PECVD (Plasma Enhanced Chemical Vapor Deposition) support plate storage cabinet with vertical storage function

Abstract

The utility model provides a PECVD (Plasma Enhanced Chemical Vapor Deposition) carrier plate storage cabinet with a vertical storage function, which comprises a cabinet body used for vertically placing PECVD carrier plates and a cabinet door hinged on the cabinet body and used for opening and closing an opening of the cabinet body, a plurality of groups of pulleys are arranged on a bottom plate of the cabinet body, a lifting device is arranged between every two adjacent groups of pulleys, and the lifting device is connected with the cabinet door. And a guide device for laterally guiding the PECVD carrier plate is arranged on the lifting device. The pulleys are used for placing the PECVD carrier plate and can be placed in the cabinet body under the pushing of a worker, the guiding device has a guiding effect on the lateral direction of the PECVD carrier plate and prevents the lateral movement of the PECVD carrier plate, and the lifting device can adapt to the PECVD carrier plates with different heights and sizes and can be freely adjusted according to the sizes of the PECVD carrier plates; through the arrangement of the pulleys, the lifting device and the guide device, the PECVD support plate can be vertically placed instead of being transversely placed in the past, the deformation risk of the PECVD support plate can be reduced, and the stability and consistency of the PECVD support plate process are improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor industry, in particular to a PECVD carrier storage cabinet with a vertical storage function. Background Art

[0002] Traditional PECVD (plasma enhanced chemical vapor deposition) carrier storage cabinets usually store PECVD carriers in a horizontal manner, which may cause the PECVD carriers to deform during storage. This deformation may cause problems in the PECVD process, such as uneven film deposition, affecting device performance, etc. Compared with horizontal placement, vertical placement can reduce the risk of PECVD carrier deformation and improve the stability and consistency of the PECVD process. Therefore, the present application provides a PECVD carrier storage cabinet with a vertical storage function to solve the above problems. Utility Model Content

[0003] In view of the shortcomings of the prior art described above, the purpose of the present invention is to provide a PECVD carrier storage cabinet with a vertical storage function, which is used to solve the problem in the prior art that the horizontal placement of PECVD carriers causes uneven thin film deposition in the PECVD process, affecting device performance, etc.

[0004] To achieve the above-mentioned purpose and other related purposes, the utility model provides a PECVD carrier storage cabinet with a vertical storage function, including a cabinet body for vertically placing the PECVD carrier, a cabinet door hinged on the cabinet body and used to open and close the opening of the cabinet body, a plurality of groups of pulleys are provided on the bottom plate of the cabinet body, a lifting device is provided between each two adjacent groups of pulleys, and a guide device is provided on the lifting device for laterally guiding the PECVD carrier.

[0005] To implement the above technical solution, the cabinet in the present application is made of high-strength materials, such as stainless steel or aluminum alloy, to ensure the long-term service life of the storage cabinet, and the shape and size of the cabinet can be designed according to the size of the PECVD carrier and the capacity requirement of the storage cabinet; the cabinet door is designed to facilitate operators to place or remove the PECVD carrier, and the cabinet door and the cabinet can be locked to improve safety. A sealing design is adopted between the door and the cabinet to ensure the cleanliness and sealing of the internal environment of the cabinet; the pulley is used to place the PECVD carrier and can be placed in the cabinet under the push of the staff. The guide device has a guiding effect on the lateral direction of the PECVD carrier to prevent the lateral movement of the PECVD carrier. The lifting device can adapt to PECVD carriers of different heights and sizes and can be freely adjusted according to the size of the PECVD carrier; the setting of the pulley, the lifting device and the guide device can change the PECVD carrier from the previous horizontal placement to a vertical placement, which helps to reduce the risk of deformation of the PECVD carrier and improve the stability and consistency of the PECVD process.

[0006] In one embodiment of the present invention, the guide device includes a mounting seat arranged at the top end of the lifting device, and a plurality of guide wheels arranged on the mounting seat.

[0007] To implement the above technical solution, the number of guide wheels on each mounting seat in the present application is preferably three. The provision of the guide wheels can facilitate the smooth storage and removal of the PECVD carrier, ensuring that the PECVD carrier is not damaged during vertical storage.

[0008] In one embodiment of the present invention, each set of pulleys includes a plurality of concave pulleys or U-shaped pulleys.

[0009] To implement the above technical solution, the pulley and guide wheel in the present application are preferably made of external wear-resistant materials, such as metal, polyethylene or nylon. The setting of a concave pulley or a U-shaped pulley helps the PECVD carrier to be stably nested on the pulley when sliding, thereby reducing the lateral movement of the PECVD carrier, improving the stability of the PECVD carrier, and preventing the PECVD carrier from being displaced during movement or storage.

[0010] In one embodiment of the present invention, the lifting device is a spiral lifting rod, a cylinder lifting rod or a hydraulic lifting rod.

[0011] By implementing the above technical solution, the lifting device can be freely set according to needs to facilitate adapting to PECVD carriers of different heights and sizes.

[0012] In one embodiment of the present invention, two lifting devices are disposed between two adjacent sets of pulleys.

[0013] To implement the above technical solution, the two lifting devices can make the guide device more stable during the up and down movement, thereby ensuring the lateral guiding effect of the PECVD carrier.

[0014] In an embodiment of the present invention, universal wheels are provided at the bottom of the cabinet, and handles are provided on the side walls of the cabinet.

[0015] To implement the above technical solution, the storage cabinet can be easily moved in the workplace through the provision of universal wheels, and the position of the storage cabinet can be adjusted as needed, and the handle is convenient for workers to grasp during the movement.

[0016] In one embodiment of the present invention, the cabinet door is provided with one or two, and the cabinet door is provided with a handle.

[0017] To implement the above technical solution, the cabinet door is hinged on the cabinet body, and the staff can open the cabinet door by pulling the handle. A sealing strip is provided between the gaps of the cabinet door to prevent dust from entering the cabinet body, thereby ensuring the cleanliness requirements of the PECVD carrier in the semiconductor process.

[0018] As described above, the utility model is a PECVD carrier storage cabinet with a vertical storage function, which has the following beneficial effects: the pulley is used to place the PECVD carrier, and can be placed in the cabinet under the push of the staff, the guide device has a guiding effect on the lateral direction of the PECVD carrier to prevent the lateral movement of the PECVD carrier, and the lifting device can adapt to PECVD carriers of different heights and sizes, and can be freely adjusted according to the size of the PECVD carrier; through the setting of the pulley, the lifting device, and the guide device, the PECVD carrier can be changed from the previous horizontal placement to a vertical placement, which helps to reduce the risk of deformation of the PECVD carrier and improve the stability and consistency of the PECVD process. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 Shown is a schematic diagram of the structure of the utility model.

[0020] Figure 2 Shown is a side view of the lift and guide.

[0021] Figure 3 Shown is a schematic diagram of the abutment between the PECVD carrier and the pulley.

[0022] Component number description

[0023] 1. PECVD carrier; 2. cabinet; 3. cabinet door; 4. pulley; 5. lifting device; 6. guide device; 611. mounting base; 612. guide wheel; 7. universal wheel; 8. handle; 9. handle. DETAILED DESCRIPTION

[0024] The following is a description of the implementation of the present invention by means of specific embodiments. People familiar with the art can easily understand other advantages and effects of the present invention from the contents disclosed in this specification.

[0025] See also Figures 1 to 3 The utility model provides a PECVD carrier storage cabinet with a vertical storage function, including a cabinet body 2 for vertically placing a PECVD carrier 1, a cabinet door 3 hinged on the cabinet body 2 and used for opening and closing the opening of the cabinet body 2, a plurality of groups of pulleys 4 are provided on the bottom plate of the cabinet body 2, and a lifting device 5 is provided between each two adjacent groups of pulleys 4, and a guide device 6 for laterally guiding the PECVD carrier 1 is provided on the lifting device 5.

[0026] In the present application, the cabinet 2 is made of high-strength materials, such as stainless steel or aluminum alloy, to ensure the long-term service life of the storage cabinet, and the shape and size of the cabinet 2 can be designed according to the size of the PECVD carrier 1 and the capacity requirement of the storage cabinet; the design of the cabinet door 3 facilitates the operator to place or remove the PECVD carrier 1, and the cabinet door 3 and the cabinet 2 can be locked to improve safety. A sealing design is adopted between the door and the cabinet 2 to ensure the cleanliness and sealing of the internal environment of the cabinet 2; the pulley 4 is used to place the PECVD carrier 1, and can be placed in the cabinet 2 under the push of the staff, the guide device 6 has a guiding effect on the lateral direction of the PECVD carrier 1 to prevent the lateral movement of the PECVD carrier 1, and the lifting device 5 can adapt to PECVD carriers 1 of different heights and sizes, and can be freely adjusted according to the size of the PECVD carrier 1; through the setting of the pulley 4, the lifting device 5, and the guide device 6, the PECVD carrier 1 can be changed from the previous horizontal placement to a vertical placement, which helps to reduce the risk of deformation of the PECVD carrier 1 and improve the stability and consistency of the PECVD process.

[0027] The guide device 6 includes a mounting seat 611 arranged at the top of the lifting device 5, and a plurality of guide wheels 612 arranged on the mounting seat 611; in the present application, there are preferably three guide wheels 612 on each mounting seat 611. The setting of the guide wheels 612 can facilitate the smooth storage and removal of the PECVD carrier 1, ensuring that the PECVD carrier 1 is not damaged during vertical storage.

[0028] Each group of pulleys 4 includes multiple concave pulleys or U-shaped pulleys; in the present application, the pulleys 4 and the guide wheels 612 are preferably made of external wear-resistant materials, such as metal, polyethylene or nylon. The setting of the concave pulleys or U-shaped pulleys helps the PECVD carrier 1 to be stably nested on the pulley 4 when sliding, reduces the lateral movement of the PECVD carrier 1, improves the stability of the PECVD carrier 1, and prevents the PECVD carrier 1 from being displaced during movement or storage.

[0029] The lifting device 5 is a spiral lifting rod, a cylinder lifting rod or a hydraulic lifting rod; the lifting device 5 can be freely set according to needs to facilitate adapting to PECVD carriers 1 of different heights and sizes.

[0030] Two lifting devices 5 are provided between two adjacent pulley groups. The two lifting devices 5 can make the guide device 6 more stable during the up and down movement, thereby ensuring the lateral guiding effect of the PECVD carrier 1.

[0031] The cabinet body 2 is provided with universal wheels 7 at the bottom, and handles 8 are provided on the side walls of the cabinet body 2. The universal wheels 7 allow the storage cabinet to be easily moved in the workplace, and the position of the storage cabinet can be adjusted as needed. The handles 8 are convenient for workers to grasp during movement.

[0032] The cabinet door 3 is provided with one or two, and a handle 9 is provided on the cabinet door 3. The cabinet door 3 is hinged on the cabinet body 2, and the staff can open the cabinet door 3 through the handle 9. A sealing strip is provided between the gaps of the cabinet door 3 to prevent dust from entering the cabinet body 2, thereby ensuring the cleanliness requirements of the PECVD carrier 1 in the semiconductor process.

[0033] The above embodiments are merely illustrative of the principles and effects of the present invention, and are not intended to limit the present invention. Anyone familiar with the technology may modify or alter the above embodiments without departing from the spirit and scope of the present invention. Therefore, all equivalent modifications or alterations made by a person of ordinary skill in the art without departing from the spirit and technical concept disclosed in the present invention shall still be covered by the claims of the present invention.

Claims

1. A PECVD carrier storage cabinet with a vertical storage function, comprising a cabinet body (2) for vertically placing a PECVD carrier (1), and a cabinet door (3) hinged on the cabinet body (2) and used to open and close an opening of the cabinet body (2), characterized in that: A plurality of groups of pulleys (4) are provided on the bottom plate of the cabinet (2), a lifting device (5) is provided between each two adjacent groups of pulleys (4), and a guiding device (6) for laterally guiding the PECVD carrier plate (1) is provided on the lifting device (5).

2. A PECVD carrier storage cabinet with vertical storage function according to claim 1, characterized in that: The guide device (6) comprises a mounting seat (611) arranged at the top end of the lifting device (5), and a plurality of guide wheels (612) arranged on the mounting seat (611).

3. The PECVD carrier storage cabinet with vertical storage function according to claim 1, characterized in that: Each set of pulleys (4) comprises a plurality of concave pulleys or U-shaped pulleys.

4. The PECVD carrier storage cabinet with vertical storage function according to claim 1, characterized in that: The lifting device (5) is a spiral lifting rod, a cylinder lifting rod or a hydraulic lifting rod.

5. The PECVD carrier storage cabinet with vertical storage function according to claim 1, characterized in that: Two lifting devices (5) are arranged between two adjacent groups of pulleys.

6. The PECVD carrier storage cabinet with vertical storage function according to claim 1, characterized in that: The bottom of the cabinet (2) is provided with a universal wheel (7), and the side wall of the cabinet (2) is provided with a handle (8).

7. The PECVD carrier storage cabinet with vertical storage function according to claim 1, characterized in that: The cabinet door (3) is provided with one or two cabinet doors, and the cabinet door (3) is provided with a handle (9).

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