Electro-optical phase shifter, optical chip, optical chip manufacturing method and laser radar

By designing a thickness difference between the electrode connection part and the avoidance part in the electro-optic phase shifter, optical loss is reduced, and the size of the electro-optic phase shifter is reduced by shrinking the size of the ridge waveguide. This solves the problem of high optical loss in the prior art and reduces the cost of optical chips and lidar.

CN122307951APending Publication Date: 2026-06-30北京集光智研科技有限公司
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Patent Information

Application Number
CN202411998439.8
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2024-12-31
Publication Date
2026-06-30

AI Technical Summary

Technical Problem

Even with the reduction in size, existing electro-optical phase shifters still suffer from high optical loss, making it difficult to simultaneously meet the size reduction requirements of optical phased arrays in lidar.

Method used

Design an electro-optic phase shifter, wherein the edge region includes an electrode connection portion and a clearance portion arranged sequentially along a first direction. The thickness of the electrode connection portion is greater than that of the clearance portion. Electrical connection with the metal electrode is achieved only through a small portion of the material in the edge region. The thickness of the edge region is reduced to reduce optical loss, and the volume of the phase shifter is reduced by shrinking the size of the ridge waveguide.

Benefits of technology

By reducing optical loss, the size of the electro-optic phase shifter has been reduced, thereby reducing the overall size and manufacturing cost of the optical chip and lidar.

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Abstract

The invention provides an electro-optical phase shifter, an optical chip, an optical chip manufacturing method and a laser radar, the electro-optical phase shifter comprises a ridge waveguide and two edge regions, the ridge waveguide extends along a first direction, the two edge regions are respectively arranged at two sides of the ridge waveguide along a second direction, and the first direction is perpendicular to the second direction; the edge area comprises an electrode connecting part and a receding part which are sequentially arranged in the first direction, the thickness size of the electrode connecting part is larger than that of the receding part, and the electrode connecting part is used for being connected with a metal electrode.
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