Flip mechanism

Abstract

The utility model relates to the technical field of semiconductor coating, and discloses a flip mechanism which comprises a cavity, a cavity cover, a hinge assembly and a telescopic piece, a coating chamber is arranged in the cavity; the cavity cover covers the coating chamber; the hinge assembly comprises a mounting seat, a rotating shaft and a turning plate; the mounting seat is connected with the cavity, the rotating shaft is connected with the mounting seat, the turning plate is rotatably connected with the rotating shaft, and the turning plate is connected with the cavity cover, so that the cavity cover is hinged to the cavity; a through hole is formed in the turning plate, the rotating shaft penetrates through the through hole, and a gap is formed between the inner side wall of the through hole and the outer side curved surface of the rotating shaft; the telescopic piece is connected with the cavity and the cavity cover and used for driving the cavity cover to rotate relative to the cavity. According to the technical scheme, the cavity cover is hinged to the cavity through the hinge assembly, the telescopic piece drives the cavity cover to rotate relative to the cavity, then automatic flip operation is achieved, manual flip operation is not needed, manpower is saved, and user experience is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor coating, in particular to a flip cover mechanism. Background Art

[0002] PECVD is a plasma enhanced chemical vapor deposition technology, which uses glow discharge in a coating chamber to ionize the gas and then chemically deposit it on the substrate for the preparation of semiconductor thin film materials and other material films.

[0003] The structure of PECVD includes a cavity with a coating chamber inside and a cavity cover for sealing the coating chamber. The existing cavity and cavity cover are small in size, so the cavity cover is opened and closed manually. However, with the continuous development of semiconductor technology, the volume and size of the cavity and cavity cover have increased, and the weight of the cavity cover has increased. It is difficult to flip the cavity cover manually, so an automatic flipping mechanism is needed. Utility Model Content

[0004] The technical problems to be solved by the utility model are:

[0005] The automatic flipping operation cannot be realized.

[0006] In order to solve the above technical problems, the utility model provides a flip cover mechanism, comprising:

[0007] A cavity, wherein a coating chamber is arranged in the cavity;

[0008] A chamber cover connected to the chamber body, the chamber cover is sealed on the coating chamber;

[0009] A hinge assembly is installed between the cavity and the cavity cover; the hinge assembly includes a mounting seat, a rotating shaft and a flap; the mounting seat is connected to the cavity, the rotating shaft is connected to the mounting seat, the flap is rotatably connected to the rotating shaft, and the flap is connected to the cavity cover to hinge the cavity cover on the cavity; a through hole is provided on the flap, the rotating shaft is provided in the through hole, and a gap is provided between the inner side wall of the through hole and the outer curved surface of the rotating shaft; and

[0010] A telescopic member, wherein the telescopic member is respectively connected to the cavity and the cavity cover, and the telescopic member is used to drive the cavity cover to rotate relative to the cavity.

[0011] In one of the embodiments, an extension plate is provided on the cavity cover; the extension plate extends from the cavity cover toward the cavity body, and the telescopic member is hinged to the extension plate.

[0012] In one of the embodiments, a fixing plate is provided on the cavity; one end of the telescopic member away from the extension plate is hinged to the fixing plate, and the hinge assembly is provided between the extension plate and the fixing plate.

[0013] In one embodiment, the angle between the cavity cover and the cavity is λ;

[0014] Wherein, when the cavity cover is in an open state, λ>90°.

[0015] In one embodiment, the angle between the cavity cover and the cavity body is λ≤91.5°.

[0016] In one embodiment, the mounting seat includes a fixing portion and a support plate portion; the fixing portion is connected to the cavity, the support plate portion extends from the fixing portion in a direction away from the cavity, and the rotating shaft is passed through the support plate portion.

[0017] In one embodiment, the flap includes a rotating portion, a connecting portion and a limiting portion; the rotating portion is sleeved on the outer side of the rotating shaft, the through hole passes through the rotating portion, the connecting portion is extended from the rotating portion toward the cavity cover, the connecting portion is connected to the cavity cover, and the limiting portion is convexly arranged on a side of the rotating portion away from the limiting portion;

[0018] Wherein, when the cavity cover is in an open state, the limiting portion abuts against the fixing portion.

[0019] In one of the embodiments, a spring pin is provided on the support plate portion; when the cavity cover is in an open state, a pin hole is opened at the corresponding position of the rotating portion and the spring pin, and the spring pin is inserted into the pin hole to relatively lock the flap and the mounting seat.

[0020] In one embodiment, the flip cover mechanism further includes a detection component; the detection component includes a sensing element and a trigger block; one of the sensing element and the trigger block is fixed on the cavity body, and the other is fixed on the cavity cover, and the setting positions of the sensing element and the trigger block correspond.

[0021] In one of the embodiments, a locker is provided on the cavity; the locker is engaged with the cavity cover to fix the cavity cover on the cavity.

[0022] Compared with the prior art, the above flip cover mechanism has the following beneficial effects:

[0023] The cavity cover is hinged to the cavity body through a hinge assembly, and the cavity cover is driven to rotate relative to the cavity through a telescopic member, thereby realizing an automatic flip operation, which does not require manual flipping operation, saving manpower and improving user experience. In addition, by setting a gap between the inner side wall of the perforation and the outer curved surface of the rotating shaft, the tolerance of the cavity cover and the cavity closing is absorbed, and the automatic adjustment of the fit between the cavity cover and the cavity when closing is realized, thereby improving the airtightness of the cavity cover to the cavity. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 This is a schematic structural diagram of a flip cover mechanism according to an embodiment of the utility model;

[0025] Figure 2 for Figure 1 A schematic side view of the cavity cover of the middle flip cover mechanism in a closed state;

[0026] Figure 3 for Figure 1 A schematic side view of the cavity cover of the middle flip cover mechanism in an open state;

[0027] Figure 4 for Figure 1 A schematic diagram of the structure of the middle hinge assembly;

[0028] Figure 5 for Figure 4 Schematic cross-sectional view of the middle hinge assembly.

[0029] The meanings of the numbers in the accompanying drawings are:

[0030] 100. Flip mechanism;

[0031] 10. Cavity; 11. Fixing plate; 12. Locking device; 15. Coating chamber;

[0032] 20. Cavity cover; 21. Extension plate;

[0033] 30. Hinge assembly; 31. Mounting seat; 311. Fixing part; 312. Support plate part; 315. Spring pin; 32. Rotating shaft; 33. Flip plate; 331. Rotating part; 332. Connecting part; 333. Limiting part; 35. Perforation; 36. Gap;

[0034] 40. Telescopic parts;

[0035] 50. Detection component; 51. Sensing element; 52. Trigger block. DETAILED DESCRIPTION

[0036] In order to make the above-mentioned purposes, features and advantages of the utility model more obvious and easy to understand, the specific implementation methods of the utility model are described in detail below in conjunction with the accompanying drawings. In the following description, many specific details are set forth to facilitate a full understanding of the utility model. However, the utility model can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without violating the connotation of the utility model, so the utility model is not limited by the specific embodiments disclosed below.

[0037] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0038] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In the description of the present utility model, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0039] In the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0040] In the present utility model, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, a first feature being "above", "above" or "above" a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being "below", "below" or "below" a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0041] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or there may be a central element. When an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be a central element at the same time. The terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used herein are for illustrative purposes only and are not intended to be the only implementation method.

[0042] See also Figures 1 to 5 , is a flip cover mechanism 100 of an embodiment of the utility model, comprising a cavity 10, a cavity cover 20, a hinge assembly 30 and a telescopic member 40. A coating chamber 15 is arranged in the cavity 10, and the coating chamber 15 is used to provide the required space for the vacuum coating operation of the semiconductor. The cavity cover 20 is connected to the cavity 10, and the cavity cover 20 is sealed on the coating chamber 15, so that the coating chamber 15 forms a relatively closed space to prevent the external environment from affecting the vacuum coating operation. The hinge assembly 30 is installed between the cavity 10 and the cavity cover 20; the hinge assembly 30 includes a mounting seat 31, a rotating shaft 32 and a flap 33; the mounting seat 31 is connected to the cavity 10, the rotating shaft 32 is connected to the mounting seat 31, the flap 33 is rotatably connected to the rotating shaft 32, and the flap 33 is connected to the cavity cover 20 to hinge the cavity cover 20 on the cavity 10; a through hole 35 is provided on the flap 33, the rotating shaft 32 is penetrated in the through hole 35, and a gap 36 is provided between the inner side wall of the through hole 35 and the outer curved surface of the rotating shaft 32, and the gap 36 is used to absorb the installation tolerance between the cavity cover 20 and the cavity 10, thereby improving the airtightness of the cavity cover 20 and the cavity 10, and ensuring the reliability of the vacuum coating operation. The telescopic member 40 is connected to the cavity 10 and the cavity cover 20 respectively. The telescopic member 40 is used to drive the cavity cover 20 to rotate relative to the cavity 10. The change in the length of the telescopic member 40 drives the change in the angle between the cavity cover 20 and the cavity 10 to provide the power required for the cavity cover 20 to rotate.

[0043] Furthermore, the cavity 10 is a hollow structure, and the cavity 10 is arranged in the horizontal direction; the coating chamber 15 is arranged in the cavity 10, and the coating chamber 15 is opened at the top of the cavity 10, and the coating chamber 15 is arranged in a groove shape from the top of the cavity 10 to the inside of the cavity 10. It can be understood that the specific shape of the cavity 10 is not limited here, and it is ensured that the coating chamber 15 can be opened inside to perform vacuum coating operations on semiconductors.

[0044] Further, the chamber cover 20 is generally in the shape of a straight plate, and is disposed on the top of the chamber body 10. The chamber cover 20 corresponds to the opening of the coating chamber 15 so as to cover the coating chamber 15. It can be understood that the specific shape of the chamber cover 20 is not limited here, and it is sufficient to ensure that the chamber cover 20 can cover the coating chamber 15.

[0045] Furthermore, a locker 12 is provided on the cavity 10. The locker 12 is fixed on the outside of the cavity 10. It can be understood that the cavity cover 20 has two position states relative to the cavity 10, one is an open state, at which the coating chamber 15 is in an exposed state, and the other is a closed state, at which the cavity cover 20 closes the coating chamber 15. Since the position states of the cavity cover 20 corresponding to the functions of each component are different, the position state of the cavity cover 20 will be pointed out in the subsequent introduction of the functions of the components, and the specific explanation of the position state of the cavity cover 20 will not be repeated. When the cavity cover 20 is in the closed state, the locker 12 is engaged with the cavity cover 20 to fix the cavity cover 20 on the cavity 10, and the locker 12 can increase the pressure load between the cavity cover 20 and the cavity 10, thereby improving the airtightness of the closure of the cavity cover 20 and the cavity 10. In this embodiment, a plurality of lockers 12 are provided, and each locker 12 is arranged at intervals around the cavity 10 to ensure uniform distribution of pressure load between the cavity cover 20 and the cavity 10 .

[0046] Furthermore, the mounting seat 31 includes a fixing portion 311 and a support plate portion 312. The fixing portion 311 is in the shape of an elongated strip, and the fixing portion 311 is connected to the cavity 10 to fix the mounting seat 31 on the cavity 10. The support plate portion 312 is in the shape of a straight plate, and the support plate portion 312 is extended from the fixing portion 311 in a direction away from the cavity 10, and the extension plane where the support plate portion 312 is located is perpendicular to the extension direction where the fixing portion 311 is located. The rotating shaft 32 is in the shape of a cylinder, and the rotating shaft 32 is passed through the support plate portion 312. In this embodiment, the number of the support plate portions 312 is two, and the two support plate portions 312 are spaced apart along the fixing portion 311, and the two support plate portions 312 respectively fix the two ends of the rotating shaft 32 to improve the connection reliability between the rotating shaft 32 and the mounting seat 31.

[0047] Further, the flap 33 includes a rotating portion 331, a connecting portion 332 and a limiting portion 333. The rotating portion 331 is in the shape of an elongated strip, and is sleeved on the outer side of the rotating shaft 32. The through hole 35 is arranged on the rotating portion 331 and penetrates both ends of the rotating portion 331. The connecting portion 332 is arranged on one side of the rotating portion 331, and is extended from the rotating portion 331 to the direction of the chamber cover 20, and the connecting portion 332 is connected to the chamber cover 20. The limiting portion 333 is in the shape of a convex, and is arranged on the side of the rotating portion 331 away from the limiting portion 333. The limiting portion 333 is used to limit the flip angle of the flap 33 relative to the mounting seat 31. When the chamber cover 20 is in the open state, the limiting portion 333 abuts against the fixing portion 311 to realize the positioning of the flip angle of the flap 33 relative to the mounting seat 31. In this embodiment, a spring pin 315 is arranged on the support plate portion 312. The spring pin 315 is elastically arranged on the support plate portion 312. When the chamber cover 20 is in the open state, a pin hole is opened at the corresponding position of the rotating portion 331 and the spring pin 315. The spring pin 315 is inserted into the pin hole to relatively lock the flap 33 and the mounting seat 31, thereby improving the safety of the operator when handling the components in the coating chamber 15 when the chamber cover 20 is in the open state, and avoiding damage to the operator caused by accidental closure of the chamber cover 20.

[0048] Further, the telescopic member 40 is in the shape of a long strip, one end of the telescopic member 40 is hinged to the cavity 10, and the other end of the telescopic member 40 is hinged to the cavity cover 20. It can be understood that the telescopic member 40 can be one of a cylinder, a hydraulic cylinder, a screw mechanism or a gear rack mechanism, so as to ensure that the length of the telescopic member 40 can be automatically adjusted and controlled, thereby driving the cavity cover 20 to rotate relative to the cavity 10. In this embodiment, the telescopic member 40 is a cylinder.

[0049] Furthermore, an extension plate 21 is provided on the cavity cover 20. The extension plate 21 extends from the cavity cover 20 toward the cavity 10, and the telescopic member 40 is hinged to the extension plate 21. By providing the extension plate 21, the cavity cover 20 can be flipped to a larger angle in the open state. A fixed plate 11 is provided on the cavity 10. One end of the telescopic member 40 away from the extension plate 21 is hinged to the fixed plate 11, and the hinge assembly is provided between the extension plate 21 and the fixed plate 11, so that the driving torque of the telescopic member 40 is greater than the torque of the gravity of the cavity cover 20 itself, thereby effectively reducing the driving force of the telescopic member 40 to complete the flipping of the cavity cover 20, and effectively controlling the selection cost of the telescopic member 40.

[0050] Furthermore, the angle between the cavity cover 20 and the cavity body 10 is λ. When the cavity cover 20 is in the open state, λ>90°, so that the opening angle of the cavity cover 20 is greater than ninety degrees, and then when the hinge or spring pin 315 fails, the cavity cover 20 will not close the coating chamber 15 under its own gravity, thereby improving the safety of the operator. Furthermore, the angle between the cavity cover 20 and the cavity body 10 is λ, λ≤91.5°. After experimental testing, if the angle λ is too large, it will increase the load of the flap 33 on the rotating shaft 32, thereby causing damage to the hinge assembly 30, and if the angle λ is too small, the cavity cover 20 will have a probability of rotating to the closed state, thereby causing a safety hazard; and when the angle λ is 91.5°, it can ensure the reliability of the hinge assembly 30 and the stability of the cavity cover 20 falling in the opposite direction when it fails.

[0051] Furthermore, the flip cover mechanism 100 further includes a detection component 50. The detection component 50 is used to detect the opening state of the cavity cover 20; the detection component 50 includes a sensing element 51 and a trigger block 52. One of the sensing element 51 and the trigger block 52 is fixed on the cavity 10, and the other is fixed on the cavity cover 20, and the setting positions of the sensing element 51 and the trigger block 52 correspond. In this embodiment, the sensing element 51 is connected to the cavity 10, and the trigger block 52 is connected to the cavity cover 20, and the trigger block 52 extends from the cavity cover 20 to the sensing element 51; when the cavity cover 20 is in a closed state, the trigger block 52 presses on the sensing element 51, and the sensing element 51 generates an induced electrical signal; when the cavity cover 20 is in an open state, the trigger block 52 rotates with the cavity cover 20, and the trigger block 52 is separated from the sensing element 51, and the sensing element 51 does not generate an induced electrical signal, so as to identify the state of the cavity cover 20 by detecting the induced electrical signal. Specifically, the sensing element 51 is a pressure sensor; it can be understood that the sensing element 51 can also be a photoelectric sensor, an electromagnetic sensor or an infrared sensor, to ensure that the trigger block 52 can trigger the sensing element 51 and generate an induced electrical signal, and the sensing element 51 no longer generates an induced electrical signal after the trigger block 52 moves.

[0052] In summary, the embodiment of the utility model provides a flip cover mechanism 100, which has the following beneficial effects:

[0053] The cavity cover 20 is hinged to the cavity 10 by the hinge assembly 30, and the cavity cover 20 is driven to rotate relative to the cavity 10 by the telescopic member 40, thereby realizing an automatic flip operation, and no manual flip operation is required, saving manpower and improving user experience. In addition, by setting a gap 36 between the inner side wall of the perforation 35 and the outer curved surface of the rotating shaft 32, the tolerance of the closing of the cavity cover 20 and the cavity 10 is absorbed, and the automatic adjustment of the fit between the cavity cover 20 and the cavity 10 is realized when the cavity cover 20 and the cavity 10 are closed, thereby improving the airtightness of the cavity cover 20 covering the cavity 10.

[0054] The technical features of the above-described embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0055] The above-mentioned embodiments only express several implementation methods of the utility model, and the description is relatively specific and detailed, but it cannot be understood as limiting the scope of the utility model patent. It should be pointed out that for ordinary technicians in this field, several modifications and improvements can be made without departing from the concept of the utility model, which all belong to the protection scope of the utility model. Therefore, the protection scope of the utility model patent shall be based on the attached claims.

Claims

1. A flip cover mechanism, characterized in that: include: A cavity, wherein a coating chamber is arranged in the cavity; A chamber cover connected to the chamber body, the chamber cover is sealed on the coating chamber; A hinge assembly is installed between the cavity and the cavity cover; the hinge assembly includes a mounting seat, a rotating shaft and a flap; the mounting seat is connected to the cavity, the rotating shaft is connected to the mounting seat, the flap is rotatably connected to the rotating shaft, and the flap is connected to the cavity cover to hinge the cavity cover on the cavity; a through hole is provided on the flap, the rotating shaft is provided in the through hole, and a gap is provided between the inner side wall of the through hole and the outer curved surface of the rotating shaft; and A telescopic member, wherein the telescopic member is respectively connected to the cavity and the cavity cover, and the telescopic member is used to drive the cavity cover to rotate relative to the cavity.

2. The flip cover mechanism according to claim 1, characterized in that: An extension plate is arranged on the cavity cover; the extension plate extends from the cavity cover toward the cavity body, and the telescopic member is hinged to the extension plate.

3. The flip cover mechanism according to claim 2, characterized in that: A fixing plate is arranged on the cavity; one end of the telescopic member away from the extension plate is hinged to the fixing plate, and the hinge assembly is arranged between the extension plate and the fixing plate.

4. The flip cover mechanism according to claim 1, characterized in that: The angle between the cavity cover and the cavity is λ; Wherein, when the cavity cover is in an open state, λ>90°.

5. The flip cover mechanism according to claim 4, characterized in that: The included angle between the cavity cover and the cavity body is λ≤91.5°.

6. The flip cover mechanism according to claim 1, characterized in that: The mounting seat includes a fixing portion and a support plate portion; the fixing portion is connected to the cavity, the support plate portion is extended from the fixing portion in a direction away from the cavity, and the rotating shaft is passed through the support plate portion.

7. The flip cover mechanism according to claim 6, characterized in that: The flap comprises a rotating part, a connecting part and a limiting part; the rotating part is sleeved on the outer side of the rotating shaft, the through hole passes through the rotating part, the connecting part is extended from the rotating part toward the cavity cover, the connecting part is connected to the cavity cover, and the limiting part is convexly arranged on a side of the rotating part away from the limiting part; Wherein, when the cavity cover is in an open state, the limiting portion abuts against the fixing portion.

8. The flip cover mechanism according to claim 7, characterized in that: A spring pin is arranged on the support plate portion; when the cavity cover is in an open state, a pin hole is opened at the corresponding position of the rotating portion and the spring pin, and the spring pin is inserted into the pin hole to relatively lock the flap and the mounting seat.

9. The flip cover mechanism according to claim 1, characterized in that: The flip cover mechanism also includes a detection component; the detection component includes a sensing element and a trigger block; one of the sensing element and the trigger block is fixed on the cavity body, and the other is fixed on the cavity cover, and the setting positions of the sensing element and the trigger block correspond.

10. The flip cover mechanism according to claim 1, characterized in that: A locker is arranged on the cavity; the locker is buckled with the cavity cover to fix the cavity cover on the cavity.

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