Lamp room assembly and lamp room optical system thereof

Abstract

The invention discloses a lamp chamber assembly and a lamp chamber optical system thereof, and belongs to the technical field of gas discharge lamps, the lamp chamber assembly comprises a laser, a concave lens, a reflector, a dichroscope and a reflective bowl, the concave lens expands a laser beam and irradiates the reflector, the optical center of the concave lens coincides with a reference optical axis, and the reflector turns the laser beam by 90 degrees and reflects the laser beam; the reflected laser beam is set as a reflecting light axis, the reflecting mirror reflects the laser beam to the dichroscope, the dichroscope refracts the laser beam and then irradiates the reflecting bowl, and the dichroscope and the reflecting bowl are located on the reflecting light axis; the center of the reflector is provided with a hole, and the laser beam irradiated at the hole passes through the hole, so that the laser beam reflected to the dichroscope forms a hollow beam. According to the invention, the hole is formed in the reflector to guide the laser beam, so that the reflected laser beam forms a hollow beam, direct irradiation on the cooling cap on the anode end is reduced, and the temperature of the cooling cap and the anode end is reduced.

Description

Technical Field

[0001] This invention relates to the field of gas discharge lamp technology, and more particularly to a lamp chamber assembly and its lamp chamber optical system. Background Technology

[0002] Laser-driven gas discharge lamps, hereinafter referred to as gas discharge lamps, are high-energy-density continuous-spectrum light sources widely used in fields such as semiconductor defect detection. Gas discharge lamps use a high-power laser beam to provide energy to maintain plasma emission, offering advantages such as high optical power, high ultraviolet light content, and long lifespan. Because these gas discharge lamps operate in a high-temperature, high-pressure environment, the laser beam maintains the emission, concentrating the plasma within a smaller spatial area, resulting in a higher temperature at the plasma center. Furthermore, since these high-pressure gas discharge lamps are installed vertically, with the anode end facing upwards, the hot airflow inside the lamp causes the anode and surrounding lamp housing to reach even higher temperatures. Therefore, a cooling system is required for proper operation; otherwise, the performance and lifespan of the gas discharge lamp will be affected.

[0003] In existing technologies, in order to reduce the temperature of the anode end and reduce the laser irradiation on the anode end lamp cap, a local coating is applied to the dichroic mirror to block the laser. However, the local coating process is difficult and costly, and it can also lead to uneven mirror surface temperature, which cannot effectively solve the problem of excessively high anode end temperature. Summary of the Invention

[0004] The present invention aims to provide a lamp chamber assembly and its lamp chamber optical system to reduce the laser radiation irradiating the anode of the gas discharge lamp and avoid excessively high anode temperatures.

[0005] To achieve the above objectives, the technical solution of the present invention is as follows: a lamp chamber assembly, comprising: a laser, a concave lens, a reflector, a dichroic mirror, and a reflector bowl. The laser emits a laser beam, with the laser beam emitted by the laser as the reference optical axis. The concave lens expands the laser beam and illuminates the reflector. The optical center of the concave lens coincides with the reference optical axis. The reflector deflects the laser beam by 90°. The reflected laser beam is taken as the reflecting optical axis. The reflector reflects the laser beam to the dichroic mirror, and the dichroic mirror refracts the beam to illuminate the reflector bowl. The dichroic mirror and the reflector bowl are located on the reflecting optical axis. A hole is formed in the center of the reflector, through which the laser beam passes, so that the laser beam reflected to the dichroic mirror forms a hollow beam.

[0006] In a preferred embodiment of the present invention, the laser emits a laser beam, the laser beam including a main beam, a first branch beam and a second branch beam. The main beam is emitted from the laser, expanded by the concave lens, and irradiates the reflector. At the reflector, the first branch beam is reflected along its original path to the dichroic mirror, and the second branch beam passes through the aperture.

[0007] In a preferred embodiment of the present invention, the first branch beam is a hollow beam that is offset from the anode of the gas discharge lamp.

[0008] In a preferred embodiment of the present invention, the hole is a straight hole, the hole and the mirror surface of the reflector are at an angle of 45°, and the hole is located on the reference optical axis.

[0009] In a preferred embodiment of the present invention, the aperture is provided with a magnification angle, which is the same as the diffusion angle of the laser beam.

[0010] The lamp chamber optical system includes any of the lamp chamber components described above. The lamp chamber optical system further includes a gas discharge lamp, which is disposed in the reflector bowl along the direction of the reflected optical axis. The end of the gas discharge lamp near the reflector is the anode, and the end away from the reflector is the cathode. The center of the gas discharge lamp coincides with the first focus of the ellipsoid of the reflector bowl.

[0011] In a preferred embodiment of the present invention, the lamp chamber optical system further includes a cooling assembly, which includes a cooling plate disposed on the back of the reflector or on the inner wall of the housing. The laser beam passes through the hole and irradiates the cooling plate, which is connected to a water-cooling assembly.

[0012] In a preferred embodiment of the present invention, the cooling assembly further includes a cooling cap, which is fitted onto the anode end of the gas discharge lamp and cools the center of the gas discharge lamp.

[0013] In a preferred embodiment of the present invention, the cooling cap is a hollow cone structure that is narrow at the top and wide at the bottom, and the bottom diameter of the cooling cap is the same as the maximum lateral diameter of the gas discharge lamp.

[0014] In a preferred embodiment of the present invention, an air outlet is provided at the bottom edge of the cooling cap, and the air outlet is directed at the gas discharge lamp for air cooling.

[0015] The present invention proposes a lamp chamber assembly and its optical system, which guides the laser beam by opening a hole in the reflector, so that the laser beam reflected by the dichroic mirror forms a hollow beam that just does not irradiate the anode end of the gas discharge lamp, thereby reducing direct irradiation of the cooling cap on the anode end and lowering the temperature of the cooling cap and the anode end; at the same time, the cooling cap and cooling plate cool and dissipate heat, keeping the gas discharge lamp within a safe temperature range during operation, improving the reliability of the gas discharge lamp and extending its service life.

[0016] To make the above-mentioned features and advantages of the invention more apparent and understandable, specific embodiments are described below, and detailed descriptions are provided in conjunction with the accompanying drawings. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the lamp chamber optical system of the present invention.

[0018] Figure 2 This is a schematic diagram of the reflector of the present invention.

[0019] 1-Lamp chamber optical system; 11-Lamp chamber assembly; 111-Laser; 112-Concave lens; 113-Reflector; 1131-Aperture; 114-Dichroic mirror; 115-Reflector bowl; 12-Gas discharge lamp; 121-Lamp housing; 1211-Discharge chamber; 1212-First side tube; 1213-Second side tube; 122-First lamp post; 123-Second lamp post; 124-Anode; 125-Cathode; 126-Sealing component; 13-Cooling assembly; 131-Cooling cap; 132-Cooling plate; 2-Laser beam; 21-Main beam; 22-First branch beam; 23-Second branch beam.

[0020] In the accompanying drawings, similar reference numerals refer to the same elements. Detailed Implementation

[0021] To make the objectives and technical solutions of the embodiments of the present invention clearer, the following will be described in conjunction with the accompanying drawings of the embodiments of the present invention. Figure 1 -Appendix Figure 2 The technical solutions of the embodiments of the present invention will be clearly and completely described herein. Obviously, the described embodiments are only a part of the embodiments of the present invention, not all of them. Based on the described embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0022] In this invention, for clarity, the following description is provided: The observer faces the attached... Figure 1 Upon observation, the end of the gas discharge lamp closest to the reflector is the "anode end," and the end furthest from the reflector is the "cathode end." The side of the reflector facing the laser is the "front end," and the side facing away from the laser is the "back end." The above description is only for the purpose of clearly describing the present invention and is not intended to indicate or imply that the structures or components referred to must have a specific orientation or be constructed in a specific orientation, and therefore should not be construed as limiting the present invention.

[0023] like Figure 1As shown, the lamp chamber optical system 1 is a device that uses laser to maintain the emission of gas plasma. The lamp chamber optical system 1 includes a lamp chamber assembly 11, a gas discharge lamp 12, and a cooling assembly 13. The lamp chamber assembly 11 is disposed inside a lamp box (not shown in the figure), and the gas discharge lamp 12 is disposed in the lamp chamber assembly 11. The lamp chamber assembly 11 emits a laser beam 2, which is reflected and focused before illuminating the gas discharge lamp 12, causing the gas discharge lamp 12 to emit light. The light emitted by the gas discharge lamp 12 is then reflected and output. The cooling assembly 13 is used to cool the anode end of the gas discharge lamp 12.

[0024] like Figure 1 As shown, the lamp chamber assembly 11 includes a laser 111, a concave lens 112, a reflector 113, a dichroic mirror 114, and a reflector bowl 115. The laser 111 emits a laser beam 2. The laser beam 2 emitted by the laser 111 is used as the reference optical axis. The concave lens 112 and the reflector 113 are sequentially arranged on the reference optical axis. The optical center of the concave lens 112 coincides with the reference optical axis. The concave lens 112 diverges the laser beam 2 and illuminates the reflector 113. The mirror surface of the reflector 113 forms a 45° angle with the reference optical axis. The incident point of the laser beam 2 coincides with the center of the reflector 113. The reflector 113 deflects the laser beam 2 by 90°. Let the reflected laser beam 2 be the reflected optical axis. The dichroic mirror 114 and the reflector bowl 115 are sequentially arranged along the reflector... The light-emitting axis is set such that the dichroic mirror 114 forms a 45° angle with the reflected light axis, and the tilt direction of the dichroic mirror 114 is opposite to the tilt direction of the reflector 113. The dichroic mirror 114 receives the laser beam 2 reflected from the reflector 113 and refracts it onto the reflector bowl 115. The reflector bowl 115 receives the laser beam 2 projected from the dichroic mirror 114 and reflects it onto the gas discharge lamp 12, exciting the gas discharge lamp 12 to emit light. The gas discharge lamp 12 is installed at the center of the reflector bowl 115 along the reflected light axis, with the end closer to the reflector 113 being the anode and the end farther from the reflector 113 being the cathode. The inner surface of the reflector bowl 115 is an ellipsoid, and the center of the gas discharge lamp 12 coincides with the first focal point of the ellipsoid of the reflector bowl 115.

[0025] Specifically, such as Figure 2As shown, a hole 1131 is formed at the center of the reflector 113. The hole 1131 is a straight hole, and the angle between the hole 1131 and the mirror surface of the reflector 113 is 45°. The hole 1131 is located on the reference optical axis. When the laser beam 2 shines on the reflector 113, the laser beam 2 shining on the hole 1131 is not reflected, but passes through the hole 1131. The laser beam 2 shining on other parts of the reflector 113 is reflected along the original path to the dichroic mirror 114. The dichroic mirror 114 then selectively transmits the light to the reflector bowl 115. Because the laser beam 2 at the hole 1131 is not reflected, the reflected laser beam 2 forms a hollow beam, which just does not shine on the anode end of the gas discharge lamp 12.

[0026] Specifically, the size of the aperture 1131 is determined according to the optical path space size.

[0027] Furthermore, the aperture 1131 can also be designed with an amplification angle that is consistent with the divergence angle of the laser beam 2.

[0028] like Figure 1 As shown, the laser beam 2 includes a main beam 21, a first branch beam 22, and a second branch beam 23. The main beam 21 is emitted from the laser 111 and expanded by the concave lens 112. The main beam 21 is divided into a first branch beam 22 and a second branch beam 23 at the reflecting mirror 113. The first branch beam 22 is reflected to the dichroic mirror 114 along the original path, and the second branch beam 23 passes through the aperture 1131.

[0029] Specifically, the main beam 21 emitted by the laser 111 and the second branch beam 23 pass through the hole 1131, causing the reflected first branch beam 22 to form a hollow beam. After reflection, the beam is offset from the anode of the gas discharge lamp 12, thus preventing the laser beam 2 from shining directly on the anode of the gas discharge lamp 12 and reducing the temperature of the anode of the gas discharge lamp 12.

[0030] like Figure 1 As shown, the gas discharge lamp 12 is arranged in the reflector bowl 115 along the reflective optical axis. The end of the gas discharge lamp 12 closer to the reflector 113 is the anode end, and the end farther from the reflector 113 is the cathode end. The gas discharge lamp 12 includes a lamp housing 121, a first lamp post 122, and a second lamp post 123. The lamp housing 121 has a symmetrical hollow structure. The first lamp post 122 and the second lamp post 123 are arranged inside the lamp housing 121. The first lamp post 122 and the second lamp post 123 are located on the axis of the lamp housing 121. The first lamp post 122 is located at the anode end and is the anode lamp post, and the second lamp post 123 is located at the cathode end and is the cathode lamp post.

[0031] like Figure 1 As shown, the gas discharge lamp 12 further includes an anode 124 and a cathode 125. The anode 124 and the cathode 125 are located in the middle of the lamp housing 121. The anode 124 is disposed at the end of the first lamp post 122, and the cathode 125 is disposed at the end of the second lamp post 123. The anode 124 and the cathode 125 are arranged facing each other.

[0032] like Figure 1 As shown, the gas discharge lamp 12 also includes a sealing member 126. The sealing member 126 is respectively disposed at both ends of the lamp housing 121. The sealing member 126 is fixedly connected to the other end of the first lamp post 122 and the second lamp post 123 respectively. The sealing member 126 is used to seal the connection position between the first lamp post 122, the second lamp post 123 and the lamp housing 121, balance the coefficient of thermal expansion between the first lamp post 122, the second lamp post 123 and the lamp housing 121, so as to maintain the seal of the gas discharge lamp 12 in both lit and unlit states and prevent the gas filled in the lamp housing 121 from leaking.

[0033] The lamp housing 121 includes a discharge chamber 1211, a first side tube 1212, and a second side tube 1213. The discharge chamber 1211 is formed by surrounding the center of the lamp housing 121. The discharge chamber 1211 is filled with a gas of a specific composition and pressure. The first side tube 1212 and the second side tube 1213 are respectively connected to the two sides of the discharge chamber 1211. The first lamp post 122 passes through the first side tube 1212 and extends out along the direction of the discharge chamber 1211, so that the anode 125 is located in the discharge chamber 1211. The second lamp post 123 passes through the second side tube 1213 and extends out along the direction of the discharge chamber 1211, so that the cathode 125 is located in the discharge chamber 1211.

[0034] like Figure 1As shown, the cooling assembly 13 includes a cooling cap 131 and a cooling plate 132. The cooling cap 131 is fitted onto the anode end of the gas discharge lamp 12 and is connected to the sealing member 126. The cooling cap 131 wraps around the first side tube 1212 and provides air cooling to the anode end of the gas discharge lamp 12 to prevent overheating. The cooling plate 132 is disposed on the inner wall of the lamp box or fixed to the back of the reflector 113. The cooling plate 132 is connected to a water cooling assembly (not shown in the figure). The second branch beam 23 passes through the hole 1131 and irradiates the cooling plate 132, which absorbs and performs water cooling. Specifically, the hollow beam, i.e., the first branch beam 22, is staggered to irradiate the cooling cap 131, which can prevent the direct irradiation of the cooling cap 131 from transferring heat to the anode of the gas discharge lamp 12, thereby reducing the temperature of the cooling cap 131 and the anode of the gas discharge lamp 12. In another embodiment, the cooling cap 131 blocks the first branch beam 22 reflected from the dichroic mirror 114 from irradiating the anode of the gas discharge lamp 12.

[0035] Specifically, the cooling cap 131 is a hollow cone structure that is narrow at the top and wide at the bottom, and the bottom diameter of the cooling cap 131 is the same as the maximum lateral diameter of the discharge chamber 1211.

[0036] Specifically, high-purity nitrogen gas is introduced into the cooling cap 131, and an air outlet is opened at the bottom edge of the cooling cap 131 to cool the discharge chamber 1211 by air cooling.

[0037] The present invention proposes a lamp chamber assembly and its optical system, which guides the laser beam by opening a hole in the reflector, so that the laser beam reflected by the dichroic mirror forms a hollow beam that just does not irradiate the anode end of the gas discharge lamp, thereby reducing direct irradiation of the cooling cap on the anode end and lowering the temperature of the cooling cap and the anode end; at the same time, the cooling cap and cooling plate cool and dissipate heat, keeping the gas discharge lamp within a safe temperature range during operation, improving the reliability of the gas discharge lamp and extending its service life.

[0038] Although the present invention has been disclosed above by way of embodiments, it is not intended to limit the present invention. Anyone skilled in the art can make some modifications and refinements without departing from the spirit and scope of the present invention. Therefore, the scope of protection of the present invention shall be determined by the appended claims.

Claims

1. A lamp chamber assembly, characterized in that, include: The system comprises a laser, a concave lens, a reflector, a dichroic mirror, and a reflector bowl. The laser emits a laser beam, which serves as the reference optical axis. The concave lens expands the laser beam and projects it onto the reflector. The optical center of the concave lens coincides with the reference optical axis. The reflector deflects the laser beam by 90°. The reflected laser beam is taken as the reflection optical axis. The reflector reflects the laser beam to the dichroic mirror, which refracts it and projects it onto the reflector bowl. The dichroic mirror and the reflector bowl are located on the reflection optical axis. A hole is formed in the center of the reflector, through which the laser beam passes, creating a hollow beam reflected onto the dichroic mirror.

2. A lamp chamber assembly as described in claim 1, characterized in that, The laser emits a laser beam, which includes a main beam, a first branch beam, and a second branch beam. The main beam is emitted from the laser, expanded by the concave lens, and illuminates the reflector. At the reflector, the first branch beam is reflected along its original path to the dichroic mirror, and the second branch beam passes through the aperture.

3. A lamp chamber assembly as described in claim 2, characterized in that, The aperture has an angle of 45° with the mirror surface of the reflector, and the aperture is located on the reference optical axis.

4. A lamp chamber assembly as described in claim 3, characterized in that, The aperture has a magnification angle, which is the same as the diffusion angle of the laser beam.

5. A lamp chamber assembly as described in claim 3, characterized in that, The first branch beam is a hollow beam that is offset from the anode of the gas discharge lamp.

6. A lamp housing optical system, comprising a lamp housing assembly as described in any one of claims 1-5, characterized in that, The optical system of the lamp chamber also includes a gas discharge lamp, which is arranged in the reflector bowl along the direction of the reflected optical axis. The end of the gas discharge lamp closer to the reflector is the anode, and the end farther from the reflector is the cathode. The center of the gas discharge lamp coincides with the first focus of the ellipsoid of the reflector bowl.

7. The lamp chamber optical system as described in claim 6, characterized in that, The lamp chamber optical system also includes a cooling assembly, which includes a cooling plate disposed on the back of the reflector or on the inner wall of the housing. The laser beam passes through the hole and irradiates the cooling plate, which is connected to a water-cooling assembly.

8. The lamp chamber optical system as described in claim 7, characterized in that, The cooling assembly also includes a cooling cap, which is fitted onto the anode end of the gas discharge lamp and cools the gas discharge lamp.

9. The lamp chamber optical system as described in claim 8, characterized in that, The cooling cap is a hollow cone structure that is narrow at the top and wide at the bottom, and the bottom diameter of the cooling cap is the same as the maximum lateral diameter of the gas discharge lamp.

10. The lamp chamber optical system as described in claim 9, characterized in that, An air outlet is provided at the bottom edge of the cooling cap, and the air outlet is directed at the center of the gas discharge lamp for air cooling.

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