Clamping mechanism and wet cleaning equipment

Abstract

The utility model provides a clamping mechanism and wet cleaning equipment, and the clamping mechanism comprises a motor which is configured to drive a transmission assembly to operate; one end of the transmission assembly is connected with the output end of the motor, and the other end of the transmission assembly is connected with the clamping jaw assembly so as to transmit power of the motor to the clamping jaw assembly; and the clamping jaw assembly is configured to execute clamping and grabbing actions under the driving of the transmission assembly. And the motor is adopted for driving, so that various abnormities caused by an unstable air source when a pneumatic element is used originally are eliminated, and the stability of the clamping jaw assembly during object clamping is improved.

Description

Technical Field

[0001] The present application relates to the field of semiconductor processing, and in particular to a clamping mechanism and a wet cleaning device. Background Art

[0002] In the semiconductor process, wafers need to go through multiple manufacturing processes. In order to ensure the cleanliness of the wafers during the process, the wafers are stored in wafer boxes during storage and transportation to reduce the risk of wafer contamination. At the same time, the stability of the wafers during transportation is ensured to avoid damage to the wafers caused by external forces.

[0003] In the process of transporting wafer boxes from one process to the next, it is often achieved by robot gripping. Robots often use cylinders as the driving source of the robot gripper. However, since the cylinder is a pneumatic component, the stability of the gas supply cannot be guaranteed when the staff supplies gas to the cylinder, and it is easy for the cylinder to leak or the air pressure to increase. When the cylinder leaks or the gas supply is insufficient, the driving force of the cylinder is small, resulting in insufficient clamping force of the gripper. In this way, the gripper cannot stably grasp the wafer box. In severe cases, the wafer box may fall off from the gripper, causing the wafer to be damaged. When the cylinder gas supply is too large, the driving force of the cylinder far exceeds the set standard, resulting in excessive clamping force of the gripper. In this way, the gripper tightly grasps the wafer box, causing the wafer box to deform, and then squeezes the wafer inside the box, causing the wafer to wear or break.

[0004] Therefore, how to provide a clamping mechanism with good grasping stability is a technical problem that technical personnel in this field need to solve urgently. Utility Model Content

[0005] The utility model provides a clamping mechanism and wet cleaning equipment. The clamping claw assembly in the clamping mechanism has a stable clamping force under the drive of a motor, so that the clamping action can be performed smoothly.

[0006] To achieve the above-mentioned purpose, the first aspect of the present application provides a clamping mechanism, comprising:

[0007] A motor configured to drive the transmission assembly to operate;

[0008] A transmission assembly is configured to be connected to the output end of the motor at one end and to be connected to the clamping jaw assembly at the other end so as to transmit the power of the motor to the clamping jaw assembly;

[0009] The clamping jaw assembly is configured to perform a clamping action driven by the transmission assembly.

[0010] Preferably, the transmission assembly comprises a transmission belt, at least two transmission shafts, a driving member, and at least two driven members respectively arranged on both sides of the driving member and engaged with the driving member;

[0011] The jaw assembly includes at least two jaw units;

[0012] The transmission shaft passes through the driven member and is connected to the clamping claw unit;

[0013] The output end of the motor is connected to the active member through a transmission belt; the active member is configured to rotate under the traction of the transmission belt, driving the driven member and the transmission shaft to rotate synchronously, so that the two opposite clamping jaw units are moved closer or farther away.

[0014] Preferably, the active member is a worm and the driven member is a worm wheel;

[0015] The worm rotates along the circumference of its body under the traction of the transmission belt;

[0016] The normal direction of the worm wheel is perpendicular to the length direction of the worm, and the worm wheel performs circular motion driven by the worm.

[0017] Preferably, the clamping jaw unit comprises a rotating shaft, a mounting seat and a clamping jaw body fixed to the mounting seat;

[0018] One end of the rotating shaft is connected to one end of the transmission shaft close to the clamping jaw unit, and the other end is connected to the mounting seat, and is configured to make the clamping jaw body and the transmission shaft rotate in the same direction.

[0019] Preferably, the clamp body comprises a clamping rod in a "U"-shaped structure;

[0020] When the clamping jaw assembly performs a clamping action, the distance between the two opposite clamping rods is smaller than a preset distance.

[0021] Optionally, the clamping mechanism further comprises:

[0022] The sensing component is arranged on the mounting seat and has a part of its structure close to one side of the clamp body, and is configured to contact the clamped object when the clamp component performs a clamping action.

[0023] Specifically, the clamping mechanism further includes: a frame body having a receiving space;

[0024] The clamping jaw assembly is located on one side outside the frame body;

[0025] The transmission component is located in the accommodating space and is fixed to the bottom end of the frame body, and a portion of the structure extends out to be connected with the clamping claw component.

[0026] Preferably, the motor is located in the accommodation space and fixed to the bottom end of the frame body;

[0027] Wherein, the motor is arranged close to the transmission component.

[0028] Optionally, the transmission belt adopts a belt or a chain.

[0029] A second aspect of the present application provides a wet cleaning device, comprising: the clamping mechanism of the first aspect.

[0030] The technical solution of the present application provides a clamping mechanism and a wet cleaning device, wherein the clamping mechanism includes: a motor configured to drive the transmission assembly to operate; a transmission assembly configured to be connected to the output end of the motor at one end and connected to the clamp assembly at the other end to transmit the power of the motor to the clamp assembly; and a clamp assembly configured to perform a clamping action driven by the transmission assembly. The use of a motor as a drive eliminates various anomalies caused by unstable air sources when using pneumatic components, and improves the stability of the clamp assembly when clamping objects. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0032] Figure 1 It is one of the schematic diagrams of a clamping mechanism provided in an embodiment of the present application;

[0033] Figure 2 This is a second schematic diagram of a clamping mechanism provided in an embodiment of the present application;

[0034] Figure 3 This is the third schematic diagram of a clamping mechanism provided in an embodiment of the present application.

[0035] Figure numerals: 10, motor; 20, transmission assembly; 201, transmission belt; 202, transmission shaft; 203, active part; 204, driven part; 30, clamping jaw assembly; 301, rotating shaft; 302, mounting seat; 303, clamping jaw body; 40, frame body; 50, sensing assembly. DETAILED DESCRIPTION

[0036] Some embodiments of the present application are described below with reference to the accompanying drawings. Those skilled in the art should understand that these embodiments are only used to explain the technical principles of the present application and are not intended to limit the protection scope of the present application.

[0037] As described in the background technology, since the cylinder is a pneumatic component, when the staff supplies air to the cylinder, the stability of the air supply cannot be guaranteed, and the cylinder is prone to air leakage or increased air pressure; when the cylinder leaks or the air supply is insufficient, the driving force of the cylinder is small, resulting in insufficient clamping force of the clamps. As a result, the clamps cannot stably grasp the wafer box. In severe cases, the wafer box may fall off between the clamps, causing damage to the wafer; when the air supply to the cylinder is too large, the driving force of the cylinder far exceeds the set standard, resulting in excessive clamping force of the clamps. As a result, the clamps tightly grasp the wafer box, causing the wafer box to deform, thereby squeezing the wafer inside the box, causing the wafer to wear or break.

[0038] In order to solve the above problems, the core of the present application is to provide a clamping mechanism to achieve stable grasping of objects.

[0039] Example 1

[0040] Embodiment 1 of the present application provides a clamping mechanism, such as Figures 1 to 3 As shown, it includes: a motor 10, configured to drive the transmission component 20 to operate; the transmission component 20, configured to be connected to the output end of the motor 10 at one end and connected to the clamping jaw component 30 at the other end to transmit the power of the motor 10 to the clamping jaw component 30; the clamping jaw component 30, configured to perform a clamping action driven by the transmission component 20.

[0041] Among them, the motor 10 can adopt a servo motor or a stepper motor to achieve high-precision position, speed and torque control; by changing the size and frequency of the input current, the motor 10 can provide continuous and adjustable motion control, which is suitable for the scene that requires precise positioning and dynamic response in this embodiment, and improves the stability of the clamping jaw assembly 30 when performing the clamping action. At the same time, the motor 10 can directly convert electrical energy into mechanical energy, while the cylinder relies on the compressed air system, and the operation of the compressor therein has a large energy loss. Therefore, in comparison, the motor 10 has higher energy efficiency than the cylinder; the motor 10 does not require a complex air pressure system, which reduces maintenance problems such as air leakage and drainage, and the maintenance cost is low, and only regular lubrication and motor 10 inspection are required. In addition, the response time of the motor 10 is fast, and the acceleration and deceleration process is smoother and more controllable, avoiding the collision phenomenon when the cylinder output end reaches the stroke terminal, thereby improving the working life of the equipment. Moreover, the motor 10 is easy to integrate with modern automatic control systems such as PLC or motion controllers, which is convenient for realizing digital and networked intelligent control.

[0042] The clamping claw assembly 30 grabs the wafer box when performing the clamping action.

[0043] Specifically, Figures 1 to 3As shown, the clamping mechanism also includes: a frame body 40 with a accommodating space; a clamping jaw assembly 30 located on one side outside the frame body 40; a transmission assembly 20 located in the accommodating space and fixed to the bottom end of the frame body 40, and extending part of the structure to connect with the clamping jaw assembly 30.

[0044] The frame body 40 is used to protect the related components or assemblies located inside it. The extended part of the transmission assembly 20 is connected to the clamping claw assembly 30 located outside the frame body 40, so as to transmit the power of the motor 10 to the clamping claw assembly 30 so as to clamp the wafer box.

[0045] Preferably, the motor 10 is located in the accommodating space and is fixed to the bottom end of the frame body 40 close to the transmission assembly 20 .

[0046] Among them, if the layout of components or assemblies is not considered, the motor 10 can be installed outside or inside the frame body 40; however, compared with the cylinder, the motor 10 has the characteristics of compact structure and small space occupation, and has greater application possibilities in the accommodating space of the frame body 40. Installing it in the accommodating space can improve the degree of integration of the clamping mechanism of this embodiment.

[0047] Example 2

[0048] Embodiment 2 of the present application provides a preferred method and specific structure of the transmission assembly and the clamping jaw assembly based on Embodiment 1 to improve the stability and reliability of the clamping assembly.

[0049] Preferably, if Figures 1 to 3 As shown, the transmission assembly 20 includes: a transmission belt 201, at least two transmission shafts 202, an active member 203 installed at the bottom end of the frame body, and at least two driven members 204 respectively arranged on both sides of the active member 203 and engaged with the active member 203; the clamping jaw assembly 30 includes at least two clamping jaw units; the frame body 40 includes a first surface and a second surface relative to each other; the transmission shaft 202 is passed through the driven member 204, one end of which is connected to the first surface, and the other end partially extends out of the second surface and is connected to the clamping jaw unit; the output end of the motor 10 is connected to the active member 203 through the transmission belt 201; the active member 203 is configured to rotate under the traction of the transmission belt 201, driving the driven member 204 and the transmission shaft 202 to rotate synchronously, so that the two relative clamping jaw units are close to or away from each other.

[0050] Preferably, the motor 10 is disposed between two adjacent transmission shafts 202 , wherein the motor 40 is disposed close to the transmission assembly 20 to simplify the layout of the internal accommodation space of the frame body 40 .

[0051] In one embodiment of the present application, the active member 203 is a worm, and the driven member 204 is a worm wheel; the worm rotates along the circumference of its body under the traction of the transmission belt 201; the normal direction of the worm wheel is perpendicular to the length direction of the worm, and the worm wheel performs circular motion driven by the worm.

[0052] The spiral direction of the worm is right-handed. Figure 1 From the perspective analysis along the direction from the transmission assembly 20 to the clamping jaw assembly 30, it can be seen that when the motor 10 drives the worm to rotate through the transmission belt 201, the left and right worm wheels meshing with the worm start to rotate, and the left worm wheel and the transmission shaft 202 rotate counterclockwise synchronously, and the right worm wheel and the transmission shaft 202 rotate clockwise synchronously to drive the clamping jaw assembly 30 to clamp the wafer box; at the same time, the worm gear has a self-locking characteristic, and the worm drives the worm wheel to rotate. Regardless of whether the worm is rotating forward or reverse, because there is a specific friction between the worm gear and the worm gear, the worm wheel cannot drive the worm to rotate in turn. Therefore, when the transmission shaft 202 is affected by its own power or other external forces, it cannot destroy the stability of the clamping jaw assembly 30, thereby improving the stability of the clamping action.

[0053] Optionally, the transmission belt 201 may be a belt or a chain.

[0054] Specifically, Figures 1 to 3 As shown, the clamp unit includes: a rotating shaft 301, a mounting seat 302 and a clamp body 303 fixed to the mounting seat 302; one end of the rotating shaft 301 is connected to one end of the transmission shaft 202 that partially extends out of the second surface, and the other end is connected to the mounting seat 302, and is configured to make the clamp body 303 and the transmission shaft 202 rotate in the same direction.

[0055] The rotating shaft 301 rotates synchronously with the transmission shaft 202 under the drive of the transmission shaft 202 ; the mounting seat 302 is used to fix the clamp body 303 and the rotating shaft 301 to improve the reliability of the clamp assembly 30 .

[0056] Preferably, if Figure 1 to Figure 2 As shown, the clamp body 303 includes a clamping rod in a "U"-shaped structure; when the clamp assembly 30 performs a clamping action, the distance between the two opposite clamping rods is less than a preset distance.

[0057] The "U"-shaped structure of the clamping rod matches the outer contour of the wafer box, so that the "U"-shaped structure can clamp the wafer box when the clamping action is performed. In the initial state, the two clamping rods are suspended freely; when the clamping rods reach the position of the wafer box, the two clamping rods are driven by the motor 10 and the transmission assembly 20 to approach each other to clamp the wafer box. In the process of the clamping rods approaching each other, the distance between them gradually decreases; the preset distance refers to the distance between the two clamping rods when they are suspended.

[0058] Alternatively, if Figure 1 and Figure 2 As shown, the clamping mechanism further includes: a sensing component 50, which is disposed on one side of the mounting base 302 close to the clamp body 303 and is configured to contact the clamped object when the clamp component 30 performs a clamping action.

[0059] Among them, the sensing component 50 can adopt a sensing rod type sensor; when the clamping claw component 30 clamps the wafer box, the two clamping rods are synchronously retracted inward to clamp the wafer box. When the sensing rod touches the wafer box, it means that the clamping action is successfully executed, avoiding the subsequent process confusion caused by the clamping claw component 30 grabbing empty wafers, and improving the accuracy of the clamping mechanism.

[0060] Example 3

[0061] Example 3 of the present application provides a wet cleaning device based on Example 2.

[0062] A wet cleaning device comprises the clamping mechanisms of embodiment 1 and embodiment 2.

[0063] Among them, when the wafer is in the cleaning process, the clamping mechanism is used to pick and place the wafer box. First, the automation device in the wet cleaning equipment will move the clamping mechanism to a position aligned with the wafer box for docking; then, the clamping mechanism drive motor starts to make the clamping claw assembly contact and grasp the specified position of the wafer box; then, after the clamping mechanism successfully clamps the wafer box, there will be a confirmation process to ensure that the clamping is firm and reliable. The automation device lifts the wafer box from the conveyor belt and transports it to the cleaning chamber through the clamping mechanism; finally, the wafer box is released and placed in the correct position of the cleaning chamber. After cleaning, the clamping mechanism retrieves the wafer box again according to the reverse process and places it on the conveyor line or storage rack of the next process.

[0064] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present application. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner.

[0065] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In the description of this application, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0066] Although the embodiments of the present application have been shown and described above, it can be understood that the above embodiments are exemplary and cannot be understood as limitations on the present application. Ordinary technicians in this field can change, modify, replace and modify the above embodiments within the scope of the present application.

Claims

1. A clamping mechanism, characterized in that: include: A motor configured to drive the transmission assembly to operate; The transmission assembly is configured to be connected to the output end of the motor at one end and to be connected to the clamping jaw assembly at the other end so as to transmit the power of the motor to the clamping jaw assembly; The clamping jaw assembly is configured to perform a clamping action driven by the transmission assembly; The transmission assembly includes a transmission belt, at least two transmission shafts, a driving member, and at least two driven members respectively arranged on both sides of the driving member and engaged with the driving member; The clamping jaw assembly comprises at least two clamping jaw units; The transmission shaft passes through the driven member and is connected to the clamping jaw unit; The output end of the motor is connected to the active member through the transmission belt; the active member is configured to rotate under the traction of the transmission belt, driving the driven member and the transmission shaft to rotate synchronously, so that the two relative clamping jaw units are moved closer or farther away.

2. The clamping mechanism according to claim 1, characterized in that: The active member is a worm, and the driven member is a worm wheel; The worm rotates along the circumference of its body under the traction of the transmission belt; The normal direction of the worm wheel is perpendicular to the length direction of the worm, and the worm wheel performs circular motion driven by the worm.

3. The clamping mechanism according to claim 1, characterized in that: The clamping jaw unit comprises a rotating shaft, a mounting seat and a clamping jaw body fixed to the mounting seat; One end of the rotating shaft is connected to one end of the transmission shaft close to the clamping jaw unit, and the other end is connected to the mounting seat, and is configured to make the clamping jaw body and the transmission shaft rotate in the same direction.

4. The clamping mechanism according to claim 3, characterized in that: The clamp body includes a clamping rod in a "U"-shaped structure; When the clamping jaw assembly performs the clamping action, the distance between the two opposing clamping rods is smaller than a preset distance.

5. The clamping mechanism according to claim 3, characterized in that: Also includes: The induction component is arranged on the mounting seat and has a partial structure close to one side of the clamp body, and is configured to contact the clamped object when the clamp component performs the clamping action.

6. The clamping mechanism according to claim 1, characterized in that: Also included: a frame body having a receiving space; The clamping jaw assembly is located on one side outside the frame body; The transmission assembly is located in the accommodating space and is fixed to the bottom end of the frame body, and a portion of the structure extends out to be connected to the clamping claw assembly.

7. The clamping mechanism according to claim 6, characterized in that: The motor is located in the accommodation space and fixed to the bottom end of the frame body; Wherein, the motor is arranged close to the transmission assembly.

8. The clamping mechanism according to claim 1, characterized in that: The transmission belt is a belt or a chain.

9. A wet cleaning device, characterized in that: include: A clamping mechanism as claimed in any one of claims 1 to 8.

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