Blended chemical supply system
By designing a compound chemical supply system, including chemical mixing tanks, filters and nitrogen transportation pipelines, the problem of uniform mixing and supply of highly corrosive chemicals in semiconductor manufacturing is solved, and the stable supply of chemicals and production efficiency is improved.
Patent Information
- Application Number
- CN202323632653.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2023-12-29
- Publication Date
- 2024-12-10
- Estimated Expiration
- 2033-12-29
AI Technical Summary
During semiconductor manufacturing, it is difficult to supply evenly with highly corrosive chemicals, and the prior art lacks an effective self-mixing supply system, resulting in supply interruptions and low production efficiency.
A mixed chemical supply system is designed, including chemical mixing tanks, ultrapure water, additives and hydrogen peroxide connections, equipped with filters, pumps, sampling boxes, conductivity measurement areas, nitrogen transport pipelines and exhaust pipelines. The control cabinet achieves uniform mixing and stable supply of chemicals.
It achieves the continuous and stable supply of chemicals, improves the production efficiency of semiconductor manufacturing plants, avoids production interruptions, and enhances the safety of the supply system.
Smart Images
Figure CN222131750U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to a supply system, in particular to a mixed chemical supply system. Background Art
[0002] In the semiconductor manufacturing process, highly corrosive chemicals are involved in etching. Before supplying to the semiconductor production line, it is generally necessary to mix the various mixed materials in the mixing tank evenly. However, due to the high corrosiveness of the materials, it is generally not suitable to set up a stirring mechanism in the tank, which requires a self-mixing supply system. Utility Model Content
[0003] The utility model aims to complete uniform mixing of various materials in the semiconductor manufacturing process.
[0004] In order to achieve the above purpose, the utility model adopts the following technical solutions:
[0005] The utility model provides a mixed chemical supply system, including a mixed chemical supply control cabinet and a chemical mixing tank. The chemical mixing tank is externally connected to an ultrapure water connection port, an additive connection port and a hydrogen peroxide connection port, the first end of a first mixed chemical transport pipeline is connected to the chemical mixing tank, the second end of the first mixed chemical transport pipeline enters the mixed chemical supply control cabinet, and is connected to the inlet end of a first filter in the cabinet of the mixed chemical supply control cabinet, the outlet end of the first filter is connected to the inlet end of a second filter, and the outlet end of the second filter is connected to the mixed chemical supply interface of the mixed chemical supply control cabinet; the first filter is connected to the second mixed chemical transport pipeline upstream of the first filter, and the second mixed chemical transport pipeline passes through the cabinet of the mixed chemical supply control cabinet and is connected to the chemical mixing tank.
[0006] In a preferred embodiment, the first transport pipeline for the mixed chemicals is provided with a pump, such as a magnetic pump, and the pump is located upstream of the first filter.
[0007] The number of the pumps may be one or at least two. When there are at least two pumps, the pumps may be arranged in parallel.
[0008] In a preferred embodiment, the first filter and the second filter may be one, or a group (ie, more than one, for example, at least two). When the first filter and the second filter are a group, the first filters are arranged in parallel.
[0009] In a preferred embodiment, the mixed chemical supply control cabinet is provided with a sampling box; a first mixed chemical transport branch is connected to the pipeline between the second filter and the mixed chemical supply interface, the first mixed chemical transport branch is connected to the first sampling port, and the first sampling port is connected to the sampling box.
[0010] In a preferred embodiment, a conductivity measurement area is provided on the second mixed chemical transport pipeline, and the conductivity measurement area is located on the pipeline before the second mixed chemical transport pipeline passes through the mixed chemical supply control cabinet.
[0011] In a preferred embodiment, on the second mixed chemical transport pipeline, the conductivity measurement area upstream is connected to a second mixed chemical transport branch, and the second mixed chemical transport branch is connected to the second sampling port.
[0012] In a preferred embodiment, the mixed chemical supply control cabinet is provided with a first nitrogen transport pipeline, a first end of the first nitrogen transport pipeline is connected to a nitrogen source interface, and a second end of the first nitrogen transport pipeline is connected to a chemical mixing tank.
[0013] In a preferred embodiment, a gas filter is provided downstream of the nitrogen source interface on the first nitrogen transport pipeline.
[0014] In a preferred embodiment, a valve control area is provided before the first nitrogen transport pipeline passes through the cabinet of the mixed chemical supply control cabinet and downstream of the gas filter.
[0015] In a preferred embodiment, before the first nitrogen transport pipeline passes through the mixed chemical supply control cabinet and downstream of the valve control area, a first nitrogen transport branch is connected, and the first nitrogen transport branch is connected to a liquid level meter.
[0016] In a preferred embodiment, a second nitrogen transport branch is connected to the pipeline between the gas filter and the valve control area, and the second nitrogen transport branch is connected to a nitrogen gun, which is located in the chamber of the mixing chemical supply control cabinet.
[0017] In a preferred embodiment, the mixed chemical supply control cabinet is provided with a sampling box, and the first sampling port and the second sampling port are both connected to the sampling box.
[0018] In a preferred embodiment, the cleaning water source interface is connected to a water gun and a sampling box, wherein the water gun is located in a chamber of a mixing chemical supply control cabinet.
[0019] In a preferred embodiment, the mixed chemical supply control cabinet is provided with an exhaust pipe, wherein any one of the sampling box and the liquid level meter can be connected to the exhaust pipe.
[0020] In a preferred embodiment, the mixed chemical supply control cabinet is provided with a drain pipe, wherein various valves, pumps, and pipes provided in the mixed chemical supply control cabinet can be connected to the drain pipe, for example: any one of the chamber of the mixed chemical supply control cabinet, the liquid level gauge, the exhaust pipe, the sampling box, the first filter, the second filter, and the magnetic pump can be connected to the drain pipe.
[0021] It should be understood that, in the present application, each pipeline for conveying mixed chemicals, each pipeline for conveying nitrogen, each pipeline for conveying water, and each branch can be individually provided with a valve.
[0022] Compared with the prior art, the technical solution of the utility model has the following beneficial effects:
[0023] The utility model provides a mixed chemical supply system. By connecting the mixed chemical supply control cabinet and the chemical mixing tank, the continuous and stable supply of the mixed chemical is achieved, the supply efficiency of the mixed chemical is improved, and the production efficiency of the semiconductor manufacturing plant is improved, and the temporary production or production reduction caused by the interruption of the mixed chemical supply in the production process of semiconductor devices is avoided; by purging and cleaning the internal chamber with nitrogen and cleaning water sources, the safety of the mixed chemical after the supply is completed is improved. BRIEF DESCRIPTION OF THE DRAWINGS
[0024] The drawings that constitute part of this application are used to provide a further understanding of this application. The illustrative embodiments of this application and their descriptions are used to explain this application and do not constitute an improper limitation on this application. In the drawings:
[0025] Figure 1 It is a process flow chart of a mixed chemical supply system according to a preferred embodiment of the utility model.
[0026] Figure 2 This is a process flow chart of a mixed chemical supply system according to another preferred embodiment of the utility model.
[0027] Legend:
[0028] 1. Ultrapure water interface; 2. Additive interface; 3. Hydrogen peroxide interface; 4. Chemical mixing tank; 5. Nitrogen source interface; 6. Gas filter; 7. Valve control area; 8. Liquid level meter; 9. Sampling box; 10. Magnetic pump; 11. Exhaust pipe; 12. Cleaning water source interface; 13. Mixed chemical supply interface; 14. Second filter; 15. First filter; 16. Conductivity measurement area; 17. First mixed chemical transport pipeline; 18. Second mixed chemical transport pipeline; 19. First nitrogen transport pipeline; 20. Drain pipe; 21. Mixed chemical supply control cabinet; 22. First branch; 23. Second branch. DETAILED DESCRIPTION
[0029] In order to make the purpose, technical solution and effect of the utility model clearer and more specific, the utility model is further described in detail with reference to the accompanying drawings and examples. It should be understood that the specific embodiments described here are only used to explain the utility model and are not used to limit the utility model.
[0030] It should be noted that the terms "first", "second", etc. in the specification and claims of the present invention and the above-mentioned drawings are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequence. It should be understood that the data used in this way can be interchanged under appropriate circumstances. In addition, the terms "including" and "having" and any variations thereof are intended to cover non-exclusive inclusions. For example, a system, product or device containing a series of units is not necessarily limited to those units clearly listed, but may include other units that are not clearly listed or inherent to these products or devices. Example 1
[0031] like Figure 1 As shown, a mixed chemical supply system includes a mixed chemical supply control cabinet 21 and a chemical mixing tank 4. The chemical mixing tank 4 is externally connected to an ultrapure water connection port 1, an additive connection port 2 and a hydrogen peroxide connection port 3, a first end of a first mixed chemical transport pipeline 17 is connected to the chemical mixing tank 4, a second end of the first mixed chemical transport pipeline 17 enters the mixed chemical supply control cabinet 21, and is connected to an inlet end of a first filter 15 in the cabinet of the mixed chemical supply control cabinet 21, an outlet end of the first filter 15 is connected to an inlet end of a second filter 14, and an outlet end of the second filter 14 is connected to a mixed chemical supply interface 13 of the mixed chemical supply control cabinet 21.
[0032] The mixed chemicals in the chemical mixing tank 4 enter the mixed chemical supply control cabinet 21 through the mixed chemical first transport pipeline 17. The mixed chemical first transport pipeline 17 may be provided with a valve in the mixed chemical supply control cabinet 21, and the mixed chemical supply control cabinet 21 controls the operation of the valve.
[0033] The first mixed chemical transport pipeline 17 transports unqualified mixed chemicals to the second mixed chemical transport pipeline 18 , and the second mixed chemical transport pipeline 18 transports unqualified mixed chemicals to the chemical mixing tank 4 .
[0034] The mixed chemical supply control cabinet 21 is also provided with a nitrogen source interface 5, and the nitrogen is connected to the first end of the nitrogen first transport pipeline 19 from the nitrogen source interface 5. The second end of the nitrogen first transport pipeline 19 passes through the cabinet body of the mixed chemical supply control cabinet 21 and is connected to the chemical mixing tank 4.
[0035] The nitrogen gas received from the nitrogen source interface 5 is passed into the chemical mixing tank 4 through the first nitrogen transport pipeline.
[0036] Example 2
[0037] Based on Example 1, this embodiment also includes:
[0038] In the mixed chemical supply control cabinet 21 , a mixed chemical transport branch is connected upstream of the mixed chemical supply interface 13 , and a sampling port is provided on the branch. A conductivity measurement area 16 is provided on the second mixed chemical transport pipeline 18 , and a sampling port is provided upstream of the conductivity measurement area 16 .
[0039] In the mixed chemical supply control cabinet 21, a gas filter 6 is provided on the first nitrogen transport pipeline 19, and a valve control area 7 is provided downstream of the gas filter 6. The mixed chemical supply control cabinet 21 controls the operation of the valve control area 7. A branch is connected to the pipeline between the gas filter 6 and the valve control area 7, and the branch is provided with a nitrogen gun, which is located in the chamber of the mixed chemical supply control cabinet 21.
[0040] In the mixed chemical supply control cabinet 21 , a branch is connected to the downstream pipeline of the valve control area 7 , and the branch is connected to the liquid level meter 8 .
[0041] A cleaning water source interface 12 and a sampling box 9 are provided in the mixed chemical supply control cabinet 21 , wherein the cleaning water source interface 12 is connected to the sampling box 9 and a water gun, and the water gun is located in the chamber of the mixed chemical supply control cabinet 21 .
[0042] An exhaust pipe 11 is provided in the mixed chemical supply control cabinet 21 , wherein any one of the liquid level meter 8 and the sampling box 9 can be connected to the exhaust pipe 11 .
[0043] A drain pipe 20 is provided in the mixed chemical supply control cabinet 21, wherein various valves, pumps and pipes provided in the mixed chemical supply control cabinet 21 can be connected to the drain pipe 11. For example, any one of the chamber of the mixed chemical supply control cabinet 21, the liquid level meter 8, the exhaust pipe, the sampling box 9, the first filter 15, the second filter 14 and the magnetic pump 10 can be connected to the drain pipe 11.
[0044] Example 3
[0045] Reference Figure 2 Based on Embodiment 1 or 2, this embodiment further includes:
[0046] In the mixed chemical supply control cabinet 21 , a first branch 22 is connected to the pipeline between the first filter 15 and the second filter 14 , and the first branch 22 is connected to the magnetic pump 10 .
[0047] In the mixed chemical supply control cabinet 21 , a second branch 23 is connected to the pipeline between the second filter 14 and the mixed chemical supply interface 13 , and the second branch 23 is connected to the magnetic pump 10 .
[0048] The specific embodiments of the utility model are described in detail above, but they are only examples, and the utility model is not limited to the specific embodiments described above. For those skilled in the art, any equivalent modification and substitution of the utility model is also within the scope of the utility model. Therefore, the equalization transformation and modification made without departing from the spirit and scope of the utility model should be included in the scope of the utility model.
Claims
1. A mixed chemical supply system, characterized in that: The mixed chemical supply system comprises a mixed chemical supply control cabinet and a chemical mixing tank; wherein the chemical mixing tank is externally connected to an ultrapure water connection port, an additive connection port and a hydrogen peroxide connection port, a first end of a first mixed chemical transport pipeline is connected to the chemical mixing tank, a second end of the first mixed chemical transport pipeline enters the mixed chemical supply control cabinet, and is connected to an inlet end of a first filter within the cabinet of the mixed chemical supply control cabinet, an outlet end of the first filter is connected to an inlet end of a second filter, and an outlet end of the second filter is connected to a mixed chemical supply interface of the mixed chemical supply control cabinet.
2. A mixed chemical supply system according to claim 1, characterized in that: The first transport pipeline for the mixed chemicals is provided with a pump, and the pump is located upstream of the first filter.
3. A mixed chemical supply system according to claim 2, characterized in that: The number of the pumps may be one or at least two. When the number of the pumps is at least two, the pumps may be arranged in parallel.
4. A mixed chemical supply system according to claim 1, characterized in that: The number of the first filter and the second filter may be one, or at least two. When the number of the first filter and the second filter is at least two, the first filters are arranged in parallel.
5. A mixed chemical supply system according to claim 1, characterized in that: The mixed chemical supply control cabinet is provided with a sampling box; the first mixed chemical transport branch is connected to the pipeline between the second filter and the mixed chemical supply interface, the first mixed chemical transport branch is connected to the first sampling port, and the first sampling port is connected to the sampling box.
6. A mixed chemical supply system according to claim 1, characterized in that: The pipeline between the first filter and the magnetic pump is connected to the second transportation pipeline for mixed chemicals. After the second transportation pipeline for mixed chemicals passes through the cabinet body of the mixed chemical supply control cabinet, it is connected to the chemical mixing tank.
7. A mixed chemical supply system according to claim 6, characterized in that: The second mixed chemical transport pipeline is provided with a conductivity measurement area, and the conductivity measurement area is located on the pipeline before the second mixed chemical transport pipeline passes through the mixed chemical supply control cabinet.
8. A mixed chemical supply system according to claim 1, characterized in that: On the second mixed chemical transport pipeline, the conductivity measurement area upstream is connected to the second mixed chemical transport branch, and the second mixed chemical transport branch is connected to the second sampling port.
9. A mixed chemical supply system according to claim 1, characterized in that: The mixed chemical supply control cabinet is provided with a first nitrogen transport pipeline, a first end of the first nitrogen transport pipeline is connected to a nitrogen source interface, and a second end of the first nitrogen transport pipeline is connected to a chemical mixing tank.
10. A mixed chemical supply system according to claim 9, characterized in that: A gas filter is provided on the first nitrogen transport pipeline downstream of the nitrogen source interface.