Electrode fixing seat and plasma cleaning machine comprising same

Abstract

The utility model discloses an electrode fixing seat and a plasma cleaning machine comprising the same, the electrode fixing seat comprises an electrode fixing plate, the electrode fixing plate comprises a first side face and a second side face which are oppositely arranged, a through hole is arranged between the first side face and the second side face, and the first side face and the second side face of the electrode fixing plate are opposite to each other. An included angle exists between the direction of the through hole and the flow direction of air flow in the axial cavity, and the through hole can change the flow direction of the air flow in the axial cavity. The direction of the through hole is set to form an included angle with the flow direction of the air flow in the axial cavity, so that the flow direction of the air flow in the axial cavity can be changed by the through hole, and the air flow obliquely moves along the through hole when passing through the through hole, so that the air flow can collide with the inner wall of the axial cavity after passing through the through hole, and the air flow is more uniformly dispersed near the electrode; therefore, the plasma generated after the ionization of the electrode is more uniform in distribution.

Description

Technical Field

[0001] The utility model belongs to the technical field of plasma cleaning machines, and in particular relates to an electrode fixing seat and a plasma cleaning machine comprising the same. Background Art

[0002] Plasma cleaning machine, also called plasma cleaning machine, or plasma surface treatment machine, is a new high-tech technology that uses plasma to achieve effects that conventional cleaning methods cannot achieve. Plasma is a state of matter, also called the fourth state of matter, and does not belong to the common three states of solid, liquid and gas. Applying enough energy to the gas to ionize it will become a plasma state. The "active" components of plasma include: ions, electrons, atoms, active groups, excited nuclides (metastable state), photons, etc. The plasma cleaning machine uses the properties of these active components to treat the sample surface, thereby achieving the purpose of cleaning, coating, etc.

[0003] In a plasma cleaning machine, a through hole needs to be provided on the electrode fixing seat to allow airflow to pass through. However, after the airflow passes through the through hole, it becomes a plurality of columnar airflows, and the electrode has a poor effect of ionizing the airflow, thereby affecting the cleaning effect of the plasma cleaning machine on the workpiece. Utility Model Content

[0004] In order to overcome the above shortcomings, the purpose of the utility model is to provide an electrode fixing seat and a plasma cleaning machine comprising the same, by which the flow direction of the airflow is changed by the electrode fixing seat, so that the distribution of the ionized plasma is more uniform, thereby improving the cleaning effect of the plasma cleaning machine on the workpiece.

[0005] In order to achieve the above purpose, the technical solution adopted by the utility model is: an electrode fixing seat, including an electrode fixing plate, the electrode fixing plate includes a first side surface and a second side surface arranged opposite to each other, a through hole is arranged between the first side surface and the second side surface, there is an angle between the direction of the through hole and the flow direction of the airflow in the axial cavity, and the through hole can change the flow direction of the airflow in the axial cavity.

[0006] The beneficial effect of the utility model is as follows: in the existing electrode fixing seat, the through hole is generally arranged perpendicular to the first side surface. After the airflow passes through the through hole, it becomes a plurality of columnar airflows, and the airflow direction is still parallel to the axial cavity, and cannot be well dispersed near the electrode, thereby affecting the ionization effect of the electrode. In the present application, by arranging the through hole and the electrode fixing plate non-perpendicularly, an angle is created between the direction of the through hole and the airflow direction in the axial cavity. When the airflow passes through the through hole, the airflow moves obliquely along the through hole, so that after the airflow passes through the through hole, it will collide with the inner wall of the axial cavity, so that the airflow is more evenly dispersed near the electrode, thereby making the plasma generated after ionization by the electrode more evenly distributed.

[0007] Furthermore, the angle ranges from 15 to 75 degrees.

[0008] Furthermore, the angle is 45°. Experiments have shown that when the angle is 45°, the plasma distribution is most uniform.

[0009] Furthermore, a plurality of through holes are provided.

[0010] Furthermore, the plurality of through holes are arranged in a circular array with the center of the electrode fixing plate as the center.

[0011] Furthermore, the number of the through holes is 4 to 6.

[0012] Furthermore, the electrode fixing plate is a circular plate-like structure, which is clamped in an annular groove set on the inner wall of the axial cavity, and a limiting surface is set between the first side surface and the second side surface. The limiting surface is a planar structure, and the limiting surface is adapted to the limiting protrusion set in the annular groove.

[0013] Furthermore, the electrode fixing seat includes an electrode connecting column, the electrode connecting column is a columnar structure, the electrode connecting column and the electrode fixing plate are vertically arranged, and the electrode connecting column and the electrode fixing plate are fixedly connected at a center position.

[0014] Furthermore, a connecting portion is provided at one end of the electrode connecting column away from the electrode fixing plate, and the shape and size of the connecting portion are adapted to the connecting hole provided on the electrode.

[0015] Furthermore, a weight-reducing groove is provided on the first side surface, and the weight-reducing groove extends from the first side surface toward the second side surface.

[0016] A plasma cleaning machine comprises the electrode fixing seat as described above. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The drawings constituting a part of the present application are used to provide a further understanding of the present invention. The illustrative embodiments of the present invention and the description thereof are used to explain the present invention and do not constitute an improper limitation on the present invention.

[0018] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0019] Figure 1 A cross-sectional view of a plasma cleaning machine according to an embodiment of the utility model;

[0020] Figure 2 A three-dimensional diagram of an electrode fixing seat according to an embodiment of the utility model;

[0021] Figure 3 A cross-sectional view of an electrode fixing seat according to an embodiment of the utility model;

[0022] Figure 4 It is a three-dimensional diagram of a main shaft according to an embodiment of the present utility model.

[0023] In the figure: 1. electrode fixing plate; 11. first side surface; 12. second side surface; 13. through hole; 131. angle; 14. curved surface; 15. limiting surface; 16. weight reduction groove; 2. electrode connecting column; 21. connecting part; 3. main shaft; 31. axial cavity; 32. annular groove; 33. limiting protrusion; 4. electrode. DETAILED DESCRIPTION

[0024] In order to make the above-mentioned purposes, features and advantages of the utility model more obvious and easy to understand, the specific implementation methods of the utility model are described in detail below in conjunction with the accompanying drawings. In the following description, many specific details are set forth to facilitate a full understanding of the utility model. However, the utility model can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without violating the connotation of the utility model, so the utility model is not limited by the specific embodiments disclosed below.

[0025] See attached Figure 1 As shown, a plasma cleaning machine in this embodiment includes an electrode fixing seat and an electrode 4 for ionizing air, the electrode fixing seat is used to fix the electrode 4, and the plasma cleaning machine includes a main shaft 3, and an axial cavity 31 is arranged inside the main shaft 3 for air flow to pass through so as to flow into the vicinity of the electrode 4 and ionize into plasma. The electrode fixing seat is arranged in the axial cavity 31, and the electrode fixing seat is fixed and supported by the main shaft 3.

[0026] See attached Figure 2-4 As shown, in some embodiments, the electrode fixing seat includes an electrode fixing plate 1 and an electrode connecting column 2, wherein the electrode fixing plate 1 is used to connect to the inner wall of the axial cavity 31 to fix the position of the electrode fixing seat; the electrode connecting column 2 is used to connect to the electrode 4 to fix the electrode 4. The electrode connecting column 2 is a columnar structure, and its direction is parallel to the axial cavity 31. The electrode fixing plate 1 is a circular plate-like structure, the electrode connecting column 2 and the electrode fixing plate 1 are vertically arranged, and the electrode connecting column 2 and the electrode fixing plate 1 are fixedly connected at the center position, preferably integrally connected.

[0027] In some embodiments, an annular groove 32 is provided on the inner wall of the axial cavity 31, and the width of the annular groove 32 is adapted to the thickness of the electrode fixing plate 1. The electrode fixing plate 1 is clamped in the annular groove 32, and the main shaft 3 is used to fix and support the electrode fixing plate 1, thereby fixing and supporting the electrode 4.

[0028] In some embodiments, the side of the electrode fixing plate 1 away from the electrode connecting column 2 is the first side 11, and the side of the electrode fixing plate 1 close to the electrode connecting column 2 is the second side 12. The first side 11 and the second side 12 are planar structures and are arranged in parallel. The first side 11 and the second side 12 are connected by a curved surface 14, so that the electrode fixing plate 1 is a circular plate structure. A limiting surface 15 is also arranged between the first side 11 and the second side 12. The limiting surface 15 is a planar structure. A limiting protrusion 33 is arranged in the annular groove 32. The limiting protrusion 33 and the limiting surface 15 are in contact. The arrangement of the limiting surface 15 and the limiting protrusion 33 can prevent the electrode fixing seat from rotating in the annular groove 32.

[0029] In some embodiments, a through hole 13 is provided between the first side surface 11 and the second side surface 12. The provision of the through hole 13 facilitates the air in the axial cavity 31 to pass through the through hole 13 to the vicinity of the electrode 4 for ionization. A plurality of through holes 13 are provided, and the plurality of through holes 13 are arranged in a circular array with the center of the electrode fixing plate 1 as the center. Experimental studies have shown that the best effect is achieved when the number of through holes 13 is 4 to 6.

[0030] In some embodiments, the through hole 13 and the first side surface 11 of the electrode fixing plate 1 are not arranged vertically, that is, the through hole 13 and the first side surface 11 of the electrode fixing plate 1 form an angle 131, and the range of the angle 131 is 15 to 75°, preferably 45°. In the existing electrode fixing seat, the through hole 13 is generally arranged vertically to the first side surface 11. After the airflow passes through the through hole 13, it becomes a plurality of columnar airflows, and the flow direction of the airflow is parallel to the axial cavity, and the airflow cannot be well dispersed near the electrode 4. In the present application, by arranging the through hole 13 and the electrode fixing plate 1 not vertically, there is an angle 131 between the direction of the through hole 13 and the flow direction of the airflow in the axial cavity 31, and the through hole 13 can change the flow direction of the airflow in the axial cavity 31. When the airflow passes through the through hole 13, the airflow moves obliquely along the through hole 13, so that after the airflow passes through the through hole 13, it will collide with the inner wall of the axial cavity 31, and then be reflected to the side wall of the electrode. In the process of multiple layers of wall collision and reflection, the airflow can be more evenly dispersed near the electrode 4, so that the plasma generated after ionization by the electrode 4 is more evenly distributed.

[0031] An experimental comparison was conducted between the inclined hole electrode holder with an angle of 45° of the present application and the traditional straight hole electrode holder, and the comparison data are shown in Tables 1 and 2.

[0032] Table 1: Test data of inclined hole electrode holder

[0033]

[0034] Table 2: Test data of straight hole electrode holder

[0035]

[0036] It can be seen from the data in Tables 1 and 2 that when the power, CDA flow, air pressure, processing width, processing speed and initial value are the same, at different processing heights, the dyne value of the inclined hole electrode holder used in this application is higher than the dyne value of the straight hole electrode holder, and the electrode has a better ionization effect on the airflow.

[0037] In some embodiments, a connection portion 21 is provided at one end of the electrode connection column 2 away from the electrode fixing plate, and a connection hole is provided at a corresponding position of the electrode 4, and the shape and size of the connection hole are adapted to the connection portion 21. The electrode 4 and the electrode fixing seat are connected by inserting the connection portion 21 into the connection hole. In this embodiment, the connection portion 21 is cylindrical, and the connection portion 21 can also be a rectangular parallelepiped. The shape of the connection portion 21 is not limited in this application.

[0038] In some embodiments, a weight-reducing groove 16 is provided on the first side 11, and the weight-reducing groove 16 extends from the first side 11 to the second side 12. The weight-reducing groove 16 is provided to reduce the weight of the electrode holder, thereby increasing the flexibility of the spray gun during use.

[0039] In the description of the present invention, it should be understood that the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include at least one of the features. In the description of the present invention, "plurality" means at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0040] The above implementation modes are only for illustrating the technical concept and features of the utility model, and their purpose is to allow people familiar with this technology to understand the content of the utility model and implement it. It cannot be used to limit the protection scope of the utility model. Any equivalent changes or modifications made according to the spirit of the utility model should be included in the protection scope of the utility model.

Claims

1. An electrode fixing seat, characterized in that: The electrode fixing plate (1) comprises a first side surface (11) and a second side surface (12) which are arranged opposite to each other, a through hole (13) is arranged between the first side surface (11) and the second side surface (12), an angle (131) is formed between the direction of the through hole (13) and the flow direction of the airflow in the axial cavity (31), and the through hole (13) can change the flow direction of the airflow in the axial cavity (31).

2. The electrode holder according to claim 1, characterized in that: The range of the included angle (131) is 15-75°.

3. The electrode holder according to claim 1, characterized in that: The included angle (131) is 45°.

4. The electrode holder according to claim 1, characterized in that: A plurality of through holes (13) are provided.

5. The electrode holder according to claim 4, characterized in that: The plurality of through holes (13) are arranged in a circular array with the center of the electrode fixing plate (1) as the center.

6. The electrode holder according to claim 1, characterized in that: The electrode fixing plate (1) is a circular plate-shaped structure, which is clamped in an annular groove (32) provided on the inner wall of the axial cavity (31), and a limiting surface (15) is provided between the first side surface (11) and the second side surface (12), the limiting surface (15) being a planar structure, and the limiting surface (15) is adapted to a limiting protrusion (33) provided in the annular groove (32).

7. The electrode holder according to claim 1, characterized in that: The electrode fixing seat comprises an electrode connection column (2), the electrode connection column (2) is a columnar structure, the electrode connection column (2) and the electrode fixing plate (1) are arranged vertically, and the electrode connection column (2) and the electrode fixing plate (1) are fixedly connected at their center positions.

8. The electrode holder according to claim 7, characterized in that: A connecting portion (21) is provided at one end of the electrode connecting column (2) away from the electrode fixing plate, and the shape and size of the connecting portion (21) are compatible with the connecting hole provided on the electrode (4).

9. The electrode holder according to claim 1, characterized in that: A weight-reducing groove (16) is provided on the first side surface (11), and the weight-reducing groove (16) extends from the first side surface (11) in a direction toward the second side surface (12).

10. A plasma cleaning machine, characterized in that: The invention comprises the electrode fixing seat as described in any one of claims 1 to 9.

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