Experimental device for laser-assisted impact scribing of ultrathin brittle crystal material

Abstract

The invention discloses an experimental device for laser-assisted impact scribing of an ultrathin brittle crystal material, and relates to the technical field of impact scribing of crystal materials. The invention aims to solve the problems that a workpiece cannot be fixed through a vacuum chuck or a wax-based bonding mode and local heat insulation, heat dissipation and temperature monitoring are difficult to guarantee in an existing laser-assisted impact scribing experiment of an ultrathin brittle crystal material. The device comprises a temperature measuring device, a workpiece clamping device, a workpiece shaft, an X-axis moving platform, a machine tool base, a laser heating device, a Z-axis moving platform, a rotary scribing device and a scribing shaft, the X-axis moving platform is arranged on one side of the upper end of the machine tool base, the workpiece clamping device clamps a workpiece, and fine adjustment of the inclination angle of the lower end of the workpiece can be achieved; the temperature measuring device and the laser heating device are arranged in the middle of the upper end of the machine tool base, the Z-axis moving platform is arranged on the other side of the upper end of the machine tool base, and the rotary scribing device faces a workpiece to scribe the workpiece. The device is used for the crystal material impact scribing experiment.

Description

Technical Field

[0001] The present invention relates to the technical field of impact scribing of crystal materials, and particularly relates to an experimental device for laser-assisted impact scribing of ultra-thin brittle crystal materials. Background Art

[0002] The existing clamping of thin sheet workpieces is mainly achieved by means of vacuum chuck adsorption, lateral mechanical clamping, wax-based bonding, etc. However, in the experimental research on the impact scribing of some ultra-thin brittle crystal materials, the workpiece size is extremely small, the diameter-thickness ratio is large, and laser needs to be introduced for assistance. Therefore, this experimental environment has the characteristics of extremely high regional temperature, and the workpiece is fragile and difficult to clamp. The workpiece cannot be fixed by means of vacuum chuck or wax-based bonding, and requirements are put forward for aspects such as local heat insulation, heat dissipation, and temperature monitoring. In the laser-assisted impact scribing experiment, the workpiece will be heated to 1500 °C. If the workpiece and the workbench are connected by paraffin, the paraffin will melt at 80 °C, resulting in the workpiece falling off. If a high-temperature adhesive is used to connect the workpiece and the workpiece table, the high-temperature adhesive under the workpiece will expand when heated, causing the workpiece to tilt, and the high-temperature adhesive will deform when stressed, resulting in the failure of the experiment. If a vacuum chuck is used to clamp the workpiece, the high temperature of the workpiece after laser irradiation will be transmitted to the main shaft through the vacuum chuck, and too high a temperature will cause the machine tool to malfunction. If the traditional mechanical clamping method is used, the thickness of the experimental sample is less than 0.35 mm, and it is difficult to clamp the ultra-thin brittle crystal by traditional clamping. To solve the above problems, the present invention provides an experimental device for laser-assisted impact scribing of ultra-thin brittle crystal materials. Summary of the Invention

[0003] The present invention aims to solve the problems in the existing laser-assisted impact scribing experiment of ultra-thin brittle crystal materials that the workpiece cannot be fixed by means of vacuum chuck or wax-based bonding, and it is difficult to ensure local heat insulation, heat dissipation, and temperature monitoring, and further provides an experimental device for laser-assisted impact scribing of ultra-thin brittle crystal materials.

[0004] The technical solution adopted by the present invention to solve the above technical problems is:

[0005] An experimental device for laser-assisted impact scribing of ultra-thin brittle crystal materials, comprising a temperature measuring device, a workpiece clamping device, a workpiece shaft, an X-axis moving platform, a machine tool base, a laser heating device, a Z-axis moving platform, a rotary scribing device and a scribing shaft. The X-axis moving platform is arranged on one side of the upper end of the machine tool base and can move along the width direction of the machine tool base. The workpiece clamping device is connected to the inner end of the X-axis moving platform through the workpiece shaft. The workpiece clamping device clamps the workpiece and can realize fine adjustment of the inclination angle of the lower end of the workpiece. The temperature measuring device and the laser heating device are respectively arranged in the middle of the upper end of the machine tool base and are both oriented towards the workpiece. The Z-axis moving platform is arranged on the other side of the upper end of the machine tool base and can move along the length direction of the machine tool base. The rotary scribing device is connected to the inner end of the Z-axis moving platform through the scribing shaft. The rotary scribing device is oriented towards the workpiece to scribe the workpiece.

[0006] Further, the temperature measuring device includes a temperature measuring probe, a probe support hole, a probe support and a turntable. The turntable is fixedly connected to the machine tool base through a probe base. The lower end of the probe support is fixedly connected to the rotating end face of the turntable. The upper end of the probe support is hinged to the probe support hole through a rotating shaft. The temperature measuring probe is threadedly connected to the probe support hole.

[0007] Further, the laser heating device includes a laser gun head, a laser platform, a telescopic rod, a rod sleeve and a laser base. The lower end of the rod sleeve is fixedly connected to the machine tool base through the laser base. The lower end of the telescopic rod is inserted into the upper part of the rod sleeve and can be telescoped and rotated in the rod sleeve. The telescopic rod and the rod sleeve are locked through a tightening bolt. The laser platform is fixedly connected to the upper end of the telescopic rod. The laser gun head is clamped on the laser platform.

[0008] Further, the workpiece clamping device includes a force measuring instrument, a heat-insulating material clamping device, a differential screw fine adjustment device, an annular water-cooled heat dissipation sleeve, a heat-insulating layer and a workpiece fixing device. The force measuring instrument is horizontally arranged. The differential screw fine adjustment device is connected to the outer end face of the workpiece shaft through the force measuring instrument. The differential screw fine adjustment device can adjust the inclination angle of the heat-insulating material clamping device. The heat-insulating material clamping device is fixedly connected to the outer end face of the differential screw fine adjustment device. The inner end of the heat-insulating layer is clamped on the heat-insulating material clamping device. The annular water-cooled heat dissipation sleeve is sleeved on the outside of the outer end of the heat-insulating layer. The workpiece is fixedly connected to the outer end face of the heat-insulating layer through the workpiece fixing device.

[0009] Further, the differential screw fine adjustment device includes an adjustable bottom plate, a fixed bottom plate, two bolt holes and a differential screw assembly. The fixed bottom plate is vertically fixedly connected to the measuring head of the force measuring instrument. The adjustable bottom plate is arranged at the outer end of the fixed bottom plate. The upper side between the adjustable bottom plate and the fixed bottom plate is connected through two bolt holes. The middle part of the lower side between the fixed bottom plate and the adjustable bottom plate is connected through the differential screw assembly. The differential screw assembly can adjust the lifting and sinking of the lower side of the adjustable bottom plate.

[0010] Furthermore, the differential screw assembly includes a fine-motion platform, a sleeve and a variable-pitch screw. The fine-motion platform is fixed to the inner end surface of the adjustable base plate by connecting bolts, the sleeve is fixed to the outer end surface of the fixed base plate, the outer end of the fine-motion platform is inserted into the outer end of the sleeve, and the fine-motion platform and the sleeve are linearly slidably connected. The variable-pitch screw is inserted into the fixed base plate, and the rod body of the variable-pitch screw includes a large-pitch thread segment and a small-pitch thread segment. The large-pitch thread segment is threadedly connected to the fixed base plate, and the small-pitch thread segment is inserted into the fine-motion platform after passing through the sleeve and is threadedly connected to the fine-motion platform.

[0011] The top rotating disk is arranged on the outer side of the bottom rotating disk, and the top rotating disk is arranged in parallel on the outer side of the bottom rotating disk, and the top rotating disk and the bottom rotating disk are fixedly connected by a rotating disk bolt. The three rocker assemblies are evenly distributed along the circumferential direction and the edges of the outer ends of the adjustable base plate are respectively connected to the top rotating disk and the bottom rotating disk by a turntable bolt. The executing ends of the rocker assemblies are respectively connected to one side of the outer end of the adjustable base plate, and one end of the tightening lever is fixed to the top rotating disk, and the other end of the tightening lever is inserted in the lever slide rail and slides in the lever slide rail. Rotating the tightening lever drives the top rotating disk and the bottom rotating disk to rotate clockwise, driving the executing ends of the three rocker assemblies to squeeze the thermal insulation layer inward for clamping, and the tightening lever and the lever slide rail are locked by the lever bolt.

[0012] Furthermore, the rocker assembly includes a clamping rocker and a rocker slide, the rocker slide is arranged along the radial direction of the bottom rotating disk, the inner end of the rocker slide is provided with an arc groove, the outer edge of the bottom rotating disk is arranged in the arc groove and is slidably connected to the arc groove when rotating, one end of the clamping rocker is fixedly connected to a clamping cylinder, the clamping cylinder is arranged between the top rotating disk and the bottom rotating disk and is located on one side of the rocker slide, and limit columns are eccentrically arranged on the front and rear end surfaces of the clamping cylinder, the limit columns are respectively inserted in the top rotating disk and the bottom rotating disk, and the other end of the clamping rocker is fixedly connected to a sliding column, which is arranged in the rocker slide and slides along the rocker slide. The clamping cylinder is the execution end of the rocker assembly, and the side wall of the clamping cylinder can squeeze and clamp the outer circumferential side wall of the thermal insulation layer.

[0013] Furthermore, the thermal insulation layer includes a columnar thermal insulation block and an alumina disc. A groove is provided in the middle of the upper end surface of the columnar thermal insulation block. The alumina disc is embedded in the groove, and a gap is provided between the outer wall of the alumina disc and the side wall of the groove of the columnar thermal insulation block.

[0014] Furthermore, the workpiece fixing device includes a workpiece clamping plate and a spring clip. A workpiece clamping groove is formed on the workpiece clamping plate. Limiting baffles are arranged around the lower end face of the workpiece clamping groove. The workpiece is arranged in the workpiece clamping groove and on the upper end face of the limiting baffle. There is a gap between one side wall of the workpiece clamping groove and the adjacent side wall of the workpiece. The elastic clip is arranged in the gap. Covers are arranged on the upper end faces of two corner points on the other side of the workpiece clamping groove. Three fixing pieces are vertically and fixedly connected in a circumferential direction on the lower end face of the outer edge of the workpiece clamping plate. The fixing pieces are respectively inserted into the gaps between the alumina wafer and the columnar heat insulation block. Three tightening through holes are evenly arranged in a circumferential direction on the side wall of the annular water-cooled heat dissipation sleeve. A tightening screw is threadedly connected in the tightening through hole. The tightening screw tightens the columnar heat insulation block so that the columnar heat insulation block clamps the fixing pieces.

[0015] The beneficial effects included in the present invention compared with the prior art are as follows:

[0016] The present invention provides an experimental device for laser-assisted impact scribing of ultra-thin brittle crystal materials, which can effectively realize the clamping and fixing of ultra-thin brittle crystal materials. At the same time, the laser heating device can be used to laser-heat the surface of the workpiece during the impact scribing process. At the same time, the temperature measuring device can monitor the temperature of the workpiece and the temperature of the force measuring instrument in the processing condition and feed the data back to the computer. According to the feedback, the laser power can be adjusted in real time and whether to start the annular water-cooled heat dissipation sleeve for heat dissipation and cooling to ensure the smooth progress of the scribing process. In addition, a heat insulation layer is arranged below the workpiece to isolate the temperature of the workpiece from the force measuring instrument and ensure that the working temperature of the force measuring instrument is within a reasonable range. This experimental device can also realize the fine adjustment of the inclination angle of the workpiece, and its fine adjustment accuracy reaches the micron level to meet the accuracy requirements that the tool needs to scribe from shallow to deep during the impact scribing experiment and the scribing depth cannot be too large and needs to be controlled within 3 microns. Description of the Drawings

[0017] Figure 1 is the overall structural schematic diagram of the present invention;

[0018] Figure 2 is the structural schematic diagram of the temperature measuring device in the present invention;

[0019] Figure 3 is the structural schematic diagram of the laser heating device in the present invention;

[0020] Figure 4 is the structural schematic diagram of the workpiece clamping device in the present invention;

[0021] Figure 5 is the structural schematic diagram of the differential screw fine adjustment device in the present invention;

[0022] Figure 6 is the cross-sectional structural schematic diagram at the position of the through-hole bolt in the present invention;

[0023] Figure 7 is a schematic structural view of the differential screw assembly in the present invention;

[0024] Figure 8 is a top view structural schematic diagram of the workpiece clamping device in the present invention;

[0025] Figure 9 is a schematic structural view of the heat insulation material tightening device in the present invention;

[0026] Figure 10 is a front view structural schematic diagram of the workpiece clamping plate in the present invention;

[0027] Figure 11 is an overall structural schematic diagram of the workpiece clamping plate in the present invention;

[0028] Figure 12 is a schematic structural view of the annular water-cooled heat dissipation sleeve in the present invention;

[0029] Figure 13 is a schematic structural view of the clamping rocker in the present invention;

[0030] Figure 14 is a schematic structural view of the columnar heat insulation block in the present invention. Detailed implementation manners

[0031] In order to make the technical problems, technical solutions and beneficial effects solved by the present invention clearer and more understandable, the following further details the invention in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention.

[0032] Detailed implementation manner one: In combination with Figures 1 to 14 This embodiment is described. The experimental device for laser-assisted impact scribing of ultra-thin brittle crystal materials in this embodiment includes a temperature measurement device 1, a workpiece clamping device 2, a workpiece shaft 3, an X-axis moving platform 4, a machine tool base 5, a laser heating device 6, a Z-axis moving platform 7, a rotary scribing device 8 and a scribing shaft 9. The X-axis moving platform 4 is arranged on one side of the upper end of the machine tool base 5 and can move along the width direction of the machine tool base 5. The workpiece clamping device 2 is connected to the inner end of the X-axis moving platform 4 through the workpiece shaft 3. The workpiece clamping device 2 clamps the workpiece 37 and can realize fine adjustment of the inclination angle of the lower end of the workpiece 37. The temperature measurement device 1 and the laser heating device 6 are respectively arranged in the middle of the upper end of the machine tool base 5 and are both oriented towards the workpiece 37. The Z-axis moving platform 7 is arranged on the other side of the upper end of the machine tool base 5 and can move along the length direction of the machine tool base 5. The rotary scribing device 8 is connected to the inner end of the Z-axis moving platform 7 through the scribing shaft 9. The rotary scribing device 8 is oriented towards the workpiece 37 to scribe the workpiece 37.

[0033] The device of the present invention is mainly used for laser-assisted impact scribing experiments on ultra-thin brittle crystal materials, to study the microscopic damage evolution mechanism and material removal mechanism of ultra-thin brittle crystal materials under laser assistance. Wafer materials such as gallium nitride and silicon carbide belong to hard and brittle materials. The thickness of chip wafers is generally less than 0.35 mm, with high hardness and prone to brittle fracture. Therefore, requirements are put forward for the device used in laser-assisted impact scribing experiments on ultra-thin brittle crystal materials. Thus, a laser heating device 6 is adopted in the present invention for assisted processing. When the laser heating acts on the workpiece, the temperature of the workpiece will rise, reducing its hardness, which can effectively reduce the occurrence of brittle fracture of the workpiece. Therefore, the experimental device can be used to study the influence of the mechanical properties of materials under the action of laser. In the impact scribing scratch, an important index is the depth of the crack that appears for the first time, which is the brittle-ductile transition depth, and this is also the research purpose of this experimental device.

[0034] Specific Embodiment 2: Combining Figure 1 and Figure 2 to illustrate this embodiment. The temperature measuring device 1 described in this embodiment includes a temperature measuring probe 10, a probe support hole 11, a probe support 13, and a turntable 14. The turntable 14 is fixedly connected to the machine tool base 5 through a probe base 15. The lower end of the probe support 13 is fixedly connected to the rotating end face of the turntable 14. The upper end of the probe support 13 is hinged to the probe support hole 11 through a rotating shaft 12. The temperature measuring probe 10 is threadedly connected to the probe support hole 11.

[0035] The technical features not disclosed in this embodiment are the same as those in Specific Embodiment 1.

[0036] In this embodiment, the temperature measuring probe 10 is threadedly connected to the probe support hole 11. The probe support hole 11 and the probe support 13 are connected to the rotating shaft 12 with adjustable angles. The probe support 13 and the turntable 14 are connected by bolts, and the probe base 15 and the machine tool base 5 are connected by bolts. The turntable 14 can rotate freely on the probe base 15, thereby realizing the arbitrary angle adjustment of the temperature measuring probe 10.

[0037] Specific Embodiment 3: Combining Figure 1 and Figure 3 to illustrate this embodiment. The laser heating device 6 described in this embodiment includes a laser gun head 17, a laser platform 19, a telescopic rod 20, a rod sleeve 21, and a laser base 22. The lower end of the rod sleeve 21 is fixedly connected to the machine tool base 5 through the laser base 22. The lower end of the telescopic rod 20 is inserted into the upper part of the rod sleeve 21 and can be telescoped and rotated within the rod sleeve 21. The telescopic rod 20 and the rod sleeve 21 are locked by a tightening bolt. The laser platform 19 is fixedly connected to the upper end of the telescopic rod 20. The laser gun head 17 is clamped on the laser platform 19.

[0038] The technical features not disclosed in this embodiment are the same as those in Specific Embodiment 1.

[0039] The rod sleeve 21 is fixedly connected to the laser base 22 by threads, and the telescopic rod 20 is fixedly connected to the laser platform 19 by threads.

[0040] One side of the upper end of the laser platform 19 is vertically fixedly connected with a slide bar 18. A strip-shaped pressing block 16 is sleeved on the slide bar 18. The strip-shaped pressing block 16 and the slide bar 18 are locked by a locking bolt. The strip-shaped pressing block 16 presses on the laser gun head 17 and is locked by a pressing bolt.

[0041] In this embodiment, the laser gun head 17 is placed on the laser platform 19. The laser platform 19 is threadedly connected to the slide bar 18. The strip-shaped pressing block 16 is sleeved on the slide bar 18 and locked by a bolt. The strip-shaped pressing block 16 presses on the laser gun head 17 and is locked by a bolt. The lower telescopic rod 20 is threadedly connected to the laser platform 19 and can be telescopically extended and retracted and freely rotated within the rod sleeve 21, thereby adjusting the action point of the laser on the workpiece surface. The telescopic rod 20 and the rod sleeve 21 are locked by a bolt. The rod sleeve 21 is threadedly connected to the laser base 22. The laser base 22 is bolted to the machine tool base 5.

[0042] Specific Embodiment Four: With reference to Figure 1 and Figures 4 to 14 This embodiment is described. The workpiece clamping device 2 of this embodiment includes a dynamometer 23, a heat insulation material clamping device 24, a differential screw fine adjustment device 25, an annular water-cooled heat dissipation sleeve 26, a heat insulation layer, and a workpiece fixing device 28. The dynamometer 23 is horizontally arranged. The differential screw fine adjustment device 25 is connected to the outer end face of the workpiece shaft 3 through the dynamometer 23. The differential screw fine adjustment device 25 can adjust the inclination angle of the heat insulation material clamping device 24. The heat insulation material clamping device 24 is fixedly connected to the outer end face of the differential screw fine adjustment device 25. The inner end of the heat insulation layer is clamped on the heat insulation material clamping device 24. The annular water-cooled heat dissipation sleeve 26 is sleeved outside the outer end of the heat insulation layer. The workpiece 37 is fixedly connected to the outer end face of the heat insulation layer through the workpiece fixing device.

[0043] The technical features not disclosed in this embodiment are the same as those in Specific Embodiment One.

[0044] The inner part of the annular water-cooled heat dissipation sleeve 26 is provided with a water-cooling liquid chamber. The outer circumferential side wall of the annular water-cooled heat dissipation sleeve 26 is respectively provided with a water inlet 47 and a water outlet 46. The water inlet 47 and the water outlet 46 are respectively communicated with the water-cooling liquid chamber.

[0045] Since the tool needs to scratch from shallow to deep during the impact scratching experiment, and the scratching depth cannot be too large, which needs to be controlled within 3 microns, the entire clamping platform needs to have a tilt function adjustable at the micron level. This tilt function is realized by the differential screw fine adjustment device 25.

[0046] Since the experimental environment involves high-temperature conditions of laser heating and the use of a dynamometer with strict requirements for temperature conditions, not only is it necessary to fix and clamp the ultra-thin workpiece, but also appropriate heat-insulating materials need to be selected to separate the workpiece from the dynamometer and control the working temperature of the dynamometer within a reasonable range. Therefore, a heat-insulating layer, a heat-insulating material clamping device 24 for fixing the heat-insulating layer, and an annular water-cooled heat dissipation sleeve 26 are provided.

[0047] Specific Embodiment 5: Combining Figures 4 to 7 To illustrate this embodiment, the differential screw fine-tuning device 25 in this embodiment includes an adjustable base plate 29, a fixed base plate 31, two perforated bolts 30, and a differential screw assembly. The fixed base plate 31 is vertically fixed to the measuring head of the dynamometer 23. The adjustable base plate 29 is arranged at the outer end of the fixed base plate 31. The upper side between the adjustable base plate 29 and the fixed base plate 31 is connected by two perforated bolts 30. The middle part of the lower side between the fixed base plate 31 and the adjustable base plate 29 is connected by a differential screw assembly. The differential screw assembly can adjust the lifting and sinking of the lower side of the adjustable base plate 29.

[0048] The technical features not disclosed in this embodiment are the same as those in Specific Embodiment 4.

[0049] The perforated bolt 30 is inserted into the adjustable base plate 29 and is threadedly connected to the adjustable base plate 29. A kidney-shaped through-hole is provided at the position corresponding to the perforated bolt 30 on the fixed base plate 31. The end of the perforated bolt 30 is inserted into the kidney-shaped through-hole. A jacking screw is inserted into the side end face of the fixed base plate 31 and is threadedly connected to the fixed base plate 31. A slot hole is provided on the side wall of the perforated bolt 30. The end of the jacking screw is inserted into the slot hole. When the differential screw assembly adjusts the lifting and sinking of the adjustable base plate 29 on the corresponding side, the perforated bolt 30 rotates around the axis of the jacking screw, and the kidney-shaped through-hole provides a moving space for the rotation process.

[0050] Specific Embodiment 6: Combining Figures 4 to 7 To illustrate this embodiment, the differential screw assembly in this embodiment includes a micro-motion platform 32, a sleeve 33, and a variable-pitch screw 35. The micro-motion platform 32 is fixedly connected to the inner end face of the adjustable base plate 29 through a connecting bolt. The sleeve 33 is fixedly connected to the outer end face of the fixed base plate 31. The outer end of the micro-motion platform 32 is inserted into the outer end of the sleeve 33, and the micro-motion platform 32 is linearly slidably connected to the sleeve 33. The variable-pitch screw 35 is inserted into the fixed base plate 31. The rod body of the variable-pitch screw 35 includes a large-pitch thread section and a small-pitch thread section. The large-pitch thread section is threadedly connected to the fixed base plate 31. The small-pitch thread section passes through the sleeve 33 and is inserted into the micro-motion platform 32 and is threadedly connected to the micro-motion platform 32.

[0051] The technical features not disclosed in this embodiment are the same as those in Specific Embodiment 5.

[0052] The differential screw assembly also includes a guide column 34, which is vertically fixed to the outer wall of the lower end of the micro-motion platform 32. A guide groove is opened on the sleeve 33 along the length direction. The guide column 34 is inserted into the guide groove and can move along the length direction of the guide groove.

[0053] In this embodiment, the fixed base plate 31 is connected and fixed to the dynamometer 23 by bolts. One side of the adjustable base plate 29 is connected to the fixed base plate 31 by two bolts with holes 30, and a screw is passed through the bolt hole. The screw is threadedly locked with the fixed base plate 31, and the screw and the hole of the bolt 30 can rotate. The other side is a differential helical structure. The fine-motion platform 32 is connected to the adjustable base plate 29 by bolts. The sleeve 33 is fixed to the fixed base plate 31. The fine-motion platform 32 is nested in the sleeve, and there is an extended guide column 34 that moves axially in the guide groove on the sleeve, and cannot rotate. The variable pitch screw 35 is composed of two sections of screws with different pitches. The pitch of the part threaded with the fixed base plate 31 is P1, and the pitch of the part threaded with the fine-motion platform 32 is P2, and P1>P2. When the variable pitch screw 35 rotates inward one circle, the screw moves inward P1 relative to the fixed base plate 31, and the fine-motion platform 32 moves outward P2 relative to the screw. Therefore, the distance S that the fine-motion platform 32 actually lifts the adjustable base plate 29 is P1-P2. Therefore, it is only necessary to calibrate the rotation angle θ of the variable pitch screw 35 and control the difference between the two pitches to achieve micron-level lifting of the adjustable base plate 29. The lifting distance S is

[0054]

[0055] Specific implementation method seven: combination Figures 4 to 13 Explain this embodiment, the thermal insulation material clamping device 24 of this embodiment includes a bottom rotating disk 38, a top rotating disk 39, a lever slide rail 42, a tightening lever 43 and three rocker assemblies, the bottom rotating disk 38 is arranged on the outer end surface of the adjustable bottom plate 29, the top rotating disk 39 is arranged parallel to the outer side of the bottom rotating disk 38, the top rotating disk 39 and the bottom rotating disk 38 are fixed by a rotating disk bolt, and the three rocker assemblies are evenly distributed along the circumferential direction on the edge of the outer end of the adjustable bottom plate 29. The ends are respectively connected to the top rotating disk 39 and the bottom rotating disk 38, the lever slide rail 42 is fixedly connected to one side of the outer end of the adjustable base plate 29, one end of the tightening lever 43 is fixedly connected to the top rotating disk 39, and the other end of the tightening lever 43 is inserted into the lever slide rail 42 and slides in the lever slide rail 42. Rotating the tightening lever 43 drives the top rotating disk 39 and the bottom rotating disk 38 to rotate clockwise, driving the executing ends of the three rocker assemblies to squeeze the insulation layer inward for clamping, and the tightening lever 43 and the lever slide rail 42 are locked by the lever bolt.

[0056] The technical features not disclosed in this embodiment are the same as those in the fourth specific embodiment.

[0057] Specific embodiment eight: Combining Figures 4 to 13 to illustrate this embodiment, the rocker assembly in this embodiment includes a clamping rocker 36 and a rocker slide rod 41. The rocker slide rod 41 is arranged along the radial direction of the bottom rotating disk 38. An arc-shaped notch is formed at the inner end of the rocker slide rod 41. The outer edge of the bottom rotating disk 38 is arranged in the arc-shaped notch and is in sliding connection with the arc-shaped notch during rotation. One end of the clamping rocker 36 is fixedly connected with a clamping cylinder. The clamping cylinder is arranged between the top rotating disk 39 and the bottom rotating disk 38 and is located on one side of the rocker slide rod 41. Limit columns are eccentrically arranged on the front and rear end faces of the clamping cylinder respectively, and the limit columns are inserted into the top rotating disk 39 and the bottom rotating disk 38 respectively. The other end of the clamping rocker 36 is fixedly connected with a sliding column. The sliding column is arranged in the rocker slide rod 41 and slides along the rocker slide rod 41. The clamping cylinder is the execution end of the rocker assembly, and the side wall of the clamping cylinder can squeeze and clamp the outer circumferential side wall of the heat insulation layer.

[0058] The technical features not disclosed in this embodiment are the same as those in the seventh specific embodiment.

[0059] The adjustable bottom plate 29 is fixed and does not rotate. The bottom rotating disk 38 is placed above. The three rocker slide rails 41 are fixedly connected to the adjustable bottom plate 29 by bolts. One end of the three clamping rockers 36 moves in the rocker slide rails 41, and the cylindrical protrusions on both sides of the other end are respectively connected to the hole positions of the bottom rotating disk 38 and the top rotating disk 39. The upper and lower rotating disks are connected by bolts, that is, the upper and lower turntables rotate simultaneously. One end of the tightening lever 43 is screwed into the threaded hole on the side of the turntable, and the other end slides in the lever slide rail 42. When the tightening lever is rotated, the upper and lower rotating disks rotate clockwise, driving the clamping rocker 36 to squeeze inwards to clamp the columnar thickened asbestos block 27. Then, the bolt vertically passing through the tightening lever 43 is locked to achieve the clamping and fixing effect.

[0060] Specific embodiment nine: Combining Figure 4 、 Figure 8 and Figure 14 to illustrate this embodiment, the heat insulation layer in this embodiment includes a columnar heat insulation block 27 and an alumina round sheet 40. A groove is formed in the middle of the upper end face of the columnar heat insulation block 27. The alumina round sheet 40 is embedded in the groove, and there is a gap between the outer side wall of the alumina round sheet 40 and the side wall of the groove of the columnar heat insulation block 27.

[0061] The technical features not disclosed in this embodiment are the same as those in the fourth specific embodiment.

[0062] During the experiment, since the laser action point is very small, in order to ensure uniform heating of the workpiece, an alumina wafer 40 needs to be set below the workpiece to make the whole workpiece heated evenly, and a heat-insulating material, i.e., a thickened asbestos columnar heat-insulating block 27, is selected for heat insulation at the lower part of the alumina wafer 40.

[0063] Specific Embodiment Ten: In combination with Figure 4 、 Figures 8 to 12 and Figure 14 describe this embodiment. The workpiece fixing device 28 in this embodiment includes a workpiece clamping plate and a spring clip 45. A workpiece clamping groove 44 is formed on the workpiece clamping plate. Limit baffles are provided around the lower end face of the workpiece clamping groove 44. The workpiece 37 is arranged in the workpiece clamping groove 44 and on the upper end face of the limit baffle. A gap is provided between one side wall of the workpiece clamping groove 44 and the adjacent side wall of the workpiece 37. The elastic clip 45 is arranged in the gap. Covers are provided on the upper end faces of two corner points on the other side of the workpiece clamping groove 44. Three fixing pieces are vertically and fixedly connected along the circumferential direction on the lower end face of the outer edge of the workpiece clamping plate. The fixing pieces are respectively inserted into the gap between the alumina wafer 40 and the columnar heat-insulating block 27. Three tightening through holes are evenly distributed along the circumferential direction on the side wall of the annular water-cooled heat-dissipating sleeve 26. A tightening screw is threadedly connected in the tightening through hole. The tightening screw presses against the columnar heat-insulating block 27 to clamp the fixing piece by the columnar heat-insulating block 27.

[0064] The technical features not disclosed in this embodiment are the same as those in Specific Embodiment Nine.

[0065] Since this experiment is an impact scribing experiment, the tip of the tool needs to be in contact with the surface of the workpiece, and at the same time, a lateral feed space needs to be left. Therefore, it is best to ensure that there is no interference higher than the surface around the workpiece thin sheet, and the size of the workpiece is very small, and it is very difficult to fix it by pressing. Considering using the method of clamping with a clamping groove and an elastic clip. Three tightening screws pass through the through holes of the annular water-cooled heat-dissipating sleeve 26 and press against the upper side of the columnar heat-insulating block 27. There is a certain gap between the columnar heat-insulating block 27 and the alumina wafer 40. The three fixing pieces extending from the workpiece clamping groove 44 are inserted into the gap and tightened by bolts. The length of the clamping groove is slightly longer than that of the workpiece. An elastic clip 45 is provided on one side, and the two corner points on the other side are covered. When the workpiece 37 is loaded, it presses against the elastic clip 45 and then is squeezed into the groove and clamped to achieve fixation.

[0066] Working Process

[0067] First, set up the insulation material clamping device 24 and connect it to the dynamometer 23 to collect force signals during tool alignment and scoring. Place the grooved cylindrical insulation block 27 in the center. Twist the tightening lever 43 to rotate it within the lever guide rail 42. While the cylindrical insulation block 27 is clamped, it automatically centers itself in the center under the action of the three tightening levers 43. Tighten the lever bolt nuts above the lever guide rail 42 to secure the tightening levers 43 in the clamped position. Place the alumina disc 40 in the circular groove in the center of the cylindrical insulation block 27. The three fixing tabs extending from the workpiece clamping slot 44 are aligned with the holes for the three tightening screws and inserted into the gap between the alumina disc 40 and the cylindrical insulation block 27. The workpiece is then tightened with the tightening screws. A 10mm×10mm×0.35mm gallium nitride wafer is selected as the workpiece 37 and loaded into the workpiece clamping slot 44. This completes the workpiece clamping process. At this time, the workpiece is lifted by the differential screw fine-tuning device 25, so that the workpiece forms a height difference with the upper part being low and the lower part being high. The rotation direction of the scoring axis 9 is thereby determined, so that the tip of the tool can score from shallow to deep from top to bottom. For the case of the upper part being low and the lower part being high, the scoring axis 9 rotates in a clockwise direction. Next, turn on the temperature measuring device 1 and the laser heating device 6. Adjust the position of the red light spot of the laser gun head 17 to align with the workpiece, and start preheating. The function of the temperature measuring device 1 is mainly divided into two parts. The first part is to measure whether the temperature of the laser action point reaches the expected temperature of the experiment, and feed the data back to the computer, and adjust the laser power in real time according to the feedback; the second part is to measure the temperature of the dynamometer 23. If the temperature of the dynamometer 23 is too high and reaches the critical working temperature, it is necessary to promptly start the annular water-cooling heat dissipation sleeve 26 for heat dissipation.

[0068] The basic principles, main features, and advantages of the present invention are shown and described above. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The above embodiments and descriptions are merely illustrative of the principles of the present invention. Various changes and modifications may be made to the present invention without departing from the spirit and scope of the present invention. Such changes and modifications are intended to fall within the scope of the present invention. The scope of protection claimed in the present invention is defined by the appended claims and their equivalents.

Claims

1. An experimental device for laser-assisted impact scribing of ultra-thin brittle crystal materials, characterized in that: It includes a temperature measuring device (1), a workpiece clamping device (2), a workpiece shaft (3), an X-axis moving platform (4), a machine tool base (5), a laser heating device (6), a Z-axis moving platform (7), a rotary scribing device (8) and a scribing shaft (9). The X-axis moving platform (4) is arranged on one side of the upper end of the machine tool base (5) and can move along the width direction of the machine tool base (5). The workpiece clamping device (2) is connected to the inner end of the X-axis moving platform (4) through the workpiece shaft (3). The workpiece clamping device (2) clamps the workpiece (37) and can realize fine adjustment of the inclination angle of the lower end of the workpiece (37). The temperature measuring device (1) and the laser heating device (6) are respectively arranged in the middle of the upper end of the machine tool base (5) and are both arranged towards the workpiece (37). The Z-axis moving platform (7) is arranged on the other side of the upper end of the machine tool base (5) and can move along the length direction of the machine tool base (5). The rotary scribing device (8) is connected to the inner end of the Z-axis moving platform (7) through the scribing shaft (9). The rotary scribing device (8) is arranged towards the workpiece (37) to scribe the workpiece (37).

2. The experimental device for laser-assisted impact scribing of ultra-thin brittle crystal materials according to claim 1, wherein: The temperature measuring device (1) includes a temperature measuring probe (10), a probe support hole (11), a probe support (13) and a turntable (14). The turntable (14) is fixedly connected to the machine tool base (5) through a probe base (15). The lower end of the probe support (13) is fixedly connected to the rotating end face of the turntable (14). The upper end of the probe support (13) is hinged to the probe support hole (11) through a rotating shaft (12). The temperature measuring probe (10) is threadedly connected to the probe support hole (11).

3. The experimental device for laser-assisted impact scribing of ultra-thin brittle crystal materials according to claim 1, characterized in that: The laser heating device (6) includes a laser gun head (17), a laser platform (19), a telescopic rod (20), a rod sleeve (21) and a laser base (22). The lower end of the rod sleeve (21) is fixedly connected to the machine tool base (5) through the laser base (22). The lower end of the telescopic rod (20) is inserted into the upper end of the rod sleeve (21) and can be telescoped and rotated in the rod sleeve (21). The telescopic rod (20) and the rod sleeve (21) are locked through a tightening bolt. The laser platform (19) is fixedly connected to the upper end of the telescopic rod (20). The laser gun head (17) is clamped on the laser platform (19).

4. An experimental device for laser-assisted impact scribing of ultra-thin brittle crystal materials according to claim 1, characterized in that: The workpiece clamping device (2) includes a dynamometer (23), a heat insulation material clamping device (24), a differential screw fine adjustment device (25), an annular water-cooled heat dissipation sleeve (26), a heat insulation layer and a workpiece fixing device (28). The dynamometer (23) is horizontally arranged. The differential screw fine adjustment device (25) is connected to the outer end face of the workpiece shaft (3) through the dynamometer (23). The differential screw fine adjustment device (25) can realize the adjustment of the inclination angle of the heat insulation material clamping device (24). The heat insulation material clamping device (24) is fixedly connected to the outer end face of the differential screw fine adjustment device (25). The inner end of the heat insulation layer is clamped on the heat insulation material clamping device (24). The annular water-cooled heat dissipation sleeve (26) is sleeved on the outside of the outer end of the heat insulation layer. The workpiece (37) is fixedly connected to the outer end face of the heat insulation layer through the workpiece fixing device.

5. An experimental apparatus for laser-assisted impact scribing of ultra-thin brittle crystal materials according to claim 4, characterized in that: The differential screw fine-tuning device (25) comprises an adjustable base plate (29), a fixed base plate (31), two bolts with holes (30) and a differential screw assembly. The fixed base plate (31) is vertically fixed to the probe of the dynamometer (23). The adjustable base plate (29) is arranged at the outer end of the fixed base plate (31). The upper side of the adjustable base plate (29) and the fixed base plate (31) are connected by the two bolts with holes (30). The middle part of the lower side between the fixed base plate (31) and the adjustable base plate (29) is connected by the differential screw assembly. The differential screw assembly can adjust the lifting and sinking of the lower side of the adjustable base plate (29).

6. The experimental device for laser-assisted impact scribing of ultra-thin brittle crystal materials according to claim 5, wherein: The differential screw assembly comprises a fine motion platform (32), a sleeve (33) and a variable pitch screw (35), wherein the fine motion platform (32) is fixed to the inner end surface of the adjustable base plate (29) by a connecting bolt, the sleeve (33) is fixed to the outer end surface of the fixed base plate (31), the outer end of the fine motion platform (32) is inserted into the outer end of the sleeve (33), and the fine motion platform (32) and the sleeve (33) are linearly slidably connected, the variable pitch screw (35) is inserted into the fixed base plate (31), and the rod body of the variable pitch screw (35) comprises a large pitch thread section and a small pitch thread section, the large pitch thread section is threadedly connected to the fixed base plate (31), and the small pitch thread section passes through the sleeve (33) and is inserted into the fine motion platform (32), and is threadedly connected to the fine motion platform (32).

7. An experimental device for laser-assisted impact scribing of ultra-thin brittle crystal materials according to claim 4, characterized in that: The heat-insulating material clamping device (24) comprises a bottom rotating disk (38), a top rotating disk (39), a lever slide rail (42), a tightening lever (43) and three rocker assemblies. The bottom rotating disk (38) is arranged on the outer end surface of the adjustable bottom plate (29). The top rotating disk (39) is arranged in parallel on the outer side of the bottom rotating disk (38). The top rotating disk (39) and the bottom rotating disk (38) are fixedly connected by a rotating disk bolt. The three rocker assemblies are evenly distributed along the circumferential direction on the edge of the outer end of the adjustable bottom plate (29). The execution ends of the rocker assemblies are respectively connected to the top rotating disk. (39) is connected to the bottom rotating disk (38), the lever slide rail (42) is fixed to one side of the outer end of the adjustable bottom plate (29), one end of the tightening lever (43) is fixed to the top rotating disk (39), the other end of the tightening lever (43) is inserted into the lever slide rail (42) and slides in the lever slide rail (42), the tightening lever (43) is rotated to drive the top rotating disk (39) and the bottom rotating disk (38) to rotate clockwise, driving the execution ends of the three rocker assemblies to squeeze the insulation layer inward to clamp, and the tightening lever (43) and the lever slide rail (42) are locked by the lever bolt.

8. An experimental device for laser-assisted impact scribing of ultra-thin brittle crystal materials according to claim 7, characterized in that: The rocker assembly includes a clamping rocker (36) and a rocker slide bar (41). The rocker slide bar (41) is arranged along the radial direction of the bottom rotating disk (38). An arc-shaped notch is formed at the inner end of the rocker slide bar (41). The outer edge of the bottom rotating disk (38) is arranged in the arc-shaped notch and is in sliding connection with the arc-shaped notch during rotation. One end of the clamping rocker (36) is fixedly connected with a clamping cylinder. The clamping cylinder is arranged between the top rotating disk (39) and the bottom rotating disk (38) and is located on one side of the rocker slide bar (41). Limit columns are eccentrically arranged on the front and rear end faces of the clamping cylinder respectively. The limit columns are inserted into the top rotating disk (39) and the bottom rotating disk (38) respectively. The other end of the clamping rocker (36) is fixedly connected with a slide column. The slide column is arranged in the rocker slide bar (41) and slides along the rocker slide bar (41). The clamping cylinder is the execution end of the rocker assembly, and the side wall of the clamping cylinder can squeeze and clamp the outer circumferential side wall of the heat insulation layer.

9. An experimental device for laser-assisted impact scribing of ultra-thin brittle crystal materials according to claim 4, characterized in that: The heat insulation layer includes a columnar heat insulation block (27) and an alumina disc (40). A groove is formed in the middle of the upper end face of the columnar heat insulation block (27). The alumina disc (40) is embedded in the groove, and a gap is provided between the outer side wall of the alumina disc (DO) and the side wall of the groove of the columnar heat insulation block (27).

10. An experimental device for laser-assisted impact scribing of ultra-thin brittle crystal materials according to claim 9, characterized in that: The workpiece fixing device (28) includes a workpiece clamping plate and a spring clip (45). A workpiece clamping groove (44) is formed in the workpiece clamping plate. Limit baffles are arranged around the lower end face of the workpiece clamping groove (44). The workpiece (37) is arranged in the workpiece clamping groove (44) and is located on the upper end face of the limit baffle. A gap is provided between one side wall of the workpiece clamping groove (44) and the adjacent side wall of the workpiece (37). The elastic clip (45) is arranged in the gap. Seals are arranged on the upper end faces of two corner points on the other side of the workpiece clamping groove (44). Three fixing pieces are vertically and fixedly connected along the circumferential direction on the lower end face of the outer edge of the workpiece clamping plate. The fixing pieces are respectively inserted into the gap between the alumina disc (40) and the columnar heat insulation block (27). Three tightening through holes are evenly arranged along the circumferential direction on the side wall of the annular water-cooled heat dissipation sleeve (26). Tightening screws are threadedly connected in the tightening through holes. The tightening screws tighten the columnar heat insulation block (27) so that the columnar heat insulation block (27) clamps the fixing pieces.

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