figures 3 to 11 As shown, the first direction X1 is the first horizontal direction, the second direction X2 is the vertical direction, and the third direction X3 is the second horizontal direction. The film material 2 is vertically arranged, the length extension direction of the film material 2 is the first horizontal direction, and the first side 21 and the second side 22 are opposite to each other along the vertical direction.
[0062] The support member 100 includes a first sub-support member 110, which is vertically arranged. There is a first accommodating space 1101 between the two first sub-support members 110 in the same row, and the first accommodating space 1101 is configured to accommodate the film material 2. The two first sub-support members 110 in the same row are respectively configured to support the two ends of the first clamping member 300, the film clamping member 200 is located above the first clamping member 300, and the opening of the first clamping groove 201 faces the first clamping member 300, and the first side edge 21 extends to the upper side of one side of the first clamping member 300, and the first clamping member 300 is clamped with the first clamping groove 201 to press the first side edge 21. The counterweight member 400 is close to the second side edge 22, and the opening of the second clamping groove 401 faces upward, and the second clamping member 500 is clamped with the second clamping groove 401 to press the second side edge 22.
[0063] For example, Figure 7 and Fig.10 As shown, the top of the first sub-support member 110 has a third clamping groove 1110 with an opening facing upward, and the end of the first clamping member 300 is located in the third clamping groove 1110, so that the bottom of the third clamping groove 1110 supports the end of the first clamping member 300, and the end of the clamping film member 200 is clamped with the side wall of the third clamping groove 1110 to ensure the stability of the placement state of the clamping film member 200 and the first clamping member 300.
[0064] In some embodiments, Figures 3 to 11 As shown, the materials of the first sub-support member 110 and the film clamping member 200 both include conductive materials. The boat structure 10 also includes a first connecting member 600, which is vertically arranged and located between two adjacent first sub-support members 110 and connects the two first sub-support members 110, and the material of the first connecting member 600 includes insulating material.
[0065] For the multiple rows of first sub-supports 110 in each column, the first sub-supports 110 in the 2N-1th row are electrically connected to each other, and the first sub-supports 110 in the 2Nth row are electrically connected to each other. The first sub-supports in the 2N-1th row in a column are electrically connected to the first electrode 31 of the power source 3, and the first sub-supports 110 in the 2Nth row in a column are electrically connected to the second electrode 32 of the power source 3, so that two adjacent thin film materials 2 are electrically connected to the first electrode 31 and the second electrode 32 respectively. The polarities of the first electrode 31 and the second electrode 32 are opposite, and N is an integer greater than or equal to 1.
[0066] Exemplarily, the material of the first sub-support member 110 may be graphite, silicon carbide, etc. Exemplarily, the material of the clamping film member 200 may be graphite, silicon carbide, etc. Exemplarily, the material of the first connecting member 600 may be ceramic, plastic, etc.
[0067] Exemplarily, the boat structure 10 further includes a plurality of first electrode feeders 800 and a plurality of second electrode feeders 900. The first sub-supports 110 located in the 2N-1 row in a column are interconnected through the first electrode feeders 800, and the first electrode feeders 800 are electrically connected to the first electrode 31 of the power source 3, so as to realize that the first sub-supports 110 located in the 2N-1 row, the film clamping member 200, and the thin film material 2 are electrically connected to the first electrode 31 of the power source 3. The first sub-supports 110 located in the 2N row in a column are interconnected through the second electrode feeders 900, and the second electrode feeders 900 are electrically connected to the second electrode 32 of the power source 3, so as to realize that the first sub-supports 110 located in the 2N row, the film clamping member 200, and the thin film material 2 are electrically connected to the second electrode 32 of the power source 3. Two adjacent thin film materials 2 are electrically connected to the first electrode 31 and the second electrode 32 respectively, so that there is a potential difference between the two adjacent thin film materials 2, so that the process gas between the two adjacent thin film materials 2 can be ionized to achieve coating of the thin film materials 2.
[0068] In some embodiments, Figure 3 , Figure 5 and Figure 6 As shown, the boat structure 10 further includes two first electrode plates 700, which are vertically arranged and respectively arranged on one side of the first row of first sub-support members 110 and the last row of first sub-support members 110, respectively, away from the first accommodation space 1101, and both extend along the first horizontal direction X1. The first electrode plates 700 and the first sub-support members 110 in the adjacent rows are respectively electrically connected to the first electrode 31 and the second electrode 32, and the first electrode plates 700 and the first sub-support members 110 in the adjacent rows are insulated from each other.
[0069] Through the above arrangement, the first row of first sub-supports 110 and the adjacent first electrode plates 700 can be electrically connected to the two electrodes of the power supply 3 with opposite polarities, so that there is a potential difference between the first row of first sub-supports 110 and the adjacent first electrode plates 700, so that the process gas between the first row of first sub-supports 110 and the adjacent first electrode plates 700 can be ionized, thereby improving the coating efficiency and coating uniformity of the first row of thin film materials 2. In addition, the last row of first sub-supports 110 and the adjacent first electrode plates 700 are electrically connected to the two electrodes of the power supply 3 with opposite polarities, so that there is a potential difference between the last row of first sub-supports 110 and the adjacent first electrode plates 700, so that the process gas between the last row of first sub-supports 110 and the adjacent first electrode plates 700 can be ionized, thereby improving the coating efficiency and coating uniformity of the last row of thin film materials 2.
[0070] Exemplarily, the boat structure 10 also includes four second connectors 1000, which are vertically arranged. Two second connectors 1000 are respectively arranged between the two first sub-supports 110 in the first row and the adjacent first electrode plates 700, and connect the first sub-supports 110 in the first row and the adjacent first electrode plates 700. Another two second connectors 1000 are arranged between the two first sub-supports 110 in the last row and the adjacent first electrode plates 700, and connect the first sub-supports 110 in the last row and the adjacent first electrode plates 700. The material of the second connector 1000 includes an insulating material to achieve an insulating connection between the first electrode plate 700 and the first sub-supports 110 in the adjacent row. Exemplarily, the material of the second connector 1000 may be ceramic, plastic, etc.
[0071] In some embodiments, the first electrode plate 700 is electrically connected to the first sub-support members 110 in the second row or the second to last row, so as to realize the electrical connection between the first electrode plate 700 and the second electrode 32 or the first electrode 31 of the power source 3. Compared with the first electrode plate 700 being electrically connected to the first electrode 31 or the second electrode 32 of the power source 3 separately, the circuit structure is simplified.
[0072] Exemplarily, the first electrode plate 700 located on the side of the first row of first sub-support members 110 away from the first accommodating space 1101 is electrically connected to the first sub-support members 110 of the second row, so that the first electrode plate 700 is electrically connected to the second electrode 32 of the power supply 3, so that the first row of first sub-support members 110 and the adjacent first electrode plate 700 are electrically connected to the first electrode 31 of the power supply 3 and the second electrode 32 of the power supply 3, respectively.
[0073] Exemplarily, when the number of rows of the first sub-support members 110 is an odd number, the first electrode plate 700 located on the side of the last row of first sub-support members 110 away from the first accommodating space 1101 is electrically connected to the first sub-support members 110 in the second-to-last row, so that the first electrode plate 700 is electrically connected to the second electrode 32 of the power supply 3, so that the last row of first sub-support members 110 and the adjacent first electrode plate 700 are electrically connected to the first electrode 31 of the power supply 3 and the second electrode 32 of the power supply 3, respectively.
[0074] Exemplarily, when the number of rows of the first sub-support members 110 is an even number, the first electrode plate 700 located on the side of the last row of first sub-support members 110 away from the first accommodating space 1101 is electrically connected to the first sub-support members 110 in the second-to-last row, so that the first electrode plate 700 is electrically connected to the first electrode 31 of the power supply 3, so that the last row of first sub-support members 110 and the adjacent first electrode plate 700 are electrically connected to the second electrode 32 of the power supply 3 and the first electrode 31 of the power supply 3, respectively.
[0075] In some embodiments, Figures 12 to 15 As shown, the first direction X1 is the third horizontal direction, the second direction X2 is the vertical direction, and the third direction X3 is the fourth horizontal direction. The film material 2 is vertically arranged, the width extension direction of the film material 2 is the third horizontal direction, and the first side 21 and the second side 22 are opposite to each other along the vertical direction.
[0076] The support member 100 includes a second sub-support member 120, which is vertically arranged. There is a second accommodating space 1201 between the two second sub-support members 120 in the same row, and the second accommodating space 1201 is configured to accommodate the film material 2. The two second sub-support members 120 in the same row are respectively configured to support the two ends of the first clamping member 300, the film clamping member 200 is located above the first clamping member 300, and the opening of the first clamping groove 201 faces the first clamping member 300, and the first side edge 21 extends to the upper side of one side of the first clamping member 300, and the first clamping member 300 is clamped with the first clamping groove 201 to press the first side edge 21. The counterweight member 400 is close to the second side edge 22, and the opening of the second clamping groove 401 faces upward, and the second clamping member 500 is clamped with the second clamping groove 401 to press the second side edge 22.
[0077] For example, Fig.15 As shown, the top of the second sub-support member 120 has a fourth clamping groove 1210 with an opening facing upward, and the end of the first clamping member 300 is located in the fourth clamping groove 1210, so that the bottom of the fourth clamping groove 1210 supports the end of the first clamping member 300, and the end of the film clamping member 200 is clamped with the side wall of the fourth clamping groove 1210 to ensure the stability of the placement state of the film clamping member 200 and the first clamping member 300.
[0078] In some embodiments, the materials of the second sub-support 120 and the film clamp 200 both include conductive materials. The boat structure 10 also includes two second electrode plates 1100, which are vertically arranged, and the two second electrode plates 1100 are respectively located on the side of the two columns of second sub-supports 120 away from the second accommodation space 1201, and both extend along the fourth horizontal direction. The first second electrode plate 1100 connects the plurality of second sub-supports 120 in the first column, and the second second electrode plate 1100 connects the plurality of second sub-supports 120 in the second column.
[0079] The second sub-support 120 located in the 2N-1 row in the first column is electrically connected to the first second electrode plate 1100, the second sub-support 120 located in the 2N row in the first column is insulated and connected to the first second electrode plate 1100, and the first second electrode plate 1100 is electrically connected to the first electrode 31 of the power source 3. The second sub-support 120 located in the 2N-1 row in the second column is insulated and connected to the second second electrode plate 1100, the second sub-support 120 located in the 2N row in the second column is electrically connected to the second second electrode plate 1100, and the second second electrode plate 1100 is electrically connected to the second electrode 32 of the power source 3, so that two adjacent thin film materials 2 are electrically connected to the first electrode 31 and the second electrode 32 respectively. The polarity of the first electrode 31 is opposite to that of the second electrode 32, and N is an integer greater than or equal to 1.
[0080] The above arrangement can realize a potential difference between two adjacent thin film materials 2 , so that the process gas between the two adjacent thin film materials 2 can be ionized, thereby realizing coating of the thin film materials 2 .
[0081] Exemplarily, the material of the second sub-supporter 120 may be graphite, silicon carbide, or the like.
[0082] Exemplarily, the boat structure 10 further includes a plurality of third connectors 1200, which are vertically arranged. The third connectors 1200 are arranged between the second sub-support 120 located in the 2Nth row in the first column and the first second electrode plate 1100, and connect the second sub-support 120 located in the 2Nth row in the first column and the first second electrode plate 1100, or the third connectors 1200 are arranged between the second sub-support 120 located in the 2N-1th row in the second column and the second second electrode plate 1100, and connect the second sub-support 120 located in the 2N-1th row in the second column and the second second electrode plate 1100. The material of the third connectors 1200 includes an insulating material to achieve an insulated connection between the second sub-support 120 located in the 2Nth row in the first column and the first second electrode plate 1100, and an insulated connection between the second sub-support 120 located in the 2N-1th row in the second column and the second second electrode plate 1100. For example, the material of the third connection member 1200 may be ceramic, plastic, or the like.
[0083] Exemplarily, the boat structure 10 further includes a third electrode feeder 1300, a fourth electrode feeder 1400, a fourth connector 1500, and a fifth connector 1600. The fourth connector 1500 connects the first second electrode plate 1100 and one end of the fourth electrode feeder 1400, the material of the fourth connector 1500 includes an insulating material, the first second electrode plate 1100 is connected to one end of the third electrode feeder 1300, and the third electrode feeder 1300 is electrically connected to the first electrode 31 of the power source 3. The fifth connector 1600 connects the second second electrode plate 1100 and the other end of the third electrode feeder 1300, the material of the fifth connector 1600 includes an insulating material, the second second electrode plate 1100 is connected to the other end of the fourth electrode feeder 1400, and the fourth electrode feeder 1400 is electrically connected to the second electrode 32 of the power source 3.
[0084] For example, the material of the fourth connection member 1500 may be ceramic, plastic, etc. For example, the material of the fifth connection member 1600 may be ceramic, plastic, etc.
[0085] In some embodiments, Figures 16 to 25 As shown, the first direction X1 is the fifth horizontal direction, the second direction X2 is the sixth horizontal direction, and the third direction X3 is the vertical direction. The film material 2 is arranged horizontally, the width extension direction of the film material 2 is the fifth horizontal direction, and the length extension direction of the film material 2 is the sixth horizontal direction. The first side edge 21 and the second side edge 22 are opposite to each other along the sixth horizontal direction.
[0086] The support member 100 includes a third sub-support member 130, which is arranged horizontally. There is a third accommodating space 1301 between the two third sub-support members 130 in the same row, and the third accommodating space 1301 is configured to accommodate the film material 2. The two third sub-support members 130 in the same row are respectively configured to support the two ends of the film clamping member 200, the opening of the first clamping groove 201 faces the side away from the third accommodating space 1301, and the first side edge 21 extends to the first clamping groove 201, and is clamped with the first clamping groove 201 through the first clamping member 300 to press the first side edge 21. The counterweight member 400 is close to the second side edge 22, and the opening of the second clamping groove 401 faces upward, and is clamped with the second clamping groove 401 through the second clamping member 500 to press the second side edge 22.
[0087] The boat structure 10 further includes a plurality of fourth sub-support members 140, which are arranged in sequence along the vertical direction and are respectively arranged along the sixth horizontal direction corresponding to the plurality of rows of third sub-support members 130. The fourth sub-support members 140 extend along the fifth horizontal direction and are configured to support the film material 2.
[0088] Exemplarily, the third sub-support member 130 and the film-holding member 200 may be an integrated structure or a split structure.
[0089] In some embodiments, Figures 16 to 25 As shown, the materials of the third sub-support 130, the fourth sub-support 140 and the film-blocking member 200 all include conductive materials. The boat structure 10 also includes a first conductive member 1700 and a second conductive member 1800. The first conductive member 1700 is configured to connect the third sub-support 130 located in the 2N-1th row in the first column, or the fourth sub-support 140 located in the 2N-1th row. The second conductive member 1800 is configured to connect the third sub-support 130 located in the 2Nth row in the second column, or the fourth sub-support 140 located in the 2Nth row. The third sub-supports 130 in two adjacent rows are insulated from each other, and the two adjacent fourth sub-supports 140 are insulated from each other. The first conductive member 1700 is electrically connected to the first electrode 31 of the power source 3, and the second conductive member 1800 is electrically connected to the second electrode 32 of the power source 3, so that the two adjacent thin film materials 2 are electrically connected to the first electrode 31 and the second electrode 32, respectively. The polarities of the first electrode 31 and the second electrode 32 are opposite, and N is an integer greater than or equal to 1.
[0090] Exemplarily, the boat structure 10 further includes a plurality of sixth connectors 2000 , the sixth connectors 2000 connecting two adjacent third sub-support members 130 or two adjacent fourth sub-support members 140 , and the material of the sixth connectors 2000 includes insulating material.
[0091] Exemplarily, the material of the third sub-support 130 may be graphite, silicon carbide, etc. Exemplarily, the material of the fourth sub-support 140 may be graphite, silicon carbide, etc. Exemplarily, the material of the sixth connector 2000 may be ceramic, plastic, etc.
[0092] Exemplarily, the boat structure 10 further includes a fifth electrode feeder 2100 and a sixth electrode feeder 2200 , wherein the fifth electrode feeder 2100 electrically connects the second conductive member 1800 with the second electrode 32 of the power source 3 , and the sixth electrode feeder 2200 electrically connects the first conductive member 1700 with the first electrode 31 of the power source 3 .
[0093] In some embodiments, the boat structure 10 further includes two third electrode plates 1900, which are arranged horizontally, and the two third electrode plates 1900 are respectively arranged above the first row of third sub-supports 130 and the first row of fourth sub-supports 140, and below the last row of third sub-supports 130 and the last row of fourth sub-supports 140, and both extend along the sixth horizontal direction. The third sub-supports 130 and the fourth sub-supports 140 and the adjacent third electrode plates 1900 are electrically connected to the first electrode 31 of the power source 3 and the second electrode 32 of the power source 3, respectively, and the third sub-supports 130 and the fourth sub-supports 140 and the adjacent third electrode plates 1900 are insulated from each other.
[0094] Through the above-mentioned arrangement, the first-row third sub-support 130 and the first-row fourth sub-support 140 and the adjacent third electrode plate 1900 can be electrically connected to two electrodes of opposite polarities of the power supply 3 respectively, so that there is a potential difference between the first-row third sub-support 130 and the first-row fourth sub-support 140 and the adjacent third electrode plate 1900, so that the process gas between the third sub-support 130 and the first-row fourth sub-support 140 and the adjacent third electrode plate 1900 can be ionized, thereby improving the coating efficiency and coating uniformity of the first-row thin film material 2. In addition, the last row of the third sub-support 130 and the last row of the fourth sub-support 140 and the adjacent third electrode plate 1900 are electrically connected to two electrodes of opposite polarities of the power supply 3, so that there is a potential difference between the last row of the third sub-support 130 and the last row of the fourth sub-support 140 and the adjacent third electrode plate 1900, so that the process gas between the last row of the third sub-support 130 and the last row of the fourth sub-support 140 and the adjacent third electrode plate 1900 can be ionized, thereby improving the coating efficiency and coating uniformity of the last row of thin film material 2.
[0095] In some embodiments, the third electrode plate 1900 is electrically connected to the third sub-support member 130 and the fourth sub-support member 140 located in the second row or the second to last row, so as to realize the electrical connection between the third electrode plate 1900 and the first electrode 31 or the second electrode 32 of the power source 3. Compared with the third electrode plate 1900 being electrically connected to the first electrode 31 or the second electrode 32 of the power source 3 separately, the circuit structure is simplified.
[0096] Exemplarily, the top third electrode plate 1900 is insulated and connected to the third sub-support 130 and the fourth sub-support 140 of the first row of the first column, and is electrically connected to the third sub-support 130 and the fourth sub-support 140 of the second row of the second column, so that the top third electrode plate 1900 can be electrically connected to the second electrode 32 of the power supply 3.
[0097] Exemplarily, when the number of the third sub-support members 130 and the fourth sub-support members 140 is an even number, the bottom third electrode plate 1900 is electrically connected to the third sub-support members 130 and the fourth sub-support members 140 in the last row of the second column, and the third electrode plate 1900 is electrically connected to the fifth electrode feed-in member 2100, so that the third sub-support members 130 and the fourth sub-support members 140 in the last row are electrically connected to the second electrode 32 of the power source 3 through the bottom third electrode plate 1900; or, The bottom third electrode plate 1900 is insulated and connected to the third sub-support 130 and the fourth sub-support 140 in the last row, and is electrically connected to the third sub-support 130 and the fourth sub-support 140 in the second-to-last row of the first column. At the same time, the bottom third electrode plate 1900 is electrically connected to the sixth electrode feeding element 2200, so as to realize electrical connection between the third sub-support 130 and the fourth sub-support 140 in the second-to-last row and the first electrode 31 of the power supply 3 through the bottom third electrode plate 1900.
[0098] Exemplarily, when the number of third sub-support members 130 and fourth sub-support members 140 is an odd number, the bottom third electrode plate 1900 is insulated and connected to the third sub-support members 130 and fourth sub-support members 140 in the last row, and the bottom third electrode plate 1900 is electrically connected to the third sub-support members 130 and fourth sub-support members 140 in the second to last row of the second column, and at the same time, the bottom third electrode plate 1900 is electrically connected to the fifth electrode feeding member 2100, so as to realize the electrical connection between the third sub-support members 130 and fourth sub-support members 140 in the second to last row and the second electrode 32 of the power supply 3 through the bottom third electrode plate 1900.
[0099] The phrases "one embodiment", "an embodiment", etc. mentioned in the specification indicate that the embodiment described may include a specific feature, structure or characteristic, but not every embodiment may include the specific feature, structure or characteristic. In addition, such phrases do not necessarily refer to the same embodiment. In addition, when a specific feature, structure or characteristic is described in conjunction with an embodiment, it is within the knowledge of those skilled in the art to implement such feature, structure or characteristic in conjunction with other embodiments, whether explicitly or not explicitly described.
[0100] It should be understood that “on,” “above,” and “over” in this disclosure should be interpreted in the broadest manner, so that “on” not only means “directly on something,” but also includes the meaning of “on something” with intervening features or layers therebetween, and “above” or “over” not only includes the meaning of “above” or “over,” but also may include the meaning of “above” or “over something” with no intervening features or layers therebetween (i.e., directly on something).
[0101] Additionally, spatially relative terms, such as "below," "below," "beneath," "above," "above," etc., may be used herein for ease of description to describe the relationship of one component or feature to other components or features as shown in the figures. The spatially relative terms are intended to encompass different orientations of the component in use or operation in addition to the orientation depicted in the figures. The device may be otherwise oriented (rotated 90 degrees or at other orientations), and the spatially relative descriptors used herein may likewise be interpreted accordingly.
[0102] It should be noted that, in this article, the terms "include", "comprises" or any other variations thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, an element defined by the sentence "comprises a ..." does not exclude the existence of other identical elements in the process, method, article or device including the element.
[0103] The above description is only a preferred embodiment of the present disclosure and is not intended to limit the present disclosure. Any modifications, equivalent substitutions, etc. made within the spirit and principles of the present disclosure should be included in the protection scope of the present disclosure.
Claims
1. A boat structure, characterized in that: configured to carry a film material, wherein the film material has a first side edge and a second side edge opposite to each other; Wherein, the boat structure comprises: At least two supporting members arranged opposite to each other in a first direction, wherein there is a receiving space between each two supporting members arranged opposite to each other, and the receiving space is configured to receive the film material; At least one film clamping member, the film clamping member is located at a first side of the accommodating space, and two ends of the film clamping member are respectively connected to two oppositely arranged supporting members, wherein the film clamping member has a first clamping groove extending along the first direction; At least one first clamping member, wherein the first clamping member can be clamped with the first clamping groove; at least one counterweight, the counterweight being located at a second side of the accommodation space, wherein the first side of the accommodation space and the second side of the accommodation space are arranged opposite to each other in a second direction, and the counterweight has a second clamping groove extending along the first direction, wherein the second direction is perpendicular to the first direction; At least one second clamping member, wherein the second clamping member can be clamped with the second clamping groove; Among them, when the film material is located in the accommodating space, the first side edge of the film material extends between the first clamping groove and the first clamping member, so that the first side edge of the film material is pressed between the first clamping member and the film clamping member, and the second side edge of the film material extends between the second clamping groove and the second clamping member, so that the second side edge of the film material is pressed between the second clamping member and the counterweight member, and the counterweight member generates a pulling force on the film material under the action of gravity, so that the film material can be in a tensioned state.
2. The boat structure according to claim 1, characterized in that: The cross-sections of the first clamping groove and the second clamping groove are both arc-shaped, and the cross-sections of the first clamping member and the second clamping member are both annular or circular.
3. The boat structure according to claim 1, characterized in that: The first clamping member and the second clamping member are both elastic.
4. The boat structure according to claim 1, characterized in that: The number of the support members is multiple, and the multiple support members are arranged into multiple rows along the third direction and into two columns along the first direction. The number of the accommodating spaces, the film clamping members, the first clamping members, the counterweight members, the second clamping members and the film materials are multiple and arranged in one-to-one correspondence, wherein two adjacent support members in each column are connected to each other, and the two support members in each row are arranged opposite to each other along the first direction, wherein the third direction is perpendicular to the first direction and the second direction, respectively.
5. The boat structure according to claim 4, characterized in that: The first direction is a first horizontal direction, the second direction is a vertical direction, and the third direction is a second horizontal direction; Wherein, the film material is arranged vertically, the length extension direction of the film material is the first horizontal direction, wherein the first side edge and the second side edge are opposite to each other in the vertical direction; Wherein, the support member comprises: A first sub-support member is vertically arranged; Wherein, there is a first accommodation space between two first sub-support members located in the same row, and the first accommodation space is configured to accommodate the film material; The two first sub-support members located in the same row are respectively configured to support two ends of the first clamping member, the clamping film member is located above the first clamping member, and the opening of the first clamping groove faces the first clamping member, the first side edge extends to the upper side of one side of the first clamping member, and the first clamping member is clamped with the first clamping groove to press the first side edge; Wherein, the counterweight is close to the second side, and the opening of the second clamping groove faces upward, and the second clamping member is clamped with the second clamping groove to press the second side.
6. The boat structure according to claim 5, characterized in that: The materials of the first sub-support member and the film clamping member both include conductive materials; The boat structure further comprises: A first connecting member is vertically arranged and located between two adjacent first sub-support members, and connects the two first sub-support members, wherein the material of the first connecting member includes insulating material; Among them, for the multiple rows of the first sub-support members in each column, the first sub-support members located in the 2N-1 row are electrically connected to each other, and the first sub-support members located in the 2N row are electrically connected to each other, wherein the first sub-support members located in the 2N-1 row in a column are electrically connected to the first electrode of the power supply, and the first sub-support members located in the 2N row in a column are electrically connected to the second electrode of the power supply, so that two adjacent thin film materials are electrically connected to the first electrode and the second electrode respectively, wherein the polarities of the first electrode and the second electrode are opposite, and wherein N is an integer greater than or equal to 1.
7. The boat structure according to claim 6, characterized in that: Also includes: Two first electrode plates are vertically arranged and are respectively arranged on one side of the first sub-support members in the first row and the first sub-support members in the last row, each away from the first accommodation space, and both extend along the first horizontal direction; The first electrode plate and the first sub-support members in adjacent rows are electrically connected to the first electrode and the second electrode respectively, and the first electrode plate and the first sub-support members in adjacent rows are insulated from each other.
8. The boat structure according to claim 7, characterized in that: The first electrode plate is electrically connected to the first sub-support members in the second row or the second to last row.
9. The boat structure according to claim 4, characterized in that: The first direction is a third horizontal direction, the second direction is a vertical direction, and the third direction is a fourth horizontal direction; Wherein, the film material is arranged vertically, the width extension direction of the film material is the third horizontal direction, and the first side edge and the second side edge are opposite to each other in the vertical direction; Wherein, the support member comprises: A second sub-support member is vertically arranged; Wherein, there is a second accommodating space between two second sub-support members located in the same row, and the second accommodating space is configured to accommodate the film material; The two second sub-support members located in the same row are respectively configured to support the two ends of the first clamping member, the clamping film member is located above the first clamping member, and the opening of the first clamping groove faces the first clamping member, the first side edge extends to the upper side of one side of the first clamping member, and the first clamping member is clamped with the first clamping groove to press the first side edge; Wherein, the counterweight is close to the second side, and the opening of the second clamping groove faces upward, and the second clamping member is clamped with the second clamping groove to press the second side.
10. The boat structure according to claim 9, characterized in that: The materials of the second sub-support member and the film clamping member both include conductive materials; The boat structure further comprises: Two second electrode plates are vertically arranged and respectively located on one side of the two columns of the second sub-support members away from the second accommodation space, and both extend along the fourth horizontal direction, wherein the first second electrode plate is connected to the plurality of second sub-support members in the first column, and the second second electrode plate is connected to the plurality of second sub-support members in the second column; Among them, the second sub-support member located in the 2N-1 row in the first column is electrically connected to the first second electrode plate, the second sub-support member located in the 2N row in the first column is insulated and connected to the first second electrode plate, the first second electrode plate is electrically connected to the first electrode of the power supply, the second sub-support member located in the 2N-1 row in the second column is insulated and connected to the second second electrode plate, the second sub-support member located in the 2N row in the second column is electrically connected to the second second electrode plate, and the second second electrode plate is electrically connected to the second electrode of the power supply, so that two adjacent thin film materials are electrically connected to the first electrode and the second electrode, respectively, wherein the polarities of the first electrode and the second electrode are opposite, and wherein N is an integer greater than or equal to 1.
11. The boat structure according to claim 4, characterized in that: The first direction is a fifth horizontal direction, the second direction is a sixth horizontal direction, and the third direction is a vertical direction; Wherein, the film material is arranged horizontally, the width extension direction of the film material is the fifth horizontal direction, the length extension direction of the film material is the sixth horizontal direction, and the first side edge and the second side edge are opposite to each other along the sixth horizontal direction; Wherein, the support member comprises: A third sub-support member is arranged horizontally; Wherein, there is a third accommodating space between two third sub-support members located in the same row, and the third accommodating space is configured to accommodate the film material; The two third sub-support members located in the same row are respectively configured to support the two ends of the clamping film member, the opening of the first clamping groove faces the side away from the third accommodating space, the first side edge extends to the side close to the first clamping groove, and the first clamping member is clamped with the first clamping groove to press the first side edge; The counterweight is close to the second side, and the opening of the second clamping groove faces upward, and the second clamping groove is clamped by the second clamping member to press the second side; Wherein, the boat structure further comprises: A plurality of fourth sub-support members are arranged in sequence and spaced apart in the vertical direction, and are respectively arranged corresponding to a plurality of rows of the third sub-support members along the sixth horizontal direction. The fourth sub-support members extend along the fifth horizontal direction and are configured to support the film material.
12. The boat structure according to claim 11, characterized in that: The materials of the third sub-support member, the fourth sub-support member and the film clamping member all include conductive materials; The boat structure further comprises: a first conductive member, configured to connect the third sub-support member located in the 2N-1th row in the first column, or the fourth sub-support member located in the 2N-1th row; a second conductive member, configured to connect the third sub-support member located in the 2Nth row in the second column, or the fourth sub-support member located in the 2Nth row; Among them, two adjacent rows of the third sub-support members are insulated and connected, and two adjacent fourth sub-support members are insulated and connected, the first conductive member is electrically connected to the first electrode of the power supply, and the second conductive member is electrically connected to the second electrode of the power supply, so that two adjacent thin film materials are electrically connected to the first electrode and the second electrode respectively, wherein the polarities of the first electrode and the second electrode are opposite, and wherein N is an integer greater than or equal to 1.
13. The boat structure according to claim 12, characterized in that: Also includes: Two third electrode plates are arranged horizontally and are respectively arranged above the third sub-support members in the first row and the fourth sub-support members in the first row, and below the third sub-support members in the last row and the fourth sub-support members in the last row, and both extend along the sixth horizontal direction; The third sub-support and the fourth sub-support and the adjacent third electrode plate are electrically connected to the first electrode and the second electrode of the power supply respectively, and the third sub-support and the fourth sub-support and the adjacent third electrode plate are insulated from each other.
14. The boat structure according to claim 13, characterized in that: The third electrode plate is electrically connected to the third sub-support member and the fourth sub-support member located in the second row or the second to last row.