A magnetron sputtering coating device, a rotating cathode and an online adjustable magnetic rod

Abstract

The present invention discloses a magnetron sputtering coating device, a rotating cathode and an online adjustable magnetic rod, which belong to the field of magnetron sputtering coating. The magnet assembly is arranged along the length direction of the support beam and is movably connected to the support beam. The drive assembly is connected to the support beam to adjust the distance between the magnet assembly and the surface of the support beam. A support joint that cooperates with the support flange is provided in the support end away from the drive end of the magnetic rod, and an electric transmission structure for supplying power and / or providing signals to the drive assembly is provided inside the support joint. By providing an electric transmission structure in the support end of the magnetic rod, power supply / signal transmission is provided for the drive assembly in the magnetic rod without changing the drive design of the drive end, and the electric transmission is isolated from the coolant pipeline to ensure the safety of the electric transmission, so that the online magnetic field adjustment of the magnetic rod can be achieved without stopping the machine, thereby ensuring the stability and reliability of the power supply / signal transmission of the online adjustable magnetic rod for long-term use.

Description

Technical Field

[0001] The present invention relates to the technical field of magnetron sputtering, in particular to a magnetron sputtering coating device, a rotating cathode and an online adjustable magnetic rod. Background Art

[0002] The magnetron sputtering cathode is the core component of vacuum magnetron sputtering coating equipment, primarily used in high-tech fields such as semiconductors, optics, energy-saving glass, liquid crystal panels, photovoltaics, and automotive touchscreens. The basic principle of magnetron sputtering is to use a magnetic field to redirect electrons, confining and extending their paths, increasing their ionization probability and effectively utilizing their energy. The resulting ions bombard the target, sputtering target atoms from the target. These atoms then deposit onto the substrate, forming the desired functional thin film.

[0003] The uniformity of the coating is affected by many factors, including the uniformity of the magnetic field, the uniformity of the electric field, the uniformity of the process atmosphere, the quality of the target barrel, and the uniformity of the baffle opening; and the coating uniformity shows a pattern of gradually deteriorating from the initial to the final stage of the target barrel's use. In recent years, the coating industry has placed increasingly higher demands on the uniformity of the coating, and generally adjusts the intensity distribution of the magnetic field on the surface of the target barrel to achieve the purpose of adjusting the uniformity of the coating. In the existing technology, when the magnetic field needs to be adjusted, the entire coating equipment needs to be shut down, the rotating cathode needs to be disassembled, and the magnetic rod in the target barrel needs to be pulled out to adjust the magnetic field strength of the magnetic rod. This will cause the equipment to be shut down for a long time, reduce the equipment's production capacity, and may require multiple shutdowns to adjust the magnetic field to achieve the desired coating uniformity. After the target barrel has been used for a period of time, the coating uniformity gradually deteriorates, and it needs to be re-opened and adjusted.

[0004] To address these issues, patent CN104137221B incorporates a signal connector between the terminal module (also known as a terminal head in the industry) and the magnetic rod. The signal connector is placed in the coolant within the terminal head's cooling channel. The terminal head also incorporates a protective device to protect the signal connector from degradation, damage, or interference caused by the surrounding cooling fluid and / or the surrounding high-energy fields. However, since the signal connector is placed in the coolant, plugging and unplugging is required every time the target barrel is replaced, reducing the long-term reliability of the device. Patent CN105026609B places the power supply within the magnetic rod and uses non-contact methods such as optical communication to achieve online adjustment of the magnetic field strength of the magnetic rod. However, since the power supply within the magnetic rod must be regularly recharged when the device is in the air, and in applications with very high uniformity requirements, numerous magnetic field adjustment points are required, requiring multiple magnetic field adjustments over the target barrel's lifespan, which poses the risk of insufficient power. Summary of the Invention

[0005] In order to solve the technical problems existing in the background technology, the present invention proposes a magnetron sputtering coating device, a rotating cathode and an online adjustable magnetic rod.

[0006] The present invention provides an online adjustable magnetic rod, comprising: a support beam, a magnet assembly, at least one drive assembly, a drive joint, a support joint, and a support flange;

[0007] The magnet assembly is arranged along the length direction of the support beam and is movably connected to the support beam, and the driving assembly is connected to the support beam to adjust the distance between the magnet assembly and the surface of the support beam;

[0008] The drive joint and support joint are respectively located at both ends of the support beam. A mounting opening is provided in the middle of the support flange. The support joint can be rotatably installed at the mounting opening. An electrical transmission structure is provided inside the support joint for supplying power and / or providing signals to the drive component.

[0009] Preferably, a cooling channel extending from the drive joint toward the support joint is provided inside the support beam, a connecting hole is provided on the side wall of one end of the cooling channel close to the support joint, and a connecting cavity connected to the cooling channel is provided inside the drive joint.

[0010] Preferably, a through cavity is provided inside the supporting joint, and the electrical transmission structure is a cable passing through the through cavity.

[0011] Preferably, the support joint is provided with a flange plug connected to the power transmission structure at one end away from the support beam.

[0012] Preferably, the driving assembly includes a driving mechanism and an adjusting connector, the magnet assembly is connected to the support beam through at least one adjusting connector, and the driving mechanism is connected to the adjusting connector to drive the adjusting connector to move to adjust the distance between the magnet assembly and the support beam surface.

[0013] Preferably, the driving mechanism adopts a waterproof motor, and the power transmission structure is provided with an internal connection end near one end of the support beam, and the driving mechanism is connected to the internal connection end through a waterproof cable.

[0014] Preferably, it further comprises a sealing cover, which forms a sealed space outside the driving mechanism, and one end of the electric transmission structure connected to the driving mechanism is located in the sealed space.

[0015] Preferably, it also includes an internal control box, which is arranged on the support beam and connected between the drive component and the power transmission structure, and is used for power distribution of the drive component and / or control and feedback of the drive signal.

[0016] Preferably, it further comprises an external control box, which is connected to the internal control box via an electrical transmission structure and is used to input power / signals into the magnetic rod and / or receive feedback signals from the internal control box.

[0017] In the present invention, the proposed online adjustable magnetic rod has a magnet assembly arranged along the length direction of the support beam and movably connected to the support beam, and a drive assembly connected to the support beam is used to adjust the distance between the magnet assembly and the surface of the support beam. A support joint that cooperates with the support flange is provided in the support end away from the drive end of the magnetic rod, and an electric transmission structure for supplying power and / or providing signals to the drive assembly is provided inside the support joint. By providing an electric transmission structure in the support end of the magnetic rod, power supply / signal transmission is provided for the drive assembly in the magnetic rod without changing the drive design of the drive end, and the electric transmission is isolated from the coolant pipeline to ensure the safety of the electric transmission, thereby achieving online magnetic field adjustment of the magnetic rod without shutting down the machine, thereby ensuring the stability and reliability of the power supply / signal transmission of the online adjustable magnetic rod for long-term use.

[0018] The present invention also provides a rotating cathode, comprising a driving end, a supporting end and the above-mentioned online adjustable magnetic rod;

[0019] The two ends of the online adjustable magnetic rod are respectively installed on the driving end head and the supporting end head through a driving joint and a supporting joint. The driving end head includes a driving flange for cooperating with the supporting flange to install the target barrel.

[0020] Preferably, it further comprises a cathode cover plate, and the driving end head and the supporting end head are respectively mounted on the cathode cover plate.

[0021] Preferably, a vacuum plug is further provided on the cathode cover plate, and the end of the electrical transmission structure away from the support beam is connected to the vacuum plug.

[0022] Preferably, a vacuum pipe is further included, and vacuum flanges for mounting both ends of the vacuum pipe are respectively provided on the cathode cover plate and the support joint. The vacuum pipe is used to provide a normal pressure channel for connecting the magnetic rod and the external cable.

[0023] In the present invention, the proposed rotating cathode uses the supporting flange and the supporting joint with the electric transmission structure as part of the magnetic rod, and does not need to be disassembled when replacing the target barrel. At the same time, since the magnetic field adjustment and the electric transmission structure are integrated on the magnetic rod, there is no need to change the internal structure of the existing drive end head and the overall rotating cathode architecture. The upgrade of the online adjustable function of the magnetic field can be achieved by replacing the magnetic rod.

[0024] The present invention also provides a magnetron sputtering coating device, comprising the above-mentioned rotating cathode.

[0025] In the present invention, the technical effect of the magnetron sputtering coating equipment proposed is similar to that of the above-mentioned rotating cathode, so it will not be described in detail. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 This is a structural schematic diagram of an embodiment of an online adjustable magnetic rod proposed by the present invention.

[0027] Figure 2 This is a schematic diagram of the main structure of an embodiment of an online adjustable magnetic rod proposed by the present invention.

[0028] Figure 3 for Figure 2 AA cross-sectional diagram of .

[0029] Figure 4 for Figure 3 BB cross-section diagram.

[0030] Figure 5 This is a schematic structural diagram of an embodiment of a rotating cathode proposed in the present invention.

[0031] Figure 6 This is a schematic structural diagram of another embodiment of a rotating cathode proposed by the present invention.

[0032] Figure 7 This is a schematic structural diagram of another embodiment of a rotating cathode proposed by the present invention.

[0033] Figure 8 This is a structural schematic diagram of an embodiment of a magnetron sputtering coating device proposed in the present invention.

[0034] Reference numerals:

[0035] 10. Electric transmission structure;

[0036] 100, target barrel; 101, support beam; 102, drive joint; 103, drive mechanism; 104, adjustment connector; 105, magnet assembly; 106, inner control box; 107, support joint; 108, inner connection end; 109, support flange; 110, flange plug; 111, coolant dynamic seal; 112, bearing;

[0037] 201, driving end; 203, external control box; 204, target barrel clamp; 205, cathode cover; 206, supporting end; 208, first cable; 209, second cable; 210, vacuum plug;

[0038] 300, base material; 301, cable flange; 303, vacuum pipe; 304, vacuum flange;

[0039] 402. Rotating shaft; 405. Sealing cover. DETAILED DESCRIPTION

[0040] Reference Figure 1-4 The present invention proposes an online adjustable magnetic rod, comprising: a support beam 101, a magnet assembly 105, at least one drive assembly, a drive joint 102, a support joint 107 and a support flange 109;

[0041] The magnet assembly 105 is arranged along the length direction of the support beam 101 and is movably connected to the support beam 101. The drive assembly is connected to the support beam 101 to adjust the distance between the magnet assembly 105 and the surface of the support beam 101;

[0042] The drive joint 102 and the support joint 107 are respectively located at both ends of the support beam 101. A mounting opening is provided in the middle of the support flange 109. The support joint 107 can be rotatably installed at the mounting opening. An electrical transmission structure 10 is provided inside the support joint 107 for supplying power and / or providing signals to the drive component.

[0043] In the actual design of the support beam 101, the driving joint 102, the support joint 107 and the support beam 101 can be formed as one piece, or can be processed separately and then assembled and connected.

[0044] In a specific design, the electrical transmission structure 10 can be configured as a conductive structure built into the support connector 107. Alternatively, a cable can be used as the electrical transmission structure 10, passing through the support connector 107 and directly leading out to the support terminal 206 for external connection. Alternatively, as needed, a plug can be provided on the support connector 107, with one end of the cable connected to the plug and the other end passing through the support connector 107 to connect to the internal / external electrical components of the magnetic rod, allowing the external / internal electrical components to be connected to the magnetic rod via the plug.

[0045] In order to explain the specific working principle of this embodiment in detail, this embodiment also provides a rotating cathode and a magnetron sputtering coating device. The rotating cathode includes a driving end 201, a supporting end 206 and the above-mentioned online adjustable magnetic rod;

[0046] The two ends of the online adjustable magnetic rod are respectively installed on the driving end head 201 and the supporting end head 206 through the driving joint 102 and the supporting joint 107. The driving end head 201 includes a driving flange for cooperating with the supporting flange 109 to install the target barrel 100.

[0047] Reference Figure 8 The magnetron sputtering equipment of this embodiment includes a rotating cathode and a target barrel 100 sleeved on the outside of the rotating cathode. The target barrel 100 is sleeved on the outside of the magnetic rod. During operation, the target barrel 100 is filled with coolant, and the magnet assembly 105 on the magnetic rod forms a magnetic field outside the target barrel 100, thereby generating plasma, bombarding the peripheral target barrel 100, so that the target barrel 100 particles are sputtered onto the substrate 300 to be coated. At the same time, the target barrel 100 and the support flange 109 at the far end are driven to rotate together through the driving flange by the driving end 201, so that the surface of the target barrel 100 is evenly etched, thereby achieving continuous coating. In this process, the magnetic rod is respectively installed on the driving end 201 and the support end 206 through the driving joint 102 and the support joint 107 at both ends, and the three are in a relatively stationary state.

[0048] As the rotating cathode operates, the coating uniformity needs to be adjusted by adjusting the intensity distribution of the magnetic field on the surface of the target barrel 100. During this adjustment, power / signals are supplied to the drive assembly within the magnetic bar from the distal end via the electrical transmission structure 10 within the support joint 107. Based on the external adjustment signal, the drive assembly adjusts the distance between the magnet assembly 105 and the support beam 101 at the corresponding position, thereby adjusting the effective magnetic field strength of the magnet assembly 105.

[0049] Because the magnet bar generates significant heat during operation, the coolant piping is specifically designed with a coolant inlet and outlet located at the magnet bar's drive end. A cooling channel extending from the drive connector 102 toward the support connector 107 is provided within the support beam 101. A connecting hole is provided on the sidewall of the cooling channel near one end of the support connector 107, and a connecting cavity is provided within the drive connector 102, communicating with the cooling channel. A cooling channel is provided within the drive end 201, communicating with the cooling channel via the drive connector 102. Coolant enters the cooling channel in the middle of the support beam 101 through the drive connector 102, then fills the space between the magnet bar and the target barrel 100 via the connecting hole, ensuring that the magnet assembly 105 is submerged in the coolant during operation. Disposing the coolant piping interface and electrical interface at each end of the magnet bar ensures stable water and electricity functionality while also physically isolating them and reducing the complexity of the end design.

[0050] In this embodiment, the proposed rotating cathode and online adjustable magnetic rod have a magnet assembly 105 arranged along the length of a support beam 101 and movably connected to the support beam 101. A drive assembly is connected to the support beam 101 to adjust the distance between the magnet assembly 105 and the surface of the support beam 101. A support joint 107 that cooperates with a support flange 109 is provided within the support end away from the drive end of the magnetic rod. An electrical transmission structure 10 for supplying power and / or providing signals to the drive assembly is provided within the support joint 107. By providing the electrical transmission structure 10 within the support end of the magnetic rod, power / signal transmission is provided to the drive assembly within the magnetic rod without changing the drive end drive design. The electrical transmission is also isolated from the coolant pipeline to ensure electrical transmission safety. This allows online magnetic field adjustment of the magnetic rod to be achieved without shutting down the machine, ensuring the stability and reliability of power / signal transmission for long-term use of the online adjustable magnetic rod.

[0051] During operation, the target barrel 100 is filled with coolant, and the magnetic rods are immersed in the coolant. Therefore, a sealing structure is provided between the support joint 107 and the support flange 109 to achieve a seal against the coolant. In one specific design of the support joint 107, a through cavity is provided within the support joint 107, through which the power transmission structure 10 passes. The power transmission structure 10 uses a waterproof cable, which passes through this through cavity to deliver power / signals to the drive components within the target barrel 100.

[0052] In practice, to ensure a tight seal at the support joint 107, a flange plug 110 is provided at the end of the support joint 107 away from the support beam 101, which is connected to the power transmission structure 10. The power transmission structure 10 is disposed within the support joint 107 and connected to the outside of the target barrel 100 via the flange plug 110, facilitating circuit plugging and unplugging.

[0053] Since the magnet assembly 105 extends along the length of the support beam 101, in actual design, multiple drive assemblies are usually set to adjust different positions of the magnet assembly 105. In the power supply / signal design of the rotating cathode, the online adjustable magnetic rod of this embodiment also includes an internal control box 106. The internal control box 106 is set on the support beam 101, and the drive assembly is connected to the power transmission structure 10 through the internal control box 106. After the power supply / signal cable is connected to the interior of the magnetic rod, it is first connected to the internal control box 106 to distribute the power supply to each drive assembly and control and feedback the drive mechanism signal. In actual design, one internal control box 106 can be connected to multiple drive assemblies, or one internal control box 106 can be set for each drive assembly.

[0054] In a specific design of the inner control box 106, the inner control box 106 contains a communication device configured to receive command signals from outside the rotating cathode and transmit information signals to the outside of the rotating cathode. The inner control box 106 also includes an electronic controller in operable communication with the drive assembly. The communication device can be a transceiver operably coupled to the electronic controller. The transceiver can be a radio frequency (RF) transceiver, an optical transceiver, or an ultrasonic transceiver, among others.

[0055] In order to ensure the waterproof performance of the driving mechanism 103 and the inner control box 106 inside the target barrel 100, in a specific embodiment, a waterproof motor can be used to connect to the electric transmission structure 10 of the support joint 107 through a waterproof cable.

[0056] In another embodiment, Figure 6 and 7 As shown, a sealing cover can also be installed within the target barrel 100. This seal forms a sealed space outside the drive mechanism 103. The end of the power transmission structure 10 connected to the drive mechanism 103 is located within this sealed space, ensuring the reliability of the electrical connection between the power transmission structure 10 and the drive mechanism 103. The sealing cover also further enhances the mechanical strength of the magnetic bar. In actual design, the sealing cover can be configured as a tubular structure with flanges attached to the support joint 107 and the drive joint 102 at each end, forming a sealed space within which the support beam 101 and the drive mechanism 103 are located. Alternatively, the sealing cover can be installed on the support beam 101 via a sealing ring, forming a sealed space with the support beam 101.

[0057] The rotating cathode of this embodiment further includes a cathode cover plate 205 , on which the driving end head 201 and the supporting end head 206 are respectively mounted. The rotating cathode is mounted in the sputtering chamber through the cathode cover plate 205 .

[0058] During sputtering, the sputtering chamber is in a vacuum or protective gas environment. When connecting the electrical transmission structure 10 to an external power supply / signal, the power / signal must be transmitted from the rotating cathode through the vacuum environment to the exterior of the sputtering chamber. In one embodiment, a vacuum plug 210 is also provided on the cathode cover 205. The end of the electrical transmission structure 10 facing away from the support beam 101 is connected to the vacuum plug 210, which then connects the structure to the outside world. The power / signal is reliably connected to the liquid and vacuum environment, or to the normal pressure environment, through the electrical connection structure and vacuum plug 210.

[0059] In another embodiment, a vacuum duct 303 is further provided within the sputtering chamber. Vacuum flanges 304 are provided on the cathode cover 205 and the support joint 107, respectively, for mounting the ends of the vacuum duct 303. The vacuum duct 303 provides a normal-pressure passage for a cable connecting the magnetic rod to the outside. One end of the cable can be connected directly to the electrical transmission structure 10 through the vacuum duct, thereby enabling electrical transmission through the vacuum environment.

[0060] In the external signal connection, the cathode signal can also be provided with an external control box 203, which is located outside the sputtering chamber. The external control box 203 is connected to the internal control box 106 through the electrical transmission structure 10, and is used to input power / signals into the magnetic rod and / or receive feedback signals from the internal control box 106.

[0061] In a specific adjustment design for the magnet assembly 105, the distance between the magnet assembly 105 and the target barrel 100 can be adjusted based on the position of the magnet assembly 105, or based on the strength of the magnetic field. The drive assembly can be adjusted in a variety of ways. For example, the drive assembly can include a spring-loaded pneumatic structure or a spring-loaded hydraulic structure. The drive assembly can also include a rotating cable or a push-pull cable. In one embodiment, each drive assembly can include a spring-loaded pneumatic bellows, bladder, or cylinder. In this approach, the adjustment point can be loaded using pressure springs in the pneumatic elements that push in opposite directions.

[0062] In a specific embodiment of the driving assembly, the magnet assembly 105 is coupled to the support beam 101 through multiple driving assemblies to adjust the position of each adjustment point separately.

[0063] Each drive assembly may also include a built-in position sensor. The position sensor can measure the position of the magnet assembly 105 through direct sensing or indirect measurement. For example, the position sensor can be implemented using a Hall effect probe and a magnet, as in analog sensors. Alternatively, the position sensor can be implemented using a digital indicator, such as a plunger-type digital indicator, which directly transmits data to the operator without additional processing. Power to the internal control box 106 can be provided through the same electrical transmission structure 10 as the drive assembly.

[0064] In one specific embodiment, the drive assembly may also include a drive mechanism 103 and an adjustment connector 104. The magnet assembly 105 is connected to the support beam 101 via at least one adjustment connector 104. The drive mechanism 103 is connected to the adjustment connector 104 to drive the adjustment connector 104 to move so as to adjust the distance between the magnet assembly 105 and the surface of the support beam 101. In one specific embodiment of the drive assembly, the adjustment connector 104 may be an adjustment screw, and the drive mechanism 103 may be a drive motor with an encoder function that can record and feedback the actual position of the adjustment screw.

[0065] In another embodiment of the drive assembly, the drive mechanism 103 can alternatively be implemented using a motorized structure such as a servo motor, a stepper motor, or a piezoelectric motor. Any number of mechanical configurations can be used to perform the drive motion. One example is a screw jack that can additionally incorporate right-angle gears or reduction gears. In these embodiments, position sensing of the magnet assembly 105 can be performed by feedback from the motorized structure.

[0066] The magnetron sputtering coating equipment, the rotating cathode, and the online adjustable magnetic rod of this embodiment are described in detail below through specific examples.

[0067] Reference Figure 1-4 The online adjustable magnetic rod of this embodiment includes: a support beam 101, a drive joint 102, a drive mechanism 103, an adjustment connector 104, a magnet assembly 105, an internal control box 106, a support joint 107, an internal connection end 108, a support flange 109, a flange plug 110, a coolant dynamic seal 111, and a bearing 112. The drive mechanism 103 uses a drive motor, and the adjustment connector 104 uses an adjustment stud.

[0068] Magnet assembly 105 is secured to support beam 101 via several adjustment studs. One end of support beam 101 is screwed to drive joint 102. The other end of support beam 101 is screwed to support joint 107. Support beam 101, drive joint 102, and support joint 107 can also form an integrated support. Support beam 101 is typically made of a metal such as stainless steel.

[0069] The drive connector 102 is inserted into the drive end 201 to realize the support and cooling water channel. For example, the material can be metal or non-metal materials such as stainless steel.

[0070] The driving mechanism 103 rotates to drive the adjusting connector 104 to rotate, thereby deforming the magnet assembly 105 at the adjusting screw, thereby making the distance between the magnet assembly 105 and the target barrel 100 closer or farther, thereby adjusting the magnetic field strength on the surface of the target barrel 100 .

[0071] In one embodiment, the drive mechanism 103 is placed in a cooling liquid and needs to be waterproof. It also has an absolute encoder function to record the actual position of the feedback adjustment connector 104. It is fixed to the magnet assembly 105 by screws or welding. For example, the material is a metal such as stainless steel.

[0072] The magnet assembly 105 is composed of a yoke and a magnet. The adjustment of the online adjustable magnetic bar is to adjust the distance between the magnet assembly 105 and the target barrel 100, so as to achieve the purpose of adjusting the magnetic field strength on the surface of the target barrel 100.

[0073] After the power supply / signal cable is connected to the inside of the magnetic bar, it is first connected to the internal control box 106 to distribute power to each drive motor and control and feedback the drive motor signal, and feed back the control signal result to the external control box 203.

[0074] The middle of the support joint 107 is hollow, so that the power / signal cable can pass through the middle and reach the inside of the magnetic rod or the target barrel 100 .

[0075] In a specific embodiment of the cable joint, when the driving mechanism 103 and the inner control box 106 are placed in the coolant, the function is to achieve a water seal between the cable passing through the support joint 107 and the coolant outside the magnetic bar.

[0076] In a specific embodiment of the support flange 109, the support joint 107 is inserted into the support flange 109, and a coolant dynamic seal 111 and a bearing 112 are provided in the support flange 109 to achieve relative rotation between the support flange 109 and the support joint 107 and dynamic sealing of the coolant.

[0077] The support flange 109 is fixedly connected to the target barrel 100 via the target barrel clamp 204. During the operation of the rotating cathode, the target barrel 100 is in a rotating state, and the support flange 109 is also in a rotating state.

[0078] In a specific embodiment of the flange plug 110, the flange plug 110 is fixed to the support joint 107 and is used to realize the quick plugging and unplugging of the power supply / signal and the external connection when changing the target. A sealing ring is provided between the flange plug 110 and the support joint 107 to realize the sealing between the external vacuum and the internal channel of the support joint 107. The flange plug 110 can be single-pin, double-pin, or multi-pin. In one design method, the pins of the flange plug 110 are of vacuum sealing grade. In other design methods, the flange plug 110 and the support joint 107 can also be prepared as an integrated structure, preferably with a signal / power plug of vacuum sealing grade.

[0079] In the specific embodiment of the coolant dynamic seal 111, during operation, the support joint 107 and the support flange 109 are in a state of relative rotation, achieving a dynamic seal between the vacuum side and the coolant. In the specific embodiment of the bearing 112, during operation, the support joint 107 and the support flange 109 are in a state of relative rotation, and the bearing is used to support and achieve rotation.

[0080] Reference Figure 5-7 The rotating cathode of this embodiment includes the above-mentioned online adjustable magnetic rod, and also includes: a driving end 201, a target barrel 100, an external control box 203, a target barrel clamp 204, a cathode cover 205, a supporting end 206, a first cable 208, a second cable 209, and a vacuum plug 210.

[0081] In a specific design of a rotating cathode, the target barrel clamp 204 is used to securely connect the target barrel 100 to the drive head 201, as well as to securely connect the target barrel 100 to the support flange 109. The drive head 201 is securely connected to the target barrel 100 via the target barrel clamp 204, which facilitates power transmission to the target barrel 100, coolant transmission, dynamic / static sealing, and vacuum dynamic sealing.

[0082] During the operation of the target barrel 100 , the sputtered target barrel 100 needs to be powered from the outside and cooled by a coolant. The target barrel 100 is in a rotating state during operation.

[0083] The external control box 203 is used to provide power supply / control signals to the magnetic rod.

[0084] The cathode cover plate 205 is used to install and fix the driving end head 201 and the supporting end head 206 .

[0085] The support end 206 remains stationary during operation. The drive connector 102, drive mechanism 103, adjustment connector 104, magnet assembly 105, internal control box 106, support connector 107, internal connection end 108, support flange 109, flange plug 110, coolant dynamic seal 111, and bearing 112 are connected together to form the magnetic rod described in this embodiment. The support end 206 is inserted into the support flange 109 of the magnetic rod. The support flange 109 and target barrel 100 are integrally connected via the target barrel clamp 204 and are in a rotating state, thereby achieving the support function.

[0086] The first cable 208 is a power supply / signal cable for the vacuum side, for example, with both ends being quick-connect type.

[0087] The second cable 209 is a power supply / signal cable for the atmosphere side, for example, with both ends being quick-connect type.

[0088] In one embodiment of the vacuum plug 210, Figure 5 As shown, the vacuum plug 210 is of vacuum sealing grade, with one side thereof being in an atmospheric state and the other side being in a vacuum state.

[0089] Reference Figure 7 In another embodiment, the support flange 109 is further provided with a cable flange 301. This hollow structure allows the power / signal cables to pass through it, with flanges at both ends. One end of the power / signal flange is secured to the support connector 107, while the other end is secured to the vacuum conduit 303. A sealing ring is provided between the power / signal flange plug 110 and the support connector 107 to seal the vacuum conduit from the internal channel.

[0090] A sealing ring is provided between the flange plug 110 and the vacuum pipe 303 to achieve a seal between the external vacuum and the internal channel. The two need to be frequently disassembled and assembled when the target barrel 100 is replaced. The vacuum pipe 303 and the flange plug 110 can be made of insulating engineering plastics or metal materials such as stainless steel.

[0091] Reference Figure 7 The first cable 208 is located within the cathode cover 205. The power / signal cable in the pipe or channel has plugs at both ends, or is directly connected without plugs. The first cable 208 passes through the vacuum duct 303, creating a sealed passage between the atmospheric environment on the cable side and the vacuum environment on the vacuum side. The flange of the vacuum duct 303 is sealed and fixed to the cathode cover 205, with a sealing ring provided between it and the vacuum duct 303 to achieve a connection and seal between the two. The second cable 209 is located outside the cathode cover 205 and has plugs at both ends, or is directly connected without plugs.

[0092] The rotation of the driving mechanism drives the adjusting screw to rotate, thereby deforming the magnet assembly 105 at the adjusting screw, thereby making the distance between the magnet assembly 105 and the target barrel 100 closer or farther, thereby adjusting the magnetic field strength on the surface of the target barrel 100.

[0093] In other embodiments, the driving mechanism is placed in an atmospheric pressure environment and does not need to have a waterproof function, such as Figure 6 and 7 At the same time, it has an absolute encoder function to record the actual position of the feedback adjustment stud.

[0094] In the specific embodiment of the rotating shaft 402, refer to Figure 6 and 7 When adjusting the magnetic field, the output shaft of the drive mechanism drives the rotating shaft 402 to rotate, achieving rotation. The adjusting stud is fixed to the magnet assembly 105 by screws or welding. The adjusting stud is moved up and down by cooperating with the rotating shaft 402. In actual design, the drive mechanism can use a stepper motor with a preset reduction ratio, which cooperates with the rotating shaft 402 via a bevel gear to drive the rotating shaft 402.

[0095] The middle of the support joint 107 is hollow, so that the power / signal cable can pass through the middle and reach the interior of the magnetic bar target barrel 100 .

[0096] In the specific design of the sealing cover, the support beam 101 adopts a box structure, and a sealed space is formed between the sealing cover 405 and the support beam 101. The driving mechanism, transmission components, and internal control box 106 are placed inside, and the driving mechanism, transmission components, and internal control box 106 do not require waterproof function.

[0097] The magnetron sputtering coating equipment of this embodiment includes the above-mentioned rotating cathode.

[0098] During the operation of the rotating cathode, the target barrel 100 is definitely in a rotating state. The fixed connection between the driving end 201 and the target barrel 100 is achieved through the target barrel clamp 204, and the fixed connection between the target barrel 100 support flange 109 and the target barrel 100 is achieved through the target barrel clamp 204. Therefore, the support flange 109 is in a rotating state during the operation.

[0099] This embodiment addresses the stability and reliability of power and signal transmission for long-term use of an online adjustable magnetic rod. The core of this embodiment is that the support flange 109 is integral to the magnetic rod, and the two are integrated during replacement and disassembly of the target barrel 100, eliminating the need for disassembly. The support flange 109 incorporates a built-in rotary seal, and the power / signal cables pass through the hollow support connector 107 of the magnetic rod. The portion between the magnetic rod and the end cap is designed as a quick-connect connector. No power supply is required within the magnetic rod, and the plug is not submerged.

[0100] In addition to the drive mechanism 103, magnet assembly 105, internal control box 106, and support beam 101, the online adjustable magnetic rod in this embodiment also includes an externally rotating hollow power / signal cable channel formed by a support flange 109, flange plug 110, and coolant dynamic seal 111. The power / signal transmission structure is located in the atmospheric environment and has no contact with the coolant. With direct external power supply, there is no risk of insufficient power, and signal transmission is stable and reliable.

[0101] The above description is only a preferred specific embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any technician familiar with the technical field, within the technical scope disclosed by the present invention, who makes equivalent replacements or changes based on the technical solution and inventive concept of the present invention, should be covered by the scope of protection of the present invention.

Claims

1. An online adjustable magnetic rod, characterized in that: include: A support beam (101), a magnet assembly (105), at least one drive assembly, a drive joint (102), a support joint (107), and a support flange (109); The magnet assembly (105) is arranged along the length direction of the support beam (101) and is movably connected to the support beam (101); the drive assembly is connected to the support beam (101) and is used to adjust the distance between the magnet assembly (105) and the surface of the support beam (101); The drive joint (102) and the support joint (107) are respectively located at both ends of the support beam (101); a mounting opening is provided in the middle of the support flange (109); the support joint (107) is rotatably mounted at the mounting opening; and an electrical transmission structure (10) for supplying power to the drive assembly or for supplying power and providing signals is provided inside the support joint (107).

2. The online adjustable magnetic rod according to claim 1, characterized in that: A cooling channel extending from the drive joint (102) toward the support joint (107) is provided inside the support beam (101), a connecting hole is provided on a side wall of one end of the cooling channel close to the support joint (107), and a connecting cavity connected to the cooling channel is provided inside the drive joint (102).

3. The online adjustable magnetic rod according to claim 1, characterized in that: A through cavity is provided inside the supporting joint (107), and the electrical transmission structure (10) is a cable passing through the through cavity.

4. The online adjustable magnetic rod according to claim 1, characterized in that: A flange plug (110) connected to the power transmission structure (10) is provided at one end of the support joint (107) away from the support beam (101).

5. The online adjustable magnetic rod according to claim 1, characterized in that: The driving assembly comprises a driving mechanism (103) and an adjusting connection member (104); the magnet assembly (105) is connected to the support beam (101) via at least one adjusting connection member (104); the driving mechanism (103) is connected to the adjusting connection member (104) for driving the adjusting connection member (104) to move so as to adjust the distance between the magnet assembly (105) and the surface of the support beam (101).

6. The online adjustable magnetic rod according to claim 5, characterized in that: The driving mechanism (103) adopts a waterproof motor. The electric transmission structure (10) is provided with an inner connecting end (108) at one end close to the support beam (101). The driving mechanism (103) is connected to the inner connecting end (108) via a waterproof cable.

7. The online adjustable magnetic rod according to claim 5, characterized in that: It also includes a sealing cover, which forms a sealed space outside the driving mechanism (103), and one end of the electric transmission structure (10) connected to the driving mechanism (103) is located in the sealed space.

8. The online adjustable magnetic rod according to claim 1, characterized in that: The device further comprises an inner control box (106), which is arranged on the support beam (101) and connected between the drive assembly and the electric transmission structure (10), and is used for power distribution of the drive assembly and / or control and feedback of the drive signal.

9. The online adjustable magnetic rod according to claim 8, characterized in that: It also includes an outer control box (203), which is connected to the inner control box (106) via the electric transmission structure (10) and is used to input power / signals into the magnetic rod and / or receive feedback signals from the inner control box (106).

10. A rotating cathode, characterized in that: It comprises a driving end (201), a supporting end (206) and an online adjustable magnetic rod according to any one of claims 1 to 9; The two ends of the online adjustable magnetic rod are respectively mounted on a driving end head (201) and a supporting end head (206) via a driving joint (102) and a supporting joint (107). The driving end head (201) includes a driving flange for cooperating with a supporting flange (109) to mount the target barrel (100).

11. The rotating cathode according to claim 10, characterized in that It also includes a cathode cover plate (205), and the driving end head (201) and the supporting end head (206) are respectively mounted on the cathode cover plate (205).

12. The rotating cathode according to claim 11, characterized in that A vacuum plug (210) is also provided on the cathode cover plate (205), and one end of the electric transmission structure (10) away from the support beam (101) is connected to the vacuum plug (210).

13. The rotating cathode according to claim 11, wherein: The vacuum pipe (303) is also included. The cathode cover plate (205) and the support joint (107) are respectively provided with vacuum flanges (304) for mounting the two ends of the vacuum pipe (303). The vacuum pipe (303) is used to provide a normal pressure channel for connecting the magnetic rod and the external cable.

14. A magnetron sputtering coating device, characterized in that: The invention comprises a rotating cathode according to any one of claims 10 to 13.

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