Crystal growth furnace device
By introducing an adjustable crystal growth furnace device into the crystal growth equipment, the heat field unevenness caused by the non-parallel core tube and the heating furnace is solved, and the material loading and unloading process is simplified, and the quality and efficiency of crystal growth are improved.
Patent Information
- Application Number
- CN202420518604.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-03-15
- Publication Date
- 2024-12-10
- Estimated Expiration
- 2034-03-15
AI Technical Summary
During the heating process, the core tube and the heating furnace are not parallel to the heating furnace due to manual loading, resulting in uneven heat field. At the same time, the fixed heating furnace is set to make it inconvenient for staff to load and unload.
A crystal-growing furnace device is designed, including a heating furnace, a rotary shaft assembly, an angle adjustment mechanism and a lifting mechanism. The angle adjustment and height adjustment of the heating furnace are realized by driving the rotary shaft assembly and a lifting mechanism, ensuring that the core tube is parallel to the heating furnace and improving heat. Field uniformity and facilitate material loading and unloading.
Through the use of the lifting mechanism, fine-tuning of the core tube height and flexible adjustment of the heating furnace angle are achieved, which enhances the operation flexibility of the equipment, improves the quality and efficiency of crystal growth, and simplifies the material processing process.
Smart Images
Figure CN222139347U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of semiconductor crystal material manufacturing, in particular to a crystal growth furnace device. Background Art
[0002] In the semiconductor industry, crystal growth technology is one of the core processes and is essential for manufacturing high-performance microelectronic and optoelectronic devices. For example, the Czochralski method is prone to non-uniformity during the heating process. Especially when growing large-sized crystals or complex structure crystals, manual loading may cause the core tube to be non-parallel to the heating furnace, resulting in uneven thermal field when heating crystal growth. In addition, since the heating furnace of existing crystal growth equipment is usually fixed, it is inconvenient for workers to load and unload materials. Utility Model Content
[0003] The technical problem to be solved by the utility model is that the manual loading of existing crystal growth equipment may cause the core tube to be non-parallel with the heating furnace, resulting in uneven thermal field when heating crystal growth. In addition, since the heating furnace of the existing crystal growth equipment is usually fixed, it causes inconvenience for the staff when loading and unloading.
[0004] In order to solve the above technical problems, the utility model provides a crystal growth furnace device, including a heating furnace, a rotating shaft assembly, an angle adjustment mechanism, a lifting mechanism and a furnace frame, the heating furnace having a heating chamber for placing a core tube, the heating chamber running through both ends of the heating furnace, the heating furnace being installed on the furnace frame through the rotating shaft assembly, and suspended above the lifting mechanism, the angle adjustment mechanism being connected to the rotating shaft assembly to drive the rotating shaft assembly to rotate and thereby drive the heating furnace to rotate, and the lifting mechanism being used to drive the core tube to perform lifting motion along a first direction.
[0005] In some embodiments, the angle adjustment mechanism includes a first drive member, a first reducer, a chain and two sprockets, the first drive member is connected to the first reducer, one sprocket is connected to the rotating shaft assembly, the other sprocket is connected to the first reducer, and the two sprockets are connected by the chain.
[0006] In some embodiments, it also includes a tensioning assembly installed on the furnace frame, the tensioning assembly includes a mounting seat, a movable seat assembly and a tensioning wheel, the mounting seat is installed on the furnace frame, and the mounting seat has a receiving cavity and a slide groove connected to the receiving cavity, the movable seat assembly is movably installed in the receiving cavity, one side of the movable seat assembly is connected to the tensioning wheel through the slide groove, so that the tensioning wheel is driven by the movable seat assembly to move to a preset position and abut against the chain.
[0007] In some embodiments, the movable seat assembly includes a movable base, a force-applying member and a spring member. The movable base is movably disposed in the accommodating cavity, and one side passes through the slide groove to be connected to the tensioning wheel. One end of the force-applying member passes through the mounting seat and abuts against the movable base, and the force-applying member is threadedly connected to the mounting seat. The two ends of the spring member respectively abut against a side of the movable base away from the force-applying member and an inner wall of the accommodating cavity.
[0008] In some embodiments, the furnace frame has a rotating shaft seat, and the rotating shaft assembly includes a rotating shaft, a clamping block, a pressure cover and a limiting ring. The rotating shaft frame is arranged on the rotating shaft seat, and the pressure cover is arranged on the rotating shaft and is connected to the rotating shaft seat. One end of the rotating shaft passes through the clamping block and is connected to the heating furnace, and the clamping block is in contact with the outer wall of the heating furnace. The other end of the rotating shaft is connected to the angle adjustment mechanism, and the limiting ring is arranged on the circumference of the rotating shaft and is connected to the pressure cover and the rotating shaft seat.
[0009] In some embodiments, there are two rotating shaft assemblies, which are arranged on two sides of the heating furnace opposite to each other, and the angle adjustment mechanism is connected to one of the rotating shaft assemblies.
[0010] In some embodiments, the lifting mechanism includes a lifting platform, a second driving member, a second reducer, a linear guide rod, a bearing and a commutator. The linear guide rod passes through the furnace frame and is connected to the lifting platform, and the bearing is arranged between the linear guide rod and the lifting platform so that the linear guide rod is movably connected to the furnace frame, the output end of the commutator is connected to the lifting platform, and the input end of the commutator is connected to the second driving member through the second reducer.
[0011] In some embodiments, the heating furnace includes a heat-insulating layer having the heating chamber, a shell, and a plurality of heating elements. The shell is enclosed outside the heat-insulating layer, and the plurality of heating elements are sequentially spaced apart along the axial direction of the heat-insulating layer.
[0012] In some embodiments, the heating furnace also includes a plurality of temperature sensors, an installation gap is formed between two adjacent heating elements, the plurality of temperature sensors are sequentially arranged at corresponding installation gaps along the axial direction of the insulation layer, and there is at least one installation gap between two adjacent temperature sensors.
[0013] In some embodiments, a touch screen and a control unit are also included, the furnace frame includes a base and a support frame, one end of the support frame is fixed to the base, and the other end of the support frame is installed with the rotating shaft seat, the control unit is electrically connected to the touch screen, the angle adjustment mechanism and the lifting mechanism, and the touch screen, the angle adjustment mechanism and the lifting mechanism are installed on the base.
[0014] Compared with the prior art, the crystal growth furnace device of the present utility model has the following beneficial effects:
[0015] The embodiment of the utility model drives the core tube to perform lifting movement along the first direction through the lifting mechanism, so as to fine-tune the height of the core tube during the crystal growth process to adapt to different growth strategies or maintain suitable growth conditions. In addition, the setting of the lifting mechanism can also facilitate the operator to load and unload materials before and after the crystal growth, and can also change the angle of the heating furnace by driving the rotating shaft assembly to facilitate the operator to load and unload materials. At the same time, the angle of the heating furnace can be adjusted during loading so that it remains parallel to the core tube, so that the thermal field is uniform when heating the crystal, thereby enhancing the operational flexibility of the equipment and improving the controllability of the crystal growth conditions, which is beneficial to improving the quality and efficiency of crystal growth, and also facilitates material handling in actual operation. BRIEF DESCRIPTION OF THE DRAWINGS
[0016] Figure 1 It is a structural schematic diagram of a crystal growth furnace device provided in an embodiment of the utility model;
[0017] Figure 2 It is a side view of a crystal growth furnace device provided by an embodiment of the utility model;
[0018] Figure 3 It is a side view of the heating furnace of the crystal growth furnace device provided by the embodiment of the utility model when it is rotating;
[0019] Figure 4 is a cross-sectional view of a crystal growth furnace device provided by an embodiment of the utility model;
[0020] Figure 5 It is a structural schematic diagram of the lifting mechanism provided by an embodiment of the utility model;
[0021] Figure 6 It is a side view of the lifting mechanism provided by the embodiment of the utility model;
[0022] In the figure, 1, heating furnace; 11, heating chamber; 12, insulation layer; 13, shell; 14, heating element; 15, temperature sensor; 2, shaft assembly; 21, shaft; 22, clamping block; 23, pressure cover; 24, limit ring; 3, angle adjustment mechanism; 31, first driving member; 32, first reducer; 33, chain; 34, sprocket; 4, lifting mechanism; 41, lifting platform; 42, second driving member; 43, second reducer; 44, linear guide rod; 45, bearing; 46, reversing machine; 5, furnace frame; 51, shaft seat; 52, base; 521, top plate; 522, bottom plate; 523, support column; 53, support frame; 6, core tube; 7, tensioning assembly; 71, mounting seat; 72, moving seat assembly; 721, force applying member; 73, tensioning wheel; 8, touch screen. DETAILED DESCRIPTION
[0023] The following is a further detailed description of the specific implementation of the present invention in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.
[0024] like Figures 1 to 3 As shown, the utility model provides a crystal growth furnace device, including a heating furnace 1, a rotating shaft assembly 2, an angle adjustment mechanism 3, a lifting mechanism 4 and a furnace frame 5. The heating furnace 1 has a heating chamber 11 for placing a core tube 6. The heating chamber 11 runs through both ends of the heating furnace 1. The heating chamber 11 provides a high-temperature environment for melting raw materials and growing crystals. The heating furnace 1 is installed on the furnace frame 5 through the rotating shaft assembly 2 and is suspended above the lifting mechanism 4. The angle adjustment mechanism 3 is connected to the rotating shaft assembly 2 to drive the heating furnace 1 to rotate by driving the rotating shaft assembly 2 to rotate, so that the heating furnace 1 can adjust its inclination angle. The lifting mechanism 4 is used to drive the core tube 6 to perform lifting movement along a first direction.
[0025] Based on the above structure, in this embodiment, the core tube 6 is driven to perform lifting movement along the first direction through the lifting mechanism 4, so as to fine-tune the height of the core tube 6 during the crystal growth process to adapt to different growth strategies or maintain suitable growth conditions. In addition, the setting of the lifting mechanism 4 can also facilitate the operator to load and unload materials before and after the crystal growth, and can also change the angle of the heating furnace 1 by driving the rotating shaft assembly 2 to facilitate the operator to load and unload materials. At the same time, the angle of the heating furnace can be adjusted during loading and unloading so that it remains parallel to the core tube, so that the thermal field is uniform when heating the crystal, thereby enhancing the operational flexibility of the equipment and improving the controllability of the crystal growth conditions, which is beneficial to improving the quality and efficiency of crystal growth, and also facilitates material handling in actual operation.
[0026] It should be noted that the core tube 6 of this embodiment is a quartz tube as an example. In addition, the first direction is along the height direction of the device.
[0027] like Figure 1As shown, in some embodiments, the angle adjustment mechanism 3 includes a first driving member 31, a first reducer 32, a chain 33 and two sprockets 34. The first driving member 31 provides driving force for the entire angle adjustment process. The first driving member 31 is connected to the first reducer 32 to convert the high-speed power generated by the first driving member 31 into a low-speed high-torque output, which is convenient for rotating the heating furnace 1. The sprocket 34 is used as a transmission member, one of the sprockets 34 is connected to the shaft assembly 2, and the other sprocket 34 is connected to the first reducer 32, and the two sprockets 34 are connected through the chain 33, forming a closed power transmission path. When the first driving member 31 is started and drives the sprocket 34 to rotate through the first reducer 32, the chain 33 will drive the other sprocket 34 and the shaft assembly 2 to rotate synchronously, and finally achieve accurate adjustment of the angle of the heating furnace 1.
[0028] In this embodiment, the first driving member 31, the first reducer 32, the sprocket 34 and the chain 33 work together to effectively control and adjust the rotation angle of the heating furnace 1, thereby improving the convenience of loading and unloading during the preparation process.
[0029] In some embodiments, a tensioning assembly 7 is also included which is installed on the furnace frame 5. The tensioning assembly 7 ensures that the chain 33 maintains appropriate tension during the transmission process to prevent the chain 33 from affecting the transmission efficiency and stability due to relaxation, or even causing faults such as tooth jumping and breakage.
[0030] Specifically, the tensioning assembly 7 includes a mounting seat 71, a movable seat assembly 72 and a tensioning wheel 73. The mounting seat 71 is installed on the furnace frame 5, and the mounting seat 71 has a receiving cavity and a slide groove connected to the receiving cavity. The movable seat assembly 72 is movably installed in the receiving cavity so as to slide back and forth in the receiving cavity along the extension direction of the receiving cavity. The tensioning wheel 73 serves as a component that contacts and applies pressure on the chain 33 to adjust the tensioning state of the chain 33. One side of the movable seat assembly 72 is connected to it through the slide groove so as to drive the tensioning wheel 73 to move to a preset position and abut the chain 33 through the movable seat assembly 72.
[0031] In this embodiment, when it is necessary to adjust the tension of the chain 33, the operator can make the movable seat assembly 72 slide in the accommodating cavity through an external control mechanism or external force. As the movable seat assembly 72 moves, the tensioning wheel 73 also changes its position relative to the chain 33 until the tensioning wheel 73 is close to the chain 33 and exerts appropriate pressure on it at a preset position, so as to ensure that the chain 33 is always in a suitable tension state during the entire transmission process, ensure the reliable operation of the transmission system, and reduce various potential problems caused by the loosening of the chain 33.
[0032] In some embodiments, the movable seat assembly 72 includes a movable base, a force-applying member 721 and a spring member. The movable base is movably arranged in the accommodating cavity, and one side passes through a slide groove to be connected to the tensioning wheel 73. One end of the force-applying member 721 passes through the mounting seat 71 and abuts against the movable base, and the force-applying member 721 is threadedly connected to the mounting seat 71. The two ends of the spring member respectively abut against a side of the movable base away from the force-applying member 721 and an inner wall of the accommodating cavity, so that when the force-applying member 721 controls the moving position of the movable base, the spring member can provide a corresponding abutting force to cooperate with the force-applying member 721 to limit the movement of the movable base.
[0033] In some embodiments, the furnace frame 5 has a rotating shaft seat 51, and the rotating shaft assembly 2 includes a rotating shaft 21, a clamping block 22, a pressure cover 23 and a limit ring 24. The rotating shaft seat 51 provides a basic support point for the rotating shaft assembly 2 to rotate stably. The rotating shaft 21 has the function of bearing and transmitting rotational power. It is mounted on the rotating shaft seat 51, and one end of the rotating shaft 21 passes through the clamping block 22 and is connected to the heating furnace 1, and the other end is connected to the angle adjustment mechanism 3. The clamping block 22 fits with the outer wall of the heating furnace 1 to ensure that the heating furnace 1 is stable and does not shake during rotation, and at the same time plays a role in transmitting rotational power; in addition, the pressure cover 23 is covered on the rotating shaft 21 and connected to the rotating shaft seat 51, which not only protects the rotating shaft 21 from external interference, but also fixes the position of the rotating shaft 21 to ensure that it does not move axially. At the same time, the limiting ring 24 is sleeved on the side of the rotating shaft 21 and connected to the pressure cover 23 and the rotating shaft seat 51. On the one hand, it limits the radial movement of the rotating shaft 21 to prevent it from deviating from the center during the rotation process; on the other hand, it may also be used to limit the maximum rotation angle of the rotating shaft 21 to ensure that the heating furnace 1 rotates safely within the set range without excessive deflection. This embodiment realizes the rotational freedom of the heating furnace 1 relative to the furnace frame 5 through the above structure, and through the drive of the angle adjustment mechanism 3, the heating furnace 1 can be accurately controlled to tilt within a certain angle range.
[0034] In some embodiments, there are two rotating shaft assemblies 2 , which are arranged on two sides of the heating furnace 1 , and the angle adjustment mechanism 3 is connected to one rotating shaft assembly 2 .
[0035] In this embodiment, two rotating shaft assemblies 2 are symmetrically arranged on both sides of the heating furnace 1 to evenly disperse the weight of the heating furnace 1 and the stress generated during rotation, thereby enhancing the mechanical stability of the entire device and ensuring that the heating furnace 1 can be supported and driven to rotate in a balanced and stable manner during rotation. It should be noted that the angle adjustment mechanism 3 of this embodiment can be directly connected to only one of the rotating shaft assemblies 2, and by driving this rotating shaft assembly 2, the other rotating shaft assembly 2 is indirectly driven to rotate synchronously, so that the heating furnace 1 can accurately and smoothly rotate according to the preset angle.
[0036] In some embodiments, an outer cover is also included, which is connected to the furnace frame 5 and is arranged around the chain 33 to form a physical barrier, wrapping and shielding the chain 33 to prevent the operator from accidentally touching the chain 33 or other moving parts, thereby reducing safety hazards. In addition, it can also prevent dust, moisture or other impurities from entering the transmission area of the chain 33, protect the chain 33 from pollution, extend the service life of the chain 33, and ensure the smooth operation of the transmission system.
[0037] like Figure 5 and Figure 6 As shown, in some embodiments, the lifting mechanism 4 includes a lifting platform 41, a second driving member 42, a second reducer 43, a linear guide rod 44, a bearing 45 and a commutator 46. The lifting platform 41 is used to carry and lift the quartz tube. The linear guide rod 44 passes through the furnace frame 5 and is connected to the lifting platform 41 to play a guiding and supporting role, ensuring that the lifting platform 41 can reciprocate in a straight line in the vertical direction without deflection, and a bearing 45 is provided between the linear guide rod 44 and the lifting platform 41 so that the linear guide rod 44 is movably connected to the furnace frame 5 to ensure that the linear guide rod 44 and the lifting platform 41 can slide relative to each other, while bearing and reducing the friction between the two, ensuring that the lifting process is smoother. In addition, the second drive member 42 serves as the power source for the lifting action, providing the energy required to move the lifting platform 41 up and down. The commutator 46 serves as a transmission device. The output end of the commutator 46 is connected to the lifting platform 41, and the rise and fall of the lifting platform 41 are controlled by changing the direction of movement. The input end of the commutator 46 is connected to the second drive member 42 through the second reducer 43. The second reducer 43 reduces the output speed of the drive member and increases the torque to meet the torque required for the lifting platform 41 to lift smoothly and powerfully. The commutator 46 receives power from the second drive member 42 through the second reducer 43, and converts this power into a linear motion that meets the lifting requirements.
[0038] It should be noted that when the quartz tube is heated in the heating furnace 1, the lifting speed of the lifting mechanism 4 is 0.1-1 mm / h, and when loading and unloading, the lifting speed of the lifting mechanism 4 is 150 mm / min.
[0039] like Figure 4 As shown, in some embodiments, the heating furnace 1 includes an insulation layer 12 having a heating chamber 11, a shell 13, and a plurality of heating elements 14. The insulation layer 12 is used to reduce heat loss, ensure that the high temperature in the furnace can be effectively maintained and not quickly dissipated to the external environment, thereby improving heating efficiency and reducing energy consumption. The shell 13 is enclosed outside the insulation layer 12 to provide a certain mechanical strength and external protection. The plurality of heating elements 14 are arranged in sequence along the axial direction of the insulation layer 12, so that a uniform temperature distribution is formed in the entire heating chamber 11, reducing the temperature gradient and ensuring the stability and controllability of the heating process.
[0040] It should be noted that the heating furnace 1 of this embodiment uses materials with high thermal conductivity and low thermal expansion coefficient to reduce heat loss and deformation.
[0041] In some embodiments, the heating furnace 1 also includes multiple temperature sensors 15 for real-time monitoring of the temperature conditions at different positions in the furnace to ensure the accuracy and safety of temperature control during the heating process, wherein an installation gap is formed between two adjacent heating elements 14, and multiple temperature sensors 15 are sequentially arranged at corresponding installation gaps along the axial direction of the insulation layer 12, and there is at least one installation gap between two adjacent temperature sensors 15.
[0042] The heating elements 14 and the temperature sensors 15 of this embodiment are arranged alternately in the above manner, and can monitor the temperature of each zone in the furnace in real time, so as to more accurately reflect the actual temperature conditions of different areas and avoid local measurement errors affecting the overall temperature control.
[0043] In some embodiments, a touch screen 8 and a control unit are also included. The furnace frame 5 includes a base 52 and a support frame 53. One end of the support frame 53 is fixed on the base 52, and a rotating shaft seat 51 is installed on the other end of the support frame 53. The control unit is electrically connected to the touch screen 8, the angle adjustment mechanism 3, the heating furnace 1 and the lifting mechanism 4. The touch screen 8, the angle adjustment mechanism 3 and the lifting mechanism 4 are installed on the base 52.
[0044] The base 52 of this embodiment is composed of a top plate 521, a bottom plate 522 and a plurality of support columns 523. The bottom plate 522 and the top plate 521 are connected via the support columns 523. The touch screen 8 and the first driving member 31 and the second driving member 42 are all arranged on the bottom plate 522. One end of the support frame 53 is connected to the bottom plate 522, and the other end is arranged through the top plate 521. In addition, one end of the linear guide rod 44 passes through the bottom plate 522 and the top plate 521 in sequence to be connected to the lifting platform 41, and a limiting portion is provided at one end of the linear guide rod 44 for limiting the end of the linear guide rod 44.
[0045] It should be noted that the control unit of this embodiment is also electrically connected to the temperature sensor 15 and the heating element 14 of the heating furnace 1, so as to realize automatic over-temperature alarm and power cut-off through the monitoring of the temperature sensor 15.
[0046] The working process is as follows: fill the raw materials evenly into the quartz tube, extract the gas in the tube to make it reach a vacuum state. Start the heating element 14 to heat the raw materials to a molten state to form a melt. After the crystal is formed on the surface of the melt, slowly lift the lifting platform 41 to make the crystal gradually grow out of the melt, and by controlling the pulling speed, temperature, atmosphere and other parameters, ensure the quality and stability of the crystal growth. After the crystal growth is completed, turn off the heating system to allow the crystal to cool naturally in the furnace. After the crystal is cooled, take it out of the crystal growth furnace.
[0047] In summary, an embodiment of the utility model provides a crystal growth furnace device, which fine-tunes the height of the core tube 6 during the crystal growth process to adapt to different growth strategies or maintain suitable growth conditions. In addition, the setting of the lifting mechanism 4 can also facilitate the operator to load and unload materials before and after crystal growth, and can also change the angle of the heating furnace 1 by driving the rotating shaft assembly 2 to facilitate the operator to load and unload materials. At the same time, the angle of the heating furnace can be adjusted during loading so that it remains parallel to the core tube, so that the thermal field is uniform when heating the crystal, thereby enhancing the operational flexibility of the equipment and improving the controllability of the crystal growth conditions, which is beneficial to improving the quality and efficiency of crystal growth, and also facilitates material handling in actual operation.
[0048] The above is only a preferred embodiment of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and substitutions can be made without departing from the technical principle of the present invention. These improvements and substitutions should also be regarded as the protection scope of the present invention.
Claims
1. A crystal growth furnace device, characterized in that: The invention comprises a heating furnace, a rotating shaft assembly, an angle adjustment mechanism, a lifting mechanism and a furnace frame. The heating furnace has a heating chamber for placing a core tube, and the heating chamber runs through both ends of the heating furnace. The heating furnace is installed on the furnace frame through the rotating shaft assembly and is suspended above the lifting mechanism. The angle adjustment mechanism is connected to the rotating shaft assembly to drive the rotating shaft assembly to rotate and then drive the heating furnace to rotate. The lifting mechanism is used to drive the core tube to perform lifting motion along a first direction.
2. The crystal growth furnace device according to claim 1, characterized in that: The angle adjustment mechanism includes a first driving member, a first reducer, a chain and two sprockets, the first driving member is connected to the first reducer, one sprocket is connected to the rotating shaft assembly, the other sprocket is connected to the first reducer, and the two sprockets are connected by the chain.
3. The crystal growth furnace device according to claim 2, characterized in that: It also includes a tensioning assembly installed on the furnace frame, the tensioning assembly includes a mounting seat, a movable seat assembly and a tensioning wheel, the mounting seat is installed on the furnace frame, and the mounting seat has a receiving cavity and a slide groove connected to the receiving cavity, the movable seat assembly is movably installed in the receiving cavity, one side of the movable seat assembly is connected to the tensioning wheel through the slide groove, so that the tensioning wheel is driven by the movable seat assembly to move to a preset position and abut against the chain.
4. The crystal growth furnace device according to claim 3, characterized in that: The movable seat assembly includes a movable base, a force-applying member and a spring member. The movable base is movably arranged in the accommodating cavity, and one side of the movable base passes through the slide groove and is connected to the tensioning wheel. One end of the force-applying member passes through the mounting seat and abuts against the movable base, and the force-applying member is threadedly connected to the mounting seat. Two ends of the spring member respectively abut against a side of the movable base away from the force-applying member and an inner wall of the accommodating cavity.
5. The crystal growth furnace device according to claim 1, characterized in that: The furnace frame has a rotating shaft seat, and the rotating shaft assembly includes a rotating shaft, a clamping block, a pressure cover and a limiting ring. The rotating shaft is mounted on the rotating shaft seat, and the pressure cover is covered on the rotating shaft and connected to the rotating shaft seat. One end of the rotating shaft passes through the clamping block and is connected to the heating furnace. The clamping block is in contact with the outer wall of the heating furnace, and the other end of the rotating shaft is connected to the angle adjustment mechanism. The limiting ring is sleeved on the circumference of the rotating shaft and is connected to the pressure cover and the rotating shaft seat.
6. The crystal growth furnace device according to claim 1 or 5, characterized in that: There are two rotating shaft assemblies which are arranged oppositely at two sides of the heating furnace, and the angle adjustment mechanism is connected to one of the rotating shaft assemblies.
7. The crystal growth furnace device according to claim 1, characterized in that: The lifting mechanism includes a lifting platform, a second driving member, a second reducer, a linear guide rod, a bearing and a commutator. The linear guide rod passes through the grate and is connected to the lifting platform, and the bearing is arranged between the linear guide rod and the lifting platform so that the linear guide rod is movably connected to the grate. The output end of the commutator is connected to the lifting platform, and the input end of the commutator is connected to the second driving member through the second reducer.
8. The crystal growth furnace device according to claim 1, characterized in that: The heating furnace comprises a heat-insulating layer having the heating cavity, a shell and a plurality of heating elements. The shell is enclosed outside the heat-insulating layer, and the plurality of heating elements are sequentially spaced along the axial direction of the heat-insulating layer.
9. The crystal growth furnace device according to claim 8, characterized in that: The heating furnace also includes a plurality of temperature sensors, an installation gap is formed between two adjacent heating elements, the plurality of temperature sensors are sequentially arranged at intervals corresponding to the installation gaps along the axial direction of the insulation layer, and there is at least one installation gap between two adjacent temperature sensors.
10. The crystal growth furnace device according to claim 4, characterized in that: It also includes a touch screen and a control unit. The furnace frame includes a base and a support frame. One end of the support frame is fixed to the base, and the other end of the support frame is installed with the rotating shaft seat. The control unit is electrically connected to the touch screen, the angle adjustment mechanism and the lifting mechanism. The touch screen, the angle adjustment mechanism and the lifting mechanism are installed on the base.