Solvent spray pipe structure for substrate cleaning and switching method thereof

Abstract

The invention discloses a solvent spray pipe structure for substrate cleaning and a switching method thereof.The spray pipe structure comprises a spray pipe and further comprises a sleeve which is arranged on the periphery of the spray pipe in a sealing and sleeving mode and can be driven to rotate relative to the spray pipe, an open groove is formed in the side wall of the sleeve, the open groove extends in the axial direction of the sleeve, and the length of the open groove is not smaller than the longest distance of a plurality of spray holes; sealing strips are arranged on the two side wall faces of a notch of the open groove, any sealing strip makes contact with the outer circumferential wall of the spraying pipe in a sealed and sliding mode, and a sealed cavity allowing gas media to enter is jointly defined by the inner circumferential wall of the sleeve, the outer circumferential wall of the spraying pipe and the sealing strips. The notch of the groove is designed to be capable of switching between the mode of not shielding any spraying hole and the mode of shielding part of the spraying holes in the process that the sleeve is driven to rotate. The spray pipe does not need to be disassembled, thereby saving replacement time and cost and improving utilization rate; standby spray pipes are not needed, and field 5S management is easier; and the spraying range of the spraying pipe is adaptively adjusted according to the size of the substrate, so that the solvent cost can be saved.

Description

TECHNICAL FIELD

[0001] The application belongs to the technical field of SMT, and particularly relates to a solvent spray pipe structure for substrate cleaning and a switching method thereof. BACKGROUND

[0002] SMT (Surface Mount Technology) is also called surface assembly technology, which is a board-level assembly technology for mounting surface-mounted devices (SMD) on a printed circuit board (PCB), is the most common technology and process in the electronic assembly industry, and is the core of modern electronic assembly technology.

[0003] In SMT, a suction nozzle needs to be used, such as a suction nozzle for sucking a substrate, a suction nozzle for cleaning a substrate, and the like. For the suction nozzle for cleaning the substrate, there are various specifications of the substrate in the prior art, and the sizes of the substrates of different specifications are different, and the lengths of the corresponding suction nozzles for cleaning the substrates are also different. Generally, the suction nozzle for cleaning the substrate includes a solvent spray pipe with a plurality of spray holes, and the spray holes of the solvent spray pipe are arranged along the direction perpendicular to the advancing direction of the substrate. The spray range of the solvent spray pipe, that is, the distance between the two spray holes farthest away, corresponds to the length or width of the substrate. That is, when substrates of different sizes are cleaned, a solvent spray pipe corresponding to the size of the substrate needs to be selected, so as to avoid waste of solvent due to too large a spray range and to avoid an increase in cleaning time and a decrease in cleaning efficiency due to too small a spray range. In the prior art, in order to enable the solvent spray pipe to correspond to the substrate, the original solvent spray pipe that does not correspond to the size of the substrate needs to be disassembled and replaced when different substrates are cleaned, which results in low production efficiency, and requires additional spare solvent spray pipes of various specifications, which increases the cost and brings inconvenience to on-site management. Here, disassembly and assembly may cause unnecessary risks such as falling of parts such as connecting screws. In order to solve the above technical problems, the present application is thus obtained. SUMMARY

[0004] In view of at least one of the above-mentioned technical problems, the present application aims to provide a solvent spray pipe structure for substrate cleaning and a switching method thereof, which can automatically adjust the spray range of the solvent spray pipe according to the size of the substrate to be cleaned without preparing cleaning spray pipes of different hole lengths or disassembling and replacing the solvent spray pipe when corresponding to cleaning nozzles of different lengths.

[0005] The technical solution of the present application is as follows:

[0006] One of the purposes of the present application is to provide a cleaning nozzle structure, which comprises a nozzle, the nozzle is hollow to form a solvent cavity, and a plurality of spray holes are arranged on the side wall of the nozzle along the axial direction; a sleeve is arranged on the outer periphery of the nozzle and can be driven to rotate relative to the nozzle, a slot is arranged on the side wall of the sleeve and extends along the axial direction, and the length of the slot is not less than the longest distance between the plurality of spray holes; a sealing strip is arranged on both side walls of the slot, and any sealing strip is in sliding contact with the outer peripheral wall of the nozzle; the inner peripheral wall of the sleeve, the outer peripheral wall of the nozzle and the sealing strip jointly define a closed cavity for the passage of gas medium; and the slot is designed to switch between not blocking any spray hole and at least blocking part of the spray holes during the driven rotation of the sleeve.

[0007] Preferably, one side wall of the slot extends along the axial direction of the sleeve, and the other side wall is arranged at an angle to the axial direction of the sleeve.

[0008] Preferably, one side wall of the slot extends along the axial direction of the sleeve, and the other side wall is arranged at an angle to the axial direction of the sleeve.

[0009] Preferably, the inner side of the intersection position of the two inclined walls of the side wall arranged at an angle to the axial direction of the sleeve extends along the axial direction of the sleeve and along the radial direction of the sleeve; the extension wall is in sliding contact with the outer peripheral wall of the nozzle; and the extension wall, the sealing strip, the outer peripheral wall of the nozzle and the inner peripheral wall of the sleeve jointly define the closed cavity.

[0010] Preferably, the extension wall is triangular.

[0011] Preferably, the side wall arranged at an angle to the axial direction of the sleeve is arc-shaped.

[0012] Preferably, the sleeve comprises a barrel provided with the slot and having a uniform diameter, and a connecting part integrally formed at one end of the barrel and extending along the axial direction and having a smaller diameter than the barrel; and the connecting part is provided with a driving assembly for driving the sleeve to rotate relative to the nozzle.

[0013] Preferably, the driving assembly comprises a transmission wheel fixedly connected to the connecting part, a driving motor arranged on one side of the transmission wheel, and a driving wheel arranged on the driving end of the driving motor; and the transmission wheel and the driving wheel are in transmission.

[0014] Preferably, the axial ends of the spray pipe extend beyond the axial ends of the sleeve and are fixed to the fixed blocks, respectively, and the fixed block at the end opposite to the connecting part is provided with a communication cavity communicating with the sealed cavity and a first joint communicating with the communication cavity and the sealed cavity, and the end of the spray pipe opposite to the connecting part is provided with a second joint communicating with the solvent cavity.

[0015] Another object of the present application is to provide a switching method of the above-mentioned cleaning spray pipe structure, comprising the following steps:

[0016] Obtaining the size of the substrate;

[0017] Driving the sleeve to rotate a certain angle relative to the spray pipe in a forward or reverse direction based on the obtained size of the substrate to adjust the opening range of the spray holes, so that the cleaning solvent sprayed from the two spray holes farthest apart can be sprayed into both ends of the substrate;

[0018] Injecting cleaning solvent into the spray pipe and spraying it out of the spray holes, while injecting gas medium into the sealed cavity to form a seal to prevent cleaning solvent from being sprayed out of the spray holes that are shielded by the sleeve, and the cleaning solvent in the spray pipe is completely sprayed out of the unshielded spray holes under the action of gas pressure.

[0019] Compared with the prior art, the present application has the following advantages:

[0020] The substrate cleaning solvent spray pipe structure of the present application does not need to disassemble the spray pipe, does not cause human error risk due to the falling of parts such as screws during disassembly, saves disassembly and replacement time and cost, improves cleaning efficiency and productivity, does not need to prepare a spare spray pipe, and makes on-site 5S management easier; the spray range of the spray pipe is adaptively adjusted according to the size of the substrate, which does not cause waste of cleaning solvent and can save solvent cost. BRIEF DESCRIPTION OF DRAWINGS

[0021] The present application will be further described below in conjunction with the drawings and examples:

[0022] Figure 1 FIG. 1 is a structural schematic view of the substrate cleaning solvent spray pipe structure of the present application (rotated 90° to the left);

[0023] Figure 2 FIG. 2 is a structural schematic view of the sleeve of the substrate cleaning solvent spray pipe structure of the present application (rotated 90° to the left);

[0024] Figure 3 FIG. 3 is a partial enlarged view of the widest part of the slot of the sleeve in FIG. 2; Figure 2

[0025] Figure 4 ​This is a schematic diagram of the structure of the solvent spray nozzle for substrate cleaning according to an embodiment of the present invention, showing the connection between the nozzle and the sleeve (rotated 90° to the left).

[0026] Figure 5 for Figure 4 A cross-sectional schematic diagram of the nozzle and sleeve;

[0027] Figure 6 This is a schematic diagram of the solvent spray nozzle structure for substrate cleaning according to an embodiment of the present invention (different colors are used to distinguish them for ease of understanding, wherein the green dashed arrows in the figure represent the path of the solvent and the red dashed arrows represent the path of the air).

[0028] Wherein: 10, nozzle; 110, spray hole; 120, solvent chamber; 20, sleeve; 21, cylinder; 211, slot; 212, inclined wall; 213, extension wall; 22, connecting part; 30, drive assembly; 31, drive motor; 32, drive gear; 33, transmission gear; 40, sealing strip; 50, fixing block; 60, first connector; 70, second connector; 80, mounting base; 90, fixing seat; 100, sealed cavity. Detailed Implementation

[0029] To make the objectives, technical solutions, and advantages of this invention clearer, the invention will be further described in detail below with reference to specific embodiments and the accompanying drawings. It should be understood that these descriptions are merely exemplary and not intended to limit the scope of the invention. Furthermore, descriptions of well-known structures and techniques are omitted in the following description to avoid unnecessarily obscuring the concept of the invention.

[0030] See Figures 1 to 6The cleaning nozzle structure provided by the embodiment of the present application comprises a nozzle 10 and a sleeve 20. The nozzle 10 has an axially extending solvent cavity 120 and a plurality of spray holes 110 arranged at intervals along the axial direction of the side wall of the nozzle 10, and the nozzle 10 is fixed. The sleeve 20 is a sealing sleeve arranged on the outer periphery of the nozzle 10, and the sleeve 20 can be driven to rotate relative to the nozzle 10. Specifically, there is a gap between the outer peripheral wall of the nozzle 10 and the inner peripheral wall of the sleeve 20. A slot 211 extending along the axial direction is formed on the side wall of the sleeve 20. The slot 211 is not a regular slot, and the size of the slot 211 in the axial direction, i.e. the length, is not less than, i.e. slightly larger than (specifically, no limitation is made, and those skilled in the art can select and design according to actual needs, as long as it is ensured that all the spray holes 110 can spray cleaning solvent without being interfered by the side wall of the slot 211 when the largest substrate is corresponding) the farthest distance of the spray holes 110, i.e. the distance between the two spray holes 110 farthest apart. That is, the largest opening range of the spray holes 110, i.e. all the spray holes 110 can spray cleaning solvent. The width of the slot 211, i.e. the extension of the slot 211 in the circumferential direction, is not regular, i.e. along the axial direction, one side of the slot 211, i.e. the lower side as shown in Figure 1 , extends along the axial direction of the sleeve 20, but the other side, i.e. the upper side as shown in Figure 1 , does not coincide with the axial direction of the sleeve 20, but has an included angle (the included angle is not specifically limited) with the axial direction of the sleeve 20. That is, when the sleeve 20 is driven to rotate relative to the nozzle 10, the side, i.e. the upper side as shown in Figure 1The upper side of the slot of the slot 211 shown can block part of the spray holes 110, thereby reducing the opening range of the spray holes 110, that is, the slot of the slot 211 is designed to switch between not blocking any spray hole 110 or blocking part of the spray hole 110, thereby realizing the function of adjusting the spray range according to the size of the substrate without the need to disassemble and replace the spray pipe 10 as in the prior art. The solvent spray pipe 10 structure of the embodiment of the present application does not need to disassemble the spray pipe 10, and does not cause the risk of human error due to the falling of parts such as screws during disassembly, saves the time and cost of disassembly and replacement, improves the cleaning efficiency and improves the utilization rate; in addition, no spare spray pipe 10 is needed, and 5S management on site is easier; in addition, the spray range of the spray pipe 10 is adaptively adjusted according to the size of the substrate, which can save solvent cost. More specifically, due to the provision of the slot 211, in order to ensure that the gap between the sleeve 20 and the spray pipe 10 can form a sealed cavity 100, a sealing strip 40 is provided on the side wall of the slot 211, and any sealing strip 40 is sealingly and slidingly abutted on the outer peripheral wall of the spray pipe 10. That is, the sealed cavity 100 is defined by the outer peripheral wall of the spray pipe 10, the inner peripheral wall of the sleeve 20 and the sealing strip 40. The design of the sealed cavity 100 is to introduce a gas medium to form a gas seal so that after part of the spray holes 110 are blocked by the sleeve 20, the cleaning solvent can be prevented from being sprayed from the blocked spray holes 110 to cause waste of cleaning solvent, and on the other hand, the presence of the gas medium in the sealed cavity 100 can also cause the cleaning solvent in the spray pipe 10 to be sprayed from the unblocked spray holes 110 without causing waste due to the action of gas pressure.

[0031] As for the specific structural design of the slot 211, in some preferred embodiments of the present application, such as Figure 2 and Figure 3As shown, the slot 211 is triangular. Specifically, the side wall surface of the slot 211 which is at an angle with the axis of the sleeve 20 is composed of two inclined wall surfaces 212 which are at an angle, and the two inclined wall surfaces 212 gradually approach the other side wall surface from the middle position of the slot 211 to the two sides, and the middle distance from the other side wall surface along the axis direction of the sleeve 20 is wider. That is, when the sleeve 20 is driven to rotate relative to the nozzle 10 in the direction of reducing the opening range of the injection holes 110 (for example, clockwise rotation), the sleeve 20 first blocks the two side injection holes 110, and as the rotation angle increases, the middle position gradually blocks the injection holes 110, and the more the number of injection holes 110 blocked, the smaller the opening range of the injection holes 110; when it is necessary to increase the opening range of the injection holes 110, it is only necessary to rotate in the opposite direction, that is, to drive the sleeve 20 to rotate counterclockwise relative to the nozzle 10. Preferably, in the embodiment of the present application, the two inclined wall surfaces 212 of the side wall surface of the slot 211 which is at an angle with the axis of the sleeve 20 are not straight lines, but are arc-shaped and extend helically along the outer peripheral wall of the sleeve 20. As shown in the figure, Figure 6 As shown, the front view of the slot 211 is a triangle, in which the inclined wall surface 212 corresponds to the hypotenuse, the distance between the two injection holes 110 farthest apart corresponds to the straight side, and when the opening range of the nozzle 10 (here referring to the range when not blocked by the sleeve 20) changes, the corresponding straight side also changes, and the length of the hypotenuse also changes (while the extension of the inclined wall surface 212 is actually along the circumferential direction of the sleeve 20), that is, the arc length of the inclined wall surface 212 also changes. Therefore, the specific arc length and the angle between any inclined wall surface 212 and the axis of the sleeve 20 are not described and limited, and can be designed according to the opening range of the nozzle 10. It should be noted that the two ends of the slot 211, that is, the left and right ends as shown, Figure 1 As shown, the two ends of the slot 211 are close together and the sealing is achieved by the mutual abutment of the sealing strips 40 of the upper inclined wall surface 212 and the sealing strips 40 of the lower side wall surface.

[0032] Further, as shown, Figure 3 The inner side of the intersection of the two inclined wall surfaces 212 of the side wall surface of the slot 211 which is at an angle with the axis direction of the sleeve 20 is provided with an extension wall 213 extending along the axis direction of the sleeve 20 and along the radial direction of the sleeve 20, and the inner end of the extension wall 213, that is, the lower end as shown, Figure 3 The outer peripheral wall of the nozzle 10 and the inner peripheral wall of the sleeve 20 together define a closed cavity 100. Preferably, the cross section of the extension wall 213 is triangular. The abutting ends of the sealing strips 40 of the two inclined wall surfaces 212 abut on the two outer side surfaces of the extension wall 213, that is, the left and right ends as shown, Figure 3On the front side shown. In this embodiment of the invention, an extension wall 213 is designed at the intersection of the two inclined wall surfaces 212. This extension wall 213 can ensure the sealing performance of the sealed cavity 100 and reduce the problem of insufficient sealing at the intersection of the two sealing strips 40. It should be noted that in order to achieve a sealing sliding contact between the sealing strip 40 and the outer peripheral wall of the nozzle 10, the width of any sealing strip 40 is greater than its corresponding side wall surface. More specifically, the inner end of any sealing strip 40 protrudes from its corresponding side wall surface so that the inner protruding part of the sealing strip 40 can slide against the outer peripheral wall of the nozzle 10 inside the sleeve 20 and achieve a seal. There is no special limitation on the material of the sealing strip 40, and it can be a conventional sealing material.

[0033] In another preferred embodiment, one side wall of the slot 211 extends along the axial direction of the sleeve 20, and the other side wall is designed to be inclined at an angle to the axial direction of the sleeve 20. This side wall is different from the two inclined wall surfaces 212 at an angle in the above embodiment. This side wall is an inclined wall surface 212 (not shown) with one end away from the side wall surface along the axial direction of the sleeve 20 and the other end close to the side wall surface along the axial direction of the sleeve 20.

[0034] For the sleeve 20, in order to achieve connection with the drive end of the drive assembly 30 that drives its rotation relative to the nozzle 10, such as Figure 1 and Figure 2 and Figure 4 As shown, the sleeve 20 includes a cylindrical body 21 with a uniform inner and outer diameter throughout, and a connecting portion 22 integrally formed at one end of the cylindrical body 21, having an inner diameter identical to the inner diameter of the cylindrical body 21 but an outer diameter smaller than the outer diameter of the cylindrical body 21. The drive assembly 30 is connected to the outer peripheral wall of the connecting portion 22. Correspondingly, preferably, as shown... Figure 1 As shown, the drive assembly 30 includes a drive motor 31, a drive gear 32, and a transmission gear 33. The drive motor 31 is fixed to a mounting base 90 on the outer side of the connecting part 22, and its drive shaft is aligned with the sleeve 20 or the nozzle 10. The drive gear 32 is mounted on the drive shaft of the drive motor 31, and the transmission gear 33 is fixed to the outer peripheral wall of the connecting part 22 and meshes with the drive gear 32 for transmission. Alternatively, the drive end of the drive motor 31 can be equipped with a drive pulley, and the corresponding connecting part 22 can be equipped with a transmission pulley. The drive pulley and the transmission pulley are connected by a synchronous belt or chain.

[0035] To achieve the fixation of the nozzle 10, such as Figure 1As shown, the axial two ends of the spray pipe 10 in the embodiment of the present application extend out of the axial two ends of the sleeve 20 and are each provided with a fixing block 50, which is connected with the mounting base 80 together with the fixing seat 90. In order to realize the sealing of the connection between the fixing block 50 and the spray pipe 10, a sealing ring (not shown) is further provided in the two fixing blocks 50. Meanwhile, in order to facilitate the injection of the cleaning solvent into the solvent cavity 120 in the spray pipe 10 and the supply of the gas medium such as air into the sealed cavity 100, in the embodiment of the present application, as shown in Figure 1 and Figure 4 As shown, one end of the spray pipe 10, specifically the end opposite to the connecting portion 22, i.e. the left end as shown in Figure 1 or Figure 4 extends to the outside of the corresponding fixing block 50 and is connected with a second joint 70, which is connected to the cleaning solvent supply device and a switch such as an electromagnetic valve (not shown) can be arranged on the connecting pipeline therebetween. A first joint 60 is arranged on the fixing block 50 at the end opposite to the connecting portion 22, which is used to be connected with the gas source. The inner peripheral wall of the through hole for the spray pipe 10 to pass through and the outer peripheral wall surface of the spray pipe 10 extending out of the sleeve 20 define a communication cavity (not shown) between them in the fixing block 50, which is in communication with the sealed cavity 100. Similarly, a switch such as an electromagnetic valve (not shown) can be arranged on the connecting pipeline between the first joint 60 and the gas source. The electromagnetic valve is electrically connected with a controller (not shown) to realize the control of the on-off of the supply of the cleaning solvent and the gas medium. The control of the spraying time of the cleaning solvent is not limited, which can be specifically designed according to the size of the substrate by those skilled in the art.

[0036] The embodiment of the present application further provides a switching method of the spray pipe 10 structure of the above-mentioned embodiment, which comprises the following steps:

[0037] obtaining the size of the substrate;

[0038] driving the sleeve 20 to rotate a certain angle relative to the spray pipe 10 in the positive direction or the reverse direction based on the obtained size of the substrate to adjust the opening range of the spray holes 110, so that the cleaning solvent sprayed from the two spray holes 110 farthest apart can be sprayed into the two ends of the substrate;

[0039] injecting the cleaning solvent into the spray pipe 10 and spraying it out of the spray holes 110, while injecting the gas medium into the sealed cavity 100 to form a seal to prevent the cleaning solvent from being sprayed out of the spray holes 110 which are shielded by the sleeve 20 and the cleaning solvent in the spray pipe 10 from being completely sprayed out of the spray holes 110 which are not shielded under the action of the gas pressure.

[0040] To obtain the dimensions of the substrate, a camera device (not shown), such as an industrial CCD camera, can be installed. This device can be mounted on the aforementioned mounting base 80, and the camera device is electrically connected to the drive assembly 30, specifically the drive motor 31. After obtaining the dimensions of the substrate to be cleaned using the industrial CCD camera, the substrate size information is sent to the drive motor 31 of the drive assembly 30. The drive motor 31 drives the sleeve 20 to rotate relative to the nozzle 10 based on the obtained substrate dimensions (in the initial, exemplary state, the sleeve 20 does not obstruct any nozzles 110, such as...). Figure 4 or Figure 5 The sleeve 20 is rotated clockwise relative to the nozzle 10 at a suitable angle (to reduce the opening range of the nozzle 110) to adjust the opening range of the nozzle 110. The opening range of the nozzle 110 is adjusted so that the cleaning solvent sprayed from the two farthest nozzles 110 can fall within both ends of the substrate to achieve cleaning of the entire substrate. After adjusting the opening range of the nozzle 110, cleaning solvent is injected into the nozzle 10, and a gas medium is supplied into the sealed cavity 100 to ensure the sealing of the sealed cavity 100 and ensure that no cleaning solvent is sprayed out from the blocked nozzles 110. At the same time, due to the presence of gas in the gas sealed cavity 100, the gas pressure increases, which will apply gas pressure to the solvent chamber 120 in the nozzle 10 through the blocked nozzles 110, so that all the cleaning solvent in the nozzle 10 can be sprayed out from the unblocked nozzles 110, without causing cleaning solvent to remain and be wasted.

[0041] It should be understood that the specific embodiments described above are merely illustrative or explanatory of the principles of the invention and do not constitute a limitation thereof. Therefore, any modifications, equivalent substitutions, improvements, etc., made without departing from the spirit and scope of the invention should be included within the protection scope of the invention. Furthermore, the appended claims are intended to cover all variations and modifications falling within the scope and boundaries of the appended claims, or equivalent forms of such scope and boundaries.

Claims

1. A solvent spray nozzle structure for substrate cleaning, comprising a spray nozzle, wherein the spray nozzle is hollow to form a solvent cavity and a plurality of spray holes are spaced apart along its axial direction on the sidewall of the spray nozzle, characterized in that, It also includes a sleeve that is sealed around the outer periphery of the nozzle and can be driven to rotate relative to the nozzle. A slot is formed on the side wall of the sleeve, extending axially and having a length not less than the longest spacing of a plurality of the nozzle holes. Sealing strips are provided on both sides of the slot opening. Any of the sealing strips is in sealing and sliding contact with the outer peripheral wall of the nozzle. The inner peripheral wall of the sleeve, the outer peripheral wall of the nozzle, and the sealing strips together define a sealed cavity through which a gas medium can pass. The slot opening is designed to switch between not blocking any of the nozzle holes and blocking at least part of the nozzle holes during the driven rotation of the sleeve.

2. The nozzle structure according to claim 1, characterized in that, One side wall of the slot extends along the axial direction of the sleeve, while the other side wall is inclined at an angle to the axial direction of the sleeve.

3. The nozzle structure according to claim 1, characterized in that, One side wall of the slot extends along the axis of the sleeve, while the other side wall is designed to be inclined from the middle to both ends with a wider distance between them.

4. The nozzle structure according to claim 3, characterized in that, An extension wall is provided on the inner side of the intersection of two inclined wall surfaces of the side wall surface that are inclined at an angle to the axial direction of the sleeve. The extension wall extends along the axial direction of the sleeve and along the radial direction of the sleeve. The extension wall is in sealing and sliding contact with the outer peripheral wall of the nozzle. The extension wall, the sealing strip, the outer peripheral wall of the nozzle and the inner peripheral wall of the sleeve together define the sealed cavity.

5. The nozzle structure according to claim 4, characterized in that, The extended wall is triangular in shape.

6. The nozzle structure according to claim 2, characterized in that, The side wall surface, which is inclined at an angle to the axial direction of the sleeve, is arc-shaped.

7. The nozzle structure according to any one of claims 1-6, characterized in that, The sleeve includes a cylindrical body with the slot and a uniform diameter at all points, and a connecting portion integrally formed at one end of the cylindrical body, extending axially and having a smaller diameter than the cylindrical body. The connecting portion is provided with a drive assembly for driving the sleeve to rotate relative to the nozzle.

8. The nozzle structure according to claim 7, characterized in that, The drive assembly includes a transmission wheel fixedly connected to the connecting part, a drive motor disposed on one side of the transmission wheel, and a drive wheel disposed on the drive end of the drive motor. The transmission wheel and the drive wheel are connected in a transmission configuration.

9. The nozzle structure according to claim 8, characterized in that, Both ends of the nozzle extend beyond the axial ends of the sleeve and are fixed to the fixing blocks respectively. A connecting cavity is provided between the fixing block and the nozzle at the end opposite to the connecting part, which is connected to the sealed cavity. A first connector is provided on the fixing block, which is connected to the connecting cavity and the sealed cavity. A second connector is provided on the end of the nozzle opposite to the connecting part, which is connected to the solvent cavity.

10. The method for switching nozzle structures according to any one of claims 1-9, characterized in that, Includes the following steps: Obtain the dimensions of the substrate; The drive assembly drives the sleeve to rotate a certain angle relative to the nozzle in the forward or reverse direction based on the obtained substrate size to adjust the opening range of the nozzle, so that the cleaning solvent sprayed from the two nozzles furthest apart can be sprayed into both ends of the substrate. Cleaning solvent is injected into the nozzle and sprayed out from the nozzle hole. At the same time, a gas medium is injected into the sealed cavity to form a seal to prevent the cleaning solvent from being sprayed out from the part of the nozzle hole blocked by the sleeve. Under the action of gas pressure, all the cleaning solvent in the nozzle is sprayed out from the unblocked nozzle hole.

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