Mask frame and mask assembly

Abstract

The invention provides a mask plate frame and a mask plate assembly. The mask plate frame comprises a frame body, the middle of the frame body is provided with a vertically-through window, a frame is arranged around the window, and the upper side of the frame is provided with a combination face used for being connected with a mask plate; the supporting component comprises an extending part extending from the inner side of the frame to the interior of the window, a connecting part arranged at one end of the extending part and a supporting main body part arranged at the other end of the extending part, the connecting part is connected to the frame, and the supporting main body part is arranged on one side of the extending part in the width direction; the supporting body part is provided with a supporting plane not higher than the combination face, and the whole supporting component is not higher than the supporting plane. The flatness of the bang mask plate after net opening can be improved, the phenomenon that the substrate is scratched by the mask plate can be reduced, and the bang part can fully play a role in shielding the film covering material.

Description

Technical Field

[0001] This application relates to the field of semiconductor display panel manufacturing, and more particularly to a mask frame and a mask assembly. Background Technology

[0002] A metal photomask is a high-precision template made from a precision-machined metal sheet with a specific perforated pattern. It performs pattern transfer in processes such as thin-film deposition and etching, and is an important tool in the display panel industry. A metal photomask consists of a frame and a mask. The mask needs to be tensioned and welded to the frame using a mesh, which requires ensuring the flatness of the mesh and the stability of the pattern during the tensioning process. For metal photomasks with different opening arrangements, ensuring the flatness of the mesh and the stability of the pattern after tensioning is crucial.

[0003] Typically, when stretching a mask template with evenly distributed openings, a stretching machine uses clamps to evenly clamp the edges of the mask template along the longitudinal and transverse directions, simultaneously applying tension. The tension value is adjusted according to the material and thickness of the mask template to ensure consistent clamping force in symmetrical directions. Due to the tension, the opening pattern maintains shape stability and positional accuracy. At the same time, the flatness of the mask template is checked, the tension distribution of the clamps is fine-tuned, wrinkles are eliminated, and the flatness of the mask template is ensured to be within specifications. Finally, the mask template is fixed to the mask template frame by welding. However, for mask templates with irregularly arranged openings, especially for mask templates with large openings and large bangs, the conventional stretching method has little effect on reducing the amount of bangs sagging and wrinkles on the mask template, and it is difficult to improve the flatness of the mask template.

[0004] Given the aforementioned problems in the existing technology, there is an urgent need to provide a new solution. Summary of the Invention

[0005] To address the aforementioned technical problems in the prior art, this application provides a mask frame and a mask assembly, which can improve the flatness of a mask with bangs after the mesh is stretched, and especially improve the flatness of a mask with a large opening and large bangs.

[0006] The first aspect of this application provides a mask frame, the mask frame comprising: A frame, wherein the frame has a vertically continuous window in the center, a border surrounds the window, and the upper side of the border has a mating surface for connecting a mask plate; and At least one support component, the support component including a protrusion extending from the inside of the frame into the window, a connecting part disposed at one end of the protrusion, and a support body part disposed at the other end of the protrusion, the connecting part being connected to the frame, and the support body part being disposed on one side in the width direction of the protrusion. The supporting main body has a supporting plane that is not higher than the mating surface, and the supporting component as a whole is not higher than the supporting plane.

[0007] In the aforementioned solution, by setting a support component with a special structure within the frame, when the photomask is fixed by the mesh, the support body of the support component provides support for the bangs attached to the photomask, thereby reducing the amount of drooping and wrinkles of the bangs, improving the overall flatness of the photomask, and improving the overall adhesion between the photomask and the substrate during lamination. This not only reduces the occurrence of the photomask scratching the substrate, but also allows the bangs to fully play their role in blocking the lamination material.

[0008] Optionally, the height difference between the supporting plane and the mating surface shall not exceed 20 μm.

[0009] Optionally, the supporting plane is 10-20 μm lower than the mating surface.

[0010] In the aforementioned solution, by setting the support plane to be no higher than the bonding surface, when the support plane provides support for the bangs on the mask, the bangs will not be significantly higher than the rest of the mask. Therefore, the edges of the bangs are less likely to contact and scratch the substrate surface during lamination, which can further reduce the occurrence of substrate damage caused by the mask.

[0011] Optionally, a mounting base is provided on the inner side of the frame, the mounting base having a receiving portion extending toward the inside of the window, and the connecting portion being detachably and fixedly connected to the receiving portion.

[0012] In the aforementioned solution, the support component and the frame are formed independently, and the support component is fixed by setting a mounting seat on the inside of the frame. This helps to reduce the processing difficulty of the frame, facilitates the replacement of the support component, and enables fine-tuning of the installation state of the support component.

[0013] Optionally, the middle part of the supporting main body has a hollowed-out section.

[0014] In the aforementioned solution, by setting a hollow part on the main support body, the weight of the suspended end of the support component (i.e., the end where the main support body is located) is reduced, thereby reducing the occurrence of sagging deformation of the support component due to excessive weight of the suspended end.

[0015] Optionally, the thickness of the support member gradually decreases from one end near the frame to the other end away from the frame.

[0016] In the aforementioned solution, by setting the thickness of the support component to gradually decrease from the fixed end (i.e. the end near the frame) to the suspended end, the obstruction of the support component to the film material during film coating can be reduced, and the drooping deformation of the support component due to thinning can be prevented.

[0017] Optionally, it may have multiple of the aforementioned support components. The window contains the same number of dummy regions as the supporting component, each dummy region corresponding to an opening area of ​​the mask plate. The supporting components are respectively set in the corresponding virtual areas.

[0018] The mask frame in the aforementioned solution is suitable for mask panels with multiple opening areas and bangs. It should be understood that the mask panel with multiple opening areas and bangs can be composed of multiple small-sized mask panels spliced ​​together.

[0019] A second aspect of this application provides a mask assembly comprising: The mask frame provided in the first aspect above; and A photomask, the photomask having an opening area and a fringe extending into the opening area, The mask plate is fixedly joined to the mask plate frame, wherein the bangs are fixedly joined to the support member in the mask plate frame.

[0020] In the aforementioned solution, the bangs of the mask are supported by the supporting components in the mask frame, which significantly improves the drooping amount of the bangs and the surface wrinkles at the corresponding positions. The overall flatness of the mask in the mask assembly is high, and it fits well with the substrate during film coating, making it less likely to scratch the substrate, thus significantly improving the coating quality.

[0021] Optionally, the mask plate includes a mask body and multiple bangs sections. The mask body includes a solid part and multiple opening areas, with ribs between adjacent opening areas. The bangs sections are correspondingly disposed within the respective opening areas, with one side of each bang connected to the rib at the edge of the corresponding opening area, and the other side extending into the corresponding opening area. The mask body is flattened and its edges are engaged with the mating surface in the mask plate frame; The mask frame has multiple supporting components, and each supporting component corresponds one-to-one with one of the multiple opening areas, wherein, The supporting main body of the supporting component extends below the bangs within the corresponding opening area, and the bangs engage with the supporting plane of the supporting main body below. The portion of the support member other than the support body is located below the ribs at the edge of the solid portion and the corresponding opening area, and the orthographic projection of the portion other than the support body on the mask body does not fall into the opening area.

[0022] Optionally, the mask body and the bangs section are each formed independently. The bangs are flattened and one edge joins the rib, while the remaining edges join the support plane below the bangs.

[0023] In the aforementioned scheme, the mask body and the bangs section are independently planarized and then fixed to the mask frame. Therefore, the drooping and wrinkles of the mask at the bangs section are smaller, and the overall flatness of the mask is higher. Furthermore, the mask body and the bangs section adopt a separate design, and when they are independently stretched (planarized), they hardly affect each other, which significantly reduces the difficulty of stretching the mask.

[0024] Optionally, both the rib and the bangs have a half-cut portion at their joint, and the half-cut portion of the bangs and the half-cut portion of the rib are interlocked and fixedly connected.

[0025] In the aforementioned solution, by setting a semi-cut section at the junction of the rib and the bangs, the junction of the two has a flat surface consistent with the rest, which helps to improve the coating quality.

[0026] Optionally, the interlocking portion has a first mating part and a second mating part, and the bangs and the ribs are provided with interlocking tooth structures in the first mating part and / or the second mating part.

[0027] In the aforementioned solution, the toothed structure facilitates the positioning and alignment between the bangs and the ribs, reducing the difficulty of aligning the bangs with the ribs when fixing them, and improving production efficiency.

[0028] Furthermore, other additional aspects and advantages of this application will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of this application. Attached Figure Description

[0029] Figure 1 This is a schematic diagram of the mask frame structure in an embodiment of this application; Figure 2 This is a schematic diagram of the structure of the support component in the embodiments of this application; Figure 3 This is a schematic diagram of the structure of the mounting base provided on the mask plate frame in the embodiment of this application; Figure 4 This is an exploded view illustrating the structural composition of the mask assembly in the embodiments of this application; Figure 5 This is a schematic diagram of the structure of the mask assembly after it has been assembled in the embodiments of this application; Figure 6 This is a schematic diagram of the structure in this application embodiment where a half-cut section is provided at the junction of the mask body and the bangs section; Figure 7This is a schematic diagram of a mechanism in which a meshing tooth structure is provided at the junction of the mask body and the bangs in an embodiment of this application; Figure 8 This is a simulation diagram of the deformation of the mask assembly in the embodiment of this application, wherein a support component is provided at the bangs section ①, and no support component is provided at the bangs sections ② to ④; Figure 9 This is the simulation result of the flatness of the non-integrated mask plate at the bangs area in the embodiments of this application; Figure 10 This is the simulation result of the flatness of the integrated mask plate at the bangs area in the embodiment of this application; Figure 11 yes Figure 9 and Figure 10 The simulation point selection diagram shows that the simulation data points in the five rows shown are selected on the surface of the bangs.

[0030] The image is labeled as follows: 1: Frame; 11: Border; 111: Joint surface; 12: Window; 13: Mounting base; 131: Receiving part; 132: Mounting hole; 2: Supporting component; 21: Connecting part; 22: Protruding part; 23: Supporting main body part; 24: Hollowed-out part; 3: Mask plate; 31: Mask body; 311: Opening area; 312: Solid part; 313: Rib; 32: Bangles; 300: Half-cut section; 301: First mating section; 302: Second mating section; 303: Tooth structure. Detailed Implementation

[0031] This application will now be described more fully below with reference to the accompanying drawings. However, this application can be implemented in many different ways, and the terms "embodiments" and "implementations" as used herein are exemplary descriptions and are non-limiting examples of the fixtures or devices disclosed herein. Therefore, the scope of protection of this application should not be construed as limited to the embodiments described herein. For one purpose, these embodiments are provided herein to make this application more detailed and complete, and to fully convey the scope of this application to those skilled in the art.

[0032] It should be noted that in this document, when terms with directional indications such as "above," "upper side," "lower," and "lower side" are used, these terms are only used to explain the relative positional relationship between components or structures in a specific orientation (such as the fixture placement orientation shown in the attached figure). If the specific orientation changes, the directional indication will also change accordingly. However, when a component is said to be "above" another component or to have a structure, or when a component is said to be "on" another component, the term "above" does not necessarily have directional indication. It may only be used to indicate that there is a connection between the two components (direct connection, or the presence of an intermediary component), or to indicate that the structure is part of the component.

[0033] When terms such as “first” and “second” are used, although these terms can be used herein to describe various types of elements, these elements should not be limited by these terms. These terms are used to distinguish one element from another and do not indicate order, importance, or quantity limitation. Therefore, without departing from the teachings of this disclosure, the first element discussed below may be referred to as the second element.

[0034] When referring to an element having “one end” and “the other end”, the terms “one end” and “the other end” may refer to the two ends of an element in the length direction, such as a strip or rod, or may be used simply to distinguish two different parts of the element (whether physical ends or functional distinctions), and should not be limited to the understanding that the element must have a similar shape to a strip or rod.

[0035] In this application, "opening area" refers to a through opening used to define the deposition area or shielding area during the coating process. Correspondingly, "mask" in this application can represent various types of masks. For example, a "mask" can be a general-purpose mask (CMM) used to fabricate a common layer on an OLED display panel; in this case, the "coating" process can be more accurately understood as the process of "evaporating an organic material film layer." Alternatively, a "mask" can also be an encapsulation mask (CVD Mask) used to fabricate an encapsulation layer on an OLED display panel; in this case, the "coating" process can be more accurately understood as the process of "chemical vapor deposition" of encapsulation materials.

[0036] Furthermore, the technical solutions of the various embodiments of this application can be combined with each other, but this must be based on the ability of those skilled in the art to implement them. When the combination of technical solutions is contradictory or cannot be implemented, it should be considered that such a combination of technical solutions does not exist and is not within the scope of protection claimed in this application. The combination of technical solutions should be based on the premise of not exceeding the scope of disclosure in this application.

[0037] Furthermore, unless otherwise specified, the same reference numerals throughout this document denote the same objects.

[0038] In view of the current situation in the prior art where it is difficult to achieve high flatness when stretching a mask with bangs, the inventors of this application have conducted in-depth research and do not want to be bound by any theory. This application provides a mask frame and a mask assembly including the mask frame, which is intended to improve the above-mentioned performance of existing masks by improving the structure of the mask frame and the mask assembly.

[0039] This application first provides a mask frame, such as... Figure 1 As shown, the mask frame includes a frame 1 and a support component 2.

[0040] like Figure 1 As shown, the frame 1 has a vertically continuous window 12 in the middle, and a frame 11 surrounds the window 12. It should be understood that the window 12 is the passage area for the coating material. During the coating process, the coating material enters the surface of the mask through the window 12, and then a portion of the coating material is blocked by the mask. The remaining coating material passes through the opening area of ​​the mask and falls onto the surface of the substrate to form a film layer with a specific function. The upper side of the frame 11 has a mating surface 111 for connecting the mask.

[0041] like Figure 2 As shown, the support member 2 includes a protrusion 22 extending from the inside of the frame 11 into the window 12, a connecting part 21 disposed at one end of the protrusion 22, and a support body part 23 disposed at the other end of the protrusion 22, wherein the connecting part 21 is connected to the frame 11, and the support body part 23 is disposed on one side of the protrusion 22 in the width direction. Figure 2 (As shown in the image, the supporting main body 23 is on the left side of the protruding part 22).

[0042] In the above-mentioned mask frame, the supporting main body 23 has a supporting plane that is not higher than the joint surface 111, and the supporting component 2 as a whole is not higher than the supporting plane.

[0043] In a typical embodiment, the height difference between the support plane and the mating surface 111 does not exceed 20 μm.

[0044] In a preferred embodiment, the height difference between the supporting plane and the mating surface 111 is 10–20 μm. The height difference can be selected as 10 μm, 13 μm, 15 μm, 17 μm, 20 μm, etc.

[0045] In one embodiment, such as Figure 3As shown, a mounting base 13 is provided on the inner side of the frame 11. The mounting base 13 has a receiving portion 131 extending toward the inside of the window 12. The connecting portion 21 of the support member 2 is detachably and fixedly connected to the receiving portion 131.

[0046] In a typical embodiment, such as Figure 3 As shown, the receiving part 131 is provided with a mounting hole 132, and the connecting part 21 is provided with a corresponding connecting hole (not shown in the figure) that matches the mounting hole 132. The receiving part 131 and the connecting part 21 are detachably and fixedly connected by installing screws (not shown in the figure) into the aforementioned holes. During the installation of the support component 2, the state of the support component 2 can be finely adjusted by adjusting the tightness of the screws, so that the support body 23 provides a more suitable support height for the bangs of the mask plate and improves the flatness between the bangs and the rest of the mask plate.

[0047] In a typical embodiment, the mounting base 13 is integrally formed with the frame 1, which not only has high connection strength, but also eliminates the fitting gap caused by secondary assembly between the mounting base 13 and the frame 1, thus helping to reduce the installation accuracy deviation of the support components.

[0048] In one embodiment, such as Figure 3 As shown, the central part of the supporting main body 23 has a hollow portion 24. It should be understood that the hollow portion 24 can be configured as follows: Figure 3 The rectangular opening shown can, of course, be configured as an array of openings with multiple openings without departing from the original design intent of this application.

[0049] In one embodiment, the thickness of the support member 2 gradually decreases from one end near the frame 11 to the end away from the frame 11. That is, the thickness of the support member 2 tends to decrease in the direction from its fixed end to its suspended end. It should be understood that gradually reducing the thickness of the support member 2 in this way helps to reduce its obstruction to the coating material during lamination and can maintain high support strength, preventing the support member 2 from sagging and deforming due to thinning.

[0050] In this application, the number of support components 2 in the mask frame is set according to actual needs. There may be only one support component 2 or multiple support components 2.

[0051] In one embodiment, the mask frame includes only one support member 2. This mask frame is adapted to mount and support a mask having a unique irregular opening area, where the irregular opening area refers to the opening area in which the bangs are provided.

[0052] In a typical embodiment, such as Figure 1As shown, the mask frame includes multiple support members 2. Within this frame, the window 12 of the frame 1 contains the same number of dummy regions as the support members 2. Each dummy region corresponds to an opening area of ​​the mask. The support members are correspondingly positioned within their respective dummy regions. This mask is suitable for mounting and supporting masks with multiple irregularly shaped opening areas. It should be understood that there are no real boundary lines between the dummy regions within the window 12; rather, they are artificially defined imaginary boundaries. These imaginary boundaries are determined based on the corresponding positions of the opening areas of the mask to be mounted on the mask frame within the window 12. Figure 5 As shown, the mask plate 3 has four opening areas 311, and the window 12 of the mask plate frame is divided into four virtual areas accordingly.

[0053] Furthermore, embodiments of this application also provide a mask assembly. For example... Figure 5 As shown, the mask assembly includes the mask frame described in the foregoing embodiments, and also includes a mask 3. The mask 3 has an opening area 311 and a fringe portion 32 extending into the opening area 311. The mask 3 is fixedly joined to the mask frame, wherein the fringe portion 32 is fixedly joined to a support member 2 within the mask frame. Specifically, the edge of the mask 3 is fixedly connected to the mating surface 111 on the frame 11, and the edge of the fringe portion 32 is fixedly connected to the support plane of the support body portion 23 in the support member 2.

[0054] It should be understood that before fixing the mask 3 to the mask frame, it needs to be planarized. The planarization process usually involves using a wire mesh stretching process to tighten and flatten the mask 3. In addition, the mask 3 and the mask frame are usually fixedly connected or joined by welding.

[0055] In a typical embodiment, such as Figure 4 and Figure 5As shown, the mask plate 3 includes a mask body 31 and a plurality of bangs 32, wherein: the mask body 31 includes a solid portion 312 and a plurality of opening areas 311, with ribs 313 between adjacent opening areas 311, and the bangs 32 are correspondingly disposed in the corresponding opening areas 311, one side of the bangs 32 being connected to the rib 313 at the edge of the corresponding opening area 311, and the other side extending into the corresponding opening area 311. In the mask plate assembly, after the mask body 31 is planarized, its edge (solid portion 312) is joined with the mating surface 111 in the mask plate frame. The mask frame has multiple support members 2, and the multiple support members 2 correspond one-to-one with multiple opening areas 311 in the mask 3. The support body 23 of the support member 2 extends to the lower part of the bangs 32 in the corresponding opening area 311. The bangs 32 is engaged with the support plane of the support body 23 below it. The part of the support member 2 other than the support body 23 (including the connecting part 21 and the protruding part 22) is located below the solid part 312 and the rib 313 at the edge of the corresponding opening area 311. Furthermore, the orthographic projection of the part other than the support body 23 on the mask body 31 does not fall into the opening area 311, so as to avoid obstructing the coating material during the coating process.

[0056] In one embodiment, the mask plate 3 has only one opening area 311, the periphery of which is a solid portion 312, and a bangs portion 32 within the opening area 311, which is connected to the solid portion 312 at the edge of the opening area 311. The mask plate frame includes only one support member 2, the support body portion 23 of which extends below the bangs portion 32 and is fixedly connected to it, the rest of the support member 2 is below the solid portion 312, and the orthographic projection of the rest of the support member 2 onto the solid portion 312 does not fall within the opening area 311.

[0057] In one specific embodiment, the edge of the support member 2 is recessed inward by 1 to 10 mm compared to the edge of the opening area 311, to ensure that the support member 2 is completely covered by the mask 3, while leaving a certain margin. This design can largely avoid obstructing the laminating material during the lamination process.

[0058] It should be understood that the mask body 31 and the bangs 32 can be molded as one piece or molded independently (that is, the two are made separately).

[0059] In a typical embodiment, such as Figure 4 As shown, the mask body 31 and the bangs section 32 are each formed independently. After the bangs section 32 is flattened (flattened by applying tension), one edge of the bangs section 32 is joined to the corresponding rib 313, and the remaining edges of the bangs section 32 are joined to the support plane of the supporting body section 23 below it. The aforementioned joining method is usually welding.

[0060] Figure 9 Simulation results of flatness at the bangs section 32 in a mask assembly (non-integrated mask) fabricated separately for the mask body 31 and the bangs section 32. Figure 10 The simulation results show the flatness of the bangs section 32 in the mask assembly (one-piece mask) where the mask body 31 and the bangs section 32 are integrally formed. The simulation data points in rows 1 to 5 are referenced as follows: Figure 11 As shown in the diagram. The comparison shows that the non-integrated mask exhibits significantly better flatness than the integrated mask because its bangs 32 undergoes separate planarization processing.

[0061] In a typical embodiment, such as Figure 6 As shown, both the rib 313 and the bangs portion 32 have a half-cut portion 300 at their joint. The half-cut portion 300 of the bangs portion 32 and the half-cut portion 300 of the rib 313 are interlocked and fixedly connected. It should be understood that the half-cut portion 300 refers to the remaining part after half of the material thickness has been removed by etching or laser cutting.

[0062] In this application, the interlocking part of the rib 313 and the half-cut part 300 of the bangs part 32 has a first docking part 301 and a second docking part 302, and the bangs part 32 and the rib 313 are provided with interlocking tooth structures 303 in the first docking part 301 and / or the second docking part 302.

[0063] In a typical embodiment, such as Figure 7 As shown, meshing tooth structures 303 are provided only in the second docking portion 302.

[0064] In another embodiment, the meshing tooth structure 303 is provided in the first docking portion 301.

[0065] In another embodiment, the meshing tooth structure 303 is provided in both the first docking portion 301 and the second docking portion 302.

[0066] The above description is merely a specific implementation of the embodiments of this application, but the protection scope of the embodiments of this application is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in the embodiments of this application should be included within the protection scope of the embodiments of this application. Therefore, the protection scope of the embodiments of this application should be determined by the protection scope of the claims.

Claims

1. A mask frame, characterized by, The application relates to a mask frame and a mask. The mask frame comprises a frame body, wherein a window is formed in the middle of the frame body, a frame is formed around the window, and a connecting surface for connecting a mask is formed on the upper side of the frame. The mask frame further comprises at least one supporting component, wherein the supporting component comprises an extension part extending from the inner side of the frame to the window, a connecting part arranged at one end of the extension part, and a supporting body part arranged at the other end of the extension part, the connecting part is connected to the frame, and the supporting body part is arranged on one side of the extension part in the width direction. The supporting body part has a supporting surface which is not higher than the connecting surface, and the whole supporting component is not higher than the supporting surface. The height difference between the supporting surface and the connecting surface is not more than 20 microns.

2. The mask frame of claim 1, wherein, The supporting surface is 10-20 microns lower than the connecting surface.

3. The mask frame of claim 2, wherein, A mounting seat is arranged on the inner side of the frame, the mounting seat has a receiving part extending towards the window, and the connecting part is detachably fixedly connected to the receiving part.

4. The reticle frame of claim 1, wherein, The middle part of the supporting body part has a hollow part.

5. The reticle frame of claim 1, wherein, The thickness of the supporting component gradually decreases from the end close to the frame to the end far from the frame.

6. The reticle frame of claim 1, wherein, The mask frame has a plurality of supporting components, 7. The reticle frame of any of claims 1 to 6, wherein, The window comprises a plurality of dummy areas in the same number as the supporting components, each dummy area corresponds to an opening area of the mask, And the supporting components are arranged in the corresponding dummy areas one by one. The application relates to a mask frame and a mask.

8. A mask assembly, characterized by The mask frame comprises a frame body, wherein a window is formed in the middle of the frame body, a frame is formed around the window, and a connecting surface for connecting a mask is formed on the upper side of the frame. The mask frame further comprises at least one supporting component, wherein the supporting component comprises an extension part extending from the inner side of the frame to the window, a connecting part arranged at one end of the extension part, and a supporting body part arranged at the other end of the extension part, the connecting part is connected to the frame, and the supporting body part is arranged on one side of the extension part in the width direction. The supporting body part has a supporting surface which is not higher than the connecting surface, and the whole supporting component is not higher than the supporting surface. The height difference between the supporting surface and the connecting surface is not more than 20 microns. The supporting surface is 10-20 microns lower than the connecting surface.

9. The reticle assembly of claim 8, wherein, A mounting seat is arranged on the inner side of the frame, the mounting seat has a receiving part extending towards the window, and the connecting part is detachably fixedly connected to the receiving part. The middle part of the supporting body part has a hollow part. The thickness of the supporting component gradually decreases from the end close to the frame to the end far from the frame. The mask frame has a plurality of supporting components, The window comprises a plurality of dummy areas in the same number as the supporting components, each dummy area corresponds to an opening area of the mask, 10. The reticle assembly of claim 9, wherein, And the supporting components are arranged in the corresponding dummy areas one by one. The application relates to a mask frame and a mask.

11. The reticle assembly of claim 10, wherein, The mask frame comprises a frame body, wherein a window is formed in the middle of the frame body, a frame is formed around the window, and a connecting surface for connecting a mask is formed on the upper side of the frame.

12. The reticle assembly of claim 11, wherein, The mask frame further comprises at least one supporting component, wherein the supporting component comprises an extension part extending from the inner side of the frame to the window, a connecting part arranged at one end of the extension part, and a supporting body part arranged at the other end of the extension part, the connecting part is connected to the frame, and the supporting body part is arranged on one side of the extension part in the width direction. The supporting body part has a supporting surface which is not higher than the connecting surface, and the whole supporting component is not higher than the supporting surface. The height difference between the supporting surface and the connecting surface is not more than 20 microns. The supporting surface is 10-20 microns lower than the connecting surface. A mounting seat is arranged on the inner side of the frame, the mounting seat has a receiving part extending towards the window, and the connecting part is detachably fixedly connected to the receiving part. The middle part of the supporting body part has a hollow part. The thickness of the supporting component gradually decreases from the end close to the frame to the end far from the frame. The mask frame has a plurality of supporting components, The window comprises a plurality of dummy areas in the same number as the supporting components, each dummy area corresponds to an opening area of the mask, And the supporting components are arranged in the corresponding dummy areas one by one. The application relates to a mask frame and a mask. The mask frame comprises a frame body, wherein a window is formed in the middle of the frame body, a frame is formed around the window, and a connecting surface for connecting a mask is formed on the upper side of the frame. The mask frame further comprises at least one supporting component, wherein the supporting component comprises an extension part extending from the inner side of the frame to the window, a connecting part arranged at one end of the extension part, and a supporting body part arranged at the other end of the extension part, the connecting part is connected to the frame, and the supporting body part is arranged on one side of the extension part in the width direction. The supporting body part has a supporting surface which is not higher than the connecting surface, and the whole supporting component is not higher than the supporting surface. The height difference between the supporting surface and the connecting surface is not more than 20 microns. The supporting surface is 10-20 microns lower than the connecting surface. A mounting seat is arranged on the inner side of the frame, the mounting seat has a receiving part extending towards the window, and the connecting part is detachably fixedly connected to the receiving part. The middle part of the supporting body part has a hollow part. The thickness of the supporting component gradually decreases from the end close to the frame to the end far from the frame. The mask frame has a plurality of supporting components, The window comprises a plurality of dummy areas in the same number as the supporting components, each dummy area corresponds to an opening area of the mask, And the supporting components are arranged in the corresponding dummy areas one by one. The application relates to a mask frame and a mask. The mask frame comprises a frame body, wherein a window is formed in the middle of the frame body, a frame is formed around the window, and a connecting surface for connecting a mask is formed on the upper side of the frame. The mask frame further comprises at least one supporting component, wherein the supporting component comprises an extension part extending from the inner side of the frame to the window, a connecting part arranged at one end of the extension part, and a supporting body part arranged at the other end of the extension part, the connecting part is connected to the frame, and the supporting body part is arranged on one side of the extension part in the width direction. The supporting body part has a supporting surface which is not higher than the connecting surface, and the whole supporting component is not higher than the supporting surface. The height difference between the supporting surface and the connecting surface is not more than 20 microns. The supporting surface is 10-20 microns lower than the connecting surface. A mounting seat is arranged on the inner side of the frame, the mounting seat has a receiving part extending towards the window, and the connecting part is detachably fixedly connected to the receiving part. The middle part of the supporting body part has a hollow part. The thickness of the supporting component gradually decreases from the end close to the frame to the end far from the frame. The mask frame has a plurality of supporting components, The window comprises a plurality of dummy areas in the same number as the supporting components, each dummy area corresponds to an opening area of the mask, And the supporting components are arranged in the corresponding dummy areas one by one.

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