A gas deposition furnace and production system for preparing lithium sulfide

Abstract

The application discloses a vapor deposition furnace for preparing lithium sulfide and a production system, and relates to the field of vapor deposition furnaces.The vapor deposition furnace comprises a furnace cover rotatably arranged on the vapor deposition furnace, a base movably arranged in the vapor deposition furnace, a placing table arranged on the base, and a dust collector connected to one side of the vapor deposition furnace; the system further comprises a transfer sealing device and a follow-up cleaning device.It is to be noted that when the furnace cover is closed, two sealing protection boxes are automatically closed to ensure the sealing property of the placing table and achieve the purpose of dynamic sealing, thereby ensuring the sealing property of the placing table during transfer and further ensuring the production quality of the vapor deposition furnace.In addition, when the sealing protection boxes are slidably opened, the two redundant sealing doors are moved towards each other, and a plurality of aligned insertion blocks are inserted into a plurality of aligned insertion slots, so that the two redundant sealing doors are aligned, the auxiliary sealing of the vapor deposition furnace is realized, the sealing effect is ensured, and the product quality is further ensured.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of vapor deposition furnace, in particular to a vapor deposition furnace for lithium sulfide preparation and a production system. BACKGROUND

[0002] As a key raw material for synthesizing solid sulfide electrolyte or as an electrode material for lithium-sulfur battery, the production technology development and commercial application of lithium sulfide have been increasingly concerned and valued.

[0003] In the preparation of lithium sulfide, the direct reaction of lithium (Li) and sulfur (S) to synthesize lithium sulfide has certain industrial application prospects; further, the direct use of sulfur vapor and lithium vapor gas combustion reaction to prepare lithium sulfide becomes the most promising way for industrial application. For example, a method for producing lithium sulfide powder by vapor direct combination is disclosed in Chinese patent CN117720071A; that is, a method for synthesizing lithium sulfide by gas-gas combustion reaction is disclosed. The method forms lithium vapor and sulfur vapor by sequentially heating metal lithium and sulfur or sulfur-containing substances in a lithium melting tank and a sulfur melting tank, respectively; then the lithium vapor and sulfur vapor are introduced into the synthesis pipe in the lithium sulfide synthesis system through the respective delivery pipes to directly combine to form lithium sulfide powder and unreacted sulfur vapor or lithium vapor; the above lithium sulfide powder, unreacted sulfur vapor or lithium vapor is blown into the first and second dust collectors by the circulating fan in the lithium sulfide synthesis system, and the double-dust-collection-treated lithium sulfide powder and the secondary dust collection tail gas are obtained after treatment by the first and second dust collectors, and the double-dust-collection-treated lithium sulfide powder is further subjected to vacuum heating treatment to remove residual trace elemental sulfur, thereby obtaining the final product lithium sulfide powder.

[0004] In the above reaction, the reaction of sulfur vapor and lithium vapor to synthesize lithium sulfide powder occurs in the synthesis pipe, and the reaction process control precision is low, the uniformity of the product particles is poor, and the subsequent separation pressure is large, which has certain influence on the quality of the prepared product. Therefore, the use of a vapor deposition furnace to realize the deposition of sulfur vapor and lithium vapor on the substrate in the furnace is one of the effective means to replace the synthesis pipe to realize the preparation of lithium sulfide solid powder.

[0005] It should be noted that the core principle of the vapor deposition method is to introduce gaseous precursors into a controlled reaction environment, and through the action of heating, plasma or other energy sources, chemical reactions or physical deposition occur in the substrate or specific area, thereby forming the required solid thin film or powder material. However, the traditional vapor deposition furnace only relies on single-layer furnace door sealing, while the lithium sulfide preparation requires a sealing level far beyond the ordinary process, thus causing the substrate to be exposed to air during loading / unloading and the quality of the raw materials on the substrate to be damaged, and the trace leakage caused by the aging of the furnace door sealing after long-term use also affects the production quality of lithium sulfide. SUMMARY

[0006] The present application aims to provide a lithium sulfide preparation gas deposition furnace and production system to solve the problems raised in the background.

[0007] To achieve the above object, the present application provides the following technical solutions:

[0008] A lithium sulfide preparation gas deposition furnace, comprising a gas deposition furnace, a furnace cover is rotatably installed on the gas deposition furnace, and a pedestal is movably installed in the gas deposition furnace, a placement table is installed on the pedestal, and a dust collector is connected to one side of the gas deposition furnace;

[0009] It also comprises a transfer closing device, which is installed on the pedestal and is used to rotate and close the placement table; the transfer closing device comprises two closed protection boxes, both of which are slidably installed on the pedestal, two opening and closing carriages are rotatably installed on one side of the pedestal, both of which are movably installed on the two closed protection boxes, an adapter slide rod is movably installed on the pedestal, and the adapter slide rod is in transmission connection with the two opening and closing carriages; the furnace cover is closed to press the adapter slide rod and drive the two opening and closing carriages to rotate, so as to drive the two closed protection boxes to move; one side of the adapter slide rod is movably installed with a closing pressing frame, and the closing pressing frame is pressed to move when the furnace cover is closed.

[0010] A redundant closing device is installed in the gas deposition furnace, which is used to assist in closing the gas deposition furnace; the redundant closing device comprises two redundant closing doors, both of which are slidably installed in the gas deposition furnace, and the two redundant closing doors are in transmission connection with the closed protection boxes, so that the movement of the two closed protection boxes drives the movement of the two redundant closing doors.

[0011] It also comprises a follow-up cleaning device, which is installed in the gas deposition furnace and is used to clean the inner wall of the gas deposition furnace; the follow-up cleaning device comprises two rotating dust collection frames, both of which are connected to the dust collector, and a synchronous driving column is movably installed in the gas deposition furnace, both of which are movably installed on the synchronous driving column.

[0012] Further, in the preferred embodiment of the present application, the transfer closing device further comprises a lifting linkage, one side of the pedestal is provided with a lifting limiting slot, and the lifting linkage is slidably installed in the lifting limiting slot.

[0013] Two push-pull sliding holes are formed in the two opening and closing rotating frames, two push-pull sliding shafts are rotatably installed on the lifting linkage frame, and the two push-pull sliding shafts are movably installed in the two push-pull sliding holes, respectively.

[0014] Further, in the preferred embodiment of the present application, two connecting rotating shafts are installed on the base, and the two opening and closing rotating frames are rotatably installed on the two connecting rotating shafts, respectively.

[0015] Two driving sliding grooves are formed in the two closed protection boxes, and opening and closing sliding shafts are rotatably installed on the two opening and closing rotating frames and movably installed in the two driving sliding grooves, respectively.

[0016] Two opening and closing sliding grooves are formed in the base, and the two closed protection boxes are slidably installed in the two opening and closing sliding grooves, respectively.

[0017] Further, in the preferred embodiment of the present application, a lifting adapter plate is connected between the adapter sliding rod and the lifting linkage frame, two lifting linkage shafts are rotatably installed on the lifting adapter plate, and the two lifting linkage shafts are installed on the adapter sliding rod and the lifting linkage frame, respectively.

[0018] Further, in the preferred embodiment of the present application, an extension sliding hole is formed in the base, and the adapter sliding rod is movably installed in the extension sliding hole.

[0019] A limiting groove is formed in the top inner wall of the extension sliding hole, a push-pull block is installed on the adapter sliding rod, the push-pull block is slidably installed in the limiting groove, a push-pull spring is installed on the inner wall of the limiting groove, and the push-pull spring is installed on the push-pull block.

[0020] Further, in the preferred embodiment of the present application, the redundant closing device further comprises two lifting opening and closing rods, and the two lifting opening and closing rods are installed on one of the closed protection boxes.

[0021] An extrusion lifting groove is formed in each of the two redundant closing doors, and a lifting opening and closing shaft is rotatably installed on each of the two lifting opening and closing rods and movably installed in the extrusion lifting groove.

[0022] Further, in the preferred embodiment of the present application, two lifting accommodation grooves are formed in the vapor deposition furnace, and the two redundant closing doors are movably installed in the two lifting accommodation grooves, respectively.

[0023] A plurality of alignment insertion slots are formed in one of the redundant closing doors, and a plurality of alignment insertion blocks are installed on the other redundant closing door and inserted into the plurality of alignment insertion slots, respectively.

[0024] Further, in the preferred embodiment of the present application, the follow-up cleaning device further comprises two swing sleeves, both of which are rotatably installed on the vapor deposition furnace, and two swing dust collection racks are respectively installed on the two swing sleeves.

[0025] The inner walls of the two swing sleeves are both provided with swing extrusion grooves, and two swing extrusion blocks are installed on the synchronous driving column and are movably installed in the two swing extrusion grooves.

[0026] Further, in the preferred embodiment of the present application, the inner wall of the vapor deposition furnace is provided with a retraction receiving groove, the synchronous driving column is movably installed in the retraction receiving groove, the inner wall of the retraction receiving groove is provided with a rebound spring, and the rebound spring is installed on the synchronous driving column.

[0027] One side of the adapter slide rod is movably provided with a synchronous extrusion rack for pushing the synchronous driving column to move, and both sides of the adapter slide rod are provided with redundant buffer grooves, the closing extrusion rack and the synchronous extrusion rack are movably installed in the two redundant buffer grooves respectively, and the inner walls of the two redundant buffer grooves are both provided with redundant buffer springs, which are respectively installed on the closing extrusion rack and the synchronous extrusion rack.

[0028] A production system for preparing lithium sulfide, comprising the vapor deposition furnace for preparing lithium sulfide.

[0029] The vapor deposition furnace for preparing lithium sulfide and the production system have the following beneficial effects:

[0030] In the present application, when the furnace cover is closed, the furnace cover extrudes the closing extrusion rack, the closing extrusion rack drives the adapter slide rod to move, the adapter slide rod drives the lifting adapter plate to move when moving, the lifting adapter plate drives the lifting linkage frame to move, the lifting linkage frame moves through the two push-pull slide shafts to drive the two opening and closing swing frames to rotate, the opening and closing swing frames rotate through the opening and closing slide shafts to drive the closing protection box to move, the closing protection box horizontally slides in the opening and closing slide groove, so that the two closing protection boxes move to the side away from each other, thereby achieving the purpose of automatically opening the two closing protection boxes when the furnace cover is closed.

[0031] Further, in the present application, through the setting of the redundant closing device, when the closing protection box is slid open, the two lifting opening and closing rods are driven to move, the lifting opening and closing rod drives the lifting opening and closing shaft to move, the lifting opening and closing shaft moves in the extrusion lifting groove, and further drives the two redundant closing doors to move towards each other, and makes a plurality of alignment insertion blocks inserted in a plurality of alignment insertion slots, so that the two redundant closing doors are aligned, the auxiliary closing of the vapor deposition furnace is realized, and the closing effect is further ensured.

[0032] Further, in the present application, through the setting of the redundant closing device, when the closing protection box is slid open, the two lifting opening and closing rods are driven to move, the lifting opening and closing rod drives the lifting opening and closing shaft to move, the lifting opening and closing shaft moves in the extrusion lifting groove, and further drives the two redundant closing doors to move towards each other, and makes a plurality of alignment insertion blocks inserted in a plurality of alignment insertion slots, so that the two redundant closing doors are aligned, the auxiliary closing of the vapor deposition furnace is realized, and the closing effect is further ensured. BRIEF DESCRIPTION OF DRAWINGS

[0033] Figure 1 A production process schematic diagram corresponding to a production system for preparing lithium sulfide provided by an embodiment of the present application;

[0034] Figure 2 A three-dimensional structure schematic diagram of a vapor deposition furnace for preparing lithium sulfide provided by an embodiment of the present application;

[0035] Figure 3 An internal structure schematic diagram of a vapor deposition furnace for preparing lithium sulfide provided by an embodiment of the present application;

[0036] Figure 4 A structure schematic diagram of a switching slide rod and a redundant closing door structure connection of a vapor deposition furnace for preparing lithium sulfide provided by an embodiment of the present application;

[0037] Figure 5 A structure schematic diagram of a closing protection box and a rotating dust collection frame structure connection of a vapor deposition furnace for preparing lithium sulfide provided by an embodiment of the present application;

[0038] Figure 6 A structure schematic diagram of a closing protection box and an opening and closing turret structure connection of a vapor deposition furnace for preparing lithium sulfide provided by an embodiment of the present application; Figure 5 A structure schematic diagram of part A of the present application;

[0039] Figure 7 A local structure schematic diagram of a closing protection box and an opening and closing turret structure connection of a vapor deposition furnace for preparing lithium sulfide provided by an embodiment of the present application;

[0040] Figure 8A partial sectional view structure schematic diagram of a base of a gas deposition furnace for lithium sulfide preparation provided by the embodiment of the present application and a structure connection of an adapter slide rod is provided;

[0041] Figure 9 A partial structure schematic diagram of a redundant closing door of a gas deposition furnace for lithium sulfide preparation provided by the embodiment of the present application and a structure connection of a lifting opening and closing rod is provided;

[0042] Figure 10 A partial sectional view structure schematic diagram of a lifting storage groove of a gas deposition furnace for lithium sulfide preparation provided by the embodiment of the present application and a structure connection of a lifting opening and closing rod is provided;

[0043] Figure 11 A partial sectional view structure schematic diagram of a synchronous driving column of a gas deposition furnace for lithium sulfide preparation provided by the embodiment of the present application and a structure connection of a synchronous extrusion frame is provided;

[0044] Figure 12 A partial structure schematic diagram of a rotary dust collection frame of a gas deposition furnace for lithium sulfide preparation provided by the embodiment of the present application and a structure connection of a swing rotating sleeve is provided;

[0045] Figure 13 A broken sectional view structure schematic diagram of a closing extrusion frame of a gas deposition furnace for lithium sulfide preparation provided by the embodiment of the present application and a structure connection of a synchronous extrusion frame is provided.

[0046] In the figure: 1, gas deposition furnace; 2, furnace cover; 3, placing table; 4, base; 5, transfer closing device; 501, closing protection box; 502, opening and closing sliding groove; 503, opening and closing rotating frame; 504, driving sliding groove; 505, opening and closing sliding shaft; 506, telescopic sliding hole; 507, adapter slide rod; 508, limiting groove; 509, push-pull block; 510, push-pull spring; 511, lifting adapter plate; 512, lifting linkage frame; 513, lifting linkage shaft; 514, push-pull sliding hole; 515, push-pull sliding shaft; 516, lifting limiting groove; 517, closing extrusion frame; 518, connecting rotating shaft; 6, redundant closing device; 601, redundant closing door; 602, lifting storage groove; 603, alignment insertion block; 604, alignment insertion groove; 605, lifting opening and closing rod; 606, extrusion lifting groove; 607, lifting opening and closing shaft; 7, follow-up cleaning device; 701, rotary dust collection frame; 702, retraction storage groove; 703, synchronous driving column; 704, swing rotating sleeve; 705, rebound spring; 706, swing extrusion groove; 707, swing extrusion block; 708, synchronous extrusion frame; 709, redundant buffer groove; 710, redundant buffer spring; 8, dust collector. DETAILED DESCRIPTION

[0047] In order to make the objects, technical solutions and advantages of the embodiments of the present application clearer, the following will clearly and completely describe the technical solutions in the embodiments of the present application with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only some but not all of the embodiments of the present application. The components of the embodiments of the present application described and shown in the drawings can be arranged and designed in various different configurations.

[0048] Therefore, the following detailed description of the embodiments of the present application provided in the drawings is not intended to limit the scope of the claimed application, but only represents selected embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative work fall within the scope of protection of the present application.

[0049] It should be noted that similar reference numerals and letters in the following drawings represent similar items, and therefore, once an item is defined in one drawing, it need not be further defined and explained in subsequent drawings.

[0050] In addition, in the description of the present application, it should be noted that the terms "center", "upper", "lower", "vertical", "horizontal", "inner", "outer" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, or the orientation or positional relationship in which the product of the present application is usually placed, and are only for the convenience of describing the present application and simplifying the description, and therefore cannot be understood as indicating or implying that the indicated device or element must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application. In addition, the terms "first", "second", "third" and the like are only used to distinguish the description and cannot be understood as indicating or implying relative importance.

[0051] In addition, the terms "horizontal", "vertical", "perpendicular" and the like do not mean that the components must be absolutely vertical, but can be slightly inclined. For example, "vertical" only means that its direction is more vertical relative to "horizontal", and does not mean that the structure must be completely vertical, but can be slightly inclined.

[0052] In the description of the present application, it should also be noted that unless otherwise explicitly specified and limited, the terms "arrangement", "installation", "connection", "connection" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the communication inside two elements. For those of ordinary skill in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0053] Please refer to the drawings in the description of the present application Figures 2-13The embodiment of the present application provides a gas deposition furnace for lithium sulfide preparation, which comprises a gas deposition furnace 1, a furnace cover 2 rotatably arranged on the gas deposition furnace 1, a pedestal 4 movably arranged in the gas deposition furnace 1, a placing table 3 arranged on the pedestal 4 and a dust collector 8 connected to one side of the gas deposition furnace 1.

[0054] Further, referring to the drawings in the description Figures 4-9 and Figure 13 The embodiment of the present application provides a gas deposition furnace for lithium sulfide preparation, which further comprises a transfer sealing device 5 arranged on the pedestal 4, and the transfer sealing device 5 is used for rotatingly sealing the placing table 3; specifically, the transfer sealing device 5 comprises two sealing protection boxes 501, the two sealing protection boxes 501 are both slidably arranged on the pedestal 4, two opening and closing rotating frames 503 are rotatably arranged on one side of the pedestal 4, the two opening and closing rotating frames 503 are movably arranged on the two sealing protection boxes 501 respectively, a transfer sliding rod 507 is movably arranged on the pedestal 4, the transfer sliding rod 507 is in transmission connection with the two opening and closing rotating frames 503, the furnace cover 2 closes and extrudes the transfer sliding rod 507, drives the two opening and closing rotating frames 503 to rotate, is used for driving the two sealing protection boxes 501 to move, and a closing extrusion frame 517 is movably arranged on one side of the transfer sliding rod 507, and the furnace cover 2 closes and is used for extruding the closing extrusion frame 517 to move.

[0055] It should be noted that, in the embodiment of the present application, when the furnace cover 2 is closed, the furnace cover 2 extrudes the closing extrusion frame 517, the closing extrusion frame 517 drives the transfer sliding rod 507 to move, the transfer sliding rod 507 drives the two opening and closing rotating frames 503 to rotate when moving, and then the two sealing protection boxes 501 move to the side away from each other, so that the two sealing protection boxes 501 are automatically opened when the furnace cover 2 is closed, and the sealing property of the placing table 3 is ensured.

[0056] Further specifically, in the embodiment of the present application, a redundant sealing device 6 is arranged in the gas deposition furnace 1, and the redundant sealing device 6 is used for assisting in sealing the gas deposition furnace 1; the redundant sealing device 6 comprises two redundant sealing doors 601, the two redundant sealing doors 601 are both slidably arranged in the gas deposition furnace 1, the two redundant sealing doors 601 are in transmission connection with the sealing protection boxes 501, and the two sealing protection boxes 501 drive the two redundant sealing doors 601 to move. It should be noted that, in the embodiment of the present application, when the sealing protection boxes 501 are slidably opened, the two redundant sealing doors 601 move towards each other, the gas deposition furnace 1 is assisted in being sealed, and the sealing effect of the gas deposition furnace 1 is ensured.

[0057] Further, the gas phase deposition furnace for preparing lithium sulfide provided by the embodiment of the present application further comprises a follow-up cleaning device 7, which is installed in the gas phase deposition furnace 1 and is used for cleaning the inner wall of the gas phase deposition furnace 1; the follow-up cleaning device 7 comprises two rotating dust collection frames 701, both of which are connected to the dust collector 8; a synchronous driving column 703 is movably installed in the gas phase deposition furnace 1, and both of the two rotating dust collection frames 701 are movably installed on the synchronous driving column 703. It should be noted that, in the embodiment of the present application, the two rotating dust collection frames 701 are rotated in the process of opening and closing the furnace cover 2, so as to clean the inner wall of the gas phase deposition furnace 1 and avoid the problem that the pollution affects the production of the gas phase deposition furnace 1.

[0058] Please continue to refer to the description of the drawings Figures 4-9 and Figure 13 Further, the gas phase deposition furnace for preparing lithium sulfide provided by the embodiment of the present application further comprises a follow-up cleaning device 7, which is installed in the gas phase deposition furnace 1 and is used for cleaning the inner wall of the gas phase deposition furnace 1; the follow-up cleaning device 7 comprises two rotating dust collection frames 701, both of which are connected to the dust collector 8; a synchronous driving column 703 is movably installed in the gas phase deposition furnace 1, and both of the two rotating dust collection frames 701 are movably installed on the synchronous driving column 703. It should be noted that, in the embodiment of the present application, the two rotating dust collection frames 701 are rotated in the process of opening and closing the furnace cover 2, so as to clean the inner wall of the gas phase deposition furnace 1 and avoid the problem that the pollution affects the production of the gas phase deposition furnace 1.

[0059] In addition, both of the two opening and closing rotating frames 503 are provided with a push-pull sliding hole 514, and the lifting linkage frame 512 is rotatably provided with two push-pull sliding shafts 515, both of which are movably installed in the two push-pull sliding holes 514. It should be noted that, in the embodiment of the present application, when the lifting linkage frame 512 moves, it moves vertically in the lifting limiting groove 516, and the lifting linkage frame 512 moves through the two push-pull sliding shafts 515 to drive the two opening and closing rotating frames 503 to rotate, and at the same time, the two push-pull sliding shafts 515 slide in the two push-pull sliding holes 514, so as to realize the purpose of driving the two closing protection boxes 501 to move synchronously.

[0060] Further, the gas phase deposition furnace for preparing lithium sulfide provided by the embodiment of the present application further comprises a follow-up cleaning device 7, which is installed in the gas phase deposition furnace 1 and is used for cleaning the inner wall of the gas phase deposition furnace 1; the follow-up cleaning device 7 comprises two rotating dust collection frames 701, both of which are connected to the dust collector 8; a synchronous driving column 703 is movably installed in the gas phase deposition furnace 1, and both of the two rotating dust collection frames 701 are movably installed on the synchronous driving column 703. It should be noted that, in the embodiment of the present application, the two rotating dust collection frames 701 are rotated in the process of opening and closing the furnace cover 2, so as to clean the inner wall of the gas phase deposition furnace 1 and avoid the problem that the pollution affects the production of the gas phase deposition furnace 1.

[0061] Further, two opening and closing sliding grooves 502 are formed on the base 4, and two closed protection boxes 501 are slidingly installed in the two opening and closing sliding grooves 502 respectively. It should be noted that in the embodiment of the present application, when the opening and closing rotating frame 503 rotates, it rotates on the connecting rotating shaft 518, and the opening and closing rotating frame 503 rotates to drive the closed protection box 501 to move through the opening and closing sliding shaft 505, the closed protection box 501 slides horizontally in the opening and closing sliding groove 502, and at the same time, the opening and closing sliding shaft 505 slides in the sliding groove 504, thereby realizing the movement of the two closed protection boxes 501 to the side away from each other, and achieving the purpose of automatically opening the two closed protection boxes 501 when the furnace cover 2 is closed.

[0062] Further specifically, in the embodiment of the present application, a lifting adapter plate 511 is connected between the adapter sliding rod 507 and the lifting linkage frame 512, two lifting linkage shafts 513 are rotatably installed on the lifting adapter plate 511, and the two lifting linkage shafts 513 are installed on the adapter sliding rod 507 and the lifting linkage frame 512 respectively. It should be noted that in the embodiment of the present application, when the adapter sliding rod 507 moves, it drives one lifting linkage shaft 513 to move, so that the lifting linkage shaft 513 drives the lifting adapter plate 511 to move, and the lifting adapter plate 511 moves to drive the lifting linkage frame 512 to move through the other lifting linkage shaft 513, thereby realizing the purpose of driving the lifting linkage frame 512 to move vertically when the adapter sliding rod 507 moves horizontally.

[0063] Please continue to refer to the description of the drawings Figures 4-9 and Figure 13 More specifically, in the embodiment of the present application, a telescopic sliding hole 506 is formed on the base 4, and the adapter sliding rod 507 is movably installed in the telescopic sliding hole 506; a limiting groove 508 is formed on the top inner wall of the telescopic sliding hole 506, a push-pull block 509 is installed on the adapter sliding rod 507, the push-pull block 509 is slidingly installed in the limiting groove 508, a push-pull spring 510 is installed on the inner wall of the limiting groove 508, and the push-pull spring 510 is installed on the push-pull block 509. It should be noted that in the embodiment of the present application, when the furnace cover 2 presses the closing pressing frame 517, the closing pressing frame 517 drives the adapter sliding rod 507 to move, the adapter sliding rod 507 slides in the telescopic sliding hole 506, at the same time, the adapter sliding rod 507 slides in the limiting groove 508 through the push-pull block 509, and the push-pull spring 510 is stressed, thereby realizing the horizontal movement of the adapter sliding rod 507.

[0064] Further, please refer to the description of the drawings Figures 4-5 and Figures 9-10 The embodiment of the present application provides a gas deposition furnace for preparing lithium sulfide, and the redundant closing device 6 further comprises two lifting opening and closing rods 605, and the two lifting opening and closing rods 605 are installed on one closed protection box 501.

[0065] Further, the two redundant closing doors 601 are provided with extrusion lifting grooves 606, the two lifting opening and closing rods 605 are rotatably provided with lifting opening and closing shafts 607, and the two lifting opening and closing shafts 607 are movably arranged in the two extrusion lifting grooves 606.

[0066] Further specifically, in the embodiment of the present application, the vapor deposition furnace 1 is provided with two lifting receiving grooves 602, and the two redundant closing doors 601 are movably arranged in the two lifting receiving grooves 602; in addition, one of the redundant closing doors 601 is provided with a plurality of alignment insertion grooves 604, and the other redundant closing door 601 is provided with a plurality of alignment insertion blocks 603, which are respectively inserted into the plurality of alignment insertion grooves 604.

[0067] Please refer to the accompanying drawings Figure 5 and Figures 11-13 Further, the vapor deposition furnace for preparing lithium sulfide provided by the embodiment of the present application further comprises two swing sleeves 704, the two swing sleeves 704 are rotatably arranged on the vapor deposition furnace 1, and the two rotating dust collection frames 701 are arranged on the two swing sleeves 704.

[0068] In addition, the inner walls of the two swing sleeves 704 are provided with swing extrusion grooves 706, the synchronous driving column 703 is provided with two swing extrusion blocks 707, and the two swing extrusion blocks 707 are movably arranged in the two swing extrusion grooves 706.

[0069] Further specifically, in the embodiment of the present application, the inner wall of the vapor deposition furnace 1 is provided with a retraction receiving groove 702, the synchronous driving column 703 is movably arranged in the retraction receiving groove 702, the inner wall of the retraction receiving groove 702 is provided with a rebound spring 705, and the rebound spring 705 is arranged on the synchronous driving column 703.

[0070] In addition, the side of the adapter slide rod 507 is movably mounted with a synchronous extrusion frame 708, the synchronous extrusion frame 708 is used to push the synchronous drive column 703 to move, the two sides of the adapter slide rod 507 are provided with a redundant buffer groove 709, the closing extrusion frame 517 and the synchronous extrusion frame 708 are movably mounted in the two redundant buffer grooves 709 respectively, the inner wall of the two redundant buffer grooves 709 is mounted with a redundant buffer spring 710, and the two redundant buffer springs 710 are mounted on the closing extrusion frame 517 and the synchronous extrusion frame 708 respectively.

[0071] It should be noted that, in the embodiment of the present application, when the furnace cover 2 is closed, the extrusion closing extrusion frame 517 moves, so that the closing extrusion frame 517 drives the synchronous extrusion frame 708 to move through the adapter slide rod 507, and then drives the synchronous drive column 703 to move, and after the furnace cover 2 is completely closed, the closing extrusion frame 517 and the synchronous extrusion frame 708 move in the two redundant buffer grooves 709, and the two redundant buffer springs 710 are stressed, so that when the furnace cover 2 is intermittently closed and the closing is not tight, the two redundant sealing doors 601 can still be continuously closed, and the synchronous drive column 703 can be fully moved; in addition, when the synchronous drive column 703 moves, it slides in the retracting storage groove 702, and the rebound spring 705 is stressed, so that under the rebound force of the rebound spring 705, the synchronous drive column 703 is driven to reset.

[0072] In addition, please refer to the drawings in the description Figure 1 The embodiment of the present application also provides a production system for preparing lithium sulfide, and the production system for preparing lithium sulfide includes the gas phase deposition furnace for preparing lithium sulfide.

[0073] In summary, the working principle of the gas phase deposition furnace for preparing lithium sulfide provided by the embodiment of the present application is as follows:

[0074] When the furnace cover 2 is closed, the furnace cover 2 extrudes the closing extrusion frame 517, so that the closing extrusion frame 517 drives the adapter slide rod 507 to move, the adapter slide rod 507 slides in the telescopic slide hole 506, at the same time, the adapter slide rod 507 slides in the limiting groove 508 through the push-pull block 509, and the push-pull spring 510 is stressed. It should be noted that when the adapter slide rod 507 moves, it drives a lifting linkage shaft 513 to move, so that the lifting linkage shaft 513 drives the lifting adapter plate 511 to move, the lifting adapter plate 511 moves through another lifting linkage shaft 513 to drive the lifting linkage frame 512 to move, the lifting linkage frame 512 moves vertically in the lifting limiting groove 516, and the lifting linkage frame 512 moves through two push-pull slide shafts 515 to drive two opening and closing rotating frames 503 to rotate, at the same time, the two push-pull slide shafts 515 slide in the two push-pull slide holes 514, the opening and closing rotating frame 503 rotates through the closing protection box 501 driven by the closing slide shaft 505, the closing protection box 501 slides horizontally in the closing slide groove 502, at the same time, the closing slide shaft 505 slides in the slide groove 504, thereby realizing the movement of the two closing protection boxes 501 to the side away from each other, achieving the purpose of automatically opening the two closing protection boxes 501 when the furnace cover 2 is closed, and similarly, when the furnace cover 2 is opened, the two closing protection boxes 501 can be automatically closed, ensuring the sealing of the placing table 3;

[0075] Further, when the closing protection box 501 slides open, it drives the two lifting opening and closing rods 605 to move, the lifting opening and closing rods 605 drive the lifting opening and closing shaft 607 to move, the lifting opening and closing shaft 607 moves in the extrusion lifting groove 606, thereby driving the two redundant closing doors 601 to move towards each other, and the plurality of alignment insertion blocks 603 are inserted in the plurality of alignment insertion grooves 604, realizing the auxiliary closing of the vapor deposition furnace 1, and further ensuring the closing effect;

[0076] Further, when the adapter slide rod 507 moves to drive the synchronous extrusion frame 708 to move, the synchronous extrusion frame 708 drives the synchronous drive column 703 to move, the synchronous drive column 703 moves in the retractable storage groove 702, and the rebound spring 705 is stressed, at the same time, the synchronous drive column 703 drives the two swing extrusion blocks 707 to move in the two swing extrusion grooves 706, thereby driving the two swing rotating sleeves 704 to rotate, the swing rotating sleeve 704 drives the rotating dust collection frame 701 to rotate, at this time, the dust collector 8 cleans the inner wall of the vapor deposition furnace 1 through the rotation of the rotating dust collection frame 701, thereby avoiding pollution, and further ensuring the production quality of the vapor deposition furnace 1.

[0077] The above merely describes preferred specific embodiments of the present application, but the protection scope of the present application is not limited thereto, and any person skilled in the art, according to the technical solution and inventive concept of the present application, makes equivalent replacement or change within the technical range disclosed by the present application, which should be covered within the protection scope of the present application.

Claims

1. A vapor deposition furnace for producing lithium sulfide, characterized by comprising: It includes a vapor deposition furnace, a furnace cover is rotatably installed on the vapor deposition furnace, and a pedestal is movably installed in the vapor deposition furnace, the pedestal is installed with a placing table, and a dust collector is connected to one side of the vapor deposition furnace; It also includes a transfer closing device installed on the pedestal, which is used to rotate and close the placing table; the transfer closing device includes two closed protection boxes, both of which are slidably installed on the pedestal, two opening and closing carriages are rotatably installed on one side of the pedestal, both of which are movably installed on the two closed protection boxes, a transfer slide rod is movably installed on the pedestal, and the transfer slide rod is in transmission connection with the two opening and closing carriages; the furnace cover is closed to extrude the transfer slide rod, which drives the two opening and closing carriages to rotate, so as to drive the two closed protection boxes to move, and one side of the transfer slide rod is movably installed with a closing extrusion frame, which is used to extrude the closing extrusion frame to move when the furnace cover is closed. The vapor deposition furnace is installed with a redundant closing device, which is used to assist in closing the vapor deposition furnace; the redundant closing device includes two redundant closing doors, both of which are slidably installed in the vapor deposition furnace, and the two redundant closing doors are in transmission connection with the closed protection boxes, so that the movement of the two closed protection boxes drives the movement of the two redundant closing doors. It also includes a follow-up cleaning device installed in the vapor deposition furnace, which is used to clean the inner wall of the vapor deposition furnace; the follow-up cleaning device includes two rotating dust collection frames connected to the dust collector, and a synchronous drive column is movably installed in the vapor deposition furnace, both of which are movably installed on the synchronous drive column.

2. The vapor deposition furnace for producing lithium sulfide according to claim 1, wherein The transfer closing device also includes a lifting linkage frame, and the base is provided with a lifting limiting slot on one side, and the lifting linkage frame is slidably installed in the lifting limiting slot; Both of the two opening and closing carriages are provided with a push-pull sliding hole, and two push-pull sliding shafts are rotatably installed on the lifting linkage frame, both of which are movably installed in the two push-pull sliding holes.

3. The vapor deposition furnace for producing lithium sulfide according to claim 2, wherein Two connecting shafts are installed on the pedestal, and the two opening and closing carriages are rotatably installed on the two connecting shafts, respectively. Both of the two closed protection boxes are provided with a driving sliding groove, and both of the two opening and closing carriages are rotatably installed with an opening and closing sliding shaft, both of which are movably installed in the two driving sliding grooves. Two opening and closing sliding grooves are formed in the base, and the two closed protection boxes are slidably installed in the two opening and closing sliding grooves, respectively.

4. The vapor deposition furnace for producing lithium sulfide according to claim 3, wherein The transfer slide rod is connected with the lifting linkage frame through a lifting transfer plate, and two lifting linkage shafts are rotatably installed on the lifting transfer plate, both of which are installed on the transfer slide rod and the lifting linkage frame.

5. The vapor deposition furnace for producing lithium sulfide according to claim 4, wherein The base is provided with an expansion sliding hole, and the transfer slide rod is movably installed in the expansion sliding hole. The top side inner wall of the telescopic sliding hole is provided with a limiting groove, the adapter sliding rod is provided with a push-pull block, the push-pull block is slidingly installed in the limiting groove, the inner wall of the limiting groove is provided with a push-pull spring, and the push-pull spring is installed on the push-pull block.

6. The vapor deposition furnace for producing lithium sulfide according to claim 5, wherein The redundant closing device further comprises two lifting opening and closing rods, and the two lifting opening and closing rods are installed on the closing protection box. The two redundant closing doors are provided with extrusion lifting grooves, and the two lifting opening and closing rods are rotatably installed on the extrusion lifting grooves.

7. The vapor deposition furnace for producing lithium sulfide according to claim 6, wherein The gas phase deposition furnace is provided with two lifting receiving grooves, and the two redundant closing doors are movably installed in the two lifting receiving grooves. The one redundant closing door is provided with a plurality of alignment insertion grooves, and the other redundant closing door is provided with a plurality of alignment insertion blocks.

8. The vapor deposition furnace for producing lithium sulfide according to claim 1, wherein The follow-up cleaning device further comprises two swing sleeves, and the two swing sleeves are rotatably installed on the gas phase deposition furnace. The inner walls of the two swing sleeves are provided with swing extrusion grooves, and the synchronous driving column is provided with two swing extrusion blocks.

9. The vapor deposition furnace for producing lithium sulfide according to claim 8, wherein The inner wall of the gas phase deposition furnace is provided with a retraction receiving groove, the synchronous driving column is movably installed in the retraction receiving groove, the inner wall of the retraction receiving groove is provided with a rebound spring, and the rebound spring is installed on the synchronous driving column. One side of the adapter sliding rod is movably provided with a synchronous extrusion frame, the synchronous extrusion frame is used for pushing the synchronous driving column to move, both sides of the adapter sliding rod are provided with redundant buffer grooves, the closing extrusion frame and the synchronous extrusion frame are movably installed in the two redundant buffer grooves respectively, the inner walls of the two redundant buffer grooves are provided with redundant buffer springs respectively, and the two redundant buffer springs are installed on the closing extrusion frame and the synchronous extrusion frame respectively.

10. A production system for producing lithium sulfide, characterized by comprising: The gas phase deposition furnace comprises the lithium sulfide preparation device.

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