Claw type rotor structure

By designing an axisymmetric claw rotor structure, the problem of particle accumulation in claw vacuum pumps during reverse rotation is solved, achieving self-cleaning function and improving the operational stability and maintenance convenience of the equipment.

CN121952869APending Publication Date: 2026-05-01BEIJING JINGYI AUTOMATION EQUIP CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2026-02-25
Publication Date
2026-05-01

AI Technical Summary

Technical Problem

Existing claw vacuum pump rotors cannot replicate the effective working process of forward rotation when rotating in reverse, leading to particle accumulation, affecting pumping efficiency and equipment lifespan, and resulting in high maintenance costs.

Method used

Design an axisymmetric claw rotor structure so that it has the same working process in both forward and reverse rotation, and remove particles in the pump chamber through bidirectional airflow disturbance to achieve self-cleaning function.

Benefits of technology

It enables efficient removal of particles from the pump chamber without disassembling the pump body, reducing maintenance complexity, improving equipment stability and service life, and is suitable for high-cleanliness industrial scenarios.

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Abstract

The invention discloses a claw type rotor structure. The claw type rotor structure comprises a first rotor and a second rotor, the molded line combination of the first rotor comprises a cycloid ab, a bottom arc bc, a cycloid cd, a top arc de, a straight line ef, a section arc fg, a straight line gh and a top arc ha which are sequentially connected end to end; wherein the cycloid cd and the cycloid ab, the top arc de and the top arc ha, and the straight line ef and the straight line gh are symmetrically arranged along the connecting line of the midpoint of the bottom arc bc and the midpoint of the section arc fg; the molded line combination of the second rotor comprises a cycloid AB, a top arc BC, a cycloid CD, a bottom arc DE, a cycloid EF, a straight line envelope line FG, a section arc GH, a straight line envelope line HI, a cycloid IJ and a bottom arc JA which are sequentially connected end to end; wherein the cycloid AB and the cycloid CD, the straight line envelope line HI and the straight line envelope line FG, and the cycloid IJ and the cycloid EF are symmetrically arranged along the connecting line of the midpoint of the top arc BC and the midpoint of the pitch arc GH respectively. Under the condition that the pump body is not disassembled, the particulate matter in the pump cavity can be efficiently and conveniently removed.
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Description

A claw rotor structure Technical Field

[0001] This invention relates to the field of pump rotors, and more specifically, to a claw rotor structure. Background Technology

[0002] The core working component of a claw-type dry vacuum pump is a pair of meshing but non-contact claw-shaped rotors that rotate synchronously in opposite directions within the pump chamber. Its working principle lies in the unique profile of the rotors and the inner wall of the pump chamber, which together form periodically changing sealed chambers. As the rotors rotate, the volume of these chambers expands and contracts systematically, creating a suction effect at the inlet and exhausting gas at the outlet, achieving a continuous, oil-free pumping process. This design enables it to provide a clean vacuum environment, making it widely used in high-tech manufacturing fields sensitive to contamination.

[0003] Existing claw-type vacuum pump rotors are typically optimized based on specific meshing principles (such as cycloids, circular arcs, and their envelope combinations) to achieve high-efficiency volumetric changes and gas delivery. However, the rotor profiles and their associated suction and exhaust port structures are usually asymmetrical designs, meaning their operating principles and performance parameters (such as pumping efficiency and flow characteristics) are optimized for a single, preset rotation direction (usually defined as forward). The rotor's tooth profile curve achieves optimal meshing and sealing during forward rotation, forming an effective working chamber.

[0004] The aforementioned asymmetric rotor structure optimized for unidirectional rotation exhibits significant drawbacks in practical applications. In industries such as semiconductors, processes may generate fine dust particles, which tend to remain and accumulate on the rotor surface, tooth gaps, and non-working dead zones of the pump chamber after pumping is completed. Due to the asymmetric rotor profile, when it rotates in the reverse direction, it cannot replicate the effective working process of forward rotation, resulting in extremely low pumping efficiency and an inability to generate effective airflow disturbance to remove residual particles. Long-term particle accumulation reduces the pump's ultimate vacuum and pumping speed, exacerbates wear on the rotor and pump chamber, affects sealing performance, and ultimately leads to equipment failure. To solve this problem, traditional methods must rely on physical disassembly and cleaning after shutdown or the use of external cleaning devices, resulting in long maintenance cycles, high costs, and severely impacting the operating efficiency and equipment utilization of continuous production lines. Summary of the Invention

[0005] The purpose of this invention is to provide a claw rotor structure that can efficiently and conveniently remove particulate matter from the pump chamber without disassembling the pump body.

[0006] The embodiments of the present invention are implemented as follows: A claw-type rotor structure according to an embodiment of the present application includes a first rotor and a second rotor meshed together; the profile combination of the first rotor includes a cycloid ab, a bottom arc bc, a cycloid cd, a top arc de, a straight line ef, a pitch arc fg, a straight line gh, and a top arc ha connected end to end; wherein, the cycloid cd and the cycloid ab, the top arc de and the top arc ha, and the straight line ef and the straight line gh are respectively along the bottom arc bc and the pitch arc The line connecting the midpoints of arc fg is symmetrically arranged; the profile combination of the second rotor includes cycloid AB, top arc BC, cycloid CD, bottom arc DE, cycloid EF, straight envelope FG, pitch arc GH, straight envelope HI, cycloid IJ, and bottom arc JA connected end to end; wherein, the cycloid AB and the cycloid CD, the straight envelope HI and the straight envelope FG, and the cycloid IJ and the cycloid EF are respectively symmetrically arranged along the line connecting the midpoints of the top arc BC and the pitch arc GH.

[0007] In a possible implementation, the profiles of the first rotor and the second rotor have the following correspondence during meshing: point a meshes with the cycloid AB, point B meshes with the cycloid ab, point C meshes with the cycloid cd, point d meshes with the cycloid CD, point e meshes with the cycloid EF, and point h meshes with the cycloid IJ; the bottom arc bc meshes with the top arc BC, the top arc de meshes with the bottom arc DE, the straight line ef meshes with the straight line envelope FG, the pitch arc fg meshes with the pitch arc GH, the straight line gh meshes with the straight line envelope HI, and the top arc ha meshes with the bottom arc JA.

[0008] In a possible implementation, the rotation centers of the first rotor and the second rotor are O1 and O2, respectively. The center of all arcs in the profile of the first rotor is O1, and the center of all arcs in the profile of the second rotor is O2. The radii of the top arc BC, the top arc de, and the top arc ha are R1, the radii of the section arcs GH and fg are R2, and the radii of the bottom arcs DE, JA, and bc are R3. The sum of R1 and R2 is the center distance, satisfying R1 + R3 = 2. R2; the central angle of the top arc BC and the bottom arc bc is a, and the central angle of the bottom arc DE, the bottom arc JA, the top arc de, and the top arc ha is b, satisfying a=2. b.

[0009] In a possible implementation, a coordinate system O1x1y1 is established with the rotation center O1 of the first rotor, and the position vector of the cycloid ab in the profile combination of the first rotor satisfies the following relationship: A coordinate system O2x2y2 is established with the rotation center O2 of the second rotor. The position vector of the cycloid AB in the profile combination of the second rotor satisfies the following relationship: .

[0010] In a possible implementation, the position vector of the bottom arc bc satisfies the following relationship: The position vector of the top arc BC satisfies the following relationship: .

[0011] In a possible implementation, the position vector of the cycloidal cd satisfies the following relationship: Where M1 is the first rotation matrix and satisfies the following relationship: The position vector of the cycloid CD satisfies the following relationship: Where M1 is the first rotation matrix and satisfies the following relationship: .

[0012] In a possible implementation, both the top arc de and the top arc ha satisfy the following relationship: Both the bottom arc DE and the bottom arc JA satisfy the following relationship: .

[0013] In a possible implementation, the straight line ef satisfies the following relationship: ;in, The cycloid EF satisfies the following relationship: Where M2 is the second rotation matrix and satisfies the following relationship: .

[0014] In a possible implementation, the nodal arc fg satisfies the following relationship: The linear envelope FG satisfies the following relationship: .

[0015] In a possible implementation, the straight line hg satisfies the following relationship: The segmental arc GH satisfies the following relationship: .

[0016] The beneficial effects of this invention are as follows: Compared to traditional claw-type vacuum pumps, which cannot effectively remove residual dust particles from the pump chamber after rotating in the forward direction (design direction), leading to residue affecting subsequent vacuuming efficiency, accelerating rotor and pump chamber wear, and requiring maintenance by disassembling the pump body or using external cleaning devices, which is cumbersome and costly, this claw-type rotor structure optimizes the rotor profile design of the vacuum pump, ensuring the same working process in both forward and reverse rotation, achieving bidirectional dynamic particle cleaning. The rotor's motion trajectory and working process are completely consistent during forward and reverse rotation, clearing particles from dead corners of the pump chamber through bidirectional airflow disturbance, avoiding the one-sided accumulation caused by traditional unidirectional rotation. It achieves self-cleaning during operation, eliminating the need for shutdown disassembly or reliance on external cleaning equipment, significantly reducing maintenance complexity in high-cleanliness environments. It improves equipment operational stability and maintenance convenience, extends service life, and is particularly suitable for industrial scenarios with stringent requirements for vacuum pump performance, such as high-cleanliness and continuous production. Attached Figure Description

[0017] To more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of the present invention and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0018] Figure 1 is a schematic diagram of the first rotor in the claw rotor structure of the present invention; Figure 2 is a schematic diagram of the second rotor in the claw rotor structure of the present invention; Figure 3 is a schematic diagram of the first rotor and the second rotor in the meshing state in the claw rotor structure of the present invention; Figure 4 is another schematic diagram of the first rotor and the second rotor in the meshing state in the claw rotor structure of the present invention.

[0019] Icons: 1. First rotor; 2. Second rotor. Detailed Implementation

[0020] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. The components of the embodiments of the present invention described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0021] Therefore, the following detailed description of the embodiments of the invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the invention without inventive effort are within the scope of protection of the invention.

[0022] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0023] In the description of this invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product of this invention is in use. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this invention. In addition, the terms "first," "second," "third," etc., are only used to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0024] Furthermore, terms such as "horizontal" and "vertical" do not imply that components must be absolutely horizontal or suspended, but rather that they can be slightly tilted. For example, "horizontal" simply means that its direction is more horizontal than "vertical," and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0025] In the description of this invention, it should also be noted that, unless otherwise explicitly specified and limited, the terms "set," "install," "connect," and "link" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0026] Referring to Figures 1 to 4, this embodiment provides a claw rotor structure that can be applied to dry vacuum pumps, dry compressors, dry blowers, and powder conveying equipment in fields with strict requirements for the cleanliness of the working medium, equipment operational reliability, and ease of maintenance, such as semiconductor manufacturing, flat panel displays, photovoltaic industry, precision instruments, pharmaceuticals, food, and chemical processes. Taking its application in a vacuum pump as an example, this claw rotor structure includes a first rotor 1 and a second rotor 2. Both rotors adopt an axisymmetric profile design, ensuring that they have the same working process during forward and reverse rotation. During normal operation of the vacuum pump, the rotor rotates forward to achieve the required vacuum level. When internal dust particles need to be cleaned, the rotor rotates in reverse. The symmetrical structure of the rotor ensures that dust particles adhering to the rotor and pump cavity walls are cleaned during the reverse rotation, achieving dust particle removal from the pump without disassembling it.

[0027] Furthermore, the profile of the first rotor 1 is composed of eight curves connected end to end, namely cycloid ab, bottom arc bc, cycloid cd, top arc de, straight line ef, pitch arc fg, straight line hg, and top arc ha.

[0028] The profile of the second rotor 2 consists of ten curves connected end to end, namely cycloid AB, top arc BC, cycloid CD, bottom arc DE, cycloid EF, straight envelope FG, pitch arc GH, straight envelope HI, cycloid IJ, and bottom arc JA.

[0029] During the meshing process of the rotor, point a meshes with cycloid AB, point B meshes with cycloid ab, bottom arc bc meshes with top arc BC, cycloid cd meshes with point C, point d meshes with cycloid CD, top arc de meshes with bottom arc DE, point e meshes with cycloid EF, straight line ef meshes with straight line envelope FG, pitch arc fg meshes with pitch arc GH, straight line gh meshes with straight line envelope HI, point h meshes with cycloid IJ, and top arc ha meshes with bottom arc JA.

[0030] The radii of the top arcs BC, de, and ha are R1; the radii of the pitch arcs GH and fg are R2; and the radii of the bottom arcs DE, JA, and bc are R3. The sum of R1 and R2 is the center distance, satisfying R1 + R3 = 2. R2. The central angle of the top arc BC and the bottom arc bc is a, and the central angle of the bottom arc DE, the bottom arc JA, the top arc de, and the top arc ha is b, satisfying a=2. b.

[0031] Establish a coordinate system O1x1y1 with the center O1 of the first rotor. The equations of the constituent profiles of the first rotor 1 are as follows: 1) The parametric equation of the cycloid ab is:

[0032] 2) The parametric equation of the bottom circular arc bc is:

[0033] 3) The parametric equation of the cycloidal line cd is:

[0034] In the formula: M1 is the first rotation matrix, as follows:

[0035] 4) The parametric equations for the top circular arcs de and ha are:

[0036] 5) The parametric equation of line ef is:

[0037] In the formula: the expression for g is:

[0038] 6) The parametric equation of the segmental arc fg is:

[0039] 7) The parametric equation of the line hg is:

[0040] In the formula: the expression for g is:

[0041] Establish a coordinate system O2x2y2 with the center O2 of the second rotor 2. The equations of the constituent profiles of the second rotor 2 are as follows: 1) The parametric equation of the cycloid AB is:

[0042] 2) The parametric equation of the top circular arc BC is:

[0043] 3) The parametric equation of the cycloidal CD is:

[0044] In the formula: M1 is the first rotation matrix, as follows:

[0045] 4) The parametric equations for the base arcs DE and JA are:

[0046] 5) The parametric equation of the cycloid EF is:

[0047] In the formula: M2 is the second rotation matrix, as follows:

[0048] 6) The parametric equation of the linear envelope FG is:

[0049] 7) The parametric equation of the segmental arc GH is:

[0050] 8) The parametric equation of the cycloid IJ is:

[0051] In the formula: M3 is the third rotation matrix, as follows:

[0052] 9) The parametric equation of the envelope HI of the straight line is: .

[0053] Compared to traditional claw-type vacuum pumps, which fail to effectively remove residual dust particles from the pump chamber after forward rotation (design direction), leading to residue affecting subsequent vacuuming efficiency, accelerating rotor and pump chamber wear, and requiring cumbersome and costly maintenance involving pump disassembly or external cleaning, this embodiment's claw-type rotor structure optimizes the vacuum pump's rotor profile design, ensuring identical operation in both forward and reverse rotation, achieving bidirectional dynamic particle cleaning. The rotor's motion trajectory and operating process are completely consistent during forward and reverse rotation, clearing particles from dead corners of the pump chamber through bidirectional airflow disturbance, avoiding the one-sided accumulation caused by traditional unidirectional rotation. This achieves self-cleaning during operation, eliminating the need for shutdown disassembly or reliance on external cleaning equipment, significantly reducing maintenance complexity in high-cleanliness environments. It improves equipment operational stability and maintenance convenience, extends service life, and is particularly suitable for industrial scenarios with stringent vacuum pump performance requirements, such as high-cleanliness, continuous production.

[0054] The above description is merely a preferred embodiment of the present invention and is not intended to limit the invention. Various modifications and variations can be made to the present invention by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the scope of protection of the present invention.

Claims

1. A claw-type rotor structure, characterized in that, The system includes a first rotor and a second rotor that are meshed together. The profile of the first rotor includes a cycloid ab, a bottom arc bc, a cycloid cd, a top arc de, a straight line ef, a pitch arc fg, a straight line gh, and a top arc ha, which are connected end to end. The cycloid cd is symmetrically arranged with the cycloid ab, the top arc de and the top arc ha, and the straight line ef and the straight line gh along the line connecting the midpoints of the bottom arc bc and the pitch arc fg, respectively. The profile of the second rotor includes a cycloid AB, a top arc BC, a cycloid CD, a bottom arc DE, a cycloid EF, a straight envelope FG, a pitch arc GH, a straight envelope HI, a cycloid IJ, and a bottom arc JA, which are connected end to end. The cycloid AB is symmetrically arranged with the cycloid CD, the straight envelope HI and the straight envelope FG, and the cycloid IJ and the cycloid EF along the line connecting the midpoints of the top arc BC and the pitch arc GH, respectively.

2. The claw rotor structure according to claim 1, characterized in that, The profiles of the first rotor and the second rotor have the following correspondence during the meshing process: point a meshes with the cycloid AB, point B meshes with the cycloid ab, point C meshes with the cycloid cd, point d meshes with the cycloid CD, point e meshes with the cycloid EF, and point h meshes with the cycloid IJ. The bottom arc bc meshes with the top arc BC, the top arc de meshes with the bottom arc DE, the straight line ef meshes with the straight line envelope FG, the nodal arc fg meshes with the nodal arc GH, the straight line gh meshes with the straight line envelope HI, and the top arc ha meshes with the bottom arc JA.

3. The claw rotor structure according to claim 2, characterized in that, The rotation centers of the first rotor and the second rotor are O1 and O2, respectively. The center of all arcs in the profile of the first rotor is O1, and the center of all arcs in the profile of the second rotor is O2. The radii of the top arc BC, the top arc de, and the top arc ha are R1; the radii of the section arcs GH and fg are R2; and the radii of the bottom arcs DE, JA, and bc are R3. The sum of R1 and R2 is the center distance, satisfying R1 + R3 = 2. R2; the central angle of the top arc BC and the bottom arc bc is a, and the central angle of the bottom arc DE, the bottom arc JA, the top arc de, and the top arc ha is b, satisfying a=2. b。 4. The claw rotor structure according to claim 3, characterized in that, A coordinate system O1x1y1 is established with the rotation center O1 of the first rotor. The position vector of the cycloid ab in the profile combination of the first rotor satisfies the following relationship: A coordinate system O2x2y2 is established with the rotation center O2 of the second rotor. The position vector of the cycloid AB in the profile combination of the second rotor satisfies the following relationship: 。 5. The claw rotor structure according to claim 4, characterized in that, The position vector of the bottom arc bc satisfies the following relationship: The position vector of the top arc BC satisfies the following relationship: 。 6. The claw rotor structure according to claim 3, characterized in that, The position vector of the cycloid cd satisfies the following relationship: Where M1 is the first rotation matrix and satisfies the following relationship: The position vector of the cycloid CD satisfies the following relationship: Where M1 is the first rotation matrix and satisfies the following relationship: 。 7. The claw rotor structure according to claim 3, characterized in that, Both the top circular arc de and the top circular arc ha satisfy the following relationship: Both the bottom arc DE and the bottom arc JA satisfy the following relationship: 。 8. The claw rotor structure according to claim 3, characterized in that, The straight line ef satisfies the following relationship: ;in, The cycloid EF satisfies the following relationship: Where M2 is the second rotation matrix and satisfies the following relationship: 。 9. The claw rotor structure according to claim 3, characterized in that, The segmental arc fg satisfies the following relationship: The linear envelope FG satisfies the following relationship: 。 10. The claw rotor structure according to claim 3, characterized in that, The straight line hg satisfies the following relationship: The segmental arc GH satisfies the following relationship: 。

Citation Information

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