Damping system for low-temperature scanning probe microscope

Abstract

The invention provides a damping system for a low-temperature scanning probe microscope, which comprises a refrigeration device, a damping device and a test platform which are separately arranged, and is characterized in that the refrigeration device and the test platform are arranged at two sides of the damping device; the refrigerating device comprises a cold source and a conveying pipeline; two ends of the conveying pipeline are respectively connected with the cold source and the scanning part; the damping device comprises a wall body structure and damping particles, the damping particles are arranged in the wall body structure, the damping particles are tightly arranged in the wall body structure, the wall body structure is provided with a first pipeline connecting part, and the first pipeline connecting part is connected with a part of structure of the conveying pipeline and used for absorbing vibration of the conveying pipeline. The refrigerating device and the testing platform are arranged in a split mode, the contact area between the refrigerating device and the testing platform is greatly reduced, and vibration conduction is reduced; vibration of the conveying pipeline is conducted to the first pipeline connecting part, the vibration is converted into heat energy through the damping particles or vibration energy is consumed through compression and flowing of the damping particles, and therefore the damping effect is achieved.

Description

Technical Field

[0001] The present invention relates to the technical field of scanning probe microscopes, and in particular to a vibration reduction system for low-temperature scanning probe microscopes. Background Art

[0002] Scanning Probe Microscope (SPM) is a general term for scanning tunneling microscope and various new probe microscopes developed on the basis of scanning tunneling microscope (atomic force microscope, electrostatic force microscope, magnetic force microscope, scanning ion conductivity microscope, scanning electrochemical microscope, etc.). It is a surface analysis instrument developed internationally in recent years. It is a high-tech product integrating optics, mechanics and electronics by comprehensively utilizing modern scientific and technological achievements such as optoelectronic technology, laser technology, weak signal detection technology, precision mechanical design and processing, automatic control technology, digital signal processing technology, applied optical technology, computer high-speed acquisition and control, and high-resolution graphics processing technology.

[0003] With the development of nanotechnology and materials science, the demand for high-precision and high-stability scanning probe microscope (SPM) systems is growing. When a traditional scanning probe microscope (SPM) system is operating in a low-temperature environment, the liquefaction chamber needs to be placed above the test chamber. The liquefaction chamber is in direct contact with the test chamber, and the vibration generated during the operation of the liquefaction chamber will be transmitted to the test chamber. The liquefaction chamber generates heat during operation, and the test chamber is a low-temperature environment. The traditional arrangement of the liquefaction chamber and the test chamber will affect the stability of the temperature in the test chamber, causing the temperature at the top of the test chamber to be slightly higher than the temperature at the bottom, causing thermal stress in the test chamber. Due to the influence of factors such as external vibration and internal thermal stress, it is easy to cause a decrease in scanning accuracy and insufficient system stability. Summary of the invention

[0004] In view of this, an embodiment of the present invention provides a vibration reduction system for a low-temperature scanning probe microscope to eliminate or improve one or more defects existing in the prior art.

[0005] The present invention provides a vibration reduction system for a low-temperature scanning probe microscope, comprising: a refrigeration device, a vibration reduction device and a test platform which are separately arranged, wherein the refrigeration device and the test platform are arranged on both sides of the vibration reduction device, and the test platform is used to install a scanning component of the low-temperature scanning probe microscope; The refrigeration device includes a cold source and a delivery pipeline, and the two ends of the delivery pipeline are respectively connected to the cold source and the scanning component; the shock-absorbing device includes a wall structure and shock-absorbing particles, and the shock-absorbing particles are arranged inside the wall structure. The shock-absorbing particles are closely arranged inside the wall structure, and the wall structure has a first pipeline connecting part, which is connected to a part of the structure of the delivery pipeline and is used to absorb the vibration of the delivery pipeline.

[0006] In some embodiments of the present invention, the wall structure includes a protective housing, a baffle, a shock-absorbing particle addition port, a shock-absorbing particle discharge mechanism, an air bag, and a monitoring unit; The protective shell has a containing cavity and a collecting cavity, the collecting cavity is arranged on one side of the containing cavity, the baffle is arranged at the adjacent position of the containing cavity and the collecting cavity, the baffle is inclined toward one side of the containing cavity, and the baffle has a plurality of through holes, the diameter of the through holes is larger than the particle size of the shock absorbing particles; The shock-absorbing particle adding port is arranged at the top of the protective shell and is connected to the containing cavity; The damping particle discharge mechanism is arranged at the bottom of the protective shell and is connected to the containing cavity; the damping particle discharge mechanism comprises a spiral conveying blade and a motor; wherein the spiral conveying blade is transversely arranged inside the protective shell, the motor is fixedly arranged outside the protective shell, and the output shaft of the motor is fixedly connected to one end of the spiral conveying blade; The airbag is arranged on the inner wall of the protective shell, the airbag is in contact with the shock-absorbing particles, and the airbag has an inflation interface for connecting to an inflation device; The monitoring unit is arranged on a side of the airbag away from the protective shell, and is used to monitor the compaction degree of the shock-absorbing particles.

[0007] In some embodiments of the present invention, the height of the wall structure is not less than the height of the scanning component, and the width of the wall structure is not less than the width of the scanning component.

[0008] In some embodiments of the present invention, the wall structure further has a second pipe connecting portion, and the second pipe connecting portion is used to connect a vacuum pipe, and both ends of the vacuum pipe are respectively connected to a vacuum device and the scanning component.

[0009] In some embodiments of the present invention, the first pipe connection part and / or the second pipe connection part comprises a bracket, an input pipe joint, an output pipe joint, a connecting pipe and a spring; Wherein, the bracket is arranged on the top of the protective shell, and two opposite side walls of the bracket are provided with mounting holes for mounting the input pipe joint and the output pipe joint, the apertures of the mounting holes are larger than the outer diameters of the input pipe joint and the output pipe joint, the mounting holes are arranged non-contactingly with the input pipe joint and the output pipe joint, and the hole walls of the mounting holes are connected to the outer walls of the input pipe joint and the output pipe joint through the spring; one end of the input pipe joint is used to connect the delivery pipe connected to the cold source, and one end of the output pipe joint is used to connect the delivery pipe connected to the scanning component; The connecting pipe is arranged inside the protective shell and in contact with the shock-absorbing particles, and two ends of the connecting pipe are respectively connected to the other ends of the input pipe joint and the output pipe joint; The top of the protective shell is provided with a through hole, the connecting pipe passes through the through hole, the aperture of the through hole is larger than the outer diameter of the connecting pipe, and the through hole and the connecting pipe are arranged in a non-contact manner.

[0010] In some embodiments of the present invention, flanges are provided at the connection portions between the input pipe joint and the output pipe joint and the springs, at least four springs are provided, and the springs are arranged at equal intervals along the circumference of the flanges.

[0011] In some embodiments of the present invention, the connecting pipe is in a U-shaped structure or an S-shaped structure.

[0012] In some embodiments of the present invention, the particle size of the shock-absorbing particles is 0.125 mm to 1 mm, and the density of the shock-absorbing particles is 1.2 g / cm 3 Up to 1.8g / cm 3 .

[0013] In some embodiments of the present invention, the cold source includes a buffer tank, a liquefaction assembly, and a return pipe; Wherein, the buffer tank is used to contain inert gas, and the buffer tank is connected to the liquefaction component; The liquefaction component is used to liquefy the inert gas into an inert liquid; The delivery pipeline is connected to the liquefaction component and the scanning component respectively, and is used to deliver the inert liquid to the scanning component; The reflux pipeline is connected to the scanning component and the buffer tank respectively, and is used for recovering the inert gas into the buffer tank.

[0014] In some embodiments of the present invention, the refrigeration device further includes a shock-absorbing bracket and a shock-absorbing foot; the buffer tank and the liquefaction assembly are both arranged in the shock-absorbing bracket, and the shock-absorbing foot is arranged at the bottom of the shock-absorbing bracket.

[0015] The refrigeration device and the test platform of the shock absorbing system for the low-temperature scanning probe microscope of the present invention are separately arranged, which greatly reduces the contact area between the two and reduces the conduction of vibration; the shock absorbing device can play a certain heat insulation role to ensure the temperature stability at the test platform; the vibration of the conveying pipeline is transmitted to the first pipeline connection part, and the shock absorbing particles convert the vibration into heat energy or consume the vibration energy through the compression and flow of the shock absorbing particles, thereby achieving the shock absorption effect.

[0016] Additional advantages, purposes, and features of the present invention will be described in part in the following description, and will become apparent to those skilled in the art after studying the following, or may be learned from the practice of the present invention. The purposes and other advantages of the present invention may be achieved and obtained by the structures specifically indicated in the specification and the accompanying drawings.

[0017] Those skilled in the art will appreciate that the objectives and advantages that can be achieved with the present invention are not limited to the above specific description, and the above and other objectives that can be achieved by the present invention will be more clearly understood from the following detailed description. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] The drawings described herein are used to provide a further understanding of the present invention, constitute a part of this application, and do not constitute a limitation of the present invention. The components in the drawings are not drawn to scale, but are only for illustrating the principles of the present invention. In order to facilitate the illustration and description of some parts of the present invention, the corresponding parts in the drawings may be enlarged, that is, they may become larger relative to other components in the exemplary device actually manufactured according to the present invention. In the drawings: Figure 1 Schematic diagram of the structure of a vibration reduction system for a low-temperature scanning probe microscope in one embodiment of the present invention.

[0019] Figure 2 Schematic diagram of the structure of a shock absorbing device in one embodiment of the present invention.

[0020] Figure 3 Schematic diagram of the structure of the output pipe joint and the spring in one embodiment of the present invention.

[0021] Figure numerals: 1. Refrigeration device; 11. Buffer tank; 12. Liquefaction component; 13. Delivery pipeline; 14. Return pipeline; 2. Shock-absorbing device; 201. Protective shell; 202. Baffle; 203. Shock-absorbing particle addition port; 204. Airbag; 205. Monitoring unit; 206. Spiral conveying blade; 207. Motor; 208. Through hole; 211. Bracket; 212. Input pipeline joint; 213. Output pipeline joint; 214. Connecting pipe; 215. Spring; 216. Mounting hole; 3. Test platform. DETAILED DESCRIPTION

[0022] In order to make the purpose, technical solution and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with the embodiments and the accompanying drawings. Here, the illustrative embodiments of the present invention and their descriptions are used to explain the present invention, but are not intended to limit the present invention.

[0023] It should also be noted that, in order to avoid obscuring the present invention due to unnecessary details, only structures and / or processing steps closely related to the solutions according to the present invention are shown in the accompanying drawings, while other details that are not closely related to the present invention are omitted.

[0024] It should be emphasized that the term “include / comprises” when used herein refers to the presence of features, elements, steps or components, but does not exclude the presence or addition of one or more other features, elements, steps or components.

[0025] It should also be noted that, unless otherwise specified, the term “connection” herein may refer not only to a direct connection but also to an indirect connection involving an intermediate.

[0026] Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. In the accompanying drawings, the same reference numerals represent the same or similar components, or the same or similar steps.

[0027] In order to solve the problem in the prior art that the test chamber is vibrated, resulting in reduced scanning accuracy and insufficient system stability, an embodiment of the present invention provides a shock absorbing system for a low-temperature scanning probe microscope, which can effectively absorb the vibration of a refrigeration device or other device that can generate vibrations, thereby improving scanning accuracy and system stability.

[0028] Many scanning probe microscopes need to work in a low temperature environment to improve resolution and reduce thermal drift. For example, an ultra-high vacuum low-temperature scanning probe microscope can operate in a temperature range of 5K to 300K, and can achieve extremely low temperature stability. In addition, a low temperature environment can significantly improve energy resolution and quality factor, thereby improving the signal-to-noise ratio. It is usually necessary to introduce liquid nitrogen or liquid helium into the test chamber to cool it down to obtain a low temperature environment. The refrigeration device 1 can convert liquid nitrogen or liquid helium from a gaseous state to a liquid state. During the conversion process, vibrations will inevitably be generated and transmitted to the test chamber, affecting the scanning accuracy and system stability.

[0029] Reference Figure 1The embodiment of the present invention provides a shock absorbing system for a low-temperature scanning probe microscope, comprising: a refrigeration device 1, a shock absorbing device 2 and a test platform 3, which are separately arranged. The refrigeration device 1 and the test platform 3 are arranged on both sides of the shock absorbing device 2, and the test platform 3 is used to install the scanning component of the low-temperature scanning probe microscope. In the prior art, the refrigeration device 1 is mostly arranged on the top of the test platform 3, and the vibration generated by the refrigeration device 1 is largely transmitted to the scanning component on the test platform 3. The refrigeration device 1 and the test platform 3 in this embodiment are separately arranged, which greatly reduces the contact area between the two. The coolant in the refrigeration device 1 enters the test cavity on the test platform 3 through the delivery pipe 13, and only the delivery pipe 13 is shock-absorbing. In addition, the shock absorbing device 2 is arranged between the refrigeration device 1 and the test platform 3. The refrigeration device 1 will generate heat when working, and the shock absorbing device 2 can play a certain role in heat insulation to ensure the temperature stability at the test platform 3. It should be noted that a test cavity is arranged on the top of the test platform 3, and the scanning component is arranged inside the test cavity.

[0030] The refrigeration device 1 includes a cold source and a delivery pipeline 13, and the two ends of the delivery pipeline 13 are respectively connected to the cold source and the scanning component. The cold source is used to convert nitrogen or helium into liquid, and its working process will generate vibration. The liquid nitrogen or liquid helium is delivered to the inside of the test chamber through the delivery pipeline 13.

[0031] The shock absorbing device 2 includes a wall structure and shock absorbing particles, the shock absorbing particles are arranged inside the wall structure, the shock absorbing particles are closely arranged inside the wall structure, the wall structure has a first pipe connection part, the first pipe connection part is connected to a part of the structure of the delivery pipe 13, and is used to absorb the vibration of the delivery pipe 13. The vibration of the delivery pipe 13 is transmitted to the first pipe connection part, and the shock absorbing particles convert the vibration into heat energy or consume the vibration energy through the compression and flow of the shock absorbing particles, thereby achieving the effect of shock absorption, and the shock absorbing particles can be selected from sand or fine stones.

[0032] It should be noted that the shock absorbing device 2 may also include a wall structure and shock absorbing oil. The vibration of the conveying pipeline 13 is transmitted to the shock absorbing oil through the first pipe connection part. Friction is generated between the oil molecules in the shock absorbing oil to form a damping force on the vibration, so that the vibration of the conveying pipeline 13 is converted into heat energy of the shock absorbing oil, which is then absorbed by the wall structure and dissipated into the air.

[0033] In some embodiments, reference Figure 2 The wall structure includes a protective shell 201, a baffle 202, a shock-absorbing particle inlet 203, a shock-absorbing particle discharge mechanism, an airbag 204 and a monitoring unit 205.

[0034] The protective shell 201 has a holding cavity and a collecting cavity. The collecting cavity is arranged on one side of the holding cavity. The baffle 202 is arranged at the adjacent position of the holding cavity and the collecting cavity. The baffle 202 is inclined toward one side of the holding cavity. The baffle 202 has a plurality of through holes, and the diameter of the through holes is larger than the particle size of the shock-absorbing particles. The holding cavity is used to place the shock-absorbing particles. The shock-absorbing particles can enter the collecting cavity from the holding cavity through the baffle 202. The vibration at the first pipe connection portion can cause the shock-absorbing particles to produce a small displacement to form a flow, so that the shock-absorbing particles can enter the collecting cavity from the holding cavity through the baffle 202 to consume the energy of the vibration. Specifically, the baffle 202 is arranged at a lower position inside the protective shell 201, and the baffle 202 is inclined toward one side of the holding cavity to facilitate the shock-absorbing particles to fall into the collecting cavity through the baffle 202. An observation window can be set on the collection chamber to facilitate observation of the amount of shock-absorbing particles in the collection chamber. When too many shock-absorbing particles are accumulated in the collection chamber or the shock-absorbing particles block the baffle 202, the shock-absorbing particles in the protective shell 201 can be removed and refilled to prevent the shock-absorbing effect from failing after long-term use.

[0035] It should be noted that the vias are evenly distributed on the baffle 202, and the diameter of the vias can be selected to be 1.5 times the diameter of the shock-absorbing particles, and the distance between adjacent vias is 2-5 times the diameter of the vias. The compaction degree of the shock-absorbing particles can be divided into a light compaction degree, a medium compaction degree, and a heavy compaction degree. When the shock-absorbing particles are filled from the shock-absorbing particle addition port 203 to the protective shell 201, it is a light compaction degree, and when the larger gaps between the shock-absorbing particles are filled, it is a medium compaction degree. After the shock-absorbing system has been running for a long time, the state in which the shock-absorbing particles are arranged very closely is a heavy compaction degree. The shock-absorbing particles with a light compaction degree and a medium compaction degree can leak out of the vias, and the shock-absorbing particles with a heavy compaction degree form larger particle clusters that cannot leak out of the vias. In the process of filling the shock-absorbing particles and filling the larger gaps between the shock-absorbing particles, the baffle 202 can be blocked by a non-porous flat plate in the collection chamber to prevent the shock-absorbing particles from leaking out; when the shock-absorbing particles reach a moderate compaction level, the non-porous flat plate can be removed. The shock-absorbing particles with a moderate compaction level have a good shock-absorbing effect. During operation, the shock-absorbing particles can leak out from the through holes after absorbing the vibration, and the vibration is converted into the kinetic energy of the shock-absorbing particles, thereby achieving the shock-absorbing effect. The shock-absorbing particles in the collection chamber can be backfilled into the containing chamber through the shock-absorbing particle addition port 203. After the shock-absorbing device has been running for a long time, most of the shock-absorbing particles are compacted to a heavy compaction level. At this time, the shock-absorbing particles will no longer leak out of the through holes, and the shock-absorbing effect of the shock-absorbing particles is reduced. On the contrary, it can be judged that the shock-absorbing particles have reached a heavy compaction level based on the fact that the shock-absorbing particles no longer leak out of the through holes, and the shock-absorbing particles need to be refilled at this time.

[0036] The damping particle inlet 203 is arranged at the top of the protective shell 201 and communicates with the containing cavity. The bottom surface of the damping particle inlet 203 is inclined toward one side of the containing cavity, so that the damping particles can flow from the damping particle inlet 203 to the inside of the containing cavity.

[0037] The shock-absorbing particle discharge mechanism is arranged at the bottom of the protective shell 201 and is connected to the containing cavity. The shock-absorbing particle discharge mechanism includes a spiral conveying blade 206 and a motor 207. Among them, the spiral conveying blade 206 is arranged horizontally inside the protective shell 201, the motor 207 is fixedly arranged outside the protective shell 201, and the output shaft of the motor 207 is fixedly connected to one end of the spiral conveying blade 206. After the shock-absorbing device is used for a period of time, the gaps between the shock-absorbing particles inside it will become smaller due to vibration, the shock-absorbing particles will become dense, the fluidity will deteriorate, and the shock-absorbing performance will decrease. At this time, the shock-absorbing particles need to be removed to the outside of the protective shell 201, the shock-absorbing particles are loosened and then refilled into the protective shell 201. When the shock-absorbing particles need to be removed to the outside of the protective shell 201, the motor 207 is controlled to rotate, the motor 207 drives the spiral conveying blade 206 to rotate, and the spiral conveying blade 206 discharges the shock-absorbing particles in the protective shell 201. The protective shell 201 has a box door on the side close to the collection cavity, and the box door is opened to remove the shock-absorbing particles in the collection cavity. After all the damping particles are loosened, they are loaded into the containing cavity through the damping particle adding port 203 .

[0038] The airbag 204 is arranged on the inner wall of the protective shell 201, and the airbag 204 is in contact with the shock-absorbing particles. The airbag 204 has an inflation interface for connecting the inflation device. After refilling the shock-absorbing particles, there are often cavities and large gaps in the containing cavity, which affects the shock-absorbing performance. Therefore, it is necessary to ensure that the shock-absorbing particles are filled evenly and without gaps. After refilling the shock-absorbing particles, the inflation device is controlled to inflate the airbag 204, squeeze the shock-absorbing particles, and fill the larger gaps between the shock-absorbing particles. Or after the shock-absorbing particles are compacted after a period of use, the airbag 204 is controlled to deflate so that the shock-absorbing particles can flow to the edge of the protective shell 201 to restore the shock-absorbing performance of the shock-absorbing particles. The setting of the airbag 204 can play a role in adjusting the compaction degree of the shock-absorbing particles.

[0039] The monitoring unit 205 is arranged on the side of the airbag 204 away from the protective shell, and is used to monitor the compaction degree of the shock-absorbing particles. The monitoring unit 205 can select a piezoelectric sensor to reflect the compaction degree of the shock-absorbing particles by obtaining the pressure of the shock-absorbing particles on the airbag 204. When the monitoring unit 205 measures that the pressure of the shock-absorbing particles reaches a preset value, the airbag 204 can be controlled to deflate to maintain the pressure of the shock-absorbing particles within the preset value. When the airbag 204 is in a completely airless state, it is necessary to remove all the shock-absorbing particles. The monitoring unit 205 can also select a resistivity sensor or an acoustic wave sensor to measure the compaction degree of the shock-absorbing particles by monitoring the resistivity of the shock-absorbing particles or the propagation speed of acoustic waves.

[0040] In some embodiments, the height of the wall structure is not less than the height of the scanning component, and the width of the wall structure is not less than the width of the scanning component. Such an arrangement enables the wall structure to completely shield the scanning component, preventing the heat generated by the refrigeration device 1 itself from affecting the temperature at the scanning component position, thereby ensuring the temperature stability at the scanning component position.

[0041] In some embodiments, the wall structure further has a second pipe connection portion, which is used to connect a vacuum pipe, and the two ends of the vacuum pipe are respectively connected to a vacuum device and a scanning component. The test chamber needs to maintain a vacuum state during operation. The vacuum device vacuums the test chamber through the vacuum pipe, and the vacuum pipe will vibrate. The second pipe connection portion can transmit the vibration of the vacuum pipe to the shock-absorbing particles for shock absorption.

[0042] In some embodiments, the first pipe connection part and the second pipe connection part each include a bracket 211 , an input pipe joint 212 , an output pipe joint 213 , a connecting pipe 214 and a spring 215 .

[0043] The bracket 211 is arranged at the top of the protective housing 201, and the bracket 211 has mounting holes 216 on two opposite side walls for mounting the input pipe joint 212 and the output pipe joint 213. The apertures of the mounting holes 216 are larger than the outer diameters of the input pipe joint 212 and the output pipe joint 213, and the mounting holes 216 are arranged non-contactingly with the input pipe joint 212 and the output pipe joint 213. The hole walls of the mounting holes 216 are connected to the outer walls of the input pipe joint 212 and the output pipe joint 213 through springs 215. The input pipe joint 212 and the output pipe joint 213 are in a suspended state, and the input pipe joint 212 and the output pipe joint 213 can be quick-release joints, which are convenient for quick connection with the delivery pipe 13. The vibration of the delivery pipe 13 will only be transmitted to the input pipe joint 212 and the connecting pipe 214, and will not be transmitted to the bracket 211. The connecting pipe 214 transmits the vibration to the shock-absorbing particles to eliminate the vibration.

[0044] Specifically, one end of the input pipe joint 212 is used to connect the delivery pipe 13 connected to the cold source, and one end of the output pipe joint 213 is used to connect the delivery pipe 13 connected to the scanning component. The connecting pipe 214 is arranged inside the protective shell 201 and contacts the shock-absorbing particles, and the two ends of the connecting pipe 214 are respectively connected to the other ends of the input pipe joint 212 and the output pipe joint 213.

[0045] The top of the protective housing 201 has a through hole 208, and the connecting pipe 214 passes through the through hole 208. The aperture of the through hole 208 is larger than the outer diameter of the connecting pipe 214, and the through hole 208 is arranged non-contacting with the connecting pipe 214. Such an arrangement can prevent the vibration of the connecting pipe 214 from being transmitted to the protective housing 201, and is completely absorbed by the shock-absorbing particles.

[0046] It should be noted that multiple groups of input pipe joints 212 and output pipe joints 213 can be provided, and they correspond one to one, and can be connected to pipes with vibration in the scanning probe microscope system. The pipes and the input pipe joints 212 and the output pipe joints 213 are connected in a quick-disconnect manner, which is convenient for connecting the pipes and the joints. A vibration sensor can be provided on the pipe connected to the output pipe joint 213 to monitor the shock absorbing performance of the shock absorbing device. When the monitored vibration data is greater than a preset value, an alarm is issued to remind the operator to refill the shock absorbing particles.

[0047] In some embodiments, reference Figure 3 The input pipe joint 212 and the output pipe joint 213 are connected to the spring 215 with a flange, and at least four springs 215 are provided. The springs 215 are arranged at equal intervals along the circumference of the flange. The spring 215 serves to connect the input pipe joint 212, the output pipe joint 213 and the bracket 211, and also has a certain shock-absorbing effect.

[0048] In some embodiments, the connecting tube 214 is in a U-shaped structure or an S-shaped structure, and other shapes may also be used. Such a configuration can make the connecting tube 214 have a larger contact area with the shock-absorbing particles, which is convenient for efficiently transmitting vibration to the shock-absorbing particles and improving the shock-absorbing effect.

[0049] In some embodiments, the particle size of the shock-absorbing particles is 0.125 mm to 1 mm, and the density of the shock-absorbing particles is 1.2 g / cm 3 Up to 1.8g / cm 3 .

[0050] In some embodiments, the cold source includes a buffer tank 11, a liquefaction component 12 and a reflux pipe 14. The buffer tank 11 is used to hold an inert gas, and the buffer tank 11 is connected to the liquefaction component 12. The liquefaction component 12 is used to liquefy the inert gas into an inert liquid. The delivery pipe 13 is respectively connected to the liquefaction component 12 and the scanning component, and is used to deliver the inert liquid to the scanning component. The reflux pipe 14 is respectively connected to the scanning component and the buffer tank 11, and is used to recover the inert gas into the buffer tank 11. The inert gas in the buffer tank 11 is converted into liquid after passing through the liquefaction component 12, and is transported to the test chamber through the reflux pipe 14. The gas in the test chamber flows back to the buffer tank 11 through the reflux pipe 14, forming a gas cycle, which greatly reduces the loss of gas.

[0051] In some embodiments, the refrigeration device 1 further comprises a shock-absorbing bracket and a shock-absorbing foot, the buffer tank 11 and the liquefaction assembly 12 are both arranged in the shock-absorbing bracket, and the shock-absorbing foot is arranged at the bottom of the shock-absorbing bracket. The shock-absorbing foot is made of a shock-absorbing material, such as rubber, which can absorb the vibration of the shock-absorbing bracket.

[0052] It should be clear that the present invention is not limited to the specific configuration and processing described above and shown in the figures. For the sake of simplicity, a detailed description of the known method is omitted here. In the above embodiments, several specific steps are described and shown as examples. However, the method process of the present invention is not limited to the specific steps described and shown, and those skilled in the art can make various changes, modifications and additions, or change the order between the steps after understanding the spirit of the present invention.

[0053] In the present invention, features described and / or illustrated for one embodiment may be used in the same or similar manner in one or more other embodiments, and / or combined with or replace features of other embodiments.

[0054] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. For those skilled in the art, the embodiments of the present invention may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A vibration reduction system for a low temperature scanning probe microscope, characterized in that: include: A refrigeration device (1), a shock absorbing device (2) and a test platform (3) which are separately arranged, wherein the refrigeration device (1) and the test platform (3) are arranged on both sides of the shock absorbing device (2), and the test platform (3) is used to install a scanning component of a low-temperature scanning probe microscope; The refrigeration device (1) comprises a cold source and a delivery pipeline (13), and two ends of the delivery pipeline (13) are respectively connected to the cold source and the scanning component; The shock absorbing device (2) comprises a wall structure and shock absorbing particles, wherein the shock absorbing particles are arranged inside the wall structure and are closely arranged inside the wall structure, and the wall structure has a first pipe connecting portion, which is connected to a part of the structure of the conveying pipe (13) and is used to absorb the vibration of the conveying pipe (13).

2. The vibration reduction system for a low temperature scanning probe microscope according to claim 1, characterized in that: The wall structure comprises a protective shell (201), a baffle (202), a shock-absorbing particle addition port (203), a shock-absorbing particle discharge mechanism, an air bag (204) and a monitoring unit (205); The protective shell (201) has a containing cavity and a collecting cavity therein, the collecting cavity is arranged on one side of the containing cavity, the baffle (202) is arranged at a position adjacent to the containing cavity and the collecting cavity, the baffle (202) is inclined toward one side of the containing cavity, and the baffle (202) has a plurality of through holes, the diameter of the through holes being greater than the particle size of the damping particles; the damping particle addition port (203) is arranged at the top of the protective shell (201) and is connected to the containing cavity; The damping particle discharge mechanism is arranged at the bottom of the protective shell (201) and is connected to the containing cavity; the damping particle discharge mechanism comprises a spiral conveying blade (206) and a motor (207); wherein the spiral conveying blade (206) is arranged transversely inside the protective shell (201), the motor (207) is fixedly arranged outside the protective shell (201), and the output shaft of the motor (207) is fixedly connected to one end of the spiral conveying blade (206); The airbag (204) is arranged on the inner wall of the protective shell (201), the airbag (204) is in contact with the shock-absorbing particles, and the airbag (204) has an inflation interface for connecting to an inflation device; The monitoring unit (205) is arranged on a side of the airbag (204) away from the protective shell, and is used to monitor the compaction degree of the shock-absorbing particles.

3. The vibration reduction system for a low temperature scanning probe microscope according to claim 1, characterized in that: The height of the wall structure is not less than the height of the scanning component, and the width of the wall structure is not less than the width of the scanning component.

4. The vibration reduction system for a low temperature scanning probe microscope according to claim 2, characterized in that: The wall structure also has a second pipe connecting portion, which is used to connect a vacuum pipe, and the two ends of the vacuum pipe are respectively connected to a vacuum device and the scanning component.

5. The vibration reduction system for a low temperature scanning probe microscope according to claim 4, characterized in that: The first pipeline connection part and / or the second pipeline connection part comprises a bracket (211), an input pipeline joint (212), an output pipeline joint (213), a connecting pipe (214) and a spring (215); The bracket (211) is arranged on the top of the protective shell (201); two opposite side walls of the bracket (211) are provided with mounting holes (216) for mounting the input pipe joint (212) and the output pipe joint (213); the hole diameters of the mounting holes (216) are larger than the outer diameters of the input pipe joint (212) and the output pipe joint (213); the mounting holes (216) are arranged in a non-contact manner with the input pipe joint (212) and the output pipe joint (213); and the hole walls of the mounting holes (216) are connected to the outer walls of the input pipe joint (212) and the output pipe joint (213) via the spring (215); One end of the input pipe joint (212) is used to connect the delivery pipe (13) connected to the cold source, and one end of the output pipe joint (213) is used to connect the delivery pipe (13) connected to the scanning component; The connecting tube (214) is arranged inside the protective shell (201) and is in contact with the shock-absorbing particles, and the two ends of the connecting tube (214) are respectively connected to the other end of the input pipe joint (212) and the other end of the output pipe joint (213); the top of the protective shell (201) is provided with a through hole (208), and the connecting tube (214) passes through the through hole (208); the aperture of the through hole (208) is larger than the outer diameter of the connecting tube (214), and the through hole (208) and the connecting tube (214) are arranged in a non-contact manner.

6. The vibration reduction system for a low temperature scanning probe microscope according to claim 5, characterized in that: Flanges are provided at the connection locations between the input pipe joint (212) and the output pipe joint (213) and the springs (215). At least four springs (215) are provided and the springs (215) are arranged at equal intervals along the circumference of the flanges.

7. The vibration reduction system for a low temperature scanning probe microscope according to claim 5, characterized in that: The connecting pipe (214) is in a U-shaped structure or an S-shaped structure.

8. The vibration reduction system for a low temperature scanning probe microscope according to claim 1, characterized in that: The particle size of the shock-absorbing particles is 0.125 mm to 1 mm, and the density of the shock-absorbing particles is 1.2 g / cm 3 Up to 1.8g / cm 3 .

9. The vibration reduction system for a low temperature scanning probe microscope according to claim 1, characterized in that: The cold source comprises a buffer tank (11), a liquefaction component (12) and a reflux pipeline (14); The buffer tank (11) is used to contain inert gas, and the buffer tank (11) is connected to the liquefaction component (12); the liquefaction component (12) is used to liquefy the inert gas into an inert liquid; The delivery pipeline (13) is connected to the liquefaction component (12) and the scanning component respectively, and is used to deliver the inert liquid to the scanning component; The return pipe (14) is respectively connected to the scanning component and the buffer tank (11) and is used to recover the inert gas into the buffer tank (11).

10. The vibration reduction system for a low temperature scanning probe microscope according to claim 9, characterized in that: The refrigeration device (1) further comprises a shock-absorbing bracket and a shock-absorbing foot; the buffer tank (11) and the liquefaction assembly (12) are both arranged in the shock-absorbing bracket, and the shock-absorbing foot is arranged at the bottom of the shock-absorbing bracket.

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