Equipment power supply system and control method thereof

Abstract

The invention provides an equipment power supply system and a control method thereof, and the system comprises a first power supply loop which is used for supplying power to a load; the switching device is located in the power supply cabinet, electrically connected with the first power supply loop and used for controlling connection and disconnection of the first power supply loop and a load; the control device is electrically connected with the switch device; the emergency stop switch is located on the machine table and electrically connected with the control device, and the control device is used for controlling the working state of the switching device according to the on-off state of the emergency stop switch so that the first power supply loop can supply power to the load or cut off power from the load. According to the equipment power supply system, the control device controls the working state of the switching device according to the on-off state of the emergency stop switch, when the machine table is abnormal and the whole machine needs to be powered off, a worker does not need to go to a far-end power supply cabinet and carries out opening operation through a circuit breaker handle, and only the emergency stop switch needs to be pressed on the machine table; therefore, the power-off operation of the whole machine can be completed, and the power-off timeliness and safety after the fault are improved.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor manufacturing, and specifically, to an equipment power supply system and a control method thereof. Background Art

[0002] With the development of industry, the application of electrical control systems in production has been increasing continuously. As the number of electrical control devices increases, people's requirements for equipment safety are also increasing continuously. When the equipment starts, providing a safe start strategy is crucial for ensuring personal safety and equipment safety.

[0003] Currently, in the field of semiconductor manufacturing, many high-power devices are required. For example, when manufacturing monocrystalline silicon for photovoltaic power generation, a diffusion furnace is needed. The heating module in the diffusion furnace needs to be connected to a 380V power supply line, and its related supporting modules, such as control and transportation modules, also need to be connected to a 220V power supply line.

[0004] In the related art, as Figure 1 shown, these machine tools can directly supply power to the load by closing the circuit breaker, or monitor the alarm through the alarm contact of the circuit breaker, and the power-on can be completed without tripping alarm. When an abnormality occurs in the nearby machine tool and the whole machine needs to be emergently powered off to determine the fault source, it is necessary to perform a switching-off operation at the only circuit breaker handle at the remote power cabinet. On the one hand, there is a certain distance between the power cabinet and the machine tool, and the power-off operation of the whole machine cannot be completed in the shortest time, which not only reduces the timeliness of power cut after a fault occurs, but on the other hand, since electric arcs and electric shocks will occur when the circuit breaker is switched off, there is also a risk of electric shock when personnel operate. Summary of the Invention

[0005] The present invention aims to at least solve the problem in the prior art that after a fault occurs in the equipment, it is necessary to perform a switching-off operation at the power cabinet, resulting in poor timeliness and low safety of power cut, and provides an equipment power supply system and a control method thereof.

[0006] To achieve the purpose of the present invention, an equipment power supply system is provided, including: a first power supply circuit for supplying power to a load; a switching device located in a power cabinet and electrically connected to the first power supply circuit, the switching device being used to control the on-off of the first power supply circuit and the load; a control device electrically connected to the switching device; an emergency stop switch located on a machine tool and electrically connected to the control device, the control device being used to control the working state of the switching device according to the switch state of the emergency stop switch, so that the first power supply circuit supplies power to the load or cuts off the power.

[0007] In some embodiments, the control device is further configured to detect whether the device power supply system meets the power supply conditions, and the control device controls the power supply of the device power supply system according to the detection result. In some embodiments, the control device further includes: an emergency stop switch detection circuit for detecting the working state of the emergency stop switch; the control device controls the first power supply circuit to supply power to or cut off power from the load according to the detection result of the working state of the emergency stop switch.

[0008] In some embodiments, there are multiple emergency stop switches, and all the emergency stop switches are electrically connected to the control device. The control device is configured to cut off the power of the first power supply circuit through the switching device after any one of the emergency stop switches is in the off state.

[0009] In some embodiments, the switching device includes: a circuit breaker disposed in the power distribution cabinet and electrically connected to the first power supply circuit. The circuit breaker has an under-voltage release coil, and the control device is electrically connected to the under-voltage release coil; the control device is configured to control the state of the under-voltage release coil according to the switch state of the emergency stop switch, and the installation position of the emergency stop switch is at least spaced apart from the installation position of the power distribution cabinet by a preset distance.

[0010] In some embodiments, the control device includes: a second power supply circuit for supplying power to the under-voltage release coil, and the emergency stop switch is used to control the on / off of the second power supply circuit to change the working state of the under-voltage release coil.

[0011] In some embodiments, the switching device further includes: a contactor connected in series with the circuit breaker, and the contactor is electrically connected to the control device; the control device is configured to control the contactor to the off state in the off state of the emergency stop switch, so that the first power supply circuit stops supplying power to the load.

[0012] In some embodiments, the control device includes: a second power supply circuit for supplying power to the under-voltage release coil, and the emergency stop switch is used to control the on / off of the second power supply circuit to change the working state of the under-voltage release coil; an emergency stop switch detection circuit for detecting the working state of the emergency stop switch; a detection unit for detecting at least one of the opening / closing state of the circuit breaker, the working state of the under-voltage release coil, and the working state of the emergency stop switch, and outputting a detection result; a controller, whose input terminals are electrically connected to the contactor, the emergency stop switch detection circuit, and the detection unit respectively, and the output terminal of the controller is electrically connected to the contactor control unit. The controller is configured to control the state of the output terminal of the controller according to the detection result of the emergency stop switch detection circuit and the detection result of the detection unit, so that the contactor switches between the on state and the off state.

[0013] In some embodiments, the detection unit includes: a first detection circuit for detecting the opening and closing state of the circuit breaker; a second detection circuit for detecting the operating state of the under-voltage release coil; a third detection circuit for detecting the operating state of the emergency stop switch; and a monitor electrically connected to the first detection circuit, the second detection circuit, the third detection circuit, and the controller respectively. The monitor is configured to send detection results to the controller according to the opening and closing state of the circuit breaker, the operating state of the under-voltage release coil, and the operating state of the emergency stop switch.

[0014] In some embodiments, the emergency stop switch includes: a first sub-switch electrically connected to the second power supply circuit to control the on / off of the second power supply circuit; a second sub-switch electrically connected to the emergency stop switch detection circuit to control the on / off of the emergency stop switch detection circuit. The controller determines the operating state of the emergency stop switch according to the on / off of the emergency stop switch detection circuit; a third sub-switch electrically connected to the third detection circuit to control the on / off of the third detection circuit. The monitor determines the operating state of the emergency stop switch according to the on / off of the third detection circuit. The switch states of the first sub-switch, the second sub-switch, and the third sub-switch are synchronized.

[0015] In some embodiments, both the emergency stop switch detection circuit and the second sub-switch are provided in plurality and are arranged in one-to-one correspondence.

[0016] In some embodiments, the control device further includes: a start-up circuit electrically connected to the controller; a start-up switch provided on the start-up circuit for controlling the on / off of the start-up circuit. The controller is further configured to control the operating state of the contactor according to the on / off of the start-up circuit.

[0017] In some embodiments, the detection unit further includes: a fourth detection circuit electrically connected to the monitor for detecting the operating state of the start-up switch; and the monitor is further configured to send a detection result to the controller according to the operating state of the start-up switch.

[0018] According to a second aspect of the present invention, there is also disclosed a control method for the above-mentioned equipment power supply system. The equipment power supply system further includes: a start-up switch and a start-up circuit. The start-up circuit is electrically connected to the controller. The start-up switch is provided on the start-up circuit for controlling the on / off of the start-up circuit. The control method includes the following steps:

[0019] Obtain the operating state of the emergency stop switch;

[0020] Obtain the operating state of the start-up switch;

[0021] Obtain the detection result of the detection unit;

[0022] Control the working state of the contactor according to the working state of the emergency stop switch, the working state of the start switch, and the detection result of the detection unit.

[0023] In some embodiments, the controlling the working state of the contactor according to the working state of the emergency stop switch, the working state of the start switch, and the detection result of the detection unit specifically includes the following steps:

[0024] When the emergency stop switch and the start switch are both in the closed state and the detection result of the detection unit is the first preset value, control the contactor to close;

[0025] Control the contactor to open under any of the following conditions: the emergency stop switch is in the open state, the start switch is in the open state, and the detection result of the detection unit is the first preset value.

[0026] In some embodiments, the detection process of the detection unit includes the following steps:

[0027] Obtain the opening and closing state of the circuit breaker;

[0028] Obtain the working state of the under-voltage release coil;

[0029] Obtain the working state of the emergency stop switch;

[0030] Obtain the working state of the start switch;

[0031] Output a detection result according to the opening and closing state of the circuit breaker, the working state of the under-voltage release coil, the working state of the emergency stop switch, and the working state of the start switch.

[0032] In some embodiments, the outputting a detection result according to the opening and closing state of the circuit breaker, the working state of the under-voltage release coil, the working state of the emergency stop switch, and the working state of the start switch specifically includes the following steps:

[0033] When the circuit breaker is in the closed state, the under-voltage release coil is in the non-tripped state, and the emergency stop switch and the start switch are both in the closed state, output the first preset value;

[0034] Output the second preset value under any of the following conditions: the circuit breaker is in the open state, the under-voltage release coil is in the tripped state, the emergency stop switch is in the open state, and the start switch is in the open state.

[0035] The equipment power supply system of the present invention can, by setting an emergency stop switch and a control device, control the working state of a switching device located in a power cabinet according to the switch state of the emergency stop switch located on the machine table through the control device, so as to control the on-off of a first power supply circuit through the switching device, thereby enabling the first power supply circuit to supply power to or cut off power from a load. The first power supply circuit is mainly used to supply power to a heating module of, for example, a diffusion furnace. When an abnormality occurs in the machine table and the entire machine needs to be powered off, there is no need for an operator to go to a remote power cabinet and perform a switching operation through a circuit breaker handle. As long as the emergency stop switch is pressed at the machine table, the power-off operation of the entire machine can be completed, which not only improves the timeliness of power cut-off after a fault, but also reduces the risk of electric shock and improves safety. BRIEF DESCRIPTION OF THE DRAWINGS

[0036] Figure 1 is a schematic diagram of a power supply principle in the related art;

[0037] Figure 2 is a schematic diagram of the equipment power supply system according to an embodiment of the present invention;

[0038] Figure 3 is an operating principle diagram of the equipment power supply system according to an embodiment of the present invention;

[0039] Figure 4 is a circuit schematic diagram of the equipment power supply system according to an embodiment of the present invention;

[0040] Figure 5 is a flowchart of a control method for the equipment power supply system according to an embodiment of the present invention; DETAILED DESCRIPTION OF THE EMBODIMENTS

[0041] To enable those skilled in the art to better understand the technical solutions of the present invention, the equipment power supply system and its control method provided by the present invention will be described in detail below with reference to the accompanying drawings.

[0042] As Figure 2 and Figure 3 shown, to solve the above technical problems, according to an embodiment of the present invention, an equipment power supply system is disclosed, including: a first power supply circuit 10, a switching device 30, a control device 40, and an emergency stop switch 50. The first power supply circuit 10 is used to supply power to a load 20; the switching device 30 is electrically connected to the first power supply circuit 10, and the switching device 30 is used to control the on-off of the first power supply circuit 10 and the load 20; the control device 40 is electrically connected to the switching device 30; the emergency stop switch 50 is electrically connected to the control device 40, and the control device 40 is used to control the working state of the switching device 30 according to the switch state of the emergency stop switch 50, so as to supply power to or cut off power from the load 20 through the first power supply circuit 10.

[0043] In this embodiment, by providing an emergency stop switch 50 and a control device 40, the control device 40 can control the operating state of the switching device 30 located in the power cabinet according to the switch state of the emergency stop switch 50 located on the machine platform, so as to control the on / off of the first power supply circuit 10 through the switching device 30, thereby enabling the first power supply circuit 10 to supply power to or cut off power from the load 20. In this embodiment, the first power supply circuit 10 is mainly used to supply power to, for example, the heating module of a diffusion furnace. When an abnormality occurs in the machine platform and a complete power-off of the whole machine is required, there is no need for the staff to go to the remote power cabinet and perform a switch-off operation through the handle of the circuit breaker 31. As long as the emergency stop switch 50 is pressed at the machine platform, the power-off operation of the whole machine can be completed, which not only improves the timeliness of power cut-off after a fault, but also reduces the risk of electric shock and improves safety.

[0044] It should be noted that, in this embodiment, the control device 40 is also used to detect whether the equipment power supply system meets the power supply (power-on) conditions. The control device 40 controls the power supply of the equipment power supply system according to the detection result, and the control device 40 can control the power supply system to resume power supply according to the detected result. It can be understood that after the power supply system is powered off, the staff will check each module at the equipment end. After discovering and resolving the equipment fault, before resuming power-on, it is necessary to confirm whether each device in the power supply system, especially the switching device 30 and the emergency stop switch 50, meets the power supply conditions. For example, by detecting the emergency stop switch 50 to check whether there is any adhesion or other situations that affect the operation, so as to ensure that when an abnormality occurs again in the machine platform after power-on, the power-off operation can be completed in a timely and safe manner.

[0045] It should be noted that, such as Figure 3 and Figure 4As shown, the control device 40 further includes: an emergency stop switch detection circuit 42, which is used to detect the operating state of the emergency stop switch 50; the control device 40 controls the first power supply circuit 10 to supply power to or cut off power from the load 20 according to the detection result of the operating state of the emergency stop switch 50. For example, after detecting that the emergency stop switch 50 is in the off state, the control device 40 controls the first power supply circuit 10 to cut off power. In particular, the state of the contacts of the emergency stop switch 50 is detected to eliminate the abnormal state of the machine due to contact adhesion, and the detection result is output when there is no abnormal state, ensuring the safety of power-on and the smooth implementation of subsequent power-off operations. It should be noted that the emergency stop switch detection circuit 42 is a redundantly designed detection circuit, and the reliability of the detection result is ensured through redundant detection. It should be noted that in this embodiment, there are multiple emergency stop switches 50, and all the emergency stop switches 50 are electrically connected to the control device 40. The control device 40 is used to control the first power supply circuit 10 to cut off power through the switching device 30 after any one of the emergency stop switches 50 is in the off state. For example, multiple emergency stop switches 50 are connected in series. Since multiple emergency stop switches 50 are connected in series, when an abnormality occurs in any proximal machine and the entire machine needs to be powered off, as long as the nearest one of the emergency stop switches 50 is pressed, the first power supply circuit 10 can be cut off from power supply; it can be understood that the setting of multiple emergency stop switches 50 enables the first power supply circuit 10 to be cut off from power supply through other emergency stop switches 50 even if one or two emergency stop switches 50 fail (such as adhesion), thereby realizing the reliability of the emergency power-off of the first power supply circuit 10.

[0046] However, this is not restrictive. In some other embodiments not shown in the figure, multiple emergency stop switches 50 can also be connected and arranged in other ways, and the control device 40 is used to complete the power-off operation of the entire machine by controlling a certain emergency stop switch 50 on the machine side.

[0047] Exemplarily, the switching device 30 includes: a circuit breaker 31. The circuit breaker 31 is arranged in the power distribution cabinet and is electrically connected to the first power supply circuit 10. The circuit breaker 31 has an under-voltage release coil 311, and the control device 40 is electrically connected to the under-voltage release coil 311; the control device 40 is used to control the state of the under-voltage release coil 311 according to the on / off state of the emergency stop switch 50, and the installation position of the emergency stop switch 50 is at least a preset distance away from the installation position of the power distribution cabinet.

[0048] In this embodiment, the first power supply circuit 10 is a 380V power supply line. When an abnormality occurs in the machine and the entire machine needs to be powered off, by pressing the emergency stop switch 50, the control device 40 can control the under-voltage release coil 311 to cut off the power, so that the under-voltage release coil 311 switches to the tripping state, thereby making the circuit breaker 31 in the open state, and the first power supply circuit 10 stops supplying power to the load 20. Since the installation position of the emergency stop switch 50 is at least a preset distance away from the installation position of the power distribution cabinet, the distance between the emergency stop switch 50 and the power distribution cabinet is relatively far. When operating, there is no need to approach the power distribution cabinet. Even if the circuit breaker 31 generates electric arcs, electric shocks, etc. during opening, since the personnel operate through the emergency stop switch 50, the timeliness of power cut-off after a fault is effectively improved, the risk of electric shock is reduced, and the safety is improved.

[0049] Exemplarily, the number of stop buttons can be set according to actual conditions. For example, it can be set within 3 meters of the machine to be far away from the power distribution cabinet for the convenience of personnel operation.

[0050] In an embodiment of the present invention, the control device 40 includes: a second power supply circuit 41 for supplying power to the under-voltage release coil 311, and the emergency stop switch 50 is used to control the on / off of the second power supply circuit 41 to change the working state of the under-voltage release coil 311.

[0051] The equipment power supply system further includes: a first DC power supply 60 connected to a 220V power supply line for converting 220V alternating current into direct current. The second power supply circuit 41 is electrically connected between the first DC power supply 60 and the under-voltage release coil 311, thereby realizing power supply to the under-voltage release coil 311. The emergency stop switch 50 is arranged on the second power supply circuit 41 and electrically connected to the second power supply circuit 41 to control the on / off of the second power supply circuit 41; when the emergency stop switch 50 is not pressed, the emergency stop switch 50 is in the closed state. Therefore, the second power supply circuit 41 is in the conducting state, so that the second power supply circuit 41 supplies power to the under-voltage release coil 311, and further makes the circuit breaker 31 maintain the closed state. When the emergency stop switch 50 is pressed, the emergency stop switch 50 is in the open state. Therefore, the second power supply circuit 41 is disconnected, the under-voltage release coil 311 is powered off, and the circuit breaker 31 switches to the open state, so that the first power supply circuit 10 stops supplying power to the load.

[0052] In some other embodiments, the switch device 30 further includes: a contactor 32 connected in series with the circuit breaker 31, and the contactor 32 is electrically connected to the control device 40; the control device 40 is used to control the contactor 32 to be in the open state under the open state of the emergency stop switch 50, so that the first power supply circuit 10 stops supplying power to the load 20.

[0053] Those skilled in the art can understand that the working principle of the contactor 32 is that when the electromagnetic coil in the contactor 32 is energized, the electromagnetic coil will generate a magnetic field. The generated magnetic field causes the static iron core to generate electromagnetic suction to attract the moving iron core and drive the contacts of the AC contactor 32 to act, thereby conducting the electrical circuit. When the coil is de-energized, the electromagnetic suction disappears, and the iron core is released under the action of the release spring, causing the contacts to return to their original state, thereby disconnecting the electrical circuit.

[0054] In the embodiment of the present invention, the power supply to the electromagnetic coil of the contactor 32 is not the first power supply circuit 10, but another power supply line controlled by the control device 40. When the emergency stop switch 50 is pressed, the emergency stop switch 50 is in an open state. At this time, the control device 40 will control the electromagnetic coil of the contactor 32 to be de-energized, so that the contactor 32 is in the open state, thereby causing the first power supply circuit 10 to stop supplying power to the load 20. In other words, in the embodiment of the present invention, by setting the contactor 32 and connecting the contactor 32 in series with the circuit breaker 31, both the contactor 32 and the circuit breaker 31 can control the on and off of the first power supply circuit 10. When an abnormality occurs in the machine tool and the whole machine needs to be powered off, by pressing the emergency stop switch 50, the control device 40 controls the under-voltage release coil 311 to be de-energized, so that the under-voltage release coil 311 switches to the tripping state, thereby causing the circuit breaker 31 to be in the open state, and the first power supply circuit 10 stops supplying power to the load 20. At the same time, the control device ④ also controls the contactor 32 to switch to the open state. Even if one of them fails, the first power supply circuit 10 can be disconnected by the other, thereby ensuring that the first power supply circuit 10 can stop supplying power in time and improving safety and reliability.

[0055] In Figure 3 In the shown embodiment, the control device 40 includes: a second power supply circuit 41, an emergency stop switch detection circuit 42, a detection unit 43, a third power supply circuit ( Figure 4(not shown in the figure), contactor control unit 44, and controller 45. The second power supply circuit 41 is used to supply power to the under-voltage release coil 311. The emergency stop switch 50 is used to control the on / off of the second power supply circuit 41 to change the working state of the under-voltage release coil 311. The emergency stop switch detection circuit 42 is used to detect the working state of the emergency stop switch 50. The detection unit 43 is used to detect the opening / closing state of the circuit breaker 31, the working state of the under-voltage release coil 311, and the working state of the emergency stop switch 50, and outputs a detection result according to the opening / closing state of the circuit breaker 31, the working state of the under-voltage release coil 311, and the working state of the emergency stop switch 50. The third power supply circuit is used to supply power to the electromagnetic coil of the contactor 32. The contactor control unit 44 is electrically connected to the third power supply circuit and the contactor 32, and is used to control the opening / closing state of the contactor 32. The input end of the controller 45 is electrically connected to the contactor 32, the emergency stop switch detection circuit 42, and the detection unit 43 respectively. The output end of the controller 45 is electrically connected to the contactor control unit 44. The controller 45 is used to control the state of the output end of the controller 45 according to the detection result of the emergency stop switch detection circuit 42 and the detection result of the detection unit 43, so that the contactor 32 switches between the closed state and the open state.

[0056] It should be noted that in this embodiment, the detection unit 43 is used to detect the opening / closing state of the circuit breaker 31, the working state of the under-voltage release coil 311, and the working state of the emergency stop switch 50 respectively, but this is not restrictive. In some other embodiments, the detection unit 43 can also be used to detect at least one of the opening / closing state of the circuit breaker 31, the working state of the under-voltage release coil 311, and the working state of the emergency stop switch 50, and output a detection result, which is not limited in the present invention.

[0057] In the embodiment as Figure 4 shown, the equipment power supply system further includes: a first DC power supply 60. The first DC power supply 60 is connected to the 220v power supply line and is used to convert 220v alternating current into direct current. The second power supply circuit 41 is electrically connected between the first DC power supply 60 and the under-voltage release coil 311, so as to supply power to the under-voltage release coil 311. The emergency stop switch 50 includes: a first sub-switch 51. The first sub-switch 51 is arranged on the second power supply circuit 41 and is electrically connected to the second power supply circuit 41 to control the on / off of the second power supply circuit 41. When the emergency stop switch 50 is not pressed, the first sub-switch 51 is in the conducting state, so that the second power supply circuit 41 supplies power to the under-voltage release coil 311, and further keeps the circuit breaker 31 in the closed state. When the emergency stop switch 50 is pressed, the first sub-switch 51 disconnects, and the first power supply circuit 10 also disconnects accordingly, so that the under-voltage release coil 311 is powered off, and the circuit breaker 31 switches to the open state.

[0058] In the embodiment as Figure 4In the illustrated embodiment, the device power supply system further includes: a second DC power supply 70 and a UPS 80. Among them, the UPS 80 is an uninterruptible power supply, and the second DC power supply 70 is used to convert 220V AC power into DC power. The input end of the UPS 80 is electrically connected to the 220V power supply line, the output end of the UPS 80 is connected to the second DC power supply 70, the controller 45 is electrically connected to the second DC power supply 70, and the output end of the controller 45 and the contactor control unit 44 are connected in series between the third power supply circuit and the electromagnetic coil of the contactor 32.

[0059] It should be noted that the third power supply circuit is used to supply power to the electromagnetic coil of the contactor 32, and the contactor control unit 44 is used to control the conduction and disconnection between the third power supply circuit and the electromagnetic coil of the contactor 32, so as to control the contactor 32 to switch between the closed state and the open state. When the contactor control unit 44 controls the conduction between the third power supply circuit and the electromagnetic coil of the contactor 32, the contactor 32 is in the closed state, so that the first power supply circuit 10 supplies power to the load 20 when the circuit breaker 31 is in the closed state; when the contactor control unit 44 controls the disconnection between the third power supply circuit and the electromagnetic coil of the contactor 32, the contactor 32 is in the open state, so that the first power supply circuit 10 stops supplying power to the load 20. And because the output end of the controller 45 is connected in series with the contactor control unit 44, therefore, only when the output end of the controller 45 and the contactor control unit 44 are both conducting, can the third power supply circuit supply power to the electromagnetic coil of the contactor 32; however, when the output end of the controller 45 is disconnected, even if the contactor control unit 44 is conducting, the third power supply circuit will stop supplying power to the electromagnetic coil of the contactor 32, so that the contactor 32 enters the open state. In other words, the controller 45 can control the contactor 32 to enter the open state.

[0060] Therefore, during use, the detection unit 43 can detect the opening and closing state of the circuit breaker 31, the working state of the under-voltage release coil 311, and the working state of the emergency stop switch 50, and output detection results according to the opening and closing state of the circuit breaker 31, the working state of the under-voltage release coil 311, and the working state of the emergency stop switch 50, so that when the emergency stop switch 50 is pressed, the controller 45 can control the contactor 32 to synchronously enter the open state through the controller 45, so as to ensure that the first power supply circuit 10 can stop supplying power in time, improving safety and reliability.

[0061] In this embodiment, by setting up the detection unit 43, the opening and closing state of the circuit breaker 31 and the working state of the under-voltage release coil 311 can be detected, and the detection results are output according to the opening and closing state of the circuit breaker 31 and the working state of the under-voltage release coil 311. When the working state of any one of the circuit breaker 31, the under-voltage release coil 311, and the emergency stop switch 50 is abnormal, the detection results can be fed back to the controller 45, causing the controller 45 to control the contactor 32 to enter the tripping state. When the working states of the circuit breaker 31, the under-voltage release coil 311, and the emergency stop switch 50 are all normal, the output terminal of the controller 45 can be controlled to be closed, so that the contactor 32 can be controlled to enter the closing state through the contactor control unit 44.

[0062] As Figure 4 shown, the controller 45 not only needs to judge whether the contactor 32 needs to be disconnected according to the detection results of the detection unit 43. The controller 45 can detect the working state of the emergency stop switch 50 through the emergency stop switch detection circuit 42. Therefore, after the emergency stop switch 50 is pressed, even if the detection unit 43 is abnormal and fails to detect that the emergency stop switch 50 is pressed, the controller 45 can still detect that the emergency stop switch 50 is pressed through the emergency stop switch detection circuit 42, so as to control the contactor 32 to disconnect, ensuring that the first power supply circuit 10 can stop power supply in time and improving safety and reliability.

[0063] As Figure 3 and Figure 4 shown, the detection unit 43 includes: a first detection circuit 431, a second detection circuit 432, a third detection circuit 433, and a monitor 434. The first detection circuit 431 is used to detect the opening and closing state of the circuit breaker 31; the second detection circuit 432 is used to detect the working state of the under-voltage release coil 311; the third detection circuit 433 is used to detect the working state of the emergency stop switch 50; the monitor 434 is electrically connected to the first detection circuit 431, the second detection circuit 432, the third detection circuit 433, and the controller 45 respectively. The monitor 434 is used to send the detection results to the controller 45 according to the opening and closing state of the circuit breaker 31, the working state of the under-voltage release coil 311, and the working state of the emergency stop switch 50.

[0064] The emergency stop switch 50 further includes: a second sub-switch 52 and a third sub-switch 53. The second sub-switch 52 is electrically connected to the emergency stop switch detection circuit 42 to control the on-off of the emergency stop switch detection circuit 42. The controller 45 judges the working state of the emergency stop switch 50 according to the on-off of the emergency stop switch detection circuit 42. The third sub-switch 53 is electrically connected to the third detection circuit 433 to control the on-off of the third detection circuit 433. The monitor 434 judges the working state of the emergency stop switch 50 according to the on-off of the third detection circuit 433. The switch states of the first sub-switch 51, the second sub-switch 52, and the third sub-switch 53 are synchronized.

[0065] It should be noted that, in order to ensure reliability, both the emergency stop switch detection circuit 42 and the second sub-switch 52 are provided in multiple numbers and are set in one-to-one correspondence. In this embodiment, there are two emergency stop switch detection circuits 42, and each of the second sub-switches 52 is also two. The states of the two second sub-switches 52 are synchronized with each other, so that when the emergency stop switch 50 is pressed, the two second sub-switches 52 can synchronously disconnect their respective corresponding emergency stop switch detection circuits 42.

[0066] The control device 40 further includes: a display. The display is electrically connected to the detection unit 43, and the display is used to output the opening and closing state of the circuit breaker 31, the working state of the under-voltage release coil 311, and the working state of the emergency stop switch 50. By providing the display and the display is electrically connected to the monitor 434 of the detection unit 43, the monitor 434 can output the opening and closing state of the circuit breaker 31, the working state of the under-voltage release coil 311, and the working state of the emergency stop switch 50 to the display, so that the display can output the opening and closing state of the circuit breaker 31, the working state of the under-voltage release coil 311, and the working state of the emergency stop switch 50, which is convenient for the staff to monitor the opening and closing state of the circuit breaker 31, the working state of the under-voltage release coil 311, and the working state of the emergency stop switch 50 at all times, and when the system is abnormal, it is convenient to check the abnormal position.

[0067] In the embodiment as Figure 3 and Figure 4 shown, the control device 40 further includes: a starting circuit 46 and a starting switch 47. The starting circuit 46 is electrically connected to the controller 45; the starting switch 47 is arranged on the starting circuit 46 and is used to control the on-off of the starting circuit 46, and the controller 45 is further used to control the working state of the contactor 32 according to the on-off of the starting circuit 46. When the system is abnormal and checked, or when the system is ready to start, the starting switch 47 can be pressed. After the starting switch 47 is pressed, the starting circuit 46 is closed. If the detection results sent to the controller 45 for the opening and closing state of the circuit breaker 31, the working state of the under-voltage release coil 311, and the working state of the emergency stop switch 50 are all normal, the output end of the controller 45 will be closed, so that the contactor control unit 44 can control the contactor 32 to enter the closing state, so that the first power supply circuit 10 supplies power to the load 20. If any one of the components is in an abnormal operating state, the output end of the controller 45 will still be disconnected. Therefore, the contactor 32 will not be in the closing state to ensure safety.

[0068] In some embodiments, the detection unit 43 further includes: a fourth detection circuit 435, which is electrically connected to the monitor 434 and is used to detect the working state of the starting switch 47; the monitor 434 is further used to send the detection result to the controller 45 according to the working state of the starting switch 47.

[0069] It should be noted that, in this embodiment, asFigure 4 As shown in the figure, the monitor 434 includes a processor and an IO module. The processor is communicatively connected to the IO module, and the processor is electrically connected to the first detection circuit 431, the second detection circuit 432, the third detection circuit 433, the fourth detection circuit 435, and the controller 45 through the IO module. Among them, the first DC power supply 60 is also used to supply power to the processor, and the second DC power supply 70 is used to supply power to the IO module.

[0070] Exemplarily, as Figure 4 shown, the second DC power supply 70 is also used to supply power to the first detection circuit 431 and the second detection circuit 432 respectively to provide a high-level signal. When the circuit breaker 31 is in the closed state, the first detection circuit 431 is turned on, and the interface in the IO module connected to the first detection circuit 431 receives a high-level signal; when the circuit breaker 31 is in the open state, the first detection circuit 431 is disconnected, and the interface in the IO module connected to the first detection circuit 431 receives a low-level signal. Thus, the processor can judge the opening and closing state of the circuit breaker 31 according to the high and low level signals provided by the first detection circuit 431.

[0071] Similarly, when the under-voltage release coil 311 is in the non-release state, the first detection circuit 431 is turned on, and the interface in the IO module connected to the second detection circuit 432 receives a high-level signal; when the under-voltage release coil 311 is in the release state, the second detection circuit 432 is disconnected, and the interface in the IO module connected to the second detection circuit 432 receives a low-level signal. Thus, the processor can judge the state of the under-voltage release coil 311 according to the high and low level signals provided by the second detection circuit 432.

[0072] Next, in combination with the above device power supply system, the specific control method will be further described. As Figure 5 shown, the control method includes the following steps:

[0073] S110: Obtain the working state of the emergency stop switch 50;

[0074] S120: Obtain the working state of the start switch 47;

[0075] S130: Obtain the detection result of the detection unit 43;

[0076] S140: Control the working state of the contactor 32 according to the working state of the emergency stop switch 50, the working state of the start switch 47, and the detection result of the detection unit 43.

[0077] The control method of the device power supply system of the present invention controls the working state of the contactor 32 based on the working state of the emergency stop switch 50, the working state of the start switch 47, and the detection result of the detection unit 43. Only when the working state of the emergency stop switch 50, the working state of the start switch 47, and the detection result of the detection unit 43 are all normal, the contactor 32 will be in the conducting state. When any one of the working state of the emergency stop switch 50, the working state of the start switch 47, and the detection result of the detection unit 43 is abnormal, the contactor 32 will be controlled to disconnect, so that the first power supply circuit 10 is disconnected, thus ensuring the safety and reliability of the power supply.

[0078] Specifically, step S140 includes the following steps:

[0079] S141: When both the emergency stop switch 50 and the start switch 47 are in the closed state and the detection result of the detection unit 43 is the first preset value, control the contactor 32 to close. When starting the power supply system, the start switch 47 needs to be pressed or the start switch 47 is in the closed state during the process of the first power supply circuit 10 supplying power to the load 20. If there is no abnormality in the machine and the emergency stop switch 50 is not pressed, therefore, the emergency stop switch 50 is in the closed state, and the detection result is the first preset value, indicating that each component is operating normally. Therefore, the contactor 32 can be controlled to close, so as to supply power to the load 20.

[0080] S142: Control the contactor 32 to disconnect under any of the following conditions: the emergency stop switch 50 is in the open state, the start switch 47 is in the open state, and the detection result of the detection unit 43 is the first preset value. During the process of the first power supply circuit 10 supplying power to the load 20, if the emergency stop switch 50 is in the open state, it means that the emergency stop switch 50 is pressed and the machine has an abnormality. Therefore, it is necessary to disconnect the contactor 32 to stop the power supply of the first power supply circuit 10. When the first power supply circuit 10 is disconnected, if the start switch 47 is in the open state, it means that there is no need to start the first power supply circuit 10 at this time. Therefore, the first power supply circuit 10 can remain disconnected.

[0081] The detection process of the detection unit 43 includes the following steps:

[0082] S210: Obtain the opening and closing state of the circuit breaker 31;

[0083] S220: Obtain the working state of the under-voltage release coil 311;

[0084] S230: Obtain the working state of the emergency stop switch 50;

[0085] S240: Obtain the working state of the start switch 47;

[0086] S250: Output a detection result according to the opening / closing state of the circuit breaker 31, the operating state of the under-voltage release coil 311, the operating state of the emergency stop switch 50, and the operating state of the start switch 47.

[0087] Among them, step S250 includes the following steps:

[0088] S251: When the circuit breaker 31 is in the closed state, the under-voltage release coil 311 is in the non-tripped state, and both the emergency stop switch 50 and the start switch 47 are in the closed state, output a first preset value. The circuit breaker 31 being in the closed state and the under-voltage release coil 311 being in the non-tripped state indicate that the circuit breaker 31 is in normal operation, and both the emergency stop switch 50 and the start switch 47 being in the closed state indicate that the machine is working normally. Therefore, each component is operating normally, and the monitor 434 outputs a first preset value to indicate that the components are operating normally.

[0089] S252: Output a second preset value under any of the following conditions: the circuit breaker 31 is in the open state, the under-voltage release coil 311 is in the tripped state, the emergency stop switch 50 is in the open state, or the start switch 47 is in the open state. When the circuit breaker 31 is in the open state, the first power supply circuit 10 is in a power-off state at this time; when the under-voltage release coil 311 is in the tripped state, it indicates that the state of the circuit breaker 31 is abnormal; when the emergency stop switch 50 is in the open state, it indicates that the machine is operating abnormally; when the start switch 47 is in the open state, it indicates that the start switch 47 is abnormal or the system does not need to be started. Therefore, when any of the above situations occurs, it is necessary to control the contactor 32 to disconnect to ensure the safety of power supply.

[0090] It can be understood that the above embodiments are merely exemplary embodiments adopted to illustrate the principle of the present invention. However, the present invention is not limited thereto. For those of ordinary skill in the art, various modifications and improvements can be made without departing from the spirit and essence of the present invention, and these modifications and improvements are also regarded as the protection scope of the present invention.

Claims

1. A device power supply system, characterized in that, Comprising: A first power supply circuit (10) for supplying power to a load (20); A switching device (30) located in a power supply cabinet and electrically connected to the first power supply circuit (10), the switching device (30) being used to control the connection and disconnection between the first power supply circuit (10) and the load (20); A control device (40) electrically connected to the switching device (30); An emergency stop switch (50) located on a machine tool and electrically connected to the control device (40), the control device (40) being used to control the working state of the switching device (30) according to the switch state of the emergency stop switch (50), so that the first power supply circuit (10) supplies power to or cuts off power from the load (20).

2. The equipment power supply system according to claim 1, wherein: The control device (40) is further used to detect whether the equipment power supply system meets the power supply conditions, and the control device (40) controls the power supply of the equipment power supply system according to the detection result.

3. The device power supply system according to claim 2, characterized in that, The control device (40) further includes: An emergency stop switch detection circuit (42) for detecting the working state of the emergency stop switch (50); the control device (40) controls the first power supply circuit (10) to supply power to or cut off power from the load (20) according to the detection result of detecting the working state of the emergency stop switch (50).

4. The equipment power supply system according to claim 3, wherein: There are multiple emergency stop switches (50), and all the emergency stop switches (50) are electrically connected to the control device (40), and the control device (40) is used to control the first power supply circuit (10) to cut off power through the switching device (30) after any one of the emergency stop switches (50) is in the off state.

5. The device power supply system according to any one of claims 1 to 4, characterized in that, The switching device (30) includes: A circuit breaker (31) arranged in a power distribution cabinet and electrically connected to the first power supply circuit (10), the circuit breaker (31) having an under-voltage release coil (311), and the control device (40) is electrically connected to the under-voltage release coil (311); The control device (40) is used to control the state of the under-voltage release coil (311) according to the switch state of the emergency stop switch (50), and the installation position of the emergency stop switch (50) is at least a preset distance away from the installation position of the power distribution cabinet.

6. The device power supply system according to claim 5, characterized in that The control device (40) includes: A second power supply circuit (41) for supplying power to the under-voltage release coil (311), and the emergency stop switch (50) is used to control the connection and disconnection of the second power supply circuit (41) to change the working state of the under-voltage release coil (311).

7. The device power supply system according to claim 5, characterized in that, The switching device (30) further includes: A contactor (32) connected in series with the circuit breaker (31), and the contactor (32) is electrically connected to the control device (40); The control device (40) is used to control the contactor (32) to the off state in the off state of the emergency stop switch (50), so that the first power supply circuit (10) stops supplying power to the load (20).

8. The device power supply system according to claim 7, characterized in that, The control device (40) includes: A second power supply circuit (41) for supplying power to the under-voltage release coil (311), and an emergency stop switch (50) for controlling the on / off of the second power supply circuit (41) to change the operating state of the under-voltage release coil (311); An emergency stop switch detection circuit (42) for detecting the operating state of the emergency stop switch (50); A detection unit (43) for detecting at least one of the opening / closing state of the circuit breaker (31), the operating state of the under-voltage release coil (311), and the operating state of the emergency stop switch (50), and outputting a detection result; A third power supply circuit for supplying power to the electromagnetic coil of the contactor (32); A contactor control unit (44) electrically connected to the third power supply circuit and the contactor (32) for controlling the opening / closing state of the contactor (32); A controller (45) whose input terminals are electrically connected to the contactor (32), the emergency stop switch detection circuit (42), and the detection unit (43) respectively, and the output terminal of the controller (45) is electrically connected to the contactor control unit (44). The controller (45) is used to control the state of the output terminal of the controller (45) according to the detection result of the emergency stop switch detection circuit (42) and the detection result of the detection unit (43), so that the contactor (32) switches between the closed state and the open state.

9. The device power supply system according to claim 8, wherein, The detection unit (43) includes: A first detection circuit (431) for detecting the opening / closing state of the circuit breaker (31); A second detection circuit (432) for detecting the operating state of the under-voltage release coil (311); A third detection circuit (433) for detecting the operating state of the emergency stop switch (50); A monitor (434) electrically connected to the first detection circuit (431), the second detection circuit (432), the third detection circuit (433), and the controller (45) respectively. The monitor (434) is used to send the detection result to the controller (45) according to the opening / closing state of the circuit breaker (31), the operating state of the under-voltage release coil (311), and the operating state of the emergency stop switch (50).

10. The device power supply system according to claim 9, characterized in that, The emergency stop switch (50) includes: A first sub-switch (51) electrically connected to the second power supply circuit (41) to control the on / off of the second power supply circuit (41); A second sub-switch (52) electrically connected to the emergency stop switch detection circuit (42) to control the on / off of the emergency stop switch detection circuit (42). The controller (45) judges the operating state of the emergency stop switch (50) according to the on / off of the emergency stop switch detection circuit (42). The third sub-switch (53) is electrically connected to the third detection circuit (433) to control the on / off of the third detection circuit (433). The monitor (434) determines the working state of the emergency stop switch (50) according to the on / off of the third detection circuit (433). The switch states of the first sub-switch (51), the second sub-switch (52), and the third sub-switch (53) are synchronized.

11. The device power supply system according to claim 10, wherein Both the emergency stop switch detection circuit (42) and the second sub-switch (52) are multiple and are arranged in one-to-one correspondence.

12. The device power supply system according to any one of claims 9 to 11, characterized in that, The control device (40) further includes: A start-up circuit (46) electrically connected to the controller (45); A start switch (47) is provided on the start-up circuit (46) for controlling the on / off of the start-up circuit (46). The controller (45) is further configured to control the working state of the contactor (32) according to the on / off of the start-up circuit (46).

13. The device power supply system according to claim 12, characterized in that, The detection unit (43) further includes: A fourth detection circuit (435) electrically connected to the monitor (434) for detecting the working state of the start switch (47); The monitor (434) is further configured to send a detection result to the controller (45) according to the working state of the start switch (47).

14. A control method for an equipment power supply system according to any one of claims 8 to 13, the equipment power supply system further comprising: A start switch (47) and a start-up circuit (46), the start-up circuit (46) is electrically connected to the controller (45), the start switch (47) is provided on the start-up circuit (46) for controlling the on / off of the start-up circuit (46), wherein the control method includes the following steps: Obtain the working state of the emergency stop switch (50); Obtain the working state of the start switch (47); Obtain the detection result of the detection unit (43); Control the working state of the contactor (32) according to the working state of the emergency stop switch (50), the working state of the start switch (47), and the detection result of the detection unit (43).

15. The control method according to claim 14, wherein The step of controlling the working state of the contactor (32) according to the working state of the emergency stop switch (50), the working state of the start switch (47), and the detection result of the detection unit (43) specifically includes the following steps: When both the emergency stop switch (50) and the start switch (47) are in the closed state and the detection result of the detection unit (43) is a first preset value, control the contactor (32) to close; When any of the following conditions is met, control the contactor (32) to open: the emergency stop switch (50) is in the open state, the start switch (47) is in the open state, and the detection result of the detection unit (43) is a first preset value.

16. The control method according to claim 15, characterized in that, The detection process of the detection unit (43) includes the following steps: Obtain the opening / closing state of the circuit breaker (31); Obtain the working state of the under-voltage release coil (311); Obtain the working state of the emergency stop switch (50); Obtain the working state of the start switch (47); Output a detection result according to the opening / closing state of the circuit breaker (31), the operating state of the under-voltage release coil (311), the operating state of the emergency stop switch (50), and the operating state of the start switch (47).

17. The control method according to claim 16, characterized in that Outputting the detection result according to the opening / closing state of the circuit breaker (31), the operating state of the under-voltage release coil (311), the operating state of the emergency stop switch (50), and the operating state of the start switch (47) specifically includes the following steps: When the circuit breaker (31) is in the closed state, the under-voltage release coil (311) is in the non-tripped state, and both the emergency stop switch (50) and the start switch (47) are in the closed state, output a first preset value; Output a second preset value under any of the following conditions: the circuit breaker (31) is in the open state, the under-voltage release coil (311) is in the tripped state, the emergency stop switch (50) is in the off state, and the start switch (47) is in the off state.

Images