Rectified product distribution device and semiconductor material preparation equipment

Abstract

The utility model belongs to the technical field of semiconductors, and discloses a rectified product distribution device and semiconductor material preparation equipment, and the rectified product distribution device comprises a distribution pipeline, a material sampler and a pneumatic adjusting piece. Wherein an inlet of the distribution pipeline is communicated with the distillation tower, and an outlet of the distribution pipeline is communicated with the storage tank; the distribution pipeline is divided into a front-end pipeline and a rear-end pipeline along the direction from the inlet to the outlet; the material sampler is communicated with the front-end pipeline and is used for detecting a product flowing in from the inlet; the pneumatic adjusting part is communicated with the front-end pipeline and located at the rear end of the material sampler, the material sampler is electrically connected to the pneumatic adjusting part, and the pneumatic adjusting part is used for opening or closing the distribution pipeline and can adjust the flow of products in the distribution pipeline. The rectified product distribution device can control and distribute rectified products, so that all substandard products flow back into the distillation tower to be rectified again, the recycling of waste materials is realized, the cost is saved, and the waste of the materials is avoided.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductors, in particular to a distillation product distribution device and semiconductor material preparation equipment. Background Art

[0002] With the rapid development and technological innovation of the electronic materials industry, the semiconductor industry has gradually developed. At present, in order to meet the needs of high output, high quality and high purity, the process of semiconductor material preparation has been continuously innovated.

[0003] In the prior art, during the semiconductor material preparation and production process, the distilled products will enter the storage tanks, and material sampling and testing will be carried out during this process to detect whether the distilled products meet the demand. However, in actual testing, some products still cannot meet the high purity and high quality requirements, and these substandard products will be directly treated as waste, which will result in a reduction in output.

[0004] Therefore, there is an urgent need for a distillation product distribution device and a semiconductor material preparation equipment to solve the above technical problems. Utility Model Content

[0005] One purpose of the utility model is to provide a distillation product distribution device, which can control the distribution of distilled products so that all products that do not meet the standards can flow back to the distillation tower for re-distillation, thereby achieving the reuse of waste materials, saving costs and avoiding material waste.

[0006] To achieve this purpose, the utility model adopts the following technical solutions:

[0007] A distillation product distribution device, comprising:

[0008] A distribution pipeline, wherein the inlet of the distribution pipeline is connected to the distillation tower, and the outlet of the distribution pipeline is connected to the storage tank; along the direction from the inlet to the outlet, the distribution pipeline is divided into a front-end pipeline and a rear-end pipeline;

[0009] A material sampler, connected to the front-end pipeline, and used to detect the product flowing in from the inlet;

[0010] The pneumatic regulating member is connected to the front-end pipeline and is located at the rear end of the material sampler. The material sampler is electrically connected to the pneumatic regulating member. The pneumatic regulating member is used to open or close the distribution pipeline and can adjust the flow of the product inside the distribution pipeline.

[0011] Optionally, the front-end pipeline is also connected to a flow test piece, the flow test piece is electrically connected to the pneumatic adjustment piece, and the flow test piece is used to test the flow size in the distribution pipeline.

[0012] Optionally, the flow test piece is provided with a display piece, and the display piece is used to display the flow in the distribution pipeline.

[0013] Optionally, a first control valve is connected between the material sampler and the inlet, and the first control valve is used to open or close the inlet to connect or disconnect the distribution pipeline and the distillation tower.

[0014] Optionally, a second control valve is provided between the front-end pipeline and the rear-end pipeline, and the second control valve is used for connecting or disconnecting the front-end pipeline and the rear-end pipeline.

[0015] Optionally, the first control valve and the second control valve are any one of a pneumatic valve, a solenoid valve, and a manual valve.

[0016] Optionally, the rear end pipeline is also connected to a one-way valve, which is located at the front end of the outlet and is used to prevent the backflow of the material in the storage tank.

[0017] Optionally, it also includes a flow-increasing pipeline, which is arranged in parallel with the rear-end pipeline. A manual switch valve is provided on the flow-increasing pipeline, and the manual switch valve can open the flow-increasing pipeline to increase the flow.

[0018] Optionally, the manual switch valve is a normally closed switch valve.

[0019] Another object of the utility model is to provide a semiconductor material preparation device, which can improve the quality and purity of the product after distillation, increase product output, save costs, and avoid material waste.

[0020] To achieve this purpose, the utility model adopts the following technical solutions:

[0021] Semiconductor material preparation equipment includes a distillation tower, a storage tank and the above-mentioned distillation product distribution device, and the above-mentioned distillation product distribution device is connected and arranged between the above-mentioned distillation tower and the above-mentioned storage tank.

[0022] Beneficial effects of the utility model:

[0023] The utility model provides a distillation product distribution device and semiconductor material preparation equipment. When in use, the product flows out of the distillation tower and enters the front end pipeline of the distribution pipeline through the inlet. At this time, the pneumatic regulating part is in a closed state, and the distribution pipeline is not connected to the storage tank; the product entering the front end pipeline is sampled and tested by the material sampler to determine whether the product meets the standard. The material sampler that meets the standard will transmit the standard signal to the pneumatic regulating part, and the pneumatic regulating part will be opened, and the qualified product will enter the storage tank through the distribution pipeline for storage; if the product does not meet the standard, the material sampler will transmit the non-standard signal to the pneumatic regulating part, and the pneumatic regulating part will remain closed to prevent the non-standard product from entering the storage tank. At this time, the non-standard product flows back to the distillation tower for distillation again until it meets the standard, and the pneumatic regulating part will be opened for transportation and storage. This arrangement improves the reuse of non-standard products after distillation, improves resource utilization, product purity and output, saves costs, and avoids material waste. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 It is an axonometric diagram of a distillation product distribution device provided in a specific embodiment of the utility model;

[0025] Figure 2 It is a front view of a distillation product distribution device provided in a specific embodiment of the utility model;

[0026] Figure 3 It is a working principle diagram of a distillation product distribution device provided in a specific embodiment of the utility model.

[0027] In the figure:

[0028] 10. Distribution pipeline; 101. Inlet; 102. Outlet; 11. Front-end pipeline; 12. Back-end pipeline;

[0029] 20. Material sampler; 30. Pneumatic adjustment component; 40. Flow test component; 50. First control valve; 60. Second control valve; 70. One-way valve; 80. Flow increase pipeline; 90. Manual switch valve. DETAILED DESCRIPTION

[0030] The present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It is to be understood that the specific embodiments described herein are only used to explain the present invention, rather than to limit the present invention. It should also be noted that, for ease of description, only the parts related to the present invention, rather than all structures, are shown in the accompanying drawings.

[0031] In the description of the present invention, unless otherwise clearly specified and limited, the terms "connected", "connected", and "fixed" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0032] In the present utility model, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being "above", "above" and "above" a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes that the first feature is directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0033] In the description of this embodiment, the terms "upper", "lower", "right", etc., are based on the directions or positions shown in the drawings, and are only for the convenience of description and simplified operation, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as a limitation of the present invention. In addition, the terms "first" and "second" are only used to distinguish in the description and have no special meaning.

[0034] Refer to the following Figures 1 to 3 And the embodiments introduce the distillation product distribution device and semiconductor material preparation equipment described in the utility model.

[0035] This embodiment provides a distillation product distribution device, which is used to detect, distribute and reuse the distilled product.

[0036] Please refer to Figures 1 to 3Specifically, the distillation product distribution device includes a distribution pipeline 10, a material sampler 20 and a pneumatic regulating member 30. The inlet 101 of the distribution pipeline 10 is connected to the distillation tower, and the outlet 102 of the distribution pipeline 10 is connected to the storage tank; along the direction from the inlet 101 to the outlet 102, the distribution pipeline 10 is divided into a front-end pipeline 11 and a rear-end pipeline 12; the material sampler 20 is connected to the front-end pipeline 11, and the material sampler 20 is used to detect the product flowing in from the inlet 101; the pneumatic regulating member 30 is connected to the front-end pipeline 11 and is located at the rear end of the material sampler 20, and the material sampler 20 is electrically connected to the pneumatic regulating member 30, and the pneumatic regulating member 30 is used to open or close the distribution pipeline 10 and can adjust the flow of the product inside the distribution pipeline 10.

[0037] When the distillation product distribution device of this embodiment distributes the product after distillation, the product flows out of the distillation tower through the inlet 101 and enters the front end pipeline 11 of the distribution pipeline 10. At this time, the pneumatic regulating member 30 is in a closed state, and the distribution pipeline 10 is not connected to the storage tank; the product entering the front end pipeline 11 is sampled and tested by the material sampler 20 to determine whether the product meets the standard. The material sampler 20 that meets the standard will transmit the standard-reaching signal to the pneumatic regulating member 30, and the pneumatic regulating member 30 will be opened, and the qualified product will enter the storage tank through the distribution pipeline 10 for storage; if the product does not meet the standard, the material sampler 20 will transmit the non-standard signal to the pneumatic regulating member 30, and the pneumatic regulating member 30 will remain closed to prevent the non-standard product from entering the storage tank. At this time, the non-standard product flows back to the distillation tower for distillation again until it meets the standard, and the pneumatic regulating member 30 will be opened for transportation and storage. This arrangement improves the reuse of substandard products after distillation, improves resource utilization, product purity and output, saves costs and avoids material waste.

[0038] Optionally, the distribution pipeline 10 is formed by sealingly connecting multiple pipelines. Specifically, the sealed connection between the pipelines can be achieved by adding a seal between two flanges. It is understandable that the sealed connection between the pipelines can also be achieved by other connection structures, which are not specifically limited here.

[0039] Optionally, the pneumatic regulating member 30 is a pneumatic regulating valve, which can adjust the opening degree of the flow in the pipeline and open and close the pipeline.

[0040] Please continue to refer to Figures 1 to 3 In this embodiment, the front end pipeline 11 is also connected with a flow test piece 40, which is electrically connected to the pneumatic adjustment piece 30 and is used to test the flow rate in the distribution pipeline 10. The flow rate measured by the flow test piece 40 can be transmitted to the pneumatic adjustment piece 30, and the pneumatic adjustment piece 30 can adjust its opening to adjust the flow rate in the distribution pipeline 10.

[0041] Furthermore, the flow test piece 40 is provided with a display element, and the display element is used to display the flow in the distribution pipeline 10, that is, the flow value measured by the flow test piece 40 can be displayed through the display element to facilitate the operation of the operator.

[0042] Optionally, the flow test piece 40 uses a flow display instrument to detect and display the flow rate.

[0043] It can be understood that the pneumatic adjustment component 30 is electrically connected to the flow test component 40 and the material sampler 20 respectively, and the process of making corresponding judgments based on the relevant test signals collected from the flow test component 40 and the material sampler 20 can be performed by setting a controller or manually, that is, after obtaining the relevant test signals of the flow test component 40 and the material sampler 20, the controller determines the on-off or opening of the pneumatic adjustment component 30 to control it. This structure is common knowledge in the field and will not be repeated here.

[0044] In this embodiment, a first control valve 50 is connected between the material sampler 20 and the inlet 101. The first control valve 50 is used to open or close the inlet 101 to connect or disconnect the distribution pipeline 10 and the distillation tower. That is, through the first control valve 50, the connection and disconnection between the distribution pipeline 10 and the distillation tower can be achieved at the inlet 101.

[0045] Furthermore, a second control valve 60 is provided between the front-end pipeline 11 and the rear-end pipeline 12, and the second control valve 60 is used to connect or disconnect the front-end pipeline 11 and the rear-end pipeline 12. This arrangement can also ensure that when any one of the flow detection component, the material sampling component and the pneumatic adjustment component 30 between the first control valve 50 and the second control valve 60 is damaged, the first control valve 50 and the second control valve 60 can be closed and the damaged component can be replaced, so as to facilitate the safe inspection, maintenance or dismantling of the distillation product distribution device.

[0046] Optionally, the first control valve 50 and the second control valve 60 are any of pneumatic valves, solenoid valves, and manual valves, and both can realize the control of the first control valve 50 and the second control valve 60 on the on-off of the pipeline. Exemplarily, in this embodiment, the first control valve 50 and the second control valve 60 are both pneumatic switch valves.

[0047] Furthermore, the rear-end pipeline 12 is also connected to a one-way valve 70, which is located at the front end of the outlet 102. The one-way valve 70 is used to prevent the backflow of the material in the storage tank. Since the storage tank is often sealed with gas, if the gas in the storage tank flows back to the distribution pipeline 10 or the distillation tower, it will affect the distillation and distribution of the product. Therefore, the setting of the one-way valve 70 allows the flow in the distribution pipeline 10 to flow only in the direction from the inlet 101 to the outlet 102, and the gas in the storage tank will not flow back to the distribution pipeline 10; at the same time, it ensures that the distribution pipeline 10 is full of liquid, and the delivery pressure of the liquid product in the distribution pipeline 10 is guaranteed, thereby ensuring that the liquid product delivered to the outlet 102 in the distribution pipeline 10 will be delivered to the storage tank.

[0048] Please continue to refer to Figures 1 to 3 In this embodiment, the distillation product distribution device also includes a flow-increasing pipeline 80, which is arranged in parallel with the rear-end pipeline 12. A manual switch valve 90 is provided on the flow-increasing pipeline 80. The manual switch valve 90 can open the flow-increasing pipeline 80 to increase the flow rate, so that when the flow rate is normal or small, the manual switch valve 90 is closed, and the distilled product is only transported to the storage tank through the distribution pipeline 10; when the flow rate is large, the manual switch valve 90 is opened, and the distilled product is transported to the storage tank through both the rear-end pipeline 12 and the flow-increasing pipeline 80, thereby improving the transportation of large-flow products.

[0049] Furthermore, the manual switch valve 90 is a normally closed switch valve, that is, the manual switch valve 90 is normally closed and will only be opened when a large flow rate is required to meet the transportation of a large flow rate of the product.

[0050] This embodiment also provides a semiconductor material preparation device, which includes a distillation tower, a storage tank, and a distillation product distribution device as described in any of the above schemes, wherein the distillation product distribution device is connected and arranged between the distillation tower and the storage tank. By providing the distillation product distribution device, resource utilization is improved, and the purity, output and quality of the product are improved.

[0051] Obviously, the above embodiments of the present invention are merely examples for the purpose of clearly illustrating the present invention, and are not intended to limit the implementation methods of the present invention. For those skilled in the art, various obvious changes, readjustments and substitutions can be made without departing from the scope of protection of the present invention. It is not necessary and impossible to list all implementation methods here. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention shall be included in the scope of protection of the claims of the present invention.

Claims

1. A distillation product distribution device, characterized in that: include: A distribution pipeline (10), wherein an inlet (101) of the distribution pipeline (10) is connected to a distillation tower, and an outlet (102) of the distribution pipeline (10) is connected to a storage tank; along the direction from the inlet (101) to the outlet (102), the distribution pipeline (10) is divided into a front-end pipeline (11) and a rear-end pipeline (12); a material sampler (20), which is connected to the front-end pipeline (11), and is used to detect the product flowing in from the inlet (101); A pneumatic regulating member (30) is connected to the front end pipeline (11) and is located at the rear end of the material sampler (20). The material sampler (20) is electrically connected to the pneumatic regulating member (30). The pneumatic regulating member (30) is used to open or close the distribution pipeline (10) and can adjust the flow rate of the product inside the distribution pipeline (10).

2. The distillation product distribution device according to claim 1, characterized in that: The front end pipeline (11) is also connected to a flow test piece (40), the flow test piece (40) is electrically connected to the pneumatic adjustment piece (30), and the flow test piece (40) is used to test the flow size in the distribution pipeline (10).

3. The distillation product distribution device according to claim 2, characterized in that: The flow test piece (40) is provided with a display piece, and the display piece is used to display the flow rate in the distribution pipeline (10).

4. The distillation product distribution device according to claim 1, characterized in that: A first control valve (50) is connected between the material sampler (20) and the inlet (101), and the first control valve (50) is used to open or close the inlet (101) to connect or disconnect the distribution pipeline (10) and the distillation tower.

5. The distillation product distribution device according to claim 4, characterized in that: A second control valve (60) is provided between the front-end pipeline (11) and the rear-end pipeline (12), and the second control valve (60) is used to connect or disconnect the front-end pipeline (11) and the rear-end pipeline (12).

6. The distillation product distribution device according to claim 5, characterized in that: The first control valve (50) and the second control valve (60) are any one of pneumatic valves, solenoid valves, and manual valves.

7. The distillation product distribution device according to claim 1, characterized in that: The rear end pipeline (12) is also connected to a one-way valve (70), which is located at the front end of the outlet (102). The one-way valve (70) is used to prevent the backflow of the material in the storage tank.

8. The distillation product distribution device according to any one of claims 1 to 7, characterized in that: It also includes a flow-increasing pipeline (80), which is arranged in parallel with the rear-end pipeline (12), and a manual switch valve (90) is provided on the flow-increasing pipeline (80), and the manual switch valve (90) can open the flow-increasing pipeline (80) to increase the flow rate.

9. The distillation product distribution device according to claim 8, characterized in that: The manual switch valve (90) is a normally closed switch valve.

10. Semiconductor material preparation equipment, characterized in that: The invention comprises a distillation tower, a storage tank and a distillation product distribution device according to any one of claims 1 to 9, wherein the distillation product distribution device is connected and arranged between the distillation tower and the storage tank.

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