Experimental equipment

Abstract

The utility model relates to experimental equipment. The experimental equipment comprises a table main body, a circulating device and a bubbling device, the table main body is provided with an experiment groove, and the experiment groove is used for containing liquid; and the circulating device is arranged in the accommodating cavity. The suction end and the output end of the circulating device are both communicated with the experimental tank, and the circulating device is used for extracting the liquid in the experimental tank from the suction end and conveying the liquid back to the experimental tank again through the output end; and the bubbling device is at least partially arranged in the experimental tank, and the bubbling device is used for injecting gas into the liquid. According to the experimental equipment, the circulating device and the bubbling device are additionally arranged in the experimental tank, so that the concentration difference of solutes in liquid caused by non-uniform mixing of the liquid can be reduced, the influence on the quality of a silicon wafer is reduced, and the experimental accuracy is improved.

Description

Technical Field

[0001] The present application relates to the technical field of experimental devices, and in particular to an experimental device. Background Art

[0002] Solar cell related experiments need to be completed with experimental equipment. Due to the diversity of experiments, multiple reagents need to be involved in the reaction test with silicon wafers. The current experimental equipment has a single function and it is difficult to fully mix the reagents, which affects the quality of silicon wafers and reduces the accuracy of the experiment. Utility Model Content

[0003] Based on this, it is necessary to provide an experimental device to address the problem that the current experimental equipment has a single function, is difficult to fully mix the reagents, affects the quality of the silicon wafer, and reduces the accuracy of the experiment.

[0004] An experimental device, comprising:

[0005] A table body, wherein the table body has an experimental tank, and the experimental tank is used to hold liquid;

[0006] A circulation device, wherein both the suction end and the output end of the circulation device are connected to the experimental tank, and the circulation device is used to extract the liquid in the experimental tank from the suction end and transport the liquid back to the experimental tank through the output end; and

[0007] A bubbling device is at least partially disposed in the experimental tank, and is used to inject gas into the liquid.

[0008] In one embodiment, the table body further has a receiving cavity, the receiving cavity is located outside the experimental tank, and the circulation device is at least partially disposed in the receiving cavity. Compared with completely disposing the circulation device outside the table body, disposing the circulation device partially in the receiving cavity of the table body can reduce the space occupied by the experimental equipment and improve the space utilization rate of the experimental equipment.

[0009] In one embodiment, the experimental tank further includes a liquid outlet and a liquid inlet connected to the accommodating chamber, the circulation device includes a circulation pump and a circulation pipeline at least partially located in the accommodating chamber, the circulation pump includes the suction end and the output end, the circulation pipeline includes a third pipeline and a fourth pipeline, the third pipeline is respectively connected to the liquid outlet and the suction end, and the fourth pipeline is respectively connected to the output end and the liquid inlet. Adding the third pipeline and the fourth pipeline between the circulation pump and the experimental tank can extend the liquid flow path and improve the liquid mixing effect.

[0010] In one embodiment, the table body is provided with a first outlet and a second outlet connected to the accommodating chamber, the experimental tank is provided with a first drain port and a second drain port connected to the accommodating chamber, and the experimental device further comprises a first pipe and a second pipe at least partially located in the accommodating chamber, the first pipe is respectively connected to the first outlet and the first drain port, the second pipe is respectively connected to the second outlet and the second drain port, the first pipe is used to discharge acidic liquid, and the second pipe is used to discharge alkaline liquid. Adding the first pipe and the second pipe can realize the classified discharge of acidic liquid and alkaline liquid, and avoid the safety hazard caused by the reaction of the mixed discharge of acidic liquid and alkaline liquid.

[0011] In one embodiment, the experimental equipment further includes a cover body disposed above the table body, the cover body having an operation cavity with one side opening, the operation cavity being connected to the experimental tank, and the cover body also having a first air outlet and a second air outlet both being connected to the operation cavity, the first air outlet being used to discharge acidic gas, and the second air outlet being used to discharge alkaline gas. Adding the first air outlet and the second air outlet can achieve the classified discharge of acidic gas and alkaline gas, and avoid the safety hazard caused by the reaction of the mixed discharge of acidic gas and alkaline gas.

[0012] In one embodiment, the bubbling device includes a fixing member and a bubbling member at least partially located in the experimental tank, the fixing member is used to fix the bubbling member, the bubbling member is provided with a plurality of air holes penetrating the bubbling member, the air holes are connected to the experimental tank, and the opening direction of the air holes is toward the bottom wall of the experimental tank. The air holes facing downward can conform to the movement of bubbles from bottom to top, thereby improving the bubbling effect.

[0013] In one embodiment, the bubbling member is a bubbling tube, and the bubbling tube includes a plurality of tube units spaced parallel to each other in a direction perpendicular to its length, and all the tube units are connected end to end in sequence, so that the bubbling tube can be arched, which is convenient for setting the bubbling tube, increasing the contact area between the bubbling tube and the liquid, and improving the mixing and defoaming effects.

[0014] In one embodiment, the experimental equipment further comprises a water adding device, which is at least partially located above the experimental tank and is used to add water to the experimental tank. The water adding device can replenish water to dilute the acidic liquid and the alkaline liquid.

[0015] In one embodiment, the experimental device further includes a liquid level sensor, which is electrically connected to the water adding device, and is used to detect the liquid level in the experimental tank, and when the liquid level in the experimental tank is at a first liquid level, control the water adding device to start, and when the liquid level in the experimental tank is at a second liquid level, control the water adding device to close. The liquid level sensor cooperates with the water adding device to achieve more precise control of the amount of water added.

[0016] In one embodiment, the experimental device further comprises a heating device, which is at least partially disposed in the experimental tank and is used to heat the liquid in the experimental tank. The heating device is used to heat the alkaline liquid and the silicon wafer during the reaction to promote the reaction.

[0017] The above experimental equipment is equipped with a circulation device and a bubbling device. The circulation device can change the flow direction of the liquid, which helps to evenly distribute the solute in the entire liquid system, thereby improving the mixing uniformity of the liquid. The bubbling device injects gas into the liquid to form bubbles. The rise and burst of the bubbles produce turbulence, which can promote the flow and mixing of the liquid. When liquid is added to the experimental tank for mixing, the difference in solute concentration inside the liquid caused by uneven mixing can be reduced, reducing the impact on the quality of the silicon wafer and improving the accuracy of the experiment. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] FIG. 1 is a three-dimensional diagram of an experimental device provided in an embodiment of the present application.

[0019] FIG. 2 is a front view of an experimental device provided in an embodiment of the present application.

[0020] FIG3 is a bottom view of an experimental device provided in an embodiment of the present application.

[0021] FIG. 4 is a bottom view of the heating device and the bubbling device provided in an embodiment of the present application.

[0022] FIG5 is a side view of a heating device and a bubbling device provided in an embodiment of the present application.

[0023] Explanation of the reference numerals: 100, experimental equipment; 1, table body; 11, experimental tank; 111, first liquid discharge port; 112, second liquid discharge port; 113, liquid outlet; 114, liquid inlet; 12, accommodating chamber; 13, first outlet; 14, second outlet; 15, first pipeline; 16, second pipeline; 17, third outlet; 18, fourth outlet; 2, circulation device; 21, circulation pump; 211, suction end; 212, output end; 22, circulation pipeline; 221, third pipeline; 222, fourth pipeline; 3, bubbling device; 31, fixing part; 32, bubbling part; 321, air hole; 4, cover body; 41, operating chamber; 42, first air outlet; 43, second air outlet; 5, water adding device; 6, liquid level sensor; 7, heating device; 8, control panel. DETAILED DESCRIPTION

[0024] In order to make the above-mentioned purposes, features and advantages of the present application more obvious and easy to understand, the specific implementation methods of the present application are described in detail below in conjunction with the accompanying drawings. In the following description, many specific details are set forth to facilitate a full understanding of the present application. However, the present application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without violating the connotation of the present application, so the present application is not limited by the specific embodiments disclosed below.

[0025] In the description of the present application, it should be understood that if the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. appear, the orientation or position relationship indicated by these terms is based on the orientation or position relationship shown in the accompanying drawings, which is only for the convenience of describing the present application and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present application.

[0026] In addition, if the terms "first" or "second" appear, these terms are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include at least one of the features. In the description of this application, if the term "plurality" appears, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0027] Before solar cells enter the production line for batch processing, pre-experiments are usually conducted on the laboratory bench to simulate the relevant process conditions and quickly obtain test results, reducing the time and manpower spent on experiments on the production line. Since the processing of solar cells involves multiple process steps, different process steps involve different experimental reagents, which requires the laboratory bench to have experimental conditions for handling different reagents for different reactions. At present, the process of acid washing and / or alkali washing of silicon wafers on the laboratory bench will affect the quality of the silicon wafers. For example, uneven corrosion will occur on the surface of the silicon wafer, resulting in inconsistent surface roughness of the silicon wafer, or the surface of the silicon wafer cannot be cleaned evenly, and pollutants or organic matter remain, or ionic impurities accumulate in certain areas on the surface of the silicon wafer, etc. The above situations will affect the light absorption performance and electron transmission performance of the solar cell to varying degrees, thereby reducing the photoelectric conversion efficiency of the solar cell, and thus affecting the experimental results.

[0028] Please refer to Figures 1 and 2. In order to solve the above problems, an embodiment of the present application provides an experimental device 100. The experimental device 100 includes a table body 1, a circulation device 2, and a bubbling device 3. The table body 1 has an experimental tank 11, and the experimental tank 11 is used to hold liquid. The suction end 211 and the output end 212 of the circulation device 2 are both connected to the experimental tank 11. The circulation device 2 is used to extract the liquid in the experimental tank 11 from the suction end 211 and re-transport the liquid back to the experimental tank 11 through the output end 212. The bubbling device 3 is at least partially arranged in the experimental tank 11, and the bubbling device 3 is used to inject gas into the liquid. The circulation device 2 can change the direction of the flow of the liquid, which helps the solute to be evenly distributed in the entire liquid system, thereby improving the mixing uniformity of the liquid. The bubbling device 3 injects gas into the liquid to form bubbles, and the rise and rupture of the bubbles produce turbulence, which can promote the flow and mixing of the liquid. Thus, by adding the circulation device 2 and the bubbling device 3, the liquid mixing uniformity is improved synchronously. When acid or alkali solution is added to the experimental tank 11 and other liquids are added for mixing, the difference in solute concentration inside the liquid caused by uneven mixing can be reduced, which can reduce the inconsistent surface roughness of the silicon wafer, or the residue of impurities or pollutants, thereby reducing the impact on the light absorption performance and electrical performance of the solar cell.

[0029] The table body 1 can be in the shape of a square table body or a cylindrical table body. In order to facilitate the operator's experiment, the opening of the experimental groove 11 is located on the upper surface of the table body 1. The experimental groove 11 can be in the shape of a square groove or a circular groove. The experimental groove 11 and the table body 1 can be made of chemically resistant materials, such as 304 or 316 stainless steel, epoxy resin, phenolic resin, etc.

[0030] Optionally, the circulation device 2 may be arranged outside the table body 1, or inside the table body 1, or partially outside the table body 1 and partially inside the table body 1. Preferably, in some embodiments, the table body 1 further has a receiving cavity 12, and the receiving cavity 12 is located outside the experimental tank 11, and the circulation device 2 is at least partially arranged in the receiving cavity 12, thereby reducing the space occupied by the experimental device 100 and improving the space utilization rate of the experimental device 100.

[0031] Please refer to Figures 1 and 2. It can be understood that the outline size of the table body 1 is larger than the outline size of the experimental tank 11 to provide a setting space for the accommodating cavity 12. The accommodating cavity 12 can be set on one side of the experimental tank 11, for example, on any one of the left side, right side, front side, rear side, and lower side. Correspondingly, the circulation device 2 can be set in the space on the left side, right side, front side, rear side, or lower side of the experimental tank 11. The circulation device 2 can be one or more, and multiple circulation devices 2 can be set on the same side or on different sides. The embodiment of the present application does not limit the position and number of the circulation device 2.

[0032] Please refer to Figure 2. Furthermore, in order to increase the setting space of the accommodating chamber 12 to accommodate other devices, the accommodating chamber 12 can be set on at least two sides of the experimental tank 11. For example, the accommodating chamber 12 surrounds the left side, right side, front side, rear side, and bottom side of the experimental tank 11 at the same time. In other words, the front wall, rear wall, left wall, right wall and bottom wall of the experimental tank 11 are all at a certain distance from the cavity wall of the table main body 1.

[0033] It should be noted that the circulation device 2 in the embodiment of the present application can be used to circulate acidic liquid or alkaline liquid. Since the alkaline liquid will produce hydrogen after reacting with the silicon wafer, the bubbling device 3 provided for the alkaline liquid can not only speed up the circulation of the liquid, but also reduce the adhesion of impurity gases such as hydrogen, thereby avoiding affecting the quality of the silicon wafer and further affecting the experimental results.

[0034] Please refer to FIG. 2 . In some embodiments, the experimental tank 11 further includes a liquid outlet 113 and a liquid inlet 114 connected to the accommodating chamber 12. The circulation device 2 includes a circulation pump 21 and a circulation pipeline 22 at least partially located in the accommodating chamber 12. The circulation pump 21 includes a suction end 211 and an output end 212. The circulation pipeline 22 includes a third pipeline 221 and a fourth pipeline 222. The third pipeline 221 is respectively connected to the liquid outlet 113 and the suction end 211, and the fourth pipeline 222 is respectively connected to the output end 212 and the liquid inlet 114. The circulation pump 21 pumps the liquid in the third pipeline 221 into the fourth pipeline 222, so that the liquid flows back into the experimental tank 11 from the liquid inlet 114, realizing a repetitive flow cycle. By adding a circulation pipe 22, the residence time of the liquid in the pipe is increased, the mixing time is prolonged, and the liquid is mixed more fully. In addition, the circulation pipe 22 can increase the liquid contact area and thus enhance the diffusion and exchange of solutes between liquids, and reduce the concentration difference of solutes in the liquids. Furthermore, the circulation pipe 22 can change the flow state of the liquid by increasing resistance and friction, generating turbulence, and thereby increasing the mixing shear force and mixing effect.

[0035] The liquid outlet 113 and the liquid inlet 114 are provided at different positions of the wall of the experimental tank 11, for example, the liquid outlet 113 is provided at the front wall of the experimental tank 11, and the liquid inlet 114 is provided at the rear wall of the experimental tank 11. Alternatively, the liquid outlet 113 is provided at the bottom wall of the experimental tank 11, and the liquid inlet 114 is provided at the rear wall of the experimental tank 11. The opening heights of the liquid outlet 113 and the liquid inlet 114 may be the same or different, and preferably, the opening height of the liquid inlet 114 is higher than the opening height of the liquid outlet 113, so that the liquid refluxed from the liquid inlet 114 forms convection, further enhancing the mixing effect.

[0036] The circulation pump 21 can be arranged at different positions of the experimental tank 11, for example, the circulation pump 21 can be arranged at the front side, the rear side, the left side, the right side or the bottom of the experimental tank 11. Preferably, in some embodiments, the circulation pump 21 is located at the bottom of the experimental tank 11, which can save space in the width direction of the table body 1, improve the space utilization rate of the table body 1, and make the structure of the experimental device 100 more compact.

[0037] The circulation pump 21 includes a pump body, an impeller, a pump shaft and a motor. The pump body is provided with a suction end 211 and an output end 212. The pump shaft is connected to the motor and the impeller, and transmits the power of the motor to the impeller to rotate it. The impeller sucks the liquid from the suction end 211 and ejects the liquid from the output end 212 to the fourth pipe 222. The embodiment of the present application does not limit the type of the circulation pump 21. The circulation pump 21 can be a pneumatic diaphragm pump, an electric diaphragm pump, a piston pump, a plunger pump or a self-priming centrifugal pump, etc.

[0038] The bubbling device 3 can be completely arranged inside the experimental tank 11, or partially arranged inside the experimental tank 11. The bubbling device 3 can be arranged at different positions of the experimental tank 11, for example, the bubbling device 3 can be arranged at the bottom wall of the experimental tank 11, or at the front wall, rear wall, left wall or right wall of the experimental tank 11. The bubbling device 3 can be arranged at different heights below the liquid level. There can be one or more bubbling devices 3, and multiple bubbling devices 3 can be arranged in the experimental tank 11 in a symmetrical or asymmetrical manner, which can increase the uniformity of bubble distribution and improve the fluidity of the liquid.

[0039] Referring to Fig. 2, Fig. 4 and Fig. 5, in some embodiments, the bubbling device 3 includes a fixing member 31 and a bubbling member 32 at least partially located in the experimental tank 11, the fixing member 31 is used to fix the bubbling member 32, and the bubbling member 32 is provided with a plurality of air holes 321 penetrating the bubbling member 32, and the air holes 321 are connected to the experimental tank 11. The fixing member 31 is used to stabilize the bubbling tube and keep the bubbling tube in a proper position.

[0040] Optionally, the fixing member 31 may be a bracket or a clamp, and the bubbling member 32 may be a bubbling tube, a bubbling rod, a bubbling tube or a bubbling plate, etc. Referring to Fig. 4, preferably, in some embodiments, the bubbling member 32 is a bubbling tube, and the bubbling tube includes a plurality of tube units spaced parallel to each other in a direction perpendicular to its own length, and all the tube units are connected end to end in sequence. Thus, the bubbling tube can be formed into an arch, and the bendability of the bubbling tube can flexibly adjust the shape and length, and the arched bubbling tube can increase, reduce or prevent bubbles from being blocked in the pipeline, and the torsion and bending of the bubbling tube can reduce the accumulation of bubbles at a certain point in the pipeline, and can also increase the contact area between the bubbles and the liquid, thereby promoting uniform mixing of the liquid.

[0041] Please refer to Figures 4 and 5, the air holes 321 can be arranged at intervals along the length direction of the bubbling tube. Optionally, the opening direction of the air holes 321 can be toward at least one of the front wall, rear wall, left wall, right wall, and bottom wall of the experimental tank 11. Preferably, in some embodiments, the opening direction of the air holes 321 is toward the bottom wall of the experimental tank 11, so that bubbles escape from the bottom of the bubbling member 32, and the movement from bottom to top causes convection of the liquid to accelerate the mixing of the liquid.

[0042] Furthermore, the bubbling device 3 also includes a gas supply component and a gas control component located outside the experimental tank 11. The gas supply component is used to provide gas to the bubbling member 32. The gas supply component can be a gas cylinder, a gas bottle or a gas source pipeline, etc. The gas can be nitrogen, argon or other gases that do not react with liquids. The gas control component includes a first pneumatic valve and a flow meter. The pneumatic valve can control the opening or closing of the gas supply component to supply or interrupt the supply of gas to the bubbling member 32, and the flow meter can control the flow rate of the gas supply.

[0043] Please refer to Figure 3. In some embodiments, the table body 1 is provided with a first outlet 13 and a second outlet 14 connected to the accommodating chamber 12, the experimental tank 11 is provided with a first drain port 111 and a second drain port 112 connected to the accommodating chamber 12, and the experimental equipment 100 also includes a first pipe 15 and a second pipe 16 at least partially located in the accommodating chamber 12, the first pipe 15 is respectively connected to the first outlet 13 and the first drain port 111, the second pipe 16 is respectively connected to the second outlet 14 and the second drain port 112, the first pipe 15 is used to discharge acidic liquid, and the second pipe 16 is used to discharge alkaline liquid, so as to achieve separate discharge of acidic liquid and alkaline liquid.

[0044] Furthermore, the opening and closing of the first pipeline 15 and the second pipeline 16 are controlled by the second pneumatic valve and the third pneumatic valve, respectively. When the experimental tank 11 needs to discharge the acidic liquid, the second pneumatic valve is opened, so that the first pipeline 15 is connected to the first outlet 13 and the first drain port 111 to discharge the acidic liquid, and the third pneumatic valve is closed at this time. When the experimental tank 11 needs to discharge the alkaline liquid, the third pneumatic valve is opened, so that the second pipeline 16 is connected to the second outlet 14 and the second drain port 112 to discharge the alkaline liquid, and the second start valve is closed at this time.

[0045] Optionally, the first pipe 15 and the second pipe 16 are both made of corrosion-resistant materials, such as polypropylene or polyvinyl chloride pipes. Further, a first liquid reservoir can be provided at the first liquid discharge port 111 to collect acidic liquids, and a second liquid reservoir can be provided at the second liquid discharge port 112 to collect alkaline liquids, thereby facilitating classified recycling.

[0046] Please refer to FIG. 2 . In some embodiments, the experimental device 100 further includes a water adding device 5 . The water adding device 5 is at least partially located above the experimental tank 11 . The water adding device 5 is used to add water to the experimental tank 11 .

[0047] Further, in order to set up the water adding device 5, the table body 1 is provided with a third outlet 17 and a fourth outlet 18 connected to the accommodating chamber 12, the fourth outlet 18 is connected to the experimental tank 11, and the water adding device 5 is connected to the third outlet 17 and the fourth outlet 18 respectively, and the water adding device 5 is used to add water to the experimental tank 11. The water adding device 5 can be used to dilute the acidic liquid or the alkaline liquid, thereby adjusting the concentration of the liquid.

[0048] The water adding device 5 includes a water pipe, a water supply component and a water source control component which are at least partially arranged above the experimental tank 11. The water pipe connects the third outlet 17 and the fourth outlet 18. One end of the water pipe extends upward through the fourth outlet 18 to the top of the experimental tank 11. The other end of the water pipe is connected to the water supply component after passing through the third outlet 17. The water source control component can be arranged on the water pipe. The water source supply component is used to provide liquid to the water pipe. The water source supply component can be a water tank or a factory water pipe with a water pump. The water source control component can be a pneumatic valve, a gate valve, a hydraulic valve, a solenoid valve, etc. Taking the pneumatic valve as an example, the water source control component is the fourth pneumatic valve. The fourth pneumatic valve is used to control the opening or closing of the water source supply component so as to supply or interrupt the supply of water to the water pipe.

[0049] Please refer to FIG. 2 . In some embodiments, the experimental device 100 further includes a liquid level sensor 6. The liquid level sensor 6 is electrically connected to the fourth pneumatic valve of the water adding device 5. The liquid level sensor 6 is used to detect the liquid level in the experimental tank 11, and when the liquid level in the experimental tank 11 is at a first liquid level, the water adding device 5 is controlled to start, and when the liquid level in the experimental tank 11 is at a second liquid level, the water adding device 5 is controlled to close. It can be understood that the first liquid level is lower than the second liquid level. The liquid level sensor 6 can cooperate with the water adding device 5 to achieve more accurate control of the water intake.

[0050] Optionally, the liquid level sensor 6 can be a float liquid level sensor, a piezoresistive liquid level sensor or a capacitive liquid level sensor. The float liquid level sensor detects the liquid level height by the buoyancy of the float. When the liquid level rises or falls, the float will rise or fall accordingly, and the sensor determines the liquid level height by detecting the position change of the float. The piezoresistive liquid level sensor determines the liquid level height by measuring the pressure of the liquid on the sensor surface. There is a pressure measuring resistor inside the sensor, and the pressure change causes the resistance value to change, thereby knowing the liquid level height. The capacitive liquid level sensor uses the capacitance effect to measure the liquid level height. There is a pair of electrodes inside the sensor. When the liquid contacts the electrodes, the capacitance value changes, and the liquid level height is determined by measuring the capacitance change.

[0051] Please refer to FIG. 2 . In some embodiments, the experimental device 100 further includes a heating device 7, which is at least partially disposed in the experimental tank 11 and is used to heat the liquid in the experimental tank 11. It should be noted that the heating device 7 is set for the alkaline liquid, and the reaction between the alkaline liquid and the silicon wafer is promoted by heating to improve the reaction effect. In the process of the reaction between the silicon wafer and the acidic liquid, if the heating device 7 is used, a large amount of acidic gas will be generated, which will increase the corrosiveness of the acidic liquid and increase the safety risk.

[0052] Furthermore, the heating device 7 includes a heating element, a connecting wire, a power supply, a temperature sensor, a timer, etc. The heating element, the connecting wire and the temperature sensor are at least partially arranged in the experimental tank 11, and the power supply and the timer are arranged outside the experimental tank 11. The heating element is sealed and electrically connected to the power supply through the connecting wire, and the power supply transmits electrical energy to the heating element through the connecting wire to heat the heating element. The temperature sensor is electrically connected to the power supply and is used to detect the temperature of the liquid inside the experimental tank 11. The timer is electrically connected to the power supply and is used to control the power supply to be turned off when the set heating time is reached.

[0053] Optionally, the heating element may be a heating tube, a heating plate or a heating rod. The temperature sensor includes a thermistor temperature sensor, a thermocouple temperature sensor and the like.

[0054] Please refer to FIG. 1 . In some embodiments, the experimental device 100 further includes a cover body 4 disposed above the table body 1. The cover body 4 has an operation cavity 41 with one side opening. The operation cavity 41 is connected to the experimental tank 11. The cover body 4 is also provided with a first air outlet 42 and a second air outlet 43 both connected to the operation cavity 41. The first air outlet 42 is used to discharge acidic gas, and the second air outlet 43 is used to discharge alkaline gas. Discharging acidic gas or alkaline gas separately can avoid chemical reaction caused by simultaneous discharge of the two gases, reduce the harm, and can classify and centrally process the gases.

[0055] Further, the first air outlet 42 can be connected to the first exhaust duct, and the first fan can be used to suck and exhaust air. The second air outlet 43 can be connected to the second exhaust duct, and the second fan can be used to suck and exhaust air. The first air outlet 42 and the second air outlet 43 can be located at the side wall or top wall of the cover body 4, preferably at the top wall of the cover body 4, which can adapt to the upward movement of the gas and facilitate discharge.

[0056] Please refer to Fig. 1, the experimental device 100 of the present application further includes a control panel 8, which is disposed on the cover body 4. The control panel 8 is electrically connected to the circulation pump 21 of the circulation device 2, the gas control component of the bubbling device 3, the first pneumatic valve, the second pneumatic valve, the third pneumatic valve, the fourth pneumatic valve, the power supply of the heating device 7, the first blower and the second blower, and is controlled by setting a PCL control system.

[0057] The following describes the use principle of the experimental device 100 of the present application: It should be noted that the acidic liquid used in the experiment in the embodiment of the present application is hydrofluoric acid or nitric acid, etc. The alkaline liquid is sodium hydroxide, potassium hydroxide, etc.

[0058] In an exemplary embodiment, when conducting an acid experiment, a silicon wafer is placed in the test tank 11, and the first fan is turned on and the second fan is turned off through the control panel 8, so that the first fan extracts the acid gas from the first air outlet 42. The fourth pneumatic valve of the water adding device 5 is controlled to open according to the set value through the control panel 8, so that the water pipe adds water to the test tank 11, and the operator adds acidic liquid, and then controls the water pipe through the control panel 8 to continue to add water to the test tank 11 until the liquid level sensor 6 detects that the liquid level reaches the second liquid level and then stops adding. The circulation pump 21 of the circulation device 2 is controlled by the control panel 8 to start the liquid pumping circulation, so that the acidic liquid and water are fully mixed and uniform. After the reaction between the silicon wafer and the liquid is completed after the set time, the second pneumatic valve is controlled to open through the control panel 8, and the first pipeline 15 discharges the acidic liquid.

[0059] Another exemplary method is to place a silicon wafer in the experimental tank 11 when conducting an alkaline experiment, turn on the second fan and turn off the first fan through the control panel 8, so that the second fan extracts alkaline gas from the second air outlet 43. The fourth pneumatic valve of the water adding device 5 is controlled to open according to the set value through the control panel 8, so that the water pipe adds water to the experimental tank 11, and the operator adds alkaline liquid, and then the water adding device 5 is controlled by the control panel 8 to continue to add water to the experimental tank 11 until the liquid level sensor 6 detects that the liquid level reaches the second liquid level and stops adding. The circulation pump 21 of the circulation device 2 is controlled by the control panel 8, and the first pneumatic valve of the bubbling device 3 is opened and the power supply of the heating device 7 is started to start liquid circulation, gas bubbling and heating of the liquid. When the set time is reached and the reaction between the silicon wafer and the liquid is completed, the third pneumatic valve is controlled to open through the control panel 8, and the second pipeline 16 discharges the alkaline liquid.

[0060] In summary, the experimental equipment of the present application can integrate multiple functions such as adding water, heating, liquid circulation, bubbling, separate discharge of acidic liquid and alkaline liquid, and separate discharge of acidic gas and alkaline gas. It can carry out the reaction of acidic liquid or alkaline liquid with silicon wafer in one experimental tank, and set a heating device and a bubbling device for the alkaline liquid. While promoting the reaction of the alkaline liquid with the silicon wafer, it reduces the influence of by-products such as hydrogen generated by the alkaline liquid and the silicon wafer on the silicon wafer, thereby improving the accuracy of the experimental results.

[0061] In this application, unless otherwise clearly specified and limited, if the terms "installed", "connected", "connected", "fixed" and the like appear, these terms should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integrated connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to the specific circumstances.

[0062] In the present application, unless otherwise clearly specified and limited, if there is a description that a first feature is "above" or "below" a second feature, etc., or similar descriptions appear, it may mean that the first and second features are in direct contact, or that the first and second features are in indirect contact through an intermediate medium. Moreover, the first feature being "above", "above" and "above" the second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. The first feature being "below", "below" and "below" the second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0063] It should be noted that if an element is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or there may be a central element. If an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be a central element at the same time. If any, the terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used in this application are for illustrative purposes only and do not represent the only implementation method.

[0064] The technical features of the above-described embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0065] The above-described embodiments only express several implementation methods of the present application, and the descriptions thereof are relatively specific and detailed, but they cannot be construed as limiting the scope of the patent application. It should be pointed out that, for a person of ordinary skill in the art, several variations and improvements can be made without departing from the concept of the present application, and these all belong to the protection scope of the present application. Therefore, the protection scope of the patent application shall be subject to the attached claims.

Claims

1. An experimental device, characterized in that: include: A table body (1), the table body (1) having an experimental tank (11), the experimental tank (11) being used to contain liquid; a circulation device (2), wherein the suction end (211) and the output end (212) of the circulation device (2) are both connected to the experimental tank (11), and the circulation device (2) is used to extract the liquid in the experimental tank (11) from the suction end (211) and transport the liquid back to the experimental tank (11) via the output end (212); and A bubbling device (3), wherein the bubbling device (3) is at least partially disposed in the experimental tank (11), and the bubbling device (3) is used to inject gas into the liquid.

2. The experimental device according to claim 1, characterized in that The table body (1) further comprises a containing cavity (12), wherein the containing cavity (12) is located outside the experimental tank (11), and the circulation device (2) is at least partially disposed in the containing cavity (12).

3. The experimental device according to claim 2, characterized in that: The experimental tank (11) further comprises a liquid outlet (113) and a liquid inlet (114) which are in communication with the accommodating chamber (12); the circulation device (2) comprises a circulation pump (21) and a circulation pipeline (22) which are at least partially located in the accommodating chamber (12); the circulation pump (21) comprises the suction end (211) and the output end (212); the circulation pipeline (22) comprises a third pipeline (221) and a fourth pipeline (222); the third pipeline (221) is in communication with the liquid outlet (113) and the suction end (211), respectively; the fourth pipeline (222) is in communication with the output end (212) and the liquid inlet (114), respectively.

4. The experimental device according to claim 2, characterized in that: The table body (1) is provided with a first outlet (13) and a second outlet (14) which are communicated with the accommodating chamber (12); the experimental tank (11) is provided with a first liquid discharge port (111) and a second liquid discharge port (112) which are communicated with the accommodating chamber (12); the experimental device (100) further comprises a first pipe (15) and a second pipe (16) which are at least partially located in the accommodating chamber (12); the first pipe (15) is communicated with the first outlet (13) and the first liquid discharge port (111), respectively; the second pipe (16) is communicated with the second outlet (14) and the second liquid discharge port (112), respectively; the first pipe (15) is used to discharge acidic liquid; and the second pipe (16) is used to discharge alkaline liquid.

5. The experimental device according to claim 1, characterized in that: The experimental device (100) further comprises a cover body (4) arranged above the table body (1), the cover body (4) having an operation cavity (41) with one side open, the operation cavity (41) being connected to the experimental tank (11), the cover body (4) also having a first air outlet (42) and a second air outlet (43) both connected to the operation cavity (41), the first air outlet (42) being used to discharge acidic gas, and the second air outlet (43) being used to discharge alkaline gas.

6. The experimental device according to claim 1, characterized in that: The bubbling device (3) comprises a fixing member (31) and a bubbling member (32) at least partially located in the experimental tank (11); the fixing member (31) is used to fix the bubbling member (32); the bubbling member (32) is provided with a plurality of air holes (321) penetrating the bubbling member; the air holes (321) are connected to the experimental tank (11); and the opening direction of the air holes (321) faces the bottom wall of the experimental tank (11).

7. The experimental device according to claim 6, characterized in that The bubbling member (32) is a bubbling tube, and the bubbling tube comprises a plurality of tube units spaced in parallel along a direction perpendicular to the length of the bubbling tube, and all of the tube units are connected end to end in sequence.

8. The experimental device according to any one of claims 1 to 7, characterized in that: The experimental device (100) further comprises a water adding device (5), wherein the water adding device (5) is at least partially located above the experimental tank (11), and the water adding device (5) is used to add water to the experimental tank (11).

9. The experimental device according to claim 8, characterized in that The experimental device (100) further comprises a liquid level sensor (6), wherein the liquid level sensor (6) is electrically connected to the water adding device (5), and the liquid level sensor (6) is used to detect the liquid level in the experimental tank (11), and to control the water adding device (5) to start when the liquid level in the experimental tank (11) is at a first liquid level, and to control the water adding device (5) to close when the liquid level in the experimental tank (11) is at a second liquid level.

10. The experimental device according to any one of claims 1 to 7, characterized in that: The experimental device (100) further comprises a heating device (7), wherein the heating device (7) is at least partially disposed in the experimental tank (11), and the heating device (7) is used to heat the liquid in the experimental tank (11).

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